JPH09307232A - Printed wiring board and manufacturing method thereof - Google Patents

Printed wiring board and manufacturing method thereof

Info

Publication number
JPH09307232A
JPH09307232A JP11810796A JP11810796A JPH09307232A JP H09307232 A JPH09307232 A JP H09307232A JP 11810796 A JP11810796 A JP 11810796A JP 11810796 A JP11810796 A JP 11810796A JP H09307232 A JPH09307232 A JP H09307232A
Authority
JP
Japan
Prior art keywords
conductor
printed wiring
tip
wiring board
hardness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11810796A
Other languages
Japanese (ja)
Inventor
Takayuki Ishikawa
孝幸 石川
Nobuhiko Fujieda
信彦 藤枝
Heijiro Yanagi
平次郎 柳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP11810796A priority Critical patent/JPH09307232A/en
Publication of JPH09307232A publication Critical patent/JPH09307232A/en
Pending legal-status Critical Current

Links

Landscapes

  • Parts Printed On Printed Circuit Boards (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Abstract

(57)【要約】 【解決手段】 所定位置に導体バンプ群を形成した支持
基体の主面に合成樹脂系シートを対接させて積層配置す
る工程と、前記積層体に合成樹脂系シートを積層配置し
たものを1次加熱、加圧しバンプ群先端を合成樹脂系シ
ートの厚さ方向に貫通、露出させる工程と、前記導体バ
ンプ群先端の貫通、露出面に導電性金属箔を積層配置す
る工程と、前記導電性金属箔を積層配置した積層体を2
次加圧して、前記導電性金属箔面にバンプ群先端を塑性
変形により接続し、貫通型導体配線部分を形成する工程
と、前記貫通型の導体配線部を形成した積層体の導電性
金属箔に、エッチング処理により、前記貫通型導体配線
部に接続するパターンを形成する工程を含むプリント配
線板の製造方法において、前記導体バンプの先端部の硬
度が前記導体バンプの支持基体側の硬度より柔らかい構
成である事を特徴とするプリント配線板の製造方法。 【効果】 プリント配線板の製造工程の簡略化を行い、
接続信頼性の高いプリント配線板及びその製造方法を提
供することができる。
(57) Abstract: A step of stacking a synthetic resin sheet on a main surface of a supporting substrate on which a group of conductor bumps is formed in contact with each other, and stacking the synthetic resin sheet on the laminate. Primary heating and pressurizing the arranged ones to pierce and expose the tip of the bump group in the thickness direction of the synthetic resin sheet, and a step of piercing and exposing the tip of the conductor bump group and laminating a conductive metal foil on the exposed surface. And a laminated body in which the conductive metal foils are laminated and arranged.
Next, a step of applying pressure to connect the tip of the bump group to the surface of the conductive metal foil by plastic deformation to form a through-type conductor wiring portion; and a conductive metal foil of a laminated body on which the through-type conductor wiring portion is formed. In a method for manufacturing a printed wiring board including a step of forming a pattern for connecting to the through-type conductor wiring portion by etching, the hardness of the tip end portion of the conductor bump is softer than the hardness of the conductor bump on the supporting base side. A method for manufacturing a printed wiring board, which is characterized in that it has a configuration. [Effect] Simplifies the manufacturing process of printed wiring boards,
A printed wiring board having high connection reliability and a method for manufacturing the same can be provided.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、プリント配線板及
びその製造方法に関するものであり、特に配線層間を貫
通型の導体配線部で接続する構成を持ち、かつ高密度な
配線及び実装が可能な信頼性の高いプリント配線板を提
供するものであり、その製造方法においては合理的に歩
留り良く製造しうる方法である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printed wiring board and a method for manufacturing the same, and in particular, it has a structure in which wiring layers are connected by a penetrating conductor wiring portion and enables high-density wiring and mounting. A highly reliable printed wiring board is provided, and the manufacturing method thereof is a method which can be manufactured reasonably with a good yield.

【0002】[0002]

【従来の技術】2層もしくは多層プリント配線板におい
ては、両面導電パターン等の配線層間の電気的接続は、
次の様にして行っている。即ち2層プリント配線板で
は、両面銅張積層板の所定位置に孔明け加工を施し、孔
内も含め全面に無電解及び電解メッキ処理を行い孔の内
壁面の金属層を厚くして、導通の信頼性を高めた配線層
間の電気的節続を行うものである。また、多層プリント
配線板の場合、基板両面に張られた銅箔を、それぞれパ
ターニングした後、そのパターン面上に、絶縁シートを
介して銅箔を積層・配置し、加熱加圧により一体化した
後、前述の2層プリント配線板と同様に、孔明け加工及
びメッキ処理による配線層間の電気的接続、表面銅箔に
ついてのパターニングを行い、多層プリント配線板を得
ている。前記プリント配線板の製造においては、配線層
間の電気的接続をメッキ法によらず行う手段として、両
面銅張積層板の所定位置に孔明けし、この孔内に導電ペ
ースト等を流し込み硬化させて、配線層間を電気的に接
続する方法も行われている。
2. Description of the Related Art In a two-layer or multi-layer printed wiring board, electrical connection between wiring layers such as double-sided conductive patterns is required.
It is done as follows. That is, in a two-layer printed wiring board, perforation is performed at a predetermined position of a double-sided copper-clad laminate, and electroless and electrolytic plating treatments are performed on the entire surface including the inside of the hole to thicken the metal layer on the inner wall surface of the hole to ensure continuity. The electrical connection between wiring layers with improved reliability is performed. In the case of a multilayer printed wiring board, after patterning the copper foils stretched on both sides of the substrate, copper foils are laminated and arranged on the pattern surfaces via an insulating sheet, and integrated by heating and pressing. After that, similarly to the above-mentioned two-layer printed wiring board, electrical connection between wiring layers by punching and plating and patterning of the surface copper foil are performed to obtain a multilayer printed wiring board. In the production of the printed wiring board, as a means for electrically connecting the wiring layers without using a plating method, a hole is made at a predetermined position of the double-sided copper-clad laminate, and a conductive paste or the like is poured into the hole and cured. A method of electrically connecting wiring layers has also been performed.

【0003】[0003]

【発明が解決しようとする課題】上記の通り、配線層間
に電気的接続にメッキ法を利用するプリント配線板の製
造方法においては、銅張積層板に配線層間の電気的接続
用の孔明け加工、孔内壁を含めたメッキ工程等を必要と
し、プリント配線板の製造工程が複雑であるという欠点
がある。一方、配線層間の電気的な接続用の孔に、導電
性ペーストを印刷等により埋め込む方法も前記メッキ法
の場合と同様に孔明け工程が必要である。しかも孔内に
均一に導電ペースト等を流し込む事が孔径が小さな場合
は特に難しく信頼性に問題があった。いずれの場合も、
前記孔明け工程を要することは、プリント配線板のコス
トや歩留り等に反映し、低コスト化等への要望に対応し
得ない欠点がある。
As described above, in a method of manufacturing a printed wiring board using a plating method for electrical connection between wiring layers, a copper clad laminate is punched for electrical connection between wiring layers. However, there is a drawback in that a plating process including the inner wall of the hole is required and the manufacturing process of the printed wiring board is complicated. On the other hand, a method of embedding a conductive paste in a hole for electrical connection between wiring layers by printing or the like also requires a hole forming step as in the case of the plating method. Moreover, it is particularly difficult to pour the conductive paste or the like into the holes even if the hole diameter is small, and there is a problem in reliability. In either case,
The necessity of the perforating step is reflected in the cost and yield of the printed wiring board, and there is a drawback that the demand for cost reduction cannot be met.

【0004】また、前記の従来法によれば、プリント配
線板の表裏面に、配線層間接続用の導電体孔が設置され
ている為、その領域に配線の形成、部品の搭載が出来ず
配線密度の向上が制約されるとともに、部品の実装密度
向上も阻害される問題がある。電子機器の小型化、軽量
化に伴い従来法によるプリント配線板の高密度配線化、
高密度実装対応は、十分なものとは言えず、より有効な
プリント配線板とその製造方法が望まれている。本発明
はこれらの状況に対応するためになされたものであり、
簡便なプロセスで、より高密度な配線及び実装が可能な
信頼性のおけるプリント配線板であり、かつこれを歩留
り良く製造する方法である。
Further, according to the above-mentioned conventional method, since conductor holes for connecting wiring layers are provided on the front and back surfaces of the printed wiring board, wiring cannot be formed and components cannot be mounted in that area. There is a problem that the improvement of the density is restricted and the improvement of the mounting density of components is also hindered. With the miniaturization and weight reduction of electronic devices, high density wiring of printed wiring boards by the conventional method,
It cannot be said that high-density mounting is sufficient, and a more effective printed wiring board and its manufacturing method are desired. The present invention has been made to address these situations,
It is a reliable printed wiring board capable of high-density wiring and mounting by a simple process, and is a method of manufacturing this with a high yield.

【0005】[0005]

【課題を解決するための手段】本発明は、所定位置に導
体バンプ群を形成した支持基体の主面に合成樹脂系シー
トを対接させて積層配置する工程と、前記積層体に合成
樹脂系シートを積層配置したものを1次加熱、加圧しバ
ンプ群先端を合成樹脂系シートの厚さ方向に貫通、露出
させる工程と、前記導体バンプ群先端の貫通、露出面に
導電性金属箔を積層配置する工程と、前記導電性金属箔
を積層配置した積層体を2次加圧して、前記導電性金属
箔面にバンプ群先端を塑性変形により接続し、貫通型導
体配線部分を形成する工程と、前記貫通型の導体配線部
を形成した積層体の導電性金属箔に、エッチング処理に
より、前記貫通型導体配線部に接続するパターンを形成
する工程を含むプリント配線板の製造方法において、前
記導体バンプの先端部の硬度が前記導体バンプの支持基
体側の硬度より柔らかい構成である事を特徴とするプリ
ント配線板の製造方法である。また、本発明は、支持基
体上に形成された導体バンプ群において、導体バンプの
支持基体側硬度と先端部の硬度が異なり先端部がより柔
らかい構成である支持基体上に形成された導体バンプ群
である。また本発明は、支持基体上に形成された導体バ
ンプ群において、導体バンプの支持基体側硬度と先端部
の硬度が異なり先端部がより柔らかい構成である支持基
体上に形成された導体バンプ群を用いたプリント配線板
である。
According to the present invention, there is provided a step of placing a synthetic resin sheet on a main surface of a supporting substrate having a group of conductor bumps formed at predetermined positions so as to be in contact with each other, and laminating the synthetic resin sheet. Primary heating and pressurizing of the stacked sheets arranged to penetrate and expose the tip of the bump group in the thickness direction of the synthetic resin sheet, and a conductive metal foil is laminated on the penetrated and exposed surface of the tip of the conductor bump group. A step of arranging, and a step of secondarily pressing the laminated body in which the conductive metal foils are laminated and connecting the tip of the bump group to the surface of the conductive metal foil by plastic deformation to form a through conductor wiring portion. In the method for manufacturing a printed wiring board, including the step of forming a pattern for connecting to the through-type conductor wiring portion by etching on the conductive metal foil of the laminated body on which the through-type conductor wiring portion is formed, Tip of bump Hardness parts is a method for manufacturing a printed wiring board, characterized in that a softer structure than the hardness of the support base side of the conductor bump. Further, the present invention provides a conductor bump group formed on a supporting base, wherein the hardness of the supporting base side of the conductor bump is different from the hardness of the tip part, and the conductor bump group is formed on the supporting base having a softer tip part. Is. Further, the present invention provides a conductor bump group formed on a supporting base, wherein the hardness of the supporting base side of the conductor bump is different from the hardness of the tip end of the conductor bump group, and the tip end is softer. This is the printed wiring board used.

【0006】[0006]

【発明の実施の形態】本発明において、導体バンプ群を
形成する支持基体とは、例えば、剥離性良好な合成樹脂
シートや導電性シート(箔)がある。この支持基体は、
1枚のシートでもパターン化されたものでも良く、特に
限定しない。
BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, the supporting substrate forming the conductor bump group includes, for example, a synthetic resin sheet or a conductive sheet (foil) having good peelability. This supporting substrate is
It may be a single sheet or a patterned sheet and is not particularly limited.

【0007】本発明において、導体バンプ群は支持基体
の一方の主面だけでは無く、両主面に形成したものでも
良い。
In the present invention, the conductor bump group may be formed not only on one main surface of the support substrate but also on both main surfaces.

【0008】本発明において、導体バンプは、合成樹脂
系シートの樹脂分が可塑状態あるいはガラス転移温度以
上にある状態での加熱加圧、即ち1次加圧段階では合成
樹脂シート等を貫通しうる程度の硬さを持ち、2次加圧
段階では先端部が塑性変形し易いように、導体バンプの
先端部の硬さが、導体バンブの支持基体側硬さより柔ら
くなる様に構成される。
In the present invention, the conductor bump can penetrate through the synthetic resin sheet or the like at the heating and pressurizing state in which the resin content of the synthetic resin sheet is in the plastic state or above the glass transition temperature, that is, the primary pressurizing step. It has a certain degree of hardness, and is configured such that the hardness of the tip of the conductor bump is softer than the hardness of the conductor bump on the side of the support base so that the tip is easily plastically deformed in the secondary pressing stage.

【0009】本発明において、導体バンプの先端部と支
持基体側の硬さに差を付ける方法は、例えば、硬化後の
硬度が異なるバンプ形成用組成物を用意し、支持基体側
に硬度の高いものを配置し、先端側に硬度の低いものを
配置するといった方法や、同一の組成物を用いても硬化
度に差を付ける様に導体バンプの支持基体側になる部分
の加熱時間を長くする方法等がある。導体バンプにおい
てこの様な構成をとることにより導体バンプと2次加圧
において接続をとる導電性金属箔との接続信頼性がより
高くなり、かつ合成樹脂系シート中に埋設された部分の
形状の変形が最小限に抑えることが可能となり、高密度
配線板の形成に効果的である。
In the present invention, the method of making the hardness of the tip end of the conductor bump different from the hardness of the supporting substrate side is, for example, to prepare a bump forming composition having different hardness after curing, and the hardness of the supporting substrate side is high. One with a low hardness is placed on the tip side, or the heating time of the portion of the conductor bump on the side of the supporting base is increased so that the curing degree is different even if the same composition is used. There are ways. By adopting such a structure in the conductor bump, the connection reliability between the conductor bump and the conductive metal foil to be connected in the secondary pressurization becomes higher, and the shape of the portion embedded in the synthetic resin sheet is improved. Deformation can be minimized, which is effective for forming a high-density wiring board.

【0010】本発明において、導体バンプは、銀、金、
銅、半田等の導電性粉末、これらの合金もしくは混合粉
末と、ポリイミド樹脂、フェノール樹脂、ポリエステル
樹脂等のバインダー成分とを混合調整した導電組成物或
いは導電性金属等で構成される。
In the present invention, the conductor bumps are silver, gold,
It is composed of a conductive composition such as copper, solder or the like, an alloy or a mixed powder thereof, and a binder composition such as a polyimide resin, a phenol resin or a polyester resin, or a conductive metal, or the like.

【0011】本発明において導電バンプの形成は、比較
的厚いメタルマスクを用いた印刷法により行われ、印刷
回数は組成の異なる構成とする為2回以上行う。その導
体バンプの高さは、特に限定するものでは無いが一般に
0.1〜0.4mm程度である。
In the present invention, the conductive bumps are formed by a printing method using a relatively thick metal mask, and the number of times of printing is two or more because the composition is different. The height of the conductor bump is not particularly limited, but is generally about 0.1 to 0.4 mm.

【0012】本発明において、前記導体バンプ群が貫通
され、貫通型の導体配線部を形成する合成樹脂系シート
とは、例えば熱可塑性シートがあり厚さは0.05〜
0.8mmが一般的である。ここで、熱可塑性シートの
例を上げると、ポリカーボネート樹脂、熱可塑性ポリイ
ミド樹脂、ポリエーテルエーテルケトン樹脂等がある。
Bステージの熱硬化性樹脂シートは、エポキシ樹脂、ポ
リイミド樹脂、フェノール樹脂、ビスマレイミドトリア
ジン樹脂等がある。これらの合成樹脂は単独でも絶縁性
無機物や有機系充填物を含有しても良く、更にガラスク
ロスやマット、有機合成繊維布やマット、或いは紙等の
補強材と組合せてなるプリプレグ系シートであっても良
い。
In the present invention, the synthetic resin sheet for penetrating the conductor bump group and forming the penetrating conductor wiring portion is, for example, a thermoplastic sheet and has a thickness of 0.05 to
0.8 mm is common. Here, examples of the thermoplastic sheet include polycarbonate resin, thermoplastic polyimide resin, and polyether ether ketone resin.
The B-stage thermosetting resin sheet includes epoxy resin, polyimide resin, phenol resin, bismaleimide triazine resin and the like. These synthetic resins may be used alone or may contain an insulating inorganic material or an organic filler, and are a prepreg-based sheet formed by combining with a reinforcing material such as glass cloth, mat, organic synthetic fiber cloth or mat, or paper. May be.

【0013】本発明において支持基体上に形成された導
体バンプ群の形状は特に限定するものではないが、例え
ば図5に示す様な円錐形状等があげられる。
In the present invention, the shape of the conductor bump group formed on the supporting substrate is not particularly limited, and examples thereof include a conical shape as shown in FIG.

【0014】本発明において、1次加圧工程は、加熱可
能な金属、耐熱性樹脂、セラミック等のローラと、加圧
したとき弾性的に変形するローラ、たとえば、ブタジエ
ン、ネオプレン等のゴム製、ポリテトラフルオロエチレ
ン樹脂製等のローラ間を通す方法が好ましい。
In the present invention, in the primary pressing step, a roller made of heatable metal, heat-resistant resin, ceramics, etc., and a roller which elastically deforms when pressed, for example, made of rubber such as butadiene or neoprene, A method of passing between rollers made of polytetrafluoroethylene resin or the like is preferable.

【0015】本発明において、1次加圧工程において合
成樹脂系シート側(導体バンプ群を形成した支持基体と
は反対側)に被押圧体を配置すると導体バンプ群の先端
がより容易にかつ確実に合成樹脂系シートを貫通させる
ことが可能となる。その材質は特に限定されるものでは
ないが例えば、シリコン系フィルム等がある。
In the present invention, when the pressed body is arranged on the synthetic resin sheet side (the side opposite to the supporting substrate on which the conductor bump group is formed) in the primary pressurizing step, the tip of the conductor bump group can be more easily and securely formed. It is possible to penetrate the synthetic resin sheet. The material is not particularly limited, but for example, a silicon film or the like is used.

【0016】本発明において、2次加圧工程は、油圧形
式の多段真空プレスやオートクレーブ型新空プレスを用
いるのが一般的である。
In the present invention, it is general to use a hydraulic type multi-stage vacuum press or an autoclave type fresh air press in the secondary pressurizing step.

【0017】本発明のプリント配線板の製造方法によれ
ば、配線層間を電気的に接続する層間の導体配線部は、
いわゆる積層一体化する工程での1次加圧により、まず
導体バンプ先端が、層間絶縁層を成す合成樹脂系シート
の所定位置を、高精度かつ確実に貫通し、2次加圧にお
いて、前記合成樹脂系シートの可塑化等と導電性金属箔
面への導体バンプ先端部の圧接による塑性変形が容易に
発生し確実な積層積層一体化と信頼性の高い配線層間の
電気的接続が達成される。即ち、プロセスの簡便化を図
り、ファインな配線層間を任意な位置に高精度に、かつ
信頼性の高い電気的接続を形成する事ができ、高密度プ
リント配線板の製造が低コストで可能となる。また前記
配線層間の電気的接続に当たり、接続孔の形成が不要で
あり、その分高密度配線高密度実装が可能となる。
According to the method for manufacturing a printed wiring board of the present invention, the conductor wiring portion between the layers for electrically connecting the wiring layers is
By the first pressurization in the so-called laminated integration process, first, the tip of the conductor bump penetrates the predetermined position of the synthetic resin sheet forming the interlayer insulating layer with high accuracy and certainty, and the second pressurization causes the above-mentioned composite press. Plastic deformation easily occurs due to plasticization of the resin-based sheet and pressure contact of the tip of the conductor bump to the conductive metal foil surface, and reliable lamination integration and reliable electrical connection between wiring layers are achieved. . That is, by simplifying the process, it is possible to form a highly accurate and reliable electrical connection between fine wiring layers at arbitrary positions, and it is possible to manufacture a high-density printed wiring board at low cost. Become. Further, it is not necessary to form a connection hole for electrical connection between the wiring layers, and accordingly, high-density wiring and high-density mounting can be realized.

【0018】[0018]

【実施例】以下、図を引用して実施例を説明する。0.
018mmの電解銅箔を支持基体1としてポリイミドを
バインダーとする銀ペースト(硬化後の硬度:Brin
ell硬度43)を、メタルマスクを用いて前記銅箔の
粗化面に印刷し、硬化後さらにポリイミドをバインダー
とする銀ペースト(硬化後の硬度:Brinell硬度
35)を、メタルマスクを用いて印刷硬化させ導体バン
プ2群を形成した(図1)。この導体バンプ2は、支持
基体側が硬く、先端部が柔らかいものである。
EXAMPLES Examples will be described below with reference to the drawings. 0.
A silver paste (hardness after curing: Brin) using 018 mm electrolytic copper foil as a support substrate 1 and polyimide as a binder
ell hardness 43) is printed on the roughened surface of the copper foil using a metal mask, and after curing, a silver paste using polyimide as a binder (hardness after curing: Brinell hardness 35) is printed using the metal mask. The conductor bumps 2 were formed by curing (FIG. 1). The conductor bump 2 is hard on the support base side and soft on the tip end.

【0019】一方、厚さが0.15mmのポリエーテル
イミド樹脂シートを合成樹脂系シート3として用意し、
前記形成した導体バンプに対向させ250℃に加熱した
金属性ローラと柔軟性ゴムローラとで構成するローラを
通し、1次加圧した(図2)。次に導体バンプの貫通し
た面に0.018mm電解銅箔(導電性金属箔)4を配
置し、あて板5を配置し(図3)、油圧型プレスで27
0℃、50kg/cm2 で60min間2次加圧した。これ
により貫通した導体配線部6を持つ両面銅張型のプリン
ト配線板用積層板を得た(図4)。これらの表面にエッ
チング法により導体回路を形成し、2層プリント配線板
を得た。これについて通常プリント配線板の検査で行う
電気検査を適用実施したが、電気的接続に全く問題無
く、また288℃、60秒の半田耐熱性試験においても
信頼性に全く問題なかった。
On the other hand, a polyetherimide resin sheet having a thickness of 0.15 mm is prepared as the synthetic resin sheet 3,
A primary pressure was passed through a roller composed of a metallic roller and a flexible rubber roller, which were opposed to the formed conductor bump and heated to 250 ° C. (FIG. 2). Next, a 0.018 mm electrolytic copper foil (conductive metal foil) 4 is placed on the penetrating surface of the conductor bump, a contact plate 5 is placed (FIG. 3), and a hydraulic press 27
Secondary pressure was applied at 0 ° C. and 50 kg / cm 2 for 60 minutes. As a result, a double-sided copper clad laminate for a printed wiring board having a conductor wiring portion 6 penetrating was obtained (FIG. 4). Conductor circuits were formed on these surfaces by an etching method to obtain a two-layer printed wiring board. An electrical inspection, which is usually performed by inspecting a printed wiring board, was applied to this, but there was no problem in electrical connection, and there was no problem in reliability in a solder heat resistance test at 288 ° C. for 60 seconds.

【0020】[0020]

【発明の効果】本発明によれば、プリント配線板の製造
工程の簡略化を行いつつ、接続信頼性の高い2層プリン
ト配線板ないし多層プリント配線板及びその製造方法を
提供することができる。特に工程の長い多層プリント配
線板においては、大きな工程簡略化となり生産性の工場
に効果が大きい。そして従来工法での孔明けメッキ工程
が不要となり、製造工程で発生する不良が低減できる。
また本発明のプリント配線板は層間接続孔が無いので、
配線密度の格段な向上を図り得るし、部品実装密度の向
上も期待できる。
According to the present invention, it is possible to provide a two-layer printed wiring board or a multilayer printed wiring board having high connection reliability and a manufacturing method thereof while simplifying the manufacturing process of the printed wiring board. In particular, in the case of a multi-layer printed wiring board having a long process, the process is greatly simplified and the effect on the factory of productivity is great. Then, the hole-drilling plating step in the conventional method is not necessary, and defects occurring in the manufacturing process can be reduced.
Further, since the printed wiring board of the present invention has no interlayer connection hole,
The wiring density can be remarkably improved, and the component mounting density can also be expected to be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】支持基体に導体バンプ群を形成した段階を示す
断面図
FIG. 1 is a sectional view showing a stage in which a conductor bump group is formed on a supporting base.

【図2】合成樹脂系シートを、図1で形成した導体バン
プ群を形成した支持基体に導体バンプ群側に対向させ金
属性と柔軟性のものから構成するローラを通し、1次加
圧した段階を示す断面図
FIG. 2 is a view showing that a synthetic resin sheet is placed on a supporting substrate having a conductor bump group formed in FIG. Sectional view showing steps

【図3】図2で形成した合成樹脂系シートと導体バンプ
群を持つ支持基体を1次加圧したもののバンプが貫通し
た面に導電性金属箔を配置しあて板を配置し2次加圧を
行う段階の断面図
FIG. 3 is a diagram in which the synthetic resin sheet formed in FIG. 2 and the supporting base having the conductor bump group are primarily pressed, but a conductive metal foil is arranged on the surface through which the bumps penetrate, and a pressing plate is arranged and the second pressing is performed. Sectional view of the stage

【図4】図3の段階のものを2次加圧し形成した貫通し
た導体配線部を持つ積層板の断面図
FIG. 4 is a cross-sectional view of a laminated board having through conductor wiring portions formed by secondarily pressing the one in the stage of FIG.

【図5】支持基体上に形成された硬度の異なる構成の導
体バンプの断面図
FIG. 5 is a cross-sectional view of conductor bumps having different hardnesses formed on a support base.

【符号の説明】[Explanation of symbols]

1 支持基体 2 導体バンプ 3 合成樹脂系シート 4 導電性金属箔 5 あて板 6 貫通した導体配線部 7 導体バンプ先端部(符号8の部分より柔らかい) 8 導体バンプ支持基体側(符号7の部分より硬い) 1 Support Base 2 Conductive Bump 3 Synthetic Resin Sheet 4 Conductive Metal Foil 5 Contact Plate 6 Conductor Wiring Part 7 Penetrating Conductor Bump Tip (Softer than Part 8) 8 Conductor Bump Support Base Side (from Part 7) hard)

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 所定位置に導体バンプ群を形成した支持
基体の主面に合成樹脂系シートを対接させて積層配置す
る工程と、前記積層体に合成樹脂系シートを積層配置し
たものを1次加熱、加圧しバンプ群先端を合成樹脂系シ
ートの厚さ方向に貫通、露出させる工程と、前記導体バ
ンプ群先端の貫通、露出面に導電性金属箔を積層配置す
る工程と、前記導電性金属箔を積層配置した積層体を2
次加圧して、前記導電性金属箔面にバンプ群先端を塑性
変形により接続し、貫通型導体配線部分を形成する工程
と、前記貫通型の導体配線部を形成した積層体の導電性
金属箔に、エッチング処理により、前記貫通型導体配線
部に接続するパターンを形成する工程を含むプリント配
線板の製造方法において、前記導体バンプの先端部の硬
度が前記導体バンプの支持基体側の硬度より柔らかい構
成である事を特徴とするプリント配線板の製造方法。
1. A step of laminating and placing a synthetic resin sheet on a main surface of a supporting substrate on which a group of conductor bumps are formed at predetermined positions, and a step of laminating a synthetic resin sheet on the laminated body. Next, heating and pressurizing to penetrate and expose the tip of the bump group in the thickness direction of the synthetic resin sheet; piercing the tip of the conductor bump group and placing a conductive metal foil on the exposed surface; 2 layers of laminated metal foil
Next, a step of applying pressure to connect the tip of the bump group to the surface of the conductive metal foil by plastic deformation to form a through-type conductor wiring portion; and a conductive metal foil of a laminated body on which the through-type conductor wiring portion is formed. In a method for manufacturing a printed wiring board including a step of forming a pattern for connecting to the through-type conductor wiring portion by etching, the hardness of the tip end portion of the conductor bump is softer than the hardness of the conductor bump on the supporting base side. A method for manufacturing a printed wiring board, which is characterized in that it has a configuration.
【請求項2】 支持基体上に形成された導体バンプ群に
おいて、導体バンプの支持基体側硬度と先端部の硬度が
異なり先端部がより柔らかい構成である支持基体上に形
成された導体バンプ群。
2. A conductor bump group formed on a supporting base, wherein the hardness of the supporting base side of the conductor bump is different from the hardness of the tip end of the conductor bump, and the tip end is softer.
【請求項3】 支持基体上に形成された導体バンプ群に
おいて、導体バンプの支持基体側硬度と先端部の硬度が
異なり先端部がより柔らかい構成である支持基体上に形
成された導体バンプ群を用いたプリント配線板。
3. A conductor bump group formed on a support base, wherein the conductor bump group formed on a support base is such that the hardness of the support base side of the conductor bump is different from the hardness of the tip part, and the tip part is softer. Printed wiring board used.
JP11810796A 1996-05-13 1996-05-13 Printed wiring board and manufacturing method thereof Pending JPH09307232A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11810796A JPH09307232A (en) 1996-05-13 1996-05-13 Printed wiring board and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11810796A JPH09307232A (en) 1996-05-13 1996-05-13 Printed wiring board and manufacturing method thereof

Publications (1)

Publication Number Publication Date
JPH09307232A true JPH09307232A (en) 1997-11-28

Family

ID=14728198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11810796A Pending JPH09307232A (en) 1996-05-13 1996-05-13 Printed wiring board and manufacturing method thereof

Country Status (1)

Country Link
JP (1) JPH09307232A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000216522A (en) * 1999-01-20 2000-08-04 Sony Chem Corp Flexible board and manufacture thereof
KR100548607B1 (en) * 2002-02-18 2006-01-31 소켓스트레이트, 인코포레이티드 Member for connection between wiring films, method for manufacturing same and method for manufacturing multilayer wiring board

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000216522A (en) * 1999-01-20 2000-08-04 Sony Chem Corp Flexible board and manufacture thereof
KR100548607B1 (en) * 2002-02-18 2006-01-31 소켓스트레이트, 인코포레이티드 Member for connection between wiring films, method for manufacturing same and method for manufacturing multilayer wiring board

Similar Documents

Publication Publication Date Title
JP3654982B2 (en) Manufacturing method of multilayer printed wiring board
JPH06342977A (en) Manufacture of printed circuit board
JPH08139450A (en) Method for manufacturing printed wiring board
JP3428070B2 (en) Manufacturing method of printed wiring board
JP3474894B2 (en) Printed wiring board and manufacturing method thereof
JP3431259B2 (en) Manufacturing method of printed wiring board
JPH0923067A (en) Multilayer printed wiring board and method of manufacturing the same
JP3609126B2 (en) Printed wiring board and method for producing printed wiring board manufacturing member
JP3167840B2 (en) Printed wiring board and method for manufacturing printed wiring board
US20080308304A1 (en) Multilayer Wiring Board and Its Manufacturing Method
JP3474896B2 (en) Printed wiring board and manufacturing method thereof
JPH08264939A (en) Method for manufacturing printed wiring board
JPH1070363A (en) Manufacturing method of printed wiring board
JPH0946041A (en) Method for manufacturing printed wiring board
JPH11251703A (en) Circuit board, double-sided circuit board, multilayer circuit board, and method of manufacturing circuit board
JP3474913B2 (en) Manufacturing method of printed wiring board
JP3694708B2 (en) Printed wiring board manufacturing method and printed wiring board
JPH09307232A (en) Printed wiring board and manufacturing method thereof
JPH1187912A (en) Manufacturing method of double-sided wiring board
JP3549063B2 (en) Manufacturing method of printed wiring board
JP3628313B2 (en) Printed wiring board and manufacturing method thereof
JPH11112147A (en) Multilayered printed wiring board
JP4014667B2 (en) Manufacturing method of multilayer printed circuit board
JPH09307231A (en) Laminated board, printed wiring board and manufacturing method thereof
JP2000208946A (en) Multilayer wiring board and method of manufacturing the same