JPH0917839A - Processing method and processing apparatus - Google Patents

Abstract

(57) [Abstract] [Purpose] The processing efficiency is improved and the yield is improved by monitoring the set state of the container for containing the object to be processed and the operation of the transport means for selecting and extracting the object to be processed in the container. Improve. A container 6 for accommodating a plurality of objects to be processed, for example, semiconductor wafers W, a transfer mechanism 4 for loading and unloading a predetermined semiconductor wafer W selected from the container 6, and a processing unit for appropriately processing the semiconductor wafers W In a processing apparatus including the cassette 3, a cassette sensor 7 for detecting the presence / absence of a container 6, and a CPU driven based on a signal from the cassette sensor 7.
8 is provided. When there is no container 6, the state is displayed by an alarm 9, the container 6 is set at a predetermined position based on the alarm display, and then the semiconductor wafer W in the set container 6 is selected by the mapping sensor 18. At the same time, the abnormal operation of the transport mechanism 4 is detected, and the detection signal is transmitted to the CPU 8.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing method and a processing apparatus for appropriately processing an object to be processed such as a semiconductor wafer or an LCD substrate.

[0002]

2. Description of the Related Art Generally, in a semiconductor device manufacturing process, a circuit pattern is reduced on a surface of an object to be processed such as a semiconductor wafer or an LCD substrate by using a photolithography technique and transferred to a photoresist, which is then developed. A coating / developing system is used.

The coating / development processing system described above includes a loading / unloading section for setting a container for accommodating a plurality of semiconductor wafers, for example, 25 semiconductor wafers, and cleaning / cooling of the semiconductor wafers.
A processing unit provided with a processing unit for performing various kinds of processing such as heat treatment such as heating, resist coating processing, development processing, and the like. The main part is composed of a delivery section including tweezers as delivery means.

In the coating / developing processing system configured as described above, for example, semiconductor wafers in the container set in the carry-in / carry-out section are selected one by one, and then taken out with tweezers and conveyed to the processing section. After performing appropriate processing in the section, the semiconductor wafer is loaded into an empty container to complete the processing. Further, in the processing of the LCD substrate, the LCD substrate is large in size and weight with respect to the semiconductor wafer.
After the container is fixedly held on the mounting table of the loading / unloading unit, the LCD substrate is similarly taken out by tweezers and transported to the processing unit, and the processing is continuously performed as appropriate.

[0005]

However, when the container in which the unprocessed semiconductor wafer, LCD substrate, or the like is to be processed is not accurately set in the carry-in / carry-out section, or the container moves during the process. Or, if the container is not held sufficiently, the position of the object to be processed will change and transportation will be hindered, making it impossible to continue processing, or causing damage to the object. There has been a problem that the efficiency is lowered and the yield is lowered.

The present invention has been made in view of the above circumstances, and monitors the set state of the container for containing the object to be processed and the operation of the transfer means for selecting and removing the object to be processed in the container, and selects the object. It is an object of the present invention to provide a processing method and a processing apparatus capable of improving the processing efficiency and the product yield by appropriately processing the processed object.

[0007]

In order to achieve the above object, the processing method according to claim 1 carries out an appropriate treatment by carrying out an object to be processed selected from a container accommodating a plurality of objects to be processed. Based on the processing method, a step of detecting the presence or absence of the container, a step of displaying the state when the container is not present, a step of setting the container in a predetermined position based on the display, A step of selecting the object to be processed in the container.

The treatment method according to claim 2 is based on the premise that, like the above-mentioned treatment method, a treatment object selected from a container accommodating a plurality of treatment objects is carried out and subjected to appropriate treatment. When the means for detecting the presence or absence of a container malfunctions, a step of displaying the state, a step of setting the container at a predetermined position based on the display, and a selection of the object to be processed in the set container And a step of performing.

The treatment method according to claim 3 is based on the premise that, like the above-mentioned treatment method, a treatment object selected from a container accommodating a plurality of treatment objects is carried out and subjected to appropriate treatment. When the transfer means for the object to be processed stops operating, the step of returning the transfer means to the initial position, the step of detecting the state of the object to be processed in the container, and the state of the object to be processed in the container When different from before the stop of the means, a step of displaying the state, a step of setting the container at a predetermined position based on the display, a step of selecting the object to be treated in the set container, It is characterized by having.

The processing method according to claim 4 is the method according to claim 3 above.
In the processing method described above, when detecting the state of the object to be processed in the container, the type of the object to be processed is simultaneously detected.

The treatment method according to claim 5 is based on the premise that, like the above-mentioned treatment method, a predetermined treatment object selected from a container accommodating a plurality of treatment objects is carried out and appropriate treatment is performed. A step of detecting whether or not the container is held at a predetermined position, a step of displaying the state when the container is not held as specified, and a step of displaying the container based on the display. Installing and holding in position,
A step of selecting the object to be processed in the container installed and held at a predetermined position.

According to a sixth aspect of the present invention, there is provided a processing apparatus in which a container for storing a plurality of objects to be processed, a transport means for carrying in and out a predetermined object to be processed selected from the container, and the object to be processed are appropriately processed. Assuming a processing apparatus including a processing unit for performing, container presence / absence detection means for detecting the presence or absence of the container, display means for displaying the state when the container is not present, and the container based on the display. Signals are transmitted to the display means and the container conveying means based on signals from the container conveying means set at a predetermined position, the detecting means for selecting the object to be treated in the set container, and the container presence / absence detecting means. And a control means for controlling the operation.

The processing apparatus according to claim 7 is, like the processing apparatus, a container for housing a plurality of objects to be processed, a transfer means for carrying in and out a predetermined object to be processed selected from the containers, On the premise of a processing apparatus including a processing unit that appropriately performs processing on an object to be processed, container presence / absence detection means for detecting presence / absence of the container, operation detection means for detecting an operation state of the container presence / absence detection means, and When the container presence / absence detecting means malfunctions, a display means for displaying the state, a container conveying means for setting the container at a predetermined position based on the display, and a processing object in the set container are selected. And a control means for transmitting a signal to the display means and the container carrying means based on the signal from the operation detecting means.

The processing apparatus according to claim 8 is, like the processing apparatus, a container for containing a plurality of objects to be processed, a transfer means for carrying in and out a predetermined object to be processed selected from the container, and the above-mentioned. Assuming a processing apparatus including a processing unit that appropriately performs processing on an object to be processed, an object to be processed detection unit that detects the state of the object to be processed in the container, and an abnormal state of the object to be processed in the container. Display means for displaying, container conveying means for setting the container at a predetermined position based on the display, detecting means for selecting the object to be processed in the set container, and signal from the object to be processed detecting means Control means for transmitting a signal to the display means and the container transport means based on the above.

A processing apparatus according to a ninth aspect is the above-mentioned eighth aspect.
The processing apparatus described above is characterized in that the processing object detecting means and the detecting means for selecting the processing object are integrally provided, and a processing function of detecting the type of the processing object is provided.

A processing apparatus according to a tenth aspect of the present invention is, like the processing apparatus, a container for accommodating a plurality of objects to be processed, a conveying means for carrying in and out a predetermined object to be processed selected from the container, and the above-mentioned. Assuming a processing apparatus including a processing unit that appropriately performs processing on an object to be processed, container holding means for setting and holding the container at a predetermined position, and container holding detection means for detecting whether or not the container is held, When the container is not held as prescribed, a display means for displaying the state, a detection means for selecting the object to be treated in the container installed and held at a prescribed position, and the container holding detection Control means for transmitting a signal to the container holding means and the display means based on a signal from the means.

[0017]

According to the inventions of claims 1 and 6, it is possible to detect the presence or absence of a container for accommodating a plurality of objects to be processed, and if there is no container, display the state and notify the operator or the like. Also, after the container is set at a predetermined position based on this display, the object to be processed in the set container can be selected and processed.

According to the second and seventh aspects of the invention, when the means for detecting the presence / absence of the container causes a malfunction such as a state of continuously detecting, the state is displayed and the operation is performed. It can be known to those skilled in the art, and after the container is set at a predetermined position based on this display, the object to be processed in the set container can be selected and processed.

According to the third and eighth aspects of the present invention, when the transfer means for the object to be processed that takes out the object to be processed from the container containing the plurality of objects is stopped, the transfer means is returned to the initial position. After that, the condition of the object to be processed in the container can be detected, and when the object to be processed in the container is different from that before the transportation means is stopped, the state can be displayed to inform the operator, etc. After the container is set at a predetermined position based on the display, the object to be processed in the set container can be selected and processed. In this case, by integrally providing the processing object detecting means for detecting the state of the processing object and the detection means for selecting the processing object, the number of constituent members can be reduced, and further,
When detecting the state of the object to be processed in the container, by detecting the type of the object to be processed at the same time, the processing of non-target objects is prevented, and the initial objects are processed continuously. It is possible (claims 4 and 9).

According to the fifth and tenth aspects of the present invention, the presence or absence of holding of the container installed at a predetermined position is detected, and when the container is not held as specified, the state is displayed. It is possible to inform the operator, etc., and after the container is installed and held at a predetermined position based on this display, the object to be processed in the container installed and held at the predetermined position can be selected and processed. it can.

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below in detail with reference to the drawings.

First Embodiment FIG. 1 is a schematic plan view of a first embodiment of the processing apparatus of the present invention,
FIG. 2 is a schematic side view of the main part. Here, a case where the processing apparatus according to the present invention is applied to a semiconductor wafer coating / developing processing system will be described.

The semiconductor wafer coating / developing system 1 is capable of mounting a plurality of containers 6 (cassettes) containing, for example, a large number of semiconductor wafers W (hereinafter referred to as wafers) as objects to be processed at one end thereof. The loading / unloading section 2 configured as described above, the processing section 3 including a plurality of processing units for appropriately processing the wafer W, and the loading / unloading section 2 and the processing section 3
And a delivery section 5 having a delivery mechanism 4 as a delivery means for delivering the wafer W.

A cassette sensor 7 (container presence / absence detecting means) for detecting the presence / absence of the container 6 is arranged on the loading / unloading portion 2 on which the container 6 is placed. The cassette sensor 7 is formed of, for example, a photo sensor having a light emitting element and a light receiving element, an electrostatic capacitance type sensor, a micro switch, etc., and a detection signal thereof is compared with information stored in advance and described later. It is transmitted to a central processing unit 8 (hereinafter referred to as a CPU) as a control means for performing the operation.

As shown in FIGS. 1 to 3, the transfer mechanism 4 is slidable in a horizontal Y direction along a transfer path 11 provided between the loading / unloading section 2 and the processing section 3. And a carrier table 12 which is disposed on the upper surface of the carrier table 12 and is moved by a ball screw mechanism (not shown) or the like.
A shaft 1 that can be moved up and down (Z direction) and horizontally rotated (θ) by a ball screw mechanism, stepping device, etc. built in 2
3 and a tweezers 15 and an arm 16 as a delivery means that moves forward and backward in the horizontal X direction by a driving unit 14 mounted on the shaft 13. In this case, the tweezers 15 are formed in a rectangular plate shape having a width that can be inserted into the container 6, and are connected to a vacuum pump (not shown) to adsorb and place the wafer W, and unprocessed with the container 6. And the processed wafer W is delivered. On the other hand, the arm 16 is formed in a substantially horseshoe shape with an open end, and is configured to be able to hold the lower surface of the edge portion of the wafer W by a not-shown claw portion that protrudes from the inner peripheral surface at an appropriate interval. Wafer W with processing unit 3
Is configured to deliver.

Further, a sensor 17 for confirming the alignment of the photoelectric type wafer W is provided on the base of the tweezers 15. Further, a mapping sensor 18 for detecting the presence / absence of the wafer W in the container 6 and confirmation of the type of the wafer W is attached to the front end side of the drive unit 14. The mapping sensor 18 is formed by a photo sensor including a light emitting unit 18a and a light receiving unit 18b, and after facing the container 6, enters the container 6 to check the presence / absence of the wafer W in the container 6. The position and type of the other wafer W, such as a 6-inch wafer or an 8-inch wafer, can be discriminated, and further, the malfunction of the mapping sensor 18 itself can be detected. The alignment confirmation sensor 17 and the mapping sensor 18 are configured to transmit their detection signals to the CPU 8.

The CPU 8 includes the cassette sensor 7,
The detection signals from the positioning sensor 17 and the mapping sensor 18 are compared and calculated with previously stored information, and the output signals are displayed on the display means, for example, the alarm 9 and the container transport device 20.
And the transfer mechanism 4 can be transmitted. Here, the alarm 9 is an alarm device such as a buzzer or a bell,
This means displays including lamp displays or screen displays on monitors. For example, when the container 6 is not placed at the predetermined loading position of the loading / unloading section 2 and the cassette sensor 7 detects that there is no cassette, an alarm 9 is generated by an output signal from the CPU 8 based on the detection signal. Operates and informs the operator of the condition. Further, by providing the cassette sensor 7 with an operation detecting means for detecting an operation state of the cassette sensor itself, for example, a timer function, for example, the cassette sensor 7 continuously detects a state different from an actual state for a time longer than a timer set time. Even if a malfunction that continues to occur occurs, the CPU 8 based on the detection signal
An alarm 9 is activated by an output signal from the device to notify the operator of the state. As a specific example, it is possible to monitor a case where a transfer robot such as an AGV automatically places or carries out a cassette, generates a completion signal as a transfer completion at that time, and continues to malfunction with or without a cassette for a certain period of time. It will be possible. Further, by driving the container transporting device 20 based on the detection signal indicating that there is no cassette, the container 6 is reloaded and transported and set at a predetermined position. Then, after the container 6 is set at a predetermined position, the transfer mechanism 4 is driven again to detect (mapping) the presence or absence of the wafer W in the container 6 and the position thereof. On the other hand, mapping sensor 1
When 8 detects information different from preprogrammed information or the presence of different types of wafers W, the alarm 9 is activated by the output signal from the CPU 8 based on the detection signal, and the operator etc. To inform the state. Further, the transport mechanism 4 is driven based on the detection signal, and the tweezers 15 retracts from the container 6 and once returns to the initial position. In addition, the cassette transport device 20 is based on the detection signal.
Drives to convey and set the container 6 to a predetermined position. Then, after the container 6 is set at a predetermined position, the transfer mechanism 4 is driven again to detect (map) the wafer W in the container 6.
Is performed.

On the other hand, the processing section 3 is composed of a first processing section 31 and a second processing section 32 which are arranged in series via a relay section 30. In this case, the first processing unit 31 is provided with a transfer path 33 along the longitudinal direction of the central part, and a brush cleaning device 34 for cleaning the wafer W with a brush on one side of the transfer path 33 and a high-pressure jet of the wafer W. A jet water cleaning device 35 for cleaning with water, an adhesion processing device 36 for hydrophobicizing the surface of the wafer W, and a cooling device (not shown) disposed below the adhesion processing device 36 for cooling the wafer W to a predetermined temperature. And a resist coating device 37 and a coating film removing device 37a are provided on the opposite side of the transport path 33. The wafer W is movably provided along the transfer path 33 so that the wafer W is transferred to and from each of the devices 34 to 37a. Further, the second processing unit 32 is provided with a transport path 33 along the longitudinal direction of the central portion similarly to the first processing unit 31, and on one side of the transport path 33,
Three heating devices 3 in which a plurality of hot plates are vertically stacked
8 are arranged in parallel, and two developing devices 39 are arranged in parallel on the opposite side with respect to the transport path 33. Then, the wafer transfer arm 1 movably provided along the transfer path 33.
The wafer W is transferred to and from the respective devices 38 and 39 by means of 0a. The second processing unit 32 is connected to the exposure apparatus 40 via the relay unit 30a.

Next, the processing method of the present invention will be described with reference to FIG.
This will be described with reference to the flowchart shown in FIG. First, the cassette sensor 7 detects whether or not the container 6 containing the unprocessed wafer W is set on the mounting table of the loading / unloading section 2 (step A). Container 6 with cassette sensor 7
When it is detected that there is no container, or when the container 6 is once detected and there is a malfunction such that there is no container and the detection continues for more than the timer setting time, the signal is transmitted to the CPU 8 and the CPU 8 Is compared with the information stored in advance, and the output signal is transmitted to the display means, for example, the alarm 9 and displayed as an alarm to inform the operator or the like (step B). Further, based on this output signal, the cassette carrying device 20 is driven to automatically set or reset the container 6 on the mounting table of the loading / unloading section 2 (step C). In this case, the operator may manually set the container 6 without using the container transport device 20.

After the container 6 is set on the mounting table of the carry-in / carry-out section 2 as described above, the position of the wafer W is detected by the mapping sensor 18 to determine whether the set condition of the container 6 is normal. Is detected (step D). Container 6
If the set is not normal, for example, if the installation position of the container 6 is deviated, the detection signal is transmitted to the CPU 8 in the same manner as described above, and the information stored in advance in the CPU 8, for example, the position information of the wafer W at the normal time is detected. Is compared and calculated, and the output signal is transmitted to the display means, for example, the alarm 9 and displayed as an alarm to inform the operator or the like of the abnormality (step E). Further, based on this output signal, the container 6 is reset to a predetermined position by the cassette carrying device 20 or manually by the operator (step F).

When the container 6 is normally set in the predetermined position as described above, the mapping sensor 18 then maps the entire wafer W, and then the wafer W received by the tweezers 15 is selected. (Step G), during this mapping, the operation of the tweezers 15 is abnormal. For example, the tweezers 15 come into contact with the container 6 and the container 6 vibrates and floats or is displaced, resulting in the absence of a cassette or the tweezers 15 When the operation is stopped halfway due to some trouble (step H), the abnormal signal is transmitted to the CPU 8 and is compared with the information stored in advance in the CPU 8 in the same manner as described above, and the output signal thereof is displayed on the display means, for example, the alarm 9. Is notified to the operator and an alarm is displayed to inform the operator etc. (step I). Further, the tweezers 15 retracts from the container 6 based on this output signal and returns to the initial position (step J). After that, it is detected again by the mapping sensor 18 whether or not the position of the wafer W in the container 6 is the same as that before the occurrence of the abnormality (step K). If there is no abnormality, the predetermined wafer W is selected by the tweezers 15. It is taken out and conveyed to the processing unit 3 (step L). Further, if there is an abnormality, it is monitored whether the operating conditions of the container 6 and the tweezers 15 are proper by the procedure of alarm display after the step B, container setting, ... The above re-detection operation is also applied when the container 6 is intentionally lifted and removed, and then placed again.

As described above, by automatically monitoring the set state of the container 6 accommodating the unprocessed wafer W and the operation of the tweezers 15 for taking out the wafer W from the container 6, a wafer W transfer error occurs. Therefore, the wafer W can be continuously transported and a predetermined process can be performed in accordance with a pre-programmed procedure.

The wafer W transferred to the processing section 3 is
After being received by the wafer transfer arms 10 and 10a, cleaned, adhered, and cooled in this order, after resist coating,
After the resist film on the peripheral portion of the wafer W is removed, pre-baking and exposure by the exposure device 40 are performed, and then development processing and post-baking are performed. Then, it is carried to the carry-in / carry-out section 2 and stored in the container 6 for storing processed wafers.

Second Embodiment FIG. 5 is a schematic plan view of the second embodiment of the processing apparatus of the present invention,
FIG. 6 is a perspective view of the main part. The second embodiment is a case where the processing apparatus according to the present invention is applied to an LCD substrate coating / developing processing system.

The LCD substrate coating / development processing system 1A has, for example, a large number of Ls as objects to be treated at one end thereof, as in the semiconductor wafer coating / development processing system.
A loading / unloading section 2 configured to be able to mount a plurality of containers 6A (cassettes) that accommodate CD substrates G (hereinafter referred to as substrates).
A, a processing unit 3A including a plurality of processing units that appropriately processes the substrate G, and a transfer unit that transfers the substrate G between the loading / unloading unit 2A and the processing unit 3A. The main part is constituted by the delivery section 5A including the mechanism 4A. In this LCD substrate coating / developing processing system 1A, the processing section 3A is the same as the semiconductor wafer coating / developing processing system 1 except that the shapes of the substrate transport arms 10A and 10B as the transporting means are different. The same reference numerals are given to the parts, and the description thereof will be omitted.

A holding means, for example, a lock mechanism 50 for installing and fixing the container 6A is provided on the loading portion of the container 6A of the loading / unloading unit 2A, and the locking mechanism 50 loads / unloads the container 6A. It is adapted to be installed and fixed at a predetermined position on the mounting table of the section 2A. This lock mechanism 5
Reference numeral 0 indicates, for example, a flange portion 6a of the container 6A, which is disposed adjacent to the container 6A on the mounting table 2a of the loading / unloading unit 2A.
To get locked. This lock mechanism 50
As shown in FIG. 7, a case 51 fixedly arranged in the vicinity of the installation portion of the container 6A, and a magnet body that can be retracted from inside the case 51 toward the flange portion 6a of the container 6A. The formed lock piece 52, the spring 53 that constantly presses the lock piece 52 inward of the case 51, and the lock piece 52 in the locking direction (leftward in the figure) against the elastic force of the spring 53 by excitation. It is composed of an electromagnetic solenoid 54 for pressing.

In the lock mechanism 50 having such a structure, when the solenoid 54 is energized and excited, the spring 5
The lock piece 52 projects above the flange portion 6a of the container 6A against the elastic force of 3 and slightly presses the flange portion 6a against the mounting table 2a, whereby the container 6A can be fixedly held on the mounting table 2a. It is possible (see FIG. 7 (a)). Further, by stopping the energization of the solenoid 54, the lock piece 52 is retracted into the case 51 by the elastic force of the spring 53, and the holding of the container 6A is released (see FIG. 7B).

Further, a holding detection sensor 60 (container holding detection means) for detecting whether or not the lock mechanism 50 configured as described above is operating properly is provided. The holding detection sensor 60 is formed of, for example, a photo sensor having a light emitting element and a light receiving element, and the detection signal thereof is compared with information stored in advance, and the central processing unit 8 (as a control means is used as a control means. (Hereinafter referred to as CPU).

The transport mechanism 4A is a transport path provided between the loading / unloading section 2A and the processing section 3A, similarly to the transport mechanism 4 of the semiconductor wafer coating / developing system 1 of the first embodiment. A carriage 72, which is slidably arranged in the Y direction along 71, and is moved by a ball screw mechanism (not shown) or the like.
And a shaft 73 which is erected on the upper surface of the carrier table 72 and which can be vertically moved (Z direction) and horizontally rotated (θ) by a ball screw mechanism, a stepper, etc. built in the carrier table 72, and an upper part of the shaft 73. And a tweezers 75 as a delivery unit that moves back and forth in the horizontal direction (X direction) by a driving unit 74 attached to the. In this case, tweezers 75
Is formed in a rectangular plate shape having a width that can be inserted into the container 6A, and an upper surface thereof is provided with a suction groove 75a connected to a vacuum pump (not shown) for sucking and holding the substrate G, and this suction is performed. Nylon resin support protrusions 75b that support the substrate G are erected at three locations around the groove 75a. By forming the support protrusions 75b with a member made of a nylon resin in this manner, the charges of glass, which is the material of the substrate G, and the charges of nylon become positive and negative opposite charges, which cancel each other out to prevent generation of static electricity.

Further, the transfer mechanism 4A has a mapping sensor 18A for detecting the presence / absence, position, and number of substrates G accommodated in the container 6A, and the substrate G accommodated in the container 6A is moved to the center position of the container. A central positioning arm 80 is provided for positioning. In this case, the mapping sensor 18A is formed of a reflective photo sensor that moves along a guide bar 77 provided on the movable body 76, as shown in FIG. In this case, the mapping sensor 18A is composed of a light emitting portion 18c and a light receiving portion 18d which are arranged toward the container 6A, and a little between the light emitting axis of the light emitting portion 18c and the light receiving axis of the light receiving portion 18d. The light beam emitted from the light emitting portion 18c and reflected by the light receiving portion 18d can be reliably received by providing the inclination angle. The mapping sensor 18A is configured to transmit the detection signal to the CPU 8.
Further, the central positioning arm 80 is attached to a pair of arm bodies 81 which are connected to a reciprocating mechanism (not shown) mounted on the upper part of the movable body 76 and move in the forward and backward directions, and the facing surfaces of the respective arm bodies 81 on the tip side. And a substrate pressing member 82 made of nylon resin. The reason why the substrate pressing member 82 is made of a nylon resin member is that, as in the case of the support protrusion 75b, the electrostatic charge is generated by the nylon having the electric charge of the glass that is the material of the substrate G and the electric charge of positive and negative opposite charges. This is to prevent it.

The CPU 8 has the holding detection sensor 6
0 and the detection signal from the mapping sensor 18A are compared and calculated with prestored information, and the output signal can be transmitted to the display means such as the alarm 9 and the lock mechanism 50 and the transport mechanism 4A. For example, when the holding detection sensor 60 detects that the container 6A is not properly held by the lock mechanism 50 at the predetermined mounting position of the loading / unloading unit 2, the holding detection sensor 60 outputs the detection signal. Based on the output signal from the CPU 8 based on the alarm 9, the alarm 9 is activated to notify the operator of the state. Further, the lock mechanism 50 is automatically re-driven based on the detection signal, so that the container 6A is installed at a predetermined position and fixedly held. Then, after the container 6A is installed and fixed at a predetermined position, the transport mechanism 4A is driven again to detect (map) the substrate G in the container 6A. On the other hand, when the mapping sensor 18A detects information different from preprogrammed information or the presence of a different type of substrate G, the alarm 9 is activated by an output signal from the CPU 8 based on the detection signal. , Inform the workers of the condition. Further, the transport mechanism 4A is driven based on the detection signal, and the tweezers 75 retracts from the container 6A and temporarily returns to the initial position. Then, after the container 6A is installed and fixed at a predetermined position, the transport mechanism 4A is driven again to detect (map) the substrate G in the container 6A.

Next, the processing method of the second embodiment will be described with reference to the flowchart shown in FIG. First, the holding detection sensor 60 detects whether or not the container 6A containing the unprocessed substrate G is fixedly held at a predetermined position on the mounting table of the loading / unloading section 2A (step A). When the holding detection sensor 60 detects that the container 6A is not accurately fixed and held, the signal is transmitted to the CPU 8 and is compared and calculated with the information stored in advance by the CPU 8.
The output signal is transmitted to the display means, for example, the alarm 9, and an alarm is displayed to inform the operator or the like (step B). Further, the lock mechanism 50 is driven based on this output signal, and the container 6A is fixedly held on the mounting table of the loading / unloading section 2A (step C). In this case, the operator may manually fix and hold the container 6A.

After the container 6A is fixedly held on the mounting table of the carry-in / carry-out section 2A as described above, next, mapping is performed by the mapping sensor 18A, and
When the substrate G received by the tweezers 75 is selected (step D), the operation of the tweezers 75 is abnormal during this mapping, for example, when the tweezers 75 contacts the container 6A or the operation of the tweezers 75 is stopped (step E). , That signal is transmitted to the CPU 8, and C
The PU 8 performs a comparison calculation with the information stored in advance, and the output signal is transmitted to the display means, for example, the alarm 9, and an alarm is displayed to notify the operator or the like (step F). In addition, the tweezers 75 moves the container 6A based on this output signal.
To retreat to the initial position (step G). afterwards,
It is detected by the mapping sensor 18A whether the substrate G in the container 6A is the same as before the abnormality (step H). If there is no abnormality, the predetermined substrate G is taken out by the tweezers 75 and conveyed to the processing unit 3A. (Step I). Further, if there is an abnormality, it is monitored whether or not the operating conditions of the container 6A setting and the tweezers 75 are proper by the procedure of the alarm display after the step B, the container setting, ...

As described above, by monitoring the set state of the container 6A containing the unprocessed substrate G and the operation of the tweezers 75 for taking out the substrate G from the container 6A,
It is possible to prevent a transfer error of the substrate G, and it is possible to transfer the substrate G continuously according to a preprogrammed procedure and perform a predetermined process.

The substrate G transferred to the processing section 3 is transferred to the substrate transfer arm 10A, the same as in the case of the semiconductor wafer.
After being received by 10B, cleaning, adhesion treatment, and cooling are performed, and after resist coating, the resist film on the peripheral portion of the substrate G is removed, followed by prebaking, exposure by the exposure device 40, and development processing and postbaking. Then, it is conveyed to the carry-in / carry-out section 2 and stored in the empty container 6A.

In the above embodiment, the processing apparatus according to the present invention is applied to a semiconductor wafer coating / developing processing system and an LC.
The case of application to the D substrate coating / developing system has been described, but the coating / developing process is not necessarily required, and the present invention can be applied to, for example, an etching process, and a processed object such as a CD other than a semiconductor wafer or an LCD substrate is processed. Of course, it can also be applied to body treatment.

[0047]

As described above, according to the present invention, the setting state of the container for containing the object to be processed is monitored at a predetermined position, and the unloading means of the selected object to be processed in the container is provided. By monitoring the operation, it is possible to prevent the transport error of the object to be processed and to prevent damage to the object to be processed, so that it is possible to improve the processing efficiency and the yield.

[Brief description of the drawings]

FIG. 1 is a schematic plan view of a semiconductor wafer coating / developing processing system to which a processing apparatus according to a first embodiment of the present invention is applied.

FIG. 2 is a schematic side view of a main part of the semiconductor wafer coating / developing processing system of FIG.

FIG. 3 is a perspective view showing a transport mechanism in the first embodiment.

FIG. 4 is a flowchart showing an operation procedure of the first embodiment.

FIG. 5 is an L to which the processing apparatus according to the second embodiment of the present invention is applied.
It is a schematic plan view of a coating / developing system for a CD substrate.

FIG. 6 is a perspective view showing a transport mechanism in a second embodiment.

FIG. 7 is a schematic side view (a) showing a locked state of a lock mechanism and a schematic side view (b) showing an unlocked state in a second embodiment.

FIG. 8 is a flowchart showing an operation procedure of the second embodiment.

[Explanation of symbols]

2,2A carry-in / carry-out section 3,3A processing section 4,4A transport mechanism (transport means) 6,6A container 7 cassette sensor (container presence / absence detection means) 8 CPU (control means) 9 alarm (display means) 15, 75 tweezers 18, 18A Mapping sensor (detection means, processing object detection means) 20 Container transfer device (container transfer means) 50 Lock mechanism (container holding means) 60 Holding detection sensor (container holding detection means) W Semiconductor wafer (processing target) ) G LCD substrate (processing target)

Claims (10)

[Claims] 1. A processing method for carrying out an appropriate treatment by carrying out an object to be treated selected from a container accommodating a plurality of objects to be treated, the step of detecting the presence or absence of the container, and the case of not having the container, A processing method comprising: a step of displaying the state; a step of setting the container at a predetermined position based on the display; and a step of selecting the object to be processed in the set container. . 2. In a processing method of carrying out an object to be processed selected from a container accommodating a plurality of objects to be processed and appropriately processing, when the means for detecting the presence or absence of the container malfunctions, the state thereof is A processing method comprising: a step of displaying, a step of setting the container at a predetermined position based on the display, and a step of selecting the object to be processed in the set container. 3. A processing method for carrying out an object to be processed selected from a container accommodating a plurality of objects to be processed and performing an appropriate process, wherein the carrying means is provided when the carrying means for the object to be processed stops operating. A step of returning to the initial position, a step of detecting the state of the object to be treated in the container, and a step of displaying the state of the object to be treated in the container when the state is different from before the stopping of the conveying means. A step of setting the container at a predetermined position based on the display, a step of selecting an object to be processed in the set container,
A processing method comprising: 4. The processing method according to claim 3, wherein the type of the object to be processed is simultaneously detected when the state of the object to be processed in the container is detected. 5. A processing method for carrying out a predetermined object to be processed selected from a container containing a plurality of objects to be processed appropriately, and detecting whether or not the container placed at a predetermined position is held. A step, a step of displaying the state of the container when the container is not held as prescribed, a step of installing and retaining the container in a prescribed position based on the indication, and a step of installing and retaining the container in the prescribed position. And a step of selecting the object to be treated in the container. 6. A container for accommodating a plurality of objects to be processed, a carrying means for carrying in and out a predetermined object to be processed selected from the container, and a processing section for appropriately processing the object to be processed. In the processing device, container presence / absence detection means for detecting the presence / absence of the container, display means for displaying the state when the container is not present, and container transport means for setting the container at a predetermined position based on the display. A detection means for selecting the object to be processed in the set container, and a control means for transmitting a signal to the display means and the container transport means based on a signal from the container presence / absence detection means. A processing device characterized by. 7. A container for accommodating a plurality of objects to be processed, a carrying means for carrying in and out a predetermined object to be processed selected from the container, and a processing section for appropriately processing the object to be processed. In the processing device, container presence / absence detection means for detecting the presence / absence of the container, operation detection means for detecting the operation state of the container presence / absence detection means, and a display for displaying the status when the container presence / absence detection means malfunctions Means, container conveying means for setting the container at a predetermined position based on the display, detecting means for selecting the object to be processed in the set container, and the above-mentioned operation based on a signal from the operation detecting means. And a control means for transmitting a signal to the display means and the container transport means. 8. A container for accommodating a plurality of objects to be processed, a carrying means for carrying in and out a predetermined object to be processed selected from the container, and a processing section for appropriately processing the object to be processed. In the processing apparatus, the object to be processed detecting means for detecting the state of the object to be processed in the container, the display means for displaying an abnormal state of the object to be processed in the container, and the container at a predetermined position based on the display. To the display means and the container transfer means based on the signal from the object to be processed detection means for selecting the object to be processed in the set container, and the control for transmitting the signal to the display means and the container transfer means. And a processing unit. 9. The processing apparatus according to claim 8, wherein the object to be processed detecting means and the detecting means for selecting the object to be processed are integrally provided, and the processing apparatus has a function of detecting the type of the object to be processed. And processing equipment. 10. A container for accommodating a plurality of objects to be processed, a carrying means for carrying in and out a predetermined object to be processed selected from the container, and a processing section for appropriately processing the object to be processed. In the processing apparatus, a container holding means for setting and holding the container at a predetermined position, a container holding detection means for detecting whether the container is held, and a state where the container is not held as specified, A display means for displaying, a detection means for selecting the object to be treated in the container installed and held at a predetermined position, and a signal for the container holding means and the display means based on a signal from the container holding detection means. And a control means for transmitting.