JPH087232A - Magnetic sensor device - Google Patents
Magnetic sensor deviceInfo
- Publication number
- JPH087232A JPH087232A JP6164536A JP16453694A JPH087232A JP H087232 A JPH087232 A JP H087232A JP 6164536 A JP6164536 A JP 6164536A JP 16453694 A JP16453694 A JP 16453694A JP H087232 A JPH087232 A JP H087232A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- detected
- information
- sensor device
- magnetoresistive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 44
- 230000004907 flux Effects 0.000 claims abstract description 38
- 238000002347 injection Methods 0.000 claims description 26
- 239000007924 injection Substances 0.000 claims description 26
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 238000002513 implantation Methods 0.000 abstract 3
- 241001640034 Heteropterys Species 0.000 abstract 1
- 239000000696 magnetic material Substances 0.000 description 27
- 238000010586 diagram Methods 0.000 description 9
- 239000011159 matrix material Substances 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910000976 Electrical steel Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
- Inspection Of Paper Currency And Valuable Securities (AREA)
- Magnetic Heads (AREA)
- Hall/Mr Elements (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、紙幣上に設置された紙
幣識別用の微小磁性体や、IDカード等の紙葉状媒体に
設置された磁気コードや、ガスボンベ等のタグに設置さ
れる磁性情報を検出する高分解能型の磁気センサ装置に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic material installed on a bill, such as a minute magnetic material for identifying a banknote, a magnetic code installed on a sheet-shaped medium such as an ID card, or a tag such as a gas cylinder. The present invention relates to a high resolution type magnetic sensor device for detecting information.
【0002】[0002]
【従来の技術】紙幣や磁気カード等に磁性体によって設
置されている情報を検出する磁気センサ装置が情報処理
装置の分野やその類似分野に広く用いられている。この
種の磁気センサ装置は、図10の(a)に示すように、永
久磁石(バイアスマグネット)1の上面に1対の磁気抵
抗素子2a,2bを装着したもので、この磁気抵抗素子
2a,2bは図11に示すように直列に接続され、この直
列回路の一方側を電源ラインに接続し、他端側をグラン
ドラインに接続して、分圧回路とし、磁気抵抗素子2
a,2bの直列接続部から信号取り出し部を引き出した
ものである。2. Description of the Related Art A magnetic sensor device for detecting information installed on a bill or a magnetic card by a magnetic material is widely used in the field of information processing devices and similar fields. In this type of magnetic sensor device, as shown in FIG. 10 (a), a pair of magnetoresistive elements 2a and 2b are mounted on the upper surface of a permanent magnet (bias magnet) 1. 2b are connected in series as shown in FIG. 11, one side of this series circuit is connected to the power supply line, and the other side is connected to the ground line to form a voltage dividing circuit.
The signal take-out portion is drawn out from the serial connection portion of a and 2b.
【0003】この磁気センサ装置は被検出体3の走行経
路上(走行空間)に設置され、被検出体3が磁気抵抗素
子2aの上側を対向して通過するときに、永久磁石1の
バイアス磁界が磁気抵抗素子2aを集中して通過する結
果、磁気抵抗素子2aの磁気抵抗が大きく変化し、磁気
センサ装置から図10の(b)に示すように上側に凸とな
る出力波形の信号が得られ、次に、被検出体3が磁気抵
抗素子2bに対向する位置に来たときに、今度は、永久
磁石1のバイアス磁界が磁気抵抗素子2b側を集中して
通過する結果、磁気抵抗素子2bの磁気抵抗が大きく変
化し、これにより、磁気センサ装置から下に凸となる出
力波形の時系列信号が得られる。この磁気センサ装置の
出力信号を解析することにより、紙幣や磁気カード等の
紙葉状媒体に設置されている磁性体の情報が読み取られ
る。This magnetic sensor device is installed on the traveling path (traveling space) of the body to be detected 3, and when the body to be detected 3 passes above the magnetoresistive element 2a while facing it, the bias magnetic field of the permanent magnet 1 is generated. As a result of concentrated passage through the magnetoresistive element 2a, the magnetic resistance of the magnetoresistive element 2a changes significantly, and a signal having an output waveform that is convex upward as shown in FIG. 10B is obtained from the magnetic sensor device. Next, when the detected body 3 comes to a position facing the magnetoresistive element 2b, this time, the bias magnetic field of the permanent magnet 1 concentrates and passes through the magnetoresistive element 2b side. The magnetic resistance of 2b is greatly changed, whereby a time-series signal having an output waveform which is convex downward is obtained from the magnetic sensor device. By analyzing the output signal of the magnetic sensor device, the information of the magnetic material installed on the paper-shaped medium such as a bill or a magnetic card can be read.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、この種
の磁気センサ装置の如く、被検出体3を走行経路に沿っ
て搬送する方式のものは、被検出体3と磁気抵抗素子2
a,2bとの隙間間隔を一定に保持するのが非常に困難
である。周知のように、永久磁石1から発せられるバイ
アス磁界は分散形となるため、前記隙間間隔が変動する
と、被検出体3を横切るバイアス磁界の幅が変動する結
果、被検出体が連続して走行すると、磁気センサ装置の
出力波形が乱れ、分解能が低下し、検出の信頼性が損な
われるという問題が生じる。However, the magnetic sensor device of this type, which conveys the detected body 3 along the traveling path, has the detected body 3 and the magnetoresistive element 2.
It is very difficult to keep the gap between a and 2b constant. As is well known, since the bias magnetic field generated from the permanent magnet 1 is of a dispersed type, if the gap spacing changes, the width of the bias magnetic field that traverses the detection object 3 changes, and as a result, the detection object runs continuously. Then, the output waveform of the magnetic sensor device is disturbed, the resolution is lowered, and the reliability of detection is impaired.
【0005】本出願人は、前記隙間間隔の変動に起因す
る分解能の低下を防止するものとして、図8に示すよう
な磁気センサ装置を特許出願によって提案している。こ
の提案装置は、筐体4の上下中間部に被検出体3の走行
空間5を設け、この走行空間の下側の筐体4内には、永
久磁石1を配設し、この永久磁石1の上面には必要に応
じサブストレート(図示せず)を介して分圧回路を形成
している磁気抵抗素子2a,2bを配置し、磁気抵抗素
子2a,2bの上面を走行空間5に臨ませている。The applicant of the present invention has proposed a magnetic sensor device as shown in FIG. 8 by a patent application in order to prevent the deterioration of the resolution due to the variation of the gap distance. The proposed apparatus has a traveling space 5 for the body to be detected 3 in an upper and lower intermediate portion of a casing 4, and a permanent magnet 1 is arranged in the casing 4 below the traveling space. The magnetoresistive elements 2a and 2b forming a voltage dividing circuit are arranged on the upper surface of the magnetoresistive element through a substrate (not shown) as necessary, and the upper surfaces of the magnetoresistive elements 2a and 2b are exposed to the running space 5. ing.
【0006】走行空間5の上側の筐体4内には、形状磁
気異方性板6を被検出体3の走行経路に対して垂直に配
置し、形状磁気異方性板6の底面を磁気抵抗素子2a,
2b間に対向させている。In the housing 4 above the traveling space 5, a shape magnetic anisotropic plate 6 is arranged perpendicularly to the traveling path of the object 3 to be detected, and the bottom surface of the shape magnetic anisotropic plate 6 is magnetized. Resistance element 2a,
It faces between 2b.
【0007】このように、形状磁気異方性板6を配置す
ることにより、永久磁石1から出るバイアス磁界は形状
磁気異方性板6に集中して、磁気抵抗素子2a,2b間
に、永久磁石1から形状磁気異方性板6に向かう磁界に
よって磁気障壁を作り出し、走行空間5を通る被検出体
3と磁気抵抗素子2a,2bとの隙間間隔の変動が生じ
ても、被検出体3を横切る磁界の幅が変動しないように
して分解能の低下を来さないようにしようとするもので
ある。By arranging the shape magnetic anisotropy plate 6 in this way, the bias magnetic field emitted from the permanent magnet 1 is concentrated on the shape magnetic anisotropic plate 6 so that the magnetic field is permanently applied between the magnetoresistive elements 2a and 2b. A magnetic barrier is created by the magnetic field directed from the magnet 1 to the shape magnetic anisotropic plate 6, and even if the gap distance between the detected body 3 and the magnetoresistive elements 2a and 2b passing through the traveling space 5 changes, the detected body 3 The width of the magnetic field that traverses the magnetic field does not fluctuate so that the resolution does not decrease.
【0008】しかしながら、図9に示すように、永久磁
石1から形状磁気異方性板6に向かう磁界は、必ずしも
形状磁気異方性板6の底面に集中するとは限らず、永久
磁石1から出た磁界が外側に膨らんで分散形(発散形)
になった後、形状磁気異方性板6の両側面G,Hに入り
込むものが生じ、このときの分解能は、被検出体3の走
行通路7を磁界8,9が横切るEFの幅によって定ま
る。この形状磁気異方性板6の両側面に入り込む分散形
の磁界が生じると、分解能を定めるEFの幅が大きくな
り、期待したほど分解能の改善が図れないという問題が
ある。However, as shown in FIG. 9, the magnetic field directed from the permanent magnet 1 to the shape magnetic anisotropic plate 6 does not always concentrate on the bottom surface of the shape magnetic anisotropic plate 6, and is emitted from the permanent magnet 1. Magnetic field bulges outward and is distributed (divergent)
Then, some of them enter the both side surfaces G and H of the shape magnetic anisotropic plate 6, and the resolution at this time is determined by the width of the EF across which the magnetic fields 8 and 9 traverse the traveling path 7 of the detected body 3. . If a dispersed magnetic field that enters both side surfaces of the shape magnetic anisotropic plate 6 is generated, the width of the EF that determines the resolution becomes large, and there is a problem that the resolution cannot be improved as expected.
【0009】また、最近においては、被検出体3の高速
走行化が図られており、このような被検出体の高速走行
を行うためには、被検出体3と磁気抵抗素子2a,2b
間の間隙を大きくしなければならない。例えば、被検出
体3の低速走行においては、被検出体3と磁気抵抗素子
2a,2b間の間隙を、例えば0.1 mmと小さくできる
が、高速走行を行う場合には、例えば4mmという如く、
被検出体3と磁気抵抗素子2a,2b間の目詰まり等を
防ぐために、間隙を大きく取らなければならず、そうす
ると、必然的に永久磁石1から形状磁気異方性板6に向
かう磁界は分散形となるために、外側に膨らむこととな
り、分解能が低下するという問題が生じる。Recently, high speed running of the detected body 3 has been attempted, and in order to perform such high speed running of the detected body 3, the detected body 3 and the magnetoresistive elements 2a, 2b are provided.
The gap between them must be large. For example, when the detected body 3 travels at a low speed, the gap between the detected body 3 and the magnetoresistive elements 2a and 2b can be reduced to, for example, 0.1 mm, but when traveling at a high speed, for example, 4 mm.
In order to prevent clogging between the object to be detected 3 and the magnetoresistive elements 2a and 2b, it is necessary to make a large gap, which inevitably disperses the magnetic field from the permanent magnet 1 toward the shape magnetic anisotropic plate 6. Since it has a shape, it bulges outward, which causes a problem that the resolution is lowered.
【0010】さらに、ガスボンベ等のタグに設置された
磁性コードを読み取るような場合には、前記図8に示し
た構造の磁気センサ装置では、筐体4の中心部に走行空
間5を設け、この走行空間5の下面側に磁気抵抗素子2
a,2bを配置する構成であるため、ガスボンベ等のタ
グに磁気抵抗素子2a,2bの検出面をあてがうことが
できず、タグ等の露出表面の磁性コードを読み取ること
が困難となる。この点、図10に示したタイプの磁気セン
サ装置では磁気抵抗素子2a,2bの検出面側をタグに
対向させて磁性コードを読み取ることはできるが、前記
したように、永久磁石1から磁気抵抗素子2a,2bを
通る磁界は分散形となるために、分解能が落ち、コード
読み取りの信頼性の上で問題がある。Further, in the case of reading a magnetic code installed on a tag such as a gas cylinder, in the magnetic sensor device having the structure shown in FIG. 8, a traveling space 5 is provided at the center of the housing 4, The magnetoresistive element 2 is provided on the lower surface side of the traveling space 5.
Since the a and 2b are arranged, the detection surface of the magnetoresistive elements 2a and 2b cannot be applied to the tag such as the gas cylinder, and it becomes difficult to read the magnetic code on the exposed surface of the tag or the like. In this respect, in the magnetic sensor device of the type shown in FIG. 10, the magnetic code can be read by making the detection surface sides of the magnetoresistive elements 2a and 2b face the tag. Since the magnetic field passing through the elements 2a and 2b is of a dispersed type, the resolution is lowered and there is a problem in reliability of code reading.
【0011】本発明は上記従来の課題を解決するために
なされたものであり、その目的は、被検出体と磁気検出
面との間隙を大きくしても、高い分解能を保つことがで
き、さらに、タグ等の表面に形成されている磁性情報の
読み取り検出も容易、かつ、正確に行うことができる磁
気センサ装置を提供することにある。The present invention has been made to solve the above-mentioned conventional problems, and an object thereof is to maintain a high resolution even if the gap between the object to be detected and the magnetic detection surface is increased. Another object of the present invention is to provide a magnetic sensor device that can easily and accurately read and detect magnetic information formed on the surface of a tag or the like.
【0012】[0012]
【課題を解決するための手段】本発明は上記目的を達成
するために、次のように構成されている。すなわち、第
1の発明は、マグネットと、該マグネットによって磁気
バイアスされた1個以上の感磁性素子と、が配設され、
該感磁性素子に対向する被検出体の磁気情報を磁気バイ
アス量の変化で検出する磁気センサにおいて、該感磁性
素子と被検出体間に、バイアスマグネットから感磁性素
子を通る磁束を集中して被検出体の磁気情報に注ぐ磁束
注入ヨークが設けられていることを特徴として構成され
ている。In order to achieve the above object, the present invention is constructed as follows. That is, a first aspect of the present invention is provided with a magnet and one or more magnetically sensitive elements magnetically biased by the magnet,
In a magnetic sensor for detecting magnetic information of a detected body facing the magnetic sensitive element by a change in magnetic bias amount, a magnetic flux passing through the magnetic sensitive element from a bias magnet is concentrated between the magnetic sensitive element and the detected body. A magnetic flux injection yoke for pouring the magnetic information of the object to be detected is provided.
【0013】また、第2の発明は、前記第1の発明にお
ける被検出体の磁気情報を独立に検出する感磁性素子が
複数配列配置され、この磁気情報を独立に検出する各感
磁性素子の検出信号を順次切り替えて取り出す情報検出
手段が設けられていることを特徴として構成されてい
る。According to a second aspect of the present invention, a plurality of magnetic sensitive elements for independently detecting magnetic information of the object to be detected according to the first aspect of the present invention are arranged in an array, and each magnetic sensitive element for independently detecting the magnetic information is arranged. It is characterized in that an information detecting means for sequentially switching and extracting the detection signals is provided.
【0014】さらに、第3の発明は、前記第1の発明又
は第2の発明の構成において、感磁性素子は磁気抵抗素
子によって構成されていることを特徴として構成されて
いる。Further, a third invention is characterized in that, in the structure of the first invention or the second invention, the magnetic sensitive element is composed of a magnetoresistive element.
【0015】[0015]
【作用】上記構成の第1の発明において、例えば、被検
出体の表面に、情報コードが磁性材料と非磁性材料を配
列配置して形成されているような場合、この被検出体の
磁性コードの磁性材料が感磁性素子に対向すると、バイ
アスマグネットから感磁性素子を通る磁界は磁束注入ヨ
ークに集中し、この磁束注入ヨークから情報コードの磁
性材料に磁界(磁束)が集中して注ぎ込まれる。一方、
感磁性素子に情報コードの非磁性材料が対向したときに
も、バイアスマグネットからの磁界が、感磁性素子を通
った後、磁束注入ヨークを通して注ぎ込まれるが、感磁
性素子に磁性材料が対向したときと、非磁性材料が対向
したときとでは、磁性コード(磁気情報)を含む磁気回
路のレラクタンスがシャープに変化することで、感磁性
素子の磁気検出信号の出力レベルが変化し、この出力変
化により、被検出体の磁気情報が明確に読み取り検出さ
れる。In the first aspect of the invention having the above-mentioned structure, for example, when the information code is formed on the surface of the object to be detected by arranging the magnetic material and the non-magnetic material in an array, the magnetic code of the object to be detected. When the magnetic material of (1) faces the magnetic sensitive element, the magnetic field passing through the magnetic sensitive element from the bias magnet is concentrated on the magnetic flux injection yoke, and the magnetic field (magnetic flux) is concentrated and poured from the magnetic flux injection yoke onto the magnetic material of the information code. on the other hand,
Even when the non-magnetic material of the information code faces the magnetic sensitive element, the magnetic field from the bias magnet passes through the magnetic sensitive element and then flows through the magnetic flux injection yoke, but when the magnetic material faces the magnetic sensitive element. And when the non-magnetic material faces each other, the reluctance of the magnetic circuit including the magnetic code (magnetic information) changes sharply, and the output level of the magnetic detection signal of the magnetic sensitive element changes. , The magnetic information of the object to be detected is clearly read and detected.
【0016】被検出体の磁気情報を独立に検出する感磁
性素子が複数配列配置されている第2の発明にあって
は、各感磁性素子の磁気検出信号を情報検出手段により
順次切り替えて取り出すことで、多チャンネルの磁気検
出信号の処理が行われる。In the second invention in which a plurality of magnetic sensitive elements for independently detecting the magnetic information of the object to be detected are arranged, the magnetic detection signals of the respective magnetic sensitive elements are sequentially switched by the information detecting means and taken out. As a result, multi-channel magnetic detection signal processing is performed.
【0017】[0017]
【実施例】以下、本発明の実施例を図面に基づいて説明
する。なお、本実施例の説明において、従来例および提
案例と同一の名称部分には同一符号を付し、その重複説
明は省略する。図1には本発明に係る磁気センサ装置の
第1の実施例が示されている。同図において、筐体4の
内部にバイアスマグネットとしての永久磁石1を収容固
定し、この永久磁石1の磁極表面に直接、あるいは微小
間隙を介して感磁性素子としての磁気抵抗素子2が固定
されている。Embodiments of the present invention will be described below with reference to the drawings. In the description of the present embodiment, the same reference numerals will be given to the same names as those in the conventional example and the proposed example, and duplicate description thereof will be omitted. FIG. 1 shows a first embodiment of the magnetic sensor device according to the present invention. In the figure, a permanent magnet 1 as a bias magnet is housed and fixed inside a housing 4, and a magnetoresistive element 2 as a magnetic sensitive element is fixed to the magnetic pole surface of the permanent magnet 1 directly or through a minute gap. ing.
【0018】本実施例が提案例と異なる特徴的なこと
は、筐体4の表面10側を被検出体3の検出面と成し、こ
の検出面と磁気抵抗素子2間に、磁束注入ヨーク11が設
けられていることである。この磁束注入ヨーク11は提案
例の形状磁気異方性板6と同形状、つまり、板厚よりも
縦方向の寸法を大にして形成され、筐体4内に埋設され
て磁気抵抗素子2の中心部に立設されている。The feature of this embodiment different from the proposed example is that the surface 10 side of the housing 4 constitutes the detection surface of the object 3 to be detected, and the magnetic flux injection yoke is provided between this detection surface and the magnetoresistive element 2. 11 is provided. The magnetic flux injection yoke 11 has the same shape as the shape magnetic anisotropy plate 6 of the proposed example, that is, is formed to have a dimension in the vertical direction larger than the plate thickness, and is embedded in the housing 4 to form the magnetoresistive element 2. It stands in the center.
【0019】磁束注入ヨーク11はパーマロイ、純鉄、珪
素鋼板等で代表される一連の軟磁性材料を用いて作製さ
れている。なお、磁気抵抗素子2はInSb,InA
s,GaAs等の電子移動度(モビリティ)の大きな適
宜の半導体材料を用いて構成されている。The magnetic flux injection yoke 11 is made of a series of soft magnetic materials represented by permalloy, pure iron, silicon steel plate and the like. The magnetoresistive element 2 is made of InSb, InA.
It is composed of an appropriate semiconductor material having a high electron mobility such as s and GaAs.
【0020】この実施例は上記のように構成されてお
り、次にその作用を説明する。図2に示すように、磁性
材の被検出体3が矢印方向に移動して、被検出体3が磁
気抵抗素子2に対向すると、永久磁石1から磁気抵抗素
子2を通って発せられる磁界(磁束)は、磁束注入ヨー
ク11に収束された後、磁束注入ヨーク11の上端面から集
中的に被検出体3に注ぎ込まれる。この永久磁石1から
磁気抵抗素子2を通って被検出体3に至る磁界の経路
は、磁束注入ヨーク11に収束集中されることで、分散形
とならず、磁束注入ヨーク11からほぼ真直の経路を通っ
て被検出体3に注ぎ込まれることとなる。This embodiment is constructed as described above, and its operation will be described below. As shown in FIG. 2, when the detected body 3 made of a magnetic material moves in the direction of the arrow and the detected body 3 faces the magnetoresistive element 2, the magnetic field generated from the permanent magnet 1 through the magnetoresistive element 2 ( After being converged by the magnetic flux injection yoke 11, the magnetic flux) is intensively poured into the detected body 3 from the upper end surface of the magnetic flux injection yoke 11. The path of the magnetic field from the permanent magnet 1 through the magnetoresistive element 2 to the object to be detected 3 is converged and concentrated in the magnetic flux injection yoke 11, so that the magnetic field does not become a dispersion type and the path is almost straight from the magnetic flux injection yoke 11. It will be poured into the to-be-detected body 3 through.
【0021】被検出体3がさらに矢印方向に移動し、被
検出体3が磁気抵抗素子2の対向位置から外れると、磁
束注入ヨーク11から被検出体3に向けての磁界の注入作
用が途絶える。When the body 3 to be detected further moves in the direction of the arrow and the body 3 to be detected moves away from the opposing position of the magnetoresistive element 2, the action of injecting the magnetic field from the magnetic flux injection yoke 11 toward the body 3 to be detected is interrupted. .
【0022】このように、本実施例では、磁気抵抗素子
2に被検出体3が対向したときには磁気抵抗素子2を通
る磁界は集中的に被検出体に注ぎ込み、被検出体3が磁
気抵抗素子2から離れたときにはその磁束注入ヨーク11
からの磁界の注入が停止されることで、被検出体3が磁
気抵抗素子2に対向したときとそうでないときとで、磁
気抵抗素子2を通る磁界の強度はシャープに切り替わ
る。つまり、被検出体3が磁気抵抗素子2に対向したと
きとそうでないときとで、被検出体3を含む磁気回路の
レラクタンスが大きく変化し、これにより、磁気抵抗素
子の磁気検出信号の出力レベルがシャープに変化する結
果、被検出体の検出精度を格段に高めることができる。As described above, in this embodiment, when the object 3 to be detected is opposed to the magnetoresistive element 2, the magnetic field passing through the magnetoresistive element 2 is intensively poured into the object to be detected, and the object 3 is detected. When separated from 2, the magnetic flux injection yoke 11
By stopping the injection of the magnetic field from, the strength of the magnetic field passing through the magnetoresistive element 2 is sharply switched depending on whether the detected body 3 faces the magnetoresistive element 2 or not. In other words, the reluctance of the magnetic circuit including the detected body 3 greatly changes depending on whether the detected body 3 faces the magnetoresistive element 2 or not, which causes the output level of the magnetic detection signal of the magnetoresistive element. As a result, the detection accuracy of the object to be detected can be significantly improved.
【0023】また、例えば、非磁性材料で形成した被検
出体3の表面に、磁性材料を印刷等により形成して磁気
情報をコードによって与えたような場合においては、磁
気抵抗素子2に磁性材料が対向したときには、磁束注入
ヨーク11からその磁性材料に集中的に磁界が注ぎ込ま
れ、磁気抵抗素子2に非磁性材料が対向したときには磁
界の注入作用が停止するので、磁気抵抗素子2に磁性材
料が対向したときと非磁性材料が対向したときとでは磁
気抵抗素子2を通る磁界(磁束)の強度がシャープに切
り替わることで、磁気コードの正確な読み取り検出が可
能となる。Further, for example, in the case where a magnetic material is formed by printing or the like on the surface of the detected body 3 formed of a non-magnetic material and magnetic information is given by a code, the magnetic material is used for the magnetoresistive element 2. , The magnetic field is intensively poured from the magnetic flux injection yoke 11 into the magnetic material, and the magnetic field injection action is stopped when the non-magnetic material faces the magnetoresistive element 2, so that the magnetic material is applied to the magnetoresistive element 2. The intensity of the magnetic field (magnetic flux) passing through the magnetoresistive element 2 is sharply switched between when the magnetic field is opposed to the magnetic field and when the non-magnetic material is opposed to the magnetic field, thereby enabling accurate reading and detection of the magnetic code.
【0024】しかも、図2に示すように、磁束注入ヨー
ク11から被検出体3に集中して注入される磁界は分散形
とはならないために、センサ検出面と被検出体3との間
隔を大きくしても、磁気検出の分解能が低下するという
ことがなく、最近の被検出体3の高速走行の要求に対し
ても十分に応え得るものとなる。Moreover, as shown in FIG. 2, since the magnetic field concentrated and injected from the magnetic flux injecting yoke 11 into the object 3 to be detected is not of a dispersed type, the distance between the sensor detection surface and the object 3 to be detected is set. Even if it is increased, the resolution of magnetic detection does not decrease, and it is possible to sufficiently meet the recent demand for high-speed running of the detected body 3.
【0025】さらに、本実施例によれば、筐体4の表面
10をセンサ検出面としたものであるから、このセンサ検
出面を、例えばガスボンベ等のタグに近接してあてがう
ことにより、前記の如く、磁界の集中注入効果によって
タグに設置されている磁気情報を確実に検出することが
可能となり、前記図8に示した提案例のように、筐体4
の中間部に被検出体3の走行通路7を設けた構成の磁気
センサ装置によっては困難であったタグ等の磁気設置情
報の読み取りが非常に容易となる。Furthermore, according to this embodiment, the surface of the housing 4 is
Since 10 is used as the sensor detection surface, by applying this sensor detection surface in close proximity to a tag such as a gas cylinder, as described above, the magnetic information installed in the tag can be obtained by the concentrated injection effect of the magnetic field. It becomes possible to reliably detect and, as in the example of the proposal shown in FIG.
It becomes very easy to read the magnetic installation information of the tag or the like, which was difficult with the magnetic sensor device having the configuration in which the traveling passage 7 of the detected object 3 is provided in the middle part of the above.
【0026】図3は永久磁石1の磁極面上に配設される
磁気抵抗素子2の各種回路形態を示したものである。同
図の(a)は、永久磁石1の上側に1個の磁気抵抗素子
2を設置するもので、この磁気抵抗素子2の両端A′
B′間の電圧によって磁気抵抗素子2の磁気検出信号が
取り出される。FIG. 3 shows various circuit configurations of the magnetoresistive element 2 arranged on the magnetic pole surface of the permanent magnet 1. In FIG. 1A, one magnetoresistive element 2 is installed on the upper side of the permanent magnet 1, and both ends A ′ of this magnetoresistive element 2 are arranged.
The magnetic detection signal of the magnetoresistive element 2 is taken out by the voltage between B '.
【0027】同図の(b)に示すものは、磁気検出用の
磁気抵抗素子2とダミーの磁気抵抗素子2′とを直列に
接続し、従来例の図11に示す回路と同様に、磁気抵抗素
子2と2′との差動出力を磁気抵抗素子2の磁気検出信
号として取り出すものである。この例では、通常、ダミ
ーの磁気抵抗素子2′は被検出体3の磁気情報の影響を
受けない位置に設置されることとなる。In FIG. 1B, a magnetic resistance element 2 for magnetism detection and a dummy magnetic resistance element 2'are connected in series, and a magnetic resistance element similar to the circuit shown in FIG. The differential output between the resistance elements 2 and 2'is taken out as a magnetic detection signal of the magnetoresistance element 2. In this example, the dummy magnetoresistive element 2 ′ is usually installed at a position that is not affected by the magnetic information of the detected body 3.
【0028】図3の(c)に示すものは、前記同図の
(b)に示すダミーの磁気抵抗素子2′の代わりに抵抗
器19を用いたものである。この(c)に示すものも、磁
気抵抗素子2の磁気情報の検出信号が信号取り出しリー
ドAから取り出される。この磁気検出信号は、Bの印加
電源電圧を、抵抗器19の抵抗値と磁気抵抗素子2の抵抗
値との分圧出力(差動出力)として取り出されるもので
ある。In FIG. 3C, a resistor 19 is used in place of the dummy magnetoresistive element 2'shown in FIG. 3B. Also in the case of (c), the detection signal of the magnetic information of the magnetoresistive element 2 is extracted from the signal extraction lead A. This magnetic detection signal is obtained by extracting the applied power supply voltage of B as a voltage-divided output (differential output) between the resistance value of the resistor 19 and the resistance value of the magnetoresistive element 2.
【0029】図4は、磁気抵抗素子2を多チャンネル化
して配設した各種例を示したものである。同図の(a)
は、前記第1の実施例の構成を備えた磁気センサ装置を
複数配列配置し、多チャンネル化したものであり、同図
の(b)は1個の筐体4内に複数の永久磁石1を配列配
置して多チャンネル化したものであり、同図の(c)は
1個の筐体4内に1個の永久磁石1を収容固定し、この
1個の永久磁石1の磁極面に複数の磁気抵抗素子2を配
列して多チャンネル化したものである。FIG. 4 shows various examples in which the magnetoresistive element 2 is arranged in multiple channels. (A) in the figure
Is a multi-channel configuration in which a plurality of magnetic sensor devices having the configuration of the first embodiment are arranged in an array, and FIG. 1B shows a plurality of permanent magnets 1 in one housing 4. Are arranged in a multi-channel manner, and FIG. 1C shows that one permanent magnet 1 is housed and fixed in one housing 4, and the magnetic pole surface of this one permanent magnet 1 is A plurality of magnetoresistive elements 2 are arranged to form multiple channels.
【0030】この多チャンネル化した磁気センサ装置に
おいては、例えば図5に示すように、各チャンネルの磁
気情報の検出信号A1 〜A4 は、スイッチ群12のスイッ
チ切り替えにより、順次選択的に時系列信号形態で取り
出され、所望の信号処理が施されることとなる。この実
施例では、スイッチ群12のスイッチ切り替えはスイッチ
切り替え制御部13によって行われており、このスイッチ
切り替え制御部13からスイッチ群12に各スイッチのオン
オフ切り替えスキャン信号が加えられ、このスイッチス
キャン信号により、スイッチ群12の各スイッチが自動的
に切り替えられて各チャンネルの磁気抵抗素子2の磁気
情報の検出信号A1 〜A4 が端子A′B′間の電圧とし
て独立して取り出される。なお、この実施例では、スイ
ッチ群12とスイッチ切り替え制御部13によって情報検出
手段を構成している。In this multi-channel magnetic sensor device, for example, as shown in FIG. 5, the detection signals A 1 to A 4 of the magnetic information of each channel are sequentially and selectively switched by switching the switches of the switch group 12. The signal is extracted in the form of a series signal, and desired signal processing is performed. In this embodiment, the switch switching of the switch group 12 is performed by the switch switching control unit 13, and an on / off switching scan signal of each switch is added to the switch group 12 from this switch switching control unit 13, and this switch scan signal is used. , The switches of the switch group 12 are automatically switched, and the detection signals A 1 to A 4 of the magnetic information of the magnetoresistive element 2 of each channel are independently taken out as the voltage between the terminals A'B '. In addition, in this embodiment, the switch group 12 and the switch switching control unit 13 constitute information detecting means.
【0031】図6は、多チャンネル化した磁気センサ装
置を用いて、ガスボンベ等に設けられる被検出体として
のタグ14の磁気情報の検出例を模式的に示したものであ
る。タグ14に設置される磁気情報は、コード形態によっ
て与えられている。すなわち、タグ14は磁性材料によっ
て形成されており、このタグ14の所定の情報位置に透孔
15が開けられ、透孔15が開けられていない磁性部16と透
孔15とを配列することにより、ガスボンベのガスの品種
名、製造年月日、ガスの入れ換え日付、ガスの入れ換え
回数等の所望の情報がコード形態によってタグ14に与え
られている。FIG. 6 schematically shows an example of detection of magnetic information of a tag 14 as a detected object provided in a gas cylinder or the like, using a multi-channel magnetic sensor device. The magnetic information placed on the tag 14 is given in the form of a code. That is, the tag 14 is made of a magnetic material, and the through hole is provided at a predetermined information position of the tag 14.
By arranging the magnetic part 16 in which 15 is opened and the through hole 15 is not opened and the through hole 15, the gas type name of the gas cylinder, the date of manufacture, the date of gas replacement, the number of times of gas replacement, etc. The desired information is provided to the tag 14 in code form.
【0032】このタグ14に多チャンネル磁気センサ装置
の検出面を近接対向してあてがうことにより、情報コー
ドの磁性部16に対向する磁気抵抗素子2側からは、永久
磁石1からのバイアス磁界が磁気抵抗素子2を通った
後、磁束注入ヨーク11に収束されて磁性部16に集中的に
注ぎ込まれる。これに対し、透孔15に対向する磁気抵抗
素子2側からは、永久磁石1から磁気抵抗素子2を通
り、磁束注入ヨーク11から透孔15に向かう磁界は透孔15
を避ける経路を採るので、磁性部16に向かう磁界と透孔
15に向かう磁界の分布パターンが異なる。つまり、透孔
15に対向する磁気抵抗素子2は、磁性部16に対向する磁
気抵抗素子2に比べ、タグ14を含む磁気回路中の磁気飽
和やレラクタンスが向上することで、磁束密度が磁性部
16に対向する磁気抵抗素子に比べ低下し、透孔15に対向
する磁気抵抗素子2の磁気抵抗変化は磁性部16に対向す
る磁気抵抗素子に比べ小さいものとなる。By applying the detection surface of the multi-channel magnetic sensor device to the tag 14 so as to closely face it, the bias magnetic field from the permanent magnet 1 is magnetically applied from the magnetoresistive element 2 side facing the magnetic portion 16 of the information code. After passing through the resistance element 2, it is converged by the magnetic flux injecting yoke 11 and intensively poured into the magnetic portion 16. On the other hand, from the side of the magnetoresistive element 2 facing the through hole 15, the magnetic field passing from the permanent magnet 1 through the magnetoresistive element 2 to the magnetic flux injection yoke 11 toward the through hole 15 is transmitted through the through hole 15.
To avoid the magnetic field toward the magnetic part 16 and the through hole.
The distribution pattern of the magnetic field toward 15 is different. That is, through hole
The magnetoresistive element 2 facing the magnetic portion 15 has a magnetic flux density higher than that of the magnetoresistive element 2 facing the magnetic portion 16 because magnetic saturation and reluctance in the magnetic circuit including the tag 14 are improved.
The magnetic resistance of the magnetoresistive element facing the magnetic hole 16 is smaller than that of the magnetoresistive element facing the through hole 15, and the magnetoresistive change of the magnetoresistive element 2 facing the through hole 15 is smaller than that of the magnetoresistive element facing the magnetic portion 16.
【0033】このように、磁性部16に対向する磁気抵抗
素子2と透孔15に対向する磁気抵抗素子2を通る磁束密
度が明確に異なるものとなり、複数配列配置された磁気
抵抗素子2の検出信号を時系列的に切り替えて取り出す
ことで、タグ14に設置されている磁気情報のコードを高
精度の下で正確に検出することができる。As described above, the magnetic flux densities passing through the magnetoresistive element 2 facing the magnetic portion 16 and the magnetoresistive element 2 facing the through hole 15 are clearly different from each other, and a plurality of magnetoresistive elements 2 are detected. By switching the signals in time series and extracting the signals, the code of the magnetic information set on the tag 14 can be accurately detected with high accuracy.
【0034】本実施例では、永久磁石1から磁気抵抗素
子2を通って磁性部16に向かう磁界を、磁束注入ヨーク
11で収束集中するようにしているので、タグ14の表面と
多チャンネル磁気センサ装置のセンサ検出面との間隔が
大きく空いていても、磁束注入ヨーク11から磁性部16に
向かう磁界は分散形とはならず、真直状に集中注入され
るので、高分解能による磁気情報の検出が可能となるの
である。In this embodiment, the magnetic field from the permanent magnet 1 to the magnetic portion 16 through the magnetoresistive element 2 is changed to the magnetic flux injection yoke.
Since the magnetic field is converged and concentrated at 11, even if there is a large gap between the surface of the tag 14 and the sensor detection surface of the multi-channel magnetic sensor device, the magnetic field from the magnetic flux injection yoke 11 to the magnetic portion 16 is of a distributed type. Instead, it is possible to detect magnetic information with high resolution because the concentrated injection is straight.
【0035】図7は磁気抵抗素子2を2次元マトリック
ス状に配置した多チャンネル磁気センサ装置によって、
タグ14の磁気情報を検知する例を示したものである。タ
グ14は磁性材料によって形成してもよく、非磁性材料に
よって構成してもよいものであり、磁性材料によって構
成する場合には、前記図6に示したものと同様に透孔15
を設け、この透孔15と磁性部16の組み合わせにより磁気
情報を設置することができ、タグ14が非磁性材料の場合
には、タグ14の表面に磁性インク等を用いてコードを印
刷形成するか、あるいは、磁気情報を形成してなるフィ
ルム等をタグ14の表面に磁性体を貼着することによって
磁気情報が設置できる。FIG. 7 shows a multi-channel magnetic sensor device in which the magnetoresistive elements 2 are arranged in a two-dimensional matrix.
9 illustrates an example of detecting magnetic information of the tag 14. The tag 14 may be formed of a magnetic material or may be formed of a non-magnetic material. When the tag 14 is formed of a magnetic material, the through hole 15 is formed as in the case shown in FIG.
Magnetic information can be set by combining the through hole 15 and the magnetic portion 16. When the tag 14 is a non-magnetic material, a code is printed on the surface of the tag 14 using magnetic ink or the like. Alternatively, the magnetic information can be set by sticking a magnetic material on the surface of the tag 14 with a film or the like formed with the magnetic information.
【0036】前記図7に示すような2次元マトリックス
状の多チャンネル磁気センサ装置においても、2次元マ
トリックス状に磁気情報を設置してなるタグ14に多チャ
ンネル磁気センサ装置のセンサ検出面をあてがうこと
で、前記図6に示した場合と同様にタグ14に設置した磁
気情報が高分解能の下で正確に検出することが可能とな
る。Even in the two-dimensional matrix multi-channel magnetic sensor device as shown in FIG. 7, the sensor detection surface of the multi-channel magnetic sensor device is applied to the tag 14 in which magnetic information is installed in the two-dimensional matrix. Then, as in the case shown in FIG. 6, the magnetic information set on the tag 14 can be accurately detected under high resolution.
【0037】なお、本発明は上記各実施例に限定される
ことはなく、様々な実施の態様を採り得る。例えば、上
記各実施例では感磁性素子を磁気抵抗素子(磁性薄膜磁
気抵抗素子を含む)によって構成したが、本発明の感磁
性素子は、ホール素子等の他の磁気検出素子を用いて構
成してもよい。The present invention is not limited to the above-mentioned embodiments, and various embodiments can be adopted. For example, in each of the above embodiments, the magnetic sensitive element is composed of a magnetoresistive element (including a magnetic thin film magnetoresistive element), but the magnetic sensitive element of the present invention is composed of another magnetic detecting element such as a Hall element. May be.
【0038】また、上記実施例では磁束注入ヨーク11を
磁気抵抗素子2の中心部(中央部)に対向配置したが、
この磁束注入ヨーク11は磁気抵抗素子2の直上部、つま
り、磁気抵抗素子2の面積の範囲内に配置すればよく、
必ずしも素子2の中心部に配置しなくてもよい。Further, in the above embodiment, the magnetic flux injection yoke 11 is arranged opposite to the central portion (central portion) of the magnetoresistive element 2.
The magnetic flux injection yoke 11 may be arranged directly above the magnetoresistive element 2, that is, within the area of the magnetoresistive element 2.
It does not necessarily have to be arranged in the center of the element 2.
【0039】[0039]
【発明の効果】本発明は、センサ検出面と感磁性素子間
に、バイアスマグネットから感磁性素子を通る磁束を集
中して被検出体の磁気情報に注ぐ磁束注入ヨークを設け
ものであるから、磁束注入ヨークから被検出体に向かう
磁界は分散形とはならずに、収束集中した真直状の磁界
となり、その磁界の真直状態はセンサ検出面と被検出体
との間隔が大きくなっても維持されるので、磁気情報の
検出分解能は格段に高められ、被検出体の磁気情報を高
精度、高感度の下で、正確に検出することが可能とな
る。According to the present invention, the magnetic flux injection yoke for concentrating the magnetic flux passing through the magnetic sensitive element from the bias magnet to the magnetic information of the object to be detected is provided between the sensor detection surface and the magnetic sensitive element. The magnetic field from the magnetic flux injecting yoke to the object to be detected is not a distributed type but a convergent and concentrated straight magnetic field, and the straight state of the magnetic field is maintained even if the distance between the sensor detection surface and the object to be detected becomes large. Therefore, the detection resolution of the magnetic information is significantly improved, and the magnetic information of the detected object can be accurately detected with high accuracy and high sensitivity.
【0040】また、磁性材料を配列配置して被検出体の
磁気情報がコード形態で与えられている場合において
も、バイアスマグネットから感磁性素子を通って被検出
体の磁気情報に向かう磁界は前記磁束注入ヨークに収束
されて集中的に注がれることとなるので、感磁性素子を
複数配列配置して多チャンネル化した場合においても、
一方側の感磁性素子を通る磁界と他方側の感磁性素子を
通る磁界との干渉が防止され、所謂、感磁性素子間のク
ロストークを効果的に防止できる。Further, even when magnetic information is provided in a code form by arranging magnetic materials in an array, the magnetic field directed from the bias magnet to the magnetic information of the object to be detected through the magnetic sensitive element is as described above. Since it is focused on the magnetic flux injecting yoke and concentrated, so even when a plurality of magnetic sensitive elements are arranged in an array to form multiple channels,
Interference between the magnetic field passing through the magnetic sensitive element on one side and the magnetic field passing through the magnetic sensitive element on the other side is prevented, and so-called crosstalk between the magnetic sensitive elements can be effectively prevented.
【0041】さらに、本発明では、磁束注入ヨークをセ
ンサ検出面よりも内部側の感磁性素子側に設けたもので
あるから、センサ検出面の外側を自由空間とすることが
でき、したがって、この自由空間を被検出体の走行空間
とすることにより、この走行空間を走行する被検出体の
磁気情報の検出が可能となり、また、センサ検出面を、
例えば、ガスボンベ等の磁気情報が設置されているタグ
に近接対向することにより、前記タグの磁気設置情報を
正確に読み取り検出することが可能となる。Further, in the present invention, since the magnetic flux injection yoke is provided on the side of the magnetic sensitive element that is on the inner side of the sensor detection surface, the outside of the sensor detection surface can be made into a free space. By setting the free space as the traveling space of the detected object, it becomes possible to detect the magnetic information of the detected object traveling in this traveling space, and the sensor detection surface is
For example, by closely facing a tag on which magnetic information such as a gas cylinder is installed, it is possible to accurately read and detect the magnetic installation information on the tag.
【図1】本発明の第1の実施例を示す磁気センサ装置の
構成説明図である。FIG. 1 is a structural explanatory view of a magnetic sensor device showing a first embodiment of the present invention.
【図2】同実施例の磁気センサ装置の磁気検出作用の説
明図である。FIG. 2 is an explanatory view of a magnetic detection function of the magnetic sensor device of the embodiment.
【図3】同実施例における磁気抵抗素子の回路構成例の
説明図である。FIG. 3 is an explanatory diagram of a circuit configuration example of a magnetoresistive element in the example.
【図4】本発明における多チャンネル型の磁気センサ装
置の各種構成例の説明図である。FIG. 4 is an explanatory diagram of various configuration examples of a multi-channel type magnetic sensor device according to the present invention.
【図5】本実施例における多チャンネル型の磁気センサ
装置の磁気情報検出信号の取り込み例を示す回路説明図
である。FIG. 5 is a circuit explanatory diagram showing an example of capturing a magnetic information detection signal of the multi-channel magnetic sensor device in the present embodiment.
【図6】本実施例における多チャンネル型の磁気センサ
装置を用いたタグの磁気情報の検出例を示す説明図であ
る。FIG. 6 is an explanatory diagram showing an example of detection of magnetic information of a tag using the multi-channel type magnetic sensor device in the present embodiment.
【図7】2次元マトリックス状に磁気抵抗素子を配置し
てなる多チャンネル型の磁気センサ装置によるタグに設
置された磁気情報の検出例の説明図である。FIG. 7 is an explanatory diagram of a detection example of magnetic information set on a tag by a multi-channel type magnetic sensor device in which magnetic resistance elements are arranged in a two-dimensional matrix.
【図8】本発明者が先に提案している磁気センサ装置の
説明図である。FIG. 8 is an explanatory diagram of a magnetic sensor device previously proposed by the present inventor.
【図9】図8に示した提案装置の動作状態の説明図であ
る。9 is an explanatory diagram of an operating state of the proposed apparatus shown in FIG.
【図10】従来の一般的な磁気センサ装置の説明図であ
る。FIG. 10 is an explanatory diagram of a conventional general magnetic sensor device.
【図11】磁気抵抗素子の分圧回路の回路図である。FIG. 11 is a circuit diagram of a voltage dividing circuit of a magnetoresistive element.
1 永久磁石 2,2a,2b 磁気抵抗素子 3 被検出体 4 筐体 11 磁束注入ヨーク 12 スイッチ群 13 スイッチ切り替え制御部 1 Permanent Magnet 2, 2a, 2b Magnetoresistive Element 3 Detected Object 4 Case 11 Magnetic Flux Injecting Yoke 12 Switch Group 13 Switch Switching Control Section
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 H01L 43/08 Z ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Office reference number FI technical display location H01L 43/08 Z
Claims (3)
気バイアスされた1個以上の感磁性素子と、が配設さ
れ、該感磁性素子に対向する被検出体の磁気情報を磁気
バイアス量の変化で検出する磁気センサにおいて、該感
磁性素子と被検出体間に、バイアスマグネットから感磁
性素子を通る磁束を集中して被検出体の磁気情報に注ぐ
磁束注入ヨークが設けられていることを特徴とする磁気
センサ装置。1. A magnet and one or more magnetic sensitive elements magnetically biased by the magnet are provided, and magnetic information of an object to be detected facing the magnetic sensitive element is detected by a change in the amount of magnetic bias. In the magnetic sensor described above, a magnetic flux injection yoke for concentrating a magnetic flux passing through the magnetic sensitive element from the bias magnet and pouring it into the magnetic information of the detected body is provided between the magnetic sensitive element and the detected body. Magnetic sensor device.
磁性素子が複数配列配置され、この磁気情報を独立に検
出する各感磁性素子の検出信号を順次切り替えて取り出
す情報検出手段が設けられている請求項1記載の磁気セ
ンサ装置。2. A plurality of magnetic sensitive elements for independently detecting magnetic information of an object to be detected are arranged in an array, and information detecting means is provided for sequentially switching and extracting detection signals of the respective magnetic sensitive elements for independently detecting the magnetic information. The magnetic sensor device according to claim 1, which is provided.
されている請求項1又は請求項2記載の磁気センサ装
置。3. The magnetic sensor device according to claim 1, wherein the magnetic sensitive element is a magnetoresistive element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6164536A JPH087232A (en) | 1994-06-23 | 1994-06-23 | Magnetic sensor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6164536A JPH087232A (en) | 1994-06-23 | 1994-06-23 | Magnetic sensor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH087232A true JPH087232A (en) | 1996-01-12 |
Family
ID=15795028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6164536A Pending JPH087232A (en) | 1994-06-23 | 1994-06-23 | Magnetic sensor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH087232A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USPP16447P3 (en) | 2004-03-26 | 2006-04-18 | Suntory Flowers Limited | Calibrachoa plant named ‘Sunbelhopi’ |
| WO2013002135A1 (en) * | 2011-06-30 | 2013-01-03 | ナイルス株式会社 | Proximity sensor |
| KR20140116929A (en) * | 2012-02-13 | 2014-10-06 | 가부시키가이샤 무라타 세이사쿠쇼 | Magnetic sensor apparatus |
| WO2016070608A1 (en) * | 2014-11-03 | 2016-05-12 | 苏州保瑟佳货币检测科技有限公司 | Magnetic sensor and magnetic detection method and system based on same |
| WO2017199628A1 (en) * | 2016-05-20 | 2017-11-23 | 株式会社デンソー | Position sensor |
| US9970358B2 (en) | 2012-03-14 | 2018-05-15 | Mitsubishi Heavy Industries, Ltd. | Exhaust flue |
-
1994
- 1994-06-23 JP JP6164536A patent/JPH087232A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USPP16447P3 (en) | 2004-03-26 | 2006-04-18 | Suntory Flowers Limited | Calibrachoa plant named ‘Sunbelhopi’ |
| WO2013002135A1 (en) * | 2011-06-30 | 2013-01-03 | ナイルス株式会社 | Proximity sensor |
| JP2013011541A (en) * | 2011-06-30 | 2013-01-17 | Niles Co Ltd | Proximity sensor |
| US9733058B2 (en) | 2011-06-30 | 2017-08-15 | Valeo Japan Co., Ltd. | Proximity sensor |
| KR20140116929A (en) * | 2012-02-13 | 2014-10-06 | 가부시키가이샤 무라타 세이사쿠쇼 | Magnetic sensor apparatus |
| CN104105977A (en) * | 2012-02-13 | 2014-10-15 | 株式会社村田制作所 | Magnetic sensor apparatus |
| JPWO2013121870A1 (en) * | 2012-02-13 | 2015-05-11 | 株式会社村田製作所 | Magnetic sensor device |
| US9970358B2 (en) | 2012-03-14 | 2018-05-15 | Mitsubishi Heavy Industries, Ltd. | Exhaust flue |
| WO2016070608A1 (en) * | 2014-11-03 | 2016-05-12 | 苏州保瑟佳货币检测科技有限公司 | Magnetic sensor and magnetic detection method and system based on same |
| WO2017199628A1 (en) * | 2016-05-20 | 2017-11-23 | 株式会社デンソー | Position sensor |
| JP2017207433A (en) * | 2016-05-20 | 2017-11-24 | 株式会社デンソー | Position sensor |
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