JPH089164Y2 - Vapor deposition equipment - Google Patents

Description

[Detailed description of the device]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vapor deposition apparatus suitable for use in forming an antireflection film on a spectacle lens.

[0002]

2. Description of the Related Art Conventionally, an antireflection film is provided on the surface of a spectacle lens to reduce reflectance and increase transmitted light, and to remove various obstacles due to reflected light such as contrast reduction due to flare and ghost. Has been done. Magnesium fluoride is usually used as a material for the antireflection film, but recently, in order to further enhance the antireflection effect, a multilayer antireflection film in which different substances are stacked in three to four layers is applied. The most common method of applying such an antireflection film is a vacuum vapor deposition method in which a vapor deposition material is heated and vaporized by a resistance heating method in a vacuum chamber, and the vapor is formed into a transparent thin film on the lens surface (example : “Glasses”, P75, Medical Aoi Publishing Co., Ltd., issued May 22, 1986). in this case,
Impurities are likely to be mixed in when the evaporation material is heated and evaporated many times. The reproducibility is poor because the refractive index changes between the once melted material and the unmelted material. However, there is a problem that the evaporation direction of the evaporated particles is easily disturbed and a non-uniform film is easily formed. Therefore, as a method for solving such a problem, for example, the method disclosed in Japanese Patent Laid-Open No. 61-18346 is known. This is configured such that a plurality of vapor deposition substances are housed and arranged on the upper surface of an evaporation crucible that is intermittently rotated, and the vapor deposition substance is changed by rotating the crucible for each film formation.

[0003]

However, in such a conventional vapor deposition apparatus, since the number of film formations is determined by the number of storage recesses formed in the evaporation crucible and storing the vapor deposition material, a large number of film formations are continuously performed. When forming a lens, the vacuum crucible must be broken and replaced each time the evaporation crucible is replaced, and then the vacuum must be evacuated again to a predetermined vacuum level, which is inefficient and poor in productivity. There was a problem.
In addition, since the inside is contaminated each time the vacuum chamber is opened, there is a problem that the number of cleanings increases.

Therefore, the present invention has been made in view of the above-mentioned conventional problems, and an object thereof is to enable continuous exchange of a vapor deposition material without opening a vacuum chamber, thereby improving productivity. It is an object of the present invention to provide a vapor deposition apparatus capable of improving the cleaning efficiency and reducing the number of cleanings.

[0005]

[Means for Solving the Problems] To achieve the above object
The present invention is provided in a vacuum chamber and stores a plurality of vapor deposition materials.
Adjacent to the mounting table on which the hearth
Connected to the vacuum chamber and the first opening that is provided to communicate with the outside.
A hearth exchange chamber having a second opening therethrough;
It is located near the opening and can be raised and lowered freely in the hearth exchange chamber.
The two hearths are arranged so that they can be freely rotated.
The exchange table and the hearth on the hearth exchange table
Transport to the hearth lifting position provided corresponding to the opening
1 hearth transfer means and can be moved up and down to the hearth lifting position
The second opening is installed when the hearth is attached or replaced.
2nd delivery of hearth in the vacuum chamber and transfer to the receiving position
Of the hearth transfer means and the hearth provided in the vacuum chamber.
The second hearth carrier who has been delivered to the receiving position
Grasp the hearth on the steps and hand it over to the stand.
All stored in the hearth placed on the table
When the vacuum vapor deposition with all vapor deposition materials is completed, the hearth
The third hearth holding means and returning it to the second hearth transfer means.
The transport means and the first and second openings, respectively.
A first and a second opening / closing door to be closed.
I do. Also, in the present invention, a third hearth carrying means
Is a hand that holds the hearth and can be opened and closed.
Opening and closing mechanism to open and close the hand and the hand in the horizontal plane
And a swivel drive mechanism for swiveling.
Further, in the present invention, the mounting table is stored in the hearth.
The evaporation source is heated by the driving source each time the evaporation material is heated.
It is rotated intermittently and can move up and down near the mounting table.
Rises when receiving the hearth from the third hearth carrier,
By lowering after receiving, the hearth is placed on the stand described above.
It is characterized by having a hearth receiving mechanism to be placed
It Furthermore, the present invention presses the hearth against the mounting table,
A pressing mechanism that matches the center of the
It is characterized by being prepared.

[0006]

In the present invention, the first opening / closing door is opened, the hearth is installed on the hearth exchange table in the hearth exchange chamber, and the hearth exchange chamber is evacuated. When the degree of vacuum in the hearth exchange chamber becomes substantially the same as that in the vacuum chamber, the first hearth transfer means transfers the hearth on the hearth exchange table to the hearth lifting position and transfers it to the second hearth transfer means. When the second hearth transfer means receives the hearth, it moves up and transfers the hearth to the receiving and receiving positions of the hearth in the vacuum chamber. At this time, the second opening / closing door opens to connect the vacuum chamber and the hearth exchange chamber. When the hearth is delivered and transferred to the receiving position, the third hearth carrying means holds the hearth and places it on the placing table. At this time, the opening / closing mechanism of the third hearth conveying means closes the hand for grasping the hearth. The swivel drive mechanism swivels the hand in the horizontal plane to transfer the hearth and reciprocate between the receiving position and the mounting table. The hearth receiving mechanism receives the hearth from the third hearth conveying means, descends, and transfers the hearth to the mounting table. The pressing mechanism presses the hearth against the mounting table so that the hearth is in close contact with the mounting table, and the center of the hearth is aligned with the rotation center of the mounting table. The mounting table is rotated intermittently every time one film formation is completed to change the deposition material. When the vapor deposition with all the vapor deposition substances stored in the hearth is completed, the hearth is returned to the hearth exchange table through the third hearth transport means-the second hearth transport means-the first hearth transport means. The hearth returned to the hearth exchange table is taken out to the outside by opening the first opening / closing door and is exchanged for a new hearth. By repeating such operations, wearing the hearth without breaking the vacuum of the vacuum chamber,
Exchange will take place.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail with reference to the embodiments shown in the drawings. 1 is a perspective view showing a schematic structure of a main part of a vapor deposition device according to the present invention, FIG. 2 is a cross-sectional view of the main part of the device, FIG. 3 is a plan view of the main part of the device, and FIG. 4 is a cross-sectional view of the device. , Fig. 5
Is a vertical cross-sectional view showing the configuration of the third hearth transfer means, FIG. 6 is a plan view of the transfer means, FIG. 7 is a cross-sectional view of the mounting table, and FIG. 8 is a partially cutaway side view of the holding mechanism. In the present invention, each of the two mounting tables and the hearth exchange chamber are provided so that the hearths can be mounted on both mounting tables at the same time or on one of them to form the antireflection film by the vapor deposition material. Here is an example.

1 to 4, the vapor deposition apparatus 1 is provided with a vapor deposition chamber 2 and a base plate 3 that hermetically closes a lower end opening of the vapor deposition chamber 2, and a vacuum chamber 4 is formed by these and a vacuum pump (not shown) is provided. It is connected to the.
The vacuum chamber 4 is maintained at a vacuum degree of about 10 ⁻⁶ Torr. Below the inside of the vacuum chamber 4, there are two hearth exchange chambers 5A and 5B, resistance heating evaporation sources 6A and 6B, and a third heat exchange chamber.
While the hearth transfer means 7A, 7B, the mounting tables 8A, 8B and the holding mechanisms 9A, 9B (9B are not shown) are disposed, a large number (70 to 100 pieces) to be coated with an antireflection film is provided above the inside. The lens dome 11 having the spectacle lens 10) is mounted on the surface of the rotary table 12 so as to be rotatably held.

Next, details of each part of the vapor deposition apparatus 1 having the above-mentioned structure will be described. Hearth exchange room 5A (5B
Is also provided below the base plate 3 and adjacent to the vacuum chamber 4, and has a first opening 14 communicating with the outside and a second opening 15 communicating with the vacuum chamber 4, A hearth exchange table 16 near the first opening 14,
The second hearth transfer means 18 is disposed below the second opening 15 and the first hearth transfer means 17 located between the hearth exchange table 16 and the second hearth transfer means 18 are arranged. First and second opening / closing doors 19 and 20 for airtightly opening and closing the openings 14 and 15 are provided. The first, second and third hearth transfer means 17, 18, 7
A constitutes a conveying device for the hearth 22. One side edge of the first opening / closing door 19 is pivotally attached to the first opening 14 so that the first opening / closing door 19 can be opened / closed by an operator when the hearth 22 is inserted or taken out. Second opening / closing door 20
Is a gate valve and is opened / closed by a cylinder 23 provided outside the hearth exchange chamber 5A. The second opening 15 is hermetically closed except when the hearth 22 is attached or replaced, and the vacuum chamber 4 and the hearth are closed. The exchange room 5A is shut off. When the hearth 22 is inserted, the hearth exchange chamber 5A is configured to be evacuated to a vacuum degree similar to that of the vacuum tank 4 by the vacuum pump 24 independently of the vacuum tank 4.

As shown in FIGS. 6 and 7, the hearth 22 is formed of a metal such as copper into a disk shape having an appropriate plate thickness, and a plurality of, for example, eight storage recesses 30 are provided near the outer periphery of the upper surface thereof. It is recessed to accommodate a vapor deposition material 31 such as magnesium fluoride, and a fitting hole 32 is formed at the center thereof.

1 to 3, the hearth exchange table 1 is shown.
Reference numeral 6 denotes an upper table 31 formed in an oval shape having a lateral width smaller than the diameter of the hearth 22 and having a size on which the two hearths 22 can be placed, and a lower table 32 closely fixed to the lower surface of the upper table 31. And a groove 37 is formed between the joint surfaces of the tables 31 and 32. A cooling medium 39 for cooling the hearth 22 is circulated and supplied to the groove 37 by a cooling pipe 38 described later. A hollow rotary shaft 40 is vertically provided integrally with the lower table 32 at the center of the lower surface thereof.
Is rotatably rotatably supported by a bearing device 41, and a lower end portion of the hearth exchange chamber 5A projects downward from an insertion hole formed in a bottom plate 42 via a Wilson seal 43.
The bearing device 41 is disposed between the bearing receiver 44 and the rotary shaft 40. The bearing receiver 44 is fitted to the outer periphery of the rotary shaft 40 above the bottom plate 42 with its axial movement restricted. And a radial bearing and a thrust bearing 45,
It is configured to be raised and lowered by 6. The elevating mechanism 46 includes a cylinder 47 provided on the lower surface of the bottom plate 42.
A movable plate 48 that is vertically moved by the cylinder 47, and a plurality of rods 49 that are erected on the movable plate 48. The rods 49 seal the insertion hole provided in the bottom plate 42 with a seal member ( (Not shown), it penetrates in an airtight manner, projects into the hearth exchange chamber 5A, and is connected to the lower surface of the flange portion of the bearing receiver 44. Therefore, when the movable plate 48 is moved up and down by the cylinder 47, the bearing device 41 moves up and down together with the rod 49, and thus the hearth exchange table 16 also moves up and down. The hearth exchange table 16 is stopped at the upper position when the hearth 22 is inserted from the outside, and the first hearth transfer means 17 is provided.
When delivering the hearth 22 to the first hearth transport means 1
It is lowered to a position slightly lower than 7. The hearth exchange table 16 is further configured to be rotated by a drive motor 50. The drive motor 50 is the bottom plate 40.
By transmitting rotation to the rotary shaft 40 via a plurality of gears 51 disposed below the rotary shaft 40, the rotary shaft 40 is moved in the longitudinal direction of the hearth exchange chamber 5A when the hearth 22 is inserted and taken out. Rotate 180 ° to match the longitudinal direction. When inserting the hearth 22, the first opening / closing door 1
9 is opened, and the hearth 22 is placed on the front-side end portion of the top surface of the hearth exchange table 16. Then, when the hearth 22 is placed, the drive motor 50 is driven to rotate the hearth exchange table 16 by half, and the end portion on which the hearth 22 is placed is moved to the hearth exchange chamber 5
After that, the cylinder 47 is actuated to transfer the hearth 22 to the first hearth transfer means 17 and lowers the hearth exchange table 16 to a position slightly lower than the first hearth transfer means 17.

The cooling pipe 38 is inserted and arranged inside the rotary shaft 40 with a proper gap, and the upper end thereof communicates with the groove 37 formed inside the hearth exchange table 16 and the lower end thereof. It communicates with a cooling water inlet 55 provided at the lower end of the rotary shaft 40. The cooling water 39 supplied from the cooling water inlet 55 is guided to the groove 37 through the internal passage of the cooling pipe 38 to cool the hearth exchange table 16, and between the cooling pipe 38 and the rotary shaft 40. The water is discharged from a cooling water outlet 56 provided at the lower end of the rotating shaft 40 through the provided annular passage.

In FIGS. 1 and 2, the first hearth conveying means 17 is an endless conveyor belt 60 for conveying the hearth 22, a pulley 61 having both ends of the conveyor belt 60 stretched, and a hearth exchange chamber. It is composed of a drive motor 62 disposed below 5A and capable of rotating in the forward and reverse directions, and a gear transmission mechanism 63 for transmitting the rotation of the drive motor 62 to the conveyor belt 60. The front end of the conveyor belt 60 is located on both sides of the back side end of the hearth exchange table 16, and the rear end thereof is provided in the back of the hearth exchange chamber 5A so as to correspond to the second opening 15. It is located at position 59. As described above, the end portion of the table on which the hearth 22 is placed is located at the back by the half-rotation operation of the hearth exchange table 16, and the hearth exchange table 16 is the first hearth transporting means 17.
When lowered to a lower position, the hearth 22 is placed on the front end of the upper surface of the conveyor belt 60. Then, in this state, the drive motor 62 is driven in the forward direction, and the rotation thereof causes the transport belt 60 to rotate in the forward direction via the gear transmission mechanism 63, so that the hearth 22 is transported to the hearth raising / lowering position 59 and is moved to the second position. It is handed over to the hearth carrier 18 of.

The second hearth conveying means 18 is normally lifted between the rear end portions of the pair of conveyor belts 60 at a position slightly lower than or substantially at the same height.
0 and the lift table 7 disposed below the hearth exchange chamber 5A.
And a hydraulic cylinder 71 for raising and lowering 0. Then, when the hearth 22 is conveyed to the hearth elevating position 59 by the first hearth conveying means 17, the elevating table 70
Is lifted by driving the hydraulic cylinder 71 to receive the hearth 22 on the conveyor belt 60, and the second opening / closing door 20 is opened to be provided above the second opening 15 in the vacuum chamber 4. The hearth is delivered and conveyed to the receiving position 78. In addition, the second hearth transfer means 18 moves up to enter the vacuum chamber 4 so as to receive the hearth 22 even when the vapor deposition of the vapor deposition material 31 in the vacuum chamber 4 is completed.

Next, the structure of the third hearth transfer means 7A will be described in detail with reference to FIGS. 3, 5 and 6. The third hearth carrying means 7A is located in the vicinity of the second opening 15 and is disposed in the vacuum chamber 4, and
Receiving the hearth 22 from the hearth transporting means 18 and delivering it to the mounting table 8A, or returning the hearth 22 on the mounting table 8A to the second hearth transporting means 18.
A pair of left and right hands 81A, 81B for gripping 2 from both sides
And an opening / closing mechanism 82 for opening / closing these hands 81A, 81B, and a turning drive mechanism 84 for turning the hands 81A, 81B in a horizontal plane about a turning shaft 83 for turning. The hands 81A, 81B
Bases of which are formed in a straight line and face each other in parallel with each other, and the tips are bent outward to set a wide interval, and the opposite side surface, that is, the inner side surface is concave with a radius of curvature substantially the same as that of the hearth 22. A curved surface is formed, and the concave curved surface portion 85 is a gripping surface that is in close contact with and grips the outer peripheral surface of the hearth 22.

Opening / closing mechanism 82 for the hands 81A, 81B
Are a drive motor 88 fixed to the outer peripheral surface of the lower end portion of the turning rotary shaft 83 and rotatable forward and backward, and an opening / closing rotary shaft 95 to which the rotation of the drive motor 88 is decelerated and transmitted via gears 89 and 90. , A pair of racks 91A, 91B and a pinion 92 for converting the rotation of the opening / closing rotary shaft 95 into a linear motion to open / close the hands 81A, 81B, and the hand 8
A pair of guide rails 93 for guiding and holding 1A and 81B
It is composed of A, 93B and the like. The rotating shaft 95 for opening and closing
Are provided so as to coaxially pass through the central hole 96 of the rotating shaft 83 for turning, and the upper and lower ends thereof are the bearing device 98 and the bearing 99.
It is rotatably supported by. Opening / closing rotary shaft 95
The gear 90 is attached to the lower end portion of the lower end of the rotary shaft 83 for rotation, and the pinion 92 that meshes with the pair of racks 91A and 91B is fixed to the upper end thereof.

The pair of racks 91A, 91B are arranged on the inner side surfaces of the bases of the hands 81A, 81B so as to be orthogonal to them and to face each other with a pinion 92 interposed therebetween.
One end of one rack 91A is fixed to the hand 81A, one end of the other rack 91B is fixed to the other hand 81B, and the other end is fixed to the rack pressing plate 100. Therefore, when the pinion 82 rotates in the forward direction (clockwise direction in FIG. 5) together with the opening / closing rotary shaft 95 as the drive motor 88 is driven, the rack 91A moves to the right in FIG. 6 and the rack 91B moves to the left. , Hand 81
A and 81B can be opened, and conversely, when the pinion 82 rotates counterclockwise, the hands 81A and 81B can be closed, thereby enabling the hearth 22 to be gripped. The rack pressing plate 100 is arranged on the rail base 101 together with the pair of guide rails 93A and 93B. The pair of guide rails 93A, 9
3B are arranged so as to face each other in parallel with the pinion 92 sandwiched therebetween and orthogonal to the hands 81A and 81B, and V-shaped guide grooves 103 are formed on both side surfaces thereof. Bearings 104A and 104B, which slide along the guide rails 93A and 93B, are fixed to the lower surfaces of the bases of the hands 81A and 81B, respectively. Fitting grooves 105, into which the upper ends of the guide rails 93A and 93B can be fitted, are formed in the centers of the lower surfaces of the bearings 104A and 104B, respectively.

The turning drive mechanism 84 of the hands 81A and 81B has the bearing device 1 in the hole 107 of the base plate 3.
The rotary shaft 83 for swiveling that is disposed through the through shaft 08 is provided, and a flange 109 is provided on the outer peripheral surface of the upper end portion of the rotary shaft 83.
Are integrally provided, and the rail base 101 is installed thereon via a connecting member 110. The bearing device 108 has an O-ring 11 in the hole 107 of the base plate 3.
2 and a ring-shaped plate 111 fitted via 2 and fixed by a bolt 113, and the ring-shaped plate 11 fitted onto the turning rotary shaft 83 via an O-ring 114.
And a cylindrical body 115 fitted and fixed in the center hole of the cylindrical body 1.
The radial bearings 116A, 116B and the thrust bearing 117, which are disposed in the rotary shaft 83 and rotatably support the rotary shaft 83, and the nut 118 screwed onto the outer circumference of the rotary shaft 83. Further, the bearing device 98 that rotatably supports the opening / closing rotary shaft 95 is disposed in the upper end opening of the rotary shaft 83. The bearing device 98 includes a lid member 123 fitted and fixed to an upper end opening of the rotary shaft 83 via an O-ring, and a pair of fitting members arranged in the lid member 123 to rotatably support the rotary shaft 95. Radial bearing 125, lid member 123 and rotary shaft 9
It is composed of a Wilson seal 126 or the like for vacuum-sealing the gap 5. A gear 130 and a rotation position sensor 134 for detecting the rotation angle of the rotation shaft 83 are attached to the outer peripheral surface of the intermediate portion of the rotation shaft 83.
30 is meshed with a drive gear 133 attached to the output shaft 132 of the drive motor 131. Drive motor 13
Reference numeral 1 is rotatable forward and backward and is disposed on the lower surface of the base plate 3 via a bracket (not shown).

The third hearth transfer means 7A having the above-described structure normally waits with the hands 81A and 81B open at the hearth delivery / reception position 78. During the receiving operation of the hearth 22 by the third hearth transfer means 7A, when the lifting table 70 (FIG. 1) of the second hearth transfer means 18 moves upward to insert the hearth 22 into the vacuum chamber 4, the drive motor is driven. 88 drives and closes the hands 81A and 81B, and holds the hearth 22. Hand 81A, 81
When the hearth 22 is securely gripped by B, the drive motor 88 is stopped and at the same time the drive motor 131 is driven. Then, the rotation of the drive motor 131 causes the rotation of the gear 130,
Since it is transmitted to the rotary shaft 83 for rotation via 133, the rail base 101 on which the hands 81A and 81B are installed is integrally rotated with the rotary shaft 83, and the hearth 22 is conveyed above the mounting table 8A. It can be stopped. When the drive motor 88 is driven in the opposite direction to the above,
Hands 81A and 81B opened, holding the hearth 22
To the mounting table 8A side.

Next, the structure of the mounting table 8A will be described in detail with reference to FIG. 7. The mounting table 8A includes an upper plate 140 and an O-ring 142 on the lower surface of the upper plate 140.
And a lower plate 141 that is intimately connected via a bolt and is integrally coupled and fixed by a bolt (not shown). The lower plate 141 is mounted on the upper surface of the hearth rotary shaft 143 through an O-ring 144 and fixed by a bolt 145. Has been done. The cooling water 146 is circulated and supplied between the joining surfaces of the upper and lower plates 140 and 141 to cool the hearth 22 on the mounting table 8A and prevent thermal deformation during heating and melting of the vapor deposition material 31. A groove 147 is provided.

The hearth rotary shaft 143 is formed in a hollow shape and penetrates the shaft hole 148 of the base plate 3 so that the lower end portion thereof projects below the vacuum chamber 4 and the bearing device 14
It is rotatably supported by a shaft 9. The bearing device 1
Reference numeral 49 denotes a disk-shaped plate 152 fitted into the shaft hole 148 of the base plate 3 from below through an O-ring 150 and fixed by a bolt 151, and an O-ring 154 on the outer circumference of the hearth rotary shaft 143. A bearing holding cylinder 153 fitted and fixed in the center hole of the plate 152, and a radial bearing interposed between the hearth rotating shaft 143 and the bearing holding cylinder 153 to rotatably support the hearth rotating shaft 143. 155 and a thrust bearing 156, and a nut member 158 for preventing the radial bearing 155 from coming off. A cooling pipe 160 is inserted and arranged in a center hole of the hearth rotary shaft 143, an upper end opening thereof communicates with a cooling groove 147 of the mounting table 8A, and a lower end thereof is the hearth rotary shaft 14.
3 is in communication with a cooling water inlet 162 provided at the lower end portion. Cooling water 146 supplied from this cooling water inlet 162
Is the cooling water groove 1 through the internal passage of the cooling pipe 160.
47 to cool the hearth 22, and the hearth rotating shaft 14
The annular passage 1 formed between the inner peripheral surface of the cooling pipe 3 and the cooling pipe 160.
After passing through 63, it is discharged from a cooling water outlet 164 provided at the lower end of the hearth rotating shaft 143.

Below the base plate 3, each time the vapor deposition of the vapor deposition material 31 is completed, the hearth rotary shaft 1 is rotated.
Drive motor 1 for intermittently rotating 43 by 1/8 rotation
67 is provided, and the rotation of the motor 167 is transmitted to the hearth rotating shaft 143 via gears 168 and 169. Further, a known rotational position sensor 170 for detecting the rotational angle of the rotary shaft 143 is attached to the lower end of the hearth rotary shaft 143.

A hearth receiving mechanism 171 for receiving the hearth 22 from the third hearth transfer means 7A and mounting it on the mounting table 8A is arranged around the mounting table 8A. The hearth receiving mechanism 171 includes three hearth receiving rods 174 that vertically pass through the base plate 3 via a bearing member 172 and a Wilson seal 173.
A motor 175, a pinion 176 for converting the rotation of the motor 175 into vertical movement of the rod 174, a rack 177, and the like. The three hearth receiving rods 174 are erected on a movable ring 178 arranged below the base plate 3 at equal intervals in the circumferential direction. The movable ring 178 has the pinion 17 mounted thereon.
A rack 177 that meshes with the 6 is attached. Also,
A fixed ring 179 is disposed below the movable ring 178. The fixed ring 179 is attached to the bracket 18
It is attached to the lower surface of the base plate 3 through 0. The fixed ring 179 is provided with a plurality of, for example, three ring support rods 181 via a bearing 182 so as to be vertically movable, and the upper end thereof is connected to the movable ring 178. Therefore, when the rotation of the motor 175 is transmitted through the pinion 176 and the rack 177, the ring support member 81 moves up and down along the bearing 182, so that the three hearth receiving rods 1
74 moves up and down together with the movable ring 178,
When receiving the hearth 22 from the hearth transporting means 7A, the third hearth transporting means 7 is placed at a position higher than the mounting table 8A.
Ascending to the same height as A, the hearth 22 held by the third hearth conveying means 7A is received from below and supported at three points. When the holding of the hearth 22 by the hands 81A and 81B is released in this state, the hearth 22 is placed on the hearth receiving rod 174, and then the motor 175 is placed.
When the hearth receiving rod 174 is lowered by driving the
It is mounted on the mounting table 8A. And this hearth 2
2 is pressed from above by the pressing mechanism 9A, so that it is brought into close contact with the mounting table 8A, and the center is aligned with the center of the mounting table 8A.

As shown in FIG. 8, the holding mechanism 9A has a shaft 190 that hermetically penetrates a through hole (not shown) provided in the base plate 3 and a shaft 190 that is arranged below the base plate 3 to move the shaft 190 up and down. Drive source 1 such as hydraulic cylinder
91, and a holding rod 194 having a pressing member 193 for pressing the hearth 22 at its tip is attached to the upper end of the shaft 190 via a presser holder 195. The pressing member 193 is a cylindrical main body 196, a presser 200 is rotatably disposed in the center hole of the main body 196 via radial bearings 197 and 198 and a thrust bearing 199, and is allowed to move slightly up and down. The mounting member 8A includes a nut member 201 screwed onto the upper end of the presser 200, a cover 202 that covers the upper end opening of the main body 196, and the like.
The center of the hearth 22 and the center of the hearth 22 are positioned above the center of the hearth and at a distance larger than the thickness of the hearth 22. Then, when the hearth 22 is placed on the placing table 8A, the presser 200 descends as the shaft 190 descends, and the center hole 3 of the hearth 22 moves.
Press 2. In this case, the lower end of the pusher 200 is formed in a disk shape slightly larger than the center hole 32, and has a tapered surface 203 on the outer peripheral portion of the lower surface thereof.
The center of the hearth 22 can be made to coincide with the center of the mounting table 8A by pressing against the opening edge of the upper end of the center hole 32. Therefore, such a holding mechanism 9
If A is used, the hearth 22 due to the intermittent rotation of the mounting table 8A
Can be prevented from being displaced, and since the hearth 22 is brought into close contact with the mounting table 8A, the cooling effect of the cooling water 146 on the hearth 22 can be improved.

When the hearth 22 is installed on the mounting table 8A in this manner, the antireflection film is formed on the surface of the spectacle lens by heating and melting the vapor deposition material 31 by the resistance heating source 6A (FIG. 1). Drive motor 167 when the film formation is completed
The mounting table 8A is intermittently rotated by the driving of (FIG. 7), and a new vapor deposition material 31 is heated and melted to continuously form a film. During this time, the next hearth 22 is set on the hearth exchange table 16 in the hearth exchange chamber 5A. And
All vapor deposition materials 31 contained in one hearth 22
Is used, it is exchanged with the next hearth 22 prepared in the hearth exchange chamber 5A. In the replacement, after the pressing state by the pressing mechanism 9A is released, the third hearth conveying means 7A is swung to grasp the hearth 22 on the mounting table 8A by the hands 81A and 81B, and the hearth delivery / reception position 78. Then, the second opening / closing door 20 is opened and the second hearth transfer means 18 is raised to enter the vacuum chamber 4 to the height position of the third hearth transfer means 7A. When the holding of the hearth 22 by the hands 81A and 81B is released, the hearth 22 is moved to the second hearth transporting means 1
When the second hearth transfer means 18 descends, the second hearth transfer means 18 moves down to return to the hearth exchange position 5A in the hearth exchange chamber 5A and is placed on the rear end of the upper surface of the transfer belt 60. When the hearth 22 is placed on the conveyor belt 60, the conveyor belt 60 travels in the direction opposite to that when the hearth 22 is inserted, so that the hearth 22 is replaced.
Transport to position 6 and stop. At this time, the hearth 22 to be inserted next is placed on the upper surface of the front end portion of the hearth exchange table 16. The second hearth exchange table 16 includes a conveyor belt 60.
Transports the hearth 22 to be returned and stops,
The conveyor belt 60 is lifted by a predetermined stroke to reach the back end.
Hearth 22 that should receive the upper hearth 22 and should be rotated in the latter half and returned to the front side
Position 2 on the back side. Then, the first opening / closing door 19 is opened, the hearth 22 to be returned is taken out, and the first opening / closing door 1
Close 9 After the first opening / closing door 19 is closed, the hearth exchange chamber 5A is evacuated by the vacuum pump 24 (FIG. 1), and when the vacuum degree reaches the same level as the vacuum chamber 4, the insertion / attachment operation of the hearth 22 is performed. Repeated again.

Thus, according to the vapor deposition apparatus 1 having the above-described structure, the vacuum chamber 4 is provided with the hearth exchange chamber 5A as a preliminary chamber, and the hearth 22 is exchanged therein. Since it is possible to replace the vapor deposition material 29 without breaking it, it is possible to improve productivity and reduce the number of cleanings. Further, since the hearth exchange chamber 5A has a smaller volume than the vacuum chamber 4 and can be evacuated in a short time, there is no fear of reducing productivity. Further, since the hearth 22 is pressed against the mounting table 8A by the pressing mechanism 9A so that the center thereof coincides with the center of the mounting table 8A, the hearth 22 may be displaced even if the mounting table 8A is intermittently rotated. Therefore, the distance between the vapor deposition material 31 and the heating source 6A can be kept constant. Therefore, the time required for film formation can be kept substantially constant.

In the above embodiment, the case where the two hearth exchange chambers 5A and 5B having the same structure and the mounting tables 8A and 8B are provided has been described, but the present invention is not limited to this. Of course, it may be one or two or more. Further, although the hearth exchange table 16 has a size capable of mounting two hearths 22, it may be one capable of mounting two or more hearths. In that case, the exchange table is a flat surface. It may be formed into a visual starfish type.

[0028]

As described above, in the vapor deposition apparatus according to the present invention, the hearth exchange chamber is provided, and the hearth is exchanged inside the vapor exchange chamber so that the hearth is inserted and mounted in the vacuum chamber.
A film can be formed without breaking the vacuum of the vacuum chamber, which can improve productivity and reduce the number of times the apparatus is cleaned. Also, the hearth is rotated intermittently to change the vapor deposition material after each film formation, so that the reproducibility of film formation is good and a uniform film thickness can be obtained. Is large.

[Brief description of drawings]

FIG. 1 is a perspective view showing a schematic configuration of a main part of a vapor deposition device according to the present invention.

FIG. 2 is a cross-sectional view of the main parts of the device.

FIG. 3 is a plan view of a main part of the apparatus.

FIG. 4 is a sectional view of the device.

FIG. 5 is a vertical cross-sectional view showing a configuration of a third hearth carrying means.

FIG. 6 is a plan view of the conveying means.

FIG. 7 is a sectional view of a mounting table.

FIG. 8 is a partially cutaway side view of the pressing mechanism.

[Explanation of symbols]

3 ... Base plate , 4 ... Vacuum tank , 5A , 5B ... Hearth exchange chamber , 6A, 6B ... Resistance heating source , 7A , 7B ... 3rd Hearth conveying means, 8A , 8B ... Mounting table , 9A ... Holding mechanism , 14 ... 1st opening , 15 ... 2nd opening , 16 ... Hearth exchange stand, 17 ... 1st hearth conveyance means , 18 ... 2nd hearth conveyance means , 19 ... 1st opening / closing door , 20 ... 2nd opening / closing Door , 22 ... Hearth , 31 ... Vapor deposition material , 59 ... Hearth raising / lowering position , 78 ... Hearth delivery , receiving position , 81A , 81B
... Hand , 82 ... Opening and closing mechanism , 84 ... Swiveling drive mechanism , 17
1 ... Hearth receiving mechanism .

Claims (4)

[Scope of utility model registration request] 1. A mounting table provided in a vacuum chamber, on which a hearth containing a plurality of vapor deposition substances is mounted, a first opening provided adjacent to the vacuum chamber and communicating with the outside, and the vacuum chamber. Haas and Haas exchange chamber having a second opening, said first plurality of hearth is located near the opening arranged freely movable up and down and rotated in the hearth exchange chamber is placed in communication with the An exchange table, first hearth transfer means for transferring the hearth on the hearth exchange table to a hearth elevating position provided corresponding to the second opening, and a hearth elevating position that is vertically movable. Second hearth transfer means for transferring to the hearth delivery / reception position in the vacuum chamber through the second opening at the time of mounting / replacement of hearth, and second hearth transfer means disposed in the vacuum chamber and transferred to the hearth delivery / reception position The second hearth on the second hearth transfer means When the vacuum vapor deposition by all the vapor deposition substances stored in the hearth placed on the placing table is completed by grasping the hearth, the second hearth transfer is performed. Third to return to means
And a first and second door for opening and closing the first and second openings, respectively. 2. The vapor deposition apparatus according to claim 1 , wherein the third
In the vapor deposition apparatus, the hearth transfer means includes an openable / closable hand for holding the hearth, an opening / closing mechanism for opening / closing the hand, and a turning drive mechanism for turning the hand in a horizontal plane. 3. The vapor deposition apparatus according to claim 1, wherein the mounting table heats the vapor deposition material housed in the hearth,
Every time vapor deposition is completed, it is rotated intermittently by the drive source,
Increases when receiving a hearth than the third hearth conveyor means is movable vertically in the vicinity of the mounting table, that has a hearth receiving mechanism for placing the hearth on the mounting table by lowering of receipt A vapor deposition device characterized by. 4. A vapor deposition device according to claim 1, 2 or 3, wherein pressing the mounting table hearth, vapor deposition apparatus characterized by are holding a pressing mechanism to match the rotation center of the mounting table and the center .