JPH088332A - Wafer basket in wafer container - Google Patents
Wafer basket in wafer containerInfo
- Publication number
- JPH088332A JPH088332A JP15822894A JP15822894A JPH088332A JP H088332 A JPH088332 A JP H088332A JP 15822894 A JP15822894 A JP 15822894A JP 15822894 A JP15822894 A JP 15822894A JP H088332 A JPH088332 A JP H088332A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- basket
- automatic machine
- bar member
- storage groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1911—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by materials, roughness, coatings or the like
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1922—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
(57)【要約】
【目的】ウェーハ収納容器に用いられるウェーハバスケ
ットの自動機への装着時にウェーハ収納溝を自動機のセ
ット面に適確に合致させウェーハ取扱い自動機の作動ミ
スをなくす。
【構成】ウェーハバスケット３が対向する一対の側壁３
1 ，３1 と、該側壁を結合する一対の端壁３2 ，３2 と
で矩形枠状に一体成形され、各側壁３1 の内面にウェー
ハＷの多数枚をそれぞれ一定間隔をおいて配列担持しう
る弾性リブ１を複数並列突設して各弾性リブ１，１間に
ウェーハ収納溝２を配備し、また前記端壁の一方には、
表面にインデックス用突起３０を備えたバー部材３１が
水平に設けられていて、該バー部材３１を有する側の端
壁端面が下方から上方に向うに従い順次突出量が大きな
傾斜面を持つ突起部３3 を設けたことで、バスケット３
をバー部材３１のある端壁側を下にして自動機１０に装
着した場合に、バスケット３のウェーハ収納溝２はウェ
ーハ挿入口側を上にして傾斜するので、ウェーハは自動
機の装着基準面に対して平行な状態で保持されている事
になり、自動機の作動ミスがなく安全に取り扱える。
(57) [Summary] [Purpose] When the wafer basket used for the wafer storage container is mounted on the automatic machine, the wafer storage groove is properly aligned with the set surface of the automatic machine to eliminate the operational error of the automatic wafer handling machine. [Structure] A pair of side walls 3 facing a wafer basket 3
1 , 3 1 and a pair of end walls 3 2 and 3 2 connecting the side walls are integrally formed in a rectangular frame shape, and a large number of wafers W are arranged on the inner surface of each side wall 3 1 at regular intervals. A plurality of elastic ribs 1 that can be carried are juxtaposed in parallel, a wafer housing groove 2 is provided between the elastic ribs 1, 1, and one of the end walls is
A bar member 31 provided with an index projection 30 on its surface is horizontally provided, and a projection portion 3 having an inclined surface in which the end wall end surface on the side having the bar member 31 gradually increases in amount as it goes upward from below. By providing 3 , basket 3
When the wafer is mounted on the automatic machine 10 with the end wall side having the bar member 31 facing downward, the wafer storage groove 2 of the basket 3 inclines with the wafer insertion opening side facing upward. Since it is held in a state parallel to, it can be handled safely without mistakes in the operation of the automatic machine.
Description
【０００１】[0001]
【産業上の利用分野】本発明は、半導体関連のウェー
ハ，マスク原板，フォトマスクなどの精密基板を安全に
輸送，保管，取り扱えるウェーハ収納容器におけるウェ
ーハバスケットに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer basket in a wafer container capable of safely transporting, storing, and handling semiconductor-related wafers, mask original plates, precision substrates such as photomasks.
【０００２】[0002]
【従来の技術】一般に、半導体単結晶柱体をスライスし
て薄板状としたウェーハなどの精密基板は、各種電子機
器類での集積回路を作るためにユーザーに向けて大量に
輸送，保管する場合が多く、高価で薄くて脆く、しかも
汚染を極端に嫌う半導体ウェーハを損傷，汚染から守る
ために取扱上、運搬用の密閉容器内に多数枚を安全に配
列保持収容する配慮が必要である。従来、この輸送用容
器内では、複数枚の各ウェーハを互いに接触，衝突しな
いように一定間隔をおいて個別に整然と配列されて収容
するのに、ウェーハ収納溝を備えたウェーハバスケット
を用いて弾性的に保持して、輸送中の振動を緩衝してウ
ェーハの破損やウェーハの支持部材とのガタつき摩擦接
触によって生ずる微粉の発生を防止していて、このウェ
ーハを弾性的に保持する容器として実開平１−１２９８
３６号公報などが知られている。このウェーハバスケッ
トは図６に示すように対向する一対の側壁ａ，ａと、該
側壁ａ，ａを結合する一対の端壁ｂ，ｂとで矩形枠状に
形成され、一方の端壁ｂには水平なバー部材ｃが設けら
れ、該バー部材ｃの表面には、断面半円形のインデック
ス用突起ｄがバー部材ｃの長さ方向（水平方向）に突設
されている。そして、ウェーハバスケット１を移送装置
や検査装置等の自動機に装着する場合、バー部材ｃのあ
る端壁ｂを下面としてセットされる事が多く（図７参
照）、この時にウェーハ収納溝ｅは自動機のセット面と
平行になっている。2. Description of the Related Art In general, a precision substrate such as a thin wafer formed by slicing a semiconductor single crystal pillar is transported to and stored in large quantities for a user to make an integrated circuit in various electronic devices. However, in order to protect semiconductor wafers, which are expensive, thin, fragile, and extremely disliked from contamination from damage and contamination, it is necessary to safely arrange and store a large number of wafers in an airtight container for transportation. Conventionally, in this shipping container, a plurality of wafers are elastically arranged using a wafer basket provided with a wafer storage groove in order to store the wafers individually and at regular intervals so as not to come into contact with each other and collide with each other. To prevent the generation of fine powder caused by the damage of the wafer and the frictional contact between the wafer and the supporting member by cushioning the vibration during transportation. Kaihei 1-1298
No. 36 publication is known. As shown in FIG. 6, this wafer basket is formed in a rectangular frame shape with a pair of side walls a, a facing each other and a pair of end walls b, b connecting the side walls a, a. Is provided with a horizontal bar member c, and an index projection d having a semicircular cross section is provided on the surface of the bar member c so as to project in the length direction (horizontal direction) of the bar member c. When the wafer basket 1 is mounted on an automatic machine such as a transfer device or an inspection device, the end wall b having the bar member c is often set as the lower surface (see FIG. 7). It is parallel to the set surface of the automatic machine.
【０００３】[0003]
【発明が解決しようとする課題】ウェーハ移送装置や検
査装置等の自動機は、装着されたウェーハバスケット内
のウェーハが基準面（セット面）に対して平行に保持さ
れているものとして作動するが、実際には、ウェーハバ
スケット内のウェーハは平行に保持されていないため、
自動機の作動ミスを誘発することがある。即ち、ウェー
ハが平行に保持されていない原因は、ウェーハ収納溝の
形状とガタ寸法にあって、バスケット中央部におけるウ
ェーハと収納溝の関係は図８（ａ）の様になり、ウェー
ハは収納溝の傾斜面で保持されている。また、バスケッ
ト底部付近では、図８（ｂ）の様にウェーハは収納溝の
谷部まで挿入された状態で保持される。この様にバスケ
ット内におけるウェーハ保持位置の差によって、ウェー
ハはバスケットの上部のウェーハ挿入口側で低く、底部
側で高いという傾いた状態で保持される。ウェーハ収納
溝の中でウェーハを平行に保持する方法として、収納溝
形状を図８（ｃ）の様な斜面の無い形状にする事も考え
られる。しかし、この様な溝形状ではウェーハが溝表面
と面接触をおこし、ウェーハが接触汚染を受けたり、こ
すれによってウェーハの表面平滑性が失われたりしてウ
ェーハ品質を損なう恐れがある。また別の方法として図
８（ａ）におけるガタ寸法を全く無くする事によって
も、ウェーハは平行に保持される。しかし、ガタ寸法無
しではウェーハ出し入れが円滑に行われず作業性が低下
するほか、こすれによるウェーハ損傷も考えられ、現実
には不可能である。本発明は、従来のウェーハ収納溝を
持つバスケットにおいて、自動機装着時にウェーハを水
平に保持しようとするもので、ウェーハの安定確実な担
持ができ、容器内でのウェーハの出し入れを容易にし、
自動機の作動ミスもなく、取扱処理を簡便化させること
を目的としたものである。Although an automatic machine such as a wafer transfer device or an inspection device operates as if the wafer in the mounted wafer basket is held parallel to the reference plane (set surface). , In fact, because the wafers in the wafer basket are not held in parallel,
It may cause a malfunction of the automatic machine. That is, the reason why the wafers are not held in parallel lies in the shape and play of the wafer storage groove, and the relationship between the wafer and the storage groove at the center of the basket is as shown in FIG. 8A. It is held on an inclined surface. Further, in the vicinity of the bottom of the basket, the wafer is held in a state of being inserted up to the valley of the storage groove as shown in FIG. 8B. As described above, due to the difference in the wafer holding position in the basket, the wafer is held in an inclined state in which the wafer is low on the upper side of the basket and higher on the bottom side. As a method of holding the wafers parallel to each other in the wafer storage groove, it is conceivable to form the storage groove into a shape having no slope as shown in FIG. 8C. However, in such a groove shape, the wafer may make surface contact with the groove surface, contact contamination of the wafer may occur, and the surface smoothness of the wafer may be lost due to rubbing, which may impair the wafer quality. Further, as another method, the wafers are held in parallel by eliminating the backlash dimension in FIG. However, without the looseness, the wafer cannot be taken in and out smoothly, the workability is deteriorated, and the wafer may be damaged by rubbing, which is actually impossible. The present invention, in a conventional basket having a wafer storage groove, is intended to hold the wafer horizontally when the automatic machine is mounted, and can carry the wafer reliably and reliably, facilitating the loading and unloading of the wafer in the container,
The purpose is to simplify the handling process without operating mistakes of the automatic machine.
【０００４】[0004]
【課題を解決するための手段】本発明は、開閉自在の蓋
体を有する容器本体に嵌装されるウェーハバスケットが
対向する一対の側壁と、該側壁を結合する一対の端壁と
で矩形枠状に一体成形され、各側壁の内面にウェーハの
多数枚をそれぞれ一定間隔をおいて配列担持しうる弾性
リブを複数並列突設して各弾性リブ間にウェーハ収納溝
を配備し、また前記端壁の一方には、表面にインデック
ス用突起を備えたバー部材が水平に設けられているウェ
ーハバスケットにおいて、該バー部材を有する側の端壁
端面が下方から上方に向かうに従い順次突出量の大きな
傾斜面に形成したものである。SUMMARY OF THE INVENTION According to the present invention, a rectangular frame is formed by a pair of side walls facing a wafer basket fitted to a container body having an openable / closable lid and a pair of end walls connecting the side walls. A plurality of wafers arranged in parallel at the inner surface of each side wall at regular intervals, and a plurality of elastic ribs protruding in parallel are provided to form wafer storage grooves between the elastic ribs. In a wafer basket in which one of the walls is horizontally provided with a bar member having an indexing protrusion on its surface, the end wall end surface on the side having the bar member is gradually inclined so that the protruding amount becomes larger from the lower side to the upper side. It is formed on the surface.
【０００５】[0005]
【作用】容器本体内に挿入されたウェーハバスケット
は、蓋体をかぶせると、ウェーハ収納溝上に嵌挿される
ウェーハ緩衝材支持枠体が緩衝材としてウェーハを押
え、ウェーハは安定的に保持される。しかも、ウェーハ
は収納溝の隙間をおいてそれぞれ個別に支持されるた
め、輸送中における振動に充分に対応し、緩衝的保持で
安全性が大巾に高められ、ウェーハが他の部品と接触し
微粉を発生したり、損傷を受ける恐れがなく用いられる
し、ウェーハの出し入れや閉蓋などの取扱も簡便安全で
収納，保管，運搬の各作業に良好に用いられるものであ
る。また、容器本体から取り出したウェーハバスケット
をバー部材のある端壁側を下にして、バスケットを自動
機に装着した場合に、バスケットのウェーハ収納溝はウ
ェーハ挿入口側を上にして傾斜する。一方、ウェーハ収
納溝内のウェーハは前述の様に、ウェーハ挿入口側を下
にして溝内で傾斜するため、それぞれの傾斜が相殺され
た形になり、ウェーハは自動機の装着基準面に対して平
行な状態で保持されている事になり、自動機の作動ミス
がなく安全に取り扱えるものである。When the wafer basket inserted in the container body is covered with the lid, the wafer cushioning material support frame fitted and inserted in the wafer storing groove presses the wafer as a cushioning material, and the wafer is stably held. Moreover, since the wafers are individually supported with the gaps in the storage grooves, they can sufficiently cope with vibration during transportation, and the buffering can greatly improve the safety, so that the wafers will not come into contact with other parts. It is used without the risk of generating fine powder or being damaged, and the handling of wafer loading / unloading, closing, etc. is simple and safe, and is well suited for storage, storage, and transportation operations. Further, when the wafer basket taken out from the container body is mounted on an automatic machine with the end wall side having the bar member facing downward, the wafer storage groove of the basket is inclined with the wafer insertion opening side facing upward. On the other hand, since the wafer in the wafer storage groove is tilted in the groove with the wafer insertion side facing down as described above, each tilt is offset, and the wafer is set against the mounting reference surface of the automatic machine. Since they are held in parallel with each other, they can be handled safely without any operating error of the automatic machine.
【０００６】[0006]
【実施例】本発明の実施例を図１乃至図３の例で説明す
ると、ウェーハＷの多数枚をそれぞれ一定間隔をおいて
配列担持しうる弾性リブ１を複数並列突設して各弾性リ
ブ１，１間にＶ溝状のウェーハ収納溝２を形成したウェ
ーハバスケット３を、容器本体４に嵌脱自在に設け、該
容器本体４に蓋体５が開閉自在に設けられ、該蓋体５の
内面に嵌装されるウェーハ緩衝材支持枠体８にウェーハ
Ｗの上端縁に当接する押え片６を支持部７で対設してあ
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Explaining an embodiment of the present invention with reference to the examples of FIGS. 1 to 3, a plurality of elastic ribs 1 capable of array-carrying a plurality of wafers W at fixed intervals are juxtaposed in parallel to each other. A wafer basket 3 having a V-groove-shaped wafer storage groove 2 formed between 1 and 1 is removably provided in a container body 4, and a lid 5 is provided in the container body 4 so as to be openable and closable. A pressing piece 6 that abuts against the upper edge of the wafer W is provided opposite to the wafer cushioning material support frame body 8 fitted on the inner surface of the support member 7 with the support portion 7.
【０００７】前記ウェーハバスケット３が対向する一対
の側壁３1 ，３1 と、該側壁を結合する一対の端壁
３2 ，３2 とで矩形枠状に一体成形され、各側壁３1 の
内面にウェーハＷの多数枚をそれぞれ一定間隔をおいて
配列担持しうる弾性リブ１を複数並列突設して各弾性リ
ブ１，１間にウェーハ収納溝２を配備し、また前記端壁
の一方には、表面にインデックス用突起３０を備えたバ
ー部材３１が水平に設けられていて、該バー部材３１を
有する側の端壁端面が下方から上方に向い順次突出量の
大きな傾斜面を持つ突起部３3 を設けたことで、バスケ
ット３をバー部材３１のある端壁側を下にして自動機１
０に装着した場合に、バスケット３のウェーハ収納溝２
はウェーハ挿入口側を上にして傾斜するので、ウェーハ
は自動機の装着基準面に対して平行な状態で保持されて
いる事になり、自動機の作動ミスがなく安全に取り扱え
る。[0007] and the wafer basket 3 pair of side walls 3 1 are opposed, 3 1, is integrally molded in a rectangular frame shape and a pair of end walls 3 2, 3 2 for coupling the side walls, each side wall 3 1 of the inner surface A plurality of elastic ribs 1 capable of carrying a plurality of wafers W arranged and arranged at regular intervals in parallel, and a wafer storage groove 2 is provided between the elastic ribs 1 and 1, and one of the end walls is provided. Has a bar member 31 horizontally provided with an indexing projection 30 on its surface, and an end wall end surface on the side having the bar member 31 has an inclined surface with a large protruding amount in a direction from downward to upward. 3 3 is provided, so that the basket 3 is placed with the end wall side having the bar member 31 down and the automatic machine 1
The wafer storage groove 2 of the basket 3 when mounted on the
Since the wafer is tilted with the wafer insertion side facing up, the wafer is held in a state parallel to the mounting reference plane of the automatic machine, and the automatic machine can be handled safely without operating mistakes.
【０００８】前記容器本体４と蓋体５との嵌合周縁部に
はリング状のシール部材１２を介在配備して密閉性を良
好にしてある。なお、前記ウェーハバスケット３は、合
成樹脂系の弾性材で成形され、容器本体４との間に隙間
をあけて嵌装保持できるように容器本体４，底面の凸壁
１４に嵌め込まれ、上方外周縁には対向してフランジ１
３を設けて容器本体４への出入れ取扱い操作がしやすい
内箱状に構成して、ウェーハ収納溝２を容器本体４の内
部に備えられるようにしてある。また、この容器本体４
及び蓋体５は、内外圧の変化に対応できるように適所に
リブを備えた強靱な構造体とし、その製作には内容物が
透視可能なポリカーボネート，ポリプロピレン，ポリエ
チレン，ＰＢＴ樹脂などのプラスチックからなる剛性の
高い合成樹脂材質を用いるのが好ましい。A ring-shaped seal member 12 is provided at the peripheral edge of the fitting between the container body 4 and the lid 5 to improve the hermeticity. The wafer basket 3 is formed of a synthetic resin-based elastic material, and is fitted into the container main body 4 and the convex wall 14 on the bottom surface so that the wafer basket 3 can be fitted and held with a space between the wafer basket 3 and the container main body 4. Flange 1 facing the periphery
3 is provided to form an inner box shape that is easy to handle in and out of the container body 4, and the wafer storage groove 2 can be provided inside the container body 4. Also, this container body 4
The lid 5 and the lid 5 are tough structures having ribs at appropriate positions so that they can respond to changes in internal and external pressures, and the production is made of a plastic such as polycarbonate, polypropylene, polyethylene, or PBT resin whose contents can be seen through. It is preferable to use a synthetic resin material having high rigidity.
【０００９】なお、前記突起部３3 としては、バー部材
３１を有する側を下面として載置した際に、ウェーハ収
納溝２の挿入側が若干上方になる方向にバスケットを傾
斜して載置できる傾斜壁としたものであって、端壁３2
の上方から下方にわたる全長に突設されているが、図４
及び図５の如く、端壁３2 の上方一部に突設したもので
もよい。この場合でも、ウェーハバスケット３を自動機
１０に装着した状態ではウェーハ収納溝２は挿入口側を
上にして傾斜するが、そこに収納されたウェーハは装着
基準面に対して略々平行に保持されている。いずれの場
合でも、一般に使用されているバスケットのウェーハ収
納溝形状（規格準拠）では、角度は０°１５’〜１°０
０’位であり、突起部３3 の高さはバスケットサイズや
突起位置によっても異なるが約０．３ｍｍ〜３ｍｍとす
るのがよい。[0009] Incidentally, Examples protrusions 3 3, when placing the side having the bar member 31 as the lower surface, can be placed inclined basket in the direction of the insertion side of the wafer housing groove 2 is slightly upwardly inclined It is a wall and the end wall 3 2
Although it is projected over the entire length from above to below,
And as shown in FIG. 5, it may be obtained by projecting upward portion of the end wall 3 2. Even in this case, when the wafer basket 3 is mounted on the automatic machine 10, the wafer storage groove 2 inclines with the insertion opening side upward, but the wafer stored therein is held substantially parallel to the mounting reference plane. Has been done. In either case, the angle is 0 ° 15 ′ to 1 ° 0 in the commonly used basket wafer storage groove shape (standard conformity).
0 'is of a height of the protrusions 3 3 preferably set to differ about 0.3mm~3mm by the basket size and projection position.
【００１０】[0010]
【発明の効果】本発明は、開閉自在の蓋体を有する容器
本体に嵌装されるウェーハバスケットが対向する一対の
側壁と、該側壁を結合する一対の端壁とで矩形枠状に一
体成形され、各側壁の内面にウェーハの多数枚をそれぞ
れ一定間隔をおいて配列担持しうる弾性リブを複数並列
突設して各弾性リブ間にウェーハ収納溝を配備し、また
前記端壁の一方には、表面にインデックス用突起を備え
たバー部材が水平に設けられているウェーハバスケット
において、該バー部材を有する側の端壁端面が下方から
上方に向かうに従い順次突出量の大きな傾斜面に形成し
たことにより、ウェーハバスケットを自動機に装着した
状態では収納されたウェーハが装着基準面に対して略々
平行に保持され、自動機の作動ミスによるトラブルを解
消することができるし、ウェーハ容器本体へ挿入が迅速
かつ容易で単純作業での多量処理を安全に行うことが可
能となり、輸送中または保管中において、ウェーハが容
器内の収納溝から外れたりすることなく、かつガタつか
ないで振動に耐え、他の部品との接触による微粉発生や
損傷を受けるおそれがなく、振れ止めで容器内における
安定した担持が可能で、担持させる取扱操作も簡便であ
る。According to the present invention, a pair of side walls facing a wafer basket fitted to a container body having an openable / closable lid and a pair of end walls connecting the side walls are integrally formed into a rectangular frame shape. On the inner surface of each side wall, a plurality of elastic ribs capable of carrying a number of wafers arranged at regular intervals are provided in parallel so as to project a plurality of wafers in parallel, and a wafer storage groove is provided between the elastic ribs. In a wafer basket in which a bar member having an indexing protrusion on its surface is horizontally provided, the end surface of the end wall on the side having the bar member is formed into an inclined surface with a large protrusion amount from bottom to top. As a result, when the wafer basket is mounted on the automatic machine, the stored wafers are held substantially parallel to the mounting reference plane, and troubles due to incorrect operation of the automatic machine can be eliminated. However, it can be inserted into the body of the wafer container quickly and easily, and it is possible to safely perform a large amount of processing by simple work.While the wafer is being transported or stored, it does not come off from the storage groove inside the container, and it does not rattle. It does not tie up and withstands vibrations, there is no risk of generation of fine powder or damage due to contact with other parts, stable rest can be carried in the container by the steady rest, and handling operation for carrying is also simple.
【図１】本考案の実施例を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of the present invention.
【図２】図１の例の使用状態の分離状態の斜視図であ
る。FIG. 2 is a perspective view of a separated state of a use state of the example of FIG.
【図３】図１の例のウェーハバスケットを自動機に装着
した状態の縦断面図である。FIG. 3 is a vertical cross-sectional view of the wafer basket of the example of FIG. 1 mounted on an automatic machine.
【図４】本考案の他の実施例の斜視図である。FIG. 4 is a perspective view of another embodiment of the present invention.
【図５】図４の例のウェーハバスケットを自動機に装着
した状態の縦断面図である。5 is a vertical cross-sectional view of the wafer basket of the example of FIG. 4 mounted on an automatic machine.
【図６】従来例の斜視図である。FIG. 6 is a perspective view of a conventional example.
【図７】図６の例のウェーハバスケットを自動機に装着
した状態の縦断面図である。FIG. 7 is a vertical cross-sectional view of the wafer basket of the example of FIG. 6 mounted on an automatic machine.
【図８】図７の例のウェーハ収納溝でのウェーハの状態
を示す一部拡大縦断面図で、（ａ）はバスケット中央部
状態図、（ｂ）はバスケット底部状態図、（ｃ）は想定
状態図である。8 is a partially enlarged vertical sectional view showing a state of a wafer in a wafer storage groove of the example of FIG. 7, where (a) is a basket central portion state diagram, (b) is a basket bottom portion state diagram, and (c) is a state diagram. It is an assumed state diagram.
Ｗ ウェーハ １ 弾性リブ ２ ウェーハ収納溝 ３ ウェーハバスケット ３1 側壁 ３2 端壁 ３3 突起部 ４ 容器本体 ５ 蓋体 ６ ウェーハ押え片 ７ 支持部 ８ ウェーハ緩衝材支持枠体 １０ 自動機 １２ シール部材 １３ フランジ １４ 底部 ３０ インデックス用突起 ３１ バー部材W Wafer 1 Elastic rib 2 Wafer storage groove 3 Wafer basket 3 1 Side wall 3 2 End wall 3 3 Projection portion 4 Container body 5 Lid body 6 Wafer pressing piece 7 Support portion 8 Wafer cushioning material support frame body 10 Automatic machine 12 Sealing member 13 Flange 14 Bottom 30 Index projection 31 Bar member
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｌ 21/027 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI technical display location H01L 21/027
Claims (2)
されるウェーハバスケットが対向する一対の側壁と、該
側壁を結合する一対の端壁とで矩形枠状に一体成形さ
れ、各側壁の内面にウェーハの多数枚をそれぞれ一定間
隔をおいて配列担持しうる弾性リブを複数並列突設して
各弾性リブ間にウェーハ収納溝を配備し、また前記端壁
の一方には、表面にインデックス用突起を備えたバー部
材が水平に設けられているウェーハバスケットにおい
て、該バー部材を有する側の端壁端面が下方から上方に
向かうに従い順次突出量の大きな傾斜面に形成したこと
を特徴とするウェーハ収納容器におけるウェーハバスケ
ット。1. A pair of side walls opposed to a wafer basket fitted to a container body having an openable / closable lid and a pair of end walls connecting the side walls are integrally formed into a rectangular frame shape, and each side wall is formed. A plurality of elastic ribs capable of carrying a plurality of wafers arranged at regular intervals on the inner surface of each of the elastic ribs are juxtaposed in parallel to provide a wafer storage groove between the elastic ribs. In a wafer basket in which a bar member having an indexing protrusion is horizontally provided, the end surface of the end wall on the side having the bar member is formed into an inclined surface with a large protruding amount in order from the lower side to the upper side. Wafer basket in a wafer storage container.
上方部に設けられた突起部で形成した請求項１記載のウ
ェーハバスケット。2. The inclined surface is a lower portion of the end wall end surface,
The wafer basket according to claim 1, wherein the wafer basket is formed by a protrusion provided on an upper portion.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6158228A JP2791971B2 (en) | 1994-06-17 | 1994-06-17 | Wafer basket in wafer storage container |
| TW084105930A TW299485B (en) | 1994-06-17 | 1995-06-10 | |
| FR9506920A FR2725185B1 (en) | 1994-06-17 | 1995-06-12 | BASKET FOR WAFERS, ESPECIALLY OF SEMICONDUCTOR SILICON |
| DE19521575A DE19521575C2 (en) | 1994-06-17 | 1995-06-14 | Wafer basket in a wafer holder box |
| GB9512022A GB2290414B (en) | 1994-06-17 | 1995-06-14 | Wafer basket in wafer-holder box |
| KR1019950016073A KR100332719B1 (en) | 1994-06-17 | 1995-06-16 | Wafer basket in wafer storage box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6158228A JP2791971B2 (en) | 1994-06-17 | 1994-06-17 | Wafer basket in wafer storage container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH088332A true JPH088332A (en) | 1996-01-12 |
| JP2791971B2 JP2791971B2 (en) | 1998-08-27 |
Family
ID=15667084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6158228A Expired - Lifetime JP2791971B2 (en) | 1994-06-17 | 1994-06-17 | Wafer basket in wafer storage container |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP2791971B2 (en) |
| KR (1) | KR100332719B1 (en) |
| DE (1) | DE19521575C2 (en) |
| FR (1) | FR2725185B1 (en) |
| GB (1) | GB2290414B (en) |
| TW (1) | TW299485B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101033358B1 (en) * | 2006-06-07 | 2011-05-09 | 신에츠 폴리머 가부시키가이샤 | Wafer storage container |
| WO2012117813A1 (en) | 2011-02-28 | 2012-09-07 | 株式会社タンガロイ | Guide pad, cutting tool body, and cutting tool |
| WO2012117817A1 (en) | 2011-02-28 | 2012-09-07 | 株式会社タンガロイ | Guide pad, cutting tool body, and cutting tool |
| CN106784145A (en) * | 2016-12-23 | 2017-05-31 | 中赣新能源股份有限公司 | A kind of silicon chip inserted sheet method |
| CN116936432A (en) * | 2023-09-14 | 2023-10-24 | 常州银河世纪微电子股份有限公司 | Wafer storage box, taking and placing device using same and taking and placing method |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW296361B (en) * | 1995-06-26 | 1997-01-21 | Kakizaki Seisakusho Kk | |
| US5788082A (en) * | 1996-07-12 | 1998-08-04 | Fluoroware, Inc. | Wafer carrier |
| GB2350604A (en) * | 1999-06-03 | 2000-12-06 | Horizon Biscuit Company Ltd Th | Container |
| DE10046942A1 (en) * | 2000-09-21 | 2002-04-25 | Infineon Technologies Ag | Process for transporting wafers |
| DE10104313C1 (en) * | 2001-01-22 | 2002-08-08 | Hunke & Jochheim | Storage boxes for cassettes |
| TW511649U (en) * | 2001-09-12 | 2002-11-21 | Ind Tech Res Inst | Wafer retainer |
| TWI239931B (en) * | 2003-05-19 | 2005-09-21 | Miraial Co Ltd | Lid unit for thin plate supporting container and thin plate supporting container |
| DE10337570A1 (en) * | 2003-08-14 | 2005-03-17 | Infineon Technologies Ag | Wafer-handling device for laying in and transporting fragile objects like thin wafers has a transporting container and a supporting plate |
| CN102339777B (en) * | 2010-07-15 | 2013-09-11 | 家登精密工业股份有限公司 | Wafer limiting piece of wafer box |
| DE102010040918B4 (en) | 2010-09-16 | 2013-10-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Container for stacking and transporting discs of brittle material |
| KR101658631B1 (en) | 2014-04-03 | 2016-09-22 | 형제기계공업 주식회사 | Snow removal equipment using the partition |
| CN119364745B (en) * | 2024-12-26 | 2025-04-01 | 深圳市奔强电路有限公司 | A stacked circuit board conveying device for circuit board processing |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5648126A (en) * | 1979-09-26 | 1981-05-01 | Nec Kyushu Ltd | Auxiliary carrier for replacing wafers |
| JPS60160539U (en) * | 1984-04-02 | 1985-10-25 | ソニー株式会社 | Container for storing semiconductor wafers, etc. |
| JPH0284319U (en) * | 1988-12-20 | 1990-06-29 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4687097A (en) * | 1984-12-11 | 1987-08-18 | Empak, Inc. | Wafer processing cassette |
| US4724963A (en) * | 1985-02-20 | 1988-02-16 | Empak, Inc. | Wafer processing cassette |
| US4684021A (en) * | 1986-06-23 | 1987-08-04 | Fluoroware, Inc. | Bottom loading wafer carrier box |
| US5154301A (en) * | 1991-09-12 | 1992-10-13 | Fluoroware, Inc. | Wafer carrier |
| DE69307035T2 (en) * | 1992-07-08 | 1997-07-03 | Daifuku Kk | Containers for disc-like objects |
-
1994
- 1994-06-17 JP JP6158228A patent/JP2791971B2/en not_active Expired - Lifetime
-
1995
- 1995-06-10 TW TW084105930A patent/TW299485B/zh not_active IP Right Cessation
- 1995-06-12 FR FR9506920A patent/FR2725185B1/en not_active Expired - Fee Related
- 1995-06-14 GB GB9512022A patent/GB2290414B/en not_active Expired - Fee Related
- 1995-06-14 DE DE19521575A patent/DE19521575C2/en not_active Expired - Fee Related
- 1995-06-16 KR KR1019950016073A patent/KR100332719B1/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5648126A (en) * | 1979-09-26 | 1981-05-01 | Nec Kyushu Ltd | Auxiliary carrier for replacing wafers |
| JPS60160539U (en) * | 1984-04-02 | 1985-10-25 | ソニー株式会社 | Container for storing semiconductor wafers, etc. |
| JPH0284319U (en) * | 1988-12-20 | 1990-06-29 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101033358B1 (en) * | 2006-06-07 | 2011-05-09 | 신에츠 폴리머 가부시키가이샤 | Wafer storage container |
| WO2012117813A1 (en) | 2011-02-28 | 2012-09-07 | 株式会社タンガロイ | Guide pad, cutting tool body, and cutting tool |
| WO2012117817A1 (en) | 2011-02-28 | 2012-09-07 | 株式会社タンガロイ | Guide pad, cutting tool body, and cutting tool |
| CN106784145A (en) * | 2016-12-23 | 2017-05-31 | 中赣新能源股份有限公司 | A kind of silicon chip inserted sheet method |
| CN116936432A (en) * | 2023-09-14 | 2023-10-24 | 常州银河世纪微电子股份有限公司 | Wafer storage box, taking and placing device using same and taking and placing method |
| CN116936432B (en) * | 2023-09-14 | 2024-01-02 | 常州银河世纪微电子股份有限公司 | Wafer storage box, taking and placing device using same and taking and placing method |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2725185B1 (en) | 1997-10-17 |
| DE19521575C2 (en) | 2002-04-18 |
| KR100332719B1 (en) | 2002-10-31 |
| DE19521575A1 (en) | 1995-12-21 |
| TW299485B (en) | 1997-03-01 |
| GB2290414A (en) | 1995-12-20 |
| KR960002468A (en) | 1996-01-26 |
| JP2791971B2 (en) | 1998-08-27 |
| GB2290414B (en) | 1998-07-29 |
| FR2725185A1 (en) | 1996-04-05 |
| GB9512022D0 (en) | 1995-08-09 |
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