JPH0919785A - Laser processing optical system and processing method using the same - Google Patents
Laser processing optical system and processing method using the sameInfo
- Publication number
- JPH0919785A JPH0919785A JP7167298A JP16729895A JPH0919785A JP H0919785 A JPH0919785 A JP H0919785A JP 7167298 A JP7167298 A JP 7167298A JP 16729895 A JP16729895 A JP 16729895A JP H0919785 A JPH0919785 A JP H0919785A
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- JP
- Japan
- Prior art keywords
- laser
- optical system
- processing
- laser processing
- wedge prism
- Prior art date
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Abstract
(57)【要約】
【課題】 金属製品の溶接や切断などに適用されるレー
ザ加工用光学系及びそれを用いたレーザ加工方法を提供
する。
【解決手段】 レーザ発振器からの光を加工のレーザ加
工用のレーザビームとする光学系において、レンズ系3
と光源である光ファイバ2間、又はレンズ系3と加工面
8間にクサビプリズム7を挿入してなり、大きさ,形
状,パワー密度の異なる複数の集光,ディフォーカスビ
ームを同時に作り出す。
(57) Abstract: An optical system for laser processing applied to welding and cutting of metal products and a laser processing method using the same are provided. SOLUTION: In an optical system in which light from a laser oscillator is used as a laser beam for laser processing, a lens system 3
And a wedge prism 7 are inserted between the optical fiber 2 which is a light source or between the lens system 3 and the processing surface 8 to simultaneously produce a plurality of condensing and defocusing beams having different sizes, shapes and power densities.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、金属製品の溶接や
切断などに適用されるレーザ加工用光学系及びそれを用
いたレーザ加工方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical system for laser processing applied to welding and cutting of metal products and a laser processing method using the same.
【0002】[0002]
【従来の技術】従来のYAGレーザ溶接に用いられてい
る光学系の構成の一例を図7に示す。図7中、符号1は
YAGレーザ発振器,2は光ファイバ,3は集光光学
系,4はレーザビーム,5は溶融池及び6は溶接ビード
を各々図示する。ここで、上記YAGレーザ発振器1か
らのレーザビーム4は、光ファイバ2によって伝送さ
れ、溶接用集光光学系3で集光され、溶接に用いられ
る。2. Description of the Related Art FIG. 7 shows an example of the configuration of an optical system used in conventional YAG laser welding. In FIG. 7, reference numeral 1 is a YAG laser oscillator, 2 is an optical fiber, 3 is a focusing optical system, 4 is a laser beam, 5 is a molten pool, and 6 is a welding bead. Here, the laser beam 4 from the YAG laser oscillator 1 is transmitted by the optical fiber 2, condensed by the welding condensing optical system 3, and used for welding.
【0003】[0003]
【発明が解決しようとする課題】ところで、アルミニウ
ム合金の溶接では、図7に示す方法において、レーザビ
ーム4の反射率が高く通常YAGレーザでは、パルスレ
ーザが用いられている。しかし、冷却速度が速いことか
ら、溶接部に割れが発生する場合がある。By the way, in the welding of aluminum alloys, in the method shown in FIG. 7, the reflectance of the laser beam 4 is high and the pulse laser is usually used in the YAG laser. However, due to the high cooling rate, cracks may occur in the weld.
【0004】このため、最近、図8のように2台のYA
Gレーザ発振器1で予熱しつつ溶接する手法が提案され
ている。For this reason, recently, as shown in FIG.
A method of welding while preheating with the G laser oscillator 1 has been proposed.
【0005】同図に示す方法は、溶接割れ防止のため
に、図7で示したYAGレーザ発振器1を2台用い、2
本の集光光学系により予熱しつつ溶接が行われる。The method shown in the figure uses two YAG laser oscillators 1 shown in FIG. 7 to prevent welding cracks.
Welding is carried out while preheating by the condensing optical system of the book.
【0006】この図8に示す方法では、全て2式の装置
を用いることから加工装置が高価になる上、溶接ヘッド
部が大型となり、狭隘個所への適用、適用対象へのアプ
ローチのフレキシブル性を損なうことになる、という問
題がある。In the method shown in FIG. 8, since all of the two types of equipment are used, the processing equipment becomes expensive, and the welding head portion becomes large, so that the application to narrow spaces and the approach to the application target can be made flexible. There is a problem that it will damage.
【0007】さらに、溶接用集光光学系3も2台使用す
ることから2本のレーザビーム4と光軸を同一にするこ
とが困難で、レーザビーム4の材料に対する照射は斜め
になりビームエネルギー密度が低下する上、そのエネル
ギー密度設定は溶接用集光光学系3の光軸の傾きに依存
することから、その調整が容易でないという問題があ
る。Further, since two welding condensing optical systems 3 are also used, it is difficult to make the optical axes of the two laser beams 4 the same, and the irradiation of the laser beam 4 on the material becomes oblique and the beam energy is increased. In addition to the decrease in density, the energy density setting depends on the inclination of the optical axis of the welding condensing optical system 3, so that there is a problem that the adjustment is not easy.
【0008】本発明は上記問題に鑑み、割れ等の発生し
ない健全な加工ができるレーザ加工光学系及びそれを用
いた加工方法を提供することを目的とする。In view of the above problems, it is an object of the present invention to provide a laser processing optical system capable of performing sound processing without cracks and the like, and a processing method using the same.
【0009】[0009]
【課題を解決するための手段】前記目的を達成する本発
明にかかる構成は、レーザ発振器からの光を用いてレー
ザ加工を施すレーザ加工装置に用いる加工用のレーザビ
ームを形成する光学系において、レンズ系と光源間、又
はレンズ系と加工面間にクサビプリズムをレーザビーム
の光軸方向に挿入してなり、大きさ,形状,パワー密度
の異なる複数の集光,ディフォーカスビームを同時に作
り出すことを特徴とする。The structure according to the present invention for achieving the above object is an optical system for forming a laser beam for processing used in a laser processing apparatus for performing laser processing using light from a laser oscillator, A wedge prism is inserted in the optical axis direction of the laser beam between the lens system and the light source, or between the lens system and the processing surface, to simultaneously generate multiple focusing and defocusing beams with different sizes, shapes, and power densities. Is characterized by.
【0010】上記レーザ加工用光学系において、上記ク
サビ型プリズムの挿入量を所定量調整することにより、
複数のレーザビームへのレーザ出力の割合を適宜調整す
ることを特徴とする。In the above laser processing optical system, by adjusting the insertion amount of the wedge-shaped prism by a predetermined amount,
A feature is that the ratio of laser output to a plurality of laser beams is appropriately adjusted.
【0011】一方の、レーザ加工方法は、上記レーザ加
工用光学系を備えた加工装置を用いて、レーザ加工する
ことを特徴とする。On the other hand, the laser processing method is characterized in that laser processing is performed by using a processing apparatus equipped with the above laser processing optical system.
【0012】[0012]
【発明の実施の形態】以下、本発明を実施する実施の形
態の内容を詳細に説明する。BEST MODE FOR CARRYING OUT THE INVENTION The contents of the embodiments for carrying out the present invention will be described in detail below.
【0013】本発明の加工光学系は、図1(a)に示す
ように、一体の溶接用集光光学系3であり、光源(光フ
ァイバー2)と集光光学系3との間あるいは集光光学系
3と加工面8すなわち像側に、クサビプリズム7を光軸
方向に挿入しレーザビーム4を分割するものである。ま
た、挿入するクサビプリズム7を光軸方向に挿入する量
の大小によってレーザビーム4の分割割合がきまる。As shown in FIG. 1 (a), the processing optical system of the present invention is an integrated welding condensing optical system 3, which is provided between the light source (optical fiber 2) and the condensing optical system 3. A wedge prism 7 is inserted in the optical axis direction on the optical system 3 and the processed surface 8, that is, on the image side to divide the laser beam 4. Further, the division ratio of the laser beam 4 is determined by the size of the inserted wedge prism 7 in the optical axis direction.
【0014】本発明の加工光学系の構成は、図1(a)
に示すように、光ファイバ2から出射されたレーザビー
ム4のほとんどは集光光学系3により加工面8上の点P
に集光される。図1(b)は、図1(a)のS面での分
割されたレーザビーム9,10の状態を示す。図1
(c)は、図1(a)のW面での分割されたレーザビー
ム9,10の状態を示す。図1(b)に示すように、レ
ーザビーム4の一部は挿入されたクサビプリズム7によ
り曲げられ、クサビプリズム7の厚みによってディフォ
ーカスを生じるため、点P以外に光軸からdだけ離れた
点Qにも集光される。The structure of the processing optical system of the present invention is shown in FIG.
As shown in FIG. 3, most of the laser beam 4 emitted from the optical fiber 2 is reflected by the condensing optical system 3 at a point P on the processing surface 8.
Is collected. FIG. 1B shows a state of the split laser beams 9 and 10 on the S plane of FIG. FIG.
1C shows a state of the split laser beams 9 and 10 on the W plane of FIG. As shown in FIG. 1B, a part of the laser beam 4 is bent by the inserted wedge prism 7, and defocus occurs due to the thickness of the wedge prism 7. Therefore, apart from the point P, the laser beam 4 is separated from the optical axis by d. It is also focused on the point Q.
【0015】したがって、図1(c)のように、加工面
8では微小面積に集光されたレーザビーム10のスポッ
ト10sとこの集光スポット10sからやや離れた位置
に、ある広がりを持つレーザビーム9のスポット9sが
同時にできる。よって、光ファイバ2と集光光学系3と
を一体として加工面8を走査すれば、該加工面8はある
程度広がりを持つレーザビーム9のスポット9sで加熱
された後に、微小面積に集光されたレーザビーム10の
集光スポット10sで溶接される。Therefore, as shown in FIG. 1C, the spot 10s of the laser beam 10 focused on a very small area on the processed surface 8 and the laser beam having a certain spread at a position slightly distant from the spot 10s. 9 spots 9s can be formed at the same time. Therefore, if the processed surface 8 is scanned while the optical fiber 2 and the condensing optical system 3 are integrated, the processed surface 8 is heated by the spot 9s of the laser beam 9 having a certain extent of spread and then condensed on a minute area. The focused spot 10s of the laser beam 10 is welded.
【0016】なお、図1(a)には、光ファイバ2の一
点から出たレーザビーム4のみを示したが、実際には点
P,Qの周りに光ファイバ2のコアの像の広がりを持つ
が、省略する。また、上記広がりを持つ方のスポット9
sの大きさは、点Qのディフォーカス量すなわちクサビ
プリズム7の厚さで決まってくる。上記広がりを持つス
ポット9sと集光スポット10s間の距離は、点Qのシ
フト量すなわちクサビプリズム7のクサビ角で決まる。
また、広がりを持つレーザビーム9と光軸上の集光され
たレーザビーム10とのレーザ出力バランスは、クサビ
プリズム7の大きさ及びその挿入量により決定される。
また、広がりを持つレーザビーム9の形状は、面Sにお
けるクサビプリズム7の形状にほぼ等しい。In FIG. 1A, only the laser beam 4 emitted from one point of the optical fiber 2 is shown, but in reality, the image of the core of the optical fiber 2 is spread around the points P and Q. Have, but omit. Also, the spot 9 with the above spread
The size of s is determined by the defocus amount at the point Q, that is, the thickness of the wedge prism 7. The distance between the spot 9s having the spread and the focused spot 10s is determined by the shift amount of the point Q, that is, the wedge angle of the wedge prism 7.
Further, the laser output balance between the laser beam 9 having a spread and the laser beam 10 condensed on the optical axis is determined by the size of the wedge prism 7 and the insertion amount thereof.
The shape of the laser beam 9 having a spread is almost equal to the shape of the wedge prism 7 on the surface S.
【0017】ここで、点Qのディフォーカス量δと点Q
のシフト量dの大きさは、 ε:クサビプリズム7のクサビ角, t:クサビプリズム7の平均厚さ, n:クサビプリズム7の屈折率, f:レンズ焦点距離, とすると、Here, the defocus amount δ at the point Q and the point Q
The magnitude of the shift amount d is: ε: wedge angle of wedge prism 7, t: average thickness of wedge prism 7, n: refractive index of wedge prism 7, f: lens focal length,
【数1】δ=t・(n−1)/n≒t/3 となる。また、クサビプリズム7通過後の光軸のフレ角
は、## EQU1 ## .delta. = T.multidot. (N-1) /n.apprxeq.t/3. Also, the deflection angle of the optical axis after passing through the wedge prism 7 is
【数2】ε′=ε・(n−1)≒ε/2 となる。したがって、点Qのシフト量(光軸からの距
離)は、## EQU2 ## .epsilon. '=. Epsilon. (N-1) .apprxeq..epsilon. / 2. Therefore, the shift amount of the point Q (distance from the optical axis) is
【数3】d=ε′・f≒f・ε/2 となる。## EQU00003 ## d = .epsilon. '. F.apprxeq.f.epsilon./2.
【0018】尚、上記クサビプリズム7は、集光光学系
3と加工面8との間に配置してもよい。但し、一般に結
像倍率は1以下なので、レンズの入射側より出射側のほ
うが、開口数(NA:Numerical Aperture)が大きく、
上記クサビプリズム7の挿入により、大きな球面収差が
発生し易いため、集光スポットはぼけることとなる。The wedge prism 7 may be arranged between the condensing optical system 3 and the processed surface 8. However, since the imaging magnification is generally 1 or less, the numerical aperture (NA: Numerical Aperture) is larger on the exit side than on the entrance side of the lens,
A large spherical aberration is likely to occur due to the insertion of the wedge prism 7, so that the focused spot is blurred.
【0019】次に、本発明のツインビームレーザ加工用
光学系の好適な一実施の形態を、図2〜図5によって述
べるが、本発明はこれに限定されるものではない。Next, a preferred embodiment of the twin beam laser processing optical system of the present invention will be described with reference to FIGS. 2 to 5, but the present invention is not limited to this.
【0020】図2に本実施の形態に係るレンズ構成を示
し、図2(A)はツインビームレーザ加工用光学系の正
面図、(B)はその平面図を示す。本実施の形態の光学
系は前述した図7に示すレーザ加工装置の集光光学系3
として用いるものであり、本実施の形態にかかるクサビ
プリズム7は、光源すなわち光ファイバ2と集光光学系
3との間に挿入する構成となっている。また、実際の集
光光学系3は、収差補正のため5枚の組み合せレンズに
よって構成されており、溶接に用いるため加工面8側に
は、保護ガラス12を設置している。FIG. 2 shows a lens configuration according to the present embodiment, FIG. 2 (A) is a front view of an optical system for twin-beam laser processing, and FIG. 2 (B) is a plan view thereof. The optical system of this embodiment is the condensing optical system 3 of the laser processing apparatus shown in FIG.
The wedge prism 7 according to the present embodiment is configured to be inserted between the light source, that is, the optical fiber 2 and the condensing optical system 3. Further, the actual focusing optical system 3 is composed of five combined lenses for aberration correction, and a protective glass 12 is installed on the processed surface 8 side for use in welding.
【0021】下記「表1」に、本実施の形態において集
光光学系3に挿入する2種類のクサビプリズム7の特性
を示す。ここで、クサビプリズム7 No.1は、光軸上の
集光スポット10sが、0.23mmφに対し、広がりを持
つスポット(ここでは「加熱スポット」と呼ぶ)9sが
クサビプリズム7 No.1の挿入により0.62×(0〜0.
70)mmとなる。また、クサビプリズム No.2は、同様
に加熱スポット9sが0.48×(0〜0.56)mmとな
る。The following "Table 1" shows the characteristics of the two kinds of wedge prisms 7 to be inserted into the condensing optical system 3 in the present embodiment. Here, in the wedge prism 7 No. 1, the focused spot 10 s on the optical axis is a spot having a spread with respect to 0.23 mmφ (herein referred to as “heating spot”) 9 s of the wedge prism 7 No. 1. 0.62 x (0 to 0.
70) mm. Similarly, in the wedge prism No. 2, the heating spot 9s is 0.48 × (0 to 0.56) mm.
【0022】[0022]
【表1】 [Table 1]
【0023】図3に製作したクサビプリズム7の挿入機
構を示す。図3(A),(B)に示すように、集光光学
系3と連通する筒部材21には、架台22を介して移動
手段22が設けられており、移動手段22の回転レバー
23を回転させることにより、移動部材24に固定され
ているクサビプリズム7を光軸方向に所定量挿入又は引
き出しを行うようにしている。そして、上記クサビプリ
ズム7の先端が、光学系の光軸Lと一致させた位置を原
点(零)とし、クサビプリズム7を中へ挿入する方向を
「+」とし、引き抜く方向を「−」とした。FIG. 3 shows an inserting mechanism of the manufactured wedge prism 7. As shown in FIGS. 3 (A) and 3 (B), the cylindrical member 21 communicating with the condensing optical system 3 is provided with a moving means 22 via a frame 22, and a rotating lever 23 of the moving means 22 is provided. By rotating, the wedge prism 7 fixed to the moving member 24 is inserted or pulled out by a predetermined amount in the optical axis direction. The position where the tip of the wedge prism 7 is aligned with the optical axis L of the optical system is the origin (zero), the direction in which the wedge prism 7 is inserted is "+", and the direction in which it is pulled out is "-". did.
【0024】図4(A)〜(G)にクサビプリズム7の
挿入位置を様々に変化させた際、本発明の光学系により
集光したレーザビーム9,10を黒色アクリルに照射
し、黒色アクリルを蒸発させた結果を、模式的に描いた
ものを示す。図4(A)〜(G)に示すように、いずれ
の場合でもレーザビーム9,10が分割されていること
が確認できた。また、クサビプリズム7の挿入位置の変
化によって集光レーザビーム9,10の分割の割合を自
由に変化させることが確認できた(左:加熱パターン,
右:溶接パターンを示す)。なお、ここに用いたクサビ
プリズム7は、上記「表1」の No.1に示したものであ
る。4A to 4G, when the insertion position of the wedge prism 7 is variously changed, the black acrylic is irradiated with the laser beams 9 and 10 condensed by the optical system of the present invention. The result of evaporating is shown schematically. As shown in FIGS. 4A to 4G, it was confirmed that the laser beams 9 and 10 were divided in any case. It was also confirmed that the splitting ratio of the focused laser beams 9 and 10 can be freely changed by changing the insertion position of the wedge prism 7 (left: heating pattern,
Right: Shows the welding pattern). The wedge prism 7 used here is the one shown in No. 1 of "Table 1".
【0025】[0025]
【実施例】本発明の光学系等を用いて、下記に示す「条
件」にて板厚1mmのアルミニウム合金(A5052)を溶接し
た「一実施例」について説明する。図5に、アルミニウ
ム合金の溶接の結果を、模式的に描いたものを示す。[Example] An "Example" in which an aluminum alloy (A5052) having a plate thickness of 1 mm is welded under the following "conditions" using the optical system of the present invention will be described. FIG. 5 shows a schematic drawing of the result of welding an aluminum alloy.
【0026】<条件> (1) ツインビーム条件 ビーム間隔;0.5mm エネルギー分配比 先行:後行=4:6 (2) 溶 接 条 件 平均出力 ;510w ピーク出力; 5.3kw パルス周波数 ;10pps デューティ;10% 速 度 ; 0.3m/min 板 厚 ; 1mmt<Conditions> (1) Twin beam condition Beam spacing: 0.5 mm Energy distribution ratio Leading: Trailing = 4: 6 (2) Welding condition average output: 510w peak output: 5.3kw pulse frequency: 10pps Duty: 10% Speed: 0.3m / min Plate thickness: 1mmt
【0027】図5(A),(B)に示すように、板厚1
mmのアルミニウム合金の溶接を施しても、本実施例の光
学系によるツインビームによる加工方法では、割れの発
生がないことを確認した。これは、先行するレーザビー
ム9の予熱効果によるものである。As shown in FIGS. 5A and 5B, the plate thickness 1
It was confirmed that even if welding of an aluminum alloy of mm was performed, the twin beam processing method using the optical system of the present example did not cause cracking. This is due to the preheating effect of the preceding laser beam 9.
【0028】しかしながら、従来のシングルビームによ
る加工方法では、図6(A),(B)に示すように、他
の条件は全て同一条件で溶接しているにもかかわらず、
板厚1mmのアルミニウム合金の表裏全厚に貫通する割れ
31が発生した。However, in the conventional single beam processing method, as shown in FIGS. 6 (A) and 6 (B), despite welding under the same conditions for all other conditions,
A crack 31 was formed that penetrated the entire thickness of the front and back of the aluminum alloy having a plate thickness of 1 mm.
【0029】[0029]
【発明の効果】このように、本発明の光学系は、レンズ
系と光源間、又はレンズ系と加工面間にクサビプリズム
を挿入してなり、大きさ,形状,パワー密度の異なる複
数の集光,ディフォーカスビームを同時に作り出すとい
うシンプルな装置で、種々のツインビームが得られるの
で、溶接や切断などのレーザ加工において、割れ等のな
い健全な加工が出来るものである。As described above, in the optical system of the present invention, a wedge prism is inserted between the lens system and the light source, or between the lens system and the processing surface, and a plurality of collections having different sizes, shapes and power densities are provided. Since a variety of twin beams can be obtained with a simple device that simultaneously produces a light beam and a defocused beam, it is possible to perform sound processing without cracks in laser processing such as welding and cutting.
【0030】また、クサビプリズムの挿入量を所定量調
整することにより、複数のレーザビームへのレーザ出力
の割合を適宜調整できる、所望のレーザ加工が実現でき
る。Further, by adjusting the insertion amount of the wedge prism by a predetermined amount, it is possible to realize desired laser processing in which the ratio of laser output to a plurality of laser beams can be adjusted appropriately.
【図1】本発明の実施の形態に係る光学系の説明図であ
る。FIG. 1 is an explanatory diagram of an optical system according to an embodiment of the present invention.
【図2】本発明の実施の形態に係る光学系の構成図であ
る。FIG. 2 is a configuration diagram of an optical system according to an embodiment of the present invention.
【図3】本発明の実施の形態に係るクサビプリズム挿入
機構の概略図である。FIG. 3 is a schematic view of a wedge prism insertion mechanism according to the embodiment of the present invention.
【図4】本発明の実施の形態に係るアクリルバーンパタ
ーンの状況図である。FIG. 4 is a situation diagram of an acrylic burn pattern according to an embodiment of the present invention.
【図5】本発明の実施例に係る溶接結果を示す模式図で
ある。FIG. 5 is a schematic diagram showing a welding result according to an example of the present invention.
【図6】従来例に係る溶接結果を示す模式図である。FIG. 6 is a schematic diagram showing a welding result according to a conventional example.
【図7】従来のYAGレーザ溶接時の装置構成図であ
る。FIG. 7 is a device configuration diagram during conventional YAG laser welding.
【図8】従来の2台の装置を用いたYAGレーザ溶接時
の装置構成図である。FIG. 8 is a device configuration diagram at the time of YAG laser welding using two conventional devices.
1 YAGレーザ発振器 2 光ファイバー 3 集光光学系 4 レーザビーム 5 溶融池 6 溶接ビード 7 クサビプリズム 8 加工面 9 クサビプリズムを通過したレーザビーム 10 レンズのみを通過したレーザビーム 11 光束 12 保護ガラス 9s スポット 10s スポット 1 YAG Laser Oscillator 2 Optical Fiber 3 Condensing Optical System 4 Laser Beam 5 Weld Pool 6 Weld Bead 7 Wedge Prism 8 Worked Surface 9 Laser Beam Passing Through Wedge Prism 10 Laser Beam Through Only Lens 11 Luminous Flux 12 Protective Glass 9s Spot 10s spot
───────────────────────────────────────────────────── フロントページの続き (72)発明者 濱田 彰一 兵庫県神戸市兵庫区和田崎町一丁目1番1 号 三菱重工業株式会社神戸造船所内 (72)発明者 赤羽 崇 兵庫県神戸市兵庫区和田崎町一丁目1番1 号 三菱重工業株式会社神戸造船所内 (72)発明者 大滝 桂 東京都千代田区丸の内3丁目2番3号 株 式会社ニコン内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shoichi Hamada 1-1-1, Wadasaki-cho, Hyogo-ku, Kobe-shi, Hyogo Mitsubishi Heavy Industries, Ltd. Kobe Shipyard (72) Inventor Takashi Akabane, Hyogo-ku, Kobe-shi, Hyogo 1-1-1 Tasakicho Mitsubishi Heavy Industries, Ltd. Inside Kobe Shipyard (72) Inventor Katsura Otaki 3 2-3 Marunouchi Marunouchi, Chiyoda-ku, Tokyo Inside Nikon Corporation
Claims (3)
工を施すレーザ加工装置に用いいる加工用のレーザビー
ムを形成する光学系において、 レンズ系と光源間、又はレンズ系と加工面間にクサビプ
リズムをレーザビームの光軸方向に挿入してなり、大き
さ,形状,パワー密度の異なる複数の集光,ディフォー
カスビームを同時に作り出すことを特徴とするレーザ加
工用光学系。1. An optical system for forming a laser beam for processing, which is used in a laser processing apparatus for performing laser processing using light from a laser oscillator, wherein a wedge between a lens system and a light source or between a lens system and a processing surface. An optical system for laser processing, characterized in that a prism is inserted in the optical axis direction of the laser beam to simultaneously produce a plurality of focusing and defocusing beams having different sizes, shapes, and power densities.
いて、 上記クサビ型プリズムの挿入量を所定量調整することに
より、複数のレーザビームへのレーザ出力の割合を適宜
調整することを特徴とするレーザ加工用光学系。2. The laser processing optical system according to claim 1, wherein the insertion amount of the wedge-shaped prism is adjusted by a predetermined amount to appropriately adjust the ratio of laser output to a plurality of laser beams. Optical system for laser processing.
系を備えた加工装置を用いて、レーザ加工することを特
徴とするレーザ加工方法。3. A laser processing method, wherein laser processing is performed by using a processing apparatus including the laser processing optical system according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16729895A JP3212486B2 (en) | 1995-07-03 | 1995-07-03 | Laser processing optical system and processing method using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16729895A JP3212486B2 (en) | 1995-07-03 | 1995-07-03 | Laser processing optical system and processing method using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0919785A true JPH0919785A (en) | 1997-01-21 |
| JP3212486B2 JP3212486B2 (en) | 2001-09-25 |
Family
ID=15847166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16729895A Expired - Lifetime JP3212486B2 (en) | 1995-07-03 | 1995-07-03 | Laser processing optical system and processing method using the same |
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| Country | Link |
|---|---|
| JP (1) | JP3212486B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003320472A (en) * | 2002-05-08 | 2003-11-11 | Toshiba Corp | Method for sealing surface defects |
| US7304265B2 (en) * | 2002-03-12 | 2007-12-04 | Mitsuboshi Diamond Industrial Co., Ltd. | Method and system for machining fragile material |
| JP2012086235A (en) * | 2010-10-18 | 2012-05-10 | Toshiba Corp | Heating repair device and heating repair method |
| WO2015098388A1 (en) * | 2013-12-26 | 2015-07-02 | シャープ株式会社 | Processing device |
| CN105328331A (en) * | 2015-11-10 | 2016-02-17 | 哈尔滨工程大学 | Strong-focusing optical system used for composite machining of laser turning and grinding and machining method |
-
1995
- 1995-07-03 JP JP16729895A patent/JP3212486B2/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7304265B2 (en) * | 2002-03-12 | 2007-12-04 | Mitsuboshi Diamond Industrial Co., Ltd. | Method and system for machining fragile material |
| US7816623B2 (en) | 2002-03-12 | 2010-10-19 | Mitsuboshi Diamond Industrial Co., Ltd. | Method and apparatus for processing brittle material |
| JP2003320472A (en) * | 2002-05-08 | 2003-11-11 | Toshiba Corp | Method for sealing surface defects |
| JP2012086235A (en) * | 2010-10-18 | 2012-05-10 | Toshiba Corp | Heating repair device and heating repair method |
| WO2015098388A1 (en) * | 2013-12-26 | 2015-07-02 | シャープ株式会社 | Processing device |
| CN105328331A (en) * | 2015-11-10 | 2016-02-17 | 哈尔滨工程大学 | Strong-focusing optical system used for composite machining of laser turning and grinding and machining method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3212486B2 (en) | 2001-09-25 |
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