JPH0919772A - Parallel seam joining apparatus and parallel seam joining method - Google Patents

Abstract

(57) [Abstract] [Purpose] When a number of parallel seam bonding of a metal lid such as Kovar to a ceramic package such as a semiconductor integrated circuit is continuously performed, the location where the object to be bonded is missing is detected in advance. Reduce the total work man-hours. [Constitution] A large number of objects (workpieces) are arranged on a pallet. The pair of roller electrodes 301 and 331 presses the upper edge of the work while supplying a large current. At this time the sensor
The presence or absence of the work is detected by 302. When the work is detected, if the distance d between the roller electrodes 301 and 331 is less than the minimum required distance of the sensor 302, the distance is temporarily extended to this distance. When there is a work, the welding work is performed by setting a predetermined interval, and when there is no work, the process proceeds to the next coordinate.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a parallel seam bonding apparatus and a parallel seam suitable for bonding an outer container made of ceramic or metal containing a semiconductor integrated circuit, a crystal oscillator or the like to a lid. Regarding the joining method.

[0002]

2. Description of the Related Art A parallel seam bonding apparatus for hermetically sealing a circuit element such as a semiconductor integrated circuit or a crystal oscillator generally has a ceramic package, which is an envelope, and a cover made of Kovar, which are stacked on top of each other and The workpiece is rotated by a pair of roller-shaped bonding electrodes while pressing the same, and a current is passed from one of the pair of roller-shaped bonding electrodes through the lid to the other to separate the envelope and the lid. Join in a continuous line.

Here, in order to perform a large number of work pieces to be continuously joined, they are arranged on a pallet along the X and Y axes,
First, one joining process in the Y-axis direction is performed, and then the pallet is turned by 90 °, and the remaining joining process in the X-axis direction is performed.
This pallet is usually used to carry several tens to hundreds of works, but there are cases where not all can be placed on the pallet due to production planning. In that case, a problem occurs because the bonding electrodes are operated assuming that all the workpieces are present at a predetermined position. In order to deal with this inconvenience, for example, a pseudo work is arranged at an empty pallet position. However, this method has a problem that the working time is unnecessarily long.

[0004]

SUMMARY OF THE INVENTION It is an object of the present invention to eliminate wasted work time and improve efficiency when continuously performing joining work using a parallel seam joining device.

[0005]

Means for Solving the Problems In order to solve this problem, the present invention proposes the following means. First
As a means for this, an enclosure formed by housing a predetermined circuit element or an electronic circuit and a lid member are used as an article to be joined, and an electric current is applied between a pair of joining electrodes that rotate while pressurizing the article to be joined. We propose a parallel seam joining device, which is equipped with a recognition means for recognizing the presence or absence of an object to be joined in the parallel seam joining device for seam joining.

As a second means, a pallet capable of mounting a large number of objects to be joined along the X-axis and the Y-axis on the same plane, and Y
A pair of bonding electrodes rotatably arranged along an axis, a bonding head having a sensor that pivotally supports the pair of bonding electrodes and recognizes the presence or absence of an object to be bonded, and the bonding head vertically. We propose a parallel seam bonding apparatus, which is equipped with lifting means for lifting and lowering, and a bonding power supply for supplying a current to a pair of bonding electrodes.

As a third means, a pallet on which a large number of objects to be joined can be placed along the X and Y axes on the same plane, and Y
A pair of bonding electrodes rotatably arranged along an axis, a bonding head having a sensor for rotatably supporting the pair of bonding electrodes and recognizing the presence or absence of the object to be bonded, and the bonding head being vertical. A parallel seam joining method for joining objects to be joined, comprising a raising and lowering means for raising and lowering and a joining power source for supplying a current to a pair of joining electrodes. When the presence or absence of the object is detected and the object to be bonded is present, the process proceeds to the step (2) below, and when the object to be bonded is not present, the process moves to the next coordinate and the process proceeds to the above step (1). (2) a step of temporarily pressing the bonding head and temporarily applying a current for a minute time, and (3) rotationally moving in a Y-axis direction on a side parallel to the object to be bonded while pressing the bonding electrode. A parallel seam bonding step of (4) A step of moving by a unit coordinate, (5) a step group in which the steps (1) to (3) are repeated, and (6) a step of turning the pallet by 90 °.
(7) A step group in which the steps (1) to (3) are repeated,
We propose a parallel seam joining method.

[0008]

Embodiment FIG. 1 is a system diagram of a parallel seam bonding apparatus 1 according to the present invention. In the figure, commands for complicated control of the joining process are issued from the touch panel display 23. In response to this command, the CPU 21 sends a control signal to each control unit and the like, and receives a detection signal from the sensor 302 and the like. A floppy disk 25 is connected to the CPU 21,
Read and write required data.

Upon receiving the control signal from the CPU 21, the table turning mechanism / control unit 7 turns the table 6 by the angle θ. Further, the control signal from the CPU 21 is passed through the controller 19 to the d control unit 17, the Z control unit 15, the X control unit 13, the Y control unit 11
Respectively sent to. The d controller 17 supplies a signal for setting the electrode spacing d of the bonding head 3. The Z control unit 15 gives a signal to the Z-axis lifting mechanism 5 to control the vertical position of the bonding head 3. The X controller 13 gives a signal to the X-axis moving mechanism 8 to control the lateral position of the bonding head 3. Y controller
Reference numeral 11 gives a signal to the Y-axis advancing / retreating mechanism 9 to control the position of the joining head 3 in the front-rear direction.

The table 6 on which the work 2 is placed can be turned by an arbitrary angle θ by the table turning mechanism / control unit 7.
Here, the turning angle θ is designated as 90 °. Table 6
The work 2 is arranged on the upper surface of the in a rectangular coordinate system.

At both ends of the work 2, a pair of roller electrodes and a bonding head 3 that supports them and moves up and down in the Z-axis direction are provided. The joining head 3 further has a function of moving in the X-axis and the Y-axis by the X-axis moving mechanism 8 and the Y-axis advancing / retreating mechanism 9.

FIG. 2 shows an embodiment of the bonding head 3 in the parallel seam bonding apparatus according to the present invention. First, the left roller electrode will be described. Left roller electrode
The electrode holder 303 is mechanically rotatably supported by the arm 307 by the electrode holder 303. The roller electrode 301 is electrically a power supply shaft.
It is well connected to 305 and is connected to one end of the junction power supply (10). The arm 307 is vertically attached by sliders 309 and 311. These sliders 309 and 311 are combined with the guide 312 and can freely slide in the vertical direction. This guide 312 is fixed to the column 313. Further, the column 313 is attached to the base plate 501 via a slider 375 and a guide 377 that can slide in the horizontal direction. An arm 315 is horizontally fixed to the upper end of the column 313.
Then, a disc 319 is attached to the lower end of the arm 315 via a shaft 317. Disk 319
A flange 323 is disposed on the upper end of the arm 307 so as to face each other, and a coil spring 321 is inserted between the disc 319 and the flange 323. When the disc 319 is rotated, the shaft 317 connected to it is vertically moved up and down by the screw at the connection point with the arm 315, and the elastic force of the coil spring 321 can be adjusted. Although not shown, the disk 319 and the flange 323 are provided with cylindrical or conical projections at the centers thereof, which serve to facilitate and secure the attachment and replacement of the coil spring 321. . Instead of this protrusion, an edge portion may be provided around both or either of the disk 319 and the flange 323, and the same effect can be obtained. Further, the coil spring 321 can be replaced with another elastic body.

The roller electrode on the right side is also configured symmetrically with the left side. That is, the roller electrode 331, the electrode holder 333, the feeding shaft 335, the arm 337, the sliders 339 and 341,
Guide 342, Column 343, Arm 345, Shaft 347,
The disk 349, the coil spring 351, the flange 353, the slider 373, and the guide 377 are similarly configured.

Next, the distance d between the pair of roller electrodes 301 and 331
A configuration for changing the will be described. A yoke 360 is fixed near the left end of the base plate 501 and is spaced apart from the yoke 365.
And, a yoke 369 is installed near the right end. A stepping motor 361 is fixed to the yoke 360, and a bearing 36 is fixed to the yoke 365.
7, the bearing 371 is installed on the yoke 369, the ball nut 325 is installed on the left column 313, and the right column is installed.
A ball nut 355 is arranged on 343, and a common working shaft 364 connects them. The action shaft 364 is, in order from the left end, a coupling 363 connected to the rotation shaft of the stepping motor 361, a right ball screw 327 located on the right side of the bearing 367, a portion that is connected to the ball nut 325, and a screw portion from the intermediate portion 328. Left ball screw 357 with opposite direction
And is supported by the bearing 371 in combination with the ball nut 355.

Now, when the stepping motor 361 rotates in the direction of the arrow in the figure, the rotating right ball screw 327 causes the ball nut 325 to move to the left side, and the roller electrode 301 coupled thereto also moves to the left side. At the same time, due to the action of the left ball screw 357, the ball nut 355 moves to the right side, and the roller electrode 331 connected thereto moves to the right side.
Therefore, the distance d between the roller electrodes 301 and 331 becomes wider. Conversely, when the stepping motor 361 rotates in the direction opposite to the direction of the arrow in the figure, the distance d between the roller electrodes 301 and 331 becomes narrower.

Regarding the distance between the roller electrodes 301 and 331, the shortest reference distance and the maximum distance are determined by a separately prepared gauge, and the CPU 21 generates this command signal.
(See also FIG. 1) to be entered and stored in advance.
Then, the control signal corresponding to the required electrode spacing is supplied to the d control unit 17
Generate.

Next, the configuration of workpiece detection will be described. In FIG. 2, the sensor 302 is mounted on the base plate 501 between the roller electrodes 301 and 331 via the arm 304. The sensor 302 includes a light emitting element and a light receiving element. When the light from the light emitting element reaches the light receiving element, a detection signal is generated, and when the light does not reach the light receiving element, the detection signal is not generated.

FIG. 3 is a diagram showing a positional relationship among the work, the roller electrode, and the sensor. The works 2 are arranged in a line from the addresses 1 to 6 on the pallet 602. First, FIG.
As shown in (a), there are workpieces 2 lined up continuously on the pallet 602. The distance between the roller electrodes 301 and 331 is widened, and light α is emitted from the sensor 302 above the roller electrodes. This light α is
Since the work 2 exists, it is reflected by the surface of the work 2 and becomes reflected light β, which strikes the light receiving element of the sensor 302.

The presence signal of the work 2 generated from the sensor 302 is sent to the CPU 21 shown in FIG. A control signal is generated from the CPU 21 via the controller 19 and the d control unit 17, and the distance between the roller electrodes 301 and 331 is set to a predetermined distance so as to contact the edge of the work 2. At the same time, the Z axis is lowered. That is, from the CPU 21 to the controller 19
Then, a control signal is generated via the Z control unit 15, and the Z axis elevating mechanism 5 operates to lower the roller electrodes 301 and 303 so as to contact the edge of the work 2 and perform seam bonding. This state is shown in Fig. 3 (b). At this time, first, the roller electrodes 301 and 303 are fixedly pressed and a current is passed for a minute time to temporarily attach the electrodes. After that, the roller electrodes 301 and 303 are rotated to join the edges of the work 2 linearly.

Next, as shown in FIG. 3C, the pallet 60
2 Roller electrode 301,
When 331 comes, the light α emitted from the sensor 302 is
Because there is no work and the distance corresponding to the thickness increases,
Since the reflectance of the surface is different, the reflected light β does not effectively reach the light receiving element of the sensor 302. Therefore, no sensor detection signal is generated from the sensor 302.

Since there is no workpiece presence signal, the CPU 21 shown in FIG. 1 does not generate a control signal for seam joining, and proceeds to the next coordinate.

The sensor 302 is positioned so as to always come to the center of the roller electrodes 301 and 331 in the above detection operation. Further, since the central portion of each workpiece 2 is located directly below the roller electrodes 301 and 331, the sensor 302 can reliably operate.

FIG. 4 is an illustration of the work sequence of seam joining. First, as shown in Fig. 4 (a), the pallet 602
The workpieces 2 are placed on the top in a line from coordinates 1 to 6. Then, from the coordinate 1 to the end of the row, the edges of the long sides are brought into contact with the roller electrodes 301 and 331 to perform seam joining.

Next, as shown in FIG. 4B, the pallet 60
2 is rotated by 90 ° and the edges of each long side are sequentially arranged from the coordinate 1 to the end of the row on the short side of the work 2 to the roller electrode 301,
Make a seam joint in contact with 331. In this way, the rectangular workpieces 2 are sequentially seam-joined. At each coordinate,
Before the roller electrodes 301 and 331 are brought into contact with the work 2, the work is detected by the sensor 302 or the like as shown in FIG.

FIG. 4C shows the case where the work 2 is placed on the pallet 602 at the coordinates 1 to 3 and there is no work after the coordinates 4. Also in this case, the sensor 302 for detecting the work is operating one by one while the roller electrodes 301,
At 331, proceed while seaming the long side. When the long side of the work 2 at the coordinate 3 is completed and the work detection signal cannot be obtained at the coordinate 4, the CPU 21 determines that the following coordinates are empty in that state. Then, the table turning mechanism / control unit 7
Send a 90 ° turn signal.

FIG. 4D shows a state after turning by 90 °. In this state, the sensors 302 for detecting the work are sequentially operated from the coordinates 1 to 3 while the roller electrodes 301 and 331 are operated one by one.
And proceed while seaming the short side. Work 2 with coordinates 3
When the short side of is completed and the work detection signal cannot be obtained at the coordinate 4, the CPU 21 judges that the following coordinates are empty in this state, and this work is completed.

When the vacancy is detected at a certain coordinate for the works 2 arranged in a line on the pallet 602, the CPU 21 determines that the subsequent coordinates are uniquely vacant as described above. Is one method, but the work detection may be performed for all coordinates just in case. Further, the order of the work on the long side and the work on the short side can be freely exchanged as necessary.

FIG. 5 shows a work order in the case of the orthogonal array pallet. First, from the coordinate 1 to the coordinate 5, the seam joining work of the long side of each work 2 is performed. When it is detected that the coordinate 5 is next to a vacant coordinate, the welding head 3 moves to the coordinate 15, performs seam welding of the long side of the work 2 at this coordinate, and proceeds to the coordinate 11 in sequence. Similarly, from the coordinate 21 in the next column
Seam up to 25. Next, at coordinate 35, it is detected that the work does not exist and that any of the following coordinates are vacant, or it is determined from the data and the CPU 21 causes the table turning mechanism / control unit 7 to rotate 90 °.
Send a turn signal.

For each short side, seam joining is performed from the coordinate 1 and then the coordinates 11 and 21 are advanced. When it is detected that the workpiece is missing at the coordinate 31, the process proceeds to the coordinate 22. Similarly, after the short side up to the coordinate 25 is seam-joined and it is detected that there is no work at the coordinate 35, all the works 2 placed on this pallet 602 are considered to have been worked on both the long side and the short side.

With respect to the symmetric coordinates of the joining work of the respective works 2, the proceeding procedure can be appropriately operated according to the shape and size of the pallet 602 or the occupation rate according to the procedure previously input to the CPU.

As described above, the present invention is characterized by including a means for recognizing the presence or absence of a work. As a recognition means, an optical sensor attached to the joining head as described in the embodiment is general, and is suitable for individually detecting all coordinates. However, the recognition means is not limited to the optical sensor. For example, a method of directly inputting the existence coordinates of the work to the CPU from the pallet coordinates can be adopted.

[0032]

As described above, since the parallel seam bonding apparatus according to the present invention is provided with the means for recognizing the presence or absence of the objects to be bonded, wasteful working time is saved when performing continuous bonding work. It is possible to improve efficiency. This is especially effective when the work is not full and is a fraction when placed on a pallet.

[Brief description of the drawings]

FIG. 1 shows a system diagram of an embodiment of a parallel seam joining apparatus according to the present invention.

FIG. 2 shows an embodiment of a joining head in a parallel seam joining apparatus according to the present invention.

FIG. 3 shows a positional relationship among a work, a roller electrode, and a sensor in an embodiment of the parallel seam bonding apparatus according to the present invention.

FIG. 4 is an illustration of a work sequence in one embodiment of the parallel seam joining method according to the present invention.

FIG. 5 shows an operation sequence in the case of an orthogonal array pallet in one embodiment of the parallel seam joining method according to the present invention.

[Explanation of symbols]

1 ... Parallel seam joining device 2 ... Work 3
... Joining head 5 ... Z-axis lifting mechanism 6 ... Table 7 ... Table turning mechanism / control unit 8 ... X-axis moving mechanism
9 ... Y-axis moving mechanism 10 ... Junction power supply 11 ... Y control unit
13 ... X controller 15 ... Z controller 17 ... d controller 19 ... Controller 21 ... CPU 23 ... Touch panel display 25 ...
Floppy disk 301 ... Roller electrode 302 ... Sensor 303 ... Electrode holder 304 ... Arm 305 ... Feed shaft 307 ... Arm 309, 311 ... Slider 312 ... Guide 313 ... Column
315… Arm 317… Shaft 319… Disc 321… Coil spring
323… Flange 325… Nut 327… Right ball screw 331… Roller electrode 333… Electrode holder 335… Feed shaft
337… Arms 339, 341… Sliders 342… Guides 343… Columns
345… Arm 347… Shaft 349… Disc 351… Coil spring
353… Flange 355… Nut 357… Left ball screw 360… Yoke 361… Stepping motor 363… Coupling 365… Yoke 367… Bearing 369… Yoke 371… Bearing 373,375… Slider
377… Guide 501… Base plate 503… Sliding laterally elongated hole 505… Eccentric shaft 507… Crank 509… Rotating shaft 511… Deceleration motor 513… Bracket 515,517… Guide 519,521,523,
525… Slider 602… Palette

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Masahiro Takahashi 1-18-1 Takada, Toshima-ku, Tokyo Inside Origin Electric Co., Ltd.

Claims (3)

[Claims] 1. An enclosure, which houses a predetermined circuit element or an electronic circuit, and a lid member are used as objects to be joined, and a current is passed between a pair of joining electrodes that rotate while applying pressure to the objects to be joined. A parallel seam bonding apparatus for performing seam bonding by means of a parallel seam bonding apparatus, comprising a recognition means for recognizing the presence or absence of the object to be bonded. 2. A pallet capable of mounting a plurality of enclosures containing predetermined circuit elements or electronic circuits and a lid member along the X-axis and the Y-axis on the same plane. When,
A pair of bonding electrodes rotatably arranged along the Y axis,
A bonding head having a sensor for supporting the pair of bonding electrodes and recognizing the presence / absence of the object to be bonded, an elevating means for vertically elevating the bonding head vertically, and a bond for supplying a current to the pair of bonding electrodes. A parallel seam joining device, which is provided with a power supply. 3. A pallet capable of placing a plurality of enclosures, which house predetermined circuit elements or electronic circuits, and a lid member along the X-axis and the Y-axis on the same plane. When,
A pair of bonding electrodes rotatably arranged along the Y axis,
A joining head having a sensor for recognizing the presence or absence of the object to be joined while axially supporting the pair of joining electrodes, an elevating means for vertically elevating the joining head vertically, and a joint for applying a current to the pair of joining electrodes. A parallel seam joining method, comprising: a power source, for joining the objects to be joined, comprising the following steps: (1) When the presence or absence of the objects to be joined is detected by the sensor, Then, proceed to the step (2) below, and if there is no object to be bonded, move to the next coordinate and proceed to the above step (1), and (2) fix the joint head and apply a minute time current. And (3) a parallel seam joining step of rotationally moving the joining electrodes while pressing the joining electrodes in the Y-axis direction of parallel sides of the article to be joined, (4) the Y-axis of the joining head The step of moving by the unit coordinates of (5) above (1) )-(3) repeating steps, (6) rotating the pallet by 90 °,
(7) A step group in which the steps (1) to (3) are repeated,
Parallel seam joining method.