JPH09196681A - Gyro device - Google Patents

Abstract

(57) [Abstract] [PROBLEMS] As a conventional gyro device, an actual Kaihei 1-6 is used.
1611 gazette mechanical configuration and registered utility model gazette No. 30
Although there is a configuration of Japanese Patent No. 04471, it is difficult to reduce the size of the former and it is difficult to remove the acceleration sensitivity of disturbance in the latter. A gyro device according to the present invention is an insulating plate having a pair of detection electrodes (5, 6 and 21, 22) at both ends of a plate-shaped vibrating body (7) having a pair of mass portions (12, 13). (3, 23) is provided and a magnetic field of opposite phase is applied to each mass portion (12, 13) to remove the acceleration sensitivity of disturbance.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gyro device, and in particular, a pair of plate-shaped vibrating bodies made of silicon are driven by magnetic forces in opposite phases by magnetic force, and the plate-shaped vibrating bodies are sandwiched and arranged. The present invention relates to a novel improvement for performing angular velocity detection using a change in capacitance between detection electrodes and reducing acceleration sensitivity caused by movement of each mass portion due to acceleration.

[0002]

2. Description of the Related Art Although a gyro device of this type which has been conventionally used is not shown in the drawing, for example, a mechanical structure disclosed in Japanese Utility Model Laid-Open No. 1-161611 and Japanese Patent Laid-Open No. Hei. -322579 and registered utility model publication No. 3004711 can be mentioned.

[0003]

Since the conventional gyro device is configured as described above, there are the following problems. That is, in the case of the mechanical structure, since the motor, the torquer coil, and the large base are used, the shape of the entire device is large and heavy. Also,
In the case of the configuration disclosed in the above-mentioned Japanese Patent Laid-Open No. 5-322579, the angular velocity input in the Y direction is electrostatically generated while the vibrator is vibrated in the X direction using only the piezoelectric vibrating body or the AC power source from the outside. Since it is configured to detect as a change in capacity,
It was difficult to increase vibration in the X direction and it was difficult to improve sensitivity. Further, in the configuration of Registered Utility Model Publication No. 3004711, the acceleration sensitivity generated by the movement of the vibrating body due to the acceleration is input as a disturbance, which lowers the detection accuracy.

The present invention has been made to solve the above problems, and in particular, each mass of a plate-shaped vibrating body made of silicon is driven by a magnetic force in an opposite phase to sandwich the plate-shaped vibrating body. An object of the present invention is to provide a gyro device capable of detecting an angular velocity by using a capacitance change between a pair of detection electrodes arranged in parallel with each other and reducing acceleration sensitivity caused by movement of each mass portion due to acceleration. And

[0005]

A gyro device according to the present invention is provided in a first insulating plate having first and second magnetic generators spaced from each other on its bottom surface, and a first recess on the first insulating plate. First and second detection electrodes corresponding to each of the magnetic generators, a plate-like vibrating body made of silicon and vibrating freely across the first recess, and a through-hole provided in the plate-like vibrating body through the through hole. The first provided corresponding to each detection electrode,
A second mass, an AC power source applied between both ends of the plate-shaped vibrating body, and third and fourth electrodes provided on the plate-shaped vibrating body and corresponding to the first and second detection electrodes. Two insulating plates and a second recess provided in the second insulating plate and corresponding to the first recess are provided, and the magnetic poles of the magnetic generators contacting the first insulating plate have opposite polarities. In this configuration, the masses are vibrated in opposite phases.

More specifically, each of the magnetic generators is made of a permanent magnet, and each of the insulating plates is made of glass.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the gyro device according to the present invention will be described in detail below with reference to the drawings. In FIG. 1, reference numerals 1 and 2 denote first and second magnetic generators which are separated from each other and have a rectangular shape and are composed of permanent magnets (electromagnets are also possible) having two poles. On the upper surfaces 1a and 2a of the bodies 1 and 2, there is provided a first insulating plate 3 made of glass having a planar longitudinal shape that abuts on the upper surfaces 1a and 2a of the magnetic generators 1 and 2.

The upper surface 3a of the first insulating plate 3 is formed with a first recess 4 having a long shape formed by etching, and the first and fourth recesses 4 are formed by vapor deposition of metal. Two electrodes 5 and 6 are provided apart from each other.
On the upper surface 3a of the first recess 4 of the first insulating plate 3, a long plate-shaped vibrating body 7 made of silicon and formed by etching.
Is placed so as to straddle the first concave portion 4 in the longitudinal direction, and an AC power source 10 is connected to both ends of the plate-shaped vibrating body 7. The plate-like vibrating body 7 has three through holes 1
Two constricted first and second masses 12, 13 depending on 1.
Is formed, and each of the masses 12 and 13 is configured to be able to vibrate in the X direction.

On the upper part of the plate-shaped vibrating body 7, there is formed a second recess 20 which is similarly formed corresponding to the first recess 4, and the second recess 20 has the first and second electrodes 5 and 6. A second insulating plate 23 made of glass having third and fourth electrodes 21 and 22 formed in a corresponding manner is placed, and both ends 23a and 23b in the longitudinal direction of the second insulating plate 23 are The plate-shaped vibrating body 7 is fixed on each end 7a, 7b with an adhesive or the like. Therefore, each mass portion 12 of the plate-shaped vibrating body 7,
By being located between the recesses 4 and 20 of the insulating plates 3 and 23, 13 is configured to freely vibrate in the X direction (horizontal direction) and the Y direction (vertical direction) shown in FIG. ing.

The electrodes 5, 6 and 2 of the recesses 4 and 20 respectively.
A pair of electrostatic sensors are formed between 1 and 22,
The amount of vibration of the plate-shaped vibrating body 7 in the Y direction is determined by the respective electrodes
And 21, 22 are configured to be electrostatically detected. Therefore, each electrode 5, 21 constitutes a first sensor 50, and each electrode 6, 22 constitutes a second sensor 51.

By using the AC power supply 10 provided between the end portions 7a and 7b of the plate-shaped vibrating body 7, the AC current 10a of the AC power supply 10 is supplied to both ends of the plate-shaped vibrating body 7. The masses 12 and 13 of the plate-like vibrating body 7 are formed by a known electromagnetic interaction between the alternating current 10a and the magnetic flux of the magnetic generators 1 and 2 (actually generated along the Y direction). X in opposite phases (because the magnetic fields are opposite)
It is configured to vibrate in the direction.

Next, the operation of actually detecting the input angular velocity in the above-mentioned configuration will be described. First, as described above, the AC current 1 is applied to both ends of the plate-shaped vibrating body 7 from the AC power supply 10.
By applying 0a, each mass 1 of the plate-like vibrating body 7
Electromagnetic interaction between the magnetic fluxes from the magnetic generators 1 and 2 and the AC current 10a causes the vibrations 2 and 13 to start vibrating in opposite phases along the horizontal X direction.

In the above-mentioned state, when the input angular velocity 30 is applied from the outside about the Z axis along the longitudinal direction of the plate-shaped vibrating body 7, the masses 12 and 13 are in the Y direction (magnetic field) orthogonal to the longitudinal direction. The generators 1 and 2 vibrate in opposite phases along the magnetic flux generation direction). Each cell 12 at this time,
The amount of vibration of 13 in the Y direction is
The magnitude of the input angular velocity 30 can be detected by detecting the change in the capacitance between the detection electrodes 5, 6 and 21, 22 sandwiching the input angle. Therefore, each cell 12, 1
Since 3 vibrates in the opposite phase as described above, each mass 12,
When 13 detects the input angular velocity 30, the acceleration sensitivity caused by the movement of each mass 12, 13 which is an input disturbance is accelerated by comparing each electrode 5, 6 with 21, 22. The input angular velocity 30 can be detected. That is, when the output using each electrode 5, 21 and the output using each electrode 6, 22 have the same value, there is no acceleration sensitivity input, and when they are different, there is acceleration sensitivity input.

The above-mentioned recesses 4, 20, each electrode 5,
6 and 21, 22 and the shape of the plate-shaped vibrating body 7 are 1
It is needless to say that the same effect as described above can be obtained even when the shape is variously changed.

[0015]

Since the gyro device according to the present invention is constructed as described above, the following effects can be obtained. In other words, since the electromagnetic interaction using the alternating current and the magnetic flux from the magnetic generator is used to drive the plate-shaped vibrating body and the pair of masses are driven in opposite phases, the horizontal vibration (X The vibration of the (direction) becomes large, the input angular velocity can be detected with high sensitivity, and the disturbance of the acceleration sensitivity can be reduced. Further, since the vibrating portion is packaged with a pair of insulating plates such as glass, the vibrating portion is not contacted from the outside, and a gyro that can be easily handled can be obtained.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing a gyro device according to the present invention.

[Explanation of symbols]

 1, 2 1st, 2nd magnetic generator 3 1st insulating plate 4 1st recessed part 5,6 1st, 2nd detection electrode 7 Plate-shaped vibrating body 10 AC power supply 11 Through hole 12, 13 Mass 20 2nd recessed part 23 Second insulating plate

Claims (2)

[Claims] 1. First and second magnetic generators separated from each other
A first insulating plate (3) having (1,2) on the bottom surface, and the first insulating plate
(3) Each magnetic generator (1, 2) provided in the upper first recess (4)
Corresponding to the first and second detection electrodes (5, 6) and the first recess
A plate-shaped vibrating body (7) made of silicon and oscillating freely across (4), and a through-hole (1) provided in the plate-shaped vibrating body (7).
AC power source applied between both ends of the first and second masses (12, 13) provided corresponding to each of the detection electrodes (5, 6) via 1) and the plate-like vibrating body (7) (10) and a third provided on the plate-shaped vibrating body (7) and corresponding to the first and second detection electrodes (5, 6),
A second insulating plate (23) having a fourth electrode (21, 22);
A second part provided on the insulating plate (23) and corresponding to the first concave part (4).
A concave portion (20), and the magnetic poles of the magnetic generators (1, 2) contacting the first insulating plate (7) have opposite polarities.
A gyro device characterized by vibrating (12, 13) in opposite phases to each other. 2. The gyro device according to claim 1, wherein each of the magnetic generators (1, 2) is made of a permanent magnet, and each of the insulating plates (3, 23) is made of glass.