JPH0877247A - Production efficiency evaluation method and its equipment, and production line designed by this method - Google Patents

Abstract

(57) [Abstract] [Purpose] The present invention relates to a device that is involved in the design of a production line, can calculate the production efficiency when designing the production line, and can change the equipment configuration to improve the production efficiency. Specifically, in constructing a semiconductor production line, the equipment configuration is modified so as to maximize production efficiency. [Structure] Equipment capacity calculation device that calculates equipment capacity from equipment data input from input device (1), input device (2) that inputs target production quantity, and equipment capacity (total capacity) for each equipment type Are displayed and compared in descending order, and the equipment capacity comparison device that can grasp the equipment that has the capacity bottleneck is calculated, and the production efficiency is calculated from the capacity of the equipment and the target number of products to be produced. A production efficiency evaluation device characterized by having a calculation device capable of changing the configuration and recalculating the production efficiency.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus relating to the design of a production line, capable of calculating the production efficiency when designing the production line, and changing the equipment configuration to improve the production efficiency. Specifically, in constructing a semiconductor production line, features of work in a work process (hereinafter abbreviated as process), for example, processing time of manufacturing equipment in the process, processing form (batch processing, divided batch processing, lot) (Processing, etc.), manufacturing conditions, processing unit, setup, maintenance content / timing, etc. to modify the equipment configuration to maximize production efficiency.

[0002]

2. Description of the Related Art Up to now, as a patent relating to a method for designing a production line, there is an apparatus described in Japanese Patent Application Laid-Open No. 5-108667 "Facility Planning Support Device". This device has the following functions. (1) A device that can be evaluated to obtain a modified new construction that is effective in performing multiple goals during equipment planning. (2) A device that can evaluate the alternative plan of the facility plan in consideration of the qualitative evaluation item quantitatively and the quantitative evaluation item, and can be easily and quickly processed.

[0003]

However, the above-mentioned prior arts have the following points in that the production efficiency is not taken into consideration only in consideration of the quantitative evaluation of the in-process reduction, the reduction of the number of workers, and the reduction of the lead time. There is a problem. (1) There are too many evaluation items when designing a production line, and it is difficult for the user to make a judgment. (2) When the user considers a plurality of plans, since the weighting is considered for each evaluation item, the amount of data input by the user is large and the burden on the user becomes too large.

An object of the present invention is to provide the following functions. (1) It is possible to interactively improve the production efficiency with a facility configuration that takes into consideration the characteristics of work that differs for each process and for each manufacturing facility. (2) It is possible to give the user a measure for improving the production efficiency so that the production efficiency can be automatically improved based on the equipment information. (3) Production efficiency is 80% to 90% depending on the scale of the line
Can be configured. (4) The production line is evaluated based on the evaluation item called production efficiency, which makes the design of the production line easier than before.

[0005]

As a basic means, a production efficiency evaluation apparatus of the present invention is based on a first input device for inputting data relating to production equipment and equipment data from the first input device. Equipment capacity calculation device that calculates equipment capacity, equipment capacity comparison device that compares equipment capacity for each equipment type, second input device that inputs target production amount, production efficiency is calculated, and problem equipment is extracted And a calculation device capable of correcting the equipment configuration.

[0006]

The characteristics of the semiconductor manufacturing equipment, for example, the processing form of the equipment (batch processing, divided batch processing, lot processing, etc.), manufacturing conditions, processing unit, setup, maintenance content / timing, etc. are manually input. Calculate the facility capacity with the input data and compare the total capacity. Further, the result of calculating the facility capacity is sent to the calculation device, the facility is selected from the investment amount, and the production efficiency is calculated from the facility capacity of the selected facility and the target production quantity using the procedure of FIG. Also, in the production efficiency evaluation device,
Since the facility capacity data for each facility type is stored, the data for each facility type can be searched and displayed by the production efficiency evaluation device. Further, by using the equipment capacity data, the production efficiency evaluation device can display the equipments in order from the highest total capacity for each equipment type. As a result, the user can determine at a glance which equipment has poor production efficiency, and can easily change the equipment configuration.
By providing the production efficiency evaluation device with the means for displaying the facility capacity data, the facility capacity data can be grasped and compared before the line is constructed, and the facility configuration can be changed to improve the production efficiency. In addition, by comparing the total capacity of each equipment, the problem equipment can be remodeled and modified with emphasis, and the production line with the best production efficiency can be designed.

[0007]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is one embodiment of the production efficiency evaluation apparatus 1 of the present invention. The production efficiency evaluation device comprises a first input device 1, an equipment capacity calculation device 2, an equipment capacity comparison device 3, a second input device 4, and a calculation device 5. From the processing time for each equipment type input from the first input device 1, manufacturing conditions, preparation setup time / frequency, failure rate, equipment form,
The equipment capacity calculation device 1 calculates the operating rate and the equipment capacity. Further, the equipment capacity data for each equipment type is sent from the equipment capacity calculation device to the equipment capacity comparison device 3, and the equipment capacity data for each equipment type can be compared. The target production quantity and the investment amount, which are the production line plans, are input by the second input device 4. The calculation device 5 selects a facility type according to the investment amount, and calculates the production efficiency from the capacity of the selected facility and the target production quantity 6
Have. Then, a function 7 for extracting the problem equipment and a function 8 for correcting the equipment configuration are provided, and the function 6 recalculates the production efficiency.

Next, referring to FIG. 2, the calculation procedure of the production efficiency in the calculation section will be described. In step S11, an equipment type that meets the basic conditions (price, equipment capacity) is selected from the equipment capacity calculation device. In step S12, the equipment capacity of the equipment type,
From the work order of the production line and the target production quantity, the number of each equipment and the target takt time are calculated. Next in step S13
By calculating the production efficiency in step S14 and evaluating the production efficiency in step S14, it is determined in step S15 whether the production efficiency is 80% or more. If so, the evaluation result is output in step S19, and the process ends. If not, the problem equipment is extracted in step S16. In step S17, a countermeasure is examined for this problem equipment, and a countermeasure judged by a person is input. The configuration of the equipment is changed in step S18, and the process returns to step S12.

For example, a plurality of products are produced at the same time, processing is performed in a plurality of steps until one product is completed, and the characteristics of the work (processing mode, number of simultaneously processed products, setup change) for each step. In a job shop line where conditions are different) and similar processes are put together to work in the same equipment, as shown in Fig. 3, the operating rate is calculated from the processing time of the process, equipment setup time / frequency, and failure rate. Shown in the table.
The value of each item is calculated from this table by the formula shown in FIG.

3 and 8, the target production quantity is 60
Assuming 0 sheets, (1) the target takt time is: target takt time = 24 (hours) × 60 (minutes) / target number of products produced = 24 × 60/600 = 2.4 (minutes)

(2) Number of facilities Number of facilities = total work time / (target tact time × operating rate) (total work time = total work time of all processes for each facility) In the case of the facility 1 shown in FIG. 1, the process 2 is processed, and the total working time is 2 + 2.4 = 4.4. The operating rate is set to 0.85. Therefore, the number of facilities of the facility 1 is: number of facilities = 4.4 / (2.4 × 0.85) = 2.157 Since the number of facilities is an integer, three facilities 1 are required.
By the same calculation, the equipment 2 is calculated as 3 and the equipment 3 is calculated as 1.

(3) Equipment single capacity Equipment single capacity = 24 (hours) × 60 (minutes) × operating rate / total work time In the case of equipment 1, equipment single capacity = 24 × 60 × 0.85 / 4.4 = 556.4 Equipment 2 and Equipment 3 are calculated as 694.3 and 760, respectively.

(4) Single capacity Single capacity = single equipment capacity / number of processes In the case of equipment 1, single capacity = 556.4 / 2 = 278.2 Equipment 2 and equipment 3 are calculated as 231.4 and 760, respectively. It

(5) Total capacity Total capacity = single capacity × number of equipments In the case of equipment 1, total capacity = 278.2 × 3 = 834.5 Equipments 2 and 3 are calculated as 694.3 and 760, respectively. .

(6) Production efficiency

[Equation 1] In the case of the semiconductor production line in FIG. 3, production efficiency = ((600 / 834.5) × 3 + (600 /
694.3) × 3 + (600/760) × 1) /7=0.791.

Next, the following points, which are problems of the equipment, are displayed as a countermeasure plan from the production efficiency obtained by using the production efficiency evaluation device, and the equipment configuration is changed by the user's selection. (1) Change to equipment that is different from the problem equipment type. (2) Change the equipment configuration (for example, divide and merge the processes for each equipment). (3) Change the processing mode for each facility (improve work time and operation rate of each process). (4) Reduction of equipment types.

FIG. 4 shows a first measure for improving production efficiency. In the first countermeasure, the process of step 3 of the equipment 2 in the production line of FIG. 3 is transferred to the equipment 1. By this shift, the number of steps 2 of the equipment 1 increases to 3, and the number of steps of the equipment 2 decreases from 3 to 2. In this production line, the number of facilities 2 will decrease from 3 to 2, and the total number of facilities will also decrease from 7 to 6. When the production efficiency of this production line is calculated to be 0.93, the production efficiency of the production line of FIG.
It was possible to improve compared with 79.

FIG. 5 shows a second measure for improving the production efficiency. In this production line, the processing time of the process 2 of the equipment 1 in the production line of FIG. 3 is shortened from 2.4 to 2. By changing the processing time of the process 2 of the equipment 1, the total number of devices can be reduced from 7 to 6. Then, the production efficiency of the production line in FIG. 5 was calculated to be 0.89, and the production efficiency could be improved by 0.1 as compared with the production efficiency of 0.79 before the countermeasure.

Taking a semiconductor production line as an example, the equipment single capacity is calculated from the target number of products to be manufactured, and the single capacity and the total capacity are calculated from the values, as shown in FIG. The production efficiency of this line is 85%. FIG. 7 shows the relationship among the number of produced products, the production efficiency, and the total number of equipment. As shown in FIG. 7, as the target production number increases, the production efficiency increases and the number of facilities increases. For example, in the equipment of the semiconductor production line, since the equipment capacity is different, the production efficiency is 80% unless the target production quantity exceeds a certain quantity as shown in FIG.
In order to avoid the above, a large-scale semiconductor production line is usually constructed. Therefore, an ideal line is constructed by extracting problem equipment with a production efficiency evaluation device and improving the problem equipment. In other words, the production efficiency is maximized by improving the problem equipment with the following points as issues.

(1) The processing form is changed for each facility.
(Improving the work time and operating rate of each process) (2) To make it possible to use multi-generation equipment by standardizing equipment. (3) Reduction of equipment types and number of processes, process design that aligns the processing time of each process, standardization of equipment downtime (equal to downtime or perform simultaneous maintenance). (4) Unify the number of sheets processed by each facility. (5) If the processing time of equipment is + L> processing time> -L, the production efficiency will be 80% or more. (Calculation formula: L = K (number of sheets per lot) × M × 80
%, Where M is an integer greater than or equal to 1) From these, using this production efficiency evaluation device to improve the problem equipment or change the equipment configuration to improve production efficiency and reduce the total number of equipment It becomes an ideal line like the dotted line of 7.

FIG. 9 is an explanatory diagram showing the transition of the display screen when the process of improving the production efficiency is performed by using the production efficiency evaluation apparatus 1 of the present invention. The screen D100 is a screen for inputting facility capacity, and is a screen for inputting facility capacity using the first input device 10. The screen D101 is a line plan input screen for inputting the configuration of the semiconductor production line. The screen D102 is a production efficiency evaluation screen and displays the calculation result of the production efficiency. The screen D103 is a production efficiency comparison screen of each facility, and the production efficiency of each facility can be compared on the screen. The screen D104 is a display screen of countermeasure plans, and displays each countermeasure plan for improving the production efficiency of the semiconductor production line described in FIGS. 3, 4, and 5. Screen D1
05 displays a screen for modifying the equipment configuration based on the countermeasure plan. After that, the screen returns to the screen D102, and the production efficiency is re-evaluated based on the corrected equipment configuration.

[0022]

As described above, the production efficiency evaluation apparatus of the present invention can calculate the production efficiency, extract the problem equipment, and correct the equipment configuration. As a result, the following effects are prominent. (1) The production efficiency is 80% to 90% with respect to the target production quantity
It is possible to interactively modify the equipment configuration. (2) The capacity bottleneck equipment can be grasped even before the production line is started up, and countermeasures against it can be taken from the time the line is started up.

[Brief description of drawings]

FIG. 1 shows an embodiment of the device configuration of the present invention.

FIG. 2 is a production efficiency calculation flowchart.

FIG. 3 is a specific example of production efficiency calculation (1).

FIG. 4 is a specific example (2) of production efficiency calculation.

FIG. 5 is a specific example (3) of production efficiency calculation.

FIG. 6 is a specific example of equipment capacity.

FIG. 7 shows the relationship between the target production quantity, production efficiency, and the total number of machines.

FIG. 8: Production efficiency calculation procedure.

FIG. 9: Transition of production efficiency evaluation screen.

[Explanation of symbols]

 1 Input Device (1) 2 Equipment Capacity Calculation Device 3 Equipment Capacity Comparison Device 4 Input Device (2) 5 Calculation Device 6 Production Efficiency Calculation Unit 7 Problem Equipment Extraction Unit 8 Equipment Configuration Correction Unit 11 Step 11 12 Step 12 13 Step 13 14 Step 14 15 Step 15 16 Step 16 17 Step 17 18 Step 18 19 Step 19 100 Equipment capacity screen 101 Line planning screen 102 Production efficiency evaluation screen 103 Production efficiency comparison screen for each equipment 104 Countermeasure screen 105 Equipment configuration correction screen

Claims (5)

[Claims] 1. A first method for inputting data relating to production equipment
Input device, an equipment capacity calculation device that calculates equipment capacity based on equipment data from the first input device, an equipment capacity comparison device that compares equipment capacity for each type of equipment, and a target production amount are input. A production efficiency evaluation device comprising a second input device and a calculation device for calculating production efficiency. 2. The calculation device calculates production efficiency based on equipment capacity data and target production data, and
The production efficiency evaluation apparatus according to claim 1, further comprising a function of changing / correcting the equipment configuration and recalculating the production efficiency when the equipment type data is changed. 3. The production efficiency evaluation apparatus according to claim 1, wherein the calculation apparatus has a function of calculating production efficiency for each facility and displaying the facilities side by side in the order of facility capacity. 4. A first method for inputting data relating to production equipment
Input device, an equipment capacity calculation device that calculates equipment capacity based on equipment data from the first input device, an equipment capacity comparison device that compares equipment capacity for each type of equipment, and a target production amount are input. A second input device and a calculation device for calculating production efficiency are provided, a step of inputting equipment data, a step of inputting a target production volume, and a step of calculating the number of equipments and a target tact time from the target production volume. The step of calculating the production efficiency, the step of evaluating the production efficiency, the step of comparing the production efficiency with the target value, and if the target value is reached, the equipment configuration and the production efficiency are output, and the production efficiency is the target value. In the following cases, steps to extract problem equipment, steps to display countermeasures against problem equipment, steps to change equipment configuration, and production again based on changed equipment configuration A production efficiency evaluation method comprising the step of returning to the process of calculating efficiency. 5. A semiconductor production line designed by the production efficiency evaluation method according to claim 4 and configured to have a production efficiency of 80% or more.