JPH09155674A - Positioning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow to move a moved body parallel at a specific amount, by making plural through holes parallel each other, and applying a load to them. SOLUTION: When a cutter 7 is wanted to move a little in parallel to the side surface 20Za side of a rigid body block 20, in the Z axial direction, for example, the handle of a male screw 23a is rotated adequately in the direction to loosen the male screw 23a, and then, the handle of a male screw 23b is rotated in the direction to push the upper side of the other side side surface 20Z, until the cutter 7 comes to the position to be moved. The parallel movement in the Z axial direction is carried out by the elastic deformation of the thin wall members between the first, the second, the third, and the fourth through holes 22a, 22b, 22c, and 22d, and a slit 22e.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning device suitable for use in adjusting a precise position of a blade for processing a workpiece such as an aspherical surface processing machine.

[0002]

2. Description of the Related Art Generally, for example, in an aspherical surface processing machine, it is necessary to accurately fix a blade for processing an object to be machined at a position serving as a processing reference of the aspherical surface processing machine. , Needed a precise positioning device.

As a precise positioning device for such a blade, a dovetail groove mechanism has been proposed so that it can slide in the groove direction. In the positioning device using such a dovetail groove mechanism, positioning with an accuracy of about several microns is possible, but in the positioning device of this dovetail groove mechanism, since there is sliding, there is always a gap. There is backlash and dead zone due to the gap, and 0.
Positioning with an accuracy of about 01 micron was extremely difficult.

Further, one and the other rigid bodies are connected by a leaf spring, one rigid body is fixed, the blade is fixed to the other rigid body, and a load is applied to the other rigid body so as to move in parallel by a predetermined amount. However, in such a mechanism, unstable stress characteristics of the fastening portion between the rigid body and the leaf spring, and when different metals are used, different material characteristics (for example, thermal expansion coefficient) are used. Etc.) adversely affects the positioning accuracy, and positioning with an accuracy of about 0.01 micron is extremely difficult.

In view of the above point, the present invention has an object to facilitate positioning with high accuracy of about 0.01 micron.

[0006]

The positioning device of the present invention comprises:
It has a rigid block with one side as a fixed part and a movable body on the other side, and the moving direction of this movable block of this rigid block between the solid part of this rigid block and this movable block. The first and second through holes formed at predetermined positions close to the elastically deformable thickness in the first surface in the direction of the first surface intersecting with each other, and the movable body of the rigid block. The third and fourth through holes formed at predetermined positions close to the elastically deformable thickness on the second surface in the second surface direction intersecting the moving direction of The second, third, and fourth through holes are communicated with each other, and slits formed so as to maintain rigidity are provided between the first, second, third, and fourth through holes, and the rigid block A load supply means is provided on the side of the movable body, and the first,
The second, third and fourth through holes are made parallel to each other,
By applying a load by the load supplying means, the movable body is moved in parallel by a predetermined amount.

According to the present invention, when a load is applied by the load supplying means, the thin-walled portions of the first, second, third and fourth through holes are elastically deformed according to the load, and the movable body is moved. Can be translated by a predetermined amount.

According to the present invention, the elastically deformable first,
The portions of the second, third and fourth through holes are integral with the portion where the fixed portion and the movable body are arranged, and the first, second, and
Since rigidity is maintained between the third and fourth through holes, there is no backlash or dead zone, and positioning can be performed with high accuracy, for example, about 0.01 micron.

Further, according to the present invention, since it is an integral structure, there is no unstable element such as a difference in coefficient of thermal expansion, and positioning can be performed accurately.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An example in which an embodiment of the positioning device of the present invention is applied to an aspherical surface processing machine will be described below with reference to the drawings. FIG. 2 shows an example of an aspherical surface processing machine. In FIG. 2, reference numeral 1 denotes a frame fixed at a predetermined position, and a stone is mounted on the frame 1 via an air spring device 2 that absorbs external vibration. Arrange surface plate 3.

A workpiece 4 forming an aspherical surface is fixed on the stone surface plate 3, a workpiece rotating unit 6 having a main shaft for rotating the workpiece 4 is fixed at a predetermined position, and the stone surface is fixed. On the board 3, a precision feed unit 8 for precisely feeding the blade 7 for processing the workpiece is fixed at a predetermined position.

This precision feed unit 8 is composed of two orthogonal axes (X
A rotary disk 10 that rotates by a rotary shaft (B axis) is provided on the shaft (Z axis) slide device 9, and the positioning device 11 according to the present example is fixed to a predetermined position on the rotary disk 10 and the positioning device 11 is provided. The blade 7 is fixed to the.

The two orthogonal axes (X axis and Z axis) and the rotary axis (B axis) each have an independent drive source so that a free curved surface can be processed.

The positioning device 11 according to this embodiment is constructed as shown in FIGS. 1A and 1B. In the examples of FIGS. 1A and 1B,
A Z-axis positioning device 11Z that determines the position of the blade 7 in the Z-axis direction, an X-axis positioning device 11X that determines the position in the X-axis direction, and a Y that determines the position in the Y-axis direction on one rigid block 20 made of stainless steel, brass, or the like. Axis positioning device 1
It is formed by stacking three positioning devices of 1Y.

The Z-axis positioning device 11Z, the X-axis positioning device 11X, and the Y-axis positioning device 11Y have substantially the same structure.

In FIGS. 1A and 1B, reference numeral 21 denotes a box-shaped frame made of a rigid body that is mounted and fixed to the turntable 10. At the bottom of the box-shaped frame 21, one part of the Z-axis positioning device 11Z part of the rigid block 20 is provided. The side or bottom is fixed. The size of the bottom surface of the rigid block 20 is, for example, 71
mm × 71 mm. An X-axis positioning device 11X for moving the blade 7 in the X-axis direction is provided on the other side, that is, on the upper side of the Z-axis positioning device 11Z of the rigid block 20.

In this example, as shown in FIG. 1A, between the bottom of the rigid block 20 and the X-axis positioning device 11X, that is, the Z-axis positioning device 11 of the rigid block 20.
Side surfaces 20Za and 20Zb facing each other that intersect in the moving direction of the blade 7 of the Z portion, that is, the Z-axis direction are surfaces parallel to each other.

A thickness which can be elastically deformed to the one side surface 20Za in parallel with the one side surface 20Za, for example, 0.2 m.
A predetermined position close to m, such as 45 mm and 10 from the bottom
The first and second through holes 22a and 22b having a diameter of 3 mm are formed at a position of mm, respectively, and the thickness of, for example, 0.2 mm which is elastically deformable to the other side surface 20Zb is parallel to the other side surface 20Zb. At a predetermined position, for example, 45 mm and 10 mm from the bottom surface, for example, a diameter of 3 mm
The third and fourth through holes 22c and 22d are formed, respectively.

In this case, the first, second, third and fourth through holes 22a, 22b, 23c and 22d are parallel to each other, and the first, second, third and fourth through holes 22a are formed. , 2
The bending lines caused by 2b, 22c and 22d are parallel to each other.

The first, second, third and fourth through holes 2
An approximately X-shaped slit 22e is formed so as to connect the four through holes 2a, 22b, 22c, and 22d to each other.
Regarding the width of the slit 22e, the width of the portion where the substantially X-shaped slits intersect is, for example, 2 mm, and the width of the other portion is, for example, 1 mm.

In this case, between the first through hole 22a and the second through hole 22b, between the third through hole 22c and the fourth through hole 22d, and between the first through hole 22a and the third through hole. Through hole 22
c and between the second through hole 22b and the fourth through hole 22d.
The rigidity between and remains until retained.

Further, as shown in FIG. 1A, this one surface 20
Frame 21 facing Za and the other surface 20Zb, respectively
Side walls 21Za and 21Zb of the first and third through holes 2
Male screws 23a having knobs on the blade 7 side from 2a and 22c, that is, on the X-axis positioning device 11X side in this example.
And 23b, respectively, to form female screws, through which male screws 23a and 23b having knobs are passed, and by rotating knobs of the male screws 23a and 23b, one and the other of the rigid block 20 are rotated. Surface 20Za
And 20Zb are loaded in the Z-axis direction.

Further, the X-axis positioning device 11X portion of the rigid block 20 is integrally fixed on one side to the Z-axis positioning device 11Z portion, and the blade is provided on the other side of the X-axis positioning device 11X portion of the rigid block 20, that is, on the upper side. A Y-axis positioning device 11Y that moves 7 in the Y-axis direction is provided.

In this embodiment, as shown in FIG. 1B, the rigid block 20 is located between the Z-axis positioning device 11Z and the Y-axis positioning device 11Y, that is, the rigid block 2.
No. 0 X-axis positioning device 11 The side faces 20Xa and 20Xb of the X-axis positioning device 11 that face each other intersecting the moving direction of the blade 7, that is, the X-axis direction.
Are parallel to each other.

In parallel with the one side surface 20Xa, elastically deformable thickness of the one side surface 20Xa, for example, 0.2 m.
The first and second through holes 24a and 24b having a diameter of, for example, 3 mm are formed at predetermined positions close to m, for example, at positions of 90 mm and 55 mm from the bottom surface of the rigid block 20, and are parallel to the other side surface 20Xb. Third and fourth through holes 24c and 24d having a diameter of 3 mm are formed at predetermined positions close to the elastically deformable thickness of 0.2 mm, for example, at positions 90 mm and 55 mm from the bottom surface, respectively, on the side surface 20Xb.

In this case, the first, second, third and fourth through holes 24a, 24b, 24c and 24d are parallel to each other, and the first, second, third and fourth through holes 24a are formed. , 2
The bending lines generated from 4b, 24c and 24d are made parallel to each other.

The first, second, third and fourth through holes 2
A substantially X-shaped slit 24e is formed so as to connect the four through holes 4a, 24b, 24c, and 24d to each other.
As for the width of the slit 24e, the width of the portion where the substantially X-shaped slits intersect is, for example, 2 mm, and the width of the other portions is, for example, 1 mm.

In this case, between the first through hole 24a and the second through hole 24b, between the third through hole 24c and the fourth through hole 24d, and between the first through hole 24a and the third through hole. Through hole 24
c and between the second through hole 24b and the fourth through hole 24d.
The rigidity between and remains to be maintained.

Further, as shown in FIG. 1B, this one surface 2
Frame 2 facing 0Xa and the other surface 20Xb, respectively
Male screws 25a having knobs on the side of the blade 7 from the first and third through holes 24a and 24c of the side walls 21Xa and 21Xb of the first tool, that is, on the Y-axis positioning device 11Y side in this example.
And 25b, respectively, to form female screws, through which male screws 25a and 25b having knobs are passed, and by rotating the knobs of the male screws 25a and 25b, one and the other of the rigid block 20 Side of 20X
The load in the X-axis direction is applied to the upper side of a and 20Xb.

The Y-axis positioning device 11Y portion of the rigid block 20 is integrally fixed on one side to the X-axis positioning device 11X portion, and the cutting tool 7 is fixed on the other side of the Y-axis positioning device 11Y. In this case, as shown in FIGS. 1A and 1B, Z of a predetermined depth is provided on the other side of the Y-axis positioning device 11Y.
A groove 26 is formed in the axial direction, and the blade 7 is fixed at a predetermined position of the groove 26 so as to sandwich it.

In this example, as shown in FIG. 1B, the fixed portion of the Y-axis positioning device 11Y of the rigid block 20, that is, X.
Between the portion integrally connected to the axis positioning device 11X and the blade 7, the surfaces 20Ya and 20Yb that face each other and intersect in the moving direction of the blade 7, that is, the Y-axis direction are parallel to each other.

In parallel with the one surface 20Ya, a predetermined position close to the elastically deformable thickness of the one surface 20Ya, for example, 0.2 mm, for example, 41 mm and 16 mm from the fixed side end surface of the Y-axis positioning device 11Y part. At the position of, for example, the first and second through holes 27a and 27b having a diameter of 3 mm.
And a thickness at which the other surface 20Yb can be elastically deformed in parallel with the other surface 20Yb, for example, 0.2.
Third and fourth through holes 27c and 27d having a diameter of 3 mm, for example, are formed at predetermined positions approaching mm, for example, 41 mm and 16 mm from the fixed side end surface of the Y-axis positioning device 11Y.

In this case, the first, second, third and fourth through holes 27a, 27b, 27c and 27d are parallel to each other, and the first, second, third and fourth through holes 27a, 27
The bending lines caused by b, 27c and 27d are parallel to each other.

The first, second, third and fourth through holes 2
An approximately X-shaped slit 27e is formed so as to connect the four through holes 7a, 27b, 27c and 27d to each other.
The width of the slit 27e is set to, for example, 1 mm, and the portion where the X-shaped slit 27e intersects is formed into a circle having a predetermined diameter.

In this case, between the first through hole 27a and the second through hole 27b, between the third through hole 27c and the fourth through hole 27d, and between the first through hole 27a and the third through hole 27d. Through hole 27
between the second through hole 27b and the fourth through hole 27d
The rigidity between and remains to be maintained.

Further, in this example, as shown in FIGS. 1A and 1B, a groove 26 formed on the rigid block 20 above the X-axis positioning device 11X and on the other side of the Y-axis positioning device 11Y.
Forming a female screw 29 downward at a position corresponding to the portion,
The male screw 28a having the knob is passed through the groove 26 and the nut 28b, and is passed through the female screw 29. The male screw 28a having the knob and the nut 28 are provided.
The load in the Y-axis direction is applied to the other side of the Y-axis positioning device 11Y by b.

This embodiment is constructed as described above, and when the workpiece 4 is machined by this aspherical surface processing machine, this blade 7 is used.
Is accurately fixed to a position serving as a processing reference of the aspherical surface processing machine, and the cutting tool 7 is fixed to the rotary table 10 of the aspherical surface processing machine with a certain degree of accuracy, for example, an accuracy of about 1 mm.
Keep it fixed on top.

After that, the Z-axis positioning device 11Z, the X-axis positioning device 11X, and the Y-axis positioning device 11Y are used to finely adjust the position of the blade 7 in the Z-axis direction, the X-axis direction, and the Y-axis direction.

That is, when it is desired to move the blade 7 in parallel to the side surface 20Za in the Z-axis direction, for example, the knob of the male screw 23a is rotated by an appropriate amount, and then the knob of the male screw 23b is rotated. It rotates in a direction of pushing the upper side of the other side surface 20Zb (direction in which a load is applied) until it comes to a position to be moved.

When the blade 7 reaches a position to move, the knob 7 of the male screw 23a is turned in the tightening direction until it does not move, and the blade 7 is held at that position in the Z-axis direction. Further, when it is desired to perform parallel movement in the opposite direction of the Z-axis direction, the reverse operation described above may be performed.

In this case, the parallel movement in the Z-axis direction can be performed by elastically deforming the thin portion of the first, second, third and fourth through holes 22a, 22b, 22c and 22d and the slit 22e. it can.

In this case, the elastically deformed first and
The second, third and fourth through holes 22a, 22b, 22c and 22d are integral with the fixed side and the parallel moving side, and the first, second, third and fourth through holes 22a, 22b,
All parts except the portions 22c and 22d and the slit 22e are rigid bodies, and in this parallel movement, there is no backlash or dead zone, and positioning can be performed with high accuracy, for example, about 0.01 micron.

Further, in this case, because of the integral structure, there is no unstable element such as a difference in coefficient of thermal expansion, and the positioning can be performed accurately.

Similarly, when it is desired to move the blade 7 parallel to the side surface 20Xa a little more in the X-axis direction, for example, the knob of the male screw 25a is rotated in a direction to loosen it, and then the knob of the male screw 25b is rotated. 7 is rotated in a direction of pushing the upper side of the other side surface 20Xb (a direction in which a load is applied) until it comes to a position to be moved.

When the blade 7 reaches the position to be moved, if the knob of the male screw 25a is turned in the tightening direction until it does not move, the blade 7 is held at that position in the X-axis direction. Further, when it is desired to perform parallel movement in the X-axis direction in the opposite direction, the above-described reverse operation may be performed.

In this case, the parallel movement in the X-axis direction can be performed by elastically deforming the thin portion of the first, second, third and fourth through holes 24a, 24b, 24c and 24d and the slit 24e. it can.

In this case, the elastically deformed first and
The second, third and fourth through holes 24a, 24b, 24c and 24d are integral with the fixed side and the parallel moving side, and
The first, second, third and fourth through holes 24a, 24
Except for the portions of b, 24c and 24d and the slit 24e, they are all rigid bodies, and in this parallel movement, there is no backlash or dead zone, and positioning can be performed with high precision, for example, about 0.01 micron.

Further, in this case, because of the integral structure, it is possible to perform positioning with high accuracy without unstable elements such as difference in thermal expansion coefficient.

In addition, the blade 7 is, for example, in the Y-axis direction,
If you want to move parallel to the other surface 20Yb (downward) a little more, rotate the nut 28b to lower it appropriately (loosen it), then hold it by hand so that it does not rotate, and then turn the knob of the male screw 28a. Turn in the tightening direction.

When the blade 7 reaches the position where it is desired to move, this time hold the knob of this male screw 28a by hand so as not to rotate it, and move the nut 28b upward until it does not move.
If turned, the blade 7 is held at that position in the Y-axis direction. Further, when it is desired to perform parallel movement in the opposite direction of the Y-axis direction, the operation may be performed in the reverse procedure described above.

In this case, the parallel movement in the Y-axis direction can be performed by elastically deforming the thin portion of the first, second, third and fourth through holes 27a, 27b, 27c and 27d and the slit 27e. it can.

In this case, the elastically deformed first and
The second, third and fourth through holes 27a, 27b, 27c and 27d are integral with the fixed side and the parallel moving side, and
The first, second, third and fourth through holes 27a, 27
All of the portions except b, 27c and 27d and the slit 27e are rigid bodies, and in this parallel movement, there is no backlash or dead zone, and positioning can be performed accurately with a precision of, for example, about 0.01 micron.

Further, in this case, because of the integral structure, there is no unstable element such as difference in coefficient of thermal expansion, and the positioning can be performed accurately.

In the above, the Z-axis direction, the X-axis direction and the Y-axis direction
Although each movement in the axial direction is described as parallel movement, it cannot be said to be parallel movement in the strict sense, but in the above example, the movement amounts in the Z axis direction, the X axis direction, and the Y axis direction are smaller than 0.5 mm, And since this error is smaller than 1/100 of this movement amount, this error can be ignored.

A predetermined scale is used to accurately fix the position of the cutting tool 7 to the machining reference. In the end, a trial manufacture is performed, and by trial and error, the above-mentioned Z-axis direction and X-axis are determined. The position of the blade 7 in the direction and the Y-axis direction is determined.

According to this example, since there is no backlash, dead zone, etc., it is easy for the operator to fit in the target position.
There is an advantage that the cutting tool 7 can be accurately adjusted in a short time based on the processing standard.

In the above-mentioned embodiment, an example of positioning in the three axial directions of the Z-axis direction, the X-axis direction and the Y-axis direction has been described, but the above-mentioned uniaxial positioning device is used, for example, in an atomic attraction microscope ( AFM), a tunnel microscope (STM), etc. can be applied to fine adjustment and positioning of an objective lens incorporated in a sample stage, a laser beam machine, etc. that requires ultrafine adjustment and positioning. X-axis direction and Y
It can be applied to fine adjustment positioning of an XY table or the like by using a positioning device in two axial directions.

Further, in the above-mentioned embodiment, it is described that the load is applied by pushing, but it goes without saying that the load may be applied by pulling.

Further, the through holes 22a, ... 22d, 24
24a, 27a, ... 27d may not be circular, but may have other shapes such as an ellipse, and the slit 22
e, 24e, and 27e may be communication holes that do not affect the rigidity.

Further, in the above embodiment, one surface 20
Za, 20Xa and 20Ya and the other surface 20Zb, 20
Although it has been described that Xb and 20Yb are parallel planes, they do not have to be parallel planes, but each of the four through holes 22a
-22d, 24a-24d and 27a-27d need to be substantially parallel to each other.

Further, the present invention is not limited to the above-mentioned embodiments, and it goes without saying that various other configurations can be adopted without departing from the gist of the present invention.

[0062]

According to the present invention, when a load is applied by the load supplying means, the thin-walled portions of the first, second, third and fourth through holes are elastically deformed according to the load and are moved. The body can be translated by a predetermined amount.

Further, according to the present invention, this elastic deformation,
The portions of the first, second, third and fourth through holes are integral with the portion where the fixed portion and the movable body are arranged, and the first,
Since rigidity is maintained between the second, third, and fourth through holes, there is no backlash or dead zone and the accuracy is 0.0, for example.
Positioning can be performed with an accuracy of about 1 micron.

Further, according to the present invention, since it is an integral structure, there is no unstable element such as difference in coefficient of thermal expansion, and positioning can be performed accurately.

[Brief description of the drawings]

FIG. 1 shows an embodiment of a positioning device of the present invention, A is a front view and B is a side view.

FIG. 2 is a perspective view showing an example of an aspherical surface processing machine.

[Explanation of symbols]

4 Workpiece 7 Blade 11X X-axis positioning device 11Y Y-axis positioning device 11Z Z-axis positioning device 20 Rigid block 20Za, 20Zb Parallel surface 20Xa, 20Xb Parallel surface 20Ya, 20Yb Parallel surface 21 Frame 21Xa, 21Xb, 21Za, 21Zb Side wall 22 22d, 24a to 24d, 27a to 27d Through hole 22e, 24e, 27e Slit 23a, 23b, 25a, 25b, 28a Male screw with knob 26 Groove 28b Nut 29 Female screw

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akitaka Hikita 3-9-17 Nishigotanda, Shinagawa-ku, Tokyo Toyo Building Sony Magnescale Co., Ltd.

Claims (3)

[Claims] 1. A rigid block having a fixed portion on one side and a movable body arranged on the other side, wherein the rigid block has a solid portion between the solid portion and the movable body. First and second through-holes formed at a predetermined position close to the elastically deformable thickness on the first surface in a first surface direction intersecting the moving direction of the moving body; and the rigid block. The third and fourth through holes formed by penetrating at a predetermined position close to the elastically deformable thickness on the second surface in the second surface direction intersecting the moving direction of the movable body, The first, second, third and fourth through holes communicate with each other and a slit formed so as to maintain rigidity between the first, second, third and fourth through holes. In addition, a load supply means is provided on the side of the movable body of the rigid block, and the first, second It as the third and mutually parallel fourth through hole, the positioning device being characterized in that above such that a predetermined amount translate the movable body by applying a load by the load supply means. 2. The positioning device according to claim 1, wherein
A positioning device characterized in that the bending lines respectively generated in the first, second, third and fourth through holes are parallel to each other. 3. One rigid block allows three parallel translations in the X-, Y- and Z-axis directions by a predetermined amount.
Alternatively, a positioning device according to claim 2 is provided.