JPH09248975A - Screen plate and method of manufacturing printed wiring board using the same - Google Patents

Screen plate and method of manufacturing printed wiring board using the same

Info

Publication number
JPH09248975A
JPH09248975A JP8060517A JP6051796A JPH09248975A JP H09248975 A JPH09248975 A JP H09248975A JP 8060517 A JP8060517 A JP 8060517A JP 6051796 A JP6051796 A JP 6051796A JP H09248975 A JPH09248975 A JP H09248975A
Authority
JP
Japan
Prior art keywords
emulsion
screen plate
printed wiring
wiring board
etching resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8060517A
Other languages
Japanese (ja)
Other versions
JP3564854B2 (en
Inventor
Akiko Tsujii
章子 辻井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6051796A priority Critical patent/JP3564854B2/en
Publication of JPH09248975A publication Critical patent/JPH09248975A/en
Application granted granted Critical
Publication of JP3564854B2 publication Critical patent/JP3564854B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

(57)【要約】 【課題】 各種電子機器等に使用されるプリント配線板
の製造に用いるスクリーン版において、高密度・細線導
体パターン形成の歩留まりを向上させることを目的とす
る。 【解決手段】 プリント配線板の印刷用スクリーン版4
において、広面積な乳剤非形成部11aにスキージ5を
摺動方向に平行に乳剤1a〜1cを形成する。
(57) Abstract: [PROBLEMS] To improve the yield of forming a high-density / fine wire conductor pattern in a screen plate used for manufacturing a printed wiring board used in various electronic devices and the like. SOLUTION: A screen plate 4 for printing a printed wiring board.
In, the squeegee 5 is formed in the wide area emulsion non-forming portion 11a in parallel with the sliding direction to form the emulsions 1a to 1c.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、パーソナルコンピ
ュータやワードプロセッサなどの各種電子機器等に使用
されるプリント配線板を製造するためのスクリーン版お
よびそれを用いたプリント配線板の製造方法に関するも
のである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a screen plate for manufacturing a printed wiring board used in various electronic devices such as personal computers and word processors, and a method for manufacturing a printed wiring board using the screen plate. .

【0002】[0002]

【従来の技術】近年、各種電子機器等に数多く使用され
ているプリント配線板は電子機器の小型化や多機能化に
伴い、配線の高密度化や電子部品の表面実装化が著し
く、絶縁基板上に形成される導体パターンや電子部品が
実装されるランドはますます狭ピッチ、細線化や小形状
化し、エッチングレジストの高解像度、高位置精度が要
求されるようになり、印刷法によるパターン形成はます
ます困難になってきている。
2. Description of the Related Art In recent years, printed wiring boards, which are widely used in various electronic devices, have been remarkably increased in wiring density and surface mounting of electronic parts due to downsizing and multifunction of electronic devices. The conductor pattern formed on the top and the land on which electronic parts are mounted are becoming narrower in pitch, finer in line and smaller in shape, and high resolution and high positional accuracy of the etching resist are required. Is getting more and more difficult.

【0003】以下に、従来のスクリーン版およびプリン
ト配線板の製造方法について説明する。図4は従来のス
クリーン版およびプリント配線板の導体パターン形成の
製造過程を示す断面図及び平面図である。図4におい
て、21は絶縁基板、22は銅はく、23はエッチング
レジスト、24はエッチングレジスト印刷用スクリーン
版、25は乳剤非形成部、26は乳剤形成部(乳剤
部)、27はスキージ、28は紗、29は乳剤、30は
導体パターン形成用マスクフィルム、31は導体パター
ン、32ははがれた乳剤である。
A conventional method for manufacturing a screen plate and a printed wiring board will be described below. FIG. 4 is a sectional view and a plan view showing a manufacturing process of forming a conductor pattern of a conventional screen plate and a printed wiring board. In FIG. 4, 21 is an insulating substrate, 22 is a copper foil, 23 is an etching resist, 24 is a screen plate for etching resist printing, 25 is an emulsion non-forming portion, 26 is an emulsion forming portion (emulsion portion), 27 is a squeegee, 28 is a gauze, 29 is an emulsion, 30 is a mask film for forming a conductor pattern, 31 is a conductor pattern, and 32 is a peeled emulsion.

【0004】以上のように構成されたスクリーン版およ
びプリント配線板の導体パターンの形成について、以下
に説明する。まず図4(a)に示すように、線状の合成
樹脂を網状に織ったスクリーン版24上に乳剤29を塗
布・乾燥し、導体パターン形成用マスクフィルム30と
乳剤面を密着させ、300〜400mJ/cm2の紫外線照
射を行い、スクリーン版の露光を行う。
The formation of the conductor patterns of the screen plate and the printed wiring board configured as described above will be described below. First, as shown in FIG. 4A, the emulsion 29 is applied and dried on the screen plate 24 woven of a linear synthetic resin in a net form, and the conductive pattern forming mask film 30 and the emulsion surface are brought into close contact with each other. The screen plate is exposed by irradiating with 400 mJ / cm 2 of ultraviolet rays.

【0005】次に図4(b)に示すように、水で未露光
部を現像・除去し、20〜40℃の温風で乾燥する。次
に図4(d)に示すように、所定の大きさに切断された
銅張積層板21上にスクリーン版24を配置し、そのス
クリーン版上にエッチングレジストインキを施し、スキ
ージ27をスクリーン版上を摺動させ、銅張り積層基板
上にエッチングレジストインキを印刷転写する。次に、
800〜1500mJ/cm2の紫外線照射をしエッチング
レジストを硬化形成する。塩化第2銅などの溶液を用い
てエッチングレジスト非形成部のエッチングを行い、エ
ッチングレジストを剥離し、図4(e)(f)のような
導体パターン31を形成する。
Next, as shown in FIG. 4 (b), the unexposed portion is developed and removed with water, and dried with warm air at 20 to 40 ° C. Next, as shown in FIG. 4D, a screen plate 24 is placed on the copper clad laminate 21 cut into a predetermined size, an etching resist ink is applied on the screen plate, and the squeegee 27 is placed on the screen plate. By sliding on the top, the etching resist ink is printed and transferred onto the copper-clad laminated substrate. next,
Ultraviolet irradiation of 800 to 1500 mJ / cm 2 is performed to cure and form an etching resist. The etching resist non-forming portion is etched using a solution of cupric chloride or the like, and the etching resist is peeled off to form a conductor pattern 31 as shown in FIGS. 4 (e) and 4 (f).

【0006】[0006]

【発明が解決しようとする課題】配線の高密度化に対応
するためドライフィルム・電着レジスト等の写真現像法
等があるが、生産性・コスト等の面からプリント配線板
の導体パターン形成は上述のようにスクリーン印刷法が
よく用いられる。しかしながら、従来の製造方法では、
図4(c)に示すように、広面積の乳剤非形成部25に
隣接する乳剤形成部26はスキージによる摺動の摩擦を
集中して受けるのでスクリーンの紗28から乳剤32が
剥がれやすく、隣接する乳剤非形成部25の紗28に詰
まり、エッチングレジストインキが転写印刷されず、図
4の(e)(f)のごとくエッチングにより導体パター
ンの欠損や断線を生じプリント配線板の信頼性を損なう
という問題があった。
Although there are photo-developing methods such as dry film and electrodeposition resist in order to cope with high-density wiring, it is difficult to form a conductor pattern on a printed wiring board in terms of productivity and cost. The screen printing method is often used as described above. However, in the conventional manufacturing method,
As shown in FIG. 4 (c), the emulsion forming portion 26 adjacent to the large area emulsion non-forming portion 25 receives the friction of sliding by the squeegee in a concentrated manner, so that the emulsion 32 is easily peeled off from the gauze 28 of the screen. The etching resist ink is not transferred and printed due to clogging of the gauze 28 of the non-emulsion forming portion 25, and the conductor pattern is lost or broken by etching as shown in FIGS. 4 (e) and 4 (f), and the reliability of the printed wiring board is impaired. There was a problem.

【0007】本発明は上記従来の問題点を解決するもの
で、製造工程の歩留まりを著しく向上させ、電子機器の
信頼性をも向上させるプリント配線板を提供することを
目的とする。
The present invention solves the above-mentioned conventional problems, and an object of the present invention is to provide a printed wiring board that significantly improves the yield of the manufacturing process and also improves the reliability of electronic equipment.

【0008】[0008]

【課題を解決するための手段】この目的を達成するため
に本発明は、相対的に広面積の乳剤非形成部に乳剤を形
成することにより所期の目的を達成するものである。
To achieve this object, the present invention achieves the intended object by forming an emulsion in a non-emulsion forming portion having a relatively large area.

【0009】[0009]

【発明の実施の形態】本発明の請求項1に記載の発明
は、相対的に広面積の乳剤非形成部に乳剤を形成したス
クリーン版としたものであり、印刷時のスキージ摺動に
よる相対的に広面積の乳剤非形成部に隣接する乳剤部へ
の集中荷重を軽減する作用を有し、乳剤はがれ防止する
ことができる。
BEST MODE FOR CARRYING OUT THE INVENTION The invention according to claim 1 of the present invention is a screen plate in which an emulsion is formed in a relatively large area of the non-emulsion forming portion. It has the effect of reducing the concentrated load on the emulsion portion adjacent to the emulsion non-forming portion having a large area, and can prevent the emulsion from peeling off.

【0010】請求項2に記載の発明は、乳剤非形成部に
点状、または線状の乳剤を形成した請求項1記載のスク
リーン版としたものであり、乳剤形成部への集中荷重を
軽減しかつ、エッチングレジスト形成の際、欠損部を生
じることなく、所望の印刷パターンを形成することがで
きるという作用を有する。
The invention according to claim 2 is the screen plate according to claim 1 in which a dot-like or linear emulsion is formed in the emulsion non-forming part, and the concentrated load on the emulsion forming part is reduced. In addition, when the etching resist is formed, a desired print pattern can be formed without causing a defective portion.

【0011】請求項3に記載の発明は、互いに近隣する
複数の乳剤非形成部のうち、相対的に広面積の乳剤非形
成部のみに乳剤を形成した請求項2記載のスクリーン版
としたものであり、乳剤形成部への集中荷重を軽減しか
つ、相対的に広面積および狭面積のエッチングレジスト
を形成する際、欠損部を生じることなく、所望の印刷パ
ターンを形成することができるという作用を有する。
The invention according to claim 3 is the screen plate according to claim 2, wherein the emulsion is formed only in the relatively large area of the non-emulsion forming portion among a plurality of non-emulsion forming portions adjacent to each other. That is, it is possible to reduce the concentrated load on the emulsion forming portion and to form a desired print pattern without forming a defect when forming an etching resist having a relatively large area and a relatively small area. Have.

【0012】請求項4に記載の発明は、相対的に狭面積
の乳剤非形成部に近づく程、乳剤の形成密度を高くした
乳剤を形成した請求項3記載のスクリーン版としたもの
であり、乳剤形成部への集中荷重を分散するという作用
を有する。
The invention according to claim 4 provides the screen plate according to claim 3, in which an emulsion having a higher density of emulsion formation is formed toward an emulsion non-forming portion having a relatively narrow area. It has the effect of dispersing the concentrated load on the emulsion forming part.

【0013】請求項5に記載の発明は、スキージ摺動方
向と平行かつ連続して乳剤を形成した請求項2記載のス
クリーン版としたものであり、乳剤形成部への集中荷重
を間断なく防止することができるという作用を有する。
The invention according to claim 5 is the screen plate according to claim 2 in which the emulsion is formed in parallel and continuously with the sliding direction of the squeegee, and the concentrated load on the emulsion forming part is prevented without interruption. It has the effect of being able to.

【0014】請求項6に記載の発明は、請求項1〜5の
いずれか一つに記載のスクリーン版を用いて絶縁基板上
の銅はくにエッチングレジストを形成する工程と、絶縁
基板上の銅はくをエッチングする工程を有するプリント
配線板の製造方法としたものであり、印刷時のスキージ
摺動による乳剤形成部への集中荷重を軽減し、乳剤はが
れを防止することのできるスクリーン版を用いて、絶縁
基板上の銅はくにエッチングレジストインキをスムーズ
に印刷転写しエッチングレジストを形成し、銅はくをエ
ッチングして導体パターンを形成し、高品質なプリント
配線板を製造できるという作用を有する。
According to a sixth aspect of the present invention, there is provided a step of forming an etching resist on a copper foil on an insulating substrate by using the screen plate according to any one of the first to fifth aspects, and a copper on the insulating substrate. This is a method for manufacturing a printed wiring board that has a step of etching foil, and uses a screen plate that can reduce the concentrated load on the emulsion forming part due to squeegee sliding during printing and prevent emulsion peeling. , The etching resist ink is smoothly printed and transferred to the copper foil on the insulating substrate to form an etching resist, and the copper foil is etched to form a conductor pattern, which has the effect of producing a high-quality printed wiring board. .

【0015】以下、本発明の実施の形態について、図
1、図2および図3を用いて説明する。
Embodiments of the present invention will be described below with reference to FIGS. 1, 2 and 3.

【0016】(実施の形態1)図1は、本発明の実施の
形態1におけるスクリーン版の細部を示す上面図で、図
2(a)〜(c)、図3(a)〜(c)は、本発明の実
施形態1におけるスクリーン版の製造過程を示す図であ
る。図1〜図3において、1は乳剤、2は紗、3はパタ
ーン形成用マスクフィルム、4はスクリーン版、5はス
キージ、6はエッチングレジストインキ、7は絶縁基
板、8は銅はく、9は導体パターン、10は乳剤形成
部、11は乳剤非形成部である。プリント配線板の印刷
用スクリーン版4において、ステンレス枠に網状の紗2
を固定したものに、感光性乳剤1を塗布し、20〜40
℃の温風で乾燥させ、図2(a)に示すようにパターン
形成用マスクフィルム3を真空密着させ、200〜35
0mJ/cm2の紫外線露光を行う。次に、図2(b)に示
すように水により未露光部分の感光性乳剤1を膨潤、現
像し、20〜40℃の温風で乾燥する。図1、図2
(b)のように広面積の乳剤非形成部11aに40〜6
0μm幅の乳剤1a〜1cがスキージ摺動方向に平行か
つ連続し形成された線状部分1aおよび幅広点状部分1
b、幅狭点状部分1cと形成され、狭面積の乳剤非形成
部11b側に近づく程、乳剤の形成密度を高くしたスク
リーン版4を得る。
(Embodiment 1) FIG. 1 is a top view showing details of a screen plate according to Embodiment 1 of the present invention, and FIGS. 2 (a) to 2 (c) and 3 (a) to 3 (c). [Fig. 4A] is a view showing a manufacturing process of the screen plate in the first embodiment of the present invention. 1 to 3, 1 is an emulsion, 2 is a gauze, 3 is a pattern forming mask film, 4 is a screen plate, 5 is a squeegee, 6 is an etching resist ink, 7 is an insulating substrate, 8 is a copper foil, 9 Is a conductor pattern, 10 is an emulsion forming portion, and 11 is an emulsion non-forming portion. In the screen plate 4 for printing of the printed wiring board, the mesh gauze 2 in the stainless steel frame is used.
Photosensitive emulsion 1 is applied to the fixed one, and 20 to 40
Dry with warm air of ℃, vacuum-contact the mask film 3 for pattern formation as shown in FIG.
UV exposure of 0 mJ / cm 2 is performed. Next, as shown in FIG. 2B, the photosensitive emulsion 1 in the unexposed portion is swollen and developed with water and dried with warm air at 20 to 40 ° C. 1 and 2
40 to 6 in the large area non-emulsion forming portion 11a as shown in (b).
Emulsions 1a to 1c having a width of 0 μm are formed in parallel and continuously in the sliding direction of the squeegee, and a linear portion 1a and wide point portions 1 are formed.
b, the screen plate 4 having a narrow dot-like portion 1c is formed, and the density of emulsion formation is increased toward the emulsion non-forming portion 11b side having a narrow area.

【0017】したがって、図2(c)に示すようにスキ
ージ5がスクリーン版4上を摺動してもスキージ5の摺
動方向に平行に形成された乳剤1a〜1cの存在により
間断なく荷重を分散することができる。
Therefore, even if the squeegee 5 slides on the screen plate 4 as shown in FIG. 2 (c), a load is applied without interruption due to the presence of the emulsions 1a to 1c formed parallel to the sliding direction of the squeegee 5. Can be dispersed.

【0018】図3はプリント配線板の製造工程を示す図
である。図3(a)に示すように、所定の大きさに切断
された銅張り積層板上にスクリーン版4を配置し、その
スクリーン版4上にエッチングレジストインキを施し、
スキージ5をスクリーン版4上を摺動させ、絶縁基板7
上の銅はく8上にエッチングレジストインキを印刷転写
する。このとき、スクリーン版4の広面積の乳剤非形成
部11aには線状および点状の乳剤1a〜1cが約40
〜60μmの幅で形成されているが、エッチングレジス
トインキ6の乳剤1の基板接触面側の裏まわりやにじみ
出しにより銅はく8上にはエッチングレジスト6が欠点
を生じることなく形成することができる。次に、800
〜1200mJ/cm2の紫外線照射によりエッチングレジ
スト6を硬化し、塩化第2銅などの溶液を用いてエッチ
ングレジスト非形成部のエッチングおよびエッチングレ
ジスト6を剥離し、図3(b)(c)のような導体パタ
ーン9を形成する。
FIG. 3 is a diagram showing a manufacturing process of a printed wiring board. As shown in FIG. 3A, the screen plate 4 is placed on a copper clad laminate cut into a predetermined size, and an etching resist ink is applied to the screen plate 4,
Slide the squeegee 5 over the screen plate 4 to remove the insulating substrate 7.
The etching resist ink is printed and transferred onto the upper copper foil 8. At this time, approximately 40 linear and dot-shaped emulsions 1a to 1c are present in the wide area non-emulsion forming portion 11a of the screen plate 4.
It is formed with a width of up to 60 μm, but the etching resist 6 can be formed on the copper foil 8 without causing a defect due to the bleeding around the substrate contact surface side of the emulsion 1 of the etching resist ink 6 or bleeding. it can. Then 800
The etching resist 6 is cured by irradiating with ultraviolet rays of up to 1200 mJ / cm 2 , and the etching resist 6 and the etching resist 6 are peeled off using a solution such as cupric chloride. Such a conductor pattern 9 is formed.

【0019】なお、本発明の実施の形態において、乳剤
形状をスキージ摺動方向を長手にした四角形としたが、
メッシュ形状や円形、三角形状としても同様の効果を得
ることができる。また、プリント配線板の構造は片面プ
リント配線板としたが両面・多層プリント配線板であっ
ても同様に実施可能である。
In the embodiment of the present invention, the emulsion shape is a quadrangle whose longitudinal direction is the sliding direction of the squeegee.
Similar effects can be obtained with a mesh shape, a circular shape, or a triangular shape. Further, the structure of the printed wiring board is a single-sided printed wiring board, but a double-sided / multilayered printed wiring board can be implemented in the same manner.

【0020】[0020]

【発明の効果】以上のように本発明は相対的に広面積な
乳剤非形成部に乳剤を形成したスクリーン版を用いて、
プリント配線板の導体パターンを形成するので、印刷時
のスキージ摺動による乳剤形成部への集中荷重は軽減さ
れ、乳剤はがれを防止することができ、エッチングレジ
ストインキの不転写による導体線幅の細りまたは欠損、
断線、短絡等の不良を低減することができ、生産歩留ま
りを向上させることができる。
As described above, the present invention uses a screen plate in which an emulsion is formed in an emulsion non-forming portion having a relatively large area,
Since the conductor pattern of the printed wiring board is formed, the concentrated load on the emulsion forming part due to squeegee sliding during printing is reduced, emulsion peeling can be prevented, and the conductor line width can be reduced due to non-transfer of the etching resist ink. Or missing,
Defects such as disconnection and short circuit can be reduced, and the production yield can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施の形態1におけるスクリーン版を
示す平面図
FIG. 1 is a plan view showing a screen plate according to a first embodiment of the present invention.

【図2】(a)〜(c)は本発明の実施の形態1におけ
るスクリーン版の製造方法を示す断面図
2 (a) to (c) are cross-sectional views showing a method of manufacturing a screen printing plate according to Embodiment 1 of the present invention.

【図3】(a)〜(c)は本発明のプリント配線板の製
造方法を示す断面図、断面図、平面図
3A to 3C are cross-sectional views, cross-sectional views, and plan views showing a method for manufacturing a printed wiring board of the present invention.

【図4】(a)〜(c)は従来のスクリーン版の製造方
法を示す断面図 (d)〜(f)は従来のプリント配線板の製造方法を示
す断面図、断面図、平面図
4A to 4C are cross-sectional views showing a conventional method for manufacturing a screen plate, and FIGS. 4D to 4F are cross-sectional views, cross-sectional views, and plan views showing a conventional method for manufacturing a printed wiring board.

【符号の説明】[Explanation of symbols]

1 乳剤 1a〜1c 乳剤 2 紗 3 パターン形成用マスクフィルム 4 スクリーン版 5 スキージ 6 エッチングレジスト 7 絶縁基板 8 銅はく 9 導体パターン 10 乳剤形成部 11a,11b 乳剤非形成部 1 Emulsion 1a to 1c Emulsion 2 Mesh 3 Pattern forming mask film 4 Screen plate 5 Squeegee 6 Etching resist 7 Insulating substrate 8 Copper foil 9 Conductor pattern 10 Emulsion forming part 11a, 11b Emulsion non-forming part

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 版枠に網状の紗を張り合わせるととも
に、この版枠内の紗に乳剤を塗布形成し、この乳剤の非
形成部を印刷パターンとしたスクリーン版において、相
対的に広面積の乳剤非形成部に乳剤を形成したスクリー
ン版。
1. A screen plate having a relatively large area in which a mesh-like gauze is attached to a plate frame and an emulsion is applied to the gauze in the plate frame to form an emulsion, and the non-formation part of the emulsion is used as a printing pattern. A screen plate with emulsion formed in the non-emulsion formation area.
【請求項2】 乳剤非形成部に点状、または線状の乳剤
を形成した請求項1に記載のスクリーン版。
2. The screen plate according to claim 1, wherein a dot-shaped or linear emulsion is formed in the non-emulsion-formed portion.
【請求項3】 互いに近隣する複数の乳剤非形成部のう
ち、相対的に広面積の乳剤非形成部のみに乳剤を形成し
た請求項2に記載のスクリーン版。
3. The screen plate according to claim 2, wherein the emulsion is formed only in an emulsion non-forming portion having a relatively large area among a plurality of emulsion non-forming portions adjacent to each other.
【請求項4】 相対的に狭面積の乳剤非形成部に近づく
程、形成密度を高くして乳剤を形成した請求項3に記載
のスクリーン版。
4. The screen plate according to claim 3, wherein the emulsion is formed with a higher formation density as it approaches a non-emulsion forming portion having a relatively narrow area.
【請求項5】 スキージ摺動方向と平行に乳剤を形成し
た請求項2に記載のスクリーン版。
5. The screen plate according to claim 2, wherein the emulsion is formed in parallel with the sliding direction of the squeegee.
【請求項6】 請求項1〜5のいずれか一つに記載のス
クリーン版を用いて絶縁基板上の銅はくにエッチングレ
ジストを印刷形成する工程と、絶縁基板上の銅はくをエ
ッチングする工程を有するプリント配線板の製造方法。
6. A step of printing an etching resist on a copper foil on an insulating substrate using the screen plate according to claim 1, and a step of etching the copper foil on the insulating substrate. And a method for manufacturing a printed wiring board having the same.
JP6051796A 1996-03-18 1996-03-18 Screen plate and method of manufacturing printed wiring board using the same Expired - Fee Related JP3564854B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6051796A JP3564854B2 (en) 1996-03-18 1996-03-18 Screen plate and method of manufacturing printed wiring board using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6051796A JP3564854B2 (en) 1996-03-18 1996-03-18 Screen plate and method of manufacturing printed wiring board using the same

Publications (2)

Publication Number Publication Date
JPH09248975A true JPH09248975A (en) 1997-09-22
JP3564854B2 JP3564854B2 (en) 2004-09-15

Family

ID=13144600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6051796A Expired - Fee Related JP3564854B2 (en) 1996-03-18 1996-03-18 Screen plate and method of manufacturing printed wiring board using the same

Country Status (1)

Country Link
JP (1) JP3564854B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007026541A1 (en) * 2005-08-29 2007-03-08 Nec Corporation Screen mask and semiconductor device fabrication method
JP2013075384A (en) * 2011-09-29 2013-04-25 Process Lab Micron:Kk Printing mask, printing mask frame coupler, and solar cell
US11167542B2 (en) * 2017-07-05 2021-11-09 Ordos Yuansheng Optoelectronics Co., Ltd. Printing mask and method of printing adhesive pattern

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007026541A1 (en) * 2005-08-29 2007-03-08 Nec Corporation Screen mask and semiconductor device fabrication method
JP2013075384A (en) * 2011-09-29 2013-04-25 Process Lab Micron:Kk Printing mask, printing mask frame coupler, and solar cell
US11167542B2 (en) * 2017-07-05 2021-11-09 Ordos Yuansheng Optoelectronics Co., Ltd. Printing mask and method of printing adhesive pattern

Also Published As

Publication number Publication date
JP3564854B2 (en) 2004-09-15

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