JPH0875663A - Inspecting apparatus for printed wiring board - Google Patents

Abstract

PURPOSE: To prevent the vibration of a material under inspection, facilitate the attachment and removal, and perform the accurate pattern inspection by mounting a printed wiring board, and by supporting a surface plate, wherein an optical unit and a moving table are arranged, on a base stage through rubber vibration insulators. CONSTITUTION: When a pattern is inspected, a sucking blower 7 is operated, and the vibration occurs. Therefore, a base stage 5 is vibrated. However, the vibration of the base stage 5 is absorbed with rubber vibration insulators 6 provided between the base stage and a surface plate 4, and the vibration of the blower 7 is not transmitted to the surface plate 4. Therefore, an optical unit 2 and a printed wiring board 96 are not vibrated, and the accurate pattern inspection can be performed. When the wiring board 96 is removed after the inspection, the operation of the blower 7 is stopped. Thus the pressure of many sucking holes 30 of a moving table 3 is returned to the atmospheric pressure. Therefore, the wiring board 96 can be simply removed, and the attaching and removing works can be made easy.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pattern inspection device for inspecting a pattern formed on a printed wiring board.

[0002]

2. Description of the Related Art A circuit pattern provided on a printed wiring board may have defects such as disconnection and short circuit during its manufacturing process. Therefore, each printed wiring board is inspected using a pattern inspection device. As this pattern inspection device, there is a device having a light irradiation device for irradiating the pattern with light and a camera unit for imaging the pattern.

As a conventional light irradiation type pattern inspection apparatus, there is a pattern inspection apparatus 9 shown in FIG. The pattern inspection apparatus 9 has an optical system including a light irradiation device 90, an auxiliary light irradiation device 91, and a camera unit 95, and a movable table 9 on which a printed wiring board 96 which is an inspection object is mounted and moved.
It consists of 7.

When inspecting the pattern of the printed wiring board 96 in the pattern inspection device 9, the printed wiring board 96 is first fixed on the moving table 97. Then, the light from the light sources 901 and 902 of the light irradiation devices 90 and 91 is irradiated onto the printed wiring board 96 using the light guides 902 and 912. Then, the printed wiring board 9
The CCD camera 951 in the camera section 95 catches the detection light reflected from the camera 6.

The detection light caught by the camera unit 95 is
It is converted into a binary image and subjected to comparison inspection with the master pattern by a pattern analysis device (not shown). As a result, the presence or absence of a defect in the pattern is detected. Further, the light irradiation device 90 and the camera unit 95 are integrated by a frame and are scanned relative to a printed wiring board 96 which is an inspection object.

[0006]

However, the above conventional pattern inspection apparatus has the following problems. That is, the printed wiring board 96, which is the object to be inspected, must be securely fixed on the moving table 97 for inspection. If the printed wiring board 96 vibrates or shifts without being securely fixed, the image is disturbed and the inspection accuracy is significantly reduced.

Therefore, a method of mechanically clamping and fixing the printed wiring board on the moving table can be considered. However, this method requires time and effort for attaching and detaching the printed wiring board 96, and it is necessary to change the clamp mechanism for each dimension of the printed wiring board 96. Further, the printed wiring board 96 may be damaged by the clamp.

It is also possible to fix the printed wiring board 96 on the moving table 97 by providing a large number of suction holes on the moving table and sucking the printed wiring board 96 thereby. However, in this case, the vibration of the suction blower installed for suction is transmitted to the moving table 97 and causes the vibration of the printed wiring board 96. As a result, the image is disturbed and the inspection accuracy is reduced.

In view of the above conventional problems, the present invention can prevent vibration of an object to be inspected, can easily attach and detach the object to be inspected, and can perform an accurate pattern inspection. Is to provide.

[0010]

According to the present invention, there is provided a light irradiating device for irradiating a printed wiring board which is an object to be inspected, an optical system unit having a camera unit for receiving reflected light from the printed wiring board, and the print. A moving table on which a wiring board is placed and which has a large number of suction holes, a surface plate on which the optical system unit and the moving table are arranged, and the above-mentioned movement for sucking the printed wiring board placed on the moving table An inspection device comprising: a suction blower connected to a table; and a base on which the suction blower is mounted and on which the surface plate is placed, wherein the surface plate is a base plate via a vibration-proof rubber. The inspection device for a printed wiring board is characterized by being supported above.

What is most noticeable in the present invention is that the surface plate is supported on the base through the anti-vibration rubber. The anti-vibration rubber is provided at four corners where the surface plate and the base face each other, and the anti-vibration rubber has a three-sided structure in which a bottom plate portion and two lateral plate portions are joined at right angles to each other. Is preferred. As a result, the anti-vibration rubber having the three-sided structure can provide anti-vibration effects against vibrations in any of the four directions of the top and bottom of the surface plate and the base.

Further, it is also possible to provide a protruding leg portion on the surface plate, while the anti-vibration rubber has a shape having a bottomed hole into which the leg portion is inserted. As a result, the same effect as in the case of the three-sided structure anti-vibration rubber can be obtained. Further, the anti-vibration rubber preferably has an uneven surface. As a result, a higher vibration isolation effect can be obtained as compared with the case where there is no unevenness. Further, as the vibration-proof rubber, for example, chloroprene rubber, natural rubber or the like is used.

Next, it is preferable that the movable table and the suction blower are connected by a flexible suction duct hose. As a result, it is possible to further prevent the vibration of the suction blower from being transmitted to the moving table. Further, it is preferable that the optical system unit, the moving table and the surface plate are covered with a dustproof case. As a result, it is possible to prevent deterioration of inspection accuracy due to intrusion of dust and the like.

[0014]

In the printed wiring board inspection apparatus of the present invention, first, the printed wiring board that is the object to be inspected is
Place on the moving table. Next, the suction blower arranged on the base is operated. At this time, a large number of suction holes provided in the moving table become negative pressure due to the suction action of the suction blower connected thereto. Therefore, the printed wiring board is adsorbed on the moving table only by placing it on the moving table and can be securely and easily fixed.

Further, while the pattern of the printed wiring board is being inspected, the suction blower is operated, so that the suction blower vibrates. Then, the vibration is transmitted to the base on which the suction blower is installed, and the base also vibrates. However, the vibration of the base is absorbed by the anti-vibration rubber interposed between the base and the surface plate. Therefore, the vibration of the suction blower is not transmitted to the surface plate.

That is, the vibration of the base is not transmitted to the optical system unit arranged on the surface plate, the movable table, and the printed wiring board adsorbed on the movable table. Therefore, these do not vibrate and accurate pattern inspection can be performed.

Next, when the printed wiring board is removed after the inspection, the operation of the suction blower is stopped. As a result, many suction holes of the moving table return to atmospheric pressure. Therefore, the printed wiring board can be easily removed. That is, it is easy to attach and detach the printed wiring board, which is the object to be inspected.

As described above, according to the present invention, it is possible to prevent the vibration of the inspection object, and to easily attach and detach the inspection object.
Further, it is possible to provide an inspection device for a printed wiring board, which can perform an accurate pattern inspection.

[0019]

【Example】

Embodiment 1 A printed wiring board inspecting apparatus according to an embodiment of the present invention will be described with reference to FIGS. As shown in FIGS. 1 to 3, the printed wiring board inspecting apparatus 10 of this example includes two light irradiation devices 20 and 21 for irradiating a printed wiring board 96 which is an object to be inspected, and the printed wiring board. It has an optical system unit 2 having a camera unit 25 for receiving the reflected light from 96, and a moving table 3 on which the printed wiring board 96 is placed and which has a large number of suction holes.

Further, the surface plate 4 on which the optical system unit 2 and the moving table 3 are arranged, and the suction connected to the moving table 3 to suck the printed wiring board 96 placed on the moving table 3. It has a blower 7 and a base 5 on which the suction blower 7 is arranged and on which the surface plate 4 is placed.
Further, the surface plate is supported on the base 5 via a vibration-proof rubber 6.

Here, it should be noted that the surface plate 4 is supported on the base 5 via the antivibration rubber 6. The anti-vibration rubber 6 is provided at the four corners where the surface plate 4 and the base 5 face each other, as shown in FIG. Anti-vibration rubber 6
The bottom plate portion 61 and the two horizontal plate portions 62 are joined to each other at a right angle, and are made of chloroprene rubber. Further, the anti-vibration rubber 6 has a convex portion 601 and a concave groove 602 on both surfaces, as shown in FIG.

As shown in FIGS. 1 to 3, the optical system unit 2 is arranged on the surface plate 4 via a bridge 45 provided on the surface plate 4 and a traverse device 29. And
The optical system unit 2 is arranged so as to be capable of scanning in the horizontal direction of 90 degrees with respect to the moving direction of the moving table 3 by the action of the traversing device 29. In addition, the light irradiation devices 20, 21
Has light guides 201 and 211 for guiding light to the printed wiring board 96. In addition, the traverse device 29
An expandable bellows 291 for dust protection is provided on the front surface of the device, that is, on the mounting portion of the optical system unit.

The moving table 3 is shown in FIGS.
As shown in FIG. 2, the transfer device 39 is provided on the surface plate 4 and is arranged on the surface plate 4. The moving table 3 is
By the action of the transfer device 39, it is arranged so as to be movable in the horizontal direction of 90 degrees with respect to the moving direction of the optical system unit 2. In addition, the dustproof expandable bellows 3 is provided on the upper surface of the transfer device 39, that is, the mounting portion of the moving table 3.
91 is provided. Therefore, by combining the moving directions of the optical system unit 2 and the moving table 3,
The pattern on the printed wiring board 96 is freely scanned.

Further, as shown in FIG. 3, the moving table 3 and the suction blower 7 are connected via a flexible suction duct hose 75 and a suction box 33.
A large number of suction holes 30 provided in the moving table 3
Has an opening in the suction box 33.

Further, as shown in FIG. 2, an analysis device 80 is installed next to the printed wiring board inspection device 10.
Both are electrically connected. The analysis device 80 includes a pattern analysis device (not shown) for a printed wiring board and a control device (not shown) for the inspection device 10.

Further, as shown in FIG.
0 is covered by the dustproof case 15. The dust-proof case 15 is composed of a main body case 151, a front case 152 for a base cover extending forward of the main case 151, and a front upper case 153 provided on the front case 152. Note that FIG.
Reference numeral 79 denotes a blower for cooling the light source.

Next, the function and effect of this example will be described. In the printed wiring board inspection apparatus 10 of this example, first,
A printed wiring board 96, which is an object to be inspected, is placed on the moving table 3. At this time, a large number of suction holes 30 provided in the moving table 3 become negative pressure due to the suction action of the suction blower 7, and the printed wiring board 96 is sucked. Therefore, the printed wiring board 96 is attracted onto the moving table 3 and securely and easily fixed.

Next, while inspecting the pattern, the suction blower 7 is operated to cause vibration. Therefore, the base 5 also vibrates. However, the vibration of the base 5 is absorbed by the vibration-proof rubber 6 interposed between the base 5 and the base 4.
Therefore, the vibration of the suction blower 7 is not transmitted to the surface plate 4.

The flexible suction duct hose is provided between the suction blower 7 and the moving table 3. Therefore, the vibration of the suction blower 7 is absorbed by the suction duct hose 75 and is not transmitted to the moving table 3. Further, the vibration during the operation of the light source cooling blower 79 shown in FIG. 3 is also absorbed by the vibration isolating rubber and is not transmitted to the surface plate 4.

That is, the vibration of the base 5 is not transmitted to the optical system unit 2 arranged on the surface plate 4, the movable table 3, and the printed wiring board 96 attracted thereto. Therefore, the optical system unit 2 and the printed wiring board 96 do not vibrate, and accurate pattern inspection can be performed.

After the inspection, the printed wiring board 96
When removing, the operation of the suction blower 7 is stopped. As a result, many suction holes of the moving table 3 are returned to atmospheric pressure. Therefore, the printed wiring board 96 can be easily removed, and its attachment / detachment work is easy.

As described above, according to the present embodiment, there is provided a printed wiring board inspecting apparatus capable of preventing vibration of an object to be inspected, facilitating attachment / detachment of the object to be inspected, and performing accurate pattern inspection. Can be provided. Further, in this example, since the inspection device 10 is covered with the dust-proof case 15, it is possible to prevent deterioration of inspection accuracy due to intrusion of dust or the like.

Embodiment 2 In this embodiment, as shown in FIGS. 6a to 6c, in the printed wiring board inspection apparatus according to Embodiment 1, the surface plate 4 has a protruding leg portion 48 (FIG. 6c). On the other hand, the above-mentioned anti-vibration rubber 6
5 has a bottomed hole 66 into which the leg portion 48 is inserted (see FIG. 6).
a, b). Also, when assembling, see FIG.
As shown in, the leg portion 48 of the surface plate 4 does not come into contact with the bottom portion of the bottom surface 66 of the vibration-proof rubber 65. Also, the bottom surface 40 of the surface plate 4
1 is placed on the upper surface 651 of the anti-vibration rubber 65. Others are the same as in the first embodiment. Also in this example, the same effect as that of the first embodiment can be obtained.

[Brief description of drawings]

FIG. 1 is an exploded perspective view of a printed wiring board inspection apparatus according to a first embodiment.

FIG. 2 is a perspective view of a printed wiring board inspection device and an analysis device according to the first embodiment.

FIG. 3 is a side view of the printed wiring board inspection apparatus according to the first embodiment.

FIG. 4 is a partial cross-sectional perspective view of the anti-vibration rubber according to the first embodiment.

FIG. 5 is an explanatory diagram of a dustproof case of the printed wiring board inspection apparatus according to the first embodiment.

FIG. 6 is an explanatory view of a vibration-proof rubber according to the second embodiment.

FIG. 7 is an explanatory diagram of a conventional printed wiring board inspection apparatus.

[Explanation of symbols]

 10. ． ． Inspection device, 2. ． ． Optical system unit, 20, 21. ． ． Light irradiation device, 25. ． ． Camera part, 3. ． ． Mobile table, 4. ． ． Surface plate, 5. ． ． Base, 6. ． ． Anti-vibration rubber, 7. ． ． Suction blower, 75. ． ． Suction duct hose,

Claims (3)

[Claims] 1. An optical system unit having a light irradiation device for irradiating a printed wiring board, which is an object to be inspected, with light, and a camera section for receiving reflected light from the printed wiring board, and the printed wiring board mounted on the optical system unit. And a movable table having a large number of suction holes, a surface plate on which the optical system unit and the movable table are arranged, and a movable table connected to the movable table for adsorbing a printed wiring board placed on the movable table. An inspection device comprising a suction blower and a base on which the suction blower is mounted and on which the surface plate is placed. The surface plate is supported on the base via a vibration-proof rubber. An inspection device for printed wiring boards characterized by the fact that 2. The anti-vibration rubber according to claim 1, wherein the anti-vibration rubber is provided at four corners where the surface plate and the base face each other, and the anti-vibration rubber includes a bottom plate portion and two lateral plate portions. Is a three-sided structure in which each is bonded at right angles to each other. 3. The printed wiring board according to claim 1, wherein the surface plate has projecting legs, while the vibration isolating rubber has bottomed holes into which the legs are inserted. Inspection equipment.