JPH09210909A - Measuring device using laser beam - Google Patents

Measuring device using laser beam

Info

Publication number
JPH09210909A
JPH09210909A JP8019925A JP1992596A JPH09210909A JP H09210909 A JPH09210909 A JP H09210909A JP 8019925 A JP8019925 A JP 8019925A JP 1992596 A JP1992596 A JP 1992596A JP H09210909 A JPH09210909 A JP H09210909A
Authority
JP
Japan
Prior art keywords
measured
laser
intensity
laser beam
molecule
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8019925A
Other languages
Japanese (ja)
Inventor
Yoshihiro Deguchi
祥啓 出口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP8019925A priority Critical patent/JPH09210909A/en
Publication of JPH09210909A publication Critical patent/JPH09210909A/en
Pending legal-status Critical Current

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  • Radiation Pyrometers (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

PROBLEM TO BE SOLVED: To enhance the measuring accuracy of the concentration and temp. of molecules to be measured by determining the fluorescent intensity emitted from the molecules using a CCD camera, and subjecting the obtained intensity to a normalizing calculation process using a fluorescent intensity given by a sensor. SOLUTION: A pulse laser for energization 21 energizes a variable wavelength laser 22 to emit a laser beam 24, and a synch. signal is fed to a sensor 28 and a CCD camera 30 through a synch. line 31, and the intensity of the fluorescent beam emitted by a fluorescent substance applied to a glass plate 27 and the intensity of fluorescent beam emitted by molecules to be measured which are energized with the laser beam 24 cast onto the measuring field 26 are sensed and fed to a computer 32. The computer 32 performs a normalizing calculation process such that the fluorescent intensity of the molecules in the field 26 given from the camera 30 is divided by the fluorescent intensity given from the sensor 28, and the obtained quotient is displayed and emitted as the concentration or temp. of the molecules in the field 26.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、レーザ誘起蛍光法
を用いて2次元温度や濃度の計測等を行なうレーザ光を
用いた計測装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring device using laser light for measuring two-dimensional temperature and concentration using a laser induced fluorescence method.

【0002】[0002]

【従来の技術】レーザ誘起蛍光法(以下「LIF」と略
称する)は、被測定分子が有している吸収線と同一の周
波数を持つレーザ光で測定場を照射し、濃度、温度計測
に必要な信号光を得る手法である。
2. Description of the Related Art The laser-induced fluorescence method (hereinafter abbreviated as "LIF") irradiates a measuring field with a laser beam having the same frequency as an absorption line of a molecule to be measured to measure concentration and temperature. This is a method of obtaining the necessary signal light.

【0003】従来のLIFを用いた2次元濃度計測装置
の概略構成を図2に示す。同図で励起用パルスレーザ1
は色素レーザなどの波長可変レーザ2を発振させて、被
測定分子の電子エネルギ差に対応した波長のレーザ光を
出射させる。このレーザ光は、ビームエキスパンダ3に
てシート状にされた後、測定場8に入射される。
FIG. 2 shows a schematic structure of a conventional two-dimensional concentration measuring apparatus using LIF. Excitation pulsed laser 1
Oscillates a wavelength tunable laser 2 such as a dye laser to emit laser light having a wavelength corresponding to the electron energy difference of the molecule to be measured. The laser light is made into a sheet shape by the beam expander 3 and then incident on the measurement field 8.

【0004】この測定場8に照射されたレーザ光7によ
り励起された被測定分子から生じた蛍光は、レンズ4で
集光されてCCDカメラ5で撮像、計測される。このと
き、励起用パルスレーザ1からCCDカメラ5へレーザ
の発振と撮像の同期をとるための同期ライン6が配設さ
れる。
Fluorescence generated from the molecule to be measured excited by the laser beam 7 with which the measurement field 8 is irradiated is condensed by the lens 4 and imaged and measured by the CCD camera 5. At this time, a synchronization line 6 is provided from the excitation pulse laser 1 to the CCD camera 5 for synchronizing laser oscillation and imaging.

【0005】上記被測定分子の濃度と測定場8での蛍光
強度は比例するため、被測定分子の濃度は蛍光強度によ
り決定されるが、同時に該蛍光強度はレーザ光7の強度
にも比例するため、レーザ光7が照射されている計測領
域におけるレーザ光強度分布の補正を行なう必要が生じ
る。
Since the concentration of the molecule to be measured is proportional to the fluorescence intensity in the measurement field 8, the concentration of the molecule to be measured is determined by the fluorescence intensity, but at the same time, the fluorescence intensity is also proportional to the intensity of the laser beam 7. Therefore, it becomes necessary to correct the laser light intensity distribution in the measurement area irradiated with the laser light 7.

【0006】そして、従来よりレーザ光7の強度分布を
測定する方法としては、空気からのレーリ散乱光(レー
ザ光と同波長の分子散乱光)を利用する方法や、あるい
は図3に示すようにビームエキスパンダ3の後段にレー
ザ光7の一部を分岐するビームスプリッタ11を設け
て、このビームスプリッタ11で分岐したレーザ光7を
フィルタ12により撮影のための都合のよい輝度に減衰
させた後にCCDカメラ13で撮像してその輝度から強
度を検知する方法等があった。
Conventionally, as a method for measuring the intensity distribution of the laser light 7, a method using Rayleigh scattered light from air (molecular scattered light having the same wavelength as the laser light), or as shown in FIG. After the beam expander 3 is provided with a beam splitter 11 for branching a part of the laser light 7, the laser light 7 branched by the beam splitter 11 is attenuated by a filter 12 to a convenient brightness for photographing. There has been a method of taking an image with the CCD camera 13 and detecting the intensity from the brightness.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、レーザ
光強度の測定を行なうに際して、上記測定場からのレー
リ散乱光を利用する方法では、測定場に空気などのバッ
ファガスを導入する必要があり、被測定分子を導入しな
がらレーザ光強度分布を求めることができなかった。
However, in the method of utilizing the Rayleigh scattered light from the measurement field when measuring the laser light intensity, it is necessary to introduce a buffer gas such as air into the measurement field. It was not possible to obtain the laser light intensity distribution while introducing the measurement molecule.

【0008】また、上記図3で示したビームスプリッタ
11によりレーザ光7を分岐し、分岐されたレーザ光を
直接CCDカメラ13で計測する方法では、CCDカメ
ラ13の計測部で干渉などの問題を生じ、誤差が発生し
やすいという傾向があった。
Further, in the method in which the laser beam 7 is branched by the beam splitter 11 shown in FIG. 3 and the branched laser beam is directly measured by the CCD camera 13, there is a problem such as interference in the measuring section of the CCD camera 13. There is a tendency that an error occurs easily.

【0009】本発明は上記のような実情に鑑みてなされ
たもので、その目的とするところは、被測定分子を導入
しながらレーザ光の強度分布を高い精度で測定すること
により、結果として測定場での被測定分子の濃度、温度
を高い精度で計測することが可能なレーザ光を用いた計
測装置を提供することにある。
The present invention has been made in view of the above circumstances, and an object of the present invention is to measure the intensity distribution of laser light with high accuracy while introducing a molecule to be measured. An object of the present invention is to provide a measuring device using a laser beam capable of measuring the concentration and temperature of a molecule to be measured in the field with high accuracy.

【0010】[0010]

【課題を解決するための手段】すなわち本発明は、シー
ト状のレーザ光を出力して測定場の被計測分子に照射す
るビームエキスパンダと、レーザ光の照射により上記被
測定分子が発する蛍光を入射して蛍光強度を測定する第
1の計測手段と、上記ビームエキスパンダと上記測定場
の間に設け、レーザ光の一部を分岐するビームスプリッ
タと、蛍光物質が塗布されたガラス板に上記ビームスプ
リッタで分岐されたレーザ光を入射し、該蛍光物質から
発せられる蛍光強度を測定する第2の計測手段と、この
第2の計測手段で得た蛍光強度により上記第1の測定手
段で得た測定場での被測定分子が発する蛍光強度を正規
化する正規化手段とを備えたものである。
Means for Solving the Problems That is, the present invention provides a beam expander for outputting a sheet-shaped laser beam to irradiate a molecule to be measured in a measurement field, and a fluorescence emitted from the molecule to be measured by irradiation with the laser beam. A first measuring means for measuring the fluorescence intensity by incidence, a beam splitter provided between the beam expander and the measurement field for branching a part of the laser beam, and a glass plate coated with a fluorescent material are provided with the above. A second measuring means for entering the laser beam split by the beam splitter to measure the fluorescence intensity emitted from the fluorescent substance, and a fluorescence intensity obtained by the second measuring means for obtaining by the first measuring means. And a normalizing means for normalizing the fluorescence intensity emitted by the molecule to be measured in the measurement field.

【0011】このような構成とすることにより、上記正
規化手段でレーザ光強度分布の補正を行なって被測定分
子の蛍光強度を求めることができるため、被測定分子の
濃度や温度などをきわめて高い精度で計測することがで
きる。
With this structure, the laser light intensity distribution can be corrected by the normalizing means to obtain the fluorescence intensity of the molecule to be measured, so that the concentration and temperature of the molecule to be measured are extremely high. It can be measured with accuracy.

【0012】[0012]

【発明の実施の形態】以下、本発明の実施の一形態に係
るレーザ光を用いた計測装置について図面を参照して説
明する。図1はその概略構成を例示するもので、励起用
パルスレーザ21が色素レーザなどの波長可変レーザ2
2を発振させ、被測定分子の電子エネルギ差に対応した
波長のレーザ光を出射させる。
BEST MODE FOR CARRYING OUT THE INVENTION A measuring device using laser light according to an embodiment of the present invention will be described below with reference to the drawings. FIG. 1 exemplifies its schematic configuration. A pulse laser 21 for excitation is a wavelength tunable laser 2 such as a dye laser.
2 is oscillated, and laser light having a wavelength corresponding to the electron energy difference of the molecule to be measured is emitted.

【0013】この波長可変レーザ22から出射されたレ
ーザ光24は、ビームエキスパンダ23にてシート状に
された後、ビームスプリッタ25にてその一部が予め設
定された一定の割合で分岐され、残ったレーザ光がその
まま測定場26へ、分岐されたレーザ光が蛍光物質を塗
布したガラス板27へそれぞれ入射される。
The laser beam 24 emitted from the wavelength tunable laser 22 is formed into a sheet by the beam expander 23, and a part of the laser beam 24 is branched by the beam splitter 25 at a preset constant rate. The remaining laser light is directly incident on the measuring field 26, and the branched laser light is incident on the fluorescent substance-coated glass plate 27.

【0014】このガラス板27は、例えばCCDライン
センサでなる検出器28に対して取付けられたものであ
り、検出器28はガラス板27に塗布された蛍光物質か
ら発生する蛍光の強度を、レーザ光24の強度分布を表
わすものとして検出する。
The glass plate 27 is attached to a detector 28 which is, for example, a CCD line sensor, and the detector 28 detects the intensity of fluorescence generated from the fluorescent substance applied to the glass plate 27 by using a laser. It is detected as representing the intensity distribution of the light 24.

【0015】一方、上記測定場26に照射されたレーザ
光24により励起された被測定分子から生じた蛍光は、
レンズ29で集光されてCCDカメラ30で撮像、計測
される。
On the other hand, the fluorescence generated from the molecule to be measured excited by the laser beam 24 applied to the measurement field 26 is
The light is condensed by the lens 29, and is imaged and measured by the CCD camera 30.

【0016】しかるに、上記検出器28及びCCDカメ
ラ30に対して上記励起用パルスレーザ21から同期ラ
イン31が配設され、この同期ライン31を介してレー
ザの発振と検出、撮像の同期をとるための信号が送達さ
れる。
However, a synchronization line 31 is provided from the excitation pulse laser 21 to the detector 28 and the CCD camera 30, and laser oscillation, detection, and imaging are synchronized via the synchronization line 31. Signal is delivered.

【0017】そして、検出器28で検出されたレーザ光
24の強度分布に応じた蛍光強度、及びCCDカメラ3
0で得られた測定場8での蛍光強度は共にコンピュータ
32に送られる。
Then, the fluorescence intensity corresponding to the intensity distribution of the laser beam 24 detected by the detector 28, and the CCD camera 3
The fluorescence intensities at the measurement field 8 obtained at 0 are both sent to the computer 32.

【0018】コンピュータ32では、CCDカメラ30
で得た測定場26での被測定分子が発する蛍光強度を検
出器28で得た蛍光強度を用いて正規化演算することで
CCDカメラ30の出力に対する補正を実行し、その演
算結果から測定場26における被計測分子の濃度または
温度を求めて表示出力する。
In the computer 32, the CCD camera 30
The fluorescence intensity emitted by the molecule to be measured in the measurement field 26 obtained in step 2 is normalized using the fluorescence intensity obtained in the detector 28 to correct the output of the CCD camera 30, and the calculation result The concentration or temperature of the molecule to be measured at 26 is obtained and displayed and output.

【0019】上記のような構成にあって、励起用パルス
レーザ21が波長可変レーザ22を励振してレーザ光を
出射させる一方、同期ライン31を介して検出器28、
及びCCDカメラ30に同期信号を送出し、ガラス板2
7に塗布された蛍光物質から発生する蛍光の強度、及び
上記測定場26に照射されたレーザ光24により励起さ
れた被測定分子から生じた蛍光の強度をそれぞれ検出さ
せ、コンピュータ32へ送出させる。
In the above structure, the excitation pulse laser 21 excites the wavelength tunable laser 22 to emit laser light, while the detector 28, via the synchronization line 31,
And the sync signal is sent to the CCD camera 30, and the glass plate 2
The intensity of the fluorescence generated from the fluorescent substance applied to 7 and the intensity of the fluorescence generated from the molecule to be measured excited by the laser beam 24 applied to the measurement field 26 are detected and sent to the computer 32.

【0020】コンピュータ32は、検出器28で得た蛍
光強度を除数としてCCDカメラ30で得た測定場26
での被測定分子が発する蛍光強度を除算する正規化演算
を実行し、その商を測定場26における被計測分子の濃
度または温度として表示出力する。
The computer 32 uses the fluorescence intensity obtained by the detector 28 as a divisor, and the measurement field 26 obtained by the CCD camera 30.
The normalization operation for dividing the fluorescence intensity emitted by the molecule to be measured at is executed, and the quotient is displayed and output as the concentration or temperature of the molecule to be measured in the measurement field 26.

【0021】この場合、ガラス板27に塗布された蛍光
物質から発生する蛍光の強度を除数としたのは、該蛍光
強度がレーザ光24の強度分布に比例しているからであ
り、このような除数を用いて測定場26での被測定分子
が発する蛍光強度に対する除算を行なうことで、レーザ
光24の強度分布に基づいた正規化を施した、きわめて
高い精度で測定場26での被測定分子の濃度あるいは温
度を計測することができるようになるものである。
In this case, the reason why the intensity of the fluorescence generated from the fluorescent substance applied to the glass plate 27 is taken as a divisor is that the fluorescence intensity is proportional to the intensity distribution of the laser beam 24. The divisor is used to perform division on the fluorescence intensity emitted by the molecule to be measured in the measurement field 26 to perform normalization based on the intensity distribution of the laser light 24, and the molecule to be measured in the measurement field 26 with extremely high accuracy. It becomes possible to measure the concentration or temperature of.

【0022】[0022]

【発明の効果】以上に述べた如く本発明によれば、被測
定分子を導入しながらレーザ光の強度分布を高い精度で
測定することにより、結果として測定場での被測定分子
の濃度、温度を高い精度で計測することが可能なレーザ
光を用いた計測装置を提供することができる。
As described above, according to the present invention, by measuring the intensity distribution of the laser beam with high accuracy while introducing the molecule to be measured, as a result, the concentration and temperature of the molecule to be measured in the measuring field are measured. It is possible to provide a measuring device using a laser beam capable of measuring a high accuracy.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施の一形態に係る計測装置の概略構
成を例示する図。
FIG. 1 is a diagram illustrating a schematic configuration of a measuring device according to an embodiment of the present invention.

【図2】一般的なレーザ誘起蛍光法を用いた2次元濃度
計測装置の概略構成を示す図。
FIG. 2 is a diagram showing a schematic configuration of a two-dimensional concentration measuring apparatus using a general laser induced fluorescence method.

【図3】図2に組合わせてレーザ光の強度分布を測定す
る構成を示した図。
FIG. 3 is a diagram showing a configuration for measuring the intensity distribution of laser light in combination with FIG.

【符号の説明】[Explanation of symbols]

21…励起用パルスレーザ 22…波長可変レーザ 23…ビームエキスパンダ 24…レーザ光 25…ビームスプリッタ 26…測定場 27…ガラス板 28…検出器 29…レンズ 30…CCDカメラ 31…同期ライン 32…コンピュータ 21 ... Excitation pulse laser 22 ... Wavelength variable laser 23 ... Beam expander 24 ... Laser light 25 ... Beam splitter 26 ... Measurement field 27 ... Glass plate 28 ... Detector 29 ... Lens 30 ... CCD camera 31 ... Synchronization line 32 ... Computer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 シート状のレーザ光を出力して測定場の
被計測分子に照射するビームエキスパンダと、 レーザ光の照射により上記被測定分子が発する蛍光を入
射して蛍光強度を測定する第1の計測手段と、 上記ビームエキスパンダと上記測定場の間に設け、レー
ザ光の一部を分岐するビームスプリッタと、 蛍光物質が塗布されたガラス板に上記ビームスプリッタ
で分岐されたレーザ光を入射し、該蛍光物質から発せら
れる蛍光強度を測定する第2の計測手段と、 この第2の計測手段で得た蛍光強度により上記第1の測
定手段で得た測定場での被測定分子が発する蛍光強度を
正規化する正規化手段とを具備したことを特徴とするレ
ーザ光を用いた計測装置。
1. A beam expander for outputting a sheet-shaped laser beam to irradiate a molecule to be measured in a measurement field, and a fluorescence expander for injecting fluorescence emitted from the molecule to be measured by laser beam irradiation. 1 measuring means, a beam splitter provided between the beam expander and the measurement field to split a part of laser light, and a laser beam split by the beam splitter on a glass plate coated with a fluorescent substance. Second measuring means for measuring the fluorescence intensity emitted from the fluorescent substance, and the molecule to be measured in the measurement field obtained by the first measuring means by the fluorescence intensity obtained by the second measuring means A measuring device using a laser beam, comprising: a normalizing means for normalizing emitted fluorescence intensity.
JP8019925A 1996-02-06 1996-02-06 Measuring device using laser beam Pending JPH09210909A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8019925A JPH09210909A (en) 1996-02-06 1996-02-06 Measuring device using laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8019925A JPH09210909A (en) 1996-02-06 1996-02-06 Measuring device using laser beam

Publications (1)

Publication Number Publication Date
JPH09210909A true JPH09210909A (en) 1997-08-15

Family

ID=12012810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8019925A Pending JPH09210909A (en) 1996-02-06 1996-02-06 Measuring device using laser beam

Country Status (1)

Country Link
JP (1) JPH09210909A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11173918A (en) * 1997-12-12 1999-07-02 Mitsubishi Heavy Ind Ltd Temperature distribution measuring instrument for inside of combustor
JP2008208419A (en) * 2007-02-26 2008-09-11 Phyzchemix Corp Vacuum processing apparatus and method for detecting end point thereof
JP2014507014A (en) * 2011-02-14 2014-03-20 ヨーロピアン・モレキュラー・バイオロジー・ラボラトリー(イー・エム・ビー・エル) Light pad microscope
EP2567202A4 (en) * 2010-03-23 2018-01-03 Ophir-Spiricon, LLC. Beam scattering laser monitor
JP2019002698A (en) * 2017-06-12 2019-01-10 株式会社ジェイテクト Temperature measuring apparatus and temperature measuring method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11173918A (en) * 1997-12-12 1999-07-02 Mitsubishi Heavy Ind Ltd Temperature distribution measuring instrument for inside of combustor
JP2008208419A (en) * 2007-02-26 2008-09-11 Phyzchemix Corp Vacuum processing apparatus and method for detecting end point thereof
EP2567202A4 (en) * 2010-03-23 2018-01-03 Ophir-Spiricon, LLC. Beam scattering laser monitor
JP2014507014A (en) * 2011-02-14 2014-03-20 ヨーロピアン・モレキュラー・バイオロジー・ラボラトリー(イー・エム・ビー・エル) Light pad microscope
US10908403B2 (en) 2011-02-14 2021-02-02 European Molecular Biology Laboratory (Embl) Light-pad microscope for high-resolution 3D fluorescence imaging and 2D fluctuation spectroscopy
JP2019002698A (en) * 2017-06-12 2019-01-10 株式会社ジェイテクト Temperature measuring apparatus and temperature measuring method

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