JPH08771Y2 - Discharge electrode device for nitrogen laser - Google Patents
Discharge electrode device for nitrogen laserInfo
- Publication number
- JPH08771Y2 JPH08771Y2 JP1990047234U JP4723490U JPH08771Y2 JP H08771 Y2 JPH08771 Y2 JP H08771Y2 JP 1990047234 U JP1990047234 U JP 1990047234U JP 4723490 U JP4723490 U JP 4723490U JP H08771 Y2 JPH08771 Y2 JP H08771Y2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- electrode
- electrodes
- discharge electrode
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims description 41
- 229910052757 nitrogen Inorganic materials 0.000 title claims description 20
- 239000003990 capacitor Substances 0.000 claims description 9
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 4
- -1 nitrogen ions Chemical class 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Lasers (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 本考案は、窒素レーザ用放電電極装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a discharge electrode device for a nitrogen laser.
窒素レーザは、窒素（Ｎ2）ガスを収容した容器内に
対向配置された２個の放電電極の電極間に高電圧のパル
スを印加し、その放電電極でパルス放電を行わせ、これ
によって放電電極間で放電が行われることによって得ら
れるレーザである。The nitrogen laser applies a high-voltage pulse between two discharge electrodes arranged opposite to each other in a container containing a nitrogen (N 2 ) gas, and causes a pulse discharge at the discharge electrodes to discharge. It is a laser obtained by performing discharge between electrodes.
第４図及び第５図は、従来の放電電極装置の構造及び
等価回路の一例を示し、これらの図において、Ｃ1,C2は
一方の電極を互いに共用するように互いに並列接続され
たコンデンサで、例えば誘電体としてのセラミック１の
下面に銀又は銅などの薄い金属板を蒸着あるいは接着な
どの手段で止着して、共用側の一方の電極としての下部
電極２を形成する一方、セラミック１の上面に銀又は銅
などの薄い金属板を蒸着あるいは接着などの手段で止着
して、前記下部電極２に対向する他方の電極としての上
部電極３、４を形成し、コンデンサＣ1を上部電極３と
下部電極２とにより、また、コンデンサＣ2を上部電極
４と下部電極２とにより夫々構成してある。FIG. 4 and FIG. 5 show an example of a structure and an equivalent circuit of a conventional discharge electrode device. In these drawings, C 1 and C 2 are capacitors connected in parallel to each other so as to share one electrode with each other. Then, for example, a thin metal plate such as silver or copper is fixed to the lower surface of the ceramic 1 as a dielectric by vapor deposition or adhesion to form the lower electrode 2 as one electrode on the common side, while the ceramic is A thin metal plate such as silver or copper is fixed to the upper surface of 1 by means such as vapor deposition or adhesion to form upper electrodes 3 and 4 as the other electrode facing the lower electrode 2, and a capacitor C 1 is formed. The upper electrode 3 and the lower electrode 2 and the capacitor C 2 are constituted by the upper electrode 4 and the lower electrode 2, respectively.
５、６は上部電極３、４の上面に所定の間隔を置いて
夫々取り付けられている放電電極である。これら放電電
極５、６は例えば真鍮よりなり、その間隔を調整できる
ようにネジ止めされている。Reference numerals 5 and 6 are discharge electrodes attached to the upper surfaces of the upper electrodes 3 and 4 at predetermined intervals. These discharge electrodes 5 and 6 are made of brass, for example, and are screwed so that their intervals can be adjusted.
なお、第５図において、ＳはコンデンサＣ1の上部電
極３と下部電極２との間を短絡するように設けられた常
開スイッチである。In FIG. 5, S is a normally open switch provided so as to short-circuit the upper electrode 3 and the lower electrode 2 of the capacitor C 1 .
而して、上記構成の放電電極装置において、所定の放
電を発生させるには、まず、図外の電源によりコンデン
サＣ1、Ｃ2を所定の電圧に充電する。次いで、スイッチ
Ｓを瞬時に閉じると、コンデンサＣ1の極性が逆転し、
これによって放電電極５、６間に高電圧が印加されるた
め、両電極５、６間において主放電が生ずるのである。Thus, in the discharge electrode device having the above structure, in order to generate a predetermined discharge, first, the capacitors C 1 and C 2 are charged to a predetermined voltage by a power source (not shown). Then, when the switch S is instantly closed, the polarity of the capacitor C 1 is reversed,
As a result, a high voltage is applied between the discharge electrodes 5 and 6, so that a main discharge occurs between the electrodes 5 and 6.
この場合、前記主放電によって窒素分子が励起されて
電離し、窒素イオンが発生する。そして、この窒素イオ
ンは再結合や拡散によって発生してから約10ms後に消滅
する。In this case, nitrogen molecules are excited and ionized by the main discharge, and nitrogen ions are generated. Then, this nitrogen ion disappears about 10 ms after being generated by recombination and diffusion.
しかしながら、上記構成による放電電極装置では、繰
り返し周波数が100Hz以下で動作させる場合には、発生
した窒素イオンが次の放電開始時までにほとんど消滅し
てしまうため問題とならないが、繰り返し周波数が100H
z以上になると、前記主放電によって発生する窒素イオ
ンが放電電極５、６表面及びその周辺に残留したままの
状態で次の放電が開始されてしまうため、低いブレイク
ダウン電圧で放電してしまい、窒素分子に十分なエネル
ギーを与えることができず、放電は行われているがレー
ザ発振が起こらないという事態が発生したり、あるい
は、放電は1kHzで行われているにも係わらず、レーザ発
振自体は、100Hz以下の繰り返し動作になる恐れがあ
る。However, in the discharge electrode device having the above-mentioned configuration, when operating at a repetition frequency of 100 Hz or less, it is not a problem because the generated nitrogen ions almost disappear by the start of the next discharge, but the repetition frequency is 100H.
When it becomes z or more, the next discharge is started while the nitrogen ions generated by the main discharge remain on the surfaces of the discharge electrodes 5 and 6 and their surroundings, so that the discharge is performed at a low breakdown voltage, It is impossible to give sufficient energy to nitrogen molecules, and there is a situation where laser oscillation does not occur although discharge is occurring, or laser oscillation itself occurs even though discharge is occurring at 1 kHz. May cause repeated operation below 100 Hz.
本考案は、上述の事柄に留意してなされたもので、そ
の目的とするところは、高繰り返し動作が可能で、安定
に高出力が得られる窒素レーザ用の放電電極装置を提供
することにある。The present invention has been made in view of the above matters, and an object of the present invention is to provide a discharge electrode device for a nitrogen laser capable of high repetition operation and stably obtaining a high output. .
上述の目的を達成するため、本考案は、一方の電極を
互いに共用した２つのコンデンサの前記一方の電極にそ
れぞれ対応する２つの他方の電極にそれぞれ放電電極を
設けた窒素レーザ用放電電極装置において、前記各放電
電極と他方の電極間に隙間を設けるとともに、各放電電
極に、前記隙間と連通する複数の貫通孔を放電電極間の
間隙と平行に設け、窒素ガスを前記放電電極に強制循環
させるようにしている。In order to achieve the above-mentioned object, the present invention provides a discharge electrode device for a nitrogen laser, wherein discharge electrodes are provided on two other electrodes respectively corresponding to said one electrode of two capacitors which share one electrode with each other. , A gap is provided between each of the discharge electrodes and the other electrode, and a plurality of through-holes communicating with the gap are provided in each discharge electrode in parallel with the gap between the discharge electrodes, and nitrogen gas is forcedly circulated to the discharge electrode. I am trying to let you.
上記特徴構成によれば、放電電極と上部電極間にスペ
ーサ等によって隙間を設け、さらに、放電電極に複数の
貫通孔を設けているので、これらにファン等によって、
強制的に新鮮なＮ2を吹きつけることにより、放電電極
表面及びその周辺に存在する残留イオンは速やかに除去
され、放電電極周辺には、常に新鮮なＮ2が充たされる
ようになる。According to the above characteristic structure, a gap is provided between the discharge electrode and the upper electrode by a spacer or the like, and further, a plurality of through holes is provided in the discharge electrode.
By forcibly blowing fresh N 2 , residual ions existing on the surface of the discharge electrode and its periphery are quickly removed, and the periphery of the discharge electrode is always filled with fresh N 2 .
以下、本考案の実施例を図面に基づいて説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図〜第３図は本考案に係る窒素レーザ用放電電極
装置の一例を示し、７はアルミニウム又は鉄等の金属よ
りなる容器で、その側壁7a、7bにはそれぞれ開閉弁を設
けたＮ2の導入部８、導出部９が形成されている。1 to 3 show an example of a discharge electrode device for a nitrogen laser according to the present invention, 7 is a container made of a metal such as aluminum or iron, and side walls 7a and 7b thereof are provided with opening / closing valves respectively. A second introduction part 8 and a second extraction part 9 are formed.
そして容器７の内部上方には、Ｎ2の強制循環用ファ
ン10及びダクト11が設けられている。A fan 10 for forced circulation of N 2 and a duct 11 are provided above the inside of the container 7.
12は容器７の内部に設けられた窒素レーザ用放電電極
装置である。ここで、この放電電極装置12が従来の放電
電極装置と大きく異なる点は、上部電極３、４と放電電
極13、14との間に台座15、15をそれぞれ一対ずつ設けて
隙間ｇ1（第３図参照）を形成したことと、放電電極1
3、14に複数の貫通孔16をそれぞれ設けたことである。Reference numeral 12 is a discharge electrode device for a nitrogen laser provided inside the container 7. Here, the discharge electrode device 12 is greatly different from the conventional discharge electrode device in that a pair of pedestals 15 and 15 are provided between the upper electrodes 3 and 4 and the discharge electrodes 13 and 14 to form a gap g 1 (first 3) and the discharge electrode 1
That is, a plurality of through holes 16 are provided in each of 3 and 14.
これらの台座15、15は例えば銅等の導電性の良好な材
料よりなり、例えばハンダ付け等の手段により上部電極
３、４及び放電電極13、14に止着されている。These pedestals 15 and 15 are made of a material having good conductivity such as copper, and are fixed to the upper electrodes 3 and 4 and the discharge electrodes 13 and 14 by means of soldering or the like.
なお、前記放電電極13,14に設けられる貫通孔16の形
状や個数は任意である。そして、第３図において、ｇ2
は放電電極13,14間の隙間である。また、第２図、第３
図において、符号１、２、３、Ｃ1、Ｃ2は第４図で説明
したものと同じである。The shape and number of the through holes 16 provided in the discharge electrodes 13 and 14 are arbitrary. And in FIG. 3, g 2
Is a gap between the discharge electrodes 13 and 14. Also, FIG. 2 and FIG.
In the figure, reference numerals 1, 2, 3, C 1 and C 2 are the same as those described in FIG.
容器７内にＮ2を充たした状態で、図外のスイッチを
操作して、ファン10を矢印Ａ方向に回転させると、Ｎ2
はダクト11の吸入口11aから吸入され、矢印Ｂで示され
るように排出口11bを経て、前記放電電極装置12に導か
れ、貫通孔16および放電電極13,14間の隙間ｇ2を抜け、
さらに上部電極3,4と放電電極13,14との間の隙間ｇ1を
通って、容器１内の空間に開放される。In a state that satisfies the N 2 into the container 7, by manipulating the non-illustrated switch, rotating the fan 10 in the direction of arrow A, N 2
Is sucked in through the suction port 11a of the duct 11, guided through the discharge port 11b as shown by the arrow B to the discharge electrode device 12, passes through the through hole 16 and the gap g 2 between the discharge electrodes 13 and 14,
Further, it is opened to the space inside the container 1 through the gap g 1 between the upper electrodes 3 and 4 and the discharge electrodes 13 and 14.
従って、放電電極13、14間及びその周辺に残留するイ
オンに対しＮ2が強制的に吹き付けられ、さらに放電電
極13、14に設けられた複数の貫通孔16及び上部電極３、
４と放電電極13、14間に設けられた隙間ｇ1を流れるＮ2
によってイオンは効率よく除去されるので、高繰り返し
動作でレーザ発振を得ることができ、しかも常に均一な
放電が得られるので、出力の安定性も高くなる。Therefore, N 2 is forcibly blown to the ions remaining between and around the discharge electrodes 13 and 14, and the plurality of through holes 16 provided in the discharge electrodes 13 and 14 and the upper electrode 3,
N 2 flowing through the gap g 1 provided between the discharge electrode 4 and the discharge electrodes 13 and 14
Since ions are efficiently removed by this, laser oscillation can be obtained with high repetition operation, and moreover, uniform discharge is always obtained, so that the stability of output is also improved.
以上説明したように、本考案においては、２つの放電
電極と他方の電極間に隙間を設けるとともに、各放電電
極に、前記隙間と連通する複数の貫通孔を放電電極間の
間隙と平行に設け、窒素ガスを前記放電電極に強制循環
させるようにしているので、放電電極間およびその周辺
は通気性がよくなり、常にその周辺に新鮮な窒素ガスが
充たされるようになるとともに放電が安定し、その結
果、レーザの高繰り返し動作が可能となり、非常に安定
なレーザ出力を得ることができる。As described above, in the present invention, a gap is provided between the two discharge electrodes and the other electrode, and each discharge electrode is provided with a plurality of through holes communicating with the gap in parallel with the gap between the discharge electrodes. Since the nitrogen gas is forcedly circulated to the discharge electrodes, the air permeability between the discharge electrodes and the periphery thereof is improved, and the periphery is constantly filled with fresh nitrogen gas, and the discharge is stable, As a result, a high repetition operation of the laser becomes possible, and a very stable laser output can be obtained.
第１図〜第３図は本考案に係る窒素レーザ用放電電極装
置を示し、第１図は窒素レーザ装置の全体図、第２図は
窒素レーザ用放電電極装置を示す斜視図、第３図はその
縦断面図である。 第４図および第５図は従来の窒素レーザ用放電電極装置
を示し、第４図は縦断面図、第５図は等価回路を示す図
である。 ２……一方の電極、3,4……他方の電極、12……窒素レ
ーザ用放電電極装置、13,14……放電電極、16……貫通
孔、Ｃ1,C2……コンデンサ、ｇ1……放電電極と他方の
電極との間の間隙、ｇ2……放電電極間の隙間。1 to 3 show a discharge electrode device for a nitrogen laser according to the present invention, FIG. 1 is an overall view of the nitrogen laser device, FIG. 2 is a perspective view showing the discharge electrode device for a nitrogen laser, and FIG. Is a vertical sectional view thereof. 4 and 5 show a conventional discharge electrode device for nitrogen laser, FIG. 4 is a vertical sectional view, and FIG. 5 is an equivalent circuit. 2 …… One electrode, 3,4 …… Other electrode, 12 …… Discharge electrode device for nitrogen laser, 13,14 …… Discharge electrode, 16 …… Through hole, C 1 , C 2 … Capacitor, g 1 ...... Gap between discharge electrode and other electrode, g 2 ...... Gap between discharge electrodes.
フロントページの続き (56)参考文献 特開 昭61−176178（ＪＰ，Ａ) 特開 昭61−116889（ＪＰ，Ａ) 特開 昭56−125883（ＪＰ，Ａ)Continuation of front page (56) Reference JP 61-176178 (JP, A) JP 61-116889 (JP, A) JP 56-125883 (JP, A)
Claims (1)
ンサの前記一方の電極にそれぞれ対応する２つの他方の
電極にそれぞれ放電電極を設けた窒素レーザ用放電電極
装置において、前記各放電電極と他方の電極間に隙間を
設けるとともに、各放電電極に、前記隙間と連通する複
数の貫通孔を放電電極間の間隙と平行に設け、窒素ガス
を前記放電電極に強制循環させるようにしたことを特徴
とする窒素レーザ用放電電極装置。1. A discharge electrode device for a nitrogen laser, wherein discharge electrodes are provided on two other electrodes respectively corresponding to the one electrode of two capacitors which share one electrode with each other. In addition to providing a gap between the electrodes, a plurality of through holes communicating with the gap are provided in each discharge electrode in parallel with the gap between the discharge electrodes, and nitrogen gas is forcedly circulated to the discharge electrodes. Discharge electrode device for nitrogen laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990047234U JPH08771Y2 (en) | 1990-05-02 | 1990-05-02 | Discharge electrode device for nitrogen laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990047234U JPH08771Y2 (en) | 1990-05-02 | 1990-05-02 | Discharge electrode device for nitrogen laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH045667U JPH045667U (en) | 1992-01-20 |
| JPH08771Y2 true JPH08771Y2 (en) | 1996-01-10 |
Family
ID=31562989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990047234U Expired - Lifetime JPH08771Y2 (en) | 1990-05-02 | 1990-05-02 | Discharge electrode device for nitrogen laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08771Y2 (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56125883A (en) * | 1980-03-10 | 1981-10-02 | Agency Of Ind Science & Technol | Lateral-direction excitation type gas laser oscillator |
| JPS61116889A (en) * | 1984-11-13 | 1986-06-04 | Mitsubishi Electric Corp | Discharge excitation short pulse laser device |
| JPS61176178A (en) * | 1985-01-31 | 1986-08-07 | Nippon Kogaku Kk <Nikon> | Laser chamber of gas circulation system discharge type |
-
1990
- 1990-05-02 JP JP1990047234U patent/JPH08771Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH045667U (en) | 1992-01-20 |
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