JPH0944332A - Device and method for menu generation display - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device and a method for menu generation display capable of freely generating menu constitution fitted in the kind of a user by the user. SOLUTION: Plural users using the device are divided into plural kinds, and each kind (user level) and a password in accordance with the kind are stored variably in a user level storage part 54A, and also, plural basic functions are stored in a basic function storage part 54B. The basic function corresponding to each user level is selected, respectively, and it is related hierarchically, and such correspondence relation is stored in a set data storage part 54C as set data. Moreover, plural user levels are read out, and a first menu is generated based on the user level by a first menu generating part 51B1, and also, the basic function in accordance with the user level is read out based on the set data at every user, and a second menu is generated by a second menu generating part 54B2 by such basic function.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a menu creation display device and method in a device for combining a plurality of basic functions to perform a predetermined process, and more particularly to a human interface between a user such as an operator and a host engineer and the device. Relates to a technique of creating a menu for providing various commands and information and displaying the menu.

[0002]

2. Description of the Related Art In an apparatus of this type, for example, a substrate processing apparatus, resist coating and related processing are sequentially performed on a substrate such as a semiconductor wafer or a glass substrate for a liquid crystal display device to perform desired substrate processing. To be executed. In order to perform this desired substrate processing, it is necessary to appropriately combine a plurality of basic functions of the substrate processing apparatus, and the operator selects these basic functions before executing the substrate processing.
Further, it is necessary to give an appropriate command to the substrate processing apparatus as needed even during the substrate processing. further,
In addition to operators, host engineers, equipment engineers,
Users such as service engineers and special operators may give instructions and information to the substrate processing apparatus as appropriate.

Therefore, in order for the user to provide such information, the substrate processing apparatus displays basic functions in a menu format on a display unit such as a liquid crystal panel or a CRT, and the user selects and inputs the basic functions. You can do it.

[0004]

However, in the conventional device, the basic functions are classified into a plurality of types at the design stage of the device and displayed on the display unit in a hierarchical menu. That is, all the classification items are displayed on the display unit as the first menu, and when one of the classification items is selected, all the basic functions assigned to the selected classification item are displayed on the display unit as the second menu. To display.
Thus, in the past, only a single menu structure was prepared, and multiple types of users (for example, operator, host engineer, equipment engineer, service engineer, and special operator) all use the menu to perform basic functions. You can select and enter.

Therefore, when a certain type of user, for example, an operator, selects an appropriate classification item from the first menu, all the basic functions belonging to the selected classification item are displayed on the display unit. Basic functions that have nothing to do with me are also displayed in the second menu,
This is a cause of poor operability.

[0006] Among the basic functions, there are basic functions that are used only by a specific user and are not desired to be used by other users. For example, certain basic functions that a service engineer uses only to repair a device.

Moreover, the manner in which a device is used often depends on the company, factory or section in which it is used, so it is not possible to satisfy all of them with a single menu configuration. Therefore, conventionally, there has been a demand for an apparatus that can flexibly cope with the menu structure for each place of use as needed.

In view of the above problems, it is a first object of the present invention to provide a menu creation display device and method by which the user can freely create a menu structure according to the type of user.

[0009] In addition to the first object, the present invention provides:
The second is to improve the operability by displaying the second menu composed of only the basic functions required for each user.
The purpose of.

In addition to the above first and second objects, the present invention has a third object to improve the operability of the apparatus by the user by arbitrarily setting the type of user. .

Further, in addition to the above first, second and third objects, a fourth object of the present invention is to ensure security.

[0012]

According to a first aspect of the present invention, there is provided a menu creating and displaying device in a device for performing a predetermined process by combining a plurality of basic functions. A plurality of types of users who use the above are divided into a plurality of types, user level storage means for storing each type as a user level, basic function storage means for storing the plurality of basic functions, the plurality of user levels and the Selection input means for accepting selections from the outside for a plurality of basic functions, and editing means for hierarchically associating the user level input via the input means with the basic functions and editing setting data indicating the corresponding relationship. Setting data storage means for storing the setting data, menu creating means for creating a hierarchical menu based on the setting data, and the hierarchical menu And display means for displaying the over, a.

According to a second aspect of the present invention, in order to achieve a second object, the menu creating means reads out the plurality of user levels from the user level storing means, and the first menu is displayed by those user berels. First menu creating means to be created, and basic functions corresponding to the user level selected through the input means for the first menu are read from the basic function storing means based on the setting data, and the basic functions are read by the basic functions. And a second menu creating means for creating a second menu.

In order to achieve the third object, the invention of claim 3 further comprises a user level setting input means for setting and inputting the type of the user level, and the user level storing means for inputting the user level setting. The user level type input from the means is variably stored.

According to a fourth aspect of the present invention, in order to achieve the fourth object, the user level storage means has a password storage means for storing a password corresponding to the user level. Further, the menu creation / display device is configured by a password setting means for setting and inputting the password, a password input means for accepting an input of a password from a user, a password stored in the password storage means, and an input by the password input means. It further comprises control means for collating the generated password and permitting the second menu generation means to generate the second menu only when the two match.

According to a fifth aspect of the present invention, in a device for performing a predetermined process by combining a plurality of basic functions, there is provided a menu creating and displaying method for creating a hierarchical menu according to a type of a user who uses the device. In order to achieve the first object, a plurality of users who use the apparatus are divided into a plurality of types, each type is stored as a user level, and a step of storing the plurality of basic functions, Selecting a basic function corresponding to each user level, hierarchically associating the user level and the basic function, and storing the corresponding relationship as setting data, and reading out the plurality of user levels, The step of creating the first menu by the above, and for each user level, read the basic function corresponding to the user level based on the setting data, And a, a step of creating a second menu by the basic function of al.

According to a sixth aspect of the invention, in order to achieve the second object, the step of displaying the first menu on the display means of the device, and the first menu displayed on the display means are specified from the outside. When the user level of is selected,
And a step of displaying a second menu corresponding to the selected user level.

In order to achieve the third object, the invention of claim 7 sets and inputs the type of the user level,
And storing the type of the user level that has been set and input.

In order to achieve the fourth object, the invention of claim 8 sets a password corresponding to the user level, stores the password, and receives an input of the password from a user. And a step of collating the entered password with the stored password, and only when the two match, the second password
Create a menu.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION In this specification, first, an outline of a substrate processing apparatus, which is an example of an apparatus to which the menu creating and displaying method according to the present invention is applicable, will be described, and then the menu creating and displaying method according to the present invention will be described. To do.

A. 1. Outline of Substrate Processing Apparatus: FIG. 1 is an external perspective view of a substrate processing apparatus 100 to which a menu creation display device and method according to the present invention can be applied. In order to clarify the directional relationship with each figure described later, FIG. , XYZ Cartesian axes are shown. In addition, FIG.
FIG. 3 is a conceptual plan layout diagram of

In this apparatus 100, when the cassette 10 containing a lot of semiconductor wafers 1 (FIG. 2) is loaded onto the indexer ID, the semiconductor wafers 1 are sequentially taken out from the cassette 10, and the first and first semiconductor wafers 1 are taken out. The second processing unit group (processing unit row) 110, 120 is circulated and conveyed to the respective processing units, and these processing units are configured to automatically perform a series of processes. The cassette 10 and the semiconductor wafer 1 are not shown in FIG.

The first and second processing unit groups 110 and 120 are arranged in substantially parallel two rows, and the semiconductor wafer 1 is connected to an external device, for example, a stepper, on the side opposite to the indexer ID during the cyclic transfer. An interface IFB is provided as a substrate mounting table for temporarily mounting for delivery. The first processing unit group 110 has a hot plate for performing heat treatment, a cool plate for performing cooling treatment, and the like, while the second processing unit group 120 has a spin coater (rotary resist coating device) as shown in FIG. SC and spin developer (rotary developing device) SD1, SD
Two. In addition, the first and second processing unit groups 110,
In order to transfer the semiconductor wafer 1 between 120, a transfer section array 140 is attached to the lower stage of the first processing section group 110. Then, the two transfer robots TH and TC cooperate to circulate and transfer the semiconductor wafer 1 and to and from the semiconductor wafer 1.

FIG. 3 is a block diagram showing the electrical construction of the apparatus 100 of FIG. In this device, in addition to the control unit 51, an operation unit 52 that functions as a part of an input unit that gives a command or information to the control unit 51 by a device manager or a user.
And a display unit 53 for transmitting the progress status of the process and the occurrence of an abnormality to the user. The operation unit 52 and the display unit 53 are, as shown in FIG.
It is provided in front of D. In addition, in this embodiment, the display unit 53 is a touch panel and also functions as an input means. When a device administrator or a user touches a part of the display screen as described later, the display content of the corresponding screen part is displayed. Therefore, a command or the like is given to the control unit 51 of the apparatus. In this embodiment, five types of users, namely operators, host engineers, equipment engineers, service engineers, and special operators will be described as users, but the names of the types of users and the number of types are the same. It is not limited to.

Further, in this apparatus 100, an external magnetic storage unit 54 is provided as a storage means. In addition to the control program, the external magnetic storage unit 54 stores a user level, a password, basic functions, and setting data. User level storage unit 54 of external magnetic storage unit 54
In A, as shown in FIG. 4, a plurality of users who use the apparatus 100 are divided into five types or less, and each type is stored in advance as a user level initial setting, and a user level name storage unit 54N, The password storage unit 54P stores the password registered for each user level in association with each user level name. At the shipping stage of the apparatus 100, five types of operators, host engineers, equipment engineers, service engineers, and special operators are set as the default user level name storage unit 54N.
Is temporarily set and only the password of the service engineer is registered as the password, and the other user level passwords are not registered. In addition, basic functions of the apparatus 100 (lot start, lot cancel, lot counter reference, etc.) are stored in advance in the basic function storage unit 54B. Further, the setting data storage unit 54C stores setting data by the editing unit of the control unit 51 described below.

As shown in FIG. 4, the control unit 51 hierarchically associates the user level input through the operation unit 52 with the basic function, and sets the setting data indicating the corresponding relationship, due to the configuration of the software program. An editing unit 51A that edits and writes in the setting data storage unit 54C, and a menu creating unit 51B that creates a hierarchical menu based on the setting data are provided.

The menu creating section 51B reads all user levels from the user level storage section 54A,
A first menu creation unit 51B1 that creates a first menu according to those user levels and a basic function corresponding to the user level selected via the display unit 53 for the first menu are stored in the setting data storage unit 54C. Based on the setting data, read from the basic function storage unit 54B,
And a second menu creation unit 51B2 that creates a second menu by these basic functions.

Returning to FIG. 3, the description of the electrical configuration will be continued. Sensors 55 that detect the status of each part of the apparatus and give the information to the control unit 51 are connected to the control unit 51. Further, a transfer control unit 56 for controlling the drive of each transfer robot TH, TC based on a command from the control unit 51.
Is provided. The processing unit control unit 57 also controls the drive of each processing unit based on the command from the control unit 51. Further, the chemical liquid control unit 58 includes a spin coater S that constitutes the first processing unit group 110 from a chemical liquid supply unit (not shown).
The supply of the chemical solution to C is controlled.

B. Menu Creation and Display Method: FIGS. 5 to 10 are flowcharts showing an example of the menu creation and display method according to the present invention. Hereinafter, the user registration procedure, the password registration procedure, the menu creation procedure, and the function selection procedure according to the created menu display will be sequentially described with reference to these drawings.

First, when a customer who uses the apparatus 100 creates a menu, the apparatus manager, in this embodiment, an equipment engineer plans the menu structure in step S1a. That is, the number and name of each user level type,
The basic function corresponding to each user level password and each user level is examined and determined to which position on the screen of the display unit 53 is to be assigned.

After this determination, the initial screen is displayed on the display unit 53 (FIG. 5: step S1b). FIG. 11 shows the display unit 53.
It is a figure which shows the initial state of the screen of FIG. This screen is the display unit 5
3 is a screen displayed in 3, and the upper part is a display area 53U showing the current state of the system of the apparatus 100.
It is. Also, the lower row shows all user levels except the service engineer as the first menu (four types of names are operator, host engineer, equipment engineer, and special operator in the initial setting of this embodiment).
Is a display area 53L in which is displayed, and button displays 61, 62, 63, 6 in which the user level is displayed as a selection branch
4 are arranged, and each button display 61, 62, 63,
If you touch 64, operator as user level,
The host engineer, equipment engineer, and special operator are selected. Further, the middle row is a display area 53M in which a second menu indicating a basic function selected corresponding to the user level and selection branches at the menu creation stage are displayed as will be described later, and the second menu is displayed. In this display area 53M, 15 display fields 71D to 85D are arranged in the display area 53M, and selection buttons 71B to 85B are arranged on the left side of the respective display fields 71D to 85D. Has been done. For example, when "equipment engineer" is selected as the user level, a second menu for equipment engineers as shown in FIG. 12 is displayed, and when buttons 71B to 85B are touched,
The basic function displayed adjacent to the right is selected. The figure shows the initial state, and the display columns 71D to 85D display the basic functions according to the recommended menu at the shipping stage of the apparatus 100 in advance.

Returning to FIG. 5, when the initial screen in step S1b is displayed, the device manager (in this embodiment, a facility engineer) touches the button 63 on the initial screen in FIG. 11 to display it in FIG. After displaying the second menu of the facility engineer (steps S1c and S1d), the selection button 8 on the left side of the display field 83D displayed as "user registration"
User registration is selected by touching 3B, and user registration is performed (steps S1e, S2).
a). FIG. 7 is a flowchart showing the procedure of user registration. In step S21, a user registration screen as shown in FIG. 13 is displayed. In the user registration screen, a display box 91 displaying "user registration" is displayed on the entire surface in a display area 53M in the middle, and further, in this display box 91, (1) a display column 9 displaying "number of user registrations" is displayed.
1A, (2) Four user display columns 91B to 91E, which are displayed as "user 1" to "user 4", respectively (3)
Display button 91F displayed as "End", (4) Display button 91G displayed as "Save settings", (5) Display button 91H displayed as "Edit", (6) Displayed as "Help" A display button 91I is arranged.

When the device manager touches the display button 91H, steps S22 and S23 are executed to input the number and names of types at the user level. In this embodiment, the number of user levels can be registered from 1 to 5 including the service engineer. If one type of user registration is sufficient, only one level is required, and a plurality of levels are required. The user can register the necessary amount.
In the following example, the user level is "Operator", "Host engineer" and "Equipment engineer".
Consider the case where the "host engineer" is changed to "main engineer" while registering the three levels.

In step S22, the number of types of user levels is input through the operation unit 52, and the input number of user levels is displayed in the display column 91A. Next, in step S23, a name input field corresponding to the number of types of user levels input via the operation unit 52 is displayed in the display fields 91B to 91E according to the number of user levels. The names initially displayed in the display fields 91B to 91E are preset names as defaults, and the device administrator sets or renames any user level by modifying or overwriting the default names. can do. For example, in the example considered here, “3” is input as the number of types at the user level, and the number is displayed in the display field 9
In addition to being displayed in 1A, three types of user levels, that is, names of “operator”, “host engineer”, and “facility engineer” are initially displayed in the display columns 91B to 91D. For example, when the equipment manager wants to change the name of “host engineer” to “main engineer”, move the cursor to the display field 91C and then use the keyboard included in the operation unit 52 of FIG.
If you enter "r", the display in this display field 91C will be "Host En
Changed from "gineer" to "Main Engineer". Then, in step S24, the device administrator “saves the setting”.
It is determined whether the button 91G displayed as "" or the button 91F displayed as "END" is touched.

If the device administrator touches the button 91G displayed as "Save setting" in step S24, the process proceeds to step S25, and a name corresponding to the number of user levels input as described above is displayed. 4 is registered in the user level name storage unit 54N secured in the user level storage unit 54A of the external magnetic storage unit 54. In the example considered here, the name of “host engineer” is changed to “main engineer”, so the user level storage unit 54
The name of the "host engineer" stored in A is changed to "main engineer". Further, in this example, since the "special operator" is not registered, the name of the "special operator" stored in the user level name storage unit 54N is deleted.

On the other hand, when the device administrator touches the button 91F displayed as "END" in step S24, the "user registration" ends. As shown in FIG. 7, in this embodiment, as long as the button 91 is not touched and "End" is selected, input or correction can be repeated any number of times.

When the screen of FIG. 13 is displayed and the device administrator touches the display button 91I displayed as "HELP" while steps S21 to S25 are being executed, the process in the middle of execution is interrupted. However, an explanation about the processing is displayed. Although not shown in the figure, a “Cancel” display button is displayed on the screen along with the explanation display. However, if the device administrator touches this “Cancel” display button after reading the explanation, the “Help” It returns to the state before touching the display button 91I.

When the user registration is completed as described above, the equipment engineer's second menu screen is displayed again (FIG. 5: step S2b). FIG. 14 shows the menu screen at this stage. Here, from the default “Host Engineer” to “Main Enginee” in the display of FIG.
It has been revised to "r" and did not register "Speci
The display of "al Operator" has been deleted.

Next, the device administrator touches the selection button 80B on the left side of the display field 80D in which "Password setting" is displayed, whereby the password setting is selected (FIG. 5: step S2c), and step S3a is selected. The password is set after migration. FIG. 8 is a flowchart showing a procedure for setting a password. In step S31, FIG.
A password setting screen as shown in 5 is displayed. In the password setting screen, a display box 92 in which "Password setting" is displayed in the middle display area 53M is partially overlapped and displayed on the facility engineer's menu screen. This display box 92 has a message 92A summarizing the procedure to be performed at the time of (1) "password setting", and (2) step S2a.
The user level registered in the user level display boxes 92B to 92D, (3) display button 92E displayed as "End", (4) display button 92F displayed as "Save settings", (5) Display button 92G displaying "Edit", (6) Display button 9 displaying "Help"
2H is arranged.

The device manager touches the display button 92G to enter the edit state, and step S32
Is executed to select the user level name. The selection of the user level name is performed via the operation unit 52, and in the subsequent step S33, the password input for each user level via the keyboard (not shown) in the operation unit 52 is displayed in the display fields 92B to 92D. .

Then, in step S34, it is determined whether the device administrator has touched the button 92F displayed as "save setting" or the button 92E displayed as "end". If the device administrator touches the button 92F displayed as "Save setting" in step S34, the process proceeds to step S35, and the password corresponding to the user level name input as described above is stored in the external magnetic storage unit. It is registered in the corresponding user level column of the password storage unit 54P secured in the user level storage unit 54A of 54.

On the other hand, when the device administrator touches the button 92E displayed as "END" in step S34, the "password setting" ends. As shown in FIG.
In this embodiment, unless the button 92E is touched to select "end", input or correction can be repeated any number of times. Note that when the display button 92H displayed as "Help" is touched, the explanation regarding each process is displayed in the same manner as the display button 91I on the user registration screen of FIG.

When the password setting is completed as described above, the second menu screen of the equipment engineer of FIG. 14 is displayed again (FIG. 6: step S3b), and the device manager touches the button 71B to select the user function. Then (FIG. 6: step S3c), as shown in FIG. 16, the display box 93 displaying “user function selection” in the middle display area 53M is partially overlapped and displayed on the second menu. Then, step S4
a is executed and basic functions are assigned.

FIG. 9 is a flowchart showing the procedure of menu registration. In step S41, the three display buttons displayed in the display box 93, that is, (1) the display button 93A displayed as "menu enable setting", and (2) the display button displayed as "menu display position setting" 93B,
(3) When the device administrator selects and touches the display button 93A among the display buttons 93C displayed as "close", steps S42 to S45 are executed to associate the user level with the basic function. , Display button 9 again
When 3B is selected and touched, steps S46 to S49
Is executed to determine the display position of the basic function in the menu, and when the display button 93C is selected and touched, the menu registration process is ended and the display returns to the facility engineer second menu screen display state of FIG.

When the display button 93A is selected in step S41, as shown in FIG. 17, the middle display area 53M is displayed.
Display box 9 with "Menu enablement" displayed in
4 is displayed on the entire surface. In this display box 94,
(1) Message 94A summarizing the procedure to be performed at the time of "menu enable setting", (2) Select button group 94B consisting of three select buttons for selecting and setting the user level, (3) For all basic functions Check box group 94C consisting of check boxes for selecting and setting the basic function assigned to the user level selected by the select button from the inside, (4) Display button 94D displaying "Save settings", (5) "End" Display button 94E displayed as "", (6) Display button 94 displayed as "Help"
F is arranged.

Then, in step S42, the device administrator adjusts the black circles in the select button group 94B so that they are located at the selected user level. For example, as shown in the figure, when the operator with the black circle is the operator level and the user level you want to select is "Operator", you can move to the next step without moving the black circle. Proceed to S43. On the other hand, when the user level to be selected is other than “operator”, the black circle mark is moved to “main engineer” or “facility engineer”. As described above, in this menu setting example, the user level is selected and input by adjusting the position of the black circle in the select button group 94B.

In step S43, the device administrator checks the check box corresponding to the basic function assigned to the user level selected in step S42 in the check box group 94C. In the figure,
The basic functions of the boxes marked with an X are valid.
If the check box is not marked with an X,
Its basic function is invalid. In this way, the basic function for the selected user level is selected and input.

Then, in step S44, it is determined whether the device administrator has touched the display button 94D displayed as "setting save" or the display button 94E displayed as "end".

If the "Save settings" display button 94D is selected in step S44, the flow advances to step S45.
The user level selected and input as described above is associated with the basic function, and the setting data indicating the corresponding relationship is registered and stored in the setting data storage unit 54C of the external magnetic storage unit 54. Then, the process returns to steps S42, S43 and S44.
That is, in this embodiment, the selection input of the user level in step S42 and the setting of the basic function in step S43 are continuous regardless of the order thereof until the "end" display button 94E is selected in step S44. Display button 9 for "save settings" in step S44.
Each time 4D is selected, it is saved in the setting data storage unit 54C of the external magnetic storage unit 54. Therefore, step S
At 42, "operator", "main engineer", and "equipment engineer" can be selected respectively, and corresponding basic functions can be selected at step S43 for each user level. It can be stored in the setting data storage unit 54C of the unit 54.

On the other hand, when the "end" display button 94E is selected in step S44, the "menu enable setting" ends, the process proceeds to step S41, and the display unit 53 returns to the display state of FIG.

As in the case of user registration and password registration, the screen of FIG. 17 is displayed, and while the steps S42 to S45 are being executed, the device administrator clicks the display button 94F displaying "HELP". When you touch
A process in the middle of execution is interrupted and an explanation about the process is displayed.

Further, in step S41, the display button 93B is displayed.
When is selected, as shown in FIG. 18, the display box 95 in which "Menu display position setting" is displayed in the middle display area 53M is displayed on the entire surface. This display box 95
, (1) Message 95A summarizing the procedure to be performed at the time of "setting the menu display position", (2) select the user level,
A select button group 95B consisting of three select buttons for setting, (3) a list box 95C in which basic functions assigned to the selected user level are listed in order in the vertical direction, (4) menu display position is reduced. The position box 95D displayed, (5) the display button 95E displayed as "setting save", (6) the display button 95F displayed as "end", and (7) the display button 95G displayed as "help" It is arranged.

Then, in step S46, step S4
Similar to 2, the device administrator adjusts the position of the black circles in the select button group 95B and selects and inputs the user level.

In step S47, the device administrator sets the display position of the menu in the position box 95D. With this setting, it is determined in which display field of the second menu in FIG. 14 the basic function assigned is displayed.

Then, in step S48, it is determined whether the device administrator has touched the display button 95E displayed as "save setting" or the display button 95F displayed as "end".

If the "Save settings" display button 95E is selected in step S48, the flow advances to step S49,
Information regarding the display position selected and input as described above is registered and stored in the setting data storage unit 54C of the external magnetic storage unit 54. Then, steps S46, S47, S48
Return to That is, in this embodiment, step S46.
Regardless of the order, the user level selection input and the display position setting in step S47 are continuously performed until the "end" display button 95F is selected in step S48, and "setting" is performed in step S48. Each time the display button 95E of "Save" is selected, it is saved in the setting data storage unit 54C of the external magnetic storage unit 54. Therefore, in step S42, "operator", "main engineer", and "equipment engineer" are selected, and the information about the display position for each user level is stored in the external magnetic storage unit 5.
4 can be stored in the setting data storage unit 54C.

On the other hand, when the "end" display button 95F is selected in step S48, "menu display position setting" is performed.
Ends, the process proceeds to step S41, and the display unit 53 displays
Returns to the display state of.

When the device manager touches the "close" display button 93C in step S41, "menu enable setting" and "menu display position setting" are completed, and the equipment engineer second menu screen display of FIG. 14 is completed. Return to the state.

As described above, in this embodiment, the device administrator can arbitrarily set the number of user levels and their names, and the user levels stored in the external magnetic storage unit 54 are passwords corresponding to the user levels and the user levels. Part 5
4A, basic functions corresponding to each user level are respectively selected, the user levels and basic functions are hierarchically associated with each other, and the correspondence is stored as setting data in the setting data storage of the external magnetic storage unit 54. Part 54
Stored in C. The display position of each basic function is also set and input by the device administrator, and the external magnetic storage unit 5
No. 4 setting data storage unit 54C. Therefore, the user can freely create a menu structure according to the type of user on the customer side.

Since the service engineer does not need to be set by the customer, the service engineer cannot change the name, the password or the menu registration.

When the menu creation and registration are completed as described above, the initial screen reflects the contents of the user registration on the display contents of the lower stage 53L of the display unit 53 as shown in FIG. Menu creation is completed, device 1
When the operation of 00 is started, the user (any one of the operator, the main engineer, and the facility engineer) selects a menu according to the menu created as described above in step S5 of FIG. Give commands and information.

That is, as shown in FIG. 10, in step S51, the user selects the user level corresponding to himself / herself from the first menu (button display 61, 62, 63) displayed on the lower stage 53L of the display unit 53. When the display button is touched, the setting data corresponding to the selected user level is read from the setting data storage unit 54C (step S5).
2). If the password is registered and saved, a password input request screen (not shown) is displayed and the operation unit 5
The user enters the password via 2 (step 5
4) The password is collated with the password stored in the user level storage 54A (step 55). If the entered password does not match the password stored in the user level storage unit 54A, the second menu is not displayed (step 58). On the other hand, if the passwords match or if the passwords are not registered and saved, the basic functions selected in step S43 corresponding to the user level are read based on the previously read setting data, and the basic functions are also read. The function is performed according to the display position setting selected in step S47.
The second menu is displayed by displaying it on M (step S56).

When the user selects a desired basic function from the basic functions displayed in the second menu, that is, when "YES" is selected in step S57, the selected basic function is supported. Then, the device 100 operates.

As described above, when the user selects the display buttons 61 to 63 representing himself from the first menu, the second menu composed of only the basic functions required for each user is displayed. Since it is like this,
Operability can be improved.

Further, since the number and names of user levels to be registered can be arbitrarily set according to the company, factory or section using the apparatus 100, a flexible menu structure can be realized and operability can be improved. .

Further, as described above, a specific user may have a basic function that he / she does not want to be used by a user other than himself. According to this embodiment, when a password is set in advance (step S3a) By setting a password corresponding to the user level to which the specific user belongs, only the specific user can select the second menu and can use the basic function. This ensures security.

Note that (1) number and names of user levels, (2) password, (3) basic function settings, (4) basic function display position, etc. are fixed to those initially set by the facility administrator. However, it can be changed at an appropriate time thereafter, if necessary.

The menu creation display device and method according to the present invention is applied to the substrate processing apparatus 1 described above.
The present invention is not limited to 00, and can be applied to all devices that combine a plurality of basic functions to perform a predetermined process.

[0069]

According to the inventions of claims 1 and 5, a plurality of users who use the apparatus are divided into a plurality of types, each type is stored as a user level, and a plurality of basic functions are stored. In addition, the entered user level and basic function are hierarchically associated, the setting data indicating the correspondence is edited, and the hierarchical menu is created based on the setting data. The user can freely create a combined menu structure.

According to the inventions of claims 2 and 6,
The first menu is created by a plurality of user levels, and the basic function corresponding to the user level selected via the input means for the first menu is read out based on the setting data, and the second menu is executed by those basic functions. Since only the basic functions necessary for each user are displayed in the second menu, the operability can be improved.

According to the inventions of claims 3 and 7,
Since the user level type can be arbitrarily set, the operability of the device by the user is improved.

According to the inventions of claims 4 and 8,
A password corresponding to each user level is set and stored, and after accepting the password input from the user, the password stored in the password storage means is compared with the password input by the password input means. Since it is controlled so as to allow the second menu to be created only when the two match, security can be maintained when there is a setting that the user does not want others to touch.

[Brief description of drawings]

FIG. 1 is an external perspective view of a substrate processing apparatus to which a menu creation display technology according to the present invention can be applied.

FIG. 2 is a schematic plan view of the apparatus of FIG. 1;

3 is a block diagram showing an electrical configuration of the apparatus of FIG.

FIG. 4 is a block diagram showing a configuration of a control unit and an external magnetic storage unit of FIG.

FIG. 5 is a flowchart showing an example of a menu creation / display method according to the present invention.

FIG. 6 is a flowchart showing an example of a menu creation / display method according to the present invention.

FIG. 7 is a flowchart showing an example of a user registration routine.

FIG. 8 is a flowchart showing an example of a password setting routine.

FIG. 9 is a flowchart showing an example of a user function setting routine.

FIG. 10 is a flowchart showing an example of a menu selection routine by a user.

FIG. 11 is a diagram showing an example of a display state on a display unit.

FIG. 12 is a diagram showing an example of a display state on the display unit when a facility engineer is selected.

FIG. 13 is a diagram showing an example of a user registration screen.

FIG. 14 is a diagram showing an example of a menu display of an equipment engineer after the user type is revised.

FIG. 15 is a diagram showing an example of a password setting screen.

FIG. 16 is a diagram showing an example of a user function selection screen.

FIG. 17 is a diagram showing an example of a basic function selection screen.

FIG. 18 is a diagram showing an example of a display state for selecting a display position of a basic function.

FIG. 19 is a diagram showing an example of a revised initial display screen.

[Explanation of symbols]

 51 control unit 51A editing unit 51B menu creation unit 51B1 first menu creation unit 51B2 second menu creation unit 52 operation unit 53 display unit 54 external magnetic storage unit 54A user level storage unit 54B basic function storage unit 54C setting data storage unit 54N user Level name storage unit 54P Password storage unit 100 Substrate processing device

Claims (8)

[Claims] 1. A menu creation display device in a device that performs a predetermined process by combining a plurality of basic functions, divides a plurality of users who use the device into a plurality of types, and stores each type as a user level. User level storage means, basic function storage means for storing the plurality of basic functions, selection input means for accepting external selections of the plurality of user levels and the plurality of basic functions, and input via the input means Editing means for hierarchically associating the created user level with the basic function and editing the setting data indicating the correspondence, setting data storage means for storing the setting data, and creating a hierarchical menu based on the setting data A menu including a menu creating unit for displaying the hierarchical menu and a display unit for displaying the hierarchical menu. Forming a display device. 2. The menu creating means reads the plurality of user levels from the user level storage means, and creates a first menu according to the user levels, and the input for the first menu. Second menu creating means for reading a basic function corresponding to the user level selected through the means from the basic function storing means based on the setting data and creating a second menu by the basic function. The menu creation and display device according to claim 1. 3. A user level setting input means for setting and inputting the type of the user level is provided, and the user level storing means variably stores the type of the user level input from the user level setting input means. Claim 1 characterized in that it is a means.
Alternatively, the menu creation display device according to claim 2. 4. The user level storage means has a password storage means for storing a password corresponding to a user level, and the menu creation display device includes a password setting means for setting and inputting the password, and a user. The password input means for accepting the input of the password from the user is collated with the password stored in the password storage means and the password input by the password input means, and the second menu creation means is used only when both match. The menu creation display device according to claim 2 or 3, further comprising a control unit that allows creation of the second menu. 5. A menu creation display method for creating a hierarchical menu according to a type of a user who uses the device in a device that performs a predetermined process by combining a plurality of basic functions, wherein the device is used. The plurality of users are divided into a plurality of types, each type is stored as a user level, the step of storing the plurality of basic functions, and the corresponding basic function is selected for each user level, and the user is selected. A step of hierarchically associating the levels with the basic functions and storing the corresponding relationship as setting data; a step of reading the plurality of user levels and creating a first menu by these user levels; , The basic function corresponding to the user level is read out based on the setting data, and the second menu is created by those basic functions. If, menu creation display method with. 6. The step of displaying the first menu on the display means of the device, and when a specific user level is selected from the outside for the first menu displayed on the display means, the selected user level is set to the selected user level. Displaying the corresponding second menu,
The menu creation and display method according to claim 5, further comprising: 7. The menu creation and display method according to claim 5, further comprising: a step of setting and inputting the type of the user level, and a step of storing the set and input type of the user level. . 8. The method further comprising: a step of setting a password corresponding to the user level; a step of storing the password; and a step of accepting an input of the password from a user, the input password and the 8. The second menu is created only when the stored password is collated with each other and the two coincide with each other.
How to create and display the described menu.