JPH09184599A - Gas supply integrated unit - Google Patents

Abstract

(57) An object of the present invention is to provide a compact gas supply integrated unit that is integrated so that it can be arranged in a narrow floor space, and to provide a gas supply integrated unit that prevents the generation of particles due to welding. A gas supply integrated unit of the present invention includes a flow path 17a, 17b, 18a, 18b, 18c for a supply gas F that is a corrosive gas and a purge gas P that removes the supply gas.
The fixed blocks 11, 12 and 15 on which 18d, 19a, 19b and 19c are formed, a filter 2 for removing impurities mixed in the supply gas, an on-off valve 3 for shutting off the flow of the supply gas, a flow rate of the supply gas is controlled. A mass flow controller 4, a purge valve 5 for supplying a purge gas, and a check valve 6 for preventing the supply gas from flowing into the purge gas supply side are fixedly attached.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas supply integrated unit used in an industrial manufacturing apparatus such as a semiconductor manufacturing apparatus, and more particularly to a gas supply integrated unit in which each component is compactly integrated.

[0002]

2. Description of the Related Art Conventionally, in a semiconductor manufacturing process, a corrosive gas has been used for etching of a photoresist process or the like. Photoresist processing (photoresist coating, exposure,
Development and etching) are repeated a plurality of times in the semiconductor manufacturing process while changing the type of corrosive gas. In an actual semiconductor manufacturing process, a gas supply device that supplies a plurality of types of corrosive gases as needed is used. I have. The gas supply device that supplies this gas includes a mass flow controller for accurately measuring the flow rate, and an on-off valve and a purge valve provided before and after the mass flow controller to prevent supply gas such as corrosive gas from remaining in the mass flow controller. A gas supply integrated unit including a valve and the like is connected in series.

Here, FIG. 7 is a perspective view showing a conventional gas supply integrated unit, and FIG. 8 is a pneumatic circuit diagram showing a flow path of a gas supply device in which the gas supply integrated unit is connected in series. is there. The gas supply device 51 shown in FIG. 8 is connected to a supply gas pipeline 52 that communicates with a vacuum chamber (not shown) in which etching is performed. Further, in one vacuum chamber, etching of complicated processes is performed by switching and using plural kinds of corrosive gases. Therefore, in this conventional example, seven kinds of corrosive gases (Fa to Fg) are contained in one vacuum chamber. Is connected to a gas supply device 51 in which seven gas supply integrated units 50 are connected in series.

As shown in FIG. 8, a gas supply integrated unit 50 constituting the gas supply device 51 has a manual valve 55 for manually supplying or shutting off the supply gas, a regulator 56 for adjusting the gas pressure of the supply gas, Since the pressure gauge 57 for monitoring the pressure of the supply gas and the filter 58 for removing the impurities mixed in the supply gas are connected in series, and the supply gas such as corrosive gas does not remain in the mass flow controller 60, Before and after that, the inlet opening / closing valve 59,
An outlet opening / closing valve 61 is provided and connected in series.

A purge valve 62 for supplying a nitrogen gas, which is a replacement gas for removing the supply gas (Fa to Fg) remaining in the mass flow controller 60, is provided.
A purge gas common flow path 72 branched from a nitrogen gas pipe 71 provided with a purge switching valve 70 is connected via a check valve 63. Here, the check valve 63 is attached on the pipe line in order to prevent the supply gas such as the corrosive gas from flowing into the purge gas common flow path 72. This is because when the corrosive gas flows into the purge gas common flow path 72, the inside of the purge gas common flow path 72 may be corroded and particles may be generated.

On the other hand, in the gas supply integrated unit 50 having such a structure, the units are arranged side by side as shown in FIG. 7 (only two units are shown in the figure for convenience), and a gas supply device is formed. There is. In addition, the gas supply integrated unit 50 of FIG.
9, mass flow controller 60, and purge valve 62,
Only the check valve 63 is shown. In the gas supply integrated unit 50, the inlet opening / closing valve 59 and the purge valve 62 are fixed to the upper portion of the block 81 in which the flow path is formed by bolts,
The mass flow controller 60 is fixed to blocks 82, 82 which are connected to the block 81 and also have flow paths formed therein. A purge block 83 is fixedly provided on the side of the block 81, and a check valve 63 is connected to a purge pipe 84 extending from the purge block 83.
It is connected to 2.

By the way, FIG. 9 shows a layout of an etching apparatus having four vacuum chambers. Four vacuum chambers 92A, 92B, 92C and 92D are arranged around a robot 91 installed in the center.
Further, two transfer devices 93 for supplying unetched wafers and the like to the vacuum chambers 92A and collecting the processed wafers are provided. Here, each vacuum chamber vacuum chamber 92A, 92B, 92C, 9
Since the gas supply device 51 is required for 2D, four gas boxes 94A, 94B, 94C and 94D provided with the gas supply device 51 are provided as shown in the figure, and each of them is provided with a vacuum chamber 92A, 92B, 92C. , 92D.

[0008]

However, the conventional gas supply integrated unit 50 having such a structure has the following problems. First, the gas supply integrated unit 50 of the conventional example described above is provided with the purge block 83 to supply the purge gas to the pipe of the block 81 in which the purge valve 62 is fixed, and the check valve 63 and the purge are provided from the common purge gas passage 72. It is connected via a pipe 84. However, since it is necessary to provide the purge block 83 on the side of the block 81, the check valve 63 is arranged off the line where the filter 58, the purge valve 62, and the mass flow controller 60 are lined up. Therefore, the width of the gas supply integrated unit 50 becomes large, and the gas supply device 51 in which a plurality of the units are arranged side by side is enlarged.

When this is arranged near the vacuum chambers 92A, it hinders work and the like, but when the gas supply devices are collectively arranged as a gas box 94A as shown in FIG. Vacuum chamber 92A
The pipes 95A, 95B, 95C, 95D up to ... become long, which causes a problem that it takes a long time to stabilize the flow rate. Further, depending on the type of gas to be supplied, there are some that liquefy at room temperature. , Insulation may be necessary. In that case,
When the pipes 95A from the gas box 94A to the vacuum chamber 92A are long, the entire heat-insulated pipe occupies a space, the working space is narrowed, and the heat is not sufficiently kept, which may adversely affect etching.

Next, in the above-described conventional gas supply integrated unit 50, the check valve 63, the purge pipe 84, and other joints are connected by welding from the purge gas common flow path 72 to the purge block 83. There is. However, when the welding connection is performed in this manner, the gas supply integrated unit 50 itself handles corrosive gas and the like, so that there is a problem that the welded portion is corroded and particles are generated.

In order to solve the above problems, the present invention provides a compact gas supply integrated unit that can be installed in a narrow floor space.
Another object of the present invention is to provide a gas supply integrated unit in which generation of particles due to welding is prevented.

[0012]

The gas supply integrated unit of the present invention comprises a filter for removing impurities mixed in the supply gas, an on-off valve for adjusting the flow of the supply gas flowing through the flow passage, and a flow rate of the supply gas. And a purge valve for supplying a purge gas for eliminating the supply gas remaining in the mass flow controller, and a check valve for preventing the supply gas from flowing into the purge gas supply side. There is formed a flow path through which the supply gas and the purge gas flow, and an attachment portion for fixing the filter, the on-off valve, the mass flow controller, the purge valve, and the check valve on the flow path. It has a fixed block provided.

Further, the gas supply integrated unit of the present invention is
The fixed block, the filter, the on-off valve,
It is preferable that mounting portions for fixing the purge valve, the check valve, and the mass flow controller are provided in the same direction. Further, in the gas supply integrated unit of the present invention, the fixed block has a mounting portion for fixing the filter, the opening / closing valve, the purge valve, the check valve, and the mass flow controller. It is desirable to be provided on the line.

In the gas supply integrated unit of the present invention having the above structure, the supply gas or the purge gas is fixed to the passage formed in the fixed block and the mounting portion of the fixed block so as to be located on the passage. By flowing through the on-off valve, mass flow controller, purge valve, and check valve, the unit itself can be made compact, and since it is not necessary to connect piping etc. by welding, It is possible to prevent generation of particles due to welding. Further, in the gas supply integrated unit of the present invention, the filter, the on-off valve, the purge valve, the check valve, and the mass flow controller are fixed to the fixed block in the same direction, so that the unit itself is compact. be able to. Furthermore, the gas supply integrated unit of the present invention comprises a filter, an on-off valve, a purge valve, a check valve,
Since the mass flow controller is fixed to the fixed block in a straight line, the unit itself can be made compact.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION Next, an embodiment of the gas supply integrated unit according to the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a gas supply integrated unit of the present embodiment, and FIG. 2 is a partial sectional perspective view showing the gas supply integrated unit. The gas supply integrated unit 1 of the present embodiment changes the type of corrosive gas in the semiconductor manufacturing process like the conventional example described above,
It is used in a gas supply device that supplies a plurality of types of corrosive gases as needed. Therefore, this gas supply integrated unit 1 also has a filter 2 for removing impurities mixed in the supply gas F which is a corrosive gas, a main valve 3 for shutting off the flow of the supply gas F, and a mass flow for accurately measuring the flow rate. Controller 4, purge valve 5 for supplying nitrogen gas (hereinafter referred to as "purge gas") P which is a replacement gas for eliminating the supply gas F remaining in the mass flow controller 4, and supply gas such as a corrosive gas. The check valve 6 is provided to prevent F from flowing into the common side of the purge gas.

Then, as shown in FIG. 2, a filter block 15 for fixing the filter 2 and a main valve 3 are provided.
And a first block 11 for fixing the purge valve 5,
The mass flow controller 4 and the second block 12 for fixing the check valve 6 together form a fixed block that is a feature of the gas supply integrated unit 1 of the present embodiment. Here, the first block 11 is a rectangular parallelepiped block body, and is fitted with a filter block 15 and a gasket 14 so as to be airtightly integrated so that the supply gas F does not leak.

A cross section taken along the line AA of FIG. 2 is shown in FIG.
As shown in the figure, the second block 12 is provided with a gas flow passage described later, and female screws 13, 13 ... For fixing the first block 11 to the first block 11 with bolts are cut. Gaskets 14 and 14 are fitted to the joints of the gas passages of the first block 11 and the second block 12 so that the supply gas F and the purge gas P are hermetically integrated so as not to leak. .

Further, on the upper surface of the first block 11, mounting portions 11a and 11b for the main valve 3 and the purge valve 5 are formed in the longitudinal direction. On the upper surface of the second block 12,
The mounting portion 12a of the check valve 6 is formed so as to be aligned with the mounting portions 11a and 11b of the first block 11,
Further, as shown in FIG. 2, the flange portion of the second block 12 is provided with mounting portions 11a and 11b and a mounting portion 12b for fixing the mass flow controller 4 so as to be aligned with the mounting portions 12a. There is. Similarly, the filter block 15 is also provided with an attachment portion 15a for attaching the filter 2 on the upper surface thereof.

Therefore, the filter 2, the main valve 3, the purge valve 5, the check valve 6 and the mass flow controller 4 mounted on the fixed block composed of the filter block 15, the first block 11 and the second block 12 are shown in FIG.
As shown in (1), one line is realized which is arranged on a straight line and arranged in the same direction. The filter 2, the main valve 3, the purge valve 5, the check valve 6, and the mass flow controller 4 are all attached by bolts from above.

Next, as described above, the gas supply integrated unit 1
A filter block 15 to which each component of
A series of flow paths are formed in the first block 11 and the second block 12. First, in the filter block 15, a filter input flow path 17a for communicating the supply gas F from the gas supply block 16 with the input port of the filter 2,
A filter output flow path 17b communicating with the output port is formed.

The first block 11 is formed with a main valve input flow passage 18a which communicates the filter output flow passage 17b with the valve chamber of the main valve 3 formed in the mounting portion 11a. Further, a valve seat 3a of the main valve 3 is formed in the mounting portion 11a, and a mass flow valve input flow path 18b communicating with a valve hole of the valve seat 3a is formed. The purge valve output passage 18c of the purge valve 5 connected to the main valve 3 is joined to the mass flow valve input passage 18b. The purge valve output flow path 18c is attached to the mounting portion 11
It communicates with the valve chamber formed in b. Also, the first
The block 11 has a purge valve input passage 18d so as to communicate with the valve hole of the valve seat 5a of the purge valve 5 formed in the valve chamber.
Are formed.

Further, the second block 12 has a mass flow valve input flow passage 19a and a check valve output flow which communicate with the mass flow valve input flow passage 18b and the purge valve input flow passage 18d formed in the first block 11, respectively. A path 19b is formed. In addition, in the second block 12, FIG.
3, a purge gas supply block 20 for supplying the purge gas P is fixedly provided, and a check valve input flow passage 19c for supplying the purge gas P to the check valve 6 is provided on the flange portion thereof as shown in FIG. Are formed.

Next, the structure of the check valve 6 will be described, but since the other mass flow controllers 4 and the like that are normally used are used, detailed description thereof will be omitted. 4 and 5 are cross-sectional views showing the check valve. FIG. 4 shows the state when the valve is closed, and FIG. 5 shows the state when the valve is open. The check valve 6 is formed in the lid 31 that is directly fixed to the second block 12. The lid 31 has a hollow cylindrical shape having an opening at one end as shown in the figure, and is provided with a cylindrical gas input cover 32 having a through hole 32a formed in the lateral direction from the opening and a valve. The cylindrical valve body 33 is integrally inserted coaxially. The gas input cover 32 and the valve body 33 are not fixed,
It has a structure that can be easily disassembled by removing the lid 31.

A rubber valve seat 34 is mounted between the gas input cover 32 and the valve body 33. In the hollow portion of the valve body 33, a hollow cylindrical piston 3 having a valve body 35 is provided.
6 is slidably fitted. This piston 36
A through hole 36a is formed on the upper end side to which the valve body 35 is attached, and the lower end is open. A return spring 37, which is a coil spring, is attached to the hollow portion 36b of the piston 36 from the open lower end thereof. The return spring 37 is
The upper end is abutted against the stepped portion of the piston 36, and the lower end is abutted against the mounting portion 12a of the second block 12 when mounted, and is contracted. Therefore, the return spring 37 is
The piston 36 is urged in the direction in which 5 abuts the valve seat 34. In the check valve 6 having such a configuration, the check valve input flow passage 19c has the cover 3 as shown in FIG.
1 communicates with the flow passage space 38 surrounded by the valve main body 33, while communicating with the check valve output flow passage 19b at the lower end of the valve main body 33, thereby forming a purge gas supply flow passage.

Next, the operation of the gas supply integrated unit 1 of the present embodiment having the above structure will be described. When opened by a manual valve (not shown), the gas supply block 1
6 is input to the filter 2 from the filter input flow path 17a, the mixed impurities of the supply gas are removed, and the mixed gas is discharged to the filter output flow path 17b. Then, the supply gas F that has flowed out to the filter output flow path 17b is the first block 11
From the main valve input flow path 18a to the main valve 3, and by opening the valve, flows through the mass flow valve input flow paths 18b and 19a to flow into the mass flow controller 4.

On the other hand, when the purge gas P, which is a replacement gas for eliminating the supply gas F remaining in the mass flow controller 4, is supplied to the purge gas supply block 20, the check valve 6 is supplied from the check valve input passage 19c. Flow into. The purge gas P flowing from the check valve input flow passage 19c into the check valve 6 flows through the flow passage space 38 into the gas input cover 32 through the through hole 32a, and due to the gas pressure of the purge gas P, the purge gas P shown in FIG. As shown in, the valve body 35 is lowered together with the piston 36 against the biasing force of the return spring 37. And valve element 3
When 5 is separated from the valve seat 34, the purge gas P further flows into the valve body 33, flows from the through hole 36a to the hollow portion 36b of the piston 36, and flows out to the check valve output flow passage 19b of the second block 12.

By the way, the supply gas F flows through the check valve output passage 1
When the check valve 6 has flown into the check valve 6, the supply gas F does not flow into the purge gas P because the valve body 35 is in contact with the valve seat 34. Then, the purge gas P flowing out from the check valve 6 is transferred to the check valve output flow path 19
b and the purge valve input flow path 18d to flow into the purge valve 5. Therefore, by opening the valve of the purge valve 5, the purge gas P flows out into the purge valve output flow path 18c, flows into the mass flow valve input flow path 18b, flows through the mass flow valve input flow path 19a, and flows into the mass flow controller 4. , The supply gas F which is the corrosive gas remaining therein is replaced and eliminated. On the other hand, the supply gas F flowing into the mass flow controller 4 is then supplied to a vacuum chamber (not shown) where etching is performed through a predetermined pipe, and the wafer is etched there.

The configuration and operation of one embodiment of the gas supply integrated unit according to the present invention has been described above.
The gas supply integrated unit 1 of the present embodiment has the following effects. The main block 3, the mass flow controller 4, etc. were attached to the fixed block which integrated the filter block 15, the 1st block 11, and the 2nd block 12, and the gas supply integrated unit could be made compact.

In particular, by arranging them in the same direction and in a straight line with respect to the fixed block, it is possible to realize a one-line construction of the components such as the main valve 3 and the mass flow controller 4 which constitute the gas supply integrated unit 1. The gas supply device in which the gas supply integrated unit 1 is arranged in parallel can be made compact. The downsizing of the gas supply device can significantly reduce the floor occupying area, so that the problem of hindering work is solved, and the gas supply device is arranged in the immediate vicinity of the vacuum chamber 51. It became possible to supply gas at a stable flow rate.

On the other hand, even in the gas supply integrated unit 1 itself, the filter block 15, the first block 11 and the second block 11
Since it is attached to the block 12 from above by bolts, the check valve 6 and other components can be easily removed, and the maintainability is greatly improved. Further, since the check valve 6 is assembled only by fixing the cover 31 with the bolts 41 as shown in FIG. 6, it is possible to easily replace the components such as the return spring 37.

Further, in the gas supply integrated unit of the present embodiment, the gas passages 17a, 17b, 18a, 18b, 18c, 18d, 19 are provided in the fixed block in which the filter block 15, the first block 11 and the second block 12 are integrated.
Since a, 19b and 19c are formed, it is not necessary to connect the pipes by welding as in the conventional one. Therefore, it was possible to prevent the generation of particles due to corrosion of the welding by the corrosive gas.

The present invention is not limited to the above-mentioned embodiment, and various modifications can be made without departing from the spirit of the present invention. For example, in the above embodiment,
Although the check valve 6 has a poppet structure using the return spring 37, a diaphragm may be used to utilize the diaphragm pressure by the gas pressure of the supply gas F. According to the poppet structure, this is because the pressure is balanced by the return spring 37.
5 causes vibration to generate pulsating flow,
This has an advantage of eliminating the generation of particles due to rubbing of the sliding portion. Further, for example, without arranging each component as in the above-described embodiment,
The check valve 6 may be attached to the filter block 15, while the filter 2, a pressure sensor, a valve, or the like may be attached to the second block 12 as needed.

[0033]

According to the present invention, a fixed block is provided in which flow passages for supply gas and purge gas are formed, and a mounting portion for fixedly mounting a filter, an on-off valve, a mass flow controller, a purge valve, and a check valve on the flow passage. Since it is configured by, it is possible to provide a compact gas supply integrated unit that can be arranged in a narrow floor space and to provide a gas supply integrated unit that prevents the generation of particles due to welding. became.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of a gas supply integrated unit according to the present invention.

FIG. 2 is a partial cross-sectional view showing an embodiment of a gas supply integrated unit according to the present invention.

FIG. 3 is a cross-sectional view showing a check valve and a fixed block according to one embodiment.

FIG. 4 is a cross-sectional view showing a closed state of the check valve according to the embodiment.

FIG. 5 is a sectional view showing an open state of the check valve according to the embodiment.

FIG. 6 is a partial cross-sectional view showing an embodiment of a gas supply integrated unit according to the present invention.

FIG. 7 is a perspective view showing a conventional gas supply integrated unit.

FIG. 8 is a pneumatic circuit diagram showing a flow path of a gas supply device in which gas supply integrated units are connected in series.

FIG. 9 is a layout view showing an etching apparatus provided with four vacuum chambers.

[Explanation of symbols]

1 Gas Supply Integrated Unit 2 Filter 3 Main Valve 4 Mass Flow Controller 5 Purge Valve 6 Check Valve 11 First Block 12 Second Block 15 Filter Block 18a, 18b, 18c18d, 19a, 19b, 19
c flow path

Claims (3)

[Claims] 1. A filter for removing impurities mixed in a supply gas, an opening / closing valve for adjusting a flow of the supply gas flowing through a flow path, a mass flow controller for controlling a flow rate of the supply gas, and a residue in the mass flow controller. In a gas supply integrated unit equipped with a purge valve for supplying a purge gas for eliminating the supply gas and a check valve for preventing the supply gas from flowing into the purge gas supply side, a flow of the supply gas and the purge gas. A gas having a passage formed and a fixed block having an attachment portion for fixing the filter, the opening / closing valve, the mass flow controller, the purge valve, and the check valve on the passage. Supply integration unit. 2. The gas supply integrated unit according to claim 1, wherein the fixed block includes the filter, the on-off valve, and
A gas supply integrated unit, wherein mounting portions for fixing the purge valve, the check valve, and the mass flow controller are provided in the same direction. 3. The gas supply integrated unit according to claim 2, wherein the fixed block includes the filter, the on-off valve, and
A gas supply integrated unit, wherein an attachment portion for fixing the purge valve, the check valve, and the mass flow controller is provided in a straight line.