JPH0885201A - Recording device and manufacturing method thereof - Google Patents

Abstract

(57) [Summary] (Correction) [Structure] Recording material accommodation section 87 (for example, area including dye vaporization section 77), and recording material support for facing recording material to this recording material accommodation section 87 And heating means 75 for heating the recording material 22 to transfer it to the recording medium.
75 is a heating element arranged in the surface area of the recording material of the recording material accommodation portion 87.
A printer head 70 and a printer, each of which is composed of 75 and is provided with a porous structure 80 for holding and supplying a recording material at a position deeper than the heating element 75. Alternatively, the heating means 75
Is disposed on the surface area of the recording material in the recording material accommodation portion 87.
A printer head 170 and a printer which are made of and have a through hole for recording material (for example, a through hole 150). [Effect] A recording apparatus and a manufacturing method thereof that can increase heating efficiency and reduce cost.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a recording device and its manufacturing method.

[0002]

2. Description of the Related Art In recent years, in image recording of video cameras, televisions, computer graphics and the like, there is an increasing need for colorization of hard copy as well as recording of mono color. In response to this, various types of printers have been developed and deployed in various fields.

Among these recording methods, an ink sheet coated with an ink layer in which a high-concentration transfer dye is dispersed in a suitable binder resin, and a dyeing resin that receives the transferred dye are coated. The heat-sensitive recording head located on the ink sheet applies heat according to the image information, and the heat-sensitive recording head located on the ink sheet applies heat according to the image information. There is a method of thermal transfer.

The so-called thermal transfer system, which obtains a full-color image by repeating the above-mentioned operation for each of the image signals decomposed into yellow, magenta, and cyan, which are the three primary colors of subtractive color mixture, is compact and easy to maintain. Therefore, it is attracting attention as an excellent technology that has an immediacy and obtains a high-quality image comparable to a silver salt color photograph.

FIG. 38 is a schematic front view of the main part of such a thermal transfer type printer. According to this printer, a thermal recording head (hereinafter referred to as a thermal head) 1 and a platen roller 3 face each other, and an ink sheet 12 having an ink layer 12a provided on a base film 12b between them,
The recording paper (transferred material) 40 having the dyeing resin layer (dye receiving layer) 40a provided on the paper 40b is sandwiched and pressed against the thermal head 1 by the platen roller 3.

The ink (transfer dye) in the ink layer 12a selectively heated by the thermal head 1 is
The transfer is carried out in a dot shape on the dyeing resin layer 20a of the transfer target 20, and thermal transfer recording is performed. In such thermal transfer recording, generally, a line system in which a longitudinal thermal head is fixedly arranged so as to be orthogonal to the recording paper traveling direction, or a serial head in which the thermal head reciprocates in a direction orthogonal to the recording paper traveling direction is used. The method is adopted.

On the other hand, as an image recording method using a sublimable dye, various methods have been conventionally proposed. As one example thereof, the one disclosed in Japanese Patent Publication No. 62-162593 is proposed. An apparatus using such a system is shown in FIG. 39. The sublimable dye 4 is heated by the primary heater 5 to liquefy the dye 4. This liquefied dye is applied to the primary heater 5 and the print head 6.
The dye is supplied to the secondary heating section 7 by the capillary structure of the dye supply path 10 constituted by, and the dye is further heated there, and the dye vapor is transferred to the photographic paper 50. In the figure, 2 is a thermal plate, 11A is an electrode, and 11B is a protective layer.

However, in this method, the liquefied dye enters the nozzle 9 due to the capillary phenomenon, but its efficiency is poor,
The dye may leak out of the nozzle 9. Also, as is generally known, when a liquid (dye) is heated,
As shown in Fig. 48, the surface tension varies depending on the temperature, so
16 occurs. This structure is also the same as the phenomenon shown in FIG. 48 described later, as shown in FIG. 40, the dye escapes to the low temperature side,
Almost no dye vapor is generated.

[0009] By the way, the applicant of the present invention uses the advantages of the thermal transfer recording method as described above, reduces waste and transfer energy, and reduces the size and weight of the printer.
A non-contact type dye vaporization type laser beam printer (LBP) as shown in 41 has already been proposed.

According to this recording method, a heat-fusible dye layer
A recording head (printing paper) 50 having a recording head (for example, a serial type printer head) 40 having 22 in the vaporizing section 17 and a receiving layer 50a for receiving the vaporized (or sublimated) dye 32.
A minute gap 17a in the range of 1 μm to 1 mm is provided between and.

Then, by irradiating the laser beam L, the liquefied dye stored in the dye storing portion 37 of the vaporizing portion 17 of the recording head 40.
22 is selectively heated to near its boiling point to be vaporized, the vaporized dye 32 is caused to fly in the void 17a, and transferred from the vaporization hole 23 onto the photographic printing paper 50 which is a recording medium to obtain continuous gradation. Get the image you have. This operation is the three primary colors of subtractive color, yellow,
Full colorization can be achieved by repeating each of the image signals decomposed into magenta and cyan.

In this recording method, the photographic printing paper 50 is opposed to the recording head 40, for example, on the upper side, and the laser light emitted from the laser 18 and condensed by the lens 19 is near the upper surface of the vaporizing section 17. It is advisable to irradiate L to cause the vaporized dye 32 to fly or move upward. In this case, in order to move the transfer dye through the gap 17a by the heating means, it is often observed when a high-power laser is irradiated in addition to the vaporization phenomenon, and the bond of the dye molecule is efficiently cut to utilize its energy. It is also possible to use the phenomenon of etching at a very large rate, and the phenomenon of etching at a very large rate using the energy of gas generated by boiling or explosion (a transfer mechanism other than such a vaporization mechanism is called ablation). : Below, the same).

Further, a head base having a laser beam transmitting property.
A dye reservoir 15 is provided in 14, and a liquefied dye 22 is accommodated between the dye reservoir 15 and a lid 13 fixed on the head base 14, and a dye passage 27 is provided from here.
The liquefied dye 22 is supplied to the vaporizing section 17 via the. In this case, in order to improve the supply efficiency and the vaporization efficiency of the dye to the vaporization unit 17, the dye escape due to the decrease in the surface tension of the dye caused by heat generation is prevented, and the continuous supply and retention of the dye by utilizing the capillary phenomenon. In order to do so, a bead aggregate 20 composed of small beads 21 is provided in the vaporization section 17.

A protective plate (not shown) is fixed on the lid 13 in order to hold the gap 11 and guide the photographic printing paper 50 moving in the X direction (direction perpendicular to the paper surface). A heater for maintaining the liquefied state of the dye may be embedded in the protective plate. Here, the heater 26 is arranged in the dye containing portion (the passage 27).

The solid powder heat-meltable dye 42 in the solid dye storage tank 41 is supplied from a supply port 43 by a check valve 44,
It is heated to the melting point by the heater 26 and melted (liquefied). The liquefied dye 22 is supplied at a constant rate to the upper surface of the bead aggregate 20 of the vaporization section 17 at a high rate by the capillary phenomenon of the bead aggregate 20.

Further, the entire printer including this printer head is, for example, for full color as shown in FIG.
Yellow, magenta, and cyan dye reservoirs 15Y, 15M,
15C is provided on each common base 14 to form each dye supply section or supply head section 37Y, 37M, 37C, and from there, 12 to 24 dots of each color dye are formed in rows to form a vaporization section 17Y. , 17M, 17C.

For each vaporization section, a large number of condenser lenses 19 are provided for each laser beam emitted from a multi-laser array 30 in which 12 to 24 corresponding lasers (especially semiconductor laser chips) 18 are arranged in an array. The light is condensed by the microlens array 31 in which is arranged (36 is a mirror for guiding the laser light L in the perpendicular direction).

As the condensing lens, the illustrated lens system may be used, but a single large-diameter condensing lens 38 shown by an imaginary line may be used. The lens 38 is formed so that the refraction path changes so that the light emission position corresponds to the vaporization parts 17C, 17M, and 17Y described above according to the light incident position.
The multi-laser array 30 is driven and controlled by the control IC 34 provided on the substrate 33, and the heat sink 35 is also provided.
Is designed to allow sufficient heat dissipation.

In the case of mono-color printing, as shown in FIG. 43, the one-dimensional laser array 30 is manufactured, and each laser element can be operated independently and in parallel. Printing speeds of more than one time can be obtained (for example, 24 times speed is obtained by using a laser array with 24 beams).

In each of the printer heads described above, an array having the dye containing portions 37 as many as the liquefied dyes 22 in a dot shape corresponding to the number of recording dots, and the laser 18 also has an array of light emitting points corresponding to the number of recording dots. It is arranged in a shape.
Even with the above thermal transfer printer that does not rely on the laser 18,
The heating units of the thermal head 1 are also arranged in a dot pattern.

As described above, according to this dye vaporization type laser beam printer, regarding the dye consumed for recording, only the lost portion is voluntarily or forcibly in the molten state from the dye reservoir to the vaporization section. By pouring, or
It can be continuously applied onto an appropriate substrate, and the substrate can be continuously supplied to the vaporizing unit by moving to the transfer unit. This is possible because the dye contains little binder resin. Therefore, since the vaporizing section involved in recording can be repeatedly used many times, the ink sheet is disposable only once in the above-mentioned thermal transfer method, which is advantageous in terms of resource saving and environmental protection.

Further, since it is a vaporization type or an ablation type, recording can be carried out without contact between the dye layer and the recording medium (printing paper), so that it can be seen by the above-mentioned thermal transfer method at the time of the second and subsequent printing. The reverse transfer of the dyes and the color mixture do not occur, and the heating portion is only the head including the vaporizing portion, and the power consumption is remarkably reduced as compared with the above-mentioned thermal transfer method. At the same time, the printer can be made smaller and lighter because a small volume dye reservoir is used for supplying the dye instead of the above-described ink sheet.

Since this recording system utilizes vaporization or sublimation of the dye, it is not necessary to heat the dye receiving layer of the recording medium as in the above-mentioned thermal transfer system, and the ink sheet and the recording medium are not recorded. It is not necessary to press the body against the body with high pressure, and this is also advantageous in reducing the size and weight of the printer. Since the dye layer in the vaporized portion and the recording medium do not come into contact with each other, heat fusion cannot occur between them, and recording is possible even if the compatibility between the dye and the receiving layer resin is small. Therefore, the range of design and selection of the dye and the resin for the receiving layer is remarkably expanded.

Further, the semiconductor laser 18 is basically used as a light source as a heat energy supply source for vaporizing (or sublimating) the dye. However, the semiconductor laser has a high conversion efficiency from electric power to light, and Since the dye has excellent directivity and light collecting property, the heat energy transfer efficiency of the dye is also very high. Therefore, the total energy utilization efficiency is markedly higher than that of the conventional method (thermal transfer by the above-mentioned thermal head or ink jet), which is advantageous in downsizing and power saving.

Further, in the conventional ink jet type color printer, it is difficult to express gradation, but since the semiconductor laser can easily control the output power, the pulse width and the like, the above recording method can easily express multi gradation. realizable. That is,
An electric image created by a color video camera or the like can be converted into a dye transfer corresponding to an image signal by a semiconductor laser to form a full-color image having at least 128 gradations per color, which is comparable to silver halide photography. it can.

The head 40, which is a transfer member suitable for the dye vaporization type recording method, has a property of sufficiently withstanding the amount of heat momentarily applied during transfer, and spontaneously due to a capillary phenomenon to the vaporization part (transfer part). It is preferable to have a structure (20 in FIG. 41) that has a large surface area for supplying a liquid dye and can firmly hold the dye during transfer.
Further, by providing an appropriate heat retaining device, it becomes possible to use a dye or a dye mixture having a melting point of room temperature or higher.

A transfer dye suitable for this recording method is
It has an appropriate vaporization rate or ablation rate, and shows a fluid state at 200 ° C or lower in a single or mixed state,
Any dye may be used as long as it has necessary and sufficient heat resistance. Specific examples thereof include disperse dyes, oil-soluble dyes, basic dyes and acid dyes. In particular, when the ablation mechanism is superior to the vaporization mechanism, a dye having a large molecular weight and a low vaporization rate, such as a direct dye,
Even carbon black and pigments can be transferred. Even for a dye having a melting point of room temperature or higher, the melting point is lowered by mixing the dyes with each other or by mixing the dye and a volatile low molecular weight substance.

Further, the photographic printing paper suitable for this recording method has a proper compatibility with the transfer dye, easily accepts the transfer dye, promotes the original color development of the dye, and fixes the dye. Any photographic paper can be used. For example, for the disperse dye, a paper having a surface coated with a polyester resin, a polyvinyl chloride resin, an acetate resin, or the like, which has good compatibility with the disperse dye, is preferable. The fixing of the dye transferred onto the printing paper may be performed by heating the transferred image so that the transferred dye on the surface penetrates into the image receiving layer.

The heating means of the dye transfer system is roughly classified into a method using a thermal head, a material that absorbs laser light and a wavelength range including the wavelength range of the laser light, and converts light energy into heat energy (photothermal conversion). A method of combining a body (not shown) and laser light can be mentioned.

When a laser beam is used, the resolution is remarkably improved, and by increasing the laser beam density in the optical system, it becomes possible to perform intensive heating, and the ultimate temperature is increased. As a result, the thermal efficiency is improved. There is a feature called.
Particularly, by using the multi-laser, the time for transferring one screen is significantly shortened.

However, the photothermal converter must be one that sufficiently satisfies the heat resistance in order to continuously absorb the laser light of light energy. Therefore, as the photothermal converter used in this system, a thin film type light absorber such as a metal thin film that exhibits absorption matching the emission wavelength of a laser, or a two-layer film of a metal thin film and a ceramic thin film having a high dielectric constant is directly transferred. In addition to being provided on the part, heat resistance such as fine particle type light absorbers such as carbon black and metal fine particles, organic dyes such as phthalocyanine dyes, naphthalocyanine dyes, cyanine dyes, anthraquinone dyes or organometallic dyes A dye or pigment having excellent properties may be used by uniformly dispersing it in a transfer dye.

[0032]

Further, the applicant of the present invention has proposed another sublimation type color video printer, which does not require an ink sheet and a thermal head, and which saves power, is small in size, and is low in cost. , Japanese Patent Application No. 4-300587, Japanese Patent Application No. 5-1124
No. 1 and Japanese Patent Application No. 5-12106.

A similar structure of this printer will be described in detail with reference to FIGS. 44 to 47 (however, the portions common to the head of FIG. 41 are denoted by common reference numerals), and the head portion 60 serves as a disperse dye. Dye tank 41 containing solid powder sublimation dye 42
And a wear-resistant protective layer made of high-strength material located underneath
61, a spacer 62 located in the center, and a head base 63 located on the upper side.

Further, a liquefied dye introducing portion 64 for heating and liquefying the solid powder sublimation dye 42 in the dye storage tank 41, and introducing it.
A plurality of liquefied disperse dyes 22 are arranged along the liquefied dye introducing section 64 at predetermined intervals and are guided from the liquefied dye introducing section 64.
It has vaporization parts 17 for vaporizing the liquid by heat of vaporization, a vaporization heating element 65 provided below the liquid surface of the dye 22 in the vaporization part, and a heat insulating material 66 for supporting it.

The protective layer 61 has a function of preventing dirt, dust, dust, foreign matter, etc. from entering the vaporization holes 23 of each vaporization section 17 when it comes into contact with the photographic printing paper 50 with a light pressure. It is formed of a metal-based or glass-based material such as tantalum, which has good thermal conductivity and excellent heat resistance and wear resistance. In addition, the protective layer 61
In this case, a plurality of square columnar holes 61a which become a part of the vaporization holes 23 of each vaporization part 17 are formed by fine processing such as an etching technique.

The spacer 62 is made of, for example, a glass-based or ceramic-based resin, a polyethylene-based resin, or a metal-based resin such as tantalum. It has a function of adjusting the temperature of the dye receiving layer 50a of the photographic printing paper 50 by the heat transfer of.

As shown in FIG. 49, the photographic printing paper 50 is actually formed of a cellulosic resin or the like and has a dye receiving layer 50a which absorbs a disperse dye and a high heat resistance and a high non-hygroscopic property. Polypropylene layer 50b, base paper 50c,
Balance the polypropylene layer 50b with photographic paper
It has a structure in which a polypropylene layer 50d for preventing the warp of 50 is laminated. In addition, 50e is a light absorption layer (this can be omitted).

As shown in FIGS. 44 and 45, the spacer 62 is provided with a plurality of square columnar holes 62a each of which is a part of the vaporizing hole 23 of each vaporizing section 17, and the dye storing tank 41 is provided.
A plurality of slots 27 are formed which extend from the (yellow 41Y, magenta 41M, cyan 41C) side to the other end side of the head base 63 and communicate with the vaporization holes 23 of each vaporization section 17.

Further, a dye solution stopping layer 67 is provided between the protective layer 61 and the spacer 62. This dye liquid stop layer 67
Is a liquefied disperse dye formed of a fluorine-based or silicon-based resin material that is heat resistant and chemically stable.
Is prevented from leaking to the outside through the wall surface of the protective layer 61 and adhering to the dye receiving layer 50a of the photographic printing paper 50. In addition, as shown in FIGS. 44 and 46, the liquid stop layer 67 is provided with a plurality of square columnar holes 67 a that are part of the vaporization holes 23 of each vaporization section 17. Incidentally, the protective layer 61 and the dye liquid stop layer
The 67 and the spacer 62 are adhered to each other with a heat resistant adhesive.

The head base 63 is formed as thin as possible, for example, glass, ceramics or the like having a high melting point, no thermoformability, and low thermal conductivity. Further, as shown in FIG. 44, on the dye storage tank 41 side of the head base 63,
A supply port (connection hole) 43 communicating with each liquefied dye introducing section 64 is formed.

Further, each liquefied dye introducing portion of the head base 63
A plate-shaped heater (heating element) 68 is attached to the surface on the 64 side up to the inside of each dye bath 41. The heater 68 is made of, for example, carbon or a silicon compound, and is heated to 50 ° C.
It has a function of liquefying the disperse dye 42 in the form of a solid powder by generating heat of ˜300 ° C. and keeping the temperature in the liquefied state. As shown in FIG. 44, one end of the heater 68 is bent vertically upward and inserted into each dye storage tank 41,
The other end extends to the end side of each liquefied dye introducing section 64. Further, as shown in FIG. 47, the heater 68 is arranged on the entire surface of the head base 63 so that the spacer 62 and the protective layer 61 can be kept warm to heat the dye receiving layer 50a of the printing paper 50.

The above printer head shown in FIGS. 44 to 47.
According to 60, in addition to having the features described in the printer head 40 shown in FIGS. 41 to 43, it has the following advantages when compared with this printer head 40.

First, since the dye heating for vaporization in each vaporizing section 17 is performed not by using the laser beam L but by the heat generation of the heating element 65 provided in each vaporizing section, an expensive semiconductor laser ( In particular, it is possible to use a low-cost heating element instead of multiple laser arrays that are provided in parallel), and the vaporization efficiency directly uses the heat generated by the heater without depending on the electro-optical conversion efficiency of the laser. , The efficiency as a whole is improved.

However, the present inventor
As a result of examining 60, it was found that the following points to be improved remain.

That is, in the head structure of the printer head 60, as shown in FIG. 48, when heat is locally applied to the dye 22 by the heating element 65, the surface tension changes with temperature. The dye 22 is attracted to and the dye easily escapes in the direction of the arrow 16. Therefore, the vaporization efficiency may deteriorate.

Further, with the escape 16 of the dye 22, the disperse dye 22
Since the liquid surface of the vaporizing section 17 of the above is not constant and the heating element 65 is arranged below the liquid surface of the liquefied dye 22 (that is, inside the dye), the temperature rise of the dye due to heat generation is particularly high. (surface)
Is likely to be insufficient. Further, when the driving of the heating element is turned off, the temperature decrease of the dye is slow, so that the responsiveness of the temperature increase ← → temperature decrease may be insufficient. Further, there is a problem that the efficiency is deteriorated because heat escapes to the heat insulating layer 66, and it is necessary to perform sufficient cooling with a cooling fin or the like because a large amount of heat escapes.

[0047]

SUMMARY OF THE INVENTION An object of the present invention is to effectively hold the recording material such as a dye in the vaporizing part while efficiently utilizing the characteristics of the thermal transfer recording method described above, and to efficiently transfer heat to the recording material. It is possible to improve the vaporization efficiency and suppress the escape of heat to increase the heating efficiency (if the heat still escapes, this residual heat can be used for liquefying the dye), and the cooling fins etc. can be made smaller. It is an object of the present invention to provide a recording apparatus that can reduce cost and a manufacturing method thereof.

[0048]

That is, according to the present invention, a recording material accommodating portion (for example, a region including a dye vaporizing portion 77 described later) facing a recording medium (for example, a printing paper 50 described later), And a heating means (for example, a heating element 75 described later) for heating the recording material in the recording material accommodation portion to transfer it to the recording medium, and this heating means is provided for the recording material in the recording material accommodation portion. A porous structure (for example, a meandering columnar body 80 to be described later) formed of a heating element arranged in the surface area and holding and supplying the recording material is provided at a position deeper than the heating element. Recording device.

According to the recording apparatus of the present invention, since the heating element is arranged in the surface area of the recording material in the recording material container,
It is possible to quickly raise the temperature of the recording material in the surface area, improve the heating efficiency due to heat generation, and improve the transfer efficiency of the recording material due to vaporization or the like. Moreover, since it is not necessary to use a laser, the cost can be reduced. Further, when the heating element is turned off, the temperature of the surface area of the recording material can be quickly lowered, and the temperature can be lowered quickly, so that the responsiveness is improved.

Moreover, since the porous structure for holding and supplying the recording material is provided at a position deeper than the heating element in the surface area of the recording material (that is, below the heating element), the capillary tube is provided in the vaporizing section. By providing a structure, the escape of the recording material is suppressed by this capillary action, the recording material is effectively held and a fixed amount is supplied, and the heat from the heating element can be efficiently transmitted,
The vaporization efficiency can be improved, and high-quality recording can be obtained with a constant vaporization amount by the constant supply of the recording material.

Since the heating element is provided above the capillary structure, the escape of heat is suppressed and the heating efficiency is improved (when the heat still escapes, this residual heat is utilized for liquefying the dye or the recording medium Can also be used as a heat source for fixing the recording material by reducing the fixing energy, and the cost can be reduced by reducing the cooling fin and the like.

Since the recording apparatus of the present invention is of the thermal transfer type in which the recording material is heated and transferred to the recording medium, the above-described miniaturization, ease of maintenance, immediacy, and high image quality are achieved. It has features such as high gradation. The recording apparatus of the present invention is a concept that includes the printer head described above and a printer incorporating the printer head (hereinafter,
Similar).

In the recording apparatus of the present invention, the heating element is arranged so as to be in contact with the surface of the recording material or be immersed at least partially under the surface, and the heating element is the recording material. It is desirable that they are arranged so as to straddle the accommodation section. This heating element may change the specific resistance (resistivity) in the thickness direction or the surface direction, and may increase the heating efficiency on the outermost surface side of the recording material and at the optimum position.

Regarding the heating element and the porous structure, the heating element is arranged in the same pattern as the porous structure, the heating element is in contact with the porous structure, or It is preferable that the porous structure and the porous structure are arranged at a predetermined distance.

Further, in the recording apparatus of the present invention, the heating element generates heat when energized, and the recording material is vaporized or ablated by the heat, and the recording material is flown to the recording material which is arranged so as to face the recording material in a non-contact state. It is desirable to be configured. That is, the recording material is transferred to the recording medium through the gap (especially in flight).
It is suitable for the recording head for the non-contact type dye vaporization printer described above.

In this case, a plurality of heating elements are arranged, each of which is configured to heat the recording material,
Among the plurality of heating elements, a selected heating element may be used for vaporization or ablation of the recording material, and an unselected heating element may be used for heat retention or liquefaction of the recording material. However, the recording material can be originally liquefied by a separately provided heating element.

The above-mentioned porous structure can take various forms such as columnar bodies, wall-shaped bodies, aggregates of fine particles, porous substances, fibrous bodies, etc. A columnar body or a wall-shaped body extending inward is desirable from the viewpoint of fine workability (lithography can be applied). The porous structure may be formed of a porous body having high thermal conductivity. Further, the porous structure may be made of a glass material, a polymer material or a metal material.

A support for supporting the above-mentioned heating element (for example,
The base 73) described later can be formed of glass, but can be formed of other materials. For example, it can be formed of a polymer material, but this is because a large pressure is not applied if the recording device is not pressed against the recording medium. Less (heat dissipation) and good thermal insulation.

If a recording material backflow prevention mechanism (for example, a ball valve 121 described later) is provided in the recording material supply passage to the recording material storage portion, the recording material is prevented from escaping from the vaporizing portion. It can be effectively prevented and the supply to the vaporization section can be performed stably.

Further, according to the present invention, a recording material accommodating portion (for example, an area including a dye vaporizing portion 77 described later) facing a recording medium (for example, a printing paper 50 described later) and recording in this recording material accommodating portion. And a heating means (for example, a heating element 175 described later) for heating the material to transfer it to the recording medium, and the heating means is arranged in the surface area of the recording material in the recording material accommodating portion. The present invention also provides a recording apparatus which is composed of a heating element and has a passage hole for the recording material (for example, a passage hole 150 described later).

According to the recording apparatus of the present invention, like the recording apparatus of the present invention described above, since the heating element is arranged in the surface area of the recording material, the heating efficiency and the transfer efficiency are improved and the high-speed response is achieved. Cost reduction is possible.

Moreover, unlike the strip-shaped heating element,
Since the recording material passage hole is provided, the recording material can be vaporized or ablated through the passage hole at high speed and with high efficiency, and at the same time, the recording material passage hole can be formed without providing the above-mentioned porous structure. In this case, the recording material is held and further supplied, preventing escape due to a difference in surface tension between the heating element high temperature portion and the surrounding recording material, and effective heat transfer and vaporization can be performed, and The structure of the vaporizing section can also be simplified.

Further, the contact area between the heating element and the recording material can be increased by the passage hole of the recording material, the heat transfer efficiency can be improved, and bumping is less likely to occur, so that stable vaporization can be performed. Further, the heat generating element has a small heat capacity due to the above-mentioned passage holes and a rapid heat transfer, so that a thermal transient (thermal responsiveness) is improved. Such a heating element can be easily manufactured by the lithography used in the semiconductor manufacturing process.

Since the recording apparatus of the present invention is also of the thermal transfer type in which the recording material is heated and transferred to the recording medium, the above-mentioned miniaturization, easiness of maintenance, immediacy, high image quality,
It has features such as high gradation.

Also in the recording apparatus of the present invention, the heating element is arranged so as to be in contact with the surface of the recording material or to be soaked at least partially under the surface, and the heating element is used for the recording material. It is desirable that they are arranged so as to straddle the accommodation section.

Further, in the recording apparatus of the present invention, the heating element generates heat by energization, and the heat causes the recording material to vaporize or ablate through the above-mentioned passage holes, and the recording material is arranged to face the recording material in a non-contact state. It is desirable to be configured to fly to the recording body. That is, it is preferable that the recording material is configured to move (especially fly) to the recording medium through the gap, which is suitable for the recording head for the non-contact type dye vaporization printer. However, it is also applicable to the recording head (thermal head or the like) for the contact type thermal transfer printer described above.

In this case, a plurality of heating elements are arranged, each of which is configured to heat the recording material,
Among the plurality of heating elements, a selected heating element may be used for vaporization or ablation of the recording material, and an unselected heating element may be used for heat retention or liquefaction of the recording material. However, the recording material can be originally liquefied by a separately provided heating element.

Further, the size of the recording material passage hole of the heating element may change in the thickness direction of the heating element, or
When the specific resistance of the heating element changes in the thickness direction or the surface direction, it is possible to achieve uniform vaporization efficiency and heating.

Also in the present invention, the above-mentioned porous structure may be provided at a position deeper than the above-mentioned heating element. At this time, the efficiency is further improved by holding and supplying the recording material by the porous structure.

Also in the present invention, the support for the heating element may be made of a polymer material, and a low heat conduction layer may be provided between the heating element and the support. In either case, the heat dissipation of the heating element can be reduced. Further, similarly to the above, a recording material backflow prevention mechanism may be provided in the recording material supply passage to the recording material container.

The solidified disperse dye, the liquefied disperse dye, the vaporized disperse dye, and the disperse dye that can be used as the recording material in the present invention are collectively referred to as "vaporizable dye", and the definitions are as follows.

That is, a dye having a temperature range in which the vapor pressure is 0.01 Pascal or more in the temperature range from 25 ° C. to the decomposition temperature is defined as a “vaporizable dye”. However, when the dye molecules are associated with the average number of associations n in the gas phase, the value obtained by dividing the vapor pressure by the average number of associations is 0.01.
Those that are equal to or greater than Pascal are volatile dyes. These vaporizable dyes become vaporized dyes when heated,
Examples of practical dyes according to the above definition include HSR-2031, ESC-155, ESC-655 and the like which are commercially available.

The present invention further comprises, as a method of manufacturing each of the recording devices of the present invention, a step of forming a heating element by processing the heating element material into a predetermined pattern by lithography at the position of the recording material accommodation portion, A method of manufacturing a recording device is also provided.

In this manufacturing method, a heating element material is applied at the position of the recording material accommodating portion, this heating element material is processed into a predetermined pattern by lithography, and electrodes are formed on both ends of the heating element formed by this. It is possible to form a porous structure by using the heating element as a mask and etching the layer directly below the heating element in the same pattern.

Alternatively, after depositing the heating element material on the support, the heating element material is processed into a predetermined pattern by lithography, and a portion of the support is removed directly below the heating element formed by this. It is also possible to form the recording material accommodation portion. In this case, it is preferable to form an etching stop layer between the support and the heating element material.

[0076]

The present invention will be described in more detail with reference to the following examples, but it goes without saying that the present invention is not limited to the following examples.

Embodiment 1 FIGS. 1 to 14 show a first embodiment in which the present invention is applied to a non-contact type dye vaporization printer (for example, a video printer: hereinafter the same).

First, the characteristic structure of the printer head 70 according to this embodiment will be described with reference to FIGS.

In the dye vaporizing section 77 of the printer head 70, the dye containing section 87 having a depth of, for example, 50 μm is formed in the base 73.
Is formed in a concave shape, and a fine columnar body (or wall-shaped body) 80 made of glass of the same material as that of the base 73 and having a width of, for example, 1 to 2 μm is provided in a meandering manner.

This columnar body 80 is provided at a height from the bottom surface of the accommodating portion 87 to its upper surface, and has narrow voids 82 alternately between the meandering patterns. Thus constituting a porous structure as a whole. Void
Due to its capillary action, the liquefying dye
Is held, and at the same time, a sufficient amount of the liquefied dye 22 necessary for time-series operation of one dot of the printer is supplied upward.

A heating element that is in contact with the upper surface of the columnar body 80 and overlaps the same pattern as the columnar body 80 and has a thickness of, for example, 6 μm
75 are stacked in a meandering shape. That is, the columnar body 80 as a porous structure is provided below the heating element 75 (at a position deeper than this).
Is provided. The heating element 75 is in contact with the surface of the liquefying dye 22 in the surface area of the liquefying dye 22 in the housing portion 87 or is at least partially immersed under this surface, but the latter state is more efficient in vaporization and supply. Can be said to be desirable in terms of.

In this case, the heating element 75 also has the voids 83 in the same pattern as the columnar body 80, and in addition to the capillary action of the voids 82 of the columnar body 80, the capillary action of the voids 83 is exerted. The dye can be effectively retained and supplied.

The heating element 75 is made of a silicon-based compound such as carbon or polysilicon, is provided so as to straddle the dye containing portion 87, and a pair of electrodes (aluminum electrodes may be attached to both sides thereof). A signal voltage based on an image signal is applied between 84 and 85 by matrix driving, and the energization causes heat generation of 50 to 500 ° C., and this heat efficiently heats the liquefied dye 22 in its surface area. It vaporizes. Further, this heat is hardly radiated to the base 73 through the columnar body 80 because the columnar body 80 made of glass exists under the heating element 75.

SiO ₂ is formed on the upper surface including the electrodes 84 and 85.
An insulating layer 86 such as is provided to electrically insulate the electrodes 84 and 85, which may also have a thermal insulating effect. Further, a dye liquid stop layer 97 made of a fluorine-based or silicon-based resin is provided on the insulating layer 86 to prevent the liquefied dye 22 from leaking upward. Further, a protective layer 81 made of tantalum, glass, or the like, which is equivalent to the protective layer 61 described above, is provided on the liquid stop layer 97. Each layer 81, 86, 97 has a vaporization opening 81.
a, 86a, 97a are formed.

The dye vaporizer 77 having the above-described structure is
In the head 70, a plurality of dots are actually arranged for each color (yellow Y, magenta M, cyan C) for full color as shown in FIGS. In each of these vaporization sections 77Y, 77M, 77C, from the respective storage tanks 41Y, 41M, 41C, the dye introduction sections 64Y, 64M, 64C, and further the dye drawing path 64 are provided.
The liquefied dye of each color is supplied through Y ′, 64M ′, 64C ′ and each inlet 64 ″.

In this head 70, the wirings 84 'and 85' from the electrodes 84 and 85 of the heating element 75 in each vaporization section are routed on the base 73, respectively, and then the control board (tab) on one end side. It is guided to 88 and is connected at a connecting portion 90 such as high temperature solder. At the intersecting position 92 of the wirings 84 ′ and 85 ′ of the electrodes 84 and 85, the two wirings are insulated and separated via an interlayer insulating film 91 such as SiO ₂ . The control IC 89 mounted on the control board is configured to supply a predetermined drive signal by matrix drive.

By this drive signal, in each vaporizing section, the selected heating element 75 is turned on to generate heat to vaporize the dye, while the heating element 75 not turned off is kept warm by the residual heat or It can be used for liquefaction. That is, by alternately driving the heating elements 75, either the liquefaction or the cooling of the dye can be efficiently performed by controlling the residual heat. However, although illustration is omitted, in order to liquefy the dye, the heater 68 shown in FIG. 44 can be provided on each vaporizing section or base. The head 70 is formed by joining the dye bath main body 41A to the head main body 70A, and the joint surfaces are indicated by 93 and 94.

As described above, according to the printer head 70 of the present embodiment, since the heating element 75 is disposed in the surface area of the liquefied dye 22 in the dye container 87 as the dye vaporizer, the liquefied dye Quickly raise the temperature of 22 in the surface area,
The heating efficiency due to heat generation can be improved, and the transfer efficiency of the dye due to vaporization can be improved. Moreover, since it is not necessary to use a laser, the cost can be reduced. Further, when the heating element 75 is turned off, the temperature of the surface area of the dye 22 can be quickly lowered, and the temperature can be lowered quickly, so that the responsiveness is improved.

In addition, a fine meandering columnar body 80 for holding and supplying the dye 22 is provided at a position deeper than the surface of the dye 22 in contact with the heating element 75 (that is, below the heating element 75). Since it is provided as a porous structure, a capillary structure is provided in the vaporization section 77, the escape of the dye is suppressed by this capillary action, and the dye is effectively held and supplied in a fixed amount, and the heating element is used.
It is possible to efficiently transfer the heat generated by 75 and improve the vaporization efficiency, and the quantitative supply of the dye makes it possible to obtain high-quality recording with a constant vaporization amount.

A heating element 75 is attached to the upper part of the capillary structure.
Since it is provided, heat dissipation is suppressed and heating efficiency is improved (when the heat still escapes, this residual heat is used for liquefying the dye or used as a heat source for fixing the dye by heating the printing paper 50. Therefore, the fixing energy can be reduced), and the cost can be reduced by reducing the size of the cooling fin or the like.

According to the head structure of this embodiment, as in the case shown in FIG. 44, the solid powder disperse dye 42 in each dye storage tank 41 is heated up to the melting point by the heating element 68 in each dye storage tank 41. It may be heated and melted. Each of the liquefied disperse dyes 22 is guided to each of the vaporization parts 77 by the capillary phenomenon of each of the liquefied dye introduction parts 64.

In this case, since the liquid stop layer 97 is provided on the protective layer 81 side, a fixed amount of the liquefied dye is always stored in the dye accommodating portion of each vaporizing portion 77 and does not flow to the protective layer 81. .
Further, when the dye is heated by the heating element 75, the dye is held by the finely processed columnar body 80, so that the dye does not escape even if a difference in surface tension occurs.

The heating element 75 (further, the heating element 68) also heats and heats the spacers (not shown here) that form a part of each liquefied dye introducing portion 64. And photographic paper 50
When color printing is performed, heat is generated by the heating element 75 according to the image signal. Due to this heat of vaporization, the heating element of each vaporization part
The dye around 75 is vaporized, passes through the hole 81a of the protective layer 81, and is transferred to the receiving layer 50a of the photographic printing paper 50 in the order of Y, M, and C.

The printer head 70 according to this embodiment is shown in FIG.
Similar to the head 60 shown in (4), it is of a thermal transfer system that heats the dye 22 to fly to the printing paper 50 through the gap,
It has the features of miniaturization, ease of maintenance, immediacy, high-quality images, and high gradation described above.

Although the columnar body 80 and the base 73 supporting the heat generating element 75 are made of glass, they may be made of other materials. For example, it may be formed of a polymer material such as polyimide, but this is because the printer head 70 has a structure in which it is not pressed against the photographic printing paper 50, and therefore is not subject to large pressure. When the heating element 75 operates, the heat dissipation is small and the thermal insulation is good.

Next, an example of a method of manufacturing the head 70 according to this embodiment will be described with reference to FIGS.

First, as shown in FIG. 5, RIE is performed on the base 73.
Grooves are formed as the dye introducing portion 64 and the dye drawing path 64 'by (reactive ion etching) or machining (see FIG. 3).

Next, as shown in FIG. 6, this groove is filled with photoresist 95 and the SiO ₂ layer 7 as a spacer is further formed.
3'is deposited to a thickness of about 10 μm by a sputtering method.

Next, as shown in FIG. 7, the above-mentioned groove (introduction part)
64 and the photoresist 95 in the lead-in path 64 ') are dissolved and removed by supplying a solvent from the opening of the groove.
A polysilicon layer 75 is formed on the O ₂ layer 73 'by CVD (Chemical Vapor Deposition).

Next, as shown in FIG. 8, the polysilicon layer 75 is etched and patterned by lithography,
The heating element layer 75 is formed.

Next, as shown in FIG. 9, aluminum is vapor-deposited and the heating element electrodes 84 and
85 and these wirings 84 'and 85' are formed.

Next, as shown in FIG. 10, a SiO ₂ insulating layer 86, a liquid stop layer 97 made of Teflon, etc., and a protective layer 81 made of tantalum etc. are sequentially formed by sputtering, etching and coating.

Next, as shown in FIG. 11, the layers 81, 97 and 86 are selectively etched and removed by RIE or the like at the position of the vaporizing portion (or dye accommodating portion), and further, the heating element 75 and the SiO immediately below the heating element 75. _{The two} layers 73 'are etched in a meandering pattern as shown in FIG. 1 and left in the same pattern to form the heating element 75 and the columnar body 80 as a porous structure. The SiO ₂ layer 7
When 3'is made of the same material as the base 73, they are integrated with each other (shown as such in FIGS. 2 and 4).

Next, as shown in FIG. 12 (a cross section viewed from another direction in FIG. 3), the dye bath main body 41A is bonded and fixed to the head main body 70A shown in FIG. A head 70 having a vaporizing portion 77 having the structure as shown is produced.

As described above, the head 70 according to the present embodiment is
In particular, in order to fabricate the vaporization part 77, the heating element layer 75 can be finely processed by a processing technique generally used in the semiconductor manufacturing process such as lithography in the dye containing part (vaporization part), and the base is etched with the same pattern. Thus, the columnar body 80 can be finely processed.

The color video printer having the head 70 according to the present embodiment has a vertical direction (X direction) as shown in FIG.
Printing is performed by the paper feeding and the horizontal scanning (Y direction) of the head in the direction orthogonal to the X direction, and the vertical paper feeding and the horizontal head scanning are alternately performed. Has been done.

In the printer 100 of the present embodiment, the printer head 70 including the head portions Y, M, and C of each color is a serial type head, and the photographic printing paper 50 is formed by the head feed shaft 101 and the head support shaft 102 which are feed screw mechanisms. Paper feed direction X
It is reciprocally movable in the head feeding direction Y which is orthogonal to.

Further, a paper feed roller 103 for supporting the printing paper 50 so as to sandwich the printing paper 50 is rotatably provided to the head 70. In addition, the head 70 is a flexible harness 104.
Is connected to a head drive circuit board (not shown) or the like.

When the printing of one line is completed, the printing paper 50 is fed by one line by the paper feed drive roller 103 which also serves as a head support. Printing is started sequentially for each color, but after 3 dots, printing is performed simultaneously. In addition, a plurality of first heating elements
If there are 75, run them alternately and select the heating element 75
Is used for printing, while the non-printing heating element 75 can control the temperature by utilizing the residual heat to liquefy the dye and keep it warm.

FIG. 14 shows a color video printer 100 having a line-type head 70, in which the head portions Y, M, C of the respective colors are arranged side by side in the width direction of the photographic printing paper 50. .

Embodiment 2 FIGS. 15 to 16 show a second embodiment in which the present invention is applied to a non-contact type dye vaporization printer.

In this embodiment, as compared with the example shown in FIGS. 1 and 2, the columnar body 110 having a meandering pattern as a porous structure provided immediately below the heating element 75 has a high thermal conductivity, such as an aluminum porous material. And S between the heating element 75 and
The structure is the same except that the insulating oxide film 111 such as iO ₂ is provided.

With this structure, the porous material
Since it is possible to hold the dye 22 in the pores of 110,
It is possible to prevent the dye from escaping and facilitate heat transfer to the dye, thus improving efficiency.

Embodiment 3 FIGS. 17 to 18 show a third embodiment in which the present invention is applied to a non-contact type dye vaporization printer.

In this embodiment, as compared with the example shown in FIGS. 1 and 2, a check valve mechanism 120 for preventing the backflow (escape) of the dye is provided in the dye introducing passage 64 "leading to the dye containing portion 87. It has the same configuration except that it is provided.

This check valve mechanism 120 has a valve accommodating space 122 in which a ball valve 121 is accommodated in a part of the introduction path 64 ″, and when the ball valve 121 supplies a dye (when it is not heated), a pair of crescent moons. The valve seats 123 and 124 are in contact with each other as shown in phantom lines, and the dye 22 is introduced into the container 87 through the passage hole 125 between them, but the dye is heated and vaporized in the container 87. At that time, the ball valve 121 is forced into the space 122.
The inside is moved to the position indicated by the solid line, and the circular passage hole 126 is contacted therewith to completely close it.

Thus, the dye 22 is heated by the dye introducing part 6 when heated.
When trying to escape to the 4'side, this is blocked by the valve 121, and when not heated, the valve 121 opens and the dye introducing part 64 '
Is supplied to the accommodation section 87 from the. In this case, the escape rate of the dye during heating is about 100 times that during non-heating, but the check valve mechanism 120 can more fully prevent the backflow phenomenon.

As the check valve mechanism, other than the above, a diaphragm valve, a rotary disc valve or the like can be adopted, and the position thereof may be, for example, in the introduction portion 64 '. Further, the check valve mechanism may be adopted in other embodiments described later.

Embodiment 4 FIGS. 19 to 20 show a fourth embodiment in which the present invention is applied to a non-contact type dye vaporization printer.

In this embodiment, the heating elements 75 are provided in contact with the upper surfaces of the columnar bodies 80 and 110 in each of the above-described embodiments, while the glass columnar body 130 is used as the base material described above.
Microfabrication by lithography technology at the time of processing 73,
The heating element 75 is different in that it is provided in a bridge type with a width of 3 to 5 .mu.m above the columnar body 130 at a constant distance, and the other structures are the same. Here, since the columnar body 130 exerts the capillary action,
75 may be provided linearly.

With this structure, the columnar body 13
Even if 0 is distant from the heating element 75 or the heating element 75 has a narrow linear shape, the columnar body 130 has a capillary action to cause the dye.
It is possible to sufficiently prevent the escape of 22 and it is efficient because it is heated from the surface of the dye. Further, since the heating element 75 is present on the upper surface, it is possible to heat the photographic printing paper only at the time of printing, as in the above-described example, or to heat the photographic printing paper by adding it to the preheated photographic printing paper.

Embodiment 5 FIGS. 21 to 23 show a fifth embodiment in which the present invention is applied to a non-contact type dye vaporization printer.

In this embodiment, as compared with the example shown in FIGS. 1 and 2, the heating element 75 on the columnar body 80 in the dye accommodating portion 87.
The same configuration is adopted except that the meandering pattern is changed and a plurality of small columnar bodies 140 are further provided on both sides thereof.

With this structure, the heating of the surface of the dye 22 by the heating element 75 and the capillary action of the columnar body 80, which is a porous structure having a meandering pattern, are the same as those described in the first embodiment. In addition to the effect of the heating element 75
Even if the liquefied dye 22 tries to escape to both sides of the heating element, this is prevented by the capillary action between the many small cylindrical bodies 140, and the heating element 75
It is possible to sufficiently hold the liquefied dye 22 in the position.

Embodiment 6 FIGS. 24 to 31 show a sixth embodiment in which the present invention is applied to a non-contact type dye vaporization printer.

In this embodiment, the structure different from the example shown in FIGS. 1 and 2 is that a heating element 175 is provided in the dye containing portion 87 in contact with the liquefied dye 22 so as to straddle the dye containing portion 87. Thickness 1 ~ 20μm (especially 6 ~ 10μm), width
A linear strip with a relatively wide width of 10 to 200 μm is formed. The strip heating element 175 has a size of 1 to 20 μm (especially 5 μm) at the center thereof.
m or less, further 2 μm or less) is formed, but below the heating element 175, the above-mentioned columnar body 80 is formed.
No such porous structure is provided (others have basically the same structure).

That is, according to the head 170 shown in FIGS. 24 to 26, the accommodating portion (depth of 10 to 200 μm) for accommodating the dye 22 replenished from the replenishing path (introducing portion) 64 ′ of the liquefied dye 22. (Preferably about 50 μm) 87, a thin film heater 175 made of, for example, poly-Si (polycrystalline silicon) and having a thickness of 6 μm and a width of 50 μm is installed so as to contact the upper surface of the liquefied dye 22. A large number of through holes 150 having a diameter of 1 to 2 μm are formed in the 175 in the thickness direction.

The through holes 150 have the same function as the above-mentioned porous structure and at the same time impart a proper specific resistance as a heater to contribute to efficient heat generation. The distribution is not limited to the circular pattern shown in FIG. 24, and the distributions shown in FIGS. 25 (A) to (E), and various shapes and deformation patterns such as a quadrangle, a slit or a rectangle, and a hexagon may be adopted. Alternatively, those having different distribution densities and sizes are also shown in FIG.

At both ends of the heater 175, electrodes 84 and 85, which are formed of, for example, a metal thin film (Au, Al, etc.) by vapor deposition and make ohmic contact with the poly-Si heater 175, are provided. By passing a current between the electrodes, the poly-Si heater 175 functions as a minute heater. Area of heating part of this minute heater (collection area of through holes 150)
Is preferably 10 to 200 μm (particularly 10 to 100 μm) from the viewpoint of vaporization efficiency and dot size, but this can be selected according to the required fineness as described later.

The operation when the head 170 according to this example is used as an actual vaporizer will be described below. That is, the molten (liquid) dye 22 sucked up into the hole 150 of the minute heater 175 by the capillary phenomenon is heated by the heater portion 175A around the hole 150 and vaporized. In this case, since the heater portion 175A around the through hole 150 has an extremely narrow width and operates as a resistance portion when energized,
Heat generation (generation of Joule heat) is sufficiently generated by energization, and holes
The dye 22 infiltrated in 150 is efficiently heated and vaporized without escaping.

Then, the dye 22 is passed through the hole 150, and the dye 22 is heated.
It is possible to supply from the lower dye container 87 which is in contact with 175,
It is replenished in an amount sufficient for the time series operation of one dot of the printer. For this reason, the heater 175 itself has such a function even if a structure such as the columnar body 80 for holding and supplying the dye is not provided under the heater as in the example described above.

Like the head of the above-described embodiment, the head 170 according to the present embodiment has the heating element 175 disposed on the surface area of the recording material and is driven in the same manner. Therefore, the heating efficiency and the transfer efficiency are improved and the high-speed response is achieved. Efficiency and cost reduction.

In this case, the heating element 175 has a vaporized dye passage hole 150 unlike the belt-shaped one, so that the dye can be vaporized through the passage hole at high speed and with high efficiency, and at the same time, as described above. Even if the porous structure is not provided, the dye is retained in the through holes 150 and further supplied, so that the escape due to the difference in the surface tension of the dye between the high temperature part of the heating element 175 and the surroundings is prevented. In addition, effective heat transfer and vaporization can be performed, and the structure of the vaporization section can be simplified.

Since the contact area between the heating element 175 and the dye 22 is increased by the passage hole 150, heat transfer efficiency is improved, bumping is less likely to occur, and stable vaporization can be performed. Further, the heat generating element 175 has a small heat capacity due to the passage hole 150 and has a high heat transfer rate, and thus has a good thermal response and is advantageous for driving the head. Such a heating element 175 can be easily manufactured by the lithography that is performed in the semiconductor manufacturing process as described later.

Since the head 170 according to the present embodiment and the printer using the same are also the thermal transfer system in which the dye is heated to fly to the photographic paper, the downsizing, the ease of maintenance, the immediacy, and the high quality of the image described above are achieved. It has features such as high gradation.

Incidentally, the heater of poly-Si according to this embodiment.
Although the 175 is formed as an air bridge on the dye accommodating portion 87, the head 170 does not need to have high mechanical strength as in a thermal transfer printer for photographic paper, and as shown in FIG. By providing the lid 171, it can be sufficiently put to practical use. The mechanical strength of the poly-Si thin film that constitutes the heater 175 is surprisingly large as seen in recent studies of micromachines, and stability of the thin film heater with a thickness of several μm has a problem during the manufacturing process. Don't

The head 170 according to this embodiment is actually
It may have the structure shown in FIG. Here the heating element
An electrically insulating layer 172 and an etching stop layer 173 are provided between the 175 and the glass substrate 73, and the substrate 73 is provided with a base substrate 176 (which is the dye bath described above) via an adhesive or welding layer 174. It is joined to the main body 41A). Further, the insulating layer 86 and the liquid stop layer 97 similar to those shown in FIG. 2 may be provided on the heating element 175. Regarding the thickness of each part, the heating element 175 is ~ 10 μm, the electrode 84 and
85 ~ 2μm, lid 171 ~ 50μm, insulating layer 172 ~ 1
μm, the etching stop layer 173 is 1 μm, and the glass substrate 73 is
50 μm, and the base substrate 176 may be 1 to 2 mm.

Here, the most important sizes are the through holes 150 of the heating element heater 175 and the number thereof. In the printer according to this example, it is experimentally known that the dye required to form the density of one dot of 300 dpi is about 600 μm ³ , and the amount of the dye filled in the through hole 150 of the heater part 175A is this amount. Must be sufficiently exceeded.
For example, if the through holes 150 have a size of 2 × 2 μm ² and the depth is 6 μm, the number of the through holes 150 may be 25 (that is, a capacity of 5 × 5 holes).

However, considering the supply of the dye,
In order to have a more sufficient filling amount, it is necessary to double the number of through holes as above. Actually, if the volume ratio of the through hole 150 to the heater 175 is 50/50%, the size of 1 dot is
It becomes a heater of 20 × 20 μm ² , which can be sufficiently realized (at intervals of 83 μm) to achieve high definition of 300 dpi. The through hole 150 and the arrangement of the heater 175 shown in FIGS. 24 to 26 need to be designed so as to satisfy the conditions shown here.

Next, an example of a method of manufacturing the head 170 according to this embodiment will be described with reference to FIGS.

First, as shown in FIG. 27, on the surface of the glass substrate 73 having a thickness of about 50 μm, a Si layer (this is formed on the metal deposition film 173 such as Pd, Ni, Al, etc.) serving as an etching stop layer. A thick film 175 which is a resistance layer, and not only a semiconductor but also a metal or the like can be used as long as it is a stable material.
To a thickness of about 6 to 10 μm by means of CVD (chemical vapor deposition) or sputtering.

When the thick film 175 is poly-Si, for example, a thin film such as SiO ₂ (see the figure) is formed on the Pd layer 173.
An insulating layer 172) shown in FIG. 26 is formed to a thickness of 0.1 μm, and after forming amorphous hydrogenated silicon (a-Si: H), it is annealed to form a poly-Si layer 175. Suppresses the reaction with -Si and simultaneously forms the resistance layer 175 and Pd
The layer 173 can be insulated (however, the insulating layer 172 is not shown here).

In this case, for the annealing of a-Si for forming the poly-Si layer 175, not only furnace heating at a high temperature but also a method using laser or infrared ray can be performed, and the resistivity thereof can be reduced. It can be designed arbitrarily. Alternatively, it is possible to form the impurity-doped poly-Si layer by using thermal CVD. At this time, the impurity concentration (doping amount) is controlled in the thickness direction of the a-Si film by controlling the concentration of the doping gas. When the poly-Si layer 175 is changed, the resistivity can be changed in the thickness direction (specific resistance ρ is 10 ⁺⁶ to 10 ^-3 Ω−
It is easy to change in the cm range).

In this way, in the poly-Si layer 175, especially in the heater portion 175A, a heat generation distribution is generated in the thickness direction around the through hole 150, and heat generation is increased on the surface side that influences the vaporization efficiency of the dye ( Alternatively, concentrate the current on the heater)
It is possible to construct a vaporizer with high thermal efficiency. Note that such a resistivity distribution in the thickness direction can also be adopted in the above-described embodiments of FIGS. 1 to 23.

Next, on the poly-Si layer 175, a metal (Al, Ti / Au, etc.) 18 to be an ohmic electrode of the heater is formed.
5 is vapor-deposited to a thickness of several μm. Here, the heater is formed of poly-Si, but in reality, it is preferable that the single crystal silicon plate 175 be bonded onto the glass substrate 73 at 1000 ° C. in the process of FIG.

Next, as shown in FIG. 28, the electrode metal 185 is patterned by lithography and etching to form electrodes and wirings 84 and 85. And poly-
In order to form the through hole (micro hole) 150 in the Si layer 175,
Poly-S so that the minimum pattern size is about 2 μm
The i layer 175 is etched by RIE (reactive ion etching) or the like. At this time, it is effective to use a thin metal as the mask, and the above etching stop layer 173 can be used.

Next, as shown in FIG. 29, deep etching is performed from the back surface of the substrate glass 73 to form the dye containing portion 87. Here, since the substrate thickness is as thick as 50 μm, first about 40 μm is cut off by a high-speed rough etching method (for example, the technique of powder beam etching can be used).
After that, etching is advanced to the Pd etching stop layer 173 by using RIE.

Next, as shown in FIG. 30, for glass,
Utilizing the fact that aqua regia has a high Pd selective etching property,
After overetching the glass 73 at 29, Pd
Chemical etching of poly-Si layer 175
A structure in which a large number of through holes 150 are formed is manufactured.

Next, as shown in FIG. 31, the base substrate 176 and the substrate 73 are bonded (or fused) to each other to form a basic structure. Further, after covering only the dye containing portion 87 with the photoresist and applying the lid material, only the lid material on the dye containing portion 87 is removed together with the photoresist by the lift-off method, and the lid material 171 is dyed into a predetermined pattern. It is left around the accommodating portion 87, thereby completing a practical head structure.

As described above, in the head 170 according to the present embodiment, especially in the vaporizing portion, the vaporizing portion structure including the fine heater can be easily manufactured with good reproducibility by using the semiconductor manufacturing technique. By using the semiconductor thin film technology, it is possible to inexpensively manufacture a multi-dot head with uniform characteristics, and it is possible to manufacture the vaporizer with a sufficiently small size, for example, about 10 to 50 μm. It is possible and can manufacture high-definition printers (1200-300dpi).

Embodiment 7 FIG. 32 shows a seventh embodiment in which the present invention is applied to a non-contact type dye vaporization printer.

In this embodiment, as compared with the example shown in FIG. 24, the entire area of the dye accommodating portion 87 is covered with the poly-Si heater 175, and the other configurations are basically the same. Therefore,
The heater 175 and the electrodes 84 and 85 on both sides of the heater 175 are formed wide, and the number of the through holes 150 of the heater 175 is also increased (however, the distribution area of the through holes 150 does not extend over the entire width of the heater 175). Well, it may be in the middle).

With this structure, the escape of the liquefied dye can be suppressed more than in the case of FIG. 24, and a more efficient vaporization phenomenon can be expected. The head 170 of this example can also be manufactured in a large amount and uniformly by substantially the same semiconductor thin film process, as described with reference to FIGS. 27 to 31.

Embodiment 8 FIG. 33 shows an eighth embodiment in which the present invention is applied to a non-contact type dye vaporization printer (however, only a heating element is shown in the drawing).

In this embodiment, as compared with the example shown in FIG. 26, the diameter of the heating element heater 175 provided on the dye accommodating portion 87 gradually decreases in the thickness direction from the dye supply side to the dye vapor discharge side. The only difference is that a through hole 150 having a tapered inner wall surface 150A is formed.

As described above, since the size of the through-hole 150 is gradually reduced in the dye vapor discharge direction, the supply amount of the liquefied dye can be secured, and the vaporized vapor 32 is discharged in the center of the through-hole 150. Since the dye vapor 32 flies axially and has a directional property (particularly a vertical directional property), the dots on the printing paper can be formed with a desired diameter and a high density.

Embodiment 9 FIGS. 34 to 36 show a ninth embodiment in which the present invention is applied to a non-contact type dye vaporization printer.

This example is the same as the manufacturing example shown in FIGS. 27 to 31, except that the method of manufacturing the vaporizing section 77 is different.

As shown in FIG. 34, poly-S is formed on the glass substrate 73.
The step of forming the i layer 175 in a predetermined pattern is basically the same as the step described with reference to FIG.
Is not provided.

Next, as shown in FIG. 35, the back surface of the substrate glass 73 is partially etched to form a recess 190 at the position of the dye containing portion 87. Again, since the substrate thickness is as thick as 50 μm, a high-speed rough etching method (for example, the technique of powder beam etching can be used) is used to obtain about 40 μm.
The concave portion 190 can be formed by cutting m.

Next, as shown in FIG. 36, the through hole 150 is inserted from above.
An etching solution (hydrofluoric acid type) is introduced through the through hole 15
The glass part 73A at the lower part of 0 is removed, and the dye containing part 87
To form.

As described above, the dye containing portion 87 can be formed without providing the etching stopper layer, and the heating element 175 (particularly the through hole 150) can be formed while being finely held in a predetermined pattern and a predetermined size. Therefore, the process can be simplified.

Embodiment 10 FIG. 37 shows a tenth embodiment in which the present invention is applied to a non-contact type dye vaporization printer.

In this embodiment, as compared with the example shown in FIG. 26, the heater portion 175A of the heating element 175 in the dye containing portion 87 is used.
Immediately underneath, a columnar body 190 is formed in a pattern corresponding to this heater section.
Are formed differently, and other than that are basically the same structure.

In this columnar body 190, for example, a large number of small cylinders having a diameter of 1 to 2 μm are provided between the through holes 150, and a void 192 communicating with the through hole 150 exists between these small cylinders.
The dye is held and supplied by the above-mentioned capillary action.

Therefore, in this example, in addition to the capillary action by the through hole 150 of the heating element 175 described in the example of FIG.
Since the capillary action by 2 is added, it is expected that the dye will not escape easily and the vaporization efficiency of the dye can be further improved.

The columnar body 190 is preferably provided at a fixed distance from the heat generating body 175, but this is because the heat generated by the heat generating body 175 can be prevented from radiating from the columnar body 190. If this columnar body 190 is made of the same glass as the substrate 73, it can be processed in the same manner as the above-described step (described in FIG. 11).

Although the embodiments of the present invention have been described above, the above-described embodiments can be further modified based on the technical idea of the present invention.

For example, the above-mentioned heating elements (heaters) 75, 17
Regarding the shape, material, size, etc. of 5, various kinds or combinations can be adopted, and the poly-Si layer and the metal wiring can be used for both, and an insulating film such as SiN or SiO ₂ can be appropriately attached. It is also necessary to form a protective film.

Further, as the constituent material of the head, not only the above-mentioned system but also various combinations, for example, the following ones A to C are possible. A) Glass substrate / metal heater (W, silicide, Ni
A metal, such as Cr, which is relatively hard and is unlikely to be plastically deformed and whose resistivity can be controlled is desirable. ) / Cover material B) Si substrate / insulating film / poly-Si heater (a-Si,
Similar semiconductor materials such as SiGe: B can be used. ) / Metal electrode / Cover C) Plastic (polyimide etc.) substrate / Poly-Si heater / Metal electrode / Cover

It is necessary to reduce the thermal strain due to the difference in the coefficient of thermal expansion of each head constituent material, to employ a material system in which the air bridge of the heater is stable and easy to handle. An etching stopper film is attached between the heater and the substrate if necessary. Further, if a material having a low thermal conductivity such as SiO ₂ or polyimide is provided on the base of the heater, thermal insulation can be achieved.

Further, in the heater (heating element), if the resistivity distribution is provided in the thickness direction by doping impurities or changing the thickness of the heater, heating (hence vaporization) on the outermost surface of the dye can be carried out efficiently. Similarly, if the resistivity is changed in the plane direction so that heat is generated sufficiently in the central portion of the heater, the vaporization efficiency can be improved.

The through holes of the heater can also have various sizes and shapes, and the size can be changed in the thickness direction of the heater or in the plane direction to efficiently heat and supply and hold the dye. If this through-hole has a distribution in the plane direction, and if it is made dense in the central part of the heater, for example, the specific resistance here increases and heat generation is improved, and the temperature due to heat generation in the plane is made uniform, and the dye is decomposed. It can be stably supplied and held without causing it.

The head and the printer according to the present invention are characterized in that the heating element is used for heating the dye and the laser is not used. However, these heating elements and laser can be combined. . In this case, vaporization can be satisfactorily realized even if the power of each heating means is reduced.

Further, the porous structure to be formed in the vaporizing portion is not limited to the above-mentioned one, and for example, in the case of a column, its height, plane or cross-sectional shape, density, etc. may be changed. The formation location is also applicable as long as it is required to form a fine pattern or be porous, or to increase the surface area. The porous structure may be formed of a bead aggregate, a fibrous body or the like shown in FIG. 41, in addition to the columnar body or the wall-shaped body.

Further, not only the dye vaporization type transfer system but also the transfer system by ablation described above is possible, and in any case, the dye or the recording material flies and is transferred.

Further, the number of recording material accommodating portions for accommodating recording materials (dye), the number of dots, and the number of heating elements corresponding thereto may be variously changed, and the arrangement shape and size thereof are also those described above. It is not limited to.

The structure and shape of the head and printer are
It may have an appropriate structure and shape other than the above (the vaporizing section may be configured in the same manner as the vaporizing section shown in FIGS. 42 to 47), and other appropriate materials may be used for the material of each part constituting the head. May be used. With respect to the recording dyes, full-color recording can be performed with three colors of magenta, yellow, and cyan (further, black is added), and two-color printing, one-color monocolor, or monochrome recording can be performed.

Further, as in the above-mentioned example, the solid dye is once made into a liquid state and vaporized to perform recording, or the solid dye is heated by laser light to be directly vaporized (that is, sublimated) to perform recording. It is also possible to store a liquefied dye (liquid at room temperature) in the dye reservoir. Further, the recording material can be transferred to the printing paper by a phenomenon other than the above-mentioned flight (for example, vaporization).

[0180]

As described above, according to the present invention, the heating means for the recording material is composed of the heating element disposed in the surface area of the recording material in the recording material accommodation portion, and the heating element is located deeper than the heating element. Since the recording device is provided with a porous structure that holds and supplies the recording material, the temperature of the recording material is quickly raised in the surface area, the heating efficiency by heat generation is increased, and the transfer efficiency of the recording material by vaporization etc. Can be improved. Moreover, since it is not necessary to use a laser, the cost can be reduced. Further, when the heating element is turned off, the temperature of the surface area of the recording material can be quickly lowered, and the temperature can be lowered quickly, so that the responsiveness is improved.

Moreover, since the porous structure for holding and supplying the recording material is provided at a position deeper than the heating element in the surface area of the recording material (that is, below the heating element), the capillary tube is provided in the vaporizing section. By providing a structure, the escape of the recording material is suppressed by this capillary action, the recording material is effectively held and a fixed amount is supplied, and the heat from the heating element can be efficiently transmitted,
The vaporization efficiency can be improved, and high-quality recording can be obtained with a constant vaporization amount by the constant supply of the recording material.

Since the heating element is provided on the upper part of the capillary structure, the escape of heat is suppressed and the heating efficiency is improved (when the heat still escapes, this residual heat is utilized for liquefying the dye or the recording medium. Can also be used as a heat source for fixing the recording material by reducing the fixing energy, and the cost can be reduced by reducing the cooling fin and the like.

Further, since the heating means for the recording material is a recording apparatus which is composed of a heating element arranged in the surface area of the recording material in the recording material accommodation portion and has a passage hole for the recording material, Improved heating efficiency, improved transfer efficiency and high-speed response,
In addition to cost reduction, the recording material can be vaporized or ablated at high speed and high efficiency through the passage hole of the recording material, and at the same time, in the passage hole of the recording material without providing the porous structure as described above. The recording material is retained and further supplied, preventing escape due to the difference in surface tension of the recording material between the high temperature portion of the heating element and the surroundings, and effective heat transfer and vaporization can be performed, and The structure of the vaporizing section can also be simplified.

The contact hole between the heating element and the recording material can be increased by the passage hole of the recording material, the heat transfer efficiency can be improved, and bumping is less likely to occur, so that stable vaporization can be performed. Further, the heat generating element has a small heat capacity due to the above-mentioned passage holes and a rapid heat transfer, so that a thermal transient (thermal responsiveness) is improved. Such a heating element can be easily manufactured by the lithography used in the semiconductor manufacturing process.

Since the recording apparatus of the present invention is of the thermal transfer type in which the recording material is heated and transferred to the recording medium, the above-mentioned miniaturization, ease of maintenance, immediacy, high image quality, and high image quality are achieved. It has features such as tonality.

[Brief description of drawings]

FIG. 1 is a plan view of a main part of a printer head according to a first embodiment of the present invention.

FIG. 2 is a sectional view taken along line II-II in FIG.

FIG. 3 is a schematic plan view of the entire printer head.

4 is a sectional view taken along line IV-IV in FIG.

FIG. 5 is a cross-sectional view showing a step in the manufacturing process of the main part of the printer head.

FIG. 6 is a cross-sectional view showing another stage of the manufacturing process.

FIG. 7 is a cross-sectional view showing another stage of the manufacturing process.

FIG. 8 is a cross-sectional view showing another stage of the manufacturing process.

FIG. 9 is a cross-sectional view showing another stage of the manufacturing process.

FIG. 10 is a cross-sectional view showing another stage of the manufacturing process.

FIG. 11 is a cross-sectional view showing another stage of the manufacturing process.

FIG. 12 is a cross-sectional view showing another stage of the manufacturing process (FIG.
XII-XII line sectional view).

FIG. 13 is a schematic perspective view of a printer having the printer head.

FIG. 14 is a schematic perspective view of another printer having the printer head.

FIG. 15 is a plan view of a main part of a printer head according to a second embodiment of the present invention.

16 is a sectional view taken along line XVI-XVI of FIG.

FIG. 17 is a plan view of a main part of a printer head according to a third embodiment of the present invention.

FIG. 18 is an enlarged cross-sectional view of a part of the main part of the printer head.

FIG. 19 is a plan view of a main part of a printer head according to a fourth embodiment of the present invention.

20 is a sectional view taken along the line XX-XX of FIG. 19.

FIG. 21 is a plan view of a main part of a printer head according to a fifth embodiment of the present invention.

22 is a sectional view taken along line XXII-XXII in FIG. 21.

FIG. 23 is a schematic plan view of the entire printer head.

FIG. 24 is a perspective view of a main part of a printer head according to a sixth embodiment of the present invention.

FIG. 25 is a plan view showing various heating elements of the printer head.

26 is a sectional view taken along line XXVI-XXVI of FIG. 24.

FIG. 27 is a cross-sectional view showing a step in the manufacturing process of the main parts of the printer head.

FIG. 28 is a cross-sectional view showing another stage of the manufacturing process.

FIG. 29 is a cross-sectional view showing another stage of the manufacturing process.

FIG. 30 is a cross-sectional view showing another stage of the manufacturing process.

FIG. 31 is a cross-sectional view showing yet another stage in the manufacturing process.

FIG. 32 is a perspective view of a main part of a printer head according to a seventh embodiment of the present invention.

FIG. 33 is a sectional view of a main part of a printer head according to an eighth embodiment of the present invention.

FIG. 34 is a cross-sectional view showing a step in the manufacturing process of the main parts of the printer head according to the ninth embodiment of the present invention.

FIG. 35 is a cross-sectional view showing another stage of the same manufacturing process.

FIG. 36 is a cross-sectional view showing yet another stage in the manufacturing process.

FIG. 37 is a sectional view of a main part of a printer head according to a tenth embodiment of the present invention.

FIG. 38 is a front view of relevant parts of a printer using a conventional thermal recording head.

FIG. 39 is a cross-sectional view of a main part of another conventional printer.

FIG. 40 is a similar cross-sectional view showing a situation when the printer is operating.

FIG. 41 is a schematic cross-sectional view of a printer devised before the completion of the present invention.

FIG. 42 is an exploded perspective view of the head of the printer.

FIG. 43 is an exploded perspective view of a head of the other printer.

FIG. 44 is a schematic cross-sectional view (cross-sectional view taken along line XXXXIV-XXXXIV in FIG. 45) of the printer filed before the invention of the present invention.

FIG. 45 is a perspective view of a part of the head of the printer.

FIG. 46 is a perspective view of another part of the head of the printer.

FIG. 47 is a plan view of a part of the head of the printer.

FIG. 48 is an explanatory diagram showing a dye escape phenomenon.

FIG. 49 is a schematic sectional view of a part of the printing paper.

[Explanation of symbols]

22 ... Liquefied dye 32 ... Vaporized dye 41, 41A ... Dye tank (main body) 50 ... Printing paper 64, 64 '... Dye introduction part or dye drawing path 70, 170 ... Printer Heads 73, 73 '... Substrate or SiO ₂ layer 75, 175 ... Heating element 77 ... Vaporizers 80, 130, 140, 190 ... Columns or walls 81 ... Protective layer 82 , 83, 192 ・ ・ ・ Voids 84, 85, 84 ', 85' ・ ・ ・ Electrodes or wiring 86 ・ ・ ・ Insulation layer 87 ・ ・ ・ Dye accommodating section 97 ・ ・ ・ Liquid stop layer 100 ・ ・ ・ Printer 110 ・.. Porous material 120 ・ ・ ・ Check valve mechanism 121 ・ ・ ・ Ball valve 150 ・ ・ ・ Through hole 172 ・ ・ ・ Insulating layer 173 ・ ・ ・ Etching stop layer 175 A ・ ・ ・ Heater part

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁶ Identification number Internal reference number FI Technical indication location 7416-2H B41M 5/26 101 Z (72) Inventor Kenji Shinozaki 6-7 Kitashinagawa, Shinagawa-ku, Tokyo No. 35 Sony Corporation (72) Inventor Toshimasa Kobayashi 6-735 Kita-Shinagawa, Shinagawa-ku, Tokyo Inside Sony Corporation

Claims (28)

[Claims] 1. A recording material accommodating portion facing a recording material and a heating means for heating the recording material in the recording material accommodating portion to transfer the recording material to the recording material. Recording apparatus comprising a heating element arranged in the surface area of the recording material in the recording material accommodation portion, and having a porous structure for holding and supplying the recording material at a position deeper than the heating element . 2. The heating element is in contact with or at least partially immersed below the surface of the recording material.
The recording device described in 1. 3. The recording apparatus according to claim 1, wherein the heating element is arranged so as to extend over the recording material accommodating portion. 4. The recording apparatus according to claim 1, wherein the specific resistance of the heating element changes in the thickness direction or the surface direction. 5. The recording device according to claim 1, wherein the heating elements are arranged in the same pattern as the porous structure. 6. The recording apparatus according to claim 1, wherein the heating element is in contact with the porous structure. 7. The recording apparatus according to claim 1, wherein the heating element and the porous structure are arranged with a predetermined distance therebetween. 8. A heating element generates heat when energized, and the heat causes the recording material to vaporize or ablate, and the recording material fly to a recording medium that is arranged opposite to the recording material in a non-contact state. The recording apparatus described in any one of 1. 9. A plurality of heating elements are provided, each of which is configured to heat a recording material, and a heating element selected from the plurality of heating elements is used for vaporization or ablation of the recording material. 9. The recording apparatus according to claim 8, wherein the non-selected heating element is used for keeping heat or liquefying the recording material while being heated. 10. The recording device according to claim 1, wherein the porous structure is formed of a columnar body or a wall-shaped body. 11. The recording apparatus according to claim 1, wherein the porous structure is formed of a highly heat-conductive porous body. 12. The recording device according to claim 1, wherein the porous structure is made of a glass material, a polymer material or a metal material. 13. The recording apparatus according to claim 1, wherein the support that supports the heating element is made of a polymer material. 14. The recording apparatus according to claim 1, wherein a recording material backflow prevention mechanism is provided in a recording material supply passage to the recording material container. 15. A recording material accommodating portion facing a recording material, and a heating means for heating the recording material in the recording material accommodating portion and transferring the recording material to the recording material. A recording apparatus comprising a heating element disposed in a surface area of the recording material in a recording material accommodation portion and having a passage hole for the recording material. 16. The heating element is in contact with or at least partially immersed under the surface of the recording material.
The recording device described in 1. 17. The recording apparatus according to claim 15, wherein the heating element is arranged so as to extend over the recording material container. 18. The heating element generates heat when energized, and the heat causes the recording material to vaporize or ablate through the passage hole, and to fly to the recording material that is arranged opposite to the recording material in a non-contact state. The recording device according to any one of claims 15 to 17. 19. A plurality of heating elements are arranged, each of which is configured to heat a recording material, and a selected heating element of the plurality of heating elements is used for vaporization or ablation of the recording material. 19. The recording apparatus according to claim 18, wherein the heating element which is not selected is used for keeping heat or liquefying the recording material while being heated. 20. The recording apparatus according to claim 15, wherein the recording material passage holes of the heating element serve to hold and supply the recording material. 21. The size or distribution of the passage holes of the recording material of the heating element changes in the thickness direction or the surface direction of the heating element, or the specific resistance of the heating element changes in the thickness direction or the surface direction. The recording apparatus according to any one of claims 15 to 20, which is present. 22. The recording device according to claim 15, wherein the porous structure according to any one of claims 1 to 14 is provided at a position deeper than a heating element. . 23. The low heat conductive layer is provided between the heat generating element and the support, or the low heat conductive layer is provided between the heat generating element and the support. Recording device described. 24. The recording apparatus according to claim 15, wherein a recording material backflow prevention mechanism is provided in a recording material supply passage to the recording material container. 25. When manufacturing the recording device according to claim 1, a step of forming a heating element by processing a heating element material into a predetermined pattern by lithography at a position of the recording material accommodation portion. A method of manufacturing a recording apparatus, comprising: 26. A heating element material is deposited at the position of the recording material accommodation portion, the heating element material is processed into a predetermined pattern by lithography, and electrodes are formed at both ends of the heating element formed by the patterning. 15. The method for manufacturing a recording device according to claim 1, wherein the heating element is used as a mask to etch a layer directly below the heating element in the same pattern to form a porous structure. 27. After depositing a heating element material on a support, the heating element material is processed into a predetermined pattern by lithography, and a portion of the support is removed immediately below the heating element formed by this. 25. The method for manufacturing a recording apparatus according to claim 15, wherein the recording material accommodating portion is formed. 28. The method of manufacturing a recording device according to claim 27, wherein an etching stop layer is formed between the support and the heating element material.