JPH088275A - Fluid supply device - Google Patents

Abstract

(57) [Summary] [Purpose] To secure the alignment of the syringe holder in the XYZθ directions. [Structure] A fitting hole 35 for a nozzle and an adapter ring is formed in a lower end portion of a holder 30 that detachably holds a syringe 11 for injecting the silver paste 1 from a nozzle 15.
The inner diameter of the fitting hole is set to the outer diameter of the adapter ring 20,
A support portion 36 and a ball plunger 38 are provided on the inner periphery thereof, and a holding device 50 is provided outside the fitting hole. [Effect] When the nozzle and the adapter ring are fitted into the fitting hole, they are supported from below and are aligned with the fitting hole. When the nozzle and the adapter ring are stopped, the circumferential position is regulated.
When the nozzle and the adapter ring are pressed by the pressing device, the axial position is regulated. As a result, the syringe is properly attached to the holder.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid supply device, and more particularly to a structure for holding a syringe for supplying a fluid,
For example, in a manufacturing process of a semiconductor device, a silver paste supply device provided in a pellet bonding device for bonding a semiconductor pellet (hereinafter referred to as a pellet) onto a substrate, and a potting device for sealing the pellet with a resin. The present invention relates to a device effectively used for a sealing resin supply device installed in.

[0002]

2. Description of the Related Art In a semiconductor device manufacturing process, a silver paste is applied to a bonded portion of a substrate as a pellet bonding device for bonding a pellet onto a bonding portion of the substrate such as a tab of a lead frame or a land of a ceramic substrate. In some cases, the pellet is adhered to the bonded portion by pressing the pellet on the applied silver paste. In such a pellet bonding apparatus, a silver paste supply device, which is an example of a fluid supply device, is used as a device for applying a silver paste as a fluid to a bonded portion.

As a conventional silver paste supply device of this type, it is provided with a syringe for injecting the contained silver paste from a nozzle and a holder for detachably holding the syringe and for making the nozzle face a pellet bonding position. There is something. Then, as a structure for fixing the syringe to the holder, a screwing structure or a split tightening structure is used.

An example of the pellet bonding apparatus is disclosed in Japanese Patent Laid-Open No. 59-201451.

[0005]

In the above-mentioned silver paste supply device, since a screwing structure or a split tightening structure is used as a structure for fixing the syringe to the holder, it is wasteful to fix it. In addition, there is a problem that the accuracy of reproducing the mounting state of the syringe on the holder is low. Then, if the accuracy of reproducing the attachment state of the syringe to the holder is low, fine adjustment of the attachment position is required after the attachment of the syringe to the holder, and the workability is further reduced.

An object of the present invention is to provide a fluid supply device which can properly and quickly attach a syringe to a holder.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0008]

The typical ones of the inventions disclosed in the present application will be outlined below.

That is, in a fluid supply device comprising a syringe for injecting the stored fluid through a nozzle, and a holder for detachably holding the syringe and facing the nozzle to a supply position, A fitting hole into which the nozzle portion is fitted is formed at the lower end of the holder, and the inner diameter of the fitting hole is set to be equal to or larger than the outer diameter of the nozzle, and the inner circumference supports the nozzle portion from below. A rotation preventing portion for preventing rotation of the support portion and the nozzle portion is formed, and a holding device for holding the nozzle portion fitted in the fitting hole from above is provided outside the fitting hole.

[0010]

In the above-mentioned means, when the nozzle portion of the syringe is fitted into the fitting hole of the holder, the syringe is supported from below and is aligned with the fitting hole. When the rotation is stopped, the nozzle is in a state where the position in the circumferential direction is regulated. Further, when the nozzle portion is pressed by the pressing device, the syringe is in a state in which movement of the syringe in the axial direction is blocked by the supporting portion of the fitting hole and the pressing device. As a result, the syringe is properly attached to the holder in the XYZ and θ directions.

When the syringe is attached to the holder, the nozzle portion is fitted into the fitting hole, the nozzle portion is prevented from rotating by the rotation stopping portion, and the holding portion is used to hold the nozzle portion. Therefore, the installation work is simple and quick.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a silver paste supplying apparatus according to an embodiment of the present invention. (A) is an overall perspective view, (b) is a perspective view of a nozzle, and (c) is a perspective view of an adapter ring. Is. 2A and 2B show the holder, FIG. 2A is a plan sectional view taken along line aa in FIG. 2B, FIG. 2B is a front view, and FIG. FIG. 3 shows the main part thereof, and (a)
Is an enlarged perspective view, and (b) is an enlarged partial sectional view.

In this embodiment, the fluid supply device according to the present invention is configured as a silver paste supply device 10 for supplying a silver paste as a fluid, and this silver paste supply device 10 is a pellet bonding device. In the above, the silver paste is supplied and applied to the tab (not shown) of the lead frame to which the pellet is bonded.

The silver paste supply device 10 has a syringe for containing a silver paste as a fluid, a nozzle for injecting the silver paste contained in the syringe, and a detachable holder for the syringe, and the nozzle is placed at a bonding position. And a holder facing each other. The syringe 11 has a main body 12 formed in a cylindrical shape, and the hollow portion of the main body 12 accommodates the silver paste 1 as a fluid. A flange 13 is provided on the upper end of the main body 12 so as to project outward in the radial direction, and a pressure supply pipe (not shown) is detachably fluidly connected to the main body 12 by the flange 13. ing. On the other hand, a nozzle mounting portion 14 is formed at the lower end portion of the main body 12, and the mounting portion 14
Is configured so that the nozzle 15 can be detachably mounted.

Nozzles 15 having a plurality of standards are prepared.
The nozzles 15 of each standard are configured to be detachably attached to the nozzle mounting portions 14 formed at the lower end of the syringe 11, and the nozzles 15 of each standard have different outer diameters. In the nozzle 15 of each standard, the injection mode, injection speed, injection amount, etc. of the silver paste from the syringe 11 can be appropriately controlled by appropriately changing and adjusting the number, position, and diameter of the silver paste injection ports 17. It has become. Further, an engaging groove 16 is recessed in a part of the outer periphery of each nozzle 15 so as to extend in a direction parallel to the axis. For the sake of convenience, only one standard nozzle 15 is shown.

In this embodiment, a plurality of standard adapter rings 20 each formed in a circular ring shape having a different inner diameter are prepared.
Is set so that its inner diameter is equal to the outer diameter of the nozzle 15 of each standard. Each adapter ring 20 is manufactured by using a material having appropriate elasticity such as stainless steel, and a split groove 21 is cut in a part of its cylindrical wall in parallel with the axial direction, and A pin 22 is provided on a part of the inner surface of the pin 22 so as to project radially inward. Therefore, the entire adapter ring 20 is fitted onto the outer periphery of the nozzle 15 from the lower side, and the pin 22 is inserted into the engagement groove 16, whereby the adapter ring 20 of each standard is fitted to the nozzle 15 of the corresponding standard. Are each configured to be combined. For the sake of convenience, only one standard adapter ring 20 is shown.

The outer diameter of each standard adapter ring 20 is set to be equal to the inner diameter of the fitting hole of the holder described later. Therefore, the adapter rings 20 of each standard are configured so that they can be fitted into the fitting holes of the holder. An engagement recess 23 is recessed in a V-shape on the outer periphery of each adapter ring 20 so as to extend in a direction parallel to the axis, and the engagement recess 23 can be engaged with a ball plunger described later. Is configured.

On the other hand, the holder 30 has a main body 31 having a height substantially equal to the length of the syringe 11. The holder body 31 is adapted to be attached to an arm (not shown) of a handler in the pellet bonding apparatus, and the holder body 31 faces the bonding position by the handler.

On one side (hereinafter, left side) of the upper end of the holder body 31, a fixed arm 32 is horizontally unidirectional (hereinafter,
The forward direction. ) Is integrally projected, and an elastic arm 33 formed by using a leaf spring is provided on the right side of the elastic arm 33.
It is provided so as to face the fixed arm 32. One end of the elastic arm 33 is supported by the main body 31, and its free end can be opened and closed in the left-right direction. Therefore, when the main body 12 of the syringe 11 is pushed between the fixed arm 32 and the elastic arm 33 against the elastic force of the elastic arm 33, the fixed arm 32 and the elastic arm 3 are inserted.
3 is in a state of sandwiching the syringe 11.

A flat plate-shaped base 34 is integrally provided at the lower end of the holder body 31 in the horizontal front direction. A circular fitting hole 35 is formed in the base 34, and the inner diameter of the fitting hole 35 is the adapter ring 2 of each standard.
It is set to be equal to the outer diameter of 0. The center line of the fitting hole 35 is set so as to match the center line of the syringe 11 sandwiched by the fixed arm 32 and the elastic arm 33.

At the lower end of the fitting hole 35, a support portion 36 formed in a circular ring-shaped brim shape is provided so as to project inward in the radial direction, and the support portion 36 should be in contact with the lower end surface of the adapter ring 20. By this, the syringe 11 is supported from below. An opening portion 37 is formed inside the support portion 36, and the opening portion 37 is set so that the injection port 17 of the nozzle 15 fitted in the fitting hole 35 can be exposed.

Further, a ball plunger 38 as a rotation preventing portion is arranged on the inner periphery of the fitting hole 35 at the center in the height direction and is installed radially inward. FIG. 3 (b)
As shown in FIG. 3, the ball plunger 38 has a cylindrical case 39, a ball 40 arranged so that a part of the tip of the case 39 comes in and out, and a direction in which the ball 40 is pushed into the case 39. Case 39 to urge to
And a spring 41 mounted therein. The ball plunger 38 is installed on the wall surface of the fitting hole 35 with a part of the ball 40 biased by the spring 41 protruding from the inner peripheral surface.

Outside the fitting hole 35 on the upper surface of the base 34, a holding device 50 for holding the nozzle 15 and the adapter ring 20 which are the nozzle portion fitted in the fitting hole 35 from the upper side is provided. That is, the base 34
A pair of brackets 51 are arranged at the left and right ends of the rear end portion and are integrally provided so as to project upward.
A shaft 52 is rotatably installed between 1 and 51. One end of a pressing member 53 is fixed to the middle portion of the shaft 52. The pressing member 53 is formed in a U-shape using a leaf spring, and has a shaft 5 at one end on the closing side.
It is fixed at 2. Collar portions 54, 54 are provided inwardly projecting on both front end portions of the pressing member 53 on the open side.

At the outer end of the right bracket 51 of the shaft 52, a stopper block 55 formed in the shape of a short octagonal prism is coaxially fixed, and a lever 56 is attached to this block 55 at one end thereof. It is inserted and fixed so as to extend in a direction perpendicular to the shaft 52. The free end of the stopper spring 57 is in contact with the rear side of the stopper block 55 so as to apply an elastic force. This stopper spring 5
7 is formed of a leaf spring, one end of which is fixed to the bracket 51 and the free end of which is the stopper block 5.
By pressing the outer peripheral surface of the octagonal prism of No. 5,
Each of them is stopped at the phase difference position of 0 degree. Further, a hook member 58 is attached to the right side surface of the base 34 so that it can be engaged with an intermediate portion of the lever 56, and the hook member 58 engages with the lever 56 to maintain the lower limit position of the lever 56. Is configured to.

Next, the operation will be described. In the pellet bonding apparatus, when the type of the pellet, which is the work to be pellet-bonded, is changed, the nozzle 15 of the syringe 11 in the silver paste supply apparatus 10 forming a part of the pellet bonding apparatus has a standard corresponding to the type. May be replaced. And the nozzle 15
The syringe 11 is to be set again in the holder 30 after the replacement.

When the nozzle 15 is attached to the syringe 11, an adapter ring 20 corresponding to the standard is selected and attached to the nozzle 15. That is, a standard adapter ring 20 having an inner diameter equal to the outer diameter of the replaced nozzle 15 is selected, the entire adapter ring 20 is fitted onto the outer periphery of the nozzle 15 from below, and the pin 22 is engaged with the engaging groove. 16 is inserted. Due to this work, the selected adapter ring 20 is the nozzle 1 of the corresponding standard.
5 is fitted and attached.

Next, when the syringe 11 is attached to the holder 30, the upper end of the syringe body 12 is pushed between the fixed arm 32 and the elastic arm 33 against the elastic force of the elastic arm 33, so that the syringe The main body 12 of 11 is sandwiched between the fixed arm 32 and the elastic arm 33.

At the same time, the nozzle 15 is fitted from above into the fitting hole 35 formed in the base 34 of the holder 30, with the adapter ring 20 attached to the outer periphery. When the adapter ring 20 is fitted into the fitting hole 35, the inner diameter of the fitting hole 35 is set to be equal to the outer diameter of the adapter ring 20 of each standard, so that the nozzle 15 and the fitting hole 35 are aligned with each other. It will be in the state of being That is, the syringe 11 is aligned with the holder 30 so that the positioning in the XY directions in the horizontal plane is secured.

When the adapter ring 20 attached to the nozzle 15 is fitted into the fitting hole 35 from above, the engaging recess 23 of the adapter ring 20 is aligned and engaged with the ball plunger 38 as a rotation stopping portion. It When the ball plunger 38 is engaged with the V-shaped groove-shaped engagement recess 23, the adapter ring 20 is prevented from rotating by the ball plunger 38, so that the nozzle 15 to which the adapter ring 20 is fixed is prevented from rotating into the fitting hole 35. It becomes a state. That is, the syringe 11 is prevented from being rotated by the holder 30, and thus the positioning in the circumferential direction (θ direction) is secured.

Further, when the adapter ring 20 attached to the nozzle 15 is fitted into the fitting hole 35 as far as it will go, the lower surface of the adapter ring 20 abuts on the support portion 36, so that the adapter ring 20 is supported by the support portion 36. Will be in a state of Then, since the injection port 17 of the nozzle 15 is exposed downward from the opening 37, the syringe 11 is ready to inject the silver paste 1 from the nozzle 15.

Subsequently, the nozzle 15 and the adapter ring 20 which are the nozzle portions fitted in the fitting holes 35 are held by the holding device 50. That is, base 3
The lever 56 of the holding device 50 provided on one side of the insertion hole 35 of No. 4 is pushed down and engaged with the hook member 58. When the lever 56 is pushed down, the shaft 52 is rotated, so that the pressing member 53 fixed to the shaft 52 is pressed against the nozzle 15 and the adapter ring 20. At the same time, when the shaft 52 is rotated, the stopper block 55 fixed to the shaft 52 is also rotated. At this time, the plane pressing the stopper spring 57 of the stopper block 55 is moved by 90 degrees, so that the stopper spring 57 causes the pressing member 53 to move the pressing member 53 to the nozzle 15 in the posture after the shaft 52 is rotated.
Then, the adapter ring 20 is rotated in the pushing direction. The reaction force of the stopper spring 57 with respect to the stopper block 55 is received by the base 34 via the hook member 58 engaged with the lever 56.
The posture after rotation of 2 will be maintained.

When the nozzle 15 and the adapter ring 20 are pressed from above by the pressing member 53, the nozzle 1
Since the nozzle 5 and the adapter ring 20 are pressed against the support portion 36, the nozzle 15 and the adapter ring 20 are positioned in the vertical direction (Z direction). That is, the syringe 11 is in a state in which the holder 30 is secured for vertical positioning.

As described above, the holder 30 is attached to the XY direction,
A pressure supply pipe (not shown) is fluidly connected to the collar portion 13 of the syringe 11 which is secured to be positioned in the circumferential direction and the vertical direction. Then, the holder 30 is operated by the handler along with the operation of the pellet bonding apparatus,
Further, when press-fitting is supplied to the syringe 11 from the pressure supply pipe, the silver paste 1 in the syringe 11 is injected from the nozzle 15 of the syringe 11, so that the silver paste 1 is a tab of a lead frame (FIG. (Not shown)
Applied to

At this time, since the syringe 11 is positioned in the XY direction, the circumferential direction and the vertical direction with respect to the holder 30, fine adjustment of the bonding operation of the pellet bonding apparatus can be omitted or simplified. it can. Moreover, the application operation of the silver paste by the syringe 11 in the pellet bonding apparatus can be appropriately performed with high positional accuracy.

According to the above embodiment, the following effects can be obtained. (1) When the nozzle 15 is fitted into the fitting hole 35 of the holder 30 with the adapter ring 20 attached, the syringe 11 is aligned with the fitting hole 35, and the engagement recess 23 and When the ball plunger 38 is engaged, the nozzle 15 is in a state where the position in the circumferential direction is regulated, and when the nozzle 15 and the adapter ring 20 are pressed by the pressing device 30, the syringe 11 becomes the supporting portion 36. Since the axial movement of the holder 30 is blocked by the holding device 30, the syringe 11 can be properly attached to the holder 30 while ensuring positioning in the XY directions, the circumferential direction, and the vertical direction. .

(2) When attaching the syringe 11 to the holder 30, the nozzle 15 and the adapter ring 2 are attached.
0 into the fitting hole 35, the engaging recess 23 and the ball plunger 38 are engaged, and the pressing device 3
Since it suffices to carry out the operation of pressing the nozzle 15 with 0, the screw tightening work can be eliminated, and the mounting work can be done easily and in a short time.

(3) In the pellet bonding apparatus, when exchanging the syringe nozzle 15 of the silver paste supply apparatus 10, the syringe 11 is moved relative to the holder 30 by X.
The holder 30 of the syringe 11 is replaced every time it is replaced by attaching it while securing the positioning in the YZ and θ directions.
It is not necessary to perform fine adjustment to, and in the handler of the pellet bonding apparatus, since fine adjustment between the syringe and the bonding position can be omitted or simplified, the setup time as a whole pellet bonding work is shortened, Productivity can be increased.

The invention made by the present inventor has been specifically described based on the embodiments, but the present invention is not limited to the embodiments and various modifications can be made without departing from the scope of the invention. Needless to say.

For example, the fluid is not limited to silver paste, but other adhesives or sealing resins can be used. In short, the fluid may be any substance that can be injected from the nozzle of a syringe.

The structure for injecting the fluid from the syringe is not limited to the structure in which the pressure supply pipe is connected to the syringe and the fluid is injected from the nozzle by pressure.
A configuration may be used in which the piston is inserted into the syringe and the piston is advanced to inject the fluid from the nozzle.

When the outer diameter of the nozzle of each standard is set equal to the inner diameter of the fitting hole, the adapter ring can be omitted.

The rotation preventing portion for preventing the nozzle portion from rotating is
Not only the ball plunger is used, but a leaf spring or a screw member that can move back and forth may be used.
Further, the fitting hole may be formed in a non-circular shape.

The pressing device is not limited to the structure of the above-described embodiment, and any structure may be used as long as it can perform the pressing operation and the releasing operation of the nozzle portion by a simple operation.

In the above description, the case where the invention made by the present inventor is mainly applied to the silver paste supplying technique in the pellet bonding step which is the field of application which is the background has been described, but the invention is not limited thereto. It can be applied to the sealing resin potting technique in the resin sealing step.

[0045]

The effects obtained by the typical ones of the inventions disclosed in the present application will be briefly described as follows.

A fitting hole is formed in the lower end portion of a holder that detachably holds a syringe that pushes out the stored fluid from the nozzle, and the inner diameter of the fitting hole is set to be equal to or larger than the outer diameter of the nozzle and the inner circumference thereof is set. By forming the nozzle support portion and the nozzle rotation preventing portion and further providing the nozzle pressing device outside the fitting hole, when the nozzle portion of the syringe is fitted into the fitting hole of the holder, the syringe is supported from below and , When the nozzle is aligned with the fitting hole and is prevented from rotating, the nozzle is in a state where the position in the circumferential direction is regulated, and when the nozzle part is pressed by the pressing device, the syringe is inserted into the fitting hole. Since the axial movement of the syringe is blocked by the support portion and the pressing device of the holder, the syringe is moved in the XY direction with respect to the holder.
It can be properly mounted while being positioned in the Z and θ directions.

When the syringe is attached to the holder, the nozzle portion is fitted into the fitting hole, the nozzle portion is prevented from rotating by the rotation stopping portion, and the holding portion is used to hold the nozzle portion. Therefore, the installation work is simple and quick.

[Brief description of drawings]

1A and 1B show a silver paste supply device according to an embodiment of the present invention, where FIG. 1A is an overall perspective view, FIG. 1B is a perspective view of a nozzle, and FIG. 1C is a perspective view of an adapter ring.

FIG. 2 shows the holder, (a) is a of (b)
FIG. 3B is a plan sectional view taken along line -a, FIG.

3A and 3B show main parts thereof, FIG. 3A is an enlarged perspective view, and FIG. 3B is an enlarged partial sectional view.

[Description of sign]

1 ... Silver paste (fluid material), 10 ... Silver paste supply device (fluid material supply device), 11 ... Syringe, 12 ... Main body, 1
3 ... Collar part, 14 ... Nozzle mounting part, 15 ... Nozzle, 16 ...
Engaging groove, 20 ... Adapter ring, 21 ... Dividing groove, 22 ... Pin, 23 ... Engaging recess, 30 ... Holder, 31 ... Holder body, 32 ... Fixed arm, 33 ... Elastic arm, 34 ... Base, 35 ... Fitting Hole, 36 ... Supporting portion, 37 ... Opening portion, 38
… Ball plunger (rotation stop), 39… Case, 4
0 ... Ball, 41 ... Spring, 50 ... Holding device, 5
1 ... Bracket, 52 ... Shaft, 53 ... Pressing member, 54 ...
Collar part, 55 ... Stopper block, 56 ... Lever, 57 ...
Stopper spring, 58 ... Hook member.

Claims (3)

[Claims] 1. A fluid supply apparatus comprising: a syringe for injecting a fluid contained therein from a nozzle; and a holder for removably holding the syringe and facing the nozzle to a supply position. A fitting hole into which the nozzle portion is fitted is formed at the lower end of the holder, and the inner diameter of the fitting hole is set to be equal to or larger than the outer diameter of the nozzle, and the inner circumference supports the nozzle portion from below. A rotation preventing portion for preventing rotation of the support portion and the nozzle portion is formed, and a holding device for holding the nozzle portion fitted in the fitting hole from above is provided outside the fitting hole. Animal feeder. 2. A plurality of standard nozzles are prepared, each standard nozzle is configured to be attachable to the tip of the syringe, and has a different outer diameter. There are multiple standard adapter rings with an inner diameter equal to the outer diameter, and each standard adapter ring is configured to fit into each nozzle with an inner diameter equal to the outer diameter. Is set to be equal to the inner diameter of the fitting hole, respectively. 3. The pressing device comprises a pressing member formed by using a leaf spring, and a shaft rotatably supported at one side of the fitting hole so that one end of the pressing member is fixed. And a lever having one end fixed to the shaft and the other end engageable with a part of the holder, and in the state where the lever is engaged, the free end of the pressing member is The fluid supply device according to claim 1, wherein the nozzle portion is configured to be pressed by an elastic force from above.