JPH09281U - Plane sander - Google Patents

Abstract

(57) [Abstract] [PROBLEM] To increase the degree of freedom of the movement path of a jig holding a work piece on a surface plate, to facilitate the selection of the movement path according to the work piece, and to set fine polishing conditions. To enable. SOLUTION: A swinging fulcrum shaft perpendicular to the polishing surface of the surface plate 2,
On the other hand, a swinging arm 3 whose mounting position is adjustable, a connecting member mounting block fixed to the swinging fulcrum shaft so that the mounting angle is adjustable in a plane parallel to the polishing surface, A connecting member fixed to the connecting member mounting block,
A crank 20 rotatably driven, one end of which is pivotally attached to the crank 20 and the other end of which is pivotally attached to the connecting member, which has a length adjusting portion, and which adjusts an eccentric position of a pivot point of the crank 20. With a free crank rod 26, the crank 20
The rotation of the shaft causes the tip of the swing arm 3 to swing in the plane parallel to the polishing surface with the swing fulcrum shaft as the swing fulcrum via the crank rod 26.

Description

[Detailed description of the invention]

[0001]

[Technical field to which the invention belongs]

 The present invention relates to a flat surface polishing machine for polishing a slider surface of a magnetic head or other small parts.

[0002]

[Prior art]

 2. Description of the Related Art A flat surface polishing machine that supports a jig that holds a workpiece to be brought into contact with a polishing surface plate with a swing arm or the like has been conventionally known.

[0003]

[Problems to be solved by the device]

 As described above, the conventional flat polisher has a low degree of freedom in the movement path of the jig on the surface plate, and it is not possible to arbitrarily select the movement path according to the work piece, so that the polishing conditions are fine. There is a drawback that it cannot be set.

In view of the above points, the present invention has a large degree of freedom of the movement track of the jig holding the work piece on the surface plate, makes it easy to select the movement path according to the work piece, and polishes the work piece. The aim is to provide a flat surface polisher that allows fine setting of conditions.

Other objects and novel features of the present invention will be clarified in the embodiments described later.

[0006]

[Means for Solving the Problems]

 In order to achieve the above object, the present invention rotationally drives a polishing platen having an upper surface serving as a polishing surface, and a workpiece held by a jig supported on the tip side of a swing arm is provided. In an Oscar type flat surface polishing machine (polishing processing machine) that holds the polishing surface in contact with it and swings the swing arm to polish one surface (lower surface) of the workpiece, An oscillating fulcrum shaft pivotally supported at a distance, a oscillating arm that allows the mounting position to be adjusted by the oscillating fulcrum shaft so that the length from the fulcrum to the tip, that is, the oscillating radius can be varied A connecting member mounting block that can change the swinging position in the rotational direction with respect to the polishing surface that is fixed so that the mounting angle can be adjusted in a plane parallel to the polishing surface with respect to the swinging fulcrum axis. Eccentricity of the crank and the pivot point of the crank And a crank rod location can swing width in the adjustable variable, increase the flexibility of the rocking motion has a configuration that can be easily set denoted by the graduation on the adjustment of the Matanaga and angles.

[0007]

[Action]

 In the flat grinder of the present invention, the movement trajectory of the swing arm tip, that is, the movement of the jig holding the work piece can be variously changed according to the work piece, and fine grinding conditions can be set and fixed. High-precision polishing is possible by keeping the plate temperature constant.

[0008]

[Embodiment of the invention]

 Hereinafter, an embodiment of a planar polishing machine according to the present invention will be described with reference to the drawings.

FIG. 1 and FIG. 2 show the overall configuration of the embodiment. In these drawings, three polishing surface plates 2 are arranged on the main body table 1, and an Oscar mechanism (oscillation mechanism) 4 having a rocking arm 3 and the like is provided for each surface plate 2. There is. As shown in FIG. 2, spindles 5 are installed on the main body table 1 to rotate and drive individual surface plates 2, and the spindles 5 are driven to rotate by spindle motors 6, respectively. The surface plate 2 is fixed to a spindle table 7 which is integral with the upper part of the spindle 5. A jig 8 is attached to the tip of the swing arm 3 for holding the workpiece so as to be in contact with the polishing surface of the upper surface of the surface plate.

FIG. 3 shows the structure of the polishing surface plate 2. The surface plate 2 has a base 10 and a tin disk 11 whose upper surface is the polishing surface, which is bonded to the base plate 10. It has a liquid passage inside which receives water supply.

FIG. 4 shows an Oscar mechanism 4 for moving the jig 8 which holds the workpiece so as to be in contact with the polishing surface of the upper surface of the surface plate in a predetermined motion locus. In this figure, the crank shaft 15 is rotatably supported by a bearing 16 with respect to the main body table 1, and receives the rotational driving force of the spindle motor 6 via a winding transmission mechanism or the like. Therefore, the movement of the Oscar mechanism 4 is interlocked with the operation of the surface plate 2, and when the surface plate 2 is stopped, the Oscar mechanism 4 is also stopped.

A crank 20 is fixed to the upper end of the crank shaft 15, a diametrical groove 21 is formed in the crank 20 as shown in FIG. 5, and a scale plate 22 is arranged along the groove 21. ing. A slide member 23 for position adjustment is fitted in the groove 21, a bolt 24 is screwed into the slide member 23, and a crank 25 is screwed with a spacer 25 screwed into the bolt 24 and the slide member 23. The position of the slide member 23 with respect to the crank 20 is fixed by sandwiching a part (edge of the groove 21) of the. Also, one end of a crank rod 26 is pivotally attached using a bolt 24. The crank rod 26 has a length adjusting portion 29 in which a male screw member 27 and a female screw member 28 are combined. The fixing of the length is performed by disposing nuts 30 screwed onto the male screw member 27 on both sides of the female screw member 28 and tightening them.

A swinging fulcrum shaft 32 is pivotally supported at a position spaced apart from the surface plate of the main body table 1 by a bearing 31, and is fixed to the upper end of the fulcrum shaft 32 as shown in FIG. A pneumatic rotary actuator 34 is fixed to the bracket 33. Here, the pneumatic rotary actuator 34 is also called a pneumatic oscillating actuator or oscillating motor, and can rotate its rotating shaft 35 by its air pressure to transmit the oscillating motion to the outside. However, the swing fulcrum shaft 32 is oriented perpendicular to the polishing surface of the surface plate 2, and the rotary shaft 35 is orthogonal to the swing fulcrum shaft 32. A swing arm mounting block 36 integrally having a rectangular frame portion is fixed to the rotary shaft 35 of the rotary actuator 34 so as to rotate integrally, and the swing arm 3 is set on the square frame portion of the mounting block 36. It is pressed and fixed via the bolt 37 and the pressure contact member 38. A scale 39 is engraved on the side surface of the swing arm 3, and the length from the fulcrum shaft 32 to the tip of the swing arm 3 can be adjusted by loosening the set bolt 37.

The spring pin 40 is attached to the bracket 33, and the swing arm 3 is tilted as shown by the one-dot chain line X in FIG. 4 (rotated in a plane perpendicular to the polishing surface of the surface plate). When the tip is lifted, the tip of the pin 40 is fitted into the recess 41 of the mounting block 36 to hold the swing arm in the lifted state. During polishing, the fitting between the spring pin 40 and the recess 41 is disengaged.

Below the bracket 33, as shown in FIG. 7, a block 42A, 42B divided into two is fastened with a screw 43 and fixed to the fulcrum shaft 32 so as to be integrally connected. Block) 42 is provided, and one end of a connecting arm 44 as a connecting member is fixed to the mounting block 42 with a screw. The other end of the connecting arm 44 is pivotally attached to the end of the crank rod 26. Also in this case, the tip position of the swing arm 3 is displaced by loosening the screw 43 and changing the rotational position of the mounting block 42 with respect to the fulcrum shaft 32 (the mounting angle in a plane parallel to the polishing surface). be able to.

As shown in FIG. 4, a jig mounting member 45 is vertically fixed to the tip of the swing arm 3, and a jig 8 holding a workpiece is mounted on the lower end of the jig mounting member 45. . That is, the jig 8 receives the swinging motion of the swinging arm 3 in the horizontal plane (the plane parallel to the polishing surface of the surface plate) via the jig mounting member 45. A predetermined weight 46 is placed on the tip of the swing arm 3, and a counter weight 47 is provided at the rear end of the swing arm 3, and these weights 46, 47 are fixed by nuts. The weights 46 and 47 set the polishing load applied to the jig 8. Further, when the polishing load is required in addition to the load by the weight 46, it is possible to apply the load by using the rotational force of the rotary actuator 34. The load can be changed by adjusting the air pressure applied to the rotary actuator 34.

In addition, a constant temperature water of a constant temperature is supplied from a constant temperature water device to the liquid passage of the polishing platen 2 to perform a precise polishing process while keeping the temperature of the platen 2 constant during the polishing process. I am trying to get it. In addition, a constant amount of polishing liquid is supplied to the polishing surface on the surface plate at regular intervals.

In the configuration of the above embodiment, (a) first, loosen the bolt 24 to set the pivot point (eccentric position) of the crank rod 26 with respect to the crank 20 appropriately, and then tighten the bolt 24. , The swing angle of the jig 8 holding the workpiece is set. (b) The female screw member 28 of the crank rod 26 is rotated to change the length of the length adjusting portion 29 to set the swing position of the jig 8. (c) Loosen the set bolt 37, put the swing arm 3 in and out of the mounting block 36 to make it an appropriate length, and then tighten the set bolt 37 to set the swing width of the jig 8. (d) And, without changing the conditions of (a) to (c), loosen the screw 43 of the connecting arm mounting block 42 holding the fulcrum shaft 32 to change the relative position of the fulcrum shaft 32 and the block 42, and then It is also possible to change the swing position of the jig 8 by tightening 43. Then, the weights 46 and 47 before and after the swing arm 3 are set to set the polishing load. After setting these conditions, the operation of the polishing surface plate 2 and the Oscar mechanism 4 is started, and the polishing work on the surface polishing surface of the workpiece held by the jig 8 is performed.

The jig 8 and the surface plate 2 are exchanged by manually lifting the tip of the swing arm 3 and locking it with a spring pin 40.

8 and 9 show another embodiment of the present invention. In this case, two Oscar mechanisms 4A and 4B are provided for each polishing surface plate 2 so that the two jigs 8 can be moved. The crank 20 can be shared by the respective Oscar mechanisms 4A and 4B. Other configurations are similar to those of the above-described embodiment.

Although the embodiments of the present invention have been described above, it is obvious to those skilled in the art that the present invention is not limited to this and various modifications and changes can be made within the scope of the claims. Ah

[0022]

[Effect of the invention]

 As described above, according to the flat surface polishing machine of the present invention, the rotating polishing surface plate, and the swinging arm provided with the jig holding the workpiece to be contacted on the surface plate on the tip side, A crank for swinging the tip of the swing arm through a crank rod, an eccentric position of a crank rod pivot point with respect to the crank, the crank rod length, and a fulcrum of the swing arm. Since the length from the end to the tip and the position of the swing arm in the rotation direction can be adjusted freely, the degree of freedom of the movement trajectory of the jig holding the workpiece on the surface plate can be increased, and the workpiece can be processed. It is easy to select the movement locus according to the conditions, and it is possible to set fine polishing conditions.

[Brief description of drawings]

FIG. 1 is a plan view showing an overall configuration of an embodiment of a flat surface polishing machine according to the present invention.

FIG. 2 is a side view of the same.

FIG. 3 is a front sectional view of a polishing surface plate in the embodiment.

FIG. 4 is a side view showing a part of the Oscar mechanism in the embodiment in section;

FIG. 5 is a plan view of the crank in the embodiment.

FIG. 6 is a cross-sectional view of a swing arm mounting portion in the embodiment.

FIG. 7 is a cross-sectional view of a connection arm attachment block according to the embodiment.

FIG. 8 is a plan view of another embodiment.

FIG. 9 is a front view of the same.

[Explanation of symbols]

 1 Main Table 2 Polishing Surface Plate 3 Swing Arm 4, 4A, 4B Oscar Mechanism 8 Jig 20 Crank 26 Crank Rod 29 Length Adjusting Section 32 Support Point Shaft 34 Rotary Actuator 36 Swing Arm Mounting Block 42 Connecting Arm Mounting Block 44 Connecting arm 46,47 weight

Claims (1)

[Utility model registration claims] 1. A polishing surface plate whose upper surface is a polishing surface is rotationally driven to hold a workpiece held by a jig supported on the tip side of a swinging arm so as to be in contact with the polishing surface. Then, in the Oscar type planar polishing machine for polishing one side of a workpiece by swinging the swinging arm, a swinging fulcrum shaft pivotally supported at a position apart from the surface plate by a predetermined distance, The oscillating arm whose mounting position can be adjusted by the dynamic fulcrum shaft to change the length from the fulcrum to the tip, that is, the oscillating radius, and the mounting angle in a plane parallel to the polishing surface with respect to the oscillating fulcrum shaft. Is adjustable so that the swinging position in the rotational direction can be varied with respect to the polishing surface that is fixed so that it can be adjusted, the crank driven to rotate, and the eccentric position of the pivot point of the crank can be adjusted. And a crank rod whose swing width can be changed. It increases the freedom of the swing motion, the plane grinder, characterized in that it has a structure that can be easily set denoted by the graduation on the adjustment of the Matanaga and angles.