JPH0874929A - Micro vibration damping floor - Google Patents

Abstract

(57) [Summary] [Purpose] An object is to provide an activated micro-vibration damping floor that can increase the size of the table while maintaining high-accuracy damping properties and that can easily change the size of the table. And [Structure] A frame member 6 and a frame member 6 arranged apart from each other.
A floor slab 7 that is detachably installed above, and a plurality of floor slabs that are arranged on the upper surface of the floor 2 to support the pedestal 6 above the floor 2 and that control the vibration of the floor slab 7 in the vertical direction via the pedestal 6. Vertical vibration damping mechanism 5 and horizontal electromagnetic actuators 41a-4 provided on the floor slab 7 for controlling horizontal vibration of the floor slab 7.
1b, an acceleration sensor 40 provided on the floor slab 7 for detecting horizontal and vertical vibrations of the floor slab 7, and a vertical vibration damping mechanism 5 and a horizontal electromagnetic actuator 41a based on the output of the acceleration sensor 40. The floor slab 7 is provided with a plurality of floor members 8 which are detachably connected to each other on one plane.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a passive vibration control mechanism for active vibration control in order to reduce vibration transmitted from an installation base to precision equipment installed in ultra-precision facilities such as semiconductor facilities and advanced research facilities. The present invention relates to a floor for vibration control that incorporates the function of.

[0002]

2. Description of the Related Art High-precision equipment is required to have high-precision vibration isolation and vibration control, as the performance of high-precision equipment may be greatly affected by even minute vibrations of the micron level. It In particular, precision equipment installed in ultra-precision facilities such as semiconductor facilities and advanced research facilities will interfere with the work even if minute vibrations or displacements occur during use, or product defects may occur, resulting in poor work efficiency. May also cause a decrease in
In order to remove the influence of such vibrations, these precision instruments are generally installed on a vibration isolation device. As such a precision vibration isolator, there is a passive vibration isolator that absorbs and attenuates the vibration applied to the vibration isolation floor by vibration absorbing means such as an air spring and a coil spring.

This passive vibration isolator always has resonance, and it deteriorates at frequencies near the resonance point. Normally, a soft spring such as an air spring is used in order to reduce this resonance frequency to a frequency at which there is no practical problem, but still a vertical direction of 1 Hz,
The limit is about 0.5 Hz in the horizontal direction. At the resonance frequency, the resonance magnification is limited to 10 to 20 dB (3 to 10 times) even if it is attenuated by providing an orifice or using a viscous damper. Further, in this case, the vibration damping effect in the vibration damping region (frequency higher than the resonance frequency), which is the original purpose, is reduced. Furthermore, in the case of passive vibration isolation devices,
Since vibration isolation can be performed only at a fixed ratio, if a large forced input is applied to the foundation, the vibration isolation effect may be insufficient.

As the precision instruments mentioned above become more precise, even severer performance is required for countermeasures against microvibration, and sufficient vibration isolation cannot be achieved only by the passive vibration isolator. , Higher-performance damping floor is required.

Conventionally, an active three-dimensional control technique has been proposed as a damping floor for such minute vibrations. That is, the actuator is driven in accordance with a signal from a vibration sensor attached to a vibration damping floor supported by an air spring, a linear motor, etc. in three vertical directions and two horizontal directions orthogonal to each other to suppress the vibration. This is a system that uses an active vibration isolation device that applies vibrations in the opposite phase to the vibrations that occur on the floor and positively isolates vibrations by computer control. This makes it possible to control not only the relatively regular vibrations that are transmitted to precision equipment, but also the irregular vibrations that were difficult to remove with only the passive vibration isolator, and the vibrations can be reduced to about 1 / 10th. Can be reduced to

Several proposals have been made for such a damping floor, but one side thereof has a size of about 1.0 to 2.0 m, and its base (floor) portion is In many cases, a large rigidity is secured by using a steel plate or the like and increasing the plate thickness. As equipment becomes more precise and larger with the advancement of technology, the vibration control floor must be increased, resulting in the weight and thickness of the platform (that is, the height of the floor). It is necessary to deal with the increase in Further, the pace of progress of such production facilities is very fast, and a system capable of promptly responding to changes in the production line or layout is also desired.

[0007]

By the way, in the above-mentioned conventional damping floor, as described above, a heavy platform such as a steel plate is used, and the weight and thickness of the platform further increase as the platform increases in size. There was an inconvenience that it was not possible to easily move or construct the damping floor construction or change the layout. In addition, increasing the size of the platform means that the control performance or actuator capacity may exceed the allowable range due to the influence of the deformation mode of the floor, the increase in weight, etc., and the control method should be changed or the actuator capacity must be increased. There was a problem that it was not possible to maintain high-precision vibration control. Since the size of the table cannot be easily changed, a new purchase or a major modification of the damping floor has been required along with the change of the production line and the equipment to be placed. Therefore, there has been a problem that it takes a lot of time and cost to deal with a change in the production line.

Further, when an air spring is used as the passive vibration isolation mechanism, an air source, a level adjusting mechanism, etc. are required, and there is a drawback that the system becomes bulky and maintenance becomes difficult. The present invention has been made in view of the above-mentioned problems, and can be easily moved, and
The base can be enlarged while maintaining high-precision vibration control, the size of the base can be easily changed, and a simple system that does not use an air spring can provide sufficient vibration isolation. The purpose is to provide a floor for vibration control.

[0009]

The present invention has the following features to attain the object mentioned above. That is, in the micro-vibration damping floor according to claim 1, the frame members that are arranged apart from each other, the floor slab that is detachably installed on the frame member, and the frame member that is arranged on the floor upper surface While supporting above the floor, a plurality of vertical vibration control mechanisms for controlling the vertical vibration of the floor slab through the frame, and the horizontal vibration of the floor slab provided in the floor slab A horizontal damping mechanism to control,
A vibration sensor provided on the floor slab for detecting horizontal and vertical vibrations of the floor slab, and a vibration for driving and controlling the vertical vibration damping mechanism and the horizontal vibration damping mechanism based on the output of the vibration sensor. A control device is provided, and the floor slab is provided with a plurality of floor members detachably connected to each other on one plane.

According to a second aspect of the present invention, there is provided a slight vibration damping floor according to the first aspect, wherein the floor member has a support plate portion having a honeycomb structure between an upper plate portion and a lower plate portion. Is provided. In the micro-vibration damping floor according to claim 3, in the micro-vibration damping floor according to claim 1 or 2, the vertical direction vibration damping mechanism includes a laminated rubber and at least one of a series or a parallel with the laminated rubber. And one or more electromagnetic actuators that vertically suppress vibrations. The horizontal vibration damping mechanism is a first inertial mass type electromagnetic device that suppresses vibrations in one direction on a horizontal plane. It is characterized in that it is composed of one or more formula actuators and one or more second inertial mass type electromagnetic actuators that perform damping in a direction orthogonal to the one direction.

According to a fourth aspect of the present invention, there is provided a slight vibration damping floor according to any one of the first to third aspects, wherein the floor slab is a stopper mechanism for preventing deformation of the floor slab due to vibration. Alternatively, at least one of the damper mechanisms is provided.

[0012]

In the micro-vibration damping floor according to the first aspect, the vibration sensor detects the vibration transmitted to the floor slab and outputs the information as a signal to the vibration control device. The vibration control device calculates a necessary control amount based on this information, and drives and controls the vertical vibration damping mechanism and the horizontal vibration damping mechanism. As a result, the vertical damping mechanism is
The horizontal vibration damping mechanism dampens horizontal vibrations.

Further, when the size of the floor slab is changed in accordance with the change of the equipment placed on the floor slab, etc., it is carried out as follows. Since the floor slab is removably installed on the frame and is composed by detachably connecting a plurality of floor members, the floor slab is removed from the frame and disassembled into each floor member.
To separate. Then, the floor members are replenished or deleted so as to have a predetermined size, and the floor members are removably connected to each other on one plane and removably erected on the frame member. In this way, the size of the floor slab can be changed according to the equipment to be placed.

According to a second aspect of the present invention, there is provided a slight vibration damping floor according to the first aspect, wherein the floor member includes a support plate portion having a honeycomb structure between the upper plate portion and the lower plate portion. Since the structure is provided, the floor member and the floor slab composed of these floor members are significantly reduced in weight without lowering the rigidity. As a result, the vertical vibration control mechanism and the horizontal vibration control mechanism increase the vibration control allowance with respect to the size of the floor slab, so that even if the floor slab is set to a larger size, it is possible to maintain high-precision vibration control.

According to a third aspect of the present invention, in the slight vibration damping floor according to the first or second aspect, each electromagnetic actuator of the vertical direction vibration damping mechanism and the horizontal direction vibration damping mechanism is subjected to damping control. It is driven and controlled by the device to isolate the floor slab. That is, by appropriately energizing each electromagnetic actuator from the vibration suppression control device with an appropriate current corresponding to the vibration, the vertical direction and the two horizontal directions orthogonal to each other,
That is, it is possible to suppress the three-dimensional microvibration with high accuracy.

The electromagnetic actuator of the vertical damping mechanism uses a direct drive type which is provided between the frame and the floor and is driven by a reaction force. Therefore, since the actuator is in the vibration transmission path and the natural frequency of the actuator is equal to the natural frequency of the entire system, the control is stable and a great effect can be obtained. The electromagnetic actuator of the horizontal damping mechanism uses an inertial mass type that is driven by inertial force, has a low natural frequency, and has a degree of freedom of the system (amount that the floor can move) compared to a direct drive type. Is large,
Easy to install and easy to change after installation.

Further, the vertical vibration damping mechanism has a structure in which the electromagnetic actuators are arranged in at least one of series and parallel with the laminated rubber, that is, the laminated rubber and the electromagnetic actuators are arranged in series or parallel, or both arrays. Since it is configured by combining, even if it is not controlled by the vibration suppression control device or when the electric system fails, the laminated rubber retains the passive type function and has a certain vibration suppression function. ing.

According to a fourth aspect of the present invention, in the slight vibration damping floor according to the second aspect, since the laminated rubber has a cylindrical shape having an axis line at the top and the bottom, the pressure receiving areas of the laminated rubber are the same. In that case, the diameter of the pressure receiving surface can be made larger than that of a simple cylindrical laminated rubber. Therefore, the buckling stability of the laminated rubber is improved.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to FIGS. In FIG. 1, reference numeral 1 is a vibration damping floor. The micro-vibration damping floor 1 is composed of a damping floor section 3 installed on a floor 2 of a building and a vibration control computer 4 which is a vibration control device. Damping floor section 3 above
Is configured as follows. As shown in FIGS. 1 and 2, on the floor 2 of the building, six vertical vibration damping mechanisms 5 are arranged and fixed at predetermined intervals. On the vertical direction vibration damping mechanism 5, two are installed separately from each other.
One frame member 6, 6 is erected and supported, and a floor slab 7 is removably fastened and fixed on these frame members 6, 6 by bolts (not shown).

The floor slab 7 is composed of four floor members 8 connected to each other on one plane. As shown in FIG. 3, the floor member 8 has upper plate portions on both sides of an aluminum honeycomb material 8a, which is a support plate portion having a honeycomb structure, respectively.
The lower plate is an aluminum honeycomb plate to which aluminum plates 8b and 8c are attached, and the width per sheet is set according to the module unit of the floor 2 of the building. As shown in FIG. 1, on the outer periphery of the lower portion of the floor member 8, ribs 9 made up of channels that also serve to reinforce the rigidity of the floor member 8 in the vertical direction are attached, and the floor members 8 are detachably fastened by bolts (not shown). -Fixed and integrated. In this way, several floor members 8 are connected to each other and set to have a size required as a damping floor for the equipment to be placed.

As shown in FIG. 2, the bridge members 6 are laid across both sides of the lower portion of the floor member 8 in the longitudinal direction in the width direction of the floor member 8. As shown in FIG. 3, a receiving plate 10 in which ribs are reinforced in the middle is put in these bridge members 6 in a state in which the channels are laid down in order to make the height of the vibration damping floor portion 3 as low as possible. The vertical vibration damping mechanism 5 is installed below the receiving plate 10, and is attached to three frames 6 together with the receiving plate 10 for one frame member 6.

As shown in FIG. 1, a stopper 15 is provided between the lower part of the frame 6 and the floor 2 of the building to prevent the vibration damping floor 3 from being largely deformed in the event of an earthquake. Is equipped with a stopper mechanism. This stopper 1
5 is composed of a stopper member 15a installed on the lower portion of the frame member 6 and a stopper member 15b installed on the floor 2 of the building. The stopper member 15a is a columnar member that projects downward from the frame member 6 and has an axis line at the top and bottom, and its lower end position is set to a predetermined height higher than the floor 2 of the building. Further, the stopper member 15b is a cylindrical member installed on the floor 2 of the building corresponding to the position of the stopper member 15a, and its height is set to a predetermined height lower than the height of the lower portion of the bridge 6. The stoppers 15 are installed at two locations for each frame 6.

The vertical vibration damping mechanism 5 installed below the frame member 6 is composed of a laminated rubber 20 and a vertical electromagnetic actuator 21 on the laminated rubber 20. As shown in FIG. 3, the lower end of the laminated rubber 20 is fixed on the floor 2 of the building, and the upper end thereof is fixed to the lower part of the vertical electromagnetic actuator 21. The laminated rubber 20 has a minimum pressure-receiving area on the upper end surface thereof, has a minimum height for obtaining a required spring constant, and has a cylindrical shape having an axis line at the top and bottom. The laminated rubber 20 is formed by alternately laminating the rubber 20a and the iron plate 20b. However, since the rubber 20a needs to be softly supported not only horizontally but also in the vertical direction, the thickness of the rubber 20a is not equal to that in the normal case. The thicker one is used.

The vertical electromagnetic actuator 21 includes a coil 23 fixed on the central upper portion of a base 22 fixed on the laminated rubber 20, a yoke 25 fixed and set on the supporting rubber 24, and a magnet 26. It is a direct drive type. At the upper end of the yoke 25,
The above-mentioned receiving plate 10 installed in the lower part is installed, and the frame 6 and the floor slab 7 are supported. Coil 2
3 is connected to the vibration control computer 4 by wiring (not shown).

As shown in FIG. 2, an acceleration sensor 40 is fixed and installed as a vibration sensor for detecting vibration in the lower center of the floor slab 7, and is connected to the vibration control computer 4 by wiring not shown. . On the side of the acceleration sensor 40, inertial mass type horizontal electromagnetic actuators 41a and 41b as first and second electromagnetic actuators that are horizontal vibration damping mechanisms are installed so as to be orthogonal to each other. As shown in FIG. 4, the horizontal electromagnetic actuators 41a and 41b respectively have cylindrical coils 42a and 42b each having an axis in the width direction of the floor member 8 and a longitudinal direction orthogonal to the width direction. Iron cores and magnets 43a and 43b having the same axis are arranged inside and outside 42a and 42b, respectively. The iron core and the magnets 43a and 43b are formed so as to have a predetermined weight, and are installed in a state of being suspended under the floor slab 7. Also, the coils 42a and 42b
Are fixed to support members 44a and 44b fixed to the lower part of the floor slab 7. The coils 42a and 42b are connected to the vibration control computer 4 by wiring (not shown).

According to the micro-vibration damping floor 1 having the above-mentioned structure, the vibration transmitted to the damping floor section 3 is detected by the acceleration sensor 40 in the lower center of the floor slab 7, and the information is output to the vibration control computer 4. The vibration control computer 4 calculates the necessary control amount from this information, and the vertical electromagnetic actuator 2
1 and horizontal electromagnetic actuators 41a and 41b
Then, the damping floor section 3 is actively controlled by supplying an appropriate current. That is, the coil 26 of the vertical electromagnetic actuator 21 is variably energized with an appropriate current corresponding to the vibration, and the floor slab 7 is vertically vibrated and vibration-isolated so as to cancel the vibration. On the other hand, the coils 42a and 42b of the horizontal electromagnetic actuators 41a and 41b are similarly variably supplied with an appropriate current corresponding to the vibration.
At this time, the coils 42a and 42b, which are suspended below the floor slab 7 and have a predetermined weight, vibrate in the horizontal direction, thereby canceling and isolating the two horizontal vibrations that are orthogonal to each other. In this way, vertical and two horizontal horizontal directions, that is, three-dimensional vibrations are actively controlled.

In the above microvibration damping bed, it is possible to control only the translational motion by driving all the electromagnetic actuators in each direction in the same phase, and it is also possible to control the rotary motion by individually driving the plurality of actuators. . If the vertical electromagnetic actuator is an inertial mass type due to inertial force, it is difficult to lower the natural frequency of the electromagnetic actuator below the natural frequency of the entire system, and it is lower than the natural frequency of the electromagnetic actuator. Since the frequency cannot be controlled, a direct drive type that is driven by reaction force is adopted and
It is installed between the floor and the floor 2. As a result, since the electromagnetic actuator is in the vibration transmission path, the natural frequency of the electromagnetic actuator becomes equal to the natural frequency of the entire system, so that the control is stable and a great effect can be obtained.

Since the horizontal electromagnetic actuator uses the inertial mass type by the inertial force, the degree of freedom of the system becomes large as compared with the direct drive type similar to the vertical direction. In addition, it is easier to install than the direct drive type, and it is easy to respond to changes after installation.

When the size of the floor slab 7 is changed in accordance with the change of the equipment to be placed in the above-described slight vibration damping floor 1, it is performed as follows. The floor slab 7 is removed from the frame member 6 which is detachably installed by bolts, and the floor slab 7 is disassembled and separated into four floor members 8 which are detachably connected by bolts. Then, the floor member 8 is replenished or deleted so as to have a predetermined size, and the floor member 8 is removably connected to the plane by bolts, and similarly, the floor member 8 is detachably erected on the frame member 6 by bolts. At this time, the floor member 8
Since it is a lightweight aluminum honeycomb plate, it can be easily disassembled and assembled. Further, since the floor slab 7 is made of an aluminum honeycomb slab, the floor slab 7 can be lightweight and have high rigidity. Even if the floor slab 7 is enlarged, high-precision vibration damping property is maintained and larger equipment can be mounted. You can Further, even when moving in response to a change in the production line or the like, since the floor slab 7, which has been the heaviest in the past, is lightened, it can be easily moved.

Since the vertical vibration damping mechanism 5 has the structure in which the vertical electromagnetic actuator 21 is installed on the laminated rubber 20, it is not controlled by the vibration control computer 4 or even when the electric system fails. , Laminated rubber 2
With 0, the function as a passive type remains. Therefore, even if the vertical electromagnetic actuator 21 and the horizontal electromagnetic actuators 41a and 41b are not operating, they have a certain vibration damping function. It is not necessary to use all electromagnetic actuators for the vertical vibration damping mechanism, and a vertical support mechanism in which a laminated rubber serving as a vertical spring is inserted in place of the actuator can be mixed in a well-balanced manner. In this way, by arranging the laminated rubber and the electromagnetic actuator in series or in parallel, or in an array in which both are combined, the shape of the equipment to be installed,
It can be configured to correspond to the weight and the like.

The laminated rubber 20 has a minimum pressure receiving area so as to have a minimum height for obtaining a required spring constant. However, since the laminated rubber 20 has a cylindrical shape having an axis at the top and bottom, the diameter with respect to the height is larger than a simple columnar shape. Is large and has high buckling stability. By thus forming the laminated rubber 20 into a cylindrical shape having vertical axis lines, when the pressure-sensitive areas of the laminated rubber 20 are the same, the pressure-receiving surface of the laminated rubber 20 is smaller than that of a simple columnar or polygonal column-shaped laminated rubber. The diameter of can be increased. Therefore, the buckling stability of the laminated rubber 20 is improved,
Even if it is set to the minimum pressure receiving area, the stability can be greatly increased compared to a simple cylindrical shape. As a result, the height of the laminated rubber 20 in the minimum pressure receiving area where the required spring constant can be obtained can be minimized. In this way, the height of the laminated rubber can be reduced and the height of the entire damping floor can be reduced, and the height of the equipment on the floor slab 7 can be set directly on the floor 2 of the building. It is possible to avoid a significant increase in the price compared to when placed. Although the laminated rubber 20 has a cylindrical shape having an axis line at the top and bottom, the same effect can be obtained even if it has a polygonal tubular shape having an axis line at the top and bottom.

As an example, the size of the floor slab 7 is 3 m ×
Even if it is set as large as 2.4 m, it is possible to obtain a highly accurate vibration damping effect. Further, when the size of the floor slab 7 becomes large, three or more frame members can be arranged separately as necessary. Further, the stopper 15 is provided as a stopper mechanism for preventing a large deformation of the damping floor part 3 due to an earthquake or the like, but a damper may be installed as a damper mechanism for suppressing a large deformation similarly. . Further, it is also possible to adopt a configuration in which both mechanisms are combined.

In this embodiment, the acceleration sensor is installed in the lower center of the floor slab 7, but the vibration of the floor 2 is referred to by providing the floor 2 of the building with a vibration sensor for detecting the vibration as well. The vibration control function can be further improved by adopting an active control system in which feedforward control for controlling the vibration of the floor slab 7 and feedback control for controlling the vibration of the floor slab 7 based on the feedback control law are combined. .

[0034]

According to the present invention, the following effects can be obtained. According to the slight vibration damping floor of claim 1, the vibration control device drives and controls the vertical vibration damping mechanism and the horizontal support mechanism based on the output of the vibration sensor that detects the vibration of the floor slab, Actively responds to floor vibrations by 3
It is possible to perform dimensional vibration isolation and vibration control. Further, since this floor slab is detachably fixed to the frame, and the floor slab itself is composed of the floor members that are detachably connected, the floor slab is suitable for the equipment to be placed. The size of can be easily changed, and the damping floor can be easily relocated. Therefore, new purchase or modification of the damping floor can be reduced as much as possible due to the change of the equipment or the production line, and the cost and the time required for the change can be significantly reduced.

According to the second aspect of the present invention, there is provided a support plate having a honeycomb structure between the upper plate portion and the lower plate portion. Since it is configured to have a portion, the floor member and the floor slab configured by these floor members, without reducing the rigidity,
The weight can be significantly reduced. As a result, the floor slab can be increased in size while maintaining a highly accurate vibration damping property, and a larger device can be mounted. Also, when disassembling and assembling when changing the size of the floor slab or moving the damping floor,
Since the floor slab is lightweight, it can be installed easily.

According to the microvibration damping floor of claim 3, in the microvibration damping floor of claim 1 or 2, an electromagnetic actuator is used for the vertical damping mechanism and the horizontal damping mechanism. Therefore, an appropriate current corresponding to vibration is
In addition to being able to perform highly accurate vibration suppression by varying the power supply to each electromagnetic actuator from the vibration suppression control device, in particular, the electromagnetic actuator consists of one or more in each of the vertical and horizontal directions. Therefore, it is possible to control only the translational motion by driving all the electromagnetic actuators in each direction in the same phase, and it is also possible to control the rotary motion by individually driving the plurality of actuators.
That is, it is possible to cope with various vibrations that were difficult with only the passive vibration isolator.

Moreover, the electromagnetic actuator of the vertical vibration damping mechanism uses a direct drive type which is provided between the floor slab and the floor and is driven by a reaction force. Since the actuator is in the vibration transmission path, Since the natural frequency is equal to the natural frequency of the whole system, the control is stable,
Great effect can be obtained. The inertial mass type is used for the electromagnetic actuator of the horizontal vibration control mechanism, which has a low natural frequency and has more system freedom than the direct drive type, and it can be installed or changed after installation. Can be done easily.

Moreover, in the vertical vibration damping mechanism,
Since the electromagnetic actuator is configured to have at least one of series and parallel arrangement with the laminated rubber, the laminated rubber can be used as a passive type even when it is not controlled by the vibration damping control device or when the electric system fails. The function remains and can have a certain damping function. Since there is a certain damping effect even when the mounted device is not used, the influence on the high precision devices can be reduced even in such a case. Since the laminated rubber is used as the passive vibration isolator instead of the air spring as described above, the air source and the level adjusting mechanism, which are required for the air spring, are not necessary, and the system can be a simple system.

According to the microvibration damping floor of claim 4, the microvibration damping floor according to any one of claims 1 to 3 is provided with at least one of a stopper mechanism and a damper mechanism. It is possible to prevent the floor slab from being greatly deformed due to such reasons as well as to prevent the actuator from being damaged due to the large deformation.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of a slight vibration damping floor of the present invention.

FIG. 2 is a plan view showing an embodiment of the slight vibration damping floor of the present invention.

FIG. 3 is a cross-sectional view of a main part for explaining a vertical vibration damping mechanism of an embodiment of the slight vibration damping floor of the present invention.

FIG. 4 is an enlarged plan view of the essential parts of the damping floor for explaining the horizontal damping mechanism and the vibration sensor of the embodiment of the slight vibration damping floor of the present invention.

[Explanation of symbols]

 1 Micro Vibration Damping Floor 2 Building Floor 3 Damping Floor 4 Vibration Control Computer 5 Vertical Direction Damping Mechanism 6 Frame Material 7 Floor Slab 8 Floor Member 8a Aluminum Honeycomb Material 8b, 8c Aluminum Plate 15 Stopper 20 Laminated Rubber 21 Vertical Directional Electromagnetic Actuator 40 Accelerometers 41a, 41b Horizontal Directional Electromagnetic Actuator

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Yuichiro Ogawa 1-32 Shibaura, Minato-ku, Tokyo Shimizu Construction Co., Ltd. (72) Kenji Suzuki 1-3-2 Shibaura, Minato-ku, Tokyo Shimizu Construction Within the corporation

Claims (4)

[Claims] 1. A frame member which is arranged apart from each other, a floor slab detachably installed on the frame member, a floor plate which is arranged on an upper surface of the floor to support the frame member above the floor, and A plurality of vertical vibration damping mechanisms for controlling the vertical vibrations of the floor slab through a frame, and a horizontal vibration damping mechanism provided in the floor slab for controlling the horizontal vibrations of the floor slab, A vibration sensor provided on the floor slab for detecting horizontal and vertical vibrations of the floor slab, and a vibration for driving and controlling the vertical vibration damping mechanism and the horizontal vibration damping mechanism based on the output of the vibration sensor. And a control device, wherein the floor slab includes a plurality of floor members detachably connected to each other on one plane. 2. The vibration damping floor according to claim 1, wherein the floor member has a support plate portion having a honeycomb structure provided between an upper plate portion and a lower plate portion. A characteristic vibration damping floor. 3. The micro-vibration damping floor according to claim 1, wherein the vertical vibration damping mechanism is provided with a laminated rubber and at least one of an arrangement in series or in parallel with the laminated rubber, The horizontal vibration damping mechanism includes one or more first inertial mass type electromagnetic actuators that perform vibration in one direction on a horizontal plane. A micro-vibration damping floor characterized by being constituted by one or more second inertial mass type electromagnetic actuators that perform damping in a direction orthogonal to the one direction. 4. The micro-vibration damping floor according to claim 1, wherein the floor slab comprises at least one of a stopper mechanism and a damper mechanism for preventing deformation of the floor slab due to vibration. A micro-vibration damping floor characterized by this.