JPH0894827A - Production of color filter - Google Patents
Production of color filterInfo
- Publication number
- JPH0894827A JPH0894827A JP25757994A JP25757994A JPH0894827A JP H0894827 A JPH0894827 A JP H0894827A JP 25757994 A JP25757994 A JP 25757994A JP 25757994 A JP25757994 A JP 25757994A JP H0894827 A JPH0894827 A JP H0894827A
- Authority
- JP
- Japan
- Prior art keywords
- polymer
- conductive layer
- color filter
- parts
- exposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 51
- 229920000642 polymer Polymers 0.000 claims abstract description 97
- 238000000034 method Methods 0.000 claims abstract description 41
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 238000004070 electrodeposition Methods 0.000 claims abstract description 28
- 125000004464 hydroxyphenyl group Chemical group 0.000 claims abstract description 23
- 239000002253 acid Substances 0.000 claims abstract description 22
- 238000000576 coating method Methods 0.000 claims abstract description 17
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical group C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000011248 coating agent Substances 0.000 claims abstract description 11
- 229920002959 polymer blend Polymers 0.000 claims abstract description 6
- 239000010410 layer Substances 0.000 claims description 79
- 239000000203 mixture Substances 0.000 claims description 62
- 150000001875 compounds Chemical class 0.000 claims description 57
- 238000010438 heat treatment Methods 0.000 claims description 18
- 239000011247 coating layer Substances 0.000 claims description 17
- 238000004040 coloring Methods 0.000 claims description 16
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 6
- 238000007747 plating Methods 0.000 claims description 6
- 230000009467 reduction Effects 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 229920005989 resin Polymers 0.000 abstract description 19
- 239000011347 resin Substances 0.000 abstract description 19
- 230000007547 defect Effects 0.000 abstract description 12
- 230000008569 process Effects 0.000 abstract description 4
- 239000000243 solution Substances 0.000 description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 27
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 18
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 18
- 239000000178 monomer Substances 0.000 description 18
- -1 2-ethylhexyl Chemical group 0.000 description 17
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 15
- 239000008367 deionised water Substances 0.000 description 13
- 229910021641 deionized water Inorganic materials 0.000 description 13
- 229920001289 polyvinyl ether Polymers 0.000 description 13
- 239000000126 substance Substances 0.000 description 13
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 12
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 11
- 239000007787 solid Substances 0.000 description 11
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 9
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 9
- 239000002904 solvent Substances 0.000 description 9
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 8
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
- 239000007864 aqueous solution Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 8
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 8
- 238000003786 synthesis reaction Methods 0.000 description 8
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 7
- 229920001577 copolymer Polymers 0.000 description 7
- 239000000975 dye Substances 0.000 description 7
- 238000005406 washing Methods 0.000 description 7
- 150000001450 anions Chemical class 0.000 description 6
- 125000004432 carbon atom Chemical group C* 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- 238000010992 reflux Methods 0.000 description 6
- 235000011121 sodium hydroxide Nutrition 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- FUGYGGDSWSUORM-UHFFFAOYSA-N 4-hydroxystyrene Chemical compound OC1=CC=C(C=C)C=C1 FUGYGGDSWSUORM-UHFFFAOYSA-N 0.000 description 5
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 5
- 229910052753 mercury Inorganic materials 0.000 description 5
- 229920003986 novolac Polymers 0.000 description 5
- 239000005011 phenolic resin Substances 0.000 description 5
- 239000011342 resin composition Substances 0.000 description 5
- 230000001235 sensitizing effect Effects 0.000 description 5
- 229920002554 vinyl polymer Polymers 0.000 description 5
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 4
- WTQZSMDDRMKJRI-UHFFFAOYSA-N 4-diazoniophenolate Chemical compound [O-]C1=CC=C([N+]#N)C=C1 WTQZSMDDRMKJRI-UHFFFAOYSA-N 0.000 description 4
- YQUQWHNMBPIWGK-UHFFFAOYSA-N 4-isopropylphenol Chemical compound CC(C)C1=CC=C(O)C=C1 YQUQWHNMBPIWGK-UHFFFAOYSA-N 0.000 description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- 125000000129 anionic group Chemical group 0.000 description 4
- 125000003118 aryl group Chemical group 0.000 description 4
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 4
- 238000009833 condensation Methods 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000002244 precipitate Substances 0.000 description 4
- REEBWSYYNPPSKV-UHFFFAOYSA-N 3-[(4-formylphenoxy)methyl]thiophene-2-carbonitrile Chemical compound C1=CC(C=O)=CC=C1OCC1=C(C#N)SC=C1 REEBWSYYNPPSKV-UHFFFAOYSA-N 0.000 description 3
- 229920000178 Acrylic resin Polymers 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 238000007259 addition reaction Methods 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- 150000007514 bases Chemical class 0.000 description 3
- 230000003197 catalytic effect Effects 0.000 description 3
- 238000004132 cross linking Methods 0.000 description 3
- 230000009477 glass transition Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 235000006408 oxalic acid Nutrition 0.000 description 3
- 239000003973 paint Substances 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 229920006254 polymer film Polymers 0.000 description 3
- 235000013824 polyphenols Nutrition 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- NXXYKOUNUYWIHA-UHFFFAOYSA-N 2,6-Dimethylphenol Chemical compound CC1=CC=CC(C)=C1O NXXYKOUNUYWIHA-UHFFFAOYSA-N 0.000 description 2
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 2
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 2
- XLLXMBCBJGATSP-UHFFFAOYSA-N 2-phenylethenol Chemical compound OC=CC1=CC=CC=C1 XLLXMBCBJGATSP-UHFFFAOYSA-N 0.000 description 2
- TUAMRELNJMMDMT-UHFFFAOYSA-N 3,5-xylenol Chemical compound CC1=CC(C)=CC(O)=C1 TUAMRELNJMMDMT-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- GAWIXWVDTYZWAW-UHFFFAOYSA-N C[CH]O Chemical group C[CH]O GAWIXWVDTYZWAW-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- VQTUBCCKSQIDNK-UHFFFAOYSA-N Isobutene Chemical compound CC(C)=C VQTUBCCKSQIDNK-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- 239000005062 Polybutadiene Substances 0.000 description 2
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 2
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 150000001728 carbonyl compounds Chemical class 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000006482 condensation reaction Methods 0.000 description 2
- VPUGDVKSAQVFFS-UHFFFAOYSA-N coronene Chemical compound C1=C(C2=C34)C=CC3=CC=C(C=C3)C4=C4C3=CC=C(C=C3)C4=C2C3=C1 VPUGDVKSAQVFFS-UHFFFAOYSA-N 0.000 description 2
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- LNTHITQWFMADLM-UHFFFAOYSA-N gallic acid Chemical compound OC(=O)C1=CC(O)=C(O)C(O)=C1 LNTHITQWFMADLM-UHFFFAOYSA-N 0.000 description 2
- 229920001519 homopolymer Polymers 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 2
- 239000012046 mixed solvent Substances 0.000 description 2
- JESXATFQYMPTNL-UHFFFAOYSA-N mono-hydroxyphenyl-ethylene Natural products OC1=CC=CC=C1C=C JESXATFQYMPTNL-UHFFFAOYSA-N 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 239000003504 photosensitizing agent Substances 0.000 description 2
- 229920006122 polyamide resin Polymers 0.000 description 2
- 229920002857 polybutadiene Polymers 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 239000005056 polyisocyanate Substances 0.000 description 2
- 229920001228 polyisocyanate Polymers 0.000 description 2
- 239000002952 polymeric resin Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- BBEAQIROQSPTKN-UHFFFAOYSA-N pyrene Chemical compound C1=CC=C2C=CC3=CC=CC4=CC=C1C2=C43 BBEAQIROQSPTKN-UHFFFAOYSA-N 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 2
- 229960001755 resorcinol Drugs 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 229920001059 synthetic polymer Polymers 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 2
- QEQBMZQFDDDTPN-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy benzenecarboperoxoate Chemical compound CC(C)(C)OOOC(=O)C1=CC=CC=C1 QEQBMZQFDDDTPN-UHFFFAOYSA-N 0.000 description 1
- DXBHBZVCASKNBY-UHFFFAOYSA-N 1,2-Benz(a)anthracene Chemical compound C1=CC=C2C3=CC4=CC=CC=C4C=C3C=CC2=C1 DXBHBZVCASKNBY-UHFFFAOYSA-N 0.000 description 1
- FKTHNVSLHLHISI-UHFFFAOYSA-N 1,2-bis(isocyanatomethyl)benzene Chemical compound O=C=NCC1=CC=CC=C1CN=C=O FKTHNVSLHLHISI-UHFFFAOYSA-N 0.000 description 1
- DNJRKFKAFWSXSE-UHFFFAOYSA-N 1-chloro-2-ethenoxyethane Chemical compound ClCCOC=C DNJRKFKAFWSXSE-UHFFFAOYSA-N 0.000 description 1
- WJFKNYWRSNBZNX-UHFFFAOYSA-N 10H-phenothiazine Chemical compound C1=CC=C2NC3=CC=CC=C3SC2=C1 WJFKNYWRSNBZNX-UHFFFAOYSA-N 0.000 description 1
- KUFFULVDNCHOFZ-UHFFFAOYSA-N 2,4-xylenol Chemical compound CC1=CC=C(O)C(C)=C1 KUFFULVDNCHOFZ-UHFFFAOYSA-N 0.000 description 1
- VUIWJRYTWUGOOF-UHFFFAOYSA-N 2-ethenoxyethanol Chemical compound OCCOC=C VUIWJRYTWUGOOF-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-M 4-hydroxybenzoate Chemical compound OC1=CC=C(C([O-])=O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-M 0.000 description 1
- ISAVYTVYFVQUDY-UHFFFAOYSA-N 4-tert-Octylphenol Chemical compound CC(C)(C)CC(C)(C)C1=CC=C(O)C=C1 ISAVYTVYFVQUDY-UHFFFAOYSA-N 0.000 description 1
- CDSULTPOCMWJCM-UHFFFAOYSA-N 4h-chromene-2,3-dione Chemical compound C1=CC=C2OC(=O)C(=O)CC2=C1 CDSULTPOCMWJCM-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 229910017008 AsF 6 Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 1
- AVXURJPOCDRRFD-UHFFFAOYSA-N Hydroxylamine Chemical class ON AVXURJPOCDRRFD-UHFFFAOYSA-N 0.000 description 1
- 239000005058 Isophorone diisocyanate Substances 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 1
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- 229910018286 SbF 6 Inorganic materials 0.000 description 1
- 239000004115 Sodium Silicate Substances 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003377 acid catalyst Substances 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 125000005907 alkyl ester group Chemical group 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 229910000410 antimony oxide Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 229940106691 bisphenol a Drugs 0.000 description 1
- 239000001055 blue pigment Substances 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 239000007859 condensation product Substances 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- 150000004292 cyclic ethers Chemical class 0.000 description 1
- 229960002887 deanol Drugs 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 1
- 239000012972 dimethylethanolamine Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- GVEPBJHOBDJJJI-UHFFFAOYSA-N fluoranthrene Natural products C1=CC(C2=CC=CC=C22)=C3C2=CC=CC3=C1 GVEPBJHOBDJJJI-UHFFFAOYSA-N 0.000 description 1
- 229940074391 gallic acid Drugs 0.000 description 1
- 235000004515 gallic acid Nutrition 0.000 description 1
- KETWBQOXTBGBBN-UHFFFAOYSA-N hex-1-enylbenzene Chemical compound CCCCC=CC1=CC=CC=C1 KETWBQOXTBGBBN-UHFFFAOYSA-N 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 150000002605 large molecules Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- DZVCFNFOPIZQKX-LTHRDKTGSA-M merocyanine Chemical compound [Na+].O=C1N(CCCC)C(=O)N(CCCC)C(=O)C1=C\C=C\C=C/1N(CCCS([O-])(=O)=O)C2=CC=CC=C2O\1 DZVCFNFOPIZQKX-LTHRDKTGSA-M 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- UTSYWKJYFPPRAP-UHFFFAOYSA-N n-(butoxymethyl)prop-2-enamide Chemical compound CCCCOCNC(=O)C=C UTSYWKJYFPPRAP-UHFFFAOYSA-N 0.000 description 1
- 150000004780 naphthols Chemical class 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- MDYPDLBFDATSCF-UHFFFAOYSA-N nonyl prop-2-enoate Chemical compound CCCCCCCCCOC(=O)C=C MDYPDLBFDATSCF-UHFFFAOYSA-N 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000007530 organic bases Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 1
- NRZWYNLTFLDQQX-UHFFFAOYSA-N p-tert-Amylphenol Chemical compound CCC(C)(C)C1=CC=C(O)C=C1 NRZWYNLTFLDQQX-UHFFFAOYSA-N 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 150000007965 phenolic acids Chemical class 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 150000003077 polyols Chemical class 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 235000011118 potassium hydroxide Nutrition 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 150000003440 styrenes Chemical class 0.000 description 1
- XKXIQBVKMABYQJ-UHFFFAOYSA-M tert-butyl carbonate Chemical compound CC(C)(C)OC([O-])=O XKXIQBVKMABYQJ-UHFFFAOYSA-M 0.000 description 1
- JRMUNVKIHCOMHV-UHFFFAOYSA-M tetrabutylammonium bromide Chemical compound [Br-].CCCC[N+](CCCC)(CCCC)CCCC JRMUNVKIHCOMHV-UHFFFAOYSA-M 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Optical Filters (AREA)
- Liquid Crystal (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、液晶などの表示装置を
多色化するために用いられるカラーフィルタの製造方法
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a color filter used for multicoloring a display device such as a liquid crystal display.
【0002】[0002]
【従来の技術およびその解決すべき課題】従来、カラー
フィルタを形成する方法として、種々の提案がなされて
いるが、電着を用いてカラーフィルタを形成する方法が
注目されてきている。例えば特開昭61−272720
号公報や特開昭61−279803号公報には、基板上
に導電層を形成し、その上にポジ型の感光性被膜を形成
し、この感光性被膜を所望の形状に露光、現像して、部
分的に導電層を露出せしめ、露出した導電層に必要な色
の着色層を電着により形成する方法が開示されている。2. Description of the Related Art Conventionally, various proposals have been made as a method for forming a color filter, but a method for forming a color filter by using electrodeposition has been attracting attention. For example, JP-A-61-272720
In JP-A-61-279803 and JP-A-61-279803, a conductive layer is formed on a substrate, a positive photosensitive film is formed thereon, and the photosensitive film is exposed and developed into a desired shape. , A method of partially exposing a conductive layer and forming a colored layer of a required color on the exposed conductive layer by electrodeposition.
【0003】この方法は、ポジ型の感光性被膜を使用し
ているため理想的には露光部分のみが現像液に可溶化
し、未露光部分は感光性を保持しているので露光、現像
を繰り返すことができることになる。しかしながら、キ
ノンジアジドを用いるポジ型感光性被膜は第1回目の現
像液や電着液との接触、熱などにより変性され、第2回
目以降のポジ型感光性被膜としての機能が発揮できなく
なる。したがって、この方法の場合、現実的にはポジ型
感光性被膜を複数回塗布する必要があり、工程が複雑と
なる。In this method, since a positive type photosensitive film is used, ideally only the exposed part is solubilized in the developing solution, and the unexposed part retains the photosensitivity, so that the exposure and development are performed. It can be repeated. However, the positive type photosensitive coating film using quinonediazide is modified by contact with the first developing solution or electrodeposition solution, heat, etc., and the function as the second or subsequent positive type photosensitive coating film cannot be exhibited. Therefore, in the case of this method, it is actually necessary to apply the positive photosensitive film a plurality of times, and the process becomes complicated.
【0004】また特開平4−247402号公報、特開
平5−93807号公報には、上記欠点を解決する方法
として、カルボン酸のtert−ブチルエステル又はフェノ
ールのtert−ブチルカルボナートよりなる酸に対して不
安定な枝分れした基を有する重合体と露光によって酸を
生じる光重合開始剤とを含有するポジ型感光性樹脂組成
物を用いる方法が開示されている。この方法において
は、tert−ブチルエステルは、酸の攻撃によりイソブテ
ンとカルボキシル基とに分解する。その結果、ポジ型感
光性被膜の露光部分に親水性官能基が形成され、アルカ
リ現像液による現像が可能となるものである。Further, JP-A-4-247402 and JP-A-5-93807 disclose, as a method for solving the above-mentioned disadvantages, an acid consisting of tert-butyl ester of carboxylic acid or tert-butyl carbonate of phenol. Discloses a method of using a positive photosensitive resin composition containing a polymer having a stable and unstable branched group and a photopolymerization initiator that generates an acid upon exposure. In this method, the tert-butyl ester decomposes into isobutene and a carboxyl group by the attack of acid. As a result, a hydrophilic functional group is formed on the exposed portion of the positive photosensitive film, and development with an alkali developing solution becomes possible.
【0005】上記方法においては、光量子収率はキノン
ジアジドを感光剤としたものに比べて高く、感光性は向
上するが、現像の原理はキノンジアジドを使用したもの
と同様に露光部と未露光部との現像液に対する溶解度の
差を利用したものであり、未露光部は現像液に対して完
全には不溶性でないため、現像条件が微妙であり、良好
な再現性を得るためには厳密な現像条件の制御が必要で
ある。特に現像工程が複数回繰り返して行われる場合に
は未露光部の感光性被膜も現像液により一部溶解ないし
は膨潤し、形成されるパターンの精度が低下しやすく、
パターン欠陥を生じやすいなどの欠点がある。In the above method, the photon yield is higher than that using quinonediazide as a photosensitizer, and the photosensitivity is improved, but the principle of development is that exposed areas and unexposed areas are the same as those using quinonediazide. The difference in solubility in the developing solution is used. Since the unexposed area is not completely insoluble in the developing solution, the developing conditions are delicate, and strict developing conditions are required to obtain good reproducibility. Control is required. Particularly when the developing step is repeated a plurality of times, the photosensitive film in the unexposed area is also partially dissolved or swollen by the developing solution, and the accuracy of the formed pattern is likely to decrease,
There are drawbacks such as pattern defects.
【0006】本発明の目的は、上記の如き欠点がなく、
簡単な生産工程で、パターン精度が高く着色不良がなく
信頼性が高い着色パターンを有するカラーフィルタの製
造方法を提供することにある。The object of the present invention is to eliminate the above-mentioned drawbacks.
It is an object of the present invention to provide a method for manufacturing a color filter having a highly reliable colored pattern with high pattern accuracy and no coloring defects in a simple production process.
【0007】[0007]
【課題を解決するための手段】そこで本発明者らは鋭意
研究の結果、特定のポジ型感光性樹脂組成物を使用する
ことによって上記目的を達成することができることを見
出し本発明を完成するに至った。The inventors of the present invention, as a result of earnest research, have found that the above object can be achieved by using a specific positive type photosensitive resin composition, and have completed the present invention. I arrived.
【0008】すなわち本発明は、1.〔1〕透明基板上
に透明導電層を形成する工程、 〔2〕(a)一分子中にカルボキシル基とヒドロキシフ
ェニル基とを有する重合体(a−1)、又はカルボキシ
ル基を有する重合体(a−2)とヒドロキシフェニル基
を有する重合体(a−3)との重合体混合物、(b)一
分子中に2個以上のビニルエーテル基を含有する化合
物、及び(c)活性エネルギー線照射により酸を発生す
る化合物、を必須成分として含有するポジ型感光性組成
物を該透明導電層上に塗装し、加熱してポジ型感光性被
膜層を形成する工程、 〔3〕該感光性被膜層を所望の形状に露光し、必要に応
じて加熱し、次いで現像することによって、透明導電層
の一部を露出する工程、 〔4〕露出した透明導電層上に電着により所望の色の着
色部を形成する工程、及び 〔5〕上記〔3〕及び〔4〕の工程を必要回数繰り返す
工程 を有することを特徴とするカラーフィルタの製造方法を
提供するものである。That is, the present invention is as follows. [1] a step of forming a transparent conductive layer on a transparent substrate, [2] (a) a polymer (a-1) having a carboxyl group and a hydroxyphenyl group in one molecule, or a polymer having a carboxyl group ( a-2) and a polymer mixture (a-3) having a hydroxyphenyl group, (b) a compound containing two or more vinyl ether groups in one molecule, and (c) by irradiation with active energy rays. A step of coating a positive photosensitive composition containing an acid generating compound as an essential component on the transparent conductive layer and heating to form a positive photosensitive coating layer, [3] the photosensitive coating layer To expose a part of the transparent conductive layer by exposing it to a desired shape, heating it if necessary, and then developing, [4] coloring the exposed transparent conductive layer with a desired color by electrodeposition. Of forming a part, and [5] The present invention provides a method for manufacturing a color filter, which comprises a step of repeating the above steps [3] and [4] a required number of times.
【0009】また本発明は、2.重合体(a)が重合体
(a−1)であって、重合体(a−1)が、重合体(a
−1)1kgあたり0.5〜10当量の範囲のカルボキシ
ル基及び1.0〜10当量の範囲のヒドロキシフェニル
基を含有するものである上記項1記載のカラーフィルタ
の製造方法を提供するものである。The present invention also relates to 2. The polymer (a) is the polymer (a-1) and the polymer (a-1) is the polymer (a
-1) A method for producing a color filter according to item 1, which contains a carboxyl group in the range of 0.5 to 10 equivalents and a hydroxyphenyl group in the range of 1.0 to 10 equivalents per kg. is there.
【0010】さらに本発明は、3.重合体(a)が重合
体(a−2)と重合体(a−3)との重合体混合物であ
って、重合体(a−2)が、重合体(a−2)1kgあた
り0.5〜10当量の範囲のカルボキシル基を含有し、
重合体(a−3)が、重合体(a−3)1kgあたり1.
0〜10当量の範囲のヒドロキシフェニル基を含有する
ものである上記項1記載のカラーフィルタの製造方法を
提供するものである。Further, the present invention relates to 3. The polymer (a) is a polymer mixture of the polymer (a-2) and the polymer (a-3), and the polymer (a-2) is 0.1% per 1 kg of the polymer (a-2). Contains a carboxyl group in the range of 5 to 10 equivalents,
The amount of the polymer (a-3) was 1. per 1 kg of the polymer (a-3).
The present invention provides a method for producing a color filter according to item 1, which contains a hydroxyphenyl group in the range of 0 to 10 equivalents.
【0011】また本発明は、4.〔1〕〜〔5〕の工程
後、〔6〕残存する感光性被膜層を除去し、導電層を露
出させる工程を有する上記項1記載のカラーフィルタの
製造方法を提供するものである。The present invention also relates to 4. After the steps [1] to [5], [6] there is provided a method for producing a color filter according to the above item 1, which has a step of removing the remaining photosensitive coating layer and exposing the conductive layer.
【0012】さらに本発明は、5.〔6〕の工程後、露
出させた導電層上に電着により所望の着色部を形成する
工程を有する上記項4記載のカラーフィルタの製造方法
を提供するものである。The present invention also relates to 5. After the step [6], the method for producing a color filter according to the above item 4 is provided, which comprises a step of forming a desired colored portion on the exposed conductive layer by electrodeposition.
【0013】また本発明は、6.〔6〕の工程後、露出
させた導電層上に塗布法によって所望の着色部を形成す
る工程を有する上記項4記載のカラーフィルタの製造方
法を提供するものである。The present invention also relates to 6. After the step [6], the method for producing a color filter according to the above item 4 has a step of forming a desired colored portion on the exposed conductive layer by a coating method.
【0014】さらに本発明は、7.〔6〕の工程後、露
出させた導電層上に金属層をメッキ法によって形成する
工程を有する上記項4記載のカラーフィルタの製造方法
を提供するものである。The present invention also relates to 7. The method for producing a color filter according to the above item 4, which comprises a step of forming a metal layer on the exposed conductive layer by a plating method after the step [6].
【0015】また本発明は、8.〔6〕の工程後、露出
させた導電層を酸化又は還元によって着色する工程を有
する上記項4記載のカラーフィルタの製造方法を提供す
るものである。The present invention also relates to 8. The method for producing a color filter according to item 4 above, which comprises a step of coloring the exposed conductive layer by oxidation or reduction after the step [6].
【0016】[0016]
【作用】以下、本発明をさらに詳細に説明する。まず工
程〔1〕において、後記図1(A)に示すように透明基
板1に透明導電層2を形成する。透明基板1としては通
常カラーフィルタに使用される透明な基板であればいず
れの基板であってもよく、例えばガラス基板、プラスチ
ック基板などを挙げることができる。透明導電層2に
は、例えば酸化錫、酸化インジウム又は酸化アンチモン
を主成分とするものが好適に用いられる。この透明導電
層は蒸着法、スパッタリング法又はゾル−ゲル法等の方
法により形成することができる。The present invention will be described in more detail below. First, in step [1], a transparent conductive layer 2 is formed on a transparent substrate 1 as shown in FIG. The transparent substrate 1 may be any substrate as long as it is a transparent substrate normally used for color filters, and examples thereof include a glass substrate and a plastic substrate. For the transparent conductive layer 2, for example, one containing tin oxide, indium oxide, or antimony oxide as a main component is preferably used. This transparent conductive layer can be formed by a method such as a vapor deposition method, a sputtering method or a sol-gel method.
【0017】ついで工程〔2〕において、上記透明導電
層上にポジ型感光性組成物を塗布し、加熱してポジ型感
光性被膜層を形成する。塗布されるポジ型感光性組成物
は、一分子中にカルボキシル基とヒドロキシフェニル基
とを有する重合体(a−1)、一分子中に2個以上のビ
ニルエーテル基を含有する化合物(b)〔以下、「多ビ
ニルエーテル化合物(b)」と略称する〕及び活性エネ
ルギー線照射により酸を発生する化合物(c)〔以下、
「光酸発生化合物(c)」と略称する〕を必須成分とし
て含有する組成物;ならびにカルボキシル基を有する重
合体(a−2)とヒドロキシフェニル基を有する重合体
(a−3)との重合体混合物、多ビニルエーテル化合物
(b)及び光酸発生化合物(c)を必須成分として含有
する組成物から選ばれる組成物のうちの一種である。上
記ポジ型感光性組成物としては、本願出願人による出願
である、特願平5−125500号、特願平5−125
501号及び特願平6−99139号に記載された感光
性組成物などを使用することができる。Then, in step [2], a positive photosensitive composition is applied onto the transparent conductive layer and heated to form a positive photosensitive coating layer. The positive photosensitive composition to be applied is a polymer (a-1) having a carboxyl group and a hydroxyphenyl group in one molecule, and a compound (b) [containing two or more vinyl ether groups in one molecule [b]. Hereinafter, abbreviated as "polyvinyl ether compound (b)"] and a compound (c) that generates an acid upon irradiation with active energy rays [hereinafter,
Abbreviated as "photo-acid generating compound (c)"] as an essential component; and a polymer (a-2) having a carboxyl group and a polymer (a-3) having a hydroxyphenyl group. It is one of the compositions selected from the composition containing the combined mixture, the poly (vinyl ether) compound (b) and the photoacid generating compound (c) as essential components. As the above-mentioned positive-type photosensitive composition, Japanese Patent Application Nos. 5-125500 and 5-125, which are applications by the present applicant.
The photosensitive compositions described in Japanese Patent Application No. 501 and Japanese Patent Application No. 6-99139 can be used.
【0018】上記ポジ型感光性組成物は、それを塗布し
て形成された膜を加熱するとカルボキシル基及び/又は
ヒドロキシフェニル基とビニルエーテル基との付加反応
により架橋して、溶剤やアルカリ水溶液に対して不溶性
となり、さらに活性エネルギー線を照射、必要に応じて
照射後加熱すると、照射部に発生した酸の触媒作用で架
橋構造が切断されて照射部分が溶剤やアルカリ水溶液に
対して再び可溶性になるという新規なメカニズムによっ
て機能するものである。すなわち未露光部は架橋構造を
とることにより現像に用いられる溶剤やアルカリ水溶液
に対して不溶化され、現像時に未露光部の溶解や膨潤が
生じないため、従来のポジ型感光性組成物にみられるよ
うな問題を生じることはない。When the film formed by applying the positive type photosensitive composition is heated, the positive type photosensitive composition is crosslinked by an addition reaction of a carboxyl group and / or a hydroxyphenyl group and a vinyl ether group, and is crosslinked with a solvent or an alkaline aqueous solution. Becomes insoluble, and is further irradiated with active energy rays and, if necessary, heated after irradiation, the cross-linked structure is cleaved by the catalytic action of the acid generated in the irradiated part, and the irradiated part becomes soluble again in the solvent or alkaline aqueous solution. It works by the new mechanism. That is, the unexposed area is insolubilized in the solvent or aqueous alkaline solution used for development due to the cross-linking structure, and the unexposed area is not dissolved or swelled during development, so that it is found in the conventional positive photosensitive composition. It does not cause such a problem.
【0019】また本発明におけるポジ型感光性組成物
は、キノンジアジドを感光剤とするポジ型感光性組成物
と比較すると、吸光係数の高い官能基を多量に使用する
必要がないので、活性エネルギー線に対する透明性を高
くすることができ、また照射部に発生した酸は加熱によ
って触媒として作用し、架橋構造を連鎖的に切断するた
めポジ型として作用する感光性組成物としての感度を高
くすることができる。Further, the positive-type photosensitive composition of the present invention does not need to use a large amount of functional groups having a high absorption coefficient, as compared with the positive-type photosensitive composition using quinonediazide as a photosensitizer. The transparency of the acid can be increased, and the acid generated in the irradiated part acts as a catalyst by heating and cuts the cross-linking structure in a chain to enhance the sensitivity as a positive type composition. You can
【0020】本発明において使用するポジ型感光性組成
物の各成分について説明する。(a)成分は、重合体成
分であり、重合体(a−1)であるか又は重合体(a−
2)と重合体(a−3)との重合体混合物である。Each component of the positive photosensitive composition used in the present invention will be described. The component (a) is a polymer component and is the polymer (a-1) or the polymer (a-
It is a polymer mixture of 2) and the polymer (a-3).
【0021】重合体(a−1) 一分子中に少なくとも1つのカルボキシル基及びヒドロ
キシフェニル基を含む被膜形成性の重合体であり、例え
ば、p−ヒドロキシスチレンのようなヒドロキシスチレ
ンと、カルボキシル基を含有する重合体不飽和単量体と
の共重合体;ヒドロキシスチレン及び該カルボキシル基
含有単量体と共重合可能な他の単量体との共重合体等が
挙げられる。Polymer (a-1) is a film-forming polymer containing at least one carboxyl group and a hydroxyphenyl group in one molecule, for example, hydroxystyrene such as p-hydroxystyrene and a carboxyl group. A copolymer with a polymer unsaturated monomer contained therein; a copolymer with hydroxystyrene and another monomer copolymerizable with the carboxyl group-containing monomer, and the like can be mentioned.
【0022】上記カルボキシル基を含有する重合性不飽
和単量体としては、例えば、アクリル酸、メタクリル
酸、クロトン酸、イタコン酸等が挙げられ、また、上記
共重合可能な他の単量体としては、例えば、(メタ)ア
クリル酸メチル、(メタ)アクリル酸エチル、(メタ)
アクリル酸プロピル、(メタ)アクリル酸ブチル、(メ
タ)アクリル酸ヘキシル、(メタ)アクリル酸オクチ
ル、(メタ)アクリル酸2−エチルヘキシル、(メタ)
アクリル酸ノニル、(メタ)アクリル酸デシル等の(メ
タ)アクリル酸のC1 〜C12アルキルエステル;(メ
タ)アクリル酸ヒドロキシエチル、(メタ)アクリル酸
2−ヒドロキシプロピル、(メタ)アクリル酸3−ヒド
ロキシプロピル、(メタ)アクリル酸ヒドロキシブチル
等の(メタ)アクリル酸のC2 〜C6 ヒドロキシアルキ
ルエステル;スチレン、α−メチルスチレン、p−tert
−ブチルスチレン等のビニル芳香族化合物;酢酸ビニ
ル、(メタ)アクリロニトリル、(メタ)アクリルアミ
ド、ビニルピロリドン等が挙げられ、これら単量体はそ
れぞれ単独で用いてもよく又は2種以上組合わせて使用
することができる。Examples of the polymerizable unsaturated monomer containing a carboxyl group include acrylic acid, methacrylic acid, crotonic acid, itaconic acid, and the like. Is, for example, methyl (meth) acrylate, ethyl (meth) acrylate, (meth)
Propyl acrylate, butyl (meth) acrylate, hexyl (meth) acrylate, octyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, (meth)
C 1 -C 12 alkyl esters of (meth) acrylic acid such as nonyl acrylate and decyl (meth) acrylate; hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, and (meth) acrylic acid 3 - hydroxypropyl, (meth) C 2 -C 6 hydroxyalkyl esters of (meth) acrylic acid such as hydroxyethyl acrylate-butyl; styrene, alpha-methyl styrene, p-tert
-Vinyl aromatic compounds such as butyl styrene; vinyl acetate, (meth) acrylonitrile, (meth) acrylamide, vinylpyrrolidone, etc., and these monomers may be used alone or in combination of two or more kinds. can do.
【0023】また、重合体(a−1)として、ヒドロキ
シ安息香酸、没食子酸、レゾルシン酸などのフェノール
カルボン酸類、又はこれらとフェノール、炭素数1〜1
8のモノ−もしくはジ−アルキルフェノールもしくはナ
フトール類、レゾルシン、カテコール等から選ばれるフ
ェノール類の1種もしくは2種以上との混合物をホルム
アルデヒドと縮合させることにより得られる重合体を使
用することもできる。Further, as the polymer (a-1), phenolcarboxylic acids such as hydroxybenzoic acid, gallic acid, resorcinic acid, etc., or these and phenol, carbon number 1 to 1
It is also possible to use a polymer obtained by condensing formaldehyde with a mixture of mono- or di-alkylphenol of 8 or naphthols, and one or more phenols selected from resorcin, catechol and the like.
【0024】重合体(a−1)は、一般に、約500〜
100,000、特に約1,500〜30,000の範
囲内の数平均分子量を有していることが好ましい。一
方、カルボキシル基の含有量は、重合体1kgあたり一般
に0.5〜10当量、特に0.5〜5.0当量の範囲内
にあり、またヒドロキシフェニル基は重合体1kgあたり
少なくとも1.0当量、特に2.0〜8.0当量の範囲
内にあることが望ましい。さらに、重合体(a−1)
は、そのガラス転移温度(Tg)が0℃以上、特に5〜
70℃の範囲内にあることが好適である。The polymer (a-1) is generally about 500 to
It is preferred to have a number average molecular weight in the range of 100,000, especially in the range of about 1,500 to 30,000. On the other hand, the content of the carboxyl group is generally in the range of 0.5 to 10 equivalents, particularly 0.5 to 5.0 equivalents per 1 kg of the polymer, and the hydroxyphenyl group is at least 1.0 equivalent per 1 kg of the polymer. , Particularly preferably in the range of 2.0 to 8.0 equivalents. Further, the polymer (a-1)
Has a glass transition temperature (Tg) of 0 ° C. or higher, especially 5 to
It is preferably in the range of 70 ° C.
【0025】重合体(a−2) 重合体(a−2)は、一分子中に少なくとも1つのカル
ボキシル基を含む被膜形成性の重合体であり、例えば、
カルボキシル基を含有する重合性不飽和単量体の単独重
合体;該カルボキシル基含有単量体と他の共重合可能な
単量体との共重合体;分子鎖中又は分子末端にカルボキ
シル基を有するポリエステル系、ポリウレタン系、ポリ
アミド系などの樹脂等が挙げられる。Polymer (a-2) The polymer (a-2) is a film-forming polymer containing at least one carboxyl group in one molecule.
A homopolymer of a polymerizable unsaturated monomer containing a carboxyl group; a copolymer of the carboxyl group-containing monomer with another copolymerizable monomer; a carboxyl group in the molecular chain or at the terminal of the molecule. Examples thereof include polyester resins, polyurethane resins, polyamide resins, and the like.
【0026】上記カルボキシル基を含有する重合性不飽
和単量体としては、例えば、アクリル酸、メタクリル
酸、クロトン酸、イタコン酸等が挙げられ、また、これ
らカルボキシル基含有単量体と共重合可能な他の単量体
としては、前記重合体(a−1)における共重合体にお
いて例示したと同様の共重合可能な他の単量体を用いる
ことができる。これら単量体はそれぞれ単独で用いても
よく又は2種以上組合わせて使用することができる。殊
に、該他の単量体としてスチレン、α−メチルスチレ
ン、C1〜C6 アルキル置換されたスチレン(例えばp
−tert−ブチルスチレン)などのビニル芳香族化合物を
使用することが、形成される画像パターンの精度等の点
で好適である。Examples of the polymerizable unsaturated monomer containing a carboxyl group include acrylic acid, methacrylic acid, crotonic acid, itaconic acid, and the like, which are copolymerizable with these carboxyl group-containing monomers. As the other monomer, the other copolymerizable monomers similar to those exemplified for the copolymer in the polymer (a-1) can be used. These monomers may be used alone or in combination of two or more. In particular, as the other monomer, styrene, α-methylstyrene, C 1 -C 6 alkyl substituted styrene (for example p
It is preferable to use a vinyl aromatic compound such as -tert-butylstyrene) in terms of the accuracy of the image pattern formed.
【0027】重合体(a−2)は、一般に、約3,00
0〜約100,000、特に約5,000〜約30,0
00の範囲内の数平均分子量を有していることが好まし
く、また、カルボキシル基の含有量は、重合体1kgあた
り一般に0.5〜10当量、特に0.5〜5.0当量の
範囲内にあることが望ましい。また、重合体(a−2)
は、そのガラス転移温度(Tg)が0℃以上、特に5〜
70℃の範囲内にあることが好適である。The polymer (a-2) is generally about 3,000.
0 to about 100,000, especially about 5,000 to about 30,0
It is preferable to have a number average molecular weight in the range of 00, and the content of the carboxyl group is generally in the range of 0.5 to 10 equivalents, particularly 0.5 to 5.0 equivalents per 1 kg of the polymer. Is desirable. Further, the polymer (a-2)
Has a glass transition temperature (Tg) of 0 ° C. or higher, especially 5 to
It is preferably in the range of 70 ° C.
【0028】重合体(a−3) 重合体(a−3)は一分子中に少なくとも1つのヒドロ
キシフェニル基を含む重合体であり、例えば、1官能性
又は多官能性フェノール化合物、アルキルフェノール化
合物又はそれらの混合物と、フォルムアルデヒド、アセ
トンなどのカルボニル化合物との縮合物;p−ヒドロキ
シスチレンのようなヒドロキシ基含有ビニル芳香族化合
物の単独重合体;該ヒドロキシル基含有ビニル芳香族化
合物と他の共重合可能な単量体との共重合体等が挙げら
れる。Polymer (a-3) The polymer (a-3) is a polymer containing at least one hydroxyphenyl group in one molecule, and is, for example, a monofunctional or polyfunctional phenol compound, an alkylphenol compound or Condensates of their mixtures with carbonyl compounds such as formaldehyde and acetone; homopolymers of vinyl aromatic compounds containing hydroxy groups such as p-hydroxystyrene; vinyl aromatic compounds containing hydroxyl groups and other copolymers. Examples thereof include copolymers with possible monomers.
【0029】上記1官能性又は多官能性フェノール化合
物としては、例えば、フェノール、o−クレゾール、m
−クレゾール、p−クレゾール、3,5−キシレノー
ル、2,6−キシレノール、2,4−キシレノール、カ
テコール、レゾルシン、ピロガロール、ビスフェノール
Aなどのベンゼン環上に1〜3個のヒドロキシル基を有
する化合物が挙げられ、また、アルキルフェノール化合
物としては、例えば、p−イソプロピルフェノール、p
−tert−ブチルフェノール、p−tert−アミルフェノー
ル、p−tert−オクチルフェノールなどのアルキル部分
の炭素数が1〜10、好ましくは1〜4のアルキルフェ
ノール化合物が挙げられる。Examples of the monofunctional or polyfunctional phenol compound include phenol, o-cresol and m.
-Cresol, p-cresol, 3,5-xylenol, 2,6-xylenol, 2,4-xylenol, catechol, resorcin, pyrogallol, bisphenol A, etc., a compound having 1 to 3 hydroxyl groups on the benzene ring Examples of the alkylphenol compound include p-isopropylphenol and p-isopropylphenol.
Examples thereof include alkylphenol compounds having 1 to 10 carbon atoms, preferably 1 to 4 carbon atoms in the alkyl moiety such as -tert-butylphenol, p-tert-amylphenol and p-tert-octylphenol.
【0030】これらの化合物とフォルムアルデヒド、ア
セトンなどのカルボニル化合物との縮合反応はそれ自体
既知の方法で行なうことができ、一般にアルカリ触媒で
縮合させると、縮合が進むにつれて不溶不融となるレゾ
ール型が得られ、酸触媒で縮合させると可溶可融のノボ
ラック型が得られる。本発明では通常後者のノボラック
型フェノール樹脂を使用することができる。ノボラック
型フェノール樹脂は縮合が進むにつれて分子量が増大す
るが、一般には反応時間1〜3時間で縮合させることに
より得られる分子量が500〜2,000の範囲内のも
のが好適である。また、ヒドロキシ基含有ビニル芳香族
化合物と共重合可能な他の単量体としては、前記重合体
(a−1)における共重合体において例示したと同様の
共重合可能な他の単量体を用いることができる、The condensation reaction of these compounds with a carbonyl compound such as formaldehyde or acetone can be carried out by a method known per se. Generally, when the condensation reaction is carried out with an alkali catalyst, it becomes insoluble and infusible as the condensation proceeds. And a soluble and fusible novolak type is obtained by condensation with an acid catalyst. In the present invention, the latter novolak type phenolic resin can usually be used. The molecular weight of the novolac type phenol resin increases as the condensation proceeds, but it is generally preferable that the molecular weight obtained by the condensation in the reaction time of 1 to 3 hours is in the range of 500 to 2,000. As the other monomer copolymerizable with the hydroxy group-containing vinyl aromatic compound, the other copolymerizable monomers similar to those exemplified for the copolymer in the polymer (a-1) may be used. Can be used,
【0031】かかる重合体(a−3)は一般に約500
〜約100,000、特に約1,000〜約30,00
0の範囲内の数平均分子量を有していることが好まし
い。The polymer (a-3) is generally about 500
To about 100,000, especially about 1,000 to about 30,000
It preferably has a number average molecular weight in the range of 0.
【0032】また、重合体(a−3)のヒドロキシフェ
ニル基の含有量は、重合体1kgあたり一般に1.0〜1
0当量、特に2.0〜8.0当量の範囲内にあるのが好
都合である。重合体(a−3)は、そのガラス転移温度
(Tg)が0℃以上、特に5〜70℃の範囲内にあるこ
とが好適である。(a)成分が重合体(a−2)と重合
体(a−3)との重合体混合物である場合、両者の配合
割合は、(a−2)/(a−3)の固形分重量比で90
/10〜10/90、特に70/30〜30/70の範
囲内であることが好ましい。The content of hydroxyphenyl group in the polymer (a-3) is generally 1.0 to 1 per 1 kg of the polymer.
Conveniently it is in the range of 0 equivalents, especially 2.0 to 8.0 equivalents. The glass transition temperature (Tg) of the polymer (a-3) is preferably 0 ° C. or higher, and particularly preferably in the range of 5 to 70 ° C. When the component (a) is a polymer mixture of the polymer (a-2) and the polymer (a-3), the mixing ratio of both is (a-2) / (a-3) solid content weight. 90 by ratio
It is preferably in the range of / 10 to 10/90, particularly 70/30 to 30/70.
【0033】多ビニルエーテル化合物(b) 多ビニルエーテル化合物(b)は、一分子中に、式−R
−O−CH=CH2 〔ここで、Rはエチレン、プロピレ
ン、ブチレンなどの炭素数1〜6の直鎖状もしくは分岐
鎖状のアルキレン基を表わす〕で示されるビニルエーテ
ル基を少なくとも2個、好ましくは2〜4個含有する低
分子量又は高分子量の化合物であり、例えば、ビスフェ
ノールA、ビスフェノールF、ビスフェノールS、フェ
ノール樹脂などのポリフェノール化合物や、エチレング
リコール、プロピレングリコール、トリメチロールプロ
パン、トリメチロールエタン、ペンタエリスリトールな
どのポリオール類と、クロロエチルビニルエーテルなど
のハロゲン化アルキルビニルエーテルとの縮合物;トリ
レンジイソシアネート、キシリレンジイソシアネート、
ヘキサメチレンジイソシアネート、イソホロンジイソシ
アネートなどのポリイソシアネート化合物と、ヒドロキ
シエチルビニルエーテルのようなヒドロキシアルキルビ
ニルエーテルとの反応物等が挙げられる。特に、上記ポ
リフェノール化合物とハロゲン化アルキルビニルエーテ
ルとの縮合物及び芳香環をもつポリイソシアネート化合
物とヒドロキシアルキルビニルエーテルとの反応物が、
エッチング耐性、形成されるパターンの精度等の観点か
ら好適である。Polyvinyl ether compound (b) The polyvinyl ether compound (b) has the formula -R in one molecule.
At least two vinyl ether groups represented by —O—CH═CH 2 [wherein R represents a linear or branched alkylene group having 1 to 6 carbon atoms such as ethylene, propylene and butylene], and preferably Is a low molecular weight or high molecular weight compound containing 2 to 4, for example, polyphenol compounds such as bisphenol A, bisphenol F, bisphenol S, and phenol resin, ethylene glycol, propylene glycol, trimethylolpropane, trimethylolethane, Condensation products of polyols such as pentaerythritol and halogenated alkyl vinyl ethers such as chloroethyl vinyl ether; tolylene diisocyanate, xylylene diisocyanate,
Examples thereof include reaction products of a polyisocyanate compound such as hexamethylene diisocyanate and isophorone diisocyanate with a hydroxyalkyl vinyl ether such as hydroxyethyl vinyl ether. In particular, a condensate of the above polyphenol compound and a halogenated alkyl vinyl ether and a reaction product of a polyisocyanate compound having an aromatic ring and a hydroxyalkyl vinyl ether,
It is suitable from the viewpoint of etching resistance, accuracy of the formed pattern, and the like.
【0034】多ビニルエーテル化合物(b)は、常温で
液状であるか又はその融点もしくは軟化点が150℃以
下、特に130℃以下のものが、活性エネルギー線照射
前の加熱時に、重合体(a−1)中、或いは重合体(a
−2)及び/又は重合体(a−3)中に移行しやすく、
重合体(a−1)或いは重合体(a−2)及び/又は
(a−3)中のカルボキシル基及び/又はフェノール性
水酸基と多ビニルエーテル化合物(b)のビニルエーテ
ル基との付加反応が起りやすく好ましい。The poly (vinyl ether) compound (b) having a melting point or a softening point of 150 ° C. or lower, particularly 130 ° C. or lower, is a liquid at ordinary temperature, and the polymer (a- 1) Medium or polymer (a
-2) and / or easily migrates into the polymer (a-3),
Addition reaction easily occurs between the carboxyl group and / or phenolic hydroxyl group in the polymer (a-1) or the polymer (a-2) and / or (a-3) and the vinyl ether group of the polyvinyl ether compound (b). preferable.
【0035】光酸発生化合物(c) 光酸発生化合物(c)は、後述する活性エネルギー線の
照射により分解して、前記重合体(a−1)或いは重合
体(a−2)及び/又は(a−3)と多ビニルエーテル
化合物(b)との間で形成される架橋構造を切断するの
に十分な強度の酸を発生する化合物であり、例えば、下
記式で示されるものが包含される。これらのうち(IX)
式で表わされる化合物が特に好適である。Photoacid- generating compound (c) The photoacid-generating compound (c) is decomposed by irradiation with an active energy ray described below to give the polymer (a-1) or polymer (a-2) and / or A compound that generates an acid having sufficient strength to cleave the cross-linked structure formed between (a-3) and the polyvinyl ether compound (b), and includes, for example, one represented by the following formula. . Of these (IX)
Compounds of formula are particularly preferred.
【0036】Ar2 I+ ・X- (I) 〔式中、Arはアリール基、例えばフェニル基を表し、
X- はPF6 -、SbF6 -又はAsF6 -を表す〕Ar 2 I + · X − (I) [wherein Ar represents an aryl group, for example, a phenyl group,
X - is PF 6 -, SbF 6 - or AsF 6 - represents a]
【0037】Ar2 S+ ・X- (II) 〔式中、Ar及びX- は上記と同じ意味を有する〕Ar 2 S + · X − (II) [wherein, Ar and X − have the same meanings as above]
【0038】[0038]
【化1】 〔式中、Rは炭素数1〜12のアルキル基又は炭素数1
〜12のアルコキシ基を表し、nは0〜3を表し、X-
は上記と同じ意味を有する〕[Chemical 1] [In the formula, R is an alkyl group having 1 to 12 carbon atoms or 1 carbon atom.
It represents 12 alkoxy group, n represents 0 to 3, X -
Has the same meaning as above]
【0039】[0039]
【化2】 〔式中、X- は上記と同じ意味を有する〕[Chemical 2] [In the formula, X − has the same meaning as above]
【0040】[0040]
【化3】 〔式中、X- は上記と同じ意味を有する〕[Chemical 3] [In the formula, X − has the same meaning as above]
【0041】[0041]
【化4】 〔式中、X- は上記と同じ意味を有する〕[Chemical 4] [In the formula, X − has the same meaning as above]
【0042】[0042]
【化5】 〔式中、X- は上記と同じ意味を有する〕[Chemical 5] [In the formula, X − has the same meaning as above]
【0043】[0043]
【化6】 〔式中、R1 及びR2 はそれぞれ独立に炭素数1〜12
のアルキル基又は炭素数1〜12のアルコキシ基を表
す〕[Chemical 6] [In the formula, R 1 and R 2 each independently have 1 to 12 carbon atoms.
Represents an alkyl group or an alkoxy group having 1 to 12 carbon atoms]
【0044】[0044]
【化7】 〔式中、R1 及びR2 は上記と同じ意味を有する〕[Chemical 7] [In the formula, R 1 and R 2 have the same meanings as described above.]
【0045】[0045]
【化8】 [Chemical 8]
【0046】ポジ型感光性組成物 本発明において使用するポジ型感光性組成物は、以上に
述べた重合体成分である(a)成分、多ビニルエーテル
化合物(b)及び光酸発生化合物(c)の3成分を必須
成分として含有するものであり、その配合割合は、該組
成物の用途等に応じて広い範囲にわたって変えることが
できるが、多ビニルエーテル化合物(b)は、(a)成
分100重量部に対して一般に5〜150重量部、特に
10〜100重量部の範囲内で使用することが好まし
く、また、光酸発生化合物(c)は、成分(a)と多ビ
ニルエーテル化合物(b)との合計量100重量部に対
して一般に0.1〜40重量部、特に0.2〜20重量
部の範囲内で用いるのが適当である。 Positive-Type Photosensitive Composition The positive-type photosensitive composition used in the present invention comprises the above-mentioned polymer component (a) component, polyvinyl ether compound (b) and photo-acid generating compound (c). The above-mentioned three components are contained as essential components, and the mixing ratio thereof can be varied over a wide range according to the use of the composition, etc., but the poly (vinyl ether) compound (b) is 100 parts by weight of the component (a). It is preferable to use 5 to 150 parts by weight, particularly 10 to 100 parts by weight, relative to the parts, and the photoacid-generating compound (c) is the component (a) and the poly (vinyl ether) compound (b). It is suitable to use in the range of generally 0.1 to 40 parts by weight, particularly 0.2 to 20 parts by weight, based on 100 parts by weight of the total amount.
【0047】上記感光性組成物には必要に応じて増感色
素を配合してもよく、使用しうる増感色素としては、例
えば、フェノチアジン系、アントラセン系、コロネン
系、ベンズアントラセン系、ペリレン系、ピレン系、メ
ロシアニン系、ケトクマリン系等の色素が挙げられる。
これら増感色素の配合量は、成分(a)100重量部に
対して0.1〜10重量部、好ましくは0.3〜5重量
部の範囲内が適当である。If desired, a sensitizing dye may be added to the above-mentioned photosensitive composition. Examples of the sensitizing dye that can be used include phenothiazine-based, anthracene-based, coronene-based, benzanthracene-based, and perylene-based. Examples thereof include pyrene-based, merocyanine-based, and ketocoumarin-based dyes.
An appropriate amount of these sensitizing dyes to be compounded is 0.1 to 10 parts by weight, preferably 0.3 to 5 parts by weight, per 100 parts by weight of component (a).
【0048】また、上記感光性組成物には形成される被
膜に適当な可撓性、非粘着性等を付与するなどの目的
で、フタル酸エステル等の可塑剤、ポリエステル樹脂、
アクリル樹脂等を添加してもよい。それらの添加量は通
常、成分(a)、多ビニルエーテル化合物(b)及び光
酸発生化合物(c)の合計量100重量部に対して50
重量部以下、さらには0.1〜40重量部の範囲である
ことが好ましい。In addition, for the purpose of imparting appropriate flexibility, non-adhesiveness, etc. to the coating film formed in the above-mentioned photosensitive composition, a plasticizer such as phthalate ester, a polyester resin,
You may add acrylic resin etc. The addition amount thereof is usually 50 per 100 parts by weight of the total amount of the component (a), the poly (vinyl ether) compound (b) and the photoacid generating compound (c).
It is preferably not more than 1 part by weight, more preferably 0.1 to 40 parts by weight.
【0049】さらに、上記感光性組成物には必要に応じ
て、流動性調節剤、染料、顔料等の着色剤等を添加して
もよい。Furthermore, if necessary, a fluidity modifier, a dye, a colorant such as a pigment, or the like may be added to the photosensitive composition.
【0050】上記感光性組成物は、以上に述べた各成分
をそのまま又は必要に応じて溶剤中で混合することによ
り調製することができる。その際に使用しうる溶剤は組
成物の各成分を溶解できるものであれば特に制限はな
く、例えば、ケトン系、エステル系、アルコール系、グ
リコール系、グリコールエーテル系、環状エーテル系又
は脂肪族もしくは芳香族炭化水素系溶剤等を挙げること
ができる。これらの溶剤は必要に応じて単独又は2種類
以上を混合して用いることができる。The above-mentioned photosensitive composition can be prepared by mixing the above-mentioned components as they are or in a solvent if necessary. The solvent that can be used in that case is not particularly limited as long as it can dissolve each component of the composition, and examples thereof include ketone-based, ester-based, alcohol-based, glycol-based, glycol ether-based, cyclic ether-based or aliphatic or Examples thereof include aromatic hydrocarbon solvents. These solvents may be used alone or in combination of two or more, if necessary.
【0051】また上記感光性組成物は、重合体である
(a)成分、多ビニルエーテル化合物(b)及び光酸発
生化合物(c)の混合物の合計1kg当たり、混合物中の
カルボキシル基含有量を0.5〜5.0当量とし、カル
ボキシル基を塩基性化合物で中和することによって水中
に溶解又は分散した水性感光性組成物とすることができ
る。中和に用いる塩基性化合物としては、トリエチルア
ミン、ジエチルアミン、ジメチルエタノールアミン、ジ
エタノールアミン等のアミン類;苛性ソーダ、苛性カリ
等の無機アルカリ類等を挙げることができる。これらは
単独でも又は2種以上を混合して用いてもよい。通常、
これらの塩基性化合物はカルボキシル基に対して0.1
〜1.0当量の範囲で使用される。In the above photosensitive composition, the content of the carboxyl group in the mixture is 0 per 1 kg of the total of the mixture of the component (a) which is a polymer, the poly (vinyl ether compound) (b) and the photoacid generating compound (c). The aqueous photosensitive composition can be dissolved or dispersed in water by neutralizing the carboxyl group with a basic compound in an amount of 0.5 to 5.0 equivalents. Examples of the basic compound used for neutralization include amines such as triethylamine, diethylamine, dimethylethanolamine and diethanolamine; inorganic alkalis such as caustic soda and caustic potash. You may use these individually or in mixture of 2 or more types. Normal,
These basic compounds have a carboxyl group of 0.1
Used in the range of to 1.0 equivalent.
【0052】本発明の工程〔2〕において、上記ポジ型
感光性組成物を透明導電層上に塗装し、加熱することに
よって図1(B)に示すようにポジ型感光性被膜層3が
形成される。ポジ型感光性組成物の塗装は、スピンコー
ト法、スプレー法、バーコータ塗装法、印刷法などによ
って、またポジ型感光性組成物がアニオン性などのイオ
ン性水性組成物である場合には電着法によっても行うこ
とができる。In the step [2] of the present invention, the positive photosensitive composition is coated on the transparent conductive layer and heated to form a positive photosensitive coating layer 3 as shown in FIG. 1 (B). To be done. The positive photosensitive composition is coated by a spin coating method, a spray method, a bar coater coating method, a printing method, or the like, and when the positive photosensitive composition is an anionic or other ionic aqueous composition, it is electrodeposited. It can also be done by law.
【0053】ポジ型感光性被膜層の膜厚は、特に限定さ
れるものではないが通常0.5〜10μm である。塗布
後の加熱によって感光性被膜中のカルボキシル基及び/
又はヒドロキシフェニル基とビニルエーテル基との付加
反応が起こり架橋して、被膜は溶剤やアルカリ水溶液に
対して不溶性となる。塗布後の加熱は架橋反応が実質的
に起る温度及び時間条件下、例えば、約60〜約150
℃の温度で約1〜約30分間の条件で行うことができ
る。The thickness of the positive type photosensitive coating layer is not particularly limited, but is usually 0.5 to 10 μm. By heating after coating, carboxyl groups in the photosensitive film and /
Alternatively, an addition reaction between a hydroxyphenyl group and a vinyl ether group occurs and crosslinks, so that the coating becomes insoluble in a solvent or an alkaline aqueous solution. The heating after coating is performed under the temperature and time conditions in which the crosslinking reaction substantially occurs, for example, about 60 to about 150.
It can be carried out at a temperature of ° C for about 1 to about 30 minutes.
【0054】工程〔3〕においては、工程〔2〕で得た
ポジ型感光性被膜層は所望形状に露光される。例えば図
1(C)に示すようにポジ型感光性被膜層3の上に所定
のパターンを有するマスク4を設定し、その上から活性
エネルギー線を露光する。露光方法としてはマスクを用
いる方法以外に、縮小投影露光機、直接描画機等を用い
て活性エネルギー線を画像選択的に照射する方法を用い
てもよい。活性エネルギー線は、感光性組成物に配合さ
れている光酸発生化合物(c)の種類等に応じて選択さ
れるが、例えば、電子線、波長200〜600nmの単色
光線又はそれらの混合光線、レーザー光線等が挙げられ
る。In step [3], the positive photosensitive film layer obtained in step [2] is exposed to a desired shape. For example, as shown in FIG. 1C, a mask 4 having a predetermined pattern is set on the positive photosensitive film layer 3, and active energy rays are exposed from above the mask 4. As the exposure method, other than the method using a mask, a method of selectively irradiating an active energy ray with a reduction projection exposure machine, a direct drawing machine or the like may be used. The active energy ray is selected according to the kind of the photo-acid generating compound (c) contained in the photosensitive composition, and the like. For example, an electron beam, a monochromatic ray having a wavelength of 200 to 600 nm or a mixed ray thereof, A laser beam etc. are mentioned.
【0055】露光部では光酸発生化合物(c)が分解す
ることによって強度の酸が発生し、この酸の触媒作用に
よってポジ型感光性被膜の架橋構造が切断されて露光部
が溶剤やアルカリ水溶液に対して再び可溶性になる。こ
の酸の触媒作用を強めるため必要に応じて露光後、加熱
してもよい。この加熱は、感光性被膜の架橋構造の切断
を促進する温度及び時間条件下、例えば、約60〜約1
50℃の温度で約1〜約30分間の条件で行うことがで
きる。In the exposed area, the photoacid generating compound (c) is decomposed to generate a strong acid, and the catalytic action of this acid breaks the crosslinked structure of the positive photosensitive film, so that the exposed area is exposed to a solvent or an alkaline aqueous solution. Again becomes soluble. In order to enhance the catalytic action of this acid, it may be heated after exposure if necessary. This heating is performed under temperature and time conditions that promote the cleavage of the crosslinked structure of the photosensitive film, for example, about 60 to about 1.
It can be performed at a temperature of 50 ° C. for about 1 to about 30 minutes.
【0056】工程〔3〕においては、上記露光、必要に
応じて加熱後、感光性被膜層を現像液で現像することに
よって、図1(D)に示すように基板上にパターンを形
成し、透明導電層の一部を露出することができる。図1
(D)では、第1の着色が必要な箇所に導電層が露出し
ている形となっている。現像液としては、重合体(a−
1)又は重合体(a−2)を溶解する能力のある液体、
例えば、水溶性有機塩基、例えばアルカノールアミン、
テトラエチルアンモニウムハイドロオキサイド等のヒド
ロキシアンモニウム塩類;無機アルカリ、例えば苛性ソ
ーダ、炭酸ソーダ、メタ珪酸ソーダ等の水溶液を用いる
ことができる。これらの塩基性物質は単独で又は2種類
以上を混合して用いてもよい。現像液中の塩基性物質の
濃度は通常0.05〜10重量%の範囲内であることが
好ましい。また、現像液には必要に応じて有機溶剤を混
合可能な範囲で混合して用いてもよい。In the step [3], after the above exposure and, if necessary, heating, the photosensitive film layer is developed with a developing solution to form a pattern on the substrate as shown in FIG. 1 (D). A part of the transparent conductive layer can be exposed. Figure 1
In (D), the conductive layer is exposed at the location where the first coloring is required. As the developing solution, a polymer (a-
1) or a liquid capable of dissolving the polymer (a-2),
For example, a water-soluble organic base such as an alkanolamine,
Hydroxyammonium salts such as tetraethylammonium hydroxide; inorganic alkalis, for example, aqueous solutions of caustic soda, sodium carbonate, sodium metasilicate and the like can be used. You may use these basic substances individually or in mixture of 2 or more types. The concentration of the basic substance in the developer is usually preferably in the range of 0.05 to 10% by weight. In addition, an organic solvent may be mixed in the developing solution, if necessary, within a range in which it can be mixed.
【0057】現像は、現像液に処理する基板を浸漬した
り、現像液を基板に吹き付けるなどのそれ自体公知の方
法によって行うことができる。パターン形成後、必要に
応じて基板を水洗及び/又は加熱乾燥することができ
る。The development can be carried out by a method known per se, such as immersing the substrate to be treated in a developing solution or spraying the developing solution on the substrate. After forming the pattern, the substrate may be washed with water and / or dried by heating, if necessary.
【0058】工程〔4〕においては、基板上にパターン
を形成することによって露出した透明導電層上に電着に
より、図1(E)に示すように、所望の色の着色部5
(第1着色部、例えば、青)を形成する。In the step [4], as shown in FIG. 1E, the colored portion 5 of a desired color is formed by electrodeposition on the transparent conductive layer exposed by forming a pattern on the substrate.
(First colored portion, for example, blue) is formed.
【0059】この電着に用いる電着塗料の造膜成分とし
ては、通常、合成高分子樹脂が用いられ、この樹脂はア
ニオン系、カチオン系、両性のいずれであってもよい
が、アニオン系のものが特に好ましい。上記合成高分子
樹脂としては、従来公知の種々のもの、例えばアクリル
樹脂、エポキシ樹脂、ウレタン樹脂、ポリブタジエン樹
脂、ポリアミド樹脂、カルボキシル含有ポリブタジエン
樹脂、カルボキシル含有アルキド樹脂等が挙げられる。
この電着塗料は光硬化性又は熱硬化性のいずれであって
もよく、着色部を形成後、必要に応じて、活性エネルギ
ー線照射または加熱することにより、着色部を硬化させ
てもよい。As the film-forming component of the electrodeposition paint used for this electrodeposition, a synthetic polymer resin is usually used, and the resin may be anionic, cationic or amphoteric, but is anionic. Those are particularly preferable. Examples of the synthetic polymer resin include various conventionally known resins such as acrylic resin, epoxy resin, urethane resin, polybutadiene resin, polyamide resin, carboxyl-containing polybutadiene resin, and carboxyl-containing alkyd resin.
This electrocoating material may be either photo-curable or thermo-curable, and after forming the colored portion, the colored portion may be cured by irradiation with active energy rays or heating, if necessary.
【0060】工程〔5〕においては、上記工程〔3〕及
び〔4〕が必要回数繰り返される。すなわち、工程
〔4〕で得られた基板のポジ型感光性被膜層は、工程
〔3〕と同様に所望形状に露光される。例えば図1
(F)に示すようにポジ型感光性被膜層3及び着色部5
の上に所定のパターンを有するマスクを設定し、その上
から活性エネルギー線を露光する。露光後、必要に応じ
て加熱し、次いで現像を行うことによって図1(G)に
示すように第2の着色が必要な箇所の透明導電層を露出
させる。さらに、得られた基板に工程〔4〕と同様に電
着を行うことにより、図1(H)に示すように、所望の
色の着色部6(第2着色部、例えば、赤)を形成する。
必要な着色部の色の数に応じて工程〔3〕及び〔4〕の
繰り返し回数を決めればよい。図1(I)、(J)及び
(K)は、第3の着色部7(第3着色部、例えば、緑)
を形成するための工程〔3〕及び〔4〕の繰り返しを示
す。In step [5], the above steps [3] and [4] are repeated as many times as necessary. That is, the positive photosensitive film layer of the substrate obtained in the step [4] is exposed to a desired shape as in the step [3]. Figure 1
As shown in (F), the positive photosensitive film layer 3 and the colored portion 5
A mask having a predetermined pattern is set on the above, and active energy rays are exposed from the above. After the exposure, the transparent conductive layer is exposed at a portion where the second coloring is required as shown in FIG. 1G by heating as needed and then developing. Further, by performing electrodeposition on the obtained substrate in the same manner as in the step [4], a colored portion 6 (second colored portion, for example, red) of a desired color is formed as shown in FIG. 1 (H). To do.
The number of repetitions of the steps [3] and [4] may be determined according to the number of colors of the colored portion required. 1 (I), (J) and (K) show a third colored portion 7 (third colored portion, eg green).
The steps [3] and [4] for forming the are shown.
【0061】上記工程〔1〕〜〔5〕によって得られた
多色の着色部を有する基板は、さらに必要に応じて、導
電層上の着色部以外の部分に別の着色部(例えば、ブラ
ックマトリックス)を形成してもよい。その場合、まず
残存する感光性被膜層を除去する工程〔6〕が必要であ
る。例えば図1(K)に示される着色部5、6及び7を
溶解させず、残存する感光性被膜層を優先的に又は選択
的に残存する感光性被膜層を除去溶解する除去液を用い
て除去を行うことによって図1(L)に示されるように
残存する感光性被膜層を除去することができる。この場
合、感光性被膜層を除去する前に活性エネルギー線を照
射して強度の酸を発生させ感光性被膜の架橋構造を破壊
してから除去液にて除去してもよい。この場合には、工
程〔3〕で使用した現像液を除去液として用いることも
できる。If necessary, the substrate having multicolored colored portions obtained by the above steps [1] to [5] further has another colored portion (for example, black) on the portion other than the colored portion on the conductive layer. Matrix) may be formed. In that case, first, the step [6] of removing the remaining photosensitive coating layer is required. For example, by using a remover which does not dissolve the colored portions 5, 6 and 7 shown in FIG. 1 (K) and preferentially or selectively removes the remaining photosensitive coating layer to dissolve the remaining photosensitive coating layer. By performing the removal, the remaining photosensitive coating layer can be removed as shown in FIG. In this case, before removing the photosensitive film layer, irradiation with an active energy ray may be applied to generate a strong acid to destroy the crosslinked structure of the photosensitive film, and then the solution may be removed with a removing solution. In this case, the developing solution used in step [3] can be used as the removing solution.
【0062】上記工程〔6〕の後、露出させた導電層上
に別の着色部(例えば、ブラックマトリックス)を形成
することによって、例えば図1(M)に示されるような
カラーフィルタを得ることができる。導電層上にブラッ
クマトリックスなどの別の着色部を形成する方法として
は、着色塗料を、電着塗装法や、例えばスピンコート
法、スプレー法、バーコータ塗装法、印刷法などの塗布
法などの塗装方法によって塗装し、ついで硬化させる方
法;導電層上に金属層をメッキ法によって形成する方
法;露出させた導電層を酸化又は還元によって着色する
方法などを挙げることができる。After the above step [6], another colored portion (eg, black matrix) is formed on the exposed conductive layer to obtain a color filter as shown in FIG. 1M, for example. You can As a method for forming another colored portion such as a black matrix on the conductive layer, a colored paint is applied by an electrodeposition coating method or a coating method such as a spin coating method, a spray method, a bar coater coating method, or a printing method. Examples thereof include a method of coating by a method and then curing; a method of forming a metal layer on the conductive layer by a plating method; a method of coloring the exposed conductive layer by oxidation or reduction.
【0063】[0063]
【発明の効果】本発明のカラーフィルタの製造方法によ
れば、簡単な生産工程で、精度が高く着色不良がなく信
頼性が高い、しかも導電層の形状に影響されることなく
任意の配列形状の着色パターンを有するカラーフィルタ
を製造することができる。According to the method of manufacturing a color filter of the present invention, a simple production process provides high accuracy, no coloring defects, high reliability, and an arbitrary array shape without being affected by the shape of the conductive layer. It is possible to manufacture a color filter having a colored pattern of.
【0064】[0064]
【実施例】以下、実施例により本発明をさらに具体的に
説明する。なお、「部」及び「%」は重量基準である。EXAMPLES The present invention will be described in more detail below with reference to examples. In addition, "part" and "%" are based on weight.
【0065】製造例1:カルボキシル基及びヒドロキシ
フェニル基含有重合体(a−1−1)の合成 o−ヒドロキシ安息香酸600部、o−クレゾール90
0部、30%フォルマリン1,145部、脱イオン水1
30部及び蓚酸6.5部をフラスコに入れ60分加熱還
流させた。しかる後15%塩酸を13.5部加え40分
加熱還流させた。次いで400部の約15℃の脱イオン
水を加え、内容物を約50℃に保ち樹脂を沈澱させた。
更に400部の脱イオン水を加え50℃で樹脂を洗浄し
た後、水層を除去し、更に同様な洗浄操作を3度繰り返
した後、減圧下に約120℃で乾燥してノボラックフェ
ノール樹脂〔重合体(a−1−1)〕を得た。この樹脂
は分子量約650、カルボキシル基含有量2.8モル/k
g 重合体、ヒドロキシフェニル基含有量5.4モル/kg
重合体であった。 Production Example 1 : Synthesis of carboxyl group- and hydroxyphenyl group-containing polymer (a-1-1) 600 parts of o-hydroxybenzoic acid, 90 parts of o-cresol
0 parts, 30% formalin 1,145 parts, deionized water 1
30 parts and 6.5 parts of oxalic acid were placed in a flask and heated under reflux for 60 minutes. Thereafter, 13.5 parts of 15% hydrochloric acid was added and the mixture was heated under reflux for 40 minutes. Then 400 parts of deionized water at about 15 ° C was added to keep the contents at about 50 ° C to precipitate the resin.
After further adding 400 parts of deionized water to wash the resin at 50 ° C., the water layer was removed, and the same washing operation was repeated 3 times, followed by drying under reduced pressure at about 120 ° C. Polymer (a-1-1)] was obtained. This resin has a molecular weight of about 650 and a carboxyl group content of 2.8 mol / k.
g Polymer, hydroxyphenyl group content 5.4mol / kg
It was a polymer.
【0066】製造例2:カルボキシル基及びヒドロキシ
フェニル基含有重合体(a−1−2)の合成 テトラヒドロフラン200部、p−ヒドロキシスチレン
65部、n−ブチルアクリレート28部、アクリル酸1
1部及びアゾビスイソブチロニトリル3部をフラスコに
入れ容器内を窒素置換後撹拌しつつ100℃で2時間加
熱した。生成物を1,500部のトルエン中に注ぎ込み
生成した沈澱を分離し、300部のアセトンに溶解した
後、再び1,500部のトルエン中に注ぎ込んだ。沈澱
を60℃で減圧乾燥して重合体(a−1−2)を得た。
この重合体は分子量約5,200、組成比はアクリル酸
/n−ブチルアクリレート/p−ヒドロキシスチレン=
17/37/50(重量比)であり、カルボキシル基含
有量1.8モル/kg 重合体、ヒドロキシフェニル基含有
量4.6モル/kg 重合体であった。 Production Example 2 : Synthesis of carboxyl group- and hydroxyphenyl group-containing polymer (a-1-2) 200 parts of tetrahydrofuran, 65 parts of p-hydroxystyrene, 28 parts of n-butyl acrylate, 1 acrylic acid
1 part and 3 parts of azobisisobutyronitrile were placed in a flask and the inside of the container was replaced with nitrogen, and then heated at 100 ° C. for 2 hours while stirring. The product was poured into 1,500 parts of toluene, the formed precipitate was separated, dissolved in 300 parts of acetone, and then poured again into 1,500 parts of toluene. The precipitate was dried under reduced pressure at 60 ° C to obtain a polymer (a-1-2).
This polymer has a molecular weight of about 5,200, and the composition ratio is acrylic acid / n-butyl acrylate / p-hydroxystyrene =
The ratio was 17/37/50 (weight ratio), and the carboxyl group content was 1.8 mol / kg polymer and the hydroxyphenyl group content was 4.6 mol / kg polymer.
【0067】 製造例3:カルボキシル基含有重合体(a−2−1)の合成 アクリル酸 216部 スチレン 500部 n−ブチルメタアクリレート 284部 アゾビスイソブチロニトリル(AIBN) 50部 よりなる混合物を、80℃に加熱し撹拌されているメチ
ルイソブチルケトン600部中に2時間を要して滴下し
た後、その温度に更に2時間保って重合体(a−2−
1)の樹脂溶液を得た。この樹脂溶液は固形分約62.
5%であり、固形分中、カルボキシル基含有量3モル/k
g 、芳香族環含有量34.6%であった。 Production Example 3 : Synthesis of carboxyl group-containing polymer (a-2-1) A mixture of acrylic acid 216 parts styrene 500 parts n-butyl methacrylate 284 parts azobisisobutyronitrile (AIBN) 50 parts was prepared. After adding dropwise to 600 parts of methyl isobutyl ketone heated to 80 ° C. and stirring for 2 hours, the temperature of the polymer (a-2-
A resin solution of 1) was obtained. This resin solution has a solid content of about 62.
5%, the content of carboxyl group in the solid content is 3 mol / k
The content was g and the aromatic ring content was 34.6%.
【0068】 製造例4:カルボキシル基含有重合体(a−2−2)の合成 アクリル酸 288部 スチレン 300部 n−ブチルアクリレート 255部 2−ヒドロキシエチルアクリレート 157部 t−ブチルパーオキシベンゾエート 100部 よりなる混合物を110℃に加熱し、撹拌している2−
ブトキシエタノール1,000部中に2時間を要して滴
下した後、その温度に更に2時間保って重合体(a−2
−2)の樹脂溶液を得た。この樹脂溶液は固形分約50
%であり、固形分中、カルボキシル基含有量4モル/kg
、芳香族環含有量20.7%であった。 Production Example 4 : Synthesis of carboxyl group-containing polymer (a-2-2) Acrylic acid 288 parts Styrene 300 parts n-Butyl acrylate 255 parts 2-Hydroxyethyl acrylate 157 parts t-Butyl peroxybenzoate 100 parts The resulting mixture is heated to 110 ° C. and stirred 2-
After dropping into 1,000 parts of butoxyethanol over 2 hours, the temperature was maintained for 2 hours, and the polymer (a-2
A resin solution of -2) was obtained. This resin solution has a solid content of about 50
%, And the carboxyl group content in the solid content is 4 mol / kg
The aromatic ring content was 20.7%.
【0069】製造例5:ヒドロキシフェニル基含有重合
体(a−3−1)の合成 o−クレゾール1,490部、30%フォルマリン1,
145部、脱イオン水130部、蓚酸6.5部をフラス
コに入れ60分加熱還流させた。次いで15%塩酸を1
3.5部加え40分加熱還流させた。次いで400部の
約15℃の脱イオン水を加え内容物を約75℃に保ち樹
脂を沈澱させた。次いで35%水酸化ナトリウム溶液を
加え中和後水層を除去し、更に400部の脱イオン水を
加え75℃で樹脂を洗浄した後水層を除去、更に同様な
洗浄操作を2度繰り返した後、減圧下に約120℃で乾
燥してノボラックフェノール樹脂〔重合体(a−3−
1)〕を得た。この樹脂は分子量約600であった。 Production Example 5 : Synthesis of hydroxyphenyl group-containing polymer (a-3-1) o-cresol 1,490 parts, 30% formalin 1,
145 parts, deionized water 130 parts, and oxalic acid 6.5 parts were put into a flask and heated under reflux for 60 minutes. Then add 15% hydrochloric acid to 1
3.5 parts was added and the mixture was heated to reflux for 40 minutes. Then 400 parts of deionized water at about 15 ° C was added to keep the contents at about 75 ° C to precipitate the resin. Then, a 35% sodium hydroxide solution was added to neutralize and the water layer was removed, 400 parts of deionized water was further added, the resin was washed at 75 ° C., the water layer was removed, and the same washing operation was repeated twice. Then, it is dried under reduced pressure at about 120 ° C. and a novolac phenol resin [polymer (a-3-
1)] was obtained. This resin had a molecular weight of about 600.
【0070】製造例6:ヒドロキシフェニル基含有重合
体(a−3−2)の合成 テトラヒドロフラン60部、p−ヒドロキシスチレン2
1部、n−ブチルアクリレート9部、アゾビスイソブチ
ロニトリル3部をフラスコに入れ容器内を窒素置換後撹
拌しつつ100℃で2時間加熱した。生成物を700ml
のトルエン中に注ぎ込み生成した沈澱を分離、100ml
のアセトンに溶解した後再び700mlをトルエン中に注
ぎ込んだ。沈澱を60℃で減圧乾燥して重合体(a−3
−2)を得た。この重合体は分子量約14,000であ
った。 Production Example 6 : Synthesis of hydroxyphenyl group-containing polymer (a-3-2) 60 parts of tetrahydrofuran, p-hydroxystyrene 2
1 part, n-butyl acrylate 9 parts, and azobisisobutyronitrile 3 parts were put into a flask, and the inside of the container was replaced with nitrogen and heated at 100 ° C. for 2 hours while stirring. 700 ml of product
Was poured into toluene and the precipitate formed was separated, 100 ml
After dissolving in acetone, 700 ml was poured again into toluene. The precipitate was dried under reduced pressure at 60 ° C. to obtain the polymer (a-3
-2) was obtained. This polymer had a molecular weight of about 14,000.
【0071】製造例7:多ビニルエーテル化合物(b−
1)の合成 ビスフェノールA45.6部、2−クロロエチルビニル
エーテル80部、トルエン100部をフラスコに入れ、
窒素置換後20部の水酸化ナトリウムを投入し、80℃
で30分加熱した。その後4.56部のテトラブチルア
ンモニウムブロマイドを20部の2−クロロエチルビニ
ルエーテルに溶解した溶液を投入し95℃で5時間加熱
反応させた。反応物を3回脱イオン水で洗浄した後、油
層を分離した。油層を蒸留して未反応2−クロロエチル
ビニルエーテル及びトルエンを除去して多ビニルエーテ
ル化合物(b−1)を得た。この化合物は一分子中にビ
ニルエーテル基を2個含んでいた。 Production Example 7 : Polyvinyl ether compound (b-
Synthesis of 1) Bisphenol A 45.6 parts, 2-chloroethyl vinyl ether 80 parts, toluene 100 parts were put in a flask,
After purging with nitrogen, add 20 parts of sodium hydroxide, and the temperature is 80 ° C.
Heated for 30 minutes. Then, a solution prepared by dissolving 4.56 parts of tetrabutylammonium bromide in 20 parts of 2-chloroethyl vinyl ether was added, and the mixture was heated and reacted at 95 ° C. for 5 hours. After washing the reaction three times with deionized water, the oil layer was separated. The oil layer was distilled to remove unreacted 2-chloroethyl vinyl ether and toluene to obtain a polyvinyl ether compound (b-1). This compound contained two vinyl ether groups in one molecule.
【0072】製造例8:多ビニルエーテル化合物(b−
2)の合成 o−クレゾール1,490部、30%フォルマリン1,
145部、脱イオン水130部、蓚酸6.5部をフラス
コに入れ60分加熱還流させた。次いで15%塩酸を1
3.5部加え40分加熱還流させた。次いで400部の
約15℃の脱イオン水を加え内容物を約75℃に保ち樹
脂を沈澱させた。次いで35%水酸化ナトリウム溶液を
加え中和後水層を除去し、更に400部の脱イオン水を
加え75℃で樹脂を洗浄した後水層を除去、更に同様な
洗浄操作を2度繰り返した後減圧下に約120℃で乾燥
してノボラックフェノール樹脂を得た。分子量約600
であった。製造例7においてビスフェノールA45.6
部の代わりに当該樹脂を15部使用する以外は製造例7
と全く同様にして多ビニルエーテル化合物(b−2)を
得た。この化合物は一分子中にビニルエーテル基を平均
で約3.5個含んでいた。 Production Example 8 : Polyvinyl ether compound (b-
Synthesis of 2) o-cresol 1,490 parts, 30% formalin 1,
145 parts, deionized water 130 parts, and oxalic acid 6.5 parts were put into a flask and heated under reflux for 60 minutes. Then add 15% hydrochloric acid to 1
3.5 parts was added and the mixture was heated to reflux for 40 minutes. Then 400 parts of deionized water at about 15 ° C was added to keep the contents at about 75 ° C to precipitate the resin. Then, a 35% sodium hydroxide solution was added to neutralize and the water layer was removed, 400 parts of deionized water was further added, the resin was washed at 75 ° C., the water layer was removed, and the same washing operation was repeated twice. Then, it was dried under reduced pressure at about 120 ° C. to obtain a novolac phenol resin. Molecular weight about 600
Met. Bisphenol A 45.6 in Production Example 7
Production Example 7 except that 15 parts of the resin is used instead of the part
A poly (vinyl ether) compound (b-2) was obtained in exactly the same manner as. This compound contained an average of about 3.5 vinyl ether groups in one molecule.
【0073】ポジ型感光性組成物の製造製造例9 重合体(a−1−1) 100部 多ビニルエーテル化合物(b−1) 60部 光酸発生化合物(c−1)(注1) 10部 上記の混合物をジエチレングリコールジメチルエーテル
に溶解して固形分20%のポジ型感光性組成物(P−
1)を得た。 (注1)光酸発生化合物(c−1):下記式で表わされ
る化合物である。Production of Positive Photosensitive Composition Production Example 9 Polymer (a-1-1) 100 parts Polyvinyl ether compound (b-1) 60 parts Photoacid generating compound (c-1) (Note 1) 10 parts The above mixture was dissolved in diethylene glycol dimethyl ether to give a positive photosensitive composition (P-
1) was obtained. (Note 1) Photoacid generating compound (c-1): a compound represented by the following formula.
【0074】[0074]
【化9】 [Chemical 9]
【0075】製造例10 重合体(a−2−1)溶液(固形分62.5%) 80部 重合体(a−3−1) 65部 多ビニルエーテル化合物(b−1) 60部 光酸発生化合物(c−1) 10部 上記の混合物をジエチレングリコールジメチルエーテル
に溶解して固形分20%のポジ型感光性組成物(P−
2)を得た。 Production Example 10 Polymer (a-2-1) solution (solid content 62.5%) 80 parts Polymer (a-3-1) 65 parts Polyvinyl ether compound (b-1) 60 parts Photo acid generation Compound (c-1) 10 parts The above mixture is dissolved in diethylene glycol dimethyl ether to give a positive photosensitive composition (P-
2) was obtained.
【0076】製造例11 重合体(a−1−2) 100部 多ビニルエーテル化合物(b−2) 20部 光酸発生化合物(c−2)(注2) 7.5部 増感色素(注3) 1部 トリエチルアミン 6部 上記混合物を2−ブトキシエタノール150部、ベンジ
ルアルコール25部の混合溶剤に溶解した後、この溶液
を撹拌している脱イオン水547部に徐々に加えて固形
分約15%の水分散液であるポジ型感光性組成物(P−
3)を得た。 (注2)光酸発生化合物(c−2):下記式で表わされ
る化合物である。 Production Example 11 Polymer (a-1-2) 100 parts Polyvinyl ether compound (b-2) 20 parts Photoacid generating compound (c-2) (Note 2) 7.5 parts Sensitizing dye (Note 3) 1 part Triethylamine 6 parts The above mixture was dissolved in a mixed solvent of 150 parts of 2-butoxyethanol and 25 parts of benzyl alcohol, and this solution was gradually added to 547 parts of deionized water under stirring to obtain a solid content of about 15%. Positive photosensitive composition (P-
3) was obtained. (Note 2) Photoacid generating compound (c-2): a compound represented by the following formula.
【0077】[0077]
【化10】 (注3)増感色素:下記式で表わされる化合物である。[Chemical 10] (Note 3) Sensitizing dye: A compound represented by the following formula.
【0078】[0078]
【化11】 [Chemical 11]
【0079】製造例12 重合体(a−2−2)溶液(固形分50%) 200部 重合体(a−3−2) 50部 多ビニルエーテル化合物(b−2) 25部 光酸発生化合物(c−2) 8部 トリエチルアミン 15部 上記混合物を2−ブトキシエタノール200部、ベンジ
ルアルコール40部に溶解した後、この溶液を、撹拌し
ている脱イオン水688部に徐々に加えて固形分約15
%の水分散液であるポジ型感光性組成物(P−4)を得
た。 Production Example 12 Polymer (a-2-2) solution (solid content 50%) 200 parts Polymer (a-3-2) 50 parts Polyvinyl ether compound (b-2) 25 parts Photo acid generating compound ( c-2) 8 parts Triethylamine 15 parts After dissolving the above mixture in 200 parts of 2-butoxyethanol and 40 parts of benzyl alcohol, this solution was gradually added to 688 parts of stirring deionized water to obtain a solid content of about 15 parts.
% Of an aqueous dispersion to obtain a positive photosensitive composition (P-4).
【0080】着色部形成用電着塗料の製造製造例13 モノマー組成がスチレン/メチルメタクリレート/n−
ブチルアクリレート/n−ブトキシメチルアクリルアミ
ド/2−ヒドロキシエチルアクリレート/アクリル酸=
10/34/28.5/10/12/5.5(重量比)
である重量平均分子量15,000のアクリル樹脂がイ
ソプロピルアルコール/n−ブチルアルコール/エチレ
ングリコールモノブチルエーテル/プロピレングリコー
ルモノメチルエーテル=20/25/15/40(重量
比)の混合溶剤中に溶解してなる固形分51%の樹脂溶
液100部にプロピレングリコールモノメチルエーテル
10部及びトリエチルアミン2.7部(中和当量0.6
9に相当する量)を混合した。この混合液を、撹拌して
いる脱イオン水中に徐々に加えて固形分8.4%のアニ
オン性電着樹脂組成物を得た。この電着樹脂組成物98
4部に対して青色顔料フタロシアニンブルー16部を配
合し、ペイントシェーカーで顔料分散を行ない、青色の
アニオン電着浴液を得た。 Production Example 13 of electrodeposition coating material for forming colored portion Production Example 13 Monomer composition is styrene / methyl methacrylate / n-
Butyl acrylate / n-butoxymethyl acrylamide / 2-hydroxyethyl acrylate / acrylic acid =
10/34 / 28.5 / 10/12 / 5.5 (weight ratio)
Acrylic resin having a weight average molecular weight of 15,000 is dissolved in a mixed solvent of isopropyl alcohol / n-butyl alcohol / ethylene glycol monobutyl ether / propylene glycol monomethyl ether = 20/25/15/40 (weight ratio). To 100 parts of a resin solution having a solid content of 51%, 10 parts of propylene glycol monomethyl ether and 2.7 parts of triethylamine (neutralization equivalent 0.6
(Corresponding to 9). This mixed solution was gradually added to stirring deionized water to obtain an anionic electrodeposition resin composition having a solid content of 8.4%. This electrodeposition resin composition 98
16 parts of a blue pigment phthalocyanine blue was mixed with 4 parts of the mixture, and the pigment was dispersed with a paint shaker to obtain a blue anion electrodeposition bath solution.
【0081】製造例14〜16 製造例13において、電着樹脂組成物と顔料との配合を
下記表1に示すとおりとする以外は製造例13と同様に
行ない、赤色、緑色、黒色である各色のアニオン電着浴
液を得た。表1中における配合量は重量部表示とした。Production Examples 14 to 16 Production Example 13 was repeated in the same manner as in Production Example 13 except that the electrodeposition resin composition and the pigment were mixed as shown in Table 1 below, and each color was red, green or black. To obtain an anion electrodeposition bath solution. The blending amounts in Table 1 are shown in parts by weight.
【0082】[0082]
【表1】 [Table 1]
【0083】実施例1 ガラス基板1上に、透明導電層2であるITO(酸化イ
ンジウム錫)化合物を形成した基板〔図1(A)〕の透
明導電層2上に、製造例9で得たポジ型感光性組成物
(P−1)をスピンナーにて塗布し、90℃で10分間
加熱乾燥して膜厚約2ミクロンの架橋したポジ型感光性
被膜層3を形成した〔図1(B)〕。ついでポジ型感光
性被膜層3上に所定のパターンを有するマスク4を密着
させ〔図1(C)〕、マスク4を介して超高圧水銀ラン
プにて露光量20mj/cm2となるように露光し、更に10
0℃で3分間加熱した後、濃度0.75%のテトラメチ
ルアンモニウムヒドロオキサイド水溶液であるアルカリ
現像液で現像すると露光部は塩を形成して溶出し、透明
導電層2の表面を露出させた〔図1(D)〕。Example 1 Obtained in Production Example 9 on the transparent conductive layer 2 of the substrate [FIG. 1 (A)] in which the ITO (indium tin oxide) compound which is the transparent conductive layer 2 was formed on the glass substrate 1. The positive photosensitive composition (P-1) was applied with a spinner and dried by heating at 90 ° C. for 10 minutes to form a crosslinked positive photosensitive coating layer 3 having a film thickness of about 2 μm [FIG. 1 (B )]. Then, a mask 4 having a predetermined pattern is brought into close contact with the positive type photosensitive coating layer 3 [FIG. 1 (C)] and exposed through a mask 4 with an ultra-high pressure mercury lamp to an exposure amount of 20 mj / cm 2. And 10 more
After heating at 0 ° C. for 3 minutes and developing with an alkaline developer which is an aqueous solution of tetramethylammonium hydroxide having a concentration of 0.75%, the exposed portion forms a salt and is eluted to expose the surface of the transparent conductive layer 2. [FIG. 1 (D)].
【0084】この露出箇所を有する基板を、前記製造例
13で得た青色のアニオン電着浴液中に浸漬し、透明導
電層2を陽極として5ボルトの直流電圧を30秒間印加
した後、基板を引上げ十分に水洗した。感光性被膜層の
ある箇所には電着膜は形成されず、透明導電層が露出し
た箇所には水洗で洗い流されない電着膜が形成された。
水洗後、80℃で10分間加熱乾燥して、透明導電層が
露出していた箇所に透明な青色の高分子膜である第1着
色部5を形成した〔図1(E)〕。The substrate having this exposed portion was dipped in the blue anion electrodeposition bath solution obtained in Production Example 13, and a DC voltage of 5 V was applied for 30 seconds using the transparent conductive layer 2 as an anode. Was thoroughly washed with water. No electrodeposition film was formed at the location where the photosensitive coating layer was present, and an electrodeposition film that was not washed away with water was formed at the location where the transparent conductive layer was exposed.
After washing with water, it was heated and dried at 80 ° C. for 10 minutes to form the first colored portion 5 which was a transparent blue polymer film on the exposed portion of the transparent conductive layer [FIG. 1 (E)].
【0085】ついでこの基板上にマスク4のパターンを
ずらしたマスクを密着させ、マスクを介して上記と同様
に超高圧水銀ランプで露光し、更に100℃で3分間加
熱した後、上記と同様のアルカリ現像液で現像して透明
導電層2の表面を露出させた〔図1(G)〕。この基板
を前記製造例14で得た赤色のアニオン電着浴液中に浸
漬し、前記と同様に通電、水洗、加熱乾燥を行うことに
より透明導電層が露出していた箇所に透明な赤色の高分
子膜である第2着色部6を形成した〔図1(H)〕。Then, a mask having a shifted pattern of the mask 4 was brought into close contact with this substrate, exposed through the mask with an ultra-high pressure mercury lamp in the same manner as above, and further heated at 100 ° C. for 3 minutes, and thereafter, the same as above. The surface of the transparent conductive layer 2 was exposed by developing with an alkaline developer [FIG. 1 (G)]. This substrate was dipped in the red anion electrodeposition bath solution obtained in Production Example 14 above, followed by conducting current, washing with water, and drying by heating in the same manner as above to obtain a transparent red layer at a location where the transparent conductive layer was exposed. The second colored portion 6 which is a polymer film was formed [FIG. 1 (H)].
【0086】さらにこの基板上にマスク4のパターンを
ずらしたマスクを密着させ、マスクを介して上記と同様
に超高圧水銀ランプで露光し、更に100℃で3分間加
熱した後、上記と同様のアルカリ現像液で現像して透明
導電層2の表面を露出させた〔図1(J)〕。この基板
を前記製造例15で得た緑色のアニオン電着浴液中に浸
漬し、前記と同様に通電、水洗、加熱乾燥を行うことに
より透明導電層が露出していた箇所に透明な緑色の高分
子膜である第3着色部7を形成した〔図1(K)〕。Further, a mask in which the pattern of the mask 4 was shifted was brought into close contact with this substrate, exposed through the mask with an ultra-high pressure mercury lamp in the same manner as above, and further heated at 100 ° C. for 3 minutes, and then the same as above. The surface of the transparent conductive layer 2 was exposed by developing with an alkaline developer [FIG. 1 (J)]. This substrate was immersed in the green anion electrodeposition bath solution obtained in Production Example 15 above, followed by conducting electricity, washing with water, and drying by heating in the same manner as above, whereby a transparent green layer was formed at the location where the transparent conductive layer was exposed. A third colored portion 7 which is a polymer film was formed [FIG. 1 (K)].
【0087】ついで残りの感光性被膜と青、赤、緑の着
色部の形成された基板全面に超高圧水銀ランプにて露光
量20mj/cm2となるように露光し、更に100℃で3分
間加熱乾燥した後、濃度1.25%の炭酸ナトリウム水
溶液である除去液で溶出することにより、青、赤、緑の
着色部を残して感光性被膜部のみを溶出させて透明導電
層2の表面を露出させた〔図1(L)〕後、140℃で
10分間加熱乾燥を行うことによりカラーフィルタを得
た。各着色部における着色膜の膜厚は約2ミクロンであ
った。得られたカラーフィルタは、パターン精度が高
く、着色不良がなく、信頼性の高いものであった。Then, the entire surface of the substrate on which the remaining photosensitive film and the colored portions of blue, red and green are formed is exposed to an exposure amount of 20 mj / cm 2 with an ultra-high pressure mercury lamp and further exposed at 100 ° C. for 3 minutes. After being dried by heating, by elution with a removing solution which is a sodium carbonate aqueous solution having a concentration of 1.25%, only the photosensitive film portion is eluted while leaving the colored portions of blue, red and green, and the surface of the transparent conductive layer 2 is removed. Was exposed [FIG. 1 (L)], and then heat-dried at 140 ° C. for 10 minutes to obtain a color filter. The thickness of the colored film in each colored portion was about 2 μm. The obtained color filter had high pattern accuracy, no coloring defects, and high reliability.
【0088】実施例2 実施例1における、青、赤、緑の着色部を残して感光性
被膜部のみを溶出させて透明導電層2の表面を露出させ
た基板〔図1(L)〕を、前記製造例16で得た黒色の
アニオン電着浴液中に浸漬し、透明導電層2を陽極とし
て3ボルトの直流電圧を20秒間印加した後、基板を引
上げ、水洗し、140℃で10分間加熱乾燥を行うこと
により透明導電層が露出していた箇所に別の着色部8
(ブラックマトリックス)を形成し、且つ青、赤、緑の
各着色部も十分に硬化させてカラーフィルタを得た〔図
1(M)〕。各着色部における着色膜の膜厚は約2ミク
ロンであった。得られたカラーフィルタは、パターン精
度が高く、着色不良がなく、信頼性の高いものであっ
た。Example 2 A substrate [FIG. 1 (L)] in which the surface of the transparent conductive layer 2 was exposed by eluting only the photosensitive film portion while leaving the blue, red and green colored portions in Example 1 The sample was immersed in the black anion electrodeposition bath solution obtained in Preparation Example 16, a DC voltage of 3 V was applied for 20 seconds using the transparent conductive layer 2 as an anode, and then the substrate was pulled up and washed with water at 140 ° C. for 10 seconds. Another colored portion 8 is formed on the exposed portion of the transparent conductive layer by heating and drying for 8 minutes.
(Black matrix) was formed, and each colored portion of blue, red and green was sufficiently cured to obtain a color filter [FIG. 1 (M)]. The thickness of the colored film in each colored portion was about 2 μm. The obtained color filter had high pattern accuracy, no coloring defects, and high reliability.
【0089】実施例3 実施例2において、ポジ型感光性組成物(P−1)のか
わりに製造例10で得たポジ型感光性組成物(P−2)
を使用する以外は実施例2と同様に行いカラーフィルタ
を得た。このカラーフィルタの各着色部における着色膜
の膜厚は約2ミクロンであった。また得られたカラーフ
ィルタは、パターン精度が高く、着色不良がなく、信頼
性の高いものであった。Example 3 In Example 2, instead of the positive photosensitive composition (P-1), the positive photosensitive composition (P-2) obtained in Production Example 10 was used.
A color filter was obtained in the same manner as in Example 2 except that was used. The thickness of the colored film in each colored portion of this color filter was about 2 microns. Further, the obtained color filter had high pattern accuracy, no coloring defects, and high reliability.
【0090】実施例4 ガラス基板1上に透明導電層2であるITO(酸化イン
ジウム錫)化合物を形成した基板〔図1(A)〕を、製
造例11で得たポジ型感光性組成物(P−3)である電
着浴中に浸漬し、透明導電層2を陽極として対極との間
に電流密度50mA/cm2の直流を1分間印加した後、基板
を引上げ十分に水洗し、ついで100℃で10分間加熱
乾燥して膜厚約3ミクロンの架橋したポジ型感光性被膜
層3を形成した〔図1(B)〕。このポジ型感光性被膜
層を有する基板を用いて、露光をアルゴンレーザーの波
長488nmの光で実施例2と同様のパターンが得られる
ように直描法にて露光量5mj/cm2となるように行う以外
は実施例2と同様に行い、青、赤、緑、及び黒色(ブラ
ックマトリックス)の着色部を有するカラーフィルタを
得た。このカラーフィルタの各着色部における着色膜の
膜厚は約2ミクロンであった。また得られたカラーフィ
ルタはパターン精度が高く、着色不良がなく、信頼性の
高いものであった。Example 4 A substrate (FIG. 1A) in which an ITO (indium tin oxide) compound, which is a transparent conductive layer 2, was formed on a glass substrate 1 was used as a positive photosensitive composition ( P-3) is immersed in the electrodeposition bath, a direct current having a current density of 50 mA / cm 2 is applied between the transparent conductive layer 2 as an anode and the counter electrode for 1 minute, and then the substrate is pulled up and washed sufficiently with water, It was heated and dried at 100 ° C. for 10 minutes to form a crosslinked positive photosensitive film layer 3 having a film thickness of about 3 μm [FIG. 1 (B)]. Using the substrate having this positive type photosensitive coating layer, the exposure amount was 5 mj / cm 2 by the direct writing method so that the same pattern as that in Example 2 could be obtained by the light of the wavelength of 488 nm of the argon laser. The same procedure as in Example 2 was carried out except that the procedure was performed to obtain a color filter having blue, red, green, and black (black matrix) colored portions. The thickness of the colored film in each colored portion of this color filter was about 2 microns. Further, the obtained color filter had high pattern accuracy, no coloring defects, and high reliability.
【0091】実施例5 実施例4において、ポジ型感光性組成物(P−3)のか
わりに製造例12で得たポジ型感光性組成物(P−4)
を電着浴として使用する以外は実施例1と同様に行いカ
ラーフィルタを得た。このカラーフィルタの各着色部に
おける着色膜の膜厚は約2ミクロンであった。また得ら
れたカラーフィルタはパターン精度が高く、着色不良が
なく、信頼性の高いものであった。Example 5 In Example 4, instead of the positive photosensitive composition (P-3), the positive photosensitive composition (P-4) obtained in Production Example 12 was used.
A color filter was obtained in the same manner as in Example 1 except that was used as the electrodeposition bath. The thickness of the colored film in each colored portion of this color filter was about 2 microns. Further, the obtained color filter had high pattern accuracy, no coloring defects, and high reliability.
【0092】実施例6 実施例1における、青、赤、緑の着色部を残して感光性
被膜部のみを溶出させて透明導電層2の表面を露出させ
た基板〔図1(L)〕に、市販の黒色ネガ型レジストを
スピンコート法を用いて、基板1の着色部が形成された
面に塗布し乾燥させた。ついで基板1のガラス面側から
高圧水銀ランプを用いて露光し、黒色レジスト用現像液
を用いて現像した後、140℃で10分間加熱乾燥を行
った。これによって青、赤、緑の着色部の隙間に黒色の
着色部(ブラックマトリックス)が形成されたカラーフ
ィルタ〔図1(M)〕が得られた。このカラーフィルタ
の各着色部における着色膜の膜厚は約2ミクロンであっ
た。また得られたカラーフィルタはパターン精度が高
く、着色不良がなく、信頼性の高いものであった。Example 6 A substrate (FIG. 1 (L)) in which the surface of the transparent conductive layer 2 was exposed by eluting only the photosensitive film portion while leaving the colored portions of blue, red and green in Example 1 A commercially available black negative resist was applied to the surface of the substrate 1 on which the colored portion was formed by a spin coating method and dried. Then, the glass surface side of the substrate 1 was exposed using a high-pressure mercury lamp, developed using a black resist developing solution, and then heat-dried at 140 ° C. for 10 minutes. As a result, a color filter in which black colored portions (black matrix) were formed in the spaces between the blue, red, and green colored portions [FIG. 1 (M)] was obtained. The thickness of the colored film in each colored portion of this color filter was about 2 microns. Further, the obtained color filter had high pattern accuracy, no coloring defects, and high reliability.
【0093】実施例7 実施例1における、青、赤、緑の着色部を残して感光性
被膜部のみを溶出させて透明導電層2の表面を露出させ
た基板〔図1(L)〕を陰極として、メッキ浴1リット
ル当たり、無水クロム酸400g、水酸化ナトリウム6
0g、炭酸バリウム7.5g、フッ化ケイ素酸1gを含
むクロムメッキ浴中に浸漬し、対極との間に5Vの直流
電圧を20秒間印加して、露出していた透明導電層上に
クロムメッキを形成してカラーフィルタを得た。得られ
たカラーフィルタはパターン精度が高く、着色不良がな
く、信頼性の高いものであった。Example 7 The substrate [FIG. 1 (L)] in Example 1 in which only the photosensitive film portion was eluted leaving the blue, red, and green colored portions to expose the surface of the transparent conductive layer 2 [FIG. 1 (L)] As a cathode, 400 g of chromic anhydride and 6 parts of sodium hydroxide per liter of plating bath
Immersion in a chrome plating bath containing 0 g, barium carbonate 7.5 g, and fluorosilicic acid 1 g, and applying a DC voltage of 5 V for 20 seconds between the counter electrode and chrome plating on the exposed transparent conductive layer. Was formed to obtain a color filter. The obtained color filter had high pattern accuracy, no coloring defects, and was highly reliable.
【0094】実施例8 実施例1における、青、赤、緑の着色部を残して感光性
被膜部のみを溶出させて透明導電層2の表面を露出させ
た基板〔図1(L)〕を陰極として、濃度3.5%の塩
酸水溶液の電解還元浴中に浸漬し、ステンレス板を陽極
として、両極間に25Vの直流電圧を5秒間印加して、
露出していた透明導電層を電解還元することによって黒
色化しカラーフィルタを得た。得られたカラーフィルタ
はパターン精度が高く、着色不良がなく、信頼性の高い
ものであった。Example 8 A substrate [Example 1 (L)] in Example 1 in which the surface of the transparent conductive layer 2 was exposed by leaving only the blue, red, and green colored portions and eluting only the photosensitive film portion As a cathode, it is immersed in an electrolytic reduction bath of a hydrochloric acid aqueous solution having a concentration of 3.5%, a stainless steel plate is used as an anode, and a direct current voltage of 25 V is applied between both electrodes for 5 seconds,
The exposed transparent conductive layer was electrolytically reduced to blacken it to obtain a color filter. The obtained color filter had high pattern accuracy, no coloring defects, and was highly reliable.
【図1】本発明の製造方法の一例を示す工程図であり、
(A)〜(M)は断面から見た図である。FIG. 1 is a process chart showing an example of a manufacturing method of the present invention,
(A)-(M) is the figure seen from the cross section.
1 ガラス基板 2 透明導電層 3 感光性被膜層 4 フォトマスク 5 第1着色部 6 第2着色部 7 第3着色部 8 別の着色部 1 Glass Substrate 2 Transparent Conductive Layer 3 Photosensitive Film Layer 4 Photomask 5 First Colored Part 6 Second Colored Part 7 Third Colored Part 8 Another Colored Part
───────────────────────────────────────────────────── フロントページの続き (72)発明者 則松 力 神奈川県平塚市東八幡4丁目17番1号 関 西ペイント株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Riki Norimatsu 4-17-1, Higashi-Hachiman, Hiratsuka-shi, Kanagawa Kansai Paint Co., Ltd.
Claims (8)
る工程、 〔2〕(a)一分子中にカルボキシル基とヒドロキシフ
ェニル基とを有する重合体(a−1)、又はカルボキシ
ル基を有する重合体(a−2)とヒドロキシフェニル基
を有する重合体(a−3)との重合体混合物、(b)一
分子中に2個以上のビニルエーテル基を含有する化合
物、及び(c)活性エネルギー線照射により酸を発生す
る化合物、を必須成分として含有するポジ型感光性組成
物を該透明導電層上に塗装し、加熱してポジ型感光性被
膜層を形成する工程、 〔3〕該感光性被膜層を所望の形状に露光し、必要に応
じて加熱し、次いで現像することによって、透明導電層
の一部を露出する工程、 〔4〕露出した透明導電層上に電着により所望の色の着
色部を形成する工程、及び 〔5〕上記〔3〕及び〔4〕の工程を必要回数繰り返す
工程を有することを特徴とするカラーフィルタの製造方
法。1. A step of forming a transparent conductive layer on a transparent substrate, [2] (a) a polymer (a-1) having a carboxyl group and a hydroxyphenyl group in one molecule, or a carboxyl group. A mixture of a polymer (a-2) having a hydroxyl group and a polymer (a-3) having a hydroxyphenyl group, (b) a compound having two or more vinyl ether groups in one molecule, and (c) A step of coating a positive photosensitive composition containing, as an essential component, a compound capable of generating an acid upon irradiation with active energy rays, on the transparent conductive layer and heating to form a positive photosensitive coating layer, [3] Exposing the photosensitive coating layer to a desired shape, heating it if necessary, and then developing it to expose a part of the transparent conductive layer; [4] by electrodeposition on the exposed transparent conductive layer. Step of forming a colored part of a desired color And [5] A method of manufacturing a color filter, which comprises repeating the above steps [3] and [4] a required number of times.
て、重合体(a−1)が、重合体(a−1)1kgあたり
0.5〜10当量の範囲のカルボキシル基及び1.0〜
10当量の範囲のヒドロキシフェニル基を含有するもの
である請求項1記載のカラーフィルタの製造方法。2. The polymer (a) is a polymer (a-1), and the polymer (a-1) has a carboxyl content in the range of 0.5 to 10 equivalents per 1 kg of the polymer (a-1). Group and 1.0 ~
The method for producing a color filter according to claim 1, which contains a hydroxyphenyl group in the range of 10 equivalents.
体(a−3)との重合体混合物であって、重合体(a−
2)が、重合体(a−2)1kgあたり0.5〜10当量
の範囲のカルボキシル基を含有し、重合体(a−3)
が、重合体(a−3)1kgあたり1.0〜10当量の範
囲のヒドロキシフェニル基を含有するものである請求項
1記載のカラーフィルタの製造方法。3. The polymer (a) is a polymer mixture of the polymer (a-2) and the polymer (a-3), and the polymer (a-
2) contains a carboxyl group in the range of 0.5 to 10 equivalents per 1 kg of the polymer (a-2), and the polymer (a-3)
Contains a hydroxyphenyl group in the range of 1.0 to 10 equivalents per 1 kg of the polymer (a-3).
る感光性被膜層を除去し、導電層を露出させる工程を有
する請求項1記載のカラーフィルタの製造方法。4. The method for producing a color filter according to claim 1, further comprising the step of [6] removing the remaining photosensitive coating layer and exposing the conductive layer after the steps [1] to [5].
電着により所望の着色部を形成する工程を有する請求項
4記載のカラーフィルタの製造方法。5. The method for producing a color filter according to claim 4, further comprising a step of forming a desired colored portion on the exposed conductive layer by electrodeposition after the step [6].
塗布法によって所望の着色部を形成する工程を有する請
求項4記載のカラーフィルタの製造方法。6. The method for producing a color filter according to claim 4, further comprising a step of forming a desired colored portion on the exposed conductive layer after the step [6] by a coating method.
金属層をメッキ法によって形成する工程を有する請求項
4記載のカラーフィルタの製造方法。7. The method for manufacturing a color filter according to claim 4, further comprising a step of forming a metal layer on the exposed conductive layer after the step [6] by a plating method.
化又は還元によって着色する工程を有する請求項4記載
のカラーフィルタの製造方法。8. The method for producing a color filter according to claim 4, further comprising a step of coloring the exposed conductive layer by oxidation or reduction after the step [6].
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25757994A JPH0894827A (en) | 1994-09-26 | 1994-09-26 | Production of color filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25757994A JPH0894827A (en) | 1994-09-26 | 1994-09-26 | Production of color filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0894827A true JPH0894827A (en) | 1996-04-12 |
Family
ID=17308235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25757994A Pending JPH0894827A (en) | 1994-09-26 | 1994-09-26 | Production of color filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0894827A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000186119A (en) * | 1998-10-15 | 2000-07-04 | Mitsui Chemicals Inc | Copolymer, its production and solution containing the copolymer |
| US6433118B1 (en) | 1998-10-15 | 2002-08-13 | Mitsui Chemicals, Inc. | Copolymer, a manufacturing process therefor and a solution containing thereof |
-
1994
- 1994-09-26 JP JP25757994A patent/JPH0894827A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000186119A (en) * | 1998-10-15 | 2000-07-04 | Mitsui Chemicals Inc | Copolymer, its production and solution containing the copolymer |
| US6433118B1 (en) | 1998-10-15 | 2002-08-13 | Mitsui Chemicals, Inc. | Copolymer, a manufacturing process therefor and a solution containing thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100305960B1 (en) | Photosensitive composition and pattern formation method using this composition | |
| WO1991019212A1 (en) | Color filter overcoating material for liquid crystal display, color filter material, formation of overcoat, and formation of color filter | |
| JPH08334893A (en) | Radiation-sensitive composition | |
| US6187509B1 (en) | Positive type electrodeposition photoresist compositions and pattern formation process | |
| KR100286598B1 (en) | Formation method of positive photosensitive resin composition and resist pattern | |
| KR100287252B1 (en) | Positive electrodeposition photoresist composition and resist pattern formation method using this composition | |
| JP2824209B2 (en) | Photosensitive composition and pattern forming method | |
| TWI314655B (en) | Microparticle composition and light shield film using thereof | |
| JP2824188B2 (en) | Method for producing photosensitive composition and pattern | |
| JPH0894827A (en) | Production of color filter | |
| JPH0894829A (en) | Production of color filter | |
| JPH0895028A (en) | Manufacture of color filter | |
| JP2824191B2 (en) | Positive electrodeposited photoresist composition and method for producing resist pattern | |
| JPH01158444A (en) | Photoresist remover | |
| JPH06313134A (en) | Water-based photosensitive composition and formation of pattern therewith | |
| JP2916137B2 (en) | Photosensitive composition and pattern forming method | |
| JP2000500883A (en) | Photosensitive composition | |
| JP2824190B2 (en) | Positive electrodeposited photoresist composition and method for producing resist pattern | |
| JPH0973171A (en) | Photosensitive colored composition and production of color filter | |
| JP3971046B2 (en) | Positive photosensitive resin composition and use thereof | |
| JPH09312459A (en) | Manufacture of printed circuit board with throughhole | |
| JP3686494B2 (en) | Photopolymerizable composition for color filter | |
| JPH11237731A (en) | Positive electrodeposition photoresist composition and manufacture for pattern | |
| KR100591052B1 (en) | Method of forming resist layer and method of manufacturing printed wiring board | |
| JP3041643B2 (en) | Liquid crystal display color filter overcoat material, color filter material, method of forming overcoat, and method of forming color filter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20050329 |