JPH09304457A - Probe apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily measure an electromagnetic field distribution even when a face to be measured is in a narrow place, by moving the face to be measured to a rotary body, detecting the amount of movement of a probe main body, and at the same time, detecting intensity of electromagnetic field continuously. SOLUTION: The apparatus is constituted of a probe main body 1, a grip part 2 and a signal transmission part. The main body 1 detects a rotation of a ball 10 extruding partly from a round hole on a surface opposed to a face 16 to be measured, by an X-direction movement detection sensor 13 and a Y- direction movement detection sensor 14. The rotation in each direction is sent to the grip part 2 via two optical fibers 17 through the signal transmission part, and the amount of the movement of the main body 1 is detected by a computer 21 and a measuring device 20. At the same time, the main body 1 connected to a terminal end of a coaxial cable 25 measures an electromagnetic field of the face 16 to be measured by an X-axis loop probe 11 and a Y-axis loop probe 12, and sends to the computer 21 and measuring device 20 through the grip part 2. Accordingly, an intensity distribution of the electromagnetic field can be easily measured by moving the main body 1 on the face 16.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe device, and more particularly to a probe device for measuring an electromagnetic field caused by unnecessary radiation noise or electrostatic discharge.

[0002]

2. Description of the Related Art As a conventional example of this kind, there is one in which a measuring probe is attached to a carriage movable in XY directions and the carriage is moved to obtain a two-dimensional electromagnetic field distribution on a surface to be measured. In addition, as shown in FIG. 20, a plurality of loop-shaped probes 51 are two-dimensionally arranged and the intensity of the electromagnetic field detected from each probe is statistically obtained to obtain a two-dimensional electromagnetic field distribution. is there.

[0003]

However, in the above-mentioned conventional example, there are many restrictions on the measurement such that the surface to be measured must be a flat surface. Moreover, since a carriage movable in the XY directions and a measurement plate in which a plurality of loop probes are embedded are used, it is difficult to obtain a two-dimensional measurement result by measuring a narrow portion such as the inside of the device to be measured. . Furthermore, today there is a strong demand for measuring the distribution of standing waves on a cable, but in the above conventional example,
It was not suitable for measuring the distribution of standing waves on such a cable.

[0004]

An object of the present invention is to improve the disadvantages of the conventional example, and in particular, to provide a probe apparatus capable of easily measuring a two-dimensional to three-dimensional electromagnetic field distribution even when the surface to be measured is narrow. It is an object of the present invention to provide a probe device suitable for measuring the distribution of standing waves on a cable.

[0005]

In order to achieve the above object, in the invention described in claim 1, the probe main body is provided with an electromagnetic field detecting means for detecting an electromagnetic field emitted from the surface to be measured. In addition, the probe body is provided with a rotating body that abuts against the surface to be measured and rotates, and a movement amount detection unit that detects the amount of movement of the probe body with respect to the surface to be measured based on the amount of rotation of the rotating body. The composition is adopted.

According to the present invention, when the rotating body is brought into contact with the surface to be measured and the probe main body is moved, the rotating body is rotated according to the movement, and the movement amount is detected by the movement amount detecting means. At the same time, the strength of the electromagnetic field at each moving place is continuously detected by the electromagnetic field detecting means. By inputting and processing the detected value of the movement amount and the detected value of the electromagnetic field to an external device, it is possible to obtain a continuous distribution of the electromagnetic field on the surface to be measured.

According to the second aspect of the invention, the rotating body is a sphere, and the movement amount detecting means is configured to contact the sphere to detect the rotation amount of the sphere.
In the present invention, when the probe main body is moved, the sphere contacting the surface to be measured is rotated, and the rotation amount of this sphere is detected as the movement amount of the probe main body by the movement amount detection means.

According to the third aspect of the invention, the movement amount detecting means has a plurality of slit-shaped non-transmissive portions formed in the radial direction and is provided in contact with a spherical body, and one of the transparent disks. Surface and the other surface, one end is provided respectively and the other end is extended to the outside of the probe main body, and a pair of optical fibers is radiated to irradiate one surface of the transparent disk through the optical fibers. The configuration is such that it is provided with an element and a light receiving element that receives the light transmitted through the other surface of the transparent disk through an optical fiber.

According to the present invention, when the probe body is moved and the sphere rotates, the transparent disk abutting on the sphere also rotates. At this time, when the light emitted from the light emitting element is applied to one surface of the transparent disk through the optical fiber, this light is slit-shaped non-transmissive formed in plural in the radial direction of the transparent disk by the rotation of the transparent disk. While being intermittently blocked by the part, it is intermittently transmitted to the other surface of the transparent disk. The transmitted light is received by the light receiving element through the optical fiber. The amount of movement of the probe body can be acquired by counting the number of light pulses received by the light receiving element with an external device.

According to the fourth aspect of the invention, the probe main body is supported on one end of the pipe-shaped member, and the grip is provided on the other end of the pipe-shaped member. In the present invention, the grip portion is held by hand, and the rotating body of the probe main body is operated so as to always contact the surface to be measured to move the probe main body in the predetermined direction.

According to the fifth aspect of the invention, the pipe-shaped member is a deformable flexible pipe. In the present invention, the flexible pipe is deformed and used so that the probe main body can easily follow the surface to be measured when the grip portion is held.

According to the sixth aspect of the invention, the wiring drawn from the probe main body is housed inside the pipe-shaped member,
The wiring is connectable to an external device from the grip. In the present invention, the wiring is not exposed to the outside between the probe body and the grip. Use by connecting the wiring from the grip to an external device.

According to a seventh aspect of the invention, the electromagnetic field detecting means is a donut-shaped high frequency current probe, and
The rotary body is a pulley, and the movement amount detecting means detects the rotation amount of the pulley.

In the present invention, a cable to be measured is passed through the center of a donut-shaped high frequency current probe, and a pulley is hooked on this cable. Then, when the probe main body is moved, the pulley rotates, and the movement amount of the probe main body is detected by the movement amount detection means. At the same time, the intensity of the electromagnetic field emitted from the cable is continuously detected from the high frequency current probe. By inputting and processing the detected value of the movement amount and the detected value of the electromagnetic field to an external device, it is possible to obtain a continuous distribution of the electromagnetic field on the surface to be measured.

[0015] With the above, the above-mentioned object is achieved.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to FIG.
This will be described with reference to FIGS.

FIG. 1 is a conceptual diagram of this embodiment. The probe device of the present embodiment includes a probe body 1 for detecting the strength of an electromagnetic field on a surface to be measured, a grip portion 2 (grip portion) for manipulating the probe body 1, a probe body 1 and a grip portion 2. And a pipe-shaped signal transmission unit 5 that physically connects and integrates.

The probe body 1 integrally holds an electromagnetic field detection means 8 for detecting an electromagnetic field and a movement amount detection means 9 for detecting a movement amount of the probe body 1 inside the housing. From the housing of the probe main body 1, a coaxial cable 7 for outputting a signal of the electromagnetic field detecting means 8 and an optical fiber 3 as a wiring for driving and outputting the movement amount detecting means 9 are drawn out.

The signal transmission section 5 is composed of a flexible pipe 6, is deformable, and can keep the state after deformation. Inside the flexible pipe 6, the coaxial cable 7 and the optical fiber cable 3 pulled out from the probe body 1 are housed. One end of the flexible pipe 6 is fixed to a part of the housing of the probe main body 1, and the other end is fixed to a part of the housing of the grip portion 2.

The grip portion 2 has an electromagnetic field detecting connector 43b capable of connecting the output of the coaxial cable 7 drawn from the probe main body 1 to an external device, and a movement amount detecting means 9.
An optical signal to be incident on
A signal converting means 4 for converting the optical signal output from the device into a predetermined electric signal, and a movement amount detecting connector 43a for outputting the movement amount signal output from the movement amount detecting means 9 to an external device. There is.

Hereinafter, a more specific configuration of this embodiment will be clarified based on the above-mentioned conceptual configuration.

FIG. 2 shows the internal structure of the probe body 1. The probe main body 1 has an enclosure made of an insulating material, and a round hole through which a part of the ball 10 is seen is formed in the center of the surface facing the surface to be measured. In this way, the ball 10 is rotatably held by a part of the housing in a state where a part of the spherical surface is seen through the round hole. The structure may be similar to that of a ball-type mouse that is generally used as an input device of a computer. Also, this ball 10 has
An X-direction movement detection sensor 13 that detects movement of the probe body 1 in the X-direction according to the rotation of the ball 10 and a Y-direction movement detection sensor 14 that detects movement in the Y-direction are provided in contact with each other. There is. This X-direction movement detection sensor 13
The Y-direction movement detection sensor 14 is located at a position where the angle between the center of the ball 10 and each sensor 13, 14 is a right angle, and the surface including the center of the ball 10 and each sensor 13, 14 is the case to be measured. It is fixed to a part of the housing so as to be parallel to the surface facing the surface. This X-direction movement detection sensor 13 and Y
The direction movement detection sensor 14 functions as the movement amount detection unit 9 described above. Here, two optical fibers 17 are connected to each of the X-direction movement detection sensor 13 and the Y-direction movement detection sensor 14.

Further, inside the casing of the probe body 1, the X-axis loop probe 11 and the Y-axis loop probe 1 which are formed by connecting the core wire of the coaxial cable 25 and the end of the outer conductor are formed.
2 and are provided. That is, one coaxial cable 25
One loop probe is formed for each. The X-axis loop probe 11 is provided so that the surface including the loop extends along the Y-axis. On the other hand, the Y-axis loop probe 12
A surface including the loop is provided along the X axis. In this embodiment, the diameter of the Y-axis loop probe 12 is set to be slightly smaller than that of the X-axis loop probe 11,
The axial loop probe 11 and the Y-axis loop probe 12 are arranged in combination so that the central position of the axial loop probe 11 coincides with the central position of the Y-axis loop probe 12. Here, these X-axis loop probe 11 and Y
The axis loop probe 12 needs to be insulated from each other so as not to be short-circuited with each other, but each loop may be held in a part of the housing in a state of being insulation-coated, or each loop may be connected to the housing. It may be held embedded in an integrated block of insulating material. Each of these loop probes 11 and 12 functions as the electromagnetic field detecting means 8 shown in FIG.

When the electromagnetic field is measured using the probe body 1, as shown in FIG. 4, the probe body 1 is moved while the ball 10 is in contact with the surface 16 to be measured.

Subsequently, the X-direction movement detection sensor 1 described above
The detailed configuration of the Y-direction movement detection sensor 14 will be described with reference to FIGS. 5 to 7. Since the X-direction movement detection sensor 13 and the Y-direction movement detection sensor 14 have exactly the same configuration, the X-direction movement detection sensor 13 will be described below.

FIG. 5 is an external perspective view of the X-direction movement detection sensor 13. The housing 44 is in the shape of a hollow box, and inside the housing 44, the rotary plate 15 seen through a part of the housing 44 is integrated with the rotary shaft 15 a pivotally supported between the side surfaces of the housing 44. It is rotatably installed. Two optical fibers 17 are drawn out from the housing 44.

FIG. 6 is a vertical sectional view of the X-direction movement detection sensor 13. The rotating plate 15 described above is formed of a transparent member, and a plurality of slit-shaped non-transmissive portions along the radial direction are radially formed on the surface thereof.

FIG. 7 is a cross-sectional view of the X-direction movement detection sensor 13. The tip portions of the optical fibers 17 are arranged at corresponding positions on one surface and the other surface of the rotary plate 15, and the lenses 18, 18 are attached to the respective tip ends of the optical fibers 17 to feed the rotary plate 15. A light section 41 and a light receiving section 42 for the light transmitted through the rotary plate 15 are formed. Then, the light emitted to the rotary plate 15 via the optical fiber 17 is intermittently transmitted to the other surface of the rotary plate 15 as the rotary plate 15 rotates, and is received by the light receiving unit 42. X configured in this way
The direction movement detection sensor 13 is arranged so that a part of the rotary plate 15 protruding from the housing 44 contacts the surface of the ball 10 shown in FIGS. 2 to 3. The same applies to the Y-direction movement detection sensor 14. Therefore, the rotary plate 15 rotates in accordance with the rotation of the ball 10, and the rotation amount is output from the light receiving unit 42 as the number of light pulses.

FIG. 8 is an external view of the probe device according to this embodiment. Two coaxial cables 25 and four optical fiber cables 17 pulled out from the probe body 1
Passes through the inside of the signal transmission unit 5 made of a flexible pipe and reaches the grip unit 2. Then, from this grip portion 2, the measuring device 20 or the computer 2 which is an external device.
1 can be connected. Here, the measuring device 20 is, for example, a spectrum analyzer or an oscilloscope.

FIG. 9 is an internal configuration diagram of the grip portion 2. The two coaxial cables 25 drawn from the flexible pipe 6 are directly connected to the electromagnetic field detection connector 43b attached to the outside of the housing of the grip portion 2. In addition, the probe body 1 is attached to the housing of the grip portion 2.
Is provided with a movement amount detecting connector 43a. The movement amount detection connector 43a is composed of two connectors for detecting the X-direction movement amount and for detecting the Y-direction movement amount, and each connector is connected to the driver receiver circuit 19 inside the housing. The driver receiver circuit 19 includes two LEDs 24, 24 and two phototransistors 2
3, 23 are alternately arranged so as not to be adjacent to each other. Then, the ends of the four optical fibers 17 drawn from the flexible pipe 6 have two LEDs, respectively.
24, 24 and the two phototransistors 23, 23 are individually arranged.

Specifically, the two optical fibers 1 forming the light transmitting section 41 of the X direction movement detecting sensor 13 and the light transmitting section 41 of the Y direction movement detecting sensor 14 provided in the probe body 1
Reference numeral 7 denotes a light receiving portion 42 of the X-direction movement detecting sensor 13 and a light receiving portion 42 of the Y-direction movement detecting sensor 14 which are arranged at positions where the irradiation light of the LEDs 24, 24 of the grip portion 2 can be respectively taken in. The two optical fibers formed are the phototransistor 2 of the grip portion 2, respectively.
It is arranged at a position where an optical signal is given to 3, 23.

The driver / receiver circuit 19 includes the LED 2
4 and 24 are driven to emit light, and the phototransistor 2
It has a function of waveform-shaping the signal received by 4, 4 and converted into an electric signal and outputting it to the movement amount detecting connector 43a. Here, the movement amount detection connector 43a may be, for example, a serial interface, and the operating power of the driver / receiver circuit may be supplied from an external computer connected to the movement amount detection connector 43a.

Next, the method of using the probe device according to the present embodiment will be explained with reference to FIGS.

First, the electromagnetic field detection connector 43b of the grip portion 2 is connected to the measuring device 20, and the movement amount detection connector 43a is connected to the computer 21. In addition, measuring instrument 2
The electromagnetic field detection value data input to 0 is stored in the computer 2
As can be obtained in No. 1, measuring device 20 and computer 21
And connect. Then, the operator holds the grip portion 2 in his hand and applies the probe main body 1 to the surface 16 to be measured. At this time, when it is difficult to bring the ball 10 of the probe main body 1 into contact with the surface 16 to be measured, the flexible pipe 6 is appropriately deformed, and the orientation of the probe main body 1 is adjusted so as to be easily operated.

Then, the probe main body 1 is positioned at the initial measurement position on the surface 16 to be measured, and the measuring instrument 20 and the computer 21 are set to the measurable state. When the computer 21 is set to the measurable state, operating power is supplied from the computer 21 to the driver receiver circuit 19 of the grip portion 2, and the LEDs 24, 24 are turned on. As a result, the rotary plate 15 provided in the X-direction movement detection sensor 13 and the Y-direction movement detection sensor 14 of the probe main body 1 is irradiated with light via the one optical fiber 17, and the rotation plate 15 is moved. The transmitted light is taken into the phototransistors 23, 23 of the grip portion 2 via the other optical fiber 17.

The signal input to the phototransistors 23, 23 and converted into an electric signal is the driver receiver circuit 1.
The waveform is shaped by 9 and input to the external computer 21. The computer 21 sequentially calculates the amount of movement of the probe body 1 in each of the X direction and the Y direction from the change in the input signal. That is, when the probe main body 1 is moved in the X direction to the Y direction, the above-mentioned rotary plate 15 rotates in accordance with the rotation of the ball 10 mounted on the probe main body 1, and the light transmitted through the rotary plate 15 is transmitted. Are intermittently blocked by the slit-shaped non-transmissive portion. This is input to the phototransistor on the grip portion 2 side as a change in the pulsed optical signal, and the computer 21 obtains the number of pulse signals according to the movement amount. Therefore, computer 2
1 calculates the amount of movement of the probe body 1 from the initial position in the X direction or the Y direction by counting the number of input pulses.

On the other hand, a predetermined electromotive force is induced from the X-axis loop probe 11 and the Y-axis loop probe 12 of the probe main body 1 according to the moving direction of the probe main body 1, and this is induced from the coaxial cable 25 to the electromagnetic field detecting connector. It is input to the measuring device 20 through 43a. Further, the detection signal of the electromagnetic field input to the measuring device 20 is also input to the computer 21. The operator can grasp the measurement result from the display of the measuring device 20.

Further, the computer 21 samples the detection signal of the electromagnetic field input from the measuring device 20 at a predetermined timing and accumulates it in association with the calculation result of the movement amount at that time. Then, when constant measurement data is accumulated, the relationship between the position on the surface 16 to be measured and the electromagnetic field strength is displayed on the screen. The operator can move the probe body 1 so as to fill the surface 16 to be measured with a brush so that the entire electromagnetic field intensity distribution of the surface 16 to be measured can be displayed.

According to this, the probe body is provided with a ball as a rotating body, and at the same time when the electromagnetic field is detected, the movement amount of the probe body can be detected on the basis of the rotation amount of the ball, so that the object is small in size. The electromagnetic field intensity at each position on the measurement surface can be continuously detected, and the electromagnetic field distribution can be easily measured even when the surface to be measured is narrow. Furthermore, the measurement can be performed even if the surface to be measured is a curved surface.

Further, since a spherical body called a ball is used as the rotating body, it is possible to detect a two-dimensional movement amount of the probe main body and obtain a two-dimensional electromagnetic field distribution.

Further, since the optical fiber is drawn into the probe main body and the movement amount of the probe main body can be detected by the optical signal, the movement amount can be detected with high accuracy without the influence of external electromagnetic noise. . At the same time, it is possible to effectively prevent a situation in which the movement detection sensors 13 and 14 exert an electromagnetic adverse effect on the detection values of the X-axis loop probe 11 and the Y-axis loop probe 12 serving as the electromagnetic field detection means, which improves accuracy. It is possible to obtain a detected value of high electromagnetic field strength.

In addition to this, since the grip portion 2 is connected to the probe main body 1 through the pipe-shaped member, the grip portion 2
The probe body can be easily moved by holding and operating.

Further, since the flexible pipe 6 is used as the pipe-shaped member, by deforming the pipe so that it can be easily operated, the movement of the probe main body 1 in a state where the ball is in contact with the surface to be measured is facilitated. It can be carried out.

Further, since the wiring drawn out from the probe main body is housed inside the pipe-shaped member, it does not interfere with the operation, and the optical fiber can be protected from breakage or the like.

Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made. For example, in addition to the X-axis loop probe and the Y-axis loop probe, as shown in FIG. 14, a Z-axis loop probe 38 having a loop surface parallel to the surface 16 to be measured is provided to measure the magnetic field strength in the Z-axis direction. , It becomes possible to know the direction of the magnetic field at the measurement point in three dimensions. Further, by changing the loop probe to the voltage measuring terminal for voltage detection shown in FIG. 15, it becomes possible to measure the voltage distribution. Furthermore, if the loop probe is the monopole antenna for electric field detection shown in FIG. 16, it becomes possible to measure the distribution of electric field strength.

When detecting an electric field, it is possible to improve the accuracy of electric field strength measurement by using a dipole antenna with a balun shown in FIG. Furthermore, by using a dipole antenna perpendicular to the surface to be measured shown in FIG. 18, the distribution of the electric field strength in the vertical direction can be measured, and as shown in FIG. 19, both vertical and horizontal antennas are combined. Then, the three-dimensional electric field intensity distribution can be measured.

Next, another embodiment of the present invention will be described with reference to FIGS.

FIG. 11A is a perspective view showing a state in which the probe device of this embodiment is attached to the cable 34 which is the object to be measured. The cable 34 passes through the center of a doughnut-shaped high frequency current probe 29 as an electromagnetic field detecting means. The high frequency current probe 29 is fixed to a fixed plate 33. In addition, this fixed plate 33,
Two rollers 30 and 31 having the same diameter as a rotating body are rotatably attached. These two rollers 30, 3
As shown in FIG. 11B, the cable No. 1 is provided so as to sandwich the cable 34 from above and below. A rotation detection sensor 32 that detects the amount of rotation of the roller 30 is provided side by side with the rotation shaft of the roller 30 near the fixed plate 33, and the wiring thereof hangs downward from the fixed plate 33. In this way, the probe body is constructed. Here, another pair of rollers for sandwiching the cable 34 is fixed to the fixing plate 33 on the opposite side of the pair of rollers 30 and 31 via the high frequency current probe 29. May be. This facilitates maintaining the cable 34 in place within the high frequency current probe 29.

FIG. 12 is a connection diagram of the probe main body.
The output of the high frequency current probe 29 is input to the spectrum analyzer 35, and the output of the rotation detection sensor 32 of the roller 30 is input to the computer 21. Furthermore,
The output of the high frequency current probe 29 is also input from the spectrum analyzer 35 to the computer 21.

When the probe main body is moved along the cable 34, the rotation detecting sensor 32 moves to the roller 30.
A signal corresponding to the rotation of the cable is output, and the high frequency current probe 29 detects the high frequency current in each part of the cable 34. The high frequency current detected by the high frequency current probe 29 is converted into a current spectrum by the spectrum analyzer 35 and then input to the computer 21. The output signal of the rotation detection sensor 32 is also input to the computer 21. Computer 2
1 is to sequentially calculate the amount of movement of the probe main body on the cable 34 from the output signal of the rotation detection sensor 32, and to calculate the current on the cable 34 based on the current value input from the spectrum analyzer 35 and the calculated amount of movement. Create a distribution,
Display as an image.

For example, in the case of a noise spectrum radiated from a cable (power cable or the like) of a general electronic device 36 as shown in FIG. 13 (c), f1 is the length of the cable at the wavelength λ of the noise. It is a frequency that resonates at ¼, and it becomes a standing wave having a current distribution as shown in FIG. Further, f2 is a frequency at which the length of the cable resonates at ½ of the wavelength λ of noise, which is a standing wave having a current distribution as shown in FIG. 13 (b).

As described above, according to this embodiment, a donut-shaped high-frequency current probe is used as the electromagnetic field detecting means, the rotating body is a pulley (roller), and the rotation amount of this roller is detected to detect the rotation on the cable. Since the amount of movement of the probe body is detected, the standing wave at each position on the cable can be measured, and the distribution of the standing wave on the cable can be measured.

[0053]

Since the present invention is constructed and functions as described above, according to this, the probe main body is provided with the rotating body,
Simultaneously with the detection of the electromagnetic field, the amount of movement of the probe body can be detected based on the amount of rotation of this rotating body, so it is possible to continuously detect the electromagnetic field strength at each position on the measured surface, despite its small size. Therefore, the electromagnetic field distribution can be easily measured even when the surface to be measured is narrow. Furthermore, the measurement can be performed even if the surface to be measured is a curved surface.

Therefore, a large antenna matrix,
Without using a large-scale device for moving the probe in the XY directions, the probe device of the present invention is held by the measurer's hand, and the magnetic field of the target portion is detected only by moving it on the surface to be measured. The coordinate value indicating the position of is also obtained. As a result, it is now possible to easily measure the magnetic field strength distribution in a narrow part such as the inside of the device, which was difficult to measure in the past. It can be used for structural design.

According to the second aspect of the invention, since the spherical body is used as the rotating body, it is possible to detect the two-dimensional movement amount of the probe main body and obtain the two-dimensional electromagnetic field distribution.

According to the third aspect of the invention, since the optical fiber is drawn into the probe main body and the movement amount of the probe main body can be detected by the optical signal, there is no influence of external electromagnetic noise and the detection of the movement amount is high. Can be done with precision. At the same time, it is possible to effectively prevent a situation in which the movement amount detection means electromagnetically affects the detection value of the electromagnetic field detection means, and it is possible to obtain a highly accurate detection value of the electromagnetic field strength.

According to the fourth aspect of the present invention, since the grip portion is connected to the probe main body through the pipe-shaped member, the probe main body can be easily moved by holding the grip portion in the hand and operating it.

According to the fifth aspect of the invention, since the flexible pipe is used as the pipe-shaped member, the pipe is deformed so that it can be easily operated, so that the movement of the probe main body in a state where the ball is in contact with the surface to be measured. Can be done more easily.

In the invention described in claim 6, since the wiring pulled out from the probe main body is housed inside the pipe-shaped member, it does not interfere with the operation and the optical fiber is protected from breakage such as breakage. I can protect.

In a seventh aspect of the present invention, a donut-shaped high frequency current probe is used as the electromagnetic field detecting means, the rotating body is a pulley, and the amount of rotation of this pulley is detected to detect the amount of movement of the probe body on the cable. Since the detection is performed, the standing wave at each position on the cable can be measured, and the distribution of the standing wave on the cable can be measured. Therefore, it is possible to provide an unprecedented excellent probe device in which it is possible to improve the efficiency of measures against radiation noise radiated from a cable and measures against malfunction due to static electricity.

[Brief description of drawings]

FIG. 1 is a conceptual configuration diagram showing a basic configuration of an embodiment of the present invention.

FIG. 2 is a partially cutaway perspective view showing an internal configuration of the probe main body of FIG.

3 is a cross-sectional view of the probe body of FIG.

FIG. 4 is an explanatory diagram showing a usage state of the probe main body of FIG.

5 is a perspective view showing the outer appearance of the X-direction movement detection sensor of FIG. 2. FIG.

6 is a vertical cross-sectional view of the X-direction movement detection sensor of FIG.

7 is a cross-sectional view of the X-direction movement detection sensor of FIG.

FIG. 8 is an external configuration diagram in which the probe device of FIG. 1 is connected to an external device.

9 is a vertical cross-sectional view showing the internal structure of the grip portion of FIG.

FIG. 10 is an explanatory diagram showing a method of using the probe device of FIG.

FIG. 11 is a configuration diagram showing another embodiment of the present invention,
FIG. 11A shows a perspective view of the probe body.
FIG. 11B is a view of the probe body of FIG. 11A viewed from the roller side.

12 is a block diagram showing a connection between the probe main body of FIG. 11 and an external device.

13A and 13B are explanatory views showing an example of measurement of a standing wave on a cable, FIG. 13A shows a distribution of the standing wave at a predetermined frequency f1, and FIG. 13B shows a predetermined frequency f2. 13C shows the distribution of standing waves in FIG. 13, and FIG. 13C shows the noise spectrum acquired by the spectrum analyzer.

14 is a configuration diagram showing a first modification of the electromagnetic field detection means shown in FIG.

15 is a configuration diagram showing a second modification of the electromagnetic field detecting means shown in FIG.

16 is a configuration diagram showing a third modification of the electromagnetic field detection means shown in FIG.

17 is a configuration diagram showing a fourth modification of the electromagnetic field detection means shown in FIG.

18 is a configuration diagram showing a fifth modification of the electromagnetic field detection means shown in FIG.

FIG. 19 is a configuration diagram showing a sixth modified example of the electromagnetic field detection means shown in FIG. 1.

FIG. 20 is a perspective view showing a configuration of a conventional example.

[Explanation of symbols]

 1 probe body 2 grip part 3,17 optical fiber 6 flexible pipe (pipe-shaped member) 8 electromagnetic field detecting means 9 moving amount detecting means 10 ball (rotating body) 15 rotating plate (transparent disk) 16 measured surface 23 phototransistor ( Light receiving element) 24 LED (light emitting element) 29 High frequency current probe 30 Roller A (pulley) 34 Cable (measured surface)

Claims (7)

[Claims] 1. A probe apparatus having a probe body equipped with electromagnetic field detecting means for detecting an electromagnetic field radiated from a surface to be measured, comprising: a rotating body which is in contact with the surface to be measured and rotates on the probe body. A probe device, comprising: a moving amount detecting means for detecting a moving amount of the probe body with respect to the surface to be measured based on a rotation amount of the rotating body. 2. The probe device according to claim 1, wherein the rotating body is a sphere, and the movement amount detecting means is configured to contact the sphere to detect a rotation amount of the sphere. 3. The moving amount detecting means has a plurality of slit-shaped non-transmissive portions formed in the radial direction and is provided in contact with the spherical body, and one surface and the other surface of the transparent disk. A pair of optical fibers each having one end corresponding to the surface and the other end being drawn to the outside of the probe main body; and a light emitting element for irradiating light to one surface of the transparent disk through the optical fiber. 3. The probe device according to claim 2, further comprising a light receiving element that receives the light transmitted through the other surface of the transparent disk through the optical fiber. 4. The probe device according to claim 1, wherein the probe main body is supported on one end of a pipe-shaped member, and a grip portion is provided on the other end of the pipe-shaped member. . 5. The probe device according to claim 4, wherein the pipe-shaped member is a deformable flexible pipe. 6. The probe device according to claim 4, wherein a wiring drawn from the probe main body is housed inside the pipe-shaped member, and the wiring can be connected to an external device from the grip portion. . 7. The electromagnetic field detecting means is a donut-shaped high frequency current probe, the rotating body is a pulley, and the movement amount detecting means detects a rotation amount of the pulley. The probe device according to claim 1.