JPH09232402A - Sample transport device - Google Patents

Abstract

(57) [PROBLEMS] To obtain a transporting device capable of transporting a sample such as a photomask or a reticle without scratches or dust. SOLUTION: A magnetic material Ma is arranged on both side portions of a sample F to be transported, and concave grooves 71, 71 are formed on opposite side surfaces of a sample holding arm 70, 70 of a transport device 50, and there, The magnetic material Mb is arranged. The polarities of the facing surfaces of the magnetic materials Ma and Mb are the same, and the portion of the magnetic material Ma of the sample F is held in the recesses 71, 71 of the sample holding arms 70, 70 in a non-contact manner due to the repulsive force of the magnetic force. And transport it to the desired place.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample transporting apparatus which can be effectively used for transporting a flat plate-shaped sample, particularly a sample such as a photomask or a reticle for manufacturing a semiconductor element.

[0002]

2. Description of the Related Art In a semiconductor manufacturing apparatus, photomasks and reticles (hereinafter referred to as "samples") are stored in a stack in a sample cassette, from which they are taken out one by one by a transfer arm of a sample transfer device and exposed. After being transported to an apparatus or the like and subjected to necessary processing there, it is transported again to the sample cassette on the unload side by the sample transport arm, and stored and stored therein.

FIG. 13 shows an example of a sample transfer arm 50 in a conventional sample transfer device, which is provided with a turntable 52 having a turning mechanism (not shown) at the tip of a column 51 that moves up and down by a control mechanism (not shown). The other ends of the links 54a, 54b having one ends fixed to the two rotating shafts 53a, 53b provided upright on the turntable 52 are pivotally attached to a common support shaft 55, and the support shaft 55 has a flat plate. A sample transport table 56 having a shape of a circle is attached.

In transporting the sample, the rotary disk 52 is rotated to position the sample transport base 56, for example, in the direction of a sample cassette (first location) not shown, and then the rotary shaft 53.
The a and 53b are rotated to extend the links 54a and 54b, push out the sample carrier 56, and insert its tip into the sample cassette. Next, the column 51 is controlled to control the sample carrier 56.
And one of the samples stacked in the cassette is carried from below. FIG. 13 shows the state, and sample F
Has its central portion supported by the sample transfer arm 56 and is held there by vacuum suction or the like.
3a and 53b are controlled to rotate in the opposite directions, the sample transfer arm 56 is retracted to escape from the sample cassette, and the turntable 52 is again rotated.
Is rotated to rotate the sample transport arm 56 to, for example, a sample holder position (second position) set on the XY stage.
At that position, the pushing and lowering control of the sample transport arm 56 is performed, the vacuum suction is released, and the sample F carried on the sample transport arm 56 is taken over to the sample holder side.

[0005]

As described above, in the conventional sample transfer device, the sample is transferred in the posture mounted on the sample transfer arm, so that the contact between the sample surface and the transfer arm surface is unavoidable. There were cases where scratches occurred on the contact surface. Further, since the conveyance is stabilized by vacuum suction, there is a problem that foreign matter is easily attached to the suction surface. The generation of such scratches and the attachment of dust cause defective portions in the sample, resulting in a decrease in productivity.

Therefore, an object of the present invention is, when a sample such as a photomask or a reticle is transported from a first location to a second location by a sample transport device, the sample is scratched due to the transport device. It is an object of the present invention to provide a sample transfer device that prevents dust from adhering to it.

[0007]

In order to solve the above-mentioned problems, the sample transporting apparatus according to the present invention is basically a side surface part facing a concave groove for holding both side parts of the sample to be transferred. A pair of sample holding arms respectively formed at the first position and a second position where the pair of sample holding arms are wider than the width of the sample and at a first position where the sample is held in the groove. At least a moving means for displacing and a magnetic force generating means for generating a magnetic force in the groove are provided.

In another aspect of the sample transporting apparatus according to the present invention, the sample transporting apparatus holds a flat sample having magnetism at least on both sides by a sample transporting arm and transports it from the first location to the second location. Then, the sample transport arm includes a pair of sample holding arms each having a concave groove for holding both side portions of the sample on opposite side surface portions, and the pair of sample holding arms of the sample holding arm. A moving means for displacing the sample into a first position that is wider than the width and a second position that holds the sample in the concave groove, and the concave groove surface has a side of the sample to be conveyed. A magnetic pole having the same polarity as the magnetic poles of the side portions, and a control means for controlling the sample to be held in a non-contact state by the repulsion of the magnetic force at the second position of the sample holding arm. It is configured to have.

When the sample transport apparatus according to the present invention is used, at least the side portion of the sample held by the sample transport arm has magnetism. The means is arbitrary,
A method of arranging or integrally forming magnetic materials such as rare earth plastic magnets, ferrite magnets, and arconi magnets along the four circumferences of the sample or two opposite sides, or a method of plating the sample, etc. Good.

The sample transporting device according to the present invention may have the same configuration as that of the conventional sample transporting device, except for the configuration relating to the pair of sample holding arms provided at the tip of the sample transporting arm and its position control means. The moving means for displacing the pair of sample holding arms between the first position which is wider than the width of the sample to be transported and the second position which holds the sample in the groove is also optional. , By a spring biased in one direction and a hydraulic or pneumatic actuator mechanism that positions the sample holding arm against the biasing direction of the spring, or by using a motor as a drive source and a ball screw or rack and pinion It may be one or the like.

The magnetic force generating means for generating a magnetic force on the concave groove surfaces formed on the pair of sample holding arms may have a form in which the same magnetic material as that arranged on the side of the sample is arranged on the concave groove surfaces, It may be an electromagnet. In the case of an electromagnet, at the second position of the sample holding arm, a control means for controlling and adjusting the magnetic pole and the magnetic force is provided so that the sample is held in a non-contact state by the repulsion of the magnetic force.

At the start of transporting, the sample transport arm is rotated in the same manner as in the conventional sample transport device, and the width of the sample is placed at both side positions of one sample stacked on the sample holder or the like via the sample tray. The pair of sample holding arms, which are located at the first position with a wider interval, are brought closer to each other, and the position of the groove is aligned with the height of the sample. After the alignment, the pair of sample holding arms is moved toward the second position. The polarity of the magnetic pole surface on the inner surface of the groove is the same as the polarity of the magnetic pole surface on the side of the sample that enters the groove, and the sample is held by the repulsive force of the magnetic force on both sides of the sample. It is held in a levitated position in the groove of the arm, that is, in a non-contact state. In that state, when the sample transport arm is slightly lifted by the control mechanism, the sample ascends together with the sample holding arm and is separated from the sample tray while maintaining the non-contact state. Thereafter, the same operation as in the conventional sample transfer device is performed to transfer the sample to the second location and deliver it.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION The sample carrying device according to the present invention will be described in detail below based on preferred embodiments. FIG.
Shows an example of a case where a sample F such as a photomask or a reticle is conveyed from a sample cassette 10 to a sample holder 30 installed on an XY stage such as an exposure device as one usage mode of the sample conveying device 50 according to the present invention. ing.

First, the sample cassette 10 will be described. The sample cassette 10 has a plurality of stacked sample trays 11, and each sample tray 11 has a fulcrum 1 on one end side.
2 is attached to the machine frame so as to rotate about 90 °, and one sample F is placed by a transport device (not shown) on the open state like the sample tray 11 at the bottom of the figure, and closed. The mounted sample F is stored in the sample cassette 10. As shown in FIG. 3, a plurality of (three in the figure) sample supports 13 are erected on each sample tray 11.

FIG. 2a shows a sample transport device 50 according to the present invention.
It is a perspective view showing an example of a sample F conveyed by
2b is a sectional view taken along line II-II of FIG. 2a. As shown in the figure, in this example, the sample F is a flat plate having a rectangular shape as a whole, and a magnetic material Ma such as a rare earth plastic magnet sheet is attached to the four circumferences thereof.
As shown in FIG. 3, the sample F is placed at a substantially central position of each sample tray 11 in a posture in which the sample F is supported by the tip of the sample support 13 standing on the sample tray 11.

In this embodiment, the sample transport device 50
Other than the configuration of the sample transport arm 60, the other configurations are as shown in FIG.
3 is basically the same as that of the sample transporting apparatus described based on FIG. 3, and in FIG. 1, members having the same functions are denoted by the same reference numerals, and detailed description thereof will be omitted. As shown in the plan view of FIG. 4, the sample transport arm 60 includes a base portion 61 attached to the distal ends of the links 54a and 54b.
A pair of sample holding arms 70, 7 arranged on both sides of the tip side.
0. Two parallel guide rods 62a and 62b are provided at the tip of the base 61, and a piston rod 63 is provided at an intermediate position between the guide rods 62a and 62b so that the piston rod 63 can be moved back and forth by a hydraulic actuator (not shown) provided in the base 61. It is arranged.

Through holes (not shown) are provided at the bases of the sample holding arms 70, 70, and a pair of sample holding arms 70, 70 are provided.
The guide rods 62a and 62b are inserted into the through holes, so that the guide rods 62a and 62b are attached to the left and right positions of the tip of the base portion 61 in parallel with each other and movably in the left and right directions. Stop plates 64, 6 are provided at the tips of the guide rods 62a, 62b.
4 is attached to the stopper plate 64, 64 and the holding arm 7.
Coil springs 65a and 65b are interposed between 0 and 70. With the above-mentioned configuration, when the hydraulic actuator is operated by the control mechanism (not shown) to move the piston rod 63 forward and backward, the pair of sample holding arms 70, 70 will move to the coil spring 6.
It is positioned by the tip position of the Biston rod 63 while being constantly urged by the 5a and 65b in the directions approaching each other.

Grooves 71, 71 are formed in the side surfaces of the sample holding arms 70, 70 facing each other. The length of the concave grooves 71, 71 is set to be slightly longer than the length of the long side of the sample F to be transported, and the vertical width thereof is somewhat larger than the thickness of the sample F to be transported. Wide width. And
As well shown in FIG. 5 which is a sectional view taken along line VV in FIG. 4, a magnetic material Mb such as a ferrite magnet is provided on the wall surface of the groove 71 so that the magnetic material Ma of the sample F and the magnetic material Mb face each other. They are arranged so that the surfaces to be treated have the same polarity.

The sample is carried by the sample carrying device 50 as follows. First, the turntable 52 is rotated to position the sample transport arm 60 in the direction of the sample cassette 10, and the hydraulic rod actuator in the sample transport arm 60 is operated to push out the piston rod 63, as shown in FIG. First, the distance between the opposed side surfaces of the pair of sample holding arms 70, 70 is adjusted to be wider than the width of the sample F (first position), and the height of the transport arm 60 is adjusted to the sample tray. No. 11 sample F placed on the sample support 13 to be carried out
The center in the thickness direction of the concave groove 7 formed in the sample holding arm 70
The center line L of 1 is adjusted so that the position is almost the same.

Next, the rotary shafts 53a and 53b are rotated to extend the links 54a and 54b, so that the sample carrying arm 60 has a concave groove 71 in which the sides of the sample F are all formed on the sample holding arms 70 and 70. Extrude to the side of 71. The state is shown in FIG. 6 as a partial cross-sectional front view. The extrusion is stopped, the hydraulic actuator is operated again, and the Biston rod 63 is retracted. As shown in the plan view of FIG. 7 and the front view of a partial cross section of FIG. It is a position (second position) into which the side portion (that is, the magnetic material Ma) of the sample F enters. At that position, as described above, the opposing surfaces of the magnetic material Mb on the wall surface of the concave groove 71 and the magnetic material Ma arranged along the four circumferential surfaces of the sample have the same polarity, so that the repulsion of the magnetic force occurs. The two do not come into contact with each other due to the force, and the sample F is held in a posture in which both side portions thereof are levitated in the concave grooves 71 of the pair of sample holding arms 70.

Next, when the column 51 is controlled to slightly raise the transport arm 56, the sample F floats together with the sample holding arm 70 without contacting the groove 71, as shown in FIG. Remove from the tray 11. In that state, the rotary shaft 5
3a and 53b are controlled to rotate in the opposite directions, the sample transport arm 60 is retracted to escape from the sample cassette 10, and the turntable 52 is rotated again to mount the sample transport arm 60 on the XY stage. Rotate to (2nd place). At that position, the pushing and lowering control of the sample transport arm 60 is performed, and the sample F carried on the sample transport arm 60 is transferred to the sample holder 3
It is taken over by the 0 side. This completes the transportation of one sample from the first location to the second location.

As described above, in the course of this transportation, the sample F
Is held by the sample holding arm in a non-contact state and is transported to a predetermined place, so that the sample F is prevented from being scratched or dust is attached due to the transport device.

When vertically positioning the sample holding arm 70 with respect to the sample F, as shown in FIG. 10, a concave groove formed in the sample holding arm 70 below the center position Lf of the sample F in the thickness direction. When the center line L of 71 is adjusted so that the sample F may be pressed against the sample support 13 side, the sample may be scratched. It is recommended that the center position Lf of the F in the thickness direction and the position of the center line L of the concave groove 71 be made coincident with each other, or that the position of the center line L of the concave groove 71 be adjusted to a somewhat higher position.

11 and 12 show another embodiment of the sample transfer device according to the present invention. In this example, the plurality of electromagnets Me are arranged in the concave grooves 71, 71 formed in the side surfaces of the sample holding arms 70, 70 facing each other so that all the magnetic poles on the surface facing the sample F are the same. Are arranged. FIG. 11 is a plan view showing an arrangement mode of the electromagnet Me, and FIG. 12 shows a connection state together with the arrangement mode of the electromagnet. Although not particularly shown, in this embodiment, control means including a switch for turning on and off the electric current to the electromagnet, a polarity conversion switch for changing the polarity of the electromagnet, a current regulator for changing the strength of the magnetic force, etc. is attached. It According to this example, it is possible to arbitrarily adjust the polarity of the magnetic pole and the strength of the magnetic force on the concave groove surface, and the degree of freedom of the magnetic material on the sample side can be increased.

[0025]

According to the sample transport apparatus of the present invention, the sample can be transported from the first location to the second location in a non-contact state, and the sample is scratched or dust is caused by the transport apparatus. Can be avoided. As a result, it can be used particularly effectively as a transfer device for photomasks and reticles in semiconductor manufacturing.

[Brief description of drawings]

FIG. 1 is a diagram illustrating one usage mode of a sample transporting device according to the present invention.

FIG. 2 is a diagram showing an example of a sample used in the present invention.

FIG. 3 is a diagram illustrating a state in which a sample is placed on a sample tray.

FIG. 4 is a plan view showing a state in which the sample holding arm is in the first position.

FIG. 5 is a diagram illustrating a cross section of a sample holding arm.

FIG. 6 is a partial cross-sectional front view illustrating the positional relationship between the sample holding arm and the sample at the first position.

FIG. 7 is a plan view showing a state in which the sample holding arm is in the second position.

FIG. 8 is a partial cross-sectional front view illustrating the positional relationship between the sample holding arm and the sample at the second position.

FIG. 9 is a view showing a state in which a sample is levitated while being held by a sample holding arm.

FIG. 10 is a view for explaining the relationship between the center of the recess of the sample holding arm and the center of the sample.

FIG. 11 is a plan view showing another embodiment of the sample transport device according to the present invention.

FIG. 12 is a diagram illustrating an arrangement of electromagnets and a connection state.

FIG. 13 is a perspective view illustrating a conventional sample transport arm.

[Explanation of symbols]

10 ... Sample cassette, 11 ... Sample tray, 13 ... Sample support, 30 ... Sample holder, 50 ... Sample transport device, 60 ...
Sample transfer arm, 61 ... Base, 63 ... Piston rod, 65a,
65b ... Coil spring, 70 ... Sample holding arm, 71 ... Recessed groove,
F ... sample, Ma, Mb ... magnetic material, Me ... electromagnet

Claims (2)

[Claims] 1. A pair of sample holding arms each having a concave groove for holding both side portions of a sample to be conveyed formed on opposing side surface portions, and the pair of sample holding arms having a width of the sample. At least a moving means for displacing the first position, which is wider than the first position, and a second position for holding the sample in the concave groove, and a magnetic force generating means for generating a magnetic force in the concave groove. A sample transport device characterized by: 2. A flat plate-shaped sample having magnetism on at least both sides is held by a sample transfer arm, and the sample is moved from the first position to the second position.
And a pair of sample holding arms each having concave grooves for holding both side portions of the sample formed on opposite side surface portions, The concave groove surface has a moving means for displacing the pair of sample holding arms between a first position which is wider than the width of the sample and a second position which holds the sample in the concave groove. Is designed to generate a magnetic pole having the same pole as that of the side portion of the sample to be conveyed, and further, the second magnetic pole of the sample holding arm.
At the position of (1), the sample transporting device is provided with control means for controlling the sample to be held in a non-contact state by repulsion of magnetic force.