JPH09257683A - Scattered light detector - Google Patents
Scattered light detectorInfo
- Publication number
- JPH09257683A JPH09257683A JP8096062A JP9606296A JPH09257683A JP H09257683 A JPH09257683 A JP H09257683A JP 8096062 A JP8096062 A JP 8096062A JP 9606296 A JP9606296 A JP 9606296A JP H09257683 A JPH09257683 A JP H09257683A
- Authority
- JP
- Japan
- Prior art keywords
- light
- receiving element
- scattered light
- light receiving
- scattered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 230000010287 polarization Effects 0.000 abstract description 12
- 238000003491 array Methods 0.000 abstract description 5
- 239000002245 particle Substances 0.000 description 10
- 238000005259 measurement Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、試料に対して光源
光を照射させ、その散乱光を受光素子列で検出する散乱
光検出器に関し、例えば試料中の粒度分布を測定するた
めの装置の技術分野に属する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scattered light detector for irradiating a sample with light from a light source and detecting the scattered light with a light receiving element array, for example, an apparatus for measuring a particle size distribution in a sample. Belong to the technical field.
【０００２】[0002]
【従来の技術】円弧状に形成した複数個のフォトダイオ
ード等の受光素子を同心円上に扇形状に配列したリング
ディテクタと称される散乱光検出器が公知である。2. Description of the Related Art A scattered light detector called a ring detector in which a plurality of light receiving elements such as photodiodes formed in an arc shape are concentrically arranged in a fan shape is known.
【０００３】しかし、このような散乱光検出器では、各
受光素子からのリーク電流によるクロストークの発生回
避のためおよび各受光素子からリード線を取り出す必要
上から、各受光素子間に適当な間隙を設けなければなら
ず、また、各受光素子の幅（面積）を小さくすると感度
が低下することから、中心部では配列できる受光素子の
数が制約される。However, in such a scattered light detector, in order to avoid generation of crosstalk due to leakage current from each light receiving element and to take out a lead wire from each light receiving element, an appropriate gap is provided between each light receiving element. Must be provided, and since the sensitivity decreases when the width (area) of each light receiving element is reduced, the number of light receiving elements that can be arranged in the central portion is limited.
【０００４】そのため、回析角の小さい散乱光を精度よ
く検出するのが難しく、従って、粒子径の大きい側の測
定範囲が制約されるという問題があった。Therefore, it is difficult to accurately detect scattered light having a small diffraction angle, and thus there is a problem that the measurement range on the side of a large particle diameter is restricted.
【０００５】そこで、このような難点を解消するため
に、例えば特公平７−８６４５４号公報には、受光素子
列を左右対称に２分割し、互いに他方側のギャップを一
方側の受光素子がカバーするようにずらせて組み合わせ
た散乱光検出器が記載されている。（図３参照）。Therefore, in order to solve such a problem, for example, in Japanese Patent Publication No. 7-86454, a light receiving element array is bilaterally symmetrically divided and the other side gap is covered by one side light receiving element. Scattered light detectors have been described which have been staggered and combined. (See FIG. 3).
【０００６】[0006]
【発明が解決しようとする課題】しかし、そもそも粒子
にはビーム拡大器によって拡大された偏光が照射される
ため、散乱光も偏光しており、上述した従来例の検出器
では、受光素子列が入射する偏光方向に対して左右対称
の配置となっていることから、左右で異なった偏光情報
が検出されることになる。However, since the particles are originally irradiated with the polarized light expanded by the beam expander, the scattered light is also polarized, and in the above-described conventional detector, the light receiving element array is Since the arrangement is symmetrical with respect to the incident polarization direction, different polarization information is detected on the left and right.
【０００７】一方、各受光素子によって検出される受光
強度は偏光角によって変化する。従って、上述のよう
に、左右で異なった偏光情報を検出する場合には、補正
や再演算による偏光情報の処理がきわめて難しくなり、
精度の高い測定値を得るのは容易ではなかった。On the other hand, the received light intensity detected by each light receiving element changes depending on the polarization angle. Therefore, as described above, when detecting different polarization information on the left and right, it becomes extremely difficult to process the polarization information by correction and recalculation.
It was not easy to obtain highly accurate measurement values.
【０００８】本発明はこのような実情に鑑みてなされ、
散乱光の偏光情報を単純化して精度の高い測定ができる
コンパクトな散乱光検出器を提供することを目的として
いる。The present invention has been made in view of such circumstances,
It is an object of the present invention to provide a compact scattered light detector capable of performing highly accurate measurement by simplifying polarization information of scattered light.
【０００９】本発明は上述の課題を解決するための手段
を以下のように構成している。すなわち、光源光を試料
に照射させ、その散乱光を、同心円上に扇形状に配置し
た複数の円弧状の受光素子よりなる受光素子列で検出す
る散乱光検出器にあって、一方の受光素子列と他方の受
光素子列とが互いに１８０度位相を異にして対向し合う
扇形状に配置され、かつ前記一方または他方の受光素子
列の各受光素子間の間隙と同心円上に対応する位置に前
記他方または一方の受光素子列の各受光素子を配置する
ことにより、前記両受光素子列間で交互に連続する各受
光素子間での間隙をなくしたことを特徴としている。The present invention comprises means for solving the above-mentioned problems as follows. That is, in a scattered light detector for irradiating a sample with light source light and detecting the scattered light with a light receiving element array composed of a plurality of arc-shaped light receiving elements concentrically arranged in a fan shape, one of the light receiving elements The row and the other light-receiving element row are arranged in a fan shape facing each other with a phase difference of 180 degrees, and are arranged concentrically with the gap between the light-receiving elements of the one or the other light-receiving element row. By arranging the light receiving elements of the other or one of the light receiving element rows, a gap between the light receiving elements that are alternately continuous between the both light receiving element rows is eliminated.
【００１０】互いに対向し合うように１８０度位相を異
ならせて２つの扇形状の受光素子列を配置したことによ
り、両受光素子列間では、一致した偏光情報が得られる
ため、偏光情報の処理が容易となる。By arranging two fan-shaped light-receiving element arrays with 180 ° different phases so as to face each other, the same polarization information can be obtained between the two light-receiving element arrays, so that the polarization information processing is performed. Will be easier.
【００１１】[0011]
【発明の実施の形態】以下に本発明の散乱光検出器の一
実施形態を図面を参照しつつ説明する。図２は粒度分布
測定装置の要部構成を示し、同図にて、符号１はレーザ
光２を発する光源としてのレーザ管、３はレーザ光２を
適宜拡大するビーム拡大器、４は試料５を収納したセ
ル、６はセル４の後方に設けられる集光レンズ、７は集
光レンズ６からの散乱光を検出するフォトダイオードよ
りなる散乱光検出器、８は散乱光検出器７からの検出信
号を取り込むマルチプレクサ、９はマルチプレクサ８か
らの信号が入力され、散乱光強度パターンに基づいて粒
度分布をおこなうためのＣＰＵである。BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a scattered light detector of the present invention will be described below with reference to the drawings. FIG. 2 shows a main part configuration of a particle size distribution measuring apparatus. In FIG. 2, reference numeral 1 is a laser tube as a light source for emitting a laser beam 2, 3 is a beam expander for appropriately expanding the laser beam 2, and 4 is a sample 5. , 6 is a condenser lens provided behind the cell 4, 7 is a scattered light detector formed of a photodiode for detecting scattered light from the condenser lens 6, and 8 is detection from the scattered light detector 7. A multiplexer 9 for receiving a signal is a CPU for receiving a signal from the multiplexer 8 and performing a particle size distribution based on the scattered light intensity pattern.
【００１２】このような粒度分布測定装置においては、
セル４に試料５を収容して、レーザ光２を試料セル４に
対して照射すると、レーザ光２の一部がセル４内の試料
５中の粒子を照射して散乱光１０となり、残りの光は粒
子と粒子との間を通過して透過光１１となる。そして、
これら散乱光１０および透過光１１はともに、集光レン
ズ６を経て散乱光検出器７に至る。In such a particle size distribution measuring device,
When the sample 5 is housed in the cell 4 and the laser light 2 is irradiated to the sample cell 4, a part of the laser light 2 irradiates the particles in the sample 5 in the cell 4 to become the scattered light 10 and the remaining light. The light passes between the particles and becomes the transmitted light 11. And
Both the scattered light 10 and the transmitted light 11 reach the scattered light detector 7 through the condenser lens 6.
【００１３】上述の散乱光検出器７の構成は図１に示さ
れ、７１は４つの受光素子よりなる光軸調整用の透過光
検出用測定部で、その中心部に透過光を促えることによ
って光軸を調整することができる。７２，７３は透過光
検出用測定部７１を含む一つの検出平面（この実施形態
では紙面）に設けられる散乱光検出用測定部（受光素子
列）である。The structure of the scattered light detector 7 described above is shown in FIG. 1. Reference numeral 71 denotes a transmitted light detecting measuring portion for adjusting the optical axis, which is composed of four light receiving elements, and is capable of promoting the transmitted light to the central portion thereof. The optical axis can be adjusted by. Reference numerals 72 and 73 denote scattered light detection measurement units (light receiving element rows) provided on one detection plane (paper surface in this embodiment) including the transmitted light detection measurement unit 71.
【００１４】その一方の受光素子列７２と他方の受光素
子列７３とは互いに１８０度位相を異にして対向し合う
扇形状に形成され、かつ一方の受光素子列７２の各受光
素子７２ａ，７２ｂ，７２ｃ，…の間隙（アイソレーシ
ョンギャップ）Ｇ，…と同一円上の位置には、それぞれ
各受光素子７３ｂ，７３ｃ，７３ｄ，…が配置され、ま
た、他方の受光素子列７３の各受光素子７３の間隙ｇ，
…の同一円上には、それぞれ各受光素子７２ａ，７２
ｂ，７２ｃ，…が配置されている。The one light-receiving element array 72 and the other light-receiving element array 73 are formed in a fan shape facing each other with a phase difference of 180 degrees, and each of the light-receiving elements 72a, 72b of the one light-receiving element array 72. , 72c, ..., The light receiving elements 73b, 73c, 73d, ... Are arranged at positions on the same circle as the gap (isolation gap) G ,. The gap g of 73,
The light-receiving elements 72a and 72a are arranged on the same circle of ...
b, 72c, ... Are arranged.
【００１５】このような構成では、両受光素子列７２，
７３間で交互に連続する各受光素子７３ａと７２ａとの
間、７３ｂと７２ｂとの間、７３ｃと７２ｃとの間、…
の各間隙が実質的に形成されず、不感帯をなくした構成
となっており、しかも、一方の受光素子列７２と他方の
受光素子列７３とが１８０度回転した対応位置にあり、
両者間では、一致した偏光情報が得られる。In such a configuration, both light receiving element arrays 72,
Between the light receiving elements 73a and 72a which are alternately continuous between 73, between 73b and 72b, between 73c and 72c, ...
Each of the gaps is substantially not formed and the dead zone is eliminated, and the one light receiving element row 72 and the other light receiving element row 73 are at corresponding positions rotated by 180 degrees,
Matched polarization information is obtained between the two.
【００１６】ところで、試料中に混在する粒子に偏光が
照射されたときの散乱光の角度分布Ｉａは、 Ｉａ＝λ2 ／（８π2 Ｒ2 ）・（ｉ1 ＋ｉ2 ） Ｒ：粒子からの距離 λ：光の波長 ｉ1 ：散乱光の入射光に対して垂直の偏光成分 ｉ2 ：散乱光の入射光に対して水平の偏光成分 で表すことが出来る。By the way, the angular distribution Ia of scattered light when the particles mixed in the sample are irradiated with polarized light is as follows: Ia = λ 2 / (8π 2 R 2 ) · (i 1 + i 2 ) R: Distance λ: wavelength of light i 1 : polarized light component perpendicular to incident light of scattered light i 2 : polarized light component horizontal to incident light of scattered light
【００１７】上述のように、１８０度位相が異なる両受
光素子列７２，７３間では、その偏光成分（ｉ1 ＋
ｉ2 ）が等しくなる。従って、両受光素子列７２，７３
の散乱光情報を合算することにより、面倒な補正や再演
算を要することなく、精度の高い角度分布Ｉａを求める
ことができる。As described above, the polarization components (i 1 +
i 2 ) are equal. Therefore, both light receiving element rows 72, 73
By summing up the scattered light information of 1, the highly accurate angle distribution Ia can be obtained without the need for complicated correction and recalculation.
【００１８】上述のような構成の散乱光検出器では、実
質的に間隙を設けることなく、２つの受光素子列７２，
７３を形成するので、コンパクト化を図ることができ、
かつ検出器特性の単純化が可能となり、しかも高精度の
測定値を得ることができる。In the scattered light detector having the above-mentioned structure, the two light receiving element arrays 72,
Since 73 is formed, compactness can be achieved,
In addition, the detector characteristics can be simplified, and highly accurate measurement values can be obtained.
【００１９】[0019]
【発明の効果】以上説明したように、本発明の散乱光検
出器によれば、一方の受光素子列と他方の受光素子列と
を互いに１８０度位相を異にして対向し合う扇形状に配
置し、かつ前記一方または他方の受光素子列の各受光素
子間の間隙と同心円上に対応する位置に前記他方または
一方の受光素子列の各受光素子を配置することにより、
前記両受光素子列間で交互に連続する各受光素子間での
間隙をなくしたので、両受光素子列間で偏光方向の情報
を等しくすることができ、面倒な補正や再演算を要する
ことなく、高精度な測定値を得ることができ、また、コ
ンパクト化を図ることもできる。As described above, according to the scattered light detector of the present invention, one light-receiving element array and the other light-receiving element array are arranged in a fan shape with their phases being 180 degrees different from each other. And, by arranging each light receiving element of the other or one of the light receiving element rows at a position corresponding to the gap between the light receiving elements of the one or the other light receiving element row on the concentric circle,
Since the gap between the light receiving elements that are alternately continuous between the two light receiving element rows is eliminated, the information of the polarization direction can be made equal between the two light receiving element rows, without troublesome correction and recalculation. A highly accurate measurement value can be obtained, and the size can be reduced.
【図１】本発明の散乱光検出器の一実施形態における受
光素子の配置図である。FIG. 1 is a layout view of a light receiving element in an embodiment of a scattered light detector of the present invention.
【図２】同粒度分布測定装置の構成図である。FIG. 2 is a configuration diagram of the same particle size distribution measuring device.
【図３】従来の散乱光検出器の受光素子の配置図の一例
である。FIG. 3 is an example of a layout view of light receiving elements of a conventional scattered light detector.
２…光源光、５…試料、１０…散乱光、１１…透過光、
７２，７３…受光素子列，７２ａ，７２ｂ，７２ｃ…受
光素子、７３ａ，７３ｂ，７３ｃ…受光素子、Ｇ，ｇ…
間隙。2 ... Light source light, 5 ... Sample, 10 ... Scattered light, 11 ... Transmitted light,
72, 73 ... Light receiving element array, 72a, 72b, 72c ... Light receiving element, 73a, 73b, 73c ... Light receiving element, G, g ...
gap.
Claims (1)
を、同心円上に配置した複数の円弧状の受光素子よりな
る受光素子列で検出する散乱光検出器において、一方の
受光素子列と他方の受光素子列とが互いに１８０度位相
を異にして対向し合うように配置され、かつ前記一方ま
たは他方の受光素子列の各受光素子間の間隙と同心円上
に対応する位置に前記他方または一方の受光素子列の各
受光素子を配置することにより、前記両受光素子列間で
交互に連続する各受光素子間での間隙をなくしたことを
特徴とする散乱光検出器。1. A scattered light detector for irradiating a sample with light from a light source and detecting the scattered light with a light receiving element array composed of a plurality of arc-shaped light receiving elements arranged on a concentric circle. The other light-receiving element array is arranged so as to face each other with a phase difference of 180 degrees, and the other one of the one or the other light-receiving element array is located at a position concentrically with the gap between the light-receiving elements of the other or the other light-receiving element array. A scattered light detector characterized in that by arranging each light receiving element of one light receiving element row, a gap between the light receiving elements that are alternately continuous between both light receiving element rows is eliminated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8096062A JPH09257683A (en) | 1996-03-26 | 1996-03-26 | Scattered light detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8096062A JPH09257683A (en) | 1996-03-26 | 1996-03-26 | Scattered light detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09257683A true JPH09257683A (en) | 1997-10-03 |
Family
ID=14154955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8096062A Pending JPH09257683A (en) | 1996-03-26 | 1996-03-26 | Scattered light detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09257683A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008128987A (en) * | 2006-11-24 | 2008-06-05 | Mitsubishi Electric Corp | Beam profile measuring apparatus and laser processing apparatus |
| JP2009162714A (en) * | 2008-01-10 | 2009-07-23 | Shimadzu Corp | Scattering characteristic evaluation apparatus and scattering characteristic evaluation method |
| JP2011529183A (en) * | 2008-07-24 | 2011-12-01 | ベックマン コールター， インコーポレイテッド | Transducer module |
| WO2020096038A1 (en) * | 2018-11-08 | 2020-05-14 | 国立大学法人群馬大学 | Particle group measurement device |
-
1996
- 1996-03-26 JP JP8096062A patent/JPH09257683A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008128987A (en) * | 2006-11-24 | 2008-06-05 | Mitsubishi Electric Corp | Beam profile measuring apparatus and laser processing apparatus |
| JP2009162714A (en) * | 2008-01-10 | 2009-07-23 | Shimadzu Corp | Scattering characteristic evaluation apparatus and scattering characteristic evaluation method |
| JP2011529183A (en) * | 2008-07-24 | 2011-12-01 | ベックマン コールター， インコーポレイテッド | Transducer module |
| JP2013235016A (en) * | 2008-07-24 | 2013-11-21 | Beckman Coulter Inc | Transducer module |
| WO2020096038A1 (en) * | 2018-11-08 | 2020-05-14 | 国立大学法人群馬大学 | Particle group measurement device |
| JPWO2020096038A1 (en) * | 2018-11-08 | 2021-09-24 | 国立大学法人群馬大学 | Particle swarm measuring device |
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