JPH09109143A - Wire position adjusting apparatus for wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to rapidly return a wire position to a suitable position by rapidly and accurately detecting the change of the wire position caused by the thermal deformation of a guide roller. SOLUTION: The wire position adjusting apparatus adjusts the positions of many wires W so extended between guide rollers 24A and 24B to suitable positions. Distance sensors 81A, 82A are provided at both right and left sides of the wire W, and the wire interval and the relative displacement of the entire wire to a work 28 are directly detected by the sensors 81A, 82A. The rollers 24A, 24B are so adjusted as to suitably hold the wire interval and the work 28 or the rollers 24A, 24B are so axially moved as to reduce the relative displacement.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire position adjusting device that automatically adjusts the tension position of a cutting wire on a wire saw to an appropriate position.

[0002]

2. Description of the Related Art In recent years, a wire saw has been known as a means for cutting a wafer from a semiconductor ingot. In this wire saw, a large number of cutting wires are stretched in parallel between a pair of guide rollers each having a wire guide groove formed on the peripheral surface, and these wires are driven at high speed in the longitudinal direction. In this state, the work made of the semiconductor ingot or the like is cut and fed in the direction orthogonal to the longitudinal direction, so that a large number of thin pieces are simultaneously cut out from the work.

In such a wire saw, the tension position of each wire corresponds to the cutting position of the work as it is. Therefore, in order to secure high processing accuracy, the tension position of the wire is always matched with the regular position. Is desired. However, in reality, the wire tension position may change during the cutting of the workpiece for the following reasons.

A) In order to drive the cutting wire at high speed, it is necessary to rotate the guide roller at high speed. With the high-speed rotation of the guide roller, the bearings of the guide roller generate heat, and the heat is transmitted to the guide roller, so that the guide roller expands in the axial direction and the distance between the wire guide grooves and the distance between the wires increase. To be done.

B) When not only the guide roller but also the support member for rotatably supporting the guide roller and the bed on which the support member is erected are thermally deformed due to the heat generated by the bearing and the influence of the outside air temperature. There is. When these supporting members and the bed are thermally deformed, the relative position of the guide roller supported by the supporting members relative to the work changes in the axial direction, and the tension position of the entire wire also shifts accordingly.

Therefore, conventionally, the following means have been proposed as means for adjusting the adjusting position of the wire W which is displaced as described above to an appropriate position.

A) The temperature of the guide roller itself is detected, and the temperature of the guide roller is adjusted so as to maintain this temperature at a predetermined temperature.

B) The relative displacement of the guide roller with respect to the work is detected, and the guide roller is moved in the axial direction in the direction of reducing this relative displacement (see Japanese Patent Laid-Open No. 1-177963).

C) A detection plate or the like is provided on the end surface of the guide roller, the displacement of the detection plate in the axial direction of the guide roller when the guide roller thermally expands is detected, and the slurry supply temperature is changed so as to reduce this displacement. (Japanese Patent Laid-Open No. 5-18541
No. 9).

[0010]

In the means of A), the temperature of the guide roller itself is kept constant, but the temperature of the guide roller is not uniform throughout, and the temperature directly connected to the actual wire position. Is not easy to measure. For example, in the case of a guide roller in which an outer layer made of synthetic resin is laminated on the outer side of an inner layer made of metal, there is a large difference between the coefficient of thermal expansion of the inner layer and the coefficient of thermal expansion of the outer layer,
It is extremely difficult to accurately grasp the actual wire position by measuring the temperature of the guide roller. Further, the control for monitoring the temperature has a drawback that the control followability is low.

On the other hand, although the means B) and C) detect the axial displacement of the guide roller, the position of the guide roller and the actual wire adjusting position are deviated due to the bending of the wire or the like. May occur, and it is difficult to accurately grasp the wire position only by detecting the displacement of the guide roller.

In view of such circumstances, it is an object of the present invention to provide a wire position adjusting device capable of adjusting an actual wire tension position on a wire saw more accurately to a regular position.

[0013]

As a means for solving the above-mentioned problems, the present invention is directed to a case where a plurality of guide grooves for guiding a wire are provided between a pair of guide rollers axially arranged on the outer peripheral surface. A cutting wire is stretched in a state of being engaged with each of the guide grooves, and a work is cut and fed by cutting the work in a direction orthogonal to the arrangement direction with respect to these wires. A wire interval detecting means for detecting the interval between the two and a temperature adjusting means for adjusting the temperature of both guide rollers so that the interval detected by the wire interval detecting means approaches a preset regular interval. Is.

According to this structure, the interval between the wires is directly detected, and the temperatures of both guide rollers are adjusted so that the detected interval approaches the regular interval.
The thickness dimension of the wafer corresponding to the distance between the wires is maintained at an appropriate dimension.

If the wire position detecting means for detecting the positions of the wires on both the left and right sides is provided and the wire interval is determined from the wire detecting position by the wire position detecting means, the wire interval can be detected with a simple structure. You can

In this apparatus, further, wire displacement detecting means for detecting the relative displacement of the entire wire in the wire arranging direction from a reference relative position with respect to a preset work,
It is more preferable to include roller position adjusting means for relatively moving both guide rollers in the axial direction of the guide rollers with respect to the work in a direction to reduce the relative displacement detected by the wire displacement detecting means. With this configuration, both the wire interval and the displacement of the entire wire in the wire arrangement direction with respect to the work are adjusted at the same time, and the work cutting position by the wire is maintained at a more appropriate position.

In this case, as the wire interval detecting means and the wire displacement detecting means, wire position detecting means for detecting the positions of the wires on both the left and right sides are provided, and the wire interval and the workpiece are detected from the wire detecting position by the wire position detecting means. By calculating the relative displacement of the entire wire,
The wire position detecting means can be used both as the wire interval detecting means and the wire displacement detecting means.

The relative position of the wire with respect to the work can be adjusted by moving the work in the axial direction of the guide roller. In this case, the relative displacement of one guide roller with respect to the work and the other guide with respect to the work. When the relative displacement of the rollers is different, it is difficult to adjust the relative positions of both guide rollers with respect to the work at the same time to proper positions. On the other hand, both guide rollers are configured to be movable in the axial direction independently of each other, and the first wire displacement detecting means is provided at a position between one guide roller and the work, and the other guide roller is provided. Second wire displacement detecting means is provided at a position between the work and the work, and the axial position of the one guide roller is adjusted based on the detection result of the first wire displacement detecting means, and the second wire displacement detecting means is provided.
By configuring the roller position adjusting means so as to adjust the axial position of the other guide roller based on the detection result of the wire displacement detecting means, that is, by individually adjusting the axial positions of both guide rollers, It is possible to adjust the position of the guide roller to an appropriate position at the same time.

In the present invention, the wire interval detecting means and the wire interval adjusting means may be omitted and only the wire displacement detecting means and the roller position adjusting means may be provided.

Also in this case, as the wire displacement detecting means, wire position detecting means for detecting the positions of the wires on both the left and right sides are suitable, and further, both guide rollers can be independently moved in the axial direction. And a second wire displacement detecting means is provided at a position between the one guide roller and the work, and a second wire displacement detecting means is provided at a position between the other guide roller and the work. The axial position of the one guide roller is adjusted based on the detection result of the first wire displacement detection means, and the axial position of the other guide roller is adjusted based on the detection result of the second wire displacement detection means. It is more preferable to configure the roller position adjusting means so as to do so.

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the present invention will be described with reference to FIGS.

The wire saw shown in FIG. 3 comprises a pair of wire feeding / winding devices 10A and 10B, a guide pulley 12
A, 12B, guide pulleys 14A, 14B, guide pulleys 16A, 16B, wire tension adjusting devices 18A, 18
B, guide pulleys 22A, 22B, and four guide rollers 24A, 24B, 26A, 26B. The guide rollers 24A and 24B are arranged at the same height position, the guide rollers 26A and 26B are arranged below the guide rollers 24A and 24B, respectively, and the guide roller 26A is rotated by the drive motor 25. It has become. Each guide roller 24A, 24B, 2
6A and 26B are so-called multi-groove rollers in which wire guiding guide grooves 43 as shown in FIGS.

Each wire feeding / winding device 10A, 10
B is a bobbin 9A, 9B around which a cutting wire W is wound.
And bobbin drive motors 11A and 11 for rotating the bobbin drive motors.
B. One wire feeding / winding device 1
The wire W unwound from the 0A bobbin 9A is guided by the guide pulleys 12A, 14A, 16A and the wire tension adjusting device 1.
8A pulley 20A and guide pulley 22A are hung in order, and further guide rollers 24A, 24B, 26B,
The guide pulley 22B and the pulley 20 of the wire tension adjusting device 18B are wound around the outer periphery of the guide roller 26A while being fitted into the guide groove 43 of the outer peripheral surface of the guide roller 26A, and wound around the guide rollers many times.
B, the guide pulleys 16B, 14B, and 12B are hung in this order, and the bobbin 9 of the other wire feeding / winding device 10B.
It is wound around B and both wire tension adjusting devices 18A,
An appropriate tension is applied to the wire W by 18B. Then, the guide roller 26A by the drive motor 25
Rotation driving direction of each bobbin driving motor 11A, 11B
By switching the rotational driving directions of the bobbins 9A and 9B between forward and reverse, the wire W is fed from the bobbin 9A and wound on the bobbin 9B, and the wire W is fed from the bobbin 9B and wound on the bobbin 9A. It is designed so that it can be switched to the ready state.

That is, in this wire saw, a large number of wires W are stretched in parallel with each other between the guide rollers 24A and 24B and are reciprocally driven in the axial direction.

Above the wire W stretched between the guide rollers 24A and 24B, there is provided a work feeding device 30 for moving a cylindrical work (eg, semiconductor ingot) 28. The work feeding device 30 includes a work holding portion 32 and a work feeding motor 34. The work holding unit 32 holds the work 28 in a direction in which a desired crystal orientation is obtained, and the work feed motor 3
Reference numeral 4 is for raising and lowering (that is, cutting and feeding) the work holding portion 32 and the work 28 integrally by combination with a ball screw (not shown).

Above the wire W stretched between the guide rollers 24A and 24B, abrasive grain supply devices 36A and 36B are provided at both left and right positions of the work 28.
These abrasive grain supply devices 36A and 36B simultaneously supply a machining liquid (slurry) in which the abrasive grains for machining are mixed to each wire W that is driven at high speed, and deposit the same on the surface of the wire W.

Therefore, in this wire saw, a large number of wires W stretched between the guide rollers 24A and 24B are simultaneously driven at high speed in the longitudinal direction thereof, and slurry is supplied to these wires W from the abrasive grain supply devices 36A and 36B. While being supplied, the work 28 is cut and fed downward to the wire W, so that a large number of wafers are simultaneously cut out from the work 28 at the same time.

Next, the upper guide rollers 24A, 24B
The supporting structure and its internal structure will be described. A pair of left and right support members 46L and 46R as shown in FIG. 4 are provided upright on the left and right sides of the guide rollers 24A and 24B.
24B is rotatably supported.

Since the mounting structure of the guide rollers 24A and 24B to the supporting members 46L and 46R and the inner structure of the rollers are the same, the structure of one guide roller 24A will be described as an example.

At the upper ends of both support members 46L and 46R,
Cylindrical support parts 47L and 47R facing left and right are formed respectively, and a holding member 48 is provided inside these support parts 47L and 47R via a ball bearing 51 and a cylindrical roller bearing 52, respectively.
L and 48R are rotatably supported around a horizontal axis.
Male holding portions 49 are formed at the inner ends of the holding members 48L and 48R, and the diameter of the male fitting 49 is reduced toward the tips.
A bolt insertion hole 48b is formed in the center thereof so as to penetrate the entire holding members 48L, 48R in the axial direction.
Around the circumference 9 is a contact surface 48 which is a plane orthogonal to the rotation axis.
a is formed.

On the other hand, the guide roller 24A is formed by laminating an outer peripheral portion 42 made of synthetic resin on an outer peripheral surface of a metal main body portion 41, and the guide groove 43 (see FIG.
And FIG. 6) are formed all around. Main unit 4
A female fitting portion 40 having a shape into which the male fitting portion 49 can be fitted is formed at both ends of 1, and a screw hole 44 is formed in the center thereof, and the female fitting portion 40 is formed around the female fitting portion 40. Has a contact surface 41a which is a plane orthogonal to the rotation axis.

Then, the tightening bolts 50 are inserted from the outside into the bolt insertion holes 48b of the holding members 48L and 48R,
By screwing the male screw at the end portion into the screw hole 44, the holding members 48L, 48R and the guide roller 24A are attracted to press the tapered surfaces of the fitting portions 49, 40 into pressure contact with each other, whereby the holding member 48L, The center axes of 48R and the guide roller 24A are aligned with each other, and the fitting portion 4
The contact surfaces 48a, 41a formed around the circumferences of 9, 40 are in contact with each other. Further, in this connecting part, an O-ring 45 for sealing is interposed between the bottom part of the female side fitting part 40 and the tip part of the male side fitting part 49.

Next, the mounting structure of the left and right holding members 48L and 48R will be described in detail.

On the outer peripheral surfaces of both holding members 48L and 48R,
A predetermined number of ball bearings 51 with a spacer 53a appropriately interposed.
(Two on the support member 47L side, one on the support member 47R side
Inner side of the cylindrical roller bearing 52 and the inner ring of these bearings 51, 52 are stepped portions 48d formed in the intermediate portions of the holding members 48L, 48R and holding members 48L, 48R.
It is fixed in a state of being sandwiched by the nut 54 mounted on the outer peripheral surface of the end portion of the, and is not displaceable in the axial direction with respect to the holding members 48L and 48R. On the other hand, the outer ring mounting structure of the bearings 51 and 52 is different between the left support member 46L and the right support member 46R in FIG.

As shown in FIG. 5, the right supporting member 46R
In the above, the tubular member 60 is fitted and fixed inside the supporting portion 47R, and the bearings 51, 52 are provided inside the tubular member 60.
Has been inserted. As shown in FIG. 5, the outer ring of the ball bearing 51 is not regulated at all in the axial direction.
The entirety can be displaced relative to the tubular member 60 and the support portion 47R in the axial direction. Outer ring 52 of cylindrical roller bearing 52
a is a restriction member 56 fixed to the inner end surface of the tubular member 60.
And the stepped portion 60d formed in the intermediate portion of the tubular member 60 is sandwiched and fixed. Cylindrical roller bearing 5
The second roller 52b is sandwiched between the step portions formed at both ends of the inner ring 52c and its axial displacement is restricted, but the roller 52b and the outer ring 52a can be relatively displaced in the axial direction. . Therefore, the entire holding member 48R can be displaced relative to the support member 46R in the axial direction.

A lid wall 60a is formed at the outer end of the cylindrical member 60 to close it, and a cooling oil supply port 60b is formed at the center thereof. In the holding member 48R, a cooling oil passage 48c that communicates the inner space and the outer space of the holding member 48R is formed at a position just inside the restriction member 56, and the cooling oil passage 48c is formed in the guide roller main body portion 41 in the axial direction. A cooling oil passage 41c that penetrates is formed. Further, between the tubular member 60 and the restriction member 56, and between the restriction member 56 and the holding member 48.
Sealing members 58 and 57 are provided between the outer peripheral surface of R and the outer peripheral surface of R, respectively. Then, the cooling oil for cooling the bearing is introduced into the cylindrical member 60 from the cooling oil supply port 60b, and the cooling oil is supplied to the bearings 51, 52 and the cooling oil passages 48c, 41c.
And flows toward the left support member 46L.

As shown in FIG. 6, the left support member 46L
In the above, the tubular member 64 is axially movable in the tubular support portion 47L via the slide bearing 62, and the bearings 51 and 52 and the spacer 53b are fixed inside the tubular member 64.

A lid member 66 for covering the cylindrical member 64 is connected to the outer end of the cylindrical member 64. An axial groove 66a is formed on the outer peripheral surface of the lid member 66, while a detent member 68 extends upward from the outer surface of the support member 46L. The upper end of the detent member 68 is The groove 66
By being fitted into a, the lid member 66 and the tubular member 64
Rotation is restricted.

In the holding member 48L, a cooling oil passage 48c is formed at a position closer to the guide roller than the cylindrical roller bearing 52 is. The cooling oil passage 48c connects the inner space with the outer space. Further, in the lid member 66, a cooling oil passage 66 from the inner space to the cooling oil discharge port 66b on the outer peripheral surface is formed.
c is formed. Then, the right side holding member 48R
The cooling oil flowing into the holding member 48R through the cooling oil passage 41c of the guide roller body 41 from the cooling oil discharge port 66b is passed through the cooling oil passage 48c, the bearings 52 and 51, and the cooling oil passage 66c in this order. It is supposed to be done.

The cooling oil discharge port 66b is connected to the suction port of the cooling oil circulation pump 84 shown in FIG.
Of the cooling oil supply port 6 through the temperature controller 86.
0b, the cooling oil circulation pump 84 is operated to circulate the cooling oil.
The temperature controller 86 includes a temperature sensor that detects the temperature of the circulating cooling oil and a cooling unit that cools the cooling oil, and is configured to perform a cooling operation such that the temperature detected by the temperature sensor approaches the set temperature. Has been done.

A nut member 70 is fixed to the outer end of the lid member 66, and a screw hole 70a is formed in the center of the nut member 70. On the other hand, as shown in FIG. 4, a support arm 72 extends outward from the upper end of the support member 46L, and a servo motor 74 is fixed to the end of the support arm 72. A feed screw shaft 78 is connected via a coupling 76, and the feed screw shaft 78 is screwed and inserted into the screw hole 70a of the nut member 70. Therefore, the servo motor 74
Operation of the nut member 70, the lid member 66, and the tubular member 6
4, the left side holding member 48L, the guide roller 24A, and the right side holding member 48R are integrally fed in the axial direction.

As shown in FIGS. 1 and 2, four distance sensors (wire position detecting means) 81A, 82A. 81B and 82B are arranged. The distance sensors 81A and 82A are provided at positions laterally opposed to the wires W on both the left and right outer sides in a region between the guide roller 24A and the work cutting position, and a distance between the wires W facing the wires W. Is configured to detect. Similarly, the distance sensor 81
B and 82B are provided at positions that laterally oppose the wires W on both the left and right sides in a region between the guide roller 24B and the work cutting position, and detect a distance between the wires W and the opposing wires W. Is configured to.

As the distance sensors 81A, ...
Various conventionally known distance sensors can be applied, and an eddy current sensor, a laser distance measuring sensor, and the like are suitable.
Further, the above distance can be detected by passing an electric current through the wire W in advance and detecting the magnetic field formed by this electric current with a magnetic sensor, or by bringing the gauge into direct contact with the wire W. . The current may be supplied to the wire W from the bobbin drive shaft via a slip ring or the like, or may be supplied to a pulley (guide pulley 14 in the wire path).
A, 14B, etc.) may be directly performed.

The detection signals from the distance sensors 81A, ... Are input to the arithmetic and control unit 90 shown in FIG. The arithmetic and control unit 90 includes a roller position setting means 92 and a temperature setting means 94, and the roller position setting means 92 is connected to a servo motor 74 via a servo controller 96 and a servo amplifier 97.

The roller position setting means 92 is the distance sensor 8
Based on the distances detected by 1A and 82A, the central position of the entire wire in the area where these distance sensors 81A and 82A are provided (the distance to the leftmost wire and the distance to the rightmost wire in FIGS. 4 to 6). And a position of the guide roller 24A for matching the calculated position with a pre-stored position (position before the operation of the apparatus).
Based on the distances detected by 1B and 82B, the central position of the entire wire in the area where these distance sensors 81B and 82B are provided is calculated, and the calculated position is stored in advance (position before device operation). The position of the guide roller 24B is set so that

The servo controller 96 inputs a control signal to the servo motor 74 via the servo amplifier 97 in order to realize the set guide roller position, and the guide roller 24A
(24B) is moved in the axial direction.

The temperature setting means 94 includes a distance sensor 81A,
Based on the distance detected by 82A, the wire tension width in the area where these distance sensors 81A and 82A are provided (distance between the leftmost wire and the rightmost wire in FIGS. 4 to 6; wire spacing). Is calculated, and the temperature of the cooling oil is set so as to bring the tension width close to the tension width stored in advance (the tension width before the operation of the device), and the temperature is detected by the distance sensors 81B and 82B. Based on the distance, the wire tension width in the area where these distance sensors 81B and 82B are provided is calculated, and the cooling oil temperature for setting the tension width close to the tension width previously stored is set. is there.

Next, the operation of this device will be described.

First, the wire center position and the tension width are calculated on both sides of the work cutting position before the entire wire saw is operated. Specifically, as shown in FIG. 8, the distance between the distance sensor 81A (81B) and the distance sensor 82A (82B) before the operation of the apparatus is L, and the distance sensor 8 is
Detection distance by 1A (81B) (that is, distance sensor 8
X is the distance between 1A (81B) and the outermost wire W)
1. X is the distance detected by the distance sensor 82A (82B)
2. When the wire tension width is a and the distance from the distance sensor 82A (82B) to the wire center position (hereinafter, simply referred to as “center position distance”) is b, the arithmetic and control unit 90 is
The wire tension width a and the center position distance b are calculated from the following mathematical formula (Equation 1), and are stored as the reference tension width and the reference center position distance.

[0050]

## EQU1 ## a = L- (X1 + X2) b = X2 + a / 2 When the wire saw operates from this state, the wire W is driven at high speed in the axial direction, so that the guide rollers 24A, 24B around which the wire W is hung. Also drives at high speed in forward and reverse directions. Therefore, the bearing 5 of the guide rollers 24A, 24B
1, 52 generate heat, and in general, the guide rollers 24A, 2
Increase the temperature of 4B. Due to this temperature increase, the spacing between the guide grooves 43 formed on the outer peripheral surfaces of the guide rollers 24A, 24B is increased, and the spacing between the wires W guided by the guide grooves 43 and thus the wire tension width is increased. On the other hand, when the temperature of the cooling oil is excessively low, the temperature of the guide rollers 24A and 24B decreases, and the distance between the wires W and the wire tension width decrease.

Further, not only the guide rollers 24A, 24B, but also the members which directly or indirectly support the guide rollers 24A, 24B under the influence of heat generation of the bearings 51, 52 and the like and changes in the outside temperature. Specifically, the holding member 4
8L, 48R, supporting members 46L, 46R, or a bed on which these supporting members 46L, 46R are erected)
May also be thermally deformed, and in this case, the guide rollers 24A and 24B are displaced in the axial direction and the central position distance of the wire W is changed. The detection distance of the distance sensor also varies with the variation of the wire tension width and the central position distance.

Therefore, the arithmetic and control unit 90 uses the present detection distance X1 'of the distance sensor 81A (81B) and the current detection distance X2' of the distance sensor 82A (82B) and the following mathematical expression (Equation 2) to calculate the value shown in FIG. The current wire tension width a'and the central position distance b'shown in (1) are calculated and compared with the reference tension width a and the reference center position distance b stored in advance.

[0053]

## EQU2 ## a '= L- (X1' + X2 ') b' = X2 '+ a' / 2 The roller position setting means 92 sets the guide roller 24A (24B) to the distance sensor 82A when b '> b. (82
The guide roller setting position is brought closer to the distance sensor 82A (82B) side in order to bring it closer to the B) side and reduce the central position distance b '. As a result, the servo controller 96 outputs a control signal to the servo motor 74 to guide the guide roller 24A (24
B) is moved to the distance sensor 82A (82B) side by a predetermined distance. On the contrary, when b ′ <b, the guide roller 2
4A (24B) is moved closer to the distance sensor 81A (81B) side to extend the central position distance b ', and the guide roller setting position is brought closer to the distance sensor 81A (81B) side. As a result, the servo controller 96 outputs a control signal to the servo motor 74 to move the guide roller 24A (24B) to the distance sensor 81A (81B) side by a predetermined distance. b '
= B, the current guide roller setting position is maintained.

On the other hand, when a '> a, the temperature setting means 94 lowers the set temperature of the temperature controller 86 in order to further cool the guide roller 24A (24B) and narrow the wire interval. As a result, the temperature controller 86 further lowers the temperature of the cooling oil and promotes cooling of the guide rollers 24A (24B). Conversely, when a '<a, the guide roller 24A
In order to suppress the cooling of (24B) and widen the wire interval,
Increase the set temperature of the temperature controller 86. As a result, the temperature controller 86 raises the temperature of the cooling oil, and the guide roller 24A
Cooling of (24B) is suppressed. When a '= a, the current set temperature is maintained.

As described above, in this apparatus, the distance sensors 81A, ... Detect the change in the wire tension width corresponding to the wire spacing and the central position distance corresponding to the displacement of the entire wire with respect to the work 28, and The guide roller 24 is adjusted so that the temperature of the cooling oil is adjusted so that the wire tension width approaches the appropriate width, and the center position is adjusted to the appropriate position.
Since A and 24B are moved in the axial direction,
Even if the wire position shifts due to thermal deformation of the guide rollers 24A, 24B and the members that support them, this can be detected quickly and accurately and quickly returned to an appropriate position.

The present invention may take the following embodiments.

(1) One of the roller position setting means 92 and the temperature setting means 94 may be omitted depending on the processing accuracy required for the wire saw. That is, when the required processing accuracy is relatively low, the temperature setting means 94 or the roller position setting means 92 may be omitted.

(2) In the above embodiment, the guide roller 24
Although the cooling oil is separately supplied to A and 24B and the temperatures thereof are individually adjusted, the common cooling oil is supplied to both guide rollers 24A and 24B to adjust the temperature of the cooling oil. Good. In this case, the wire interval detecting means may have only one detection position.

(3) In the above wire saw, the guide rollers 24A and 24B are fixed to a common frame, and both guide rollers 24A and 24B are simultaneously moved in the axial direction by the same amount integrally with this frame, or both guides are moved. Roller 24A,
Even if the position of 24B is fixed and the position of the work 28 is changed in the axial direction of the guide rollers 24A and 24B,
The relative positions of the guide rollers 24A and 24B with respect to the work 28 can be adjusted. In this case, the wire displacement detecting means may detect only one position. However, in this case, while the positions of the guide rollers 24A and 24B cannot be adjusted individually, the guide rollers 24A and 24B can be moved independently of each other in the axial direction as in the above embodiment, Distance sensors 81 on both sides of the work cutting position
If the A and 82A and the distance sensors 81B and 82B are provided, there is an advantage that the work cutting position by the wire W can be adjusted more accurately to an appropriate position.

(4) In the above embodiment, the guide roller 24
Although cooling oil is flown through A and 24B, the cooling medium is not particularly limited, and for example, when cooling water is used, its temperature may be adjusted. The guide roller 2 can also be indirectly operated by changing the temperature of the slurry supplied to the wire W.
It is possible to adjust the temperatures of 4A and 24B.

[0061]

As described above, according to the present invention, the wire gap detecting means for detecting the gap between the wires and the guides for guiding the gap detected by the wire gap detecting means to a preset regular gap. In addition to or in addition to the temperature adjusting means for adjusting the temperature of the roller, wire displacement detection for detecting the relative displacement of the entire wire in the wire arrangement direction from a reference relative position with respect to a preset work Means and roller position adjusting means for relatively moving both guide rollers in the axial direction of the guide roller with respect to the work in a direction to reduce the relative displacement detected by the wire displacement detecting means. Quickly and accurately detect changes in the wire position due to thermal deformation of the roller and the members that support it, and quickly return the wire position to the normal position. There is an effect that can be.

If the wire position detecting means for detecting the positions of the wires on both the left and right sides is provided and the wire distance and the relative displacement of the entire wire with respect to the workpiece are calculated from the wire detection position by the wire position detecting means. The wire interval and the relative displacement can be detected with a simple configuration. In particular, when the wire position detecting means is used also as the wire interval detecting means and the wire displacement detecting means, the wire position can be adjusted accurately with a simple configuration.

In adjusting the relative position of the guide roller with respect to the work, both guide rollers are configured to be movable in the axial direction independently of each other.
The first wire displacement detecting means is provided at a position between one guide roller and the work, and the second wire displacement detecting means is provided at a position between the other guide roller and the work. The roller position adjusting means adjusts the axial position of the one guide roller based on the detection result, and adjusts the axial position of the other guide roller based on the detection result of the second wire displacement detecting means. By adopting the means for constructing, the effect of being able to adjust the positions of both guide rollers to the proper positions at the same time is obtained by individually adjusting the axial positions of both guide rollers.

[Brief description of the drawings]

FIG. 1 is a plan view showing a main part of a wire saw according to a first embodiment of the present invention.

FIG. 2 is a front view showing a main part of the wire saw.

FIG. 3 is an overall configuration diagram of the wire saw.

FIG. 4 is a partially sectional front view showing a support structure of a guide roller provided on the wire saw.

FIG. 5 is a sectional front view showing a support structure of one end portion of the guide roller.

FIG. 6 is a sectional front view showing a support structure of the other end of the guide roller.

FIG. 7 is a block diagram showing a functional configuration of an arithmetic and control unit equipped on the wire saw.

FIG. 8 is an explanatory diagram showing a calculation principle of a wire tension width and a wire center position distance by the calculation control device.

[Explanation of symbols]

 24A, 24B Guide roller 28 Work 43 Guide groove 74 Servo motor (roller position adjusting means) 86 Temperature controller (temperature adjusting means) 90 Calculation control device 92 Roller position setting means (roller position adjusting means) 94 Temperature setting means (temperature adjustment) Means) 96 servo controller (roller position adjusting means) W wire

Claims (8)

[Claims] 1. A cutting wire is stretched between a pair of guide rollers having a plurality of wire guide grooves axially arranged on an outer peripheral surface in a state of being engaged with the guide grooves.
In a wire saw in which works are cut and fed to these wires in a direction orthogonal to the arranging direction, wire spacing detection means for detecting the spacing between the wires and the wire spacing detection means are used. A wire position adjusting device for a wire saw, comprising: a temperature adjusting unit that adjusts the temperatures of both guide rollers so that the detected interval approaches a preset regular interval. 2. The wire position adjusting device for a wire saw according to claim 1, further comprising wire position detecting means for detecting the positions of the wires on the left and right outer sides as the wire interval detecting means, and the wire position detecting means detects the wire. A wire position adjusting device for a wire saw, wherein a wire interval is determined from a position. 3. A wire position adjusting device for a wire saw according to claim 1, further comprising wire displacement detecting means for detecting relative displacement of the entire wire in a wire arrangement direction from a reference relative position with respect to a preset work, and the wire. A wire position adjusting device for a wire saw, comprising: roller position adjusting means for relatively moving both guide rollers relative to a work in a direction in which the relative displacement detected by the displacement detecting means is reduced. . 4. A wire position adjusting device for a wire saw according to claim 3, further comprising wire position detecting means for detecting the positions of the wires on both the left and right sides as the wire interval detecting means and the wire displacement detecting means. A wire position adjusting device in a wire saw, wherein a wire interval and a relative displacement of the entire wire with respect to a work are determined from a wire detection position by a detection means. 5. The wire position adjusting device for a wire saw according to claim 3 or 4, wherein both guide rollers are configured to be movable in the axial direction independently of each other, and between the one guide roller and the work. The first wire displacement detecting means, the second wire displacement detecting means is provided between the other guide roller and the work, and the one guide is detected based on the detection result of the first wire displacement detecting means. A wire saw, wherein the roller position adjusting means is configured to adjust the axial position of the roller and adjust the axial position of the other guide roller based on the detection result of the second wire displacement detecting means. Wire position adjusting device. 6. A cutting wire is stretched between a pair of guide rollers having a plurality of wire guide grooves axially arranged on the outer peripheral surface in a state of being engaged with the guide grooves.
In a wire saw in which works are cut and fed to these wires in a direction orthogonal to the arranging direction, the entire wire in the wire arranging direction from the reference relative position with respect to a preset work is cut. Wire displacement detecting means for detecting relative displacement, and roller position adjusting means for relatively moving both guide rollers relative to the work in the axial direction of the guide rollers in a direction to reduce the relative displacement detected by the wire displacement detecting means. A wire position adjusting device for a wire saw, comprising: 7. The wire position adjusting device for a wire saw according to claim 6, wherein the wire displacement detecting means includes wire position detecting means for detecting the positions of the wires on both the left and right outer sides, and the wire position detecting means detects the wire. A wire position adjusting device for a wire saw, characterized in that the relative displacement of the entire wire with respect to the workpiece is calculated from the position. 8. The wire position adjusting device for a wire saw according to claim 6 or 7, wherein both guide rollers are configured to be movable in the axial direction independently of each other, and between the one guide roller and the work. The first wire displacement detecting means, the second wire displacement detecting means is provided between the other guide roller and the work, and the one guide is detected based on the detection result of the first wire displacement detecting means. A wire saw, wherein the roller position adjusting means is configured to adjust the axial position of the roller and adjust the axial position of the other guide roller based on the detection result of the second wire displacement detecting means. Wire position adjusting device.