JPH0944820A - Magnetoresistive magnetic head - Google Patents
Magnetoresistive magnetic headInfo
- Publication number
- JPH0944820A JPH0944820A JP7197208A JP19720895A JPH0944820A JP H0944820 A JPH0944820 A JP H0944820A JP 7197208 A JP7197208 A JP 7197208A JP 19720895 A JP19720895 A JP 19720895A JP H0944820 A JPH0944820 A JP H0944820A
- Authority
- JP
- Japan
- Prior art keywords
- magnetoresistive effect
- magnetoresistive
- magnetic head
- magnetic
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、磁気ディスク装置等の
磁気記録装置に使用される磁気ヘッドで、磁気記録媒体
に記載された信号を磁気抵抗効果を利用して検出する再
生専用の磁気抵抗効果型磁気ヘッドに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a magnetic recording device such as a magnetic disk device, which is a read-only magnetic resistance for detecting a signal written on a magnetic recording medium by utilizing a magnetoresistive effect. The present invention relates to an effect type magnetic head.
【0002】[0002]
【従来の技術】磁気記録媒体に記録された信号を強磁性
体に特有の磁気抵抗効果を利用して検出する再生専用の
磁気抵抗効果型磁気ヘッドは、一般に、特開昭62−4
0610号に記載のように、基板上に少なくとも一対の
磁気シールド層と、横バイアス磁界を印加するための軟
磁性バイアス膜と、磁区構造を制御するための磁区制御
手段とを持つ磁気抵抗効果素子部と、さらにこの磁気抵
抗効果素子部にセンス電流を流し、信号電圧を検出する
ための電極とを有する。2. Description of the Related Art A read-only magnetoresistive effect magnetic head for detecting a signal recorded on a magnetic recording medium by utilizing a magnetoresistive effect peculiar to a ferromagnetic material is generally disclosed in JP-A-62-4.
No. 0610, a magnetoresistive effect element having at least a pair of magnetic shield layers on a substrate, a soft magnetic bias film for applying a lateral bias magnetic field, and magnetic domain control means for controlling a magnetic domain structure. And a electrode for applying a sense current to the magnetoresistive effect element section to detect a signal voltage.
【0003】一方、特開昭61−77114号には、上
記磁気シールド層を等電位となるように繋ぎ、磁気シー
ルド層間で発生する静電的な放電を防ぐような構造の磁
気抵抗効果型磁気ヘッドが開示されている。また、特開
平2−94103号には、磁気抵抗効果素子の中心電位
を感知し、この中心電位を基準の電位に常に維持するよ
うなフィードバック手段を設けた磁気抵抗効果素子の保
護回路が開示されている。On the other hand, in Japanese Patent Laid-Open No. 61-77114, a magnetoresistive effect type magnetic structure having a structure in which the magnetic shield layers are connected so as to have an equipotential to prevent electrostatic discharge generated between the magnetic shield layers is disclosed. A head is disclosed. Further, Japanese Patent Laid-Open No. 94103/1990 discloses a magnetoresistive effect element protection circuit provided with feedback means for sensing the central electric potential of the magnetoresistive effect element and always maintaining the central electric potential at a reference electric potential. ing.
【0004】さらに、特開平6−103508号には、
磁気抵抗効果型磁気ヘッドと並列にダイオード又は抵抗
体を接続するか又は磁気抵抗効果型磁気ヘッドを形成す
る磁気抵抗効果素子と並列に、この磁気抵抗効果素子よ
り小さい抵抗値の抵抗体を接続した磁気ディスク装置が
開示されている。さらにまた、特開平6−60338号
には、磁気抵抗効果型ヘッドの端子間にある値以上の静
電圧が加わると、端子間を短絡する保護回路を持つ磁気
記憶装置が開示されている。Further, Japanese Patent Laid-Open No. 6-103508 discloses that
A diode or a resistor is connected in parallel with the magnetoresistive effect magnetic head, or a resistor having a resistance value smaller than this magnetoresistive effect element is connected in parallel with the magnetoresistive effect element forming the magnetoresistive effect magnetic head. A magnetic disk device is disclosed. Furthermore, Japanese Patent Laid-Open No. 6-60338 discloses a magnetic memory device having a protection circuit that short-circuits terminals when a static voltage higher than a certain value is applied between the terminals of the magnetoresistive head.
【0005】[0005]
【発明が解決しようとする課題】磁気抵抗効果型磁気ヘ
ッドの各種製造工程、すなわち素子、ヘッドの製造、組
立て工程等では、磁気抵抗効果素子部の両端の電極間に
色々な要因により突発的に静電圧が印加される場合があ
り、この静電圧の大きさによっては当該ヘッドの磁気抵
抗効果素子部の破壊が生じた。このような静電気による
磁気抵抗効果型磁気ヘッドの破壊は、磁気抵抗効果素子
部が薄膜の積層体で、通常では低いと考えられるような
静電圧でも非常に高密度の電流が容易に流れるという磁
気抵抗効果磁気ヘッド特有の構造による現象と考えられ
る。In various manufacturing processes of a magnetoresistive effect type magnetic head, that is, in manufacturing and assembling elements, heads, etc., abrupt changes occur between electrodes on both ends of the magnetoresistive effect element due to various factors. A static voltage may be applied, and depending on the magnitude of this static voltage, the magnetoresistive effect element part of the head was destroyed. The destruction of the magnetoresistive effect type magnetic head due to such static electricity is due to the fact that the magnetoresistive effect element part is a laminated body of thin films and a very high-density current easily flows even at a static voltage which is usually considered to be low. Resistance effect It is considered to be a phenomenon due to the structure peculiar to the magnetic head.
【0006】上記従来技術は、いずれもこのような磁気
抵抗効果素子部に突発的に印加される静電気に対する対
策は十分になされていないという問題があった。すなわ
ち、特開昭62−40610号に記載の従来技術は、磁
気抵抗効果型磁気ヘッドを開示するものであって、上記
静電気に対する対策は全く記載されていない。The above-mentioned prior arts all have a problem in that measures against static electricity suddenly applied to such a magnetoresistive effect element portion are not sufficiently taken. That is, the conventional technique disclosed in Japanese Patent Laid-Open No. 62-40610 discloses a magnetoresistive effect magnetic head, and does not describe any countermeasure against the static electricity.
【0007】また、特開昭61−77114号に記載の
従来技術は、磁気シールド層間で発生する静電気につい
ての対策を示すもので、シールド層と磁気抵抗効果素子
部に突発的に印加される静電気に対しての対策は何も記
載されていないという問題があった。また、特開平2−
94103号に記載の従来技術は、シールド層に電位差
が生じるとシールド層と磁気抵抗効果素子部の間に放電
が生じることに対する対策がなされていないという問題
があった。Further, the prior art described in Japanese Patent Laid-Open No. 61-77114 shows a countermeasure against static electricity generated between magnetic shield layers. Static electricity suddenly applied to the shield layer and the magnetoresistive effect element portion is disclosed. There was a problem that nothing was described for the above. In addition, Japanese Unexamined Patent Application Publication No.
The conventional technique described in Japanese Patent No. 94103 has a problem that no measures are taken against the occurrence of discharge between the shield layer and the magnetoresistive effect element portion when a potential difference occurs in the shield layer.
【0008】また、特開平6−103508号に記載の
従来技術は、抵抗体の抵抗値が磁気抵抗効果素子より小
さいので、再生時に磁気抵抗効果素子に流れる電流が小
さくなり、十分な出力が得られないという問題があっ
た。また、ダイオードは素子中に作り込んでおらず、製
造途中で一方向ダイオードを接続したとしても、静電気
の特性が逆のときには効果がないという問題があった。Further, in the conventional technique described in Japanese Patent Laid-Open No. 6-103508, the resistance value of the resistor is smaller than that of the magnetoresistive effect element, so that the current flowing through the magnetoresistive effect element at the time of reproduction becomes small and a sufficient output can be obtained. There was a problem that I could not. In addition, there is a problem that the diode is not built in the element, and even if the one-way diode is connected during the manufacturing, the effect is not obtained when the electrostatic characteristics are opposite.
【0009】また、特開平6−60338号に記載の従
来技術は、磁気抵抗効果素子部の保護回路として、ダイ
オードやコンデンサ等を開示しているが、このダイオー
ドは、破壊電圧である300mVより小さい電圧で作動
するものである。また、コンデンサの容量については記
載されていないが、ダイオードの電圧から推定すると、
1pF程度、大きく見積もっても2〜3pF程度であ
る。ダイオードもコンデンサもこの程度の数量のもので
は、上記の突発的に印加される静電圧に対しての効果が
不十分であるという問題があった。Further, the prior art disclosed in Japanese Patent Application Laid-Open No. 6-60338 discloses a diode, a capacitor or the like as a protection circuit for the magnetoresistive effect element portion, but this diode is smaller than the breakdown voltage of 300 mV. It operates on voltage. Also, although the capacitance of the capacitor is not described, if estimated from the voltage of the diode,
It is about 1 pF, or roughly estimated to be about 2 to 3 pF. If the diode and the capacitor are in such a quantity, there is a problem that the effect against the above-mentioned suddenly applied static voltage is insufficient.
【0010】本発明の目的は、高密度磁気記録再生に最
適な、信頼性の高い、製造時の歩留まりの良好な磁気抵
抗効果型磁気ヘッドを提供することにある。It is an object of the present invention to provide a magnetoresistive effect magnetic head which is most suitable for high density magnetic recording / reproduction and has high reliability and good yield in manufacturing.
【0011】[0011]
【課題を解決するための手段】上記目的を達成するため
に、本発明の磁気抵抗効果型磁気ヘッドは、基板上に、
上部、下部一対の磁気シールド層と、磁気抵抗効果素子
部と、この磁気抵抗効果素子部にセンス電流を流し、信
号による電圧変化を検出するための一対の電極とを設
け、一対の電極の一方と一対の磁気シールド層の一方の
間に、所定以上の電流を流す電子素子を設けるようにし
たものである。In order to achieve the above object, a magnetoresistive head of the present invention is provided on a substrate,
A pair of upper and lower magnetic shield layers, a magnetoresistive effect element section, and a pair of electrodes for detecting a voltage change caused by a signal by flowing a sense current through the magnetoresistive effect element section are provided. An electronic element that allows a current greater than or equal to a predetermined value to be provided between one of the pair of magnetic shield layers and the magnetic shield layer.
【0012】なお、以上の磁気抵抗効果型磁気ヘッド
は、電極と磁気シールド層の間に所定のコンデンサ又は
抵抗の1種類を設けてもよいし、1つの磁気抵抗効果型
磁気ヘッドにこれらの複数種類を設けても差し支えな
い。In the above magnetoresistive effect magnetic head, one kind of a predetermined capacitor or resistor may be provided between the electrode and the magnetic shield layer, and one magnetoresistive effect type magnetic head may have a plurality of these. There is no problem in providing different types.
【0013】また、上記のコンデンサは、容量を10p
F〜10μFの範囲とすることがより好ましい。さら
に、コンデンサ部の容量が5pF以上で、コンデンサ部
の容量とリードライトICの容量との和が50pF以下
とすることが高速転送を行うために最も好ましい。The above capacitor has a capacitance of 10p.
The range of F to 10 μF is more preferable. Further, it is most preferable that the capacitance of the capacitor section is 5 pF or more and the sum of the capacitance of the capacitor section and the read / write IC is 50 pF or less for high-speed transfer.
【0014】また、本発明の磁気記録装置は、磁気記録
媒体、この磁気記録媒体に記録されたデータを読み出す
ための磁気抵抗効果型磁気ヘッド、磁気記録媒体と磁気
抵抗効果型磁気ヘッドの相対的位置を移動させるための
駆動手段、データの読み出しを行うための再生手段及び
これらを制御するための制御手段を有し、この磁気抵抗
効果型磁気ヘッドとして、上記の磁気抵抗効果型磁気ヘ
ッドを用いるようにしたものである。Further, the magnetic recording apparatus of the present invention includes a magnetic recording medium, a magnetoresistive effect magnetic head for reading data recorded on the magnetic recording medium, and a relative relationship between the magnetic recording medium and the magnetoresistive effect magnetic head. The magnetic resistance effect type magnetic head includes the drive means for moving the position, the reproducing means for reading the data, and the control means for controlling these, and the magnetoresistive effect type magnetic head is used as the magnetoresistive effect type magnetic head. It was done like this.
【0015】[0015]
【作用】電極間に所定のコンデンサ、抵抗又は双方向ダ
イオードを設けるか、或は電極と磁気シールド層の間に
所定のコンデンサ又は抵抗を設けることにより、上記電
極間に突発的に静電気が印加された場合でも、静電気の
一部又は全てが抵抗や双方向ダイオードに分流するか、
コンデンサに蓄電される結果になり、磁気抵抗効果素子
を流れる電流密度は大幅に低下する。そのため、静電気
による磁気抵抗効果型磁気ヘッドの破壊はなくなり、高
密度磁気記録再生に適した、信頼性の高い磁気抵抗効果
型磁気ヘッドを良好な歩留まりで製造することができ
る。さらに、この作用は当該磁気抵抗効果型ヘッドを磁
気ディスク装置に組み込んだ場合にも有効である。By providing a predetermined capacitor, resistor or bidirectional diode between the electrodes, or by providing a predetermined capacitor or resistor between the electrode and the magnetic shield layer, sudden static electricity is applied between the electrodes. If some or all of the static is shunted to a resistor or bidirectional diode,
As a result of being stored in the capacitor, the current density flowing through the magnetoresistive effect element is significantly reduced. Therefore, the magnetoresistive effect magnetic head is not destroyed by static electricity, and a highly reliable magnetoresistive effect magnetic head suitable for high-density magnetic recording / reproduction can be manufactured with a good yield. Furthermore, this effect is also effective when the magnetoresistive head is incorporated in a magnetic disk device.
【0016】[0016]
【実施例】以下に本発明を実施例により詳しく説明す
る。 〈実施例1〉図1は本発明の第1の実施例の磁気抵抗効
果型磁気ヘッドの平面図であり、図2はそのA−A’線
断面図である。この磁気抵抗効果型磁気ヘッド14の構
造は次ぎの通りである。アルミナ−チタンカーバイト等
の絶縁体からなる基板1上に、平坦化用の厚付けされた
アルミナ等の下地絶縁層2を介して、一対の磁気シール
ド層3、10(1〜4μm厚)と、ギャップ長を形成す
るアルミナ、シリカ等からなる絶縁層4、5(0.05
〜0.2μm厚)と、媒体対抗面側に所定の形状の横バ
イアス磁界印加用の軟磁性バイアス膜、非磁性の高抵抗
伝導体及び磁気抵抗効果膜等からなる磁気抵抗効果素子
部6と、この磁気抵抗効果素子部6の磁区構造を制御す
るための磁区制御用バイアス膜7と、Ta/Au/Ta
等の導体層からなる電極9と、さらに、これらの保護を
目的とした絶縁層11と、電極端子パッド12が形成さ
れている。一方、媒体抵抗面と反対の電極9間には、磁
気抵抗効果素子部6と同様な構成材からなる、所定の抵
抗値となるように所定の形状に加工された抵抗部13が
形成されている。EXAMPLES The present invention will be described in detail below with reference to examples. <Embodiment 1> FIG. 1 is a plan view of a magnetoresistive head according to a first embodiment of the present invention, and FIG. 2 is a sectional view taken along the line AA '. The structure of the magnetoresistive effect magnetic head 14 is as follows. On a substrate 1 made of an insulator such as alumina-titanium carbide, a pair of magnetic shield layers 3 and 10 (thickness of 1 to 4 μm) are provided via a base insulating layer 2 made of alumina or the like for flattening. , Insulating layers 4, 5 (0.05) made of alumina, silica, etc. that form the gap length.
To 0.2 μm) and a magnetoresistive effect element portion 6 composed of a soft magnetic bias film for applying a lateral bias magnetic field of a predetermined shape, a non-magnetic high resistance conductor, a magnetoresistive effect film, etc. on the medium facing surface side. , A magnetic domain control bias film 7 for controlling the magnetic domain structure of the magnetoresistive effect element portion 6, and Ta / Au / Ta.
An electrode 9 made of a conductive layer such as the above, an insulating layer 11 for protecting these, and an electrode terminal pad 12 are formed. On the other hand, between the electrodes 9 opposite to the medium resistance surface, a resistance portion 13 made of the same constituent material as the magnetoresistive effect element portion 6 and processed into a predetermined shape so as to have a predetermined resistance value is formed. There is.
【0017】この磁気抵抗効果型磁気ヘッド14は、磁
気記録媒体に書かれた信号を再生する場合には、電極9
から磁気抵抗効果素子部6にセンス電流を流し、信号磁
束による磁気抵抗効果素子部6の抵抗の変化を電圧変化
として電極9から検出する。従ってこの電圧変化、すな
わち出力は、磁気抵抗効果素子部6に流れるセンス電流
に応じて増減するが、センス電流は電極9間に設けられ
た抵抗部13にも分流する。但し、抵抗部13と磁気抵
抗効果素子部6とは並列に構成されていて、抵抗部13
の抵抗値を磁気抵抗効果素子部6の抵抗値の100倍に
設定したため、分流によるセンス電流の損失はほとんど
無視できる。後述のような静電破壊に対する効果とこの
センス電流の損失との兼ね合いから、抵抗部13の抵抗
値は磁気抵抗効果素子部6の抵抗値の5倍〜100倍が
よい。This magnetoresistive effect magnetic head 14 has electrodes 9 when reproducing a signal written on a magnetic recording medium.
From the above, a sense current is caused to flow through the magnetoresistive effect element section 6, and a change in resistance of the magnetoresistive effect element section 6 due to a signal magnetic flux is detected from the electrode 9 as a voltage change. Therefore, this voltage change, that is, the output increases or decreases according to the sense current flowing in the magnetoresistive effect element portion 6, but the sense current is also shunted to the resistance portion 13 provided between the electrodes 9. However, the resistance portion 13 and the magnetoresistive effect element portion 6 are configured in parallel, and the resistance portion 13
Since the resistance value of 1 is set to 100 times the resistance value of the magnetoresistive effect element portion 6, the loss of the sense current due to the shunt can be almost ignored. The resistance value of the resistance portion 13 is preferably 5 to 100 times the resistance value of the magnetoresistive effect element portion 6 in consideration of the effect of electrostatic breakdown as will be described later and the loss of the sense current.
【0018】一方、この磁気抵抗効果型磁気ヘッド14
の電極9間に突発的に静電気による電位差が生じた場合
には、静電気は上記抵抗部13がないと当然磁気抵抗効
果素子部6を流れることになる。その際に流れる電流値
の大きさによっては磁気抵抗効果素子部6はジュール熱
のため溶断するか、エレクトロマイグレーションにより
断線する恐れがある。しかし、本実施例のように電極9
間が上記抵抗部13によって短絡されていれば、静電気
はこの抵抗部13に分流されることになり、瞬間的に磁
気抵抗効果素子部6を流れる静電気量は大幅に低減さ
れ、磁気抵抗効果素子部6は破壊を免れる結果になる。On the other hand, the magnetoresistive effect magnetic head 14
When a potential difference due to static electricity suddenly occurs between the electrodes 9 of the above, static electricity naturally flows through the magnetoresistive effect element portion 6 without the resistance portion 13. Depending on the magnitude of the current value flowing at that time, the magnetoresistive effect element portion 6 may be melted due to Joule heat or may be broken due to electromigration. However, as in this embodiment, the electrode 9
If the space is short-circuited by the resistance portion 13, the static electricity will be shunted to the resistance portion 13, and the amount of static electricity flowing through the magnetoresistive effect element portion 6 will be greatly reduced. Part 6 results in escape from destruction.
【0019】本実施例の磁気抵抗効果型磁気ヘッド14
の動作原理は以上説明した通りであるが、この磁気抵抗
効果型磁気ヘッド14によれば、電極9間に突発的に印
加される静電気による磁気抵抗効果型磁気ヘッドの破壊
に対して大きな効果があり、磁気抵抗効果型磁気ヘッド
の信頼性を大幅に改善でき、歩留を向上できる。さら
に、この効果は当該磁気抵抗効果型ヘッドを磁気ディス
ク装置に組み込んだ場合にも期待できる。The magnetoresistive effect magnetic head 14 of this embodiment.
The operation principle of No. 1 is as described above, but the magnetoresistive effect magnetic head 14 has a great effect on the destruction of the magnetoresistive effect magnetic head due to static electricity suddenly applied between the electrodes 9. Therefore, the reliability of the magnetoresistive magnetic head can be significantly improved, and the yield can be improved. Further, this effect can be expected when the magnetoresistive head is incorporated in a magnetic disk device.
【0020】〈実施例2〉図3は本発明の第2の実施例
の磁気抵抗効果型磁気ヘッドの平面図、図4はそのB−
B’線断面図である。本実施例の磁気抵抗効果型磁気ヘ
ッドの構造は、上述した実施例1の構造とほとんど同様
であるが、図4に示したように、電極9間に抵抗の代わ
りにコンデンサ部15を磁気抵抗効果素子部6と並列の
電気回路を構成するように形成したものである。コンデ
ンサ部15は、Ti酸化膜からなる誘電体の上下に金属
膜を設けてある。誘電体は、Ti酸化膜の他に、Al酸
化膜等を用いてもよい。また、金属膜の代わりにカーボ
ン膜を用いてもよい。<Embodiment 2> FIG. 3 is a plan view of a magnetoresistive head of a second embodiment of the present invention, and FIG.
It is a sectional view taken on the line B '. The structure of the magnetoresistive effect type magnetic head of this embodiment is almost the same as the structure of the above-mentioned first embodiment, but as shown in FIG. It is formed so as to form an electric circuit in parallel with the effect element portion 6. The capacitor section 15 is provided with metal films above and below a dielectric made of a Ti oxide film. As the dielectric, an Al oxide film or the like may be used instead of the Ti oxide film. A carbon film may be used instead of the metal film.
【0021】本実施例による磁気抵抗効果型磁気ヘッド
14の動作原理もほとんど実施例1の磁気抵抗効果型磁
気ヘッド14と同様である。本実施例では電極9間に抵
抗の代わりにコンデンサ部15を設けているために、直
流のセンス電流に対しては全く影響はない。しかし、電
極9間に瞬間的に掛かる静電気の場合には、上記コンデ
ンサ部15に一時的に静電荷が蓄積されることになり、
磁気抵抗効果素子部6を瞬間的に流れる静電気量は大幅
に低減される。上記コンデンサ部15に一時的に蓄積さ
れる電荷量は、コンデンサ部15の容量が大きいほど多
いので、静電気に対する磁気抵抗効果素子部6の保護の
点からコンデンサ部15の容量は5pF以上がよい。コ
ンデンサ部の容量があまり大きいとその形状があまりに
も大きくなるので、5pF〜100μFの範囲が好まし
く、10pF〜10μFの範囲がより好ましい。さら
に、コンデンサ部の容量が5pF以上で、コンデンサ部
の容量とリードライトICの容量との和が50pF以下
とすることが後述する高速転送を行うために最も好まし
い。これによって磁気抵抗効果素子部6は破壊を免れる
ことになる。The operating principle of the magnetoresistive magnetic head 14 according to this embodiment is almost the same as that of the magnetoresistive magnetic head 14 of the first embodiment. In this embodiment, since the capacitor portion 15 is provided between the electrodes 9 instead of the resistor, there is no influence on the DC sense current. However, in the case of static electricity that is instantaneously applied between the electrodes 9, electrostatic charges are temporarily accumulated in the capacitor unit 15,
The amount of static electricity instantaneously flowing through the magnetoresistive effect element portion 6 is greatly reduced. The amount of electric charge temporarily accumulated in the capacitor unit 15 increases as the capacitance of the capacitor unit 15 increases. Therefore, from the viewpoint of protecting the magnetoresistive effect element unit 6 from static electricity, the capacitance of the capacitor unit 15 is preferably 5 pF or more. If the capacitance of the capacitor portion is too large, the shape thereof becomes too large, so the range of 5 pF to 100 μF is preferable, and the range of 10 pF to 10 μF is more preferable. Further, it is most preferable that the capacitance of the capacitor section is 5 pF or more and the sum of the capacitance of the capacitor section and the read / write IC is 50 pF or less in order to perform high-speed transfer described later. As a result, the magnetoresistive effect element portion 6 is protected from being destroyed.
【0022】このように本実施例による磁気抵抗効果型
磁気ヘッド14の効果は、実施例1の磁気抵抗効果型磁
気ヘッド14の効果とほとんど同様であり、磁気抵抗効
果型磁気ヘッドの信頼性を大幅に改善でき、歩留を向上
できると同時に、この効果はこの磁気抵抗効果磁気ヘッ
ドを磁気ディスク装置に組み込んだ場合にも期待でき
る。As described above, the effect of the magnetoresistive effect magnetic head 14 according to the present embodiment is almost the same as the effect of the magnetoresistive effect type magnetic head 14 according to the first embodiment, and the reliability of the magnetoresistive effect type magnetic head is improved. This effect can be greatly improved, and at the same time, this effect can be expected when this magnetoresistive effect magnetic head is incorporated in a magnetic disk device.
【0023】なお、上記の高速転送について説明する。
高速転送を行う上で高周波の伝達が行えなくてはならな
い。特に電極間にコンデンサを設けた場合、その点を考
慮しなければならない。その点について検討を加える。
磁気ヘッドの端子とリ−ドライトICとの距離が長いと
静電容量やインダクタンスがふえてしまい、共振点の低
下を招く。一般的に共振周波数は装置での最大使用周波
数の2倍以上が望ましい。例えば3.5インチディスク
装置において、磁気ヘッドの端子とリ−ドライトICと
の距離を42mm以下に押さえてインダクタンスを30
nH、静電容量を20pFとした場合、転送速度が12
MB/sならば、最大使用周波数はその4.5倍の54
MHzであり、共振周波数はその2倍の108MHz以
上が望ましい。図12はこれらの値を用いて磁気ヘッド
の静電容量とリードライトICの入力容量の和と共振周
波数の関係を計算した結果である。これより、共振周波
数を108MHz以上とするためには静電容量は50p
F以下が必要であり、ヘッドの静電容量とリードライト
ICの入力容量の和は50pF以下でなければならな
い。また、磁気ヘッドの容量が30pFならリードライ
トICの入力容量は20pF以下でなければならない。The above high-speed transfer will be described.
High-frequency transfer requires high-frequency transmission. In particular, when a capacitor is provided between the electrodes, that point must be taken into consideration. We will examine this point.
If the distance between the terminal of the magnetic head and the read / write IC is long, the electrostatic capacity and the inductance increase and the resonance point is lowered. Generally, it is desirable that the resonance frequency is at least twice the maximum usable frequency in the device. For example, in a 3.5-inch disk device, the inductance between the magnetic head terminal and the read / write IC is suppressed to 42 mm or less and the inductance is set to 30 mm.
When nH and capacitance is 20pF, transfer rate is 12
If MB / s, the maximum usable frequency is 4.5 times that of 54
It is desirable that the resonance frequency is twice as high as 108 MHz or more. FIG. 12 shows the result of calculating the relationship between the sum of the capacitance of the magnetic head and the input capacitance of the read / write IC and the resonance frequency using these values. Therefore, in order to set the resonance frequency to 108MHz or higher, the capacitance is 50p.
F or less is required, and the sum of the capacitance of the head and the input capacitance of the read / write IC must be 50 pF or less. If the capacity of the magnetic head is 30 pF, the input capacity of the read / write IC must be 20 pF or less.
【0024】〈実施例3〉図5は本発明の第3の実施例
の磁気抵抗効果型磁気ヘッドの平面図、図6はそのC−
C’線断面図である。本実施例の磁気抵抗効果型磁気ヘ
ッドの構造は上述した実施例1の構造とほぼ同様である
が、基板1としてSi等の半導体を使用し、図6に示し
たように電極9間に抵抗の代わりに、半導体上に形成し
たダイオード17を磁気抵抗効果素子部6と並列の電気
回路を構成するように接続したものである。このダイオ
ードは、Siの基板に、イオン打ち込みと熱拡散により
N+P+領域を形成し、熱酸化膜の絶縁膜を形成し、配線
して製造する。<Third Embodiment> FIG. 5 is a plan view of a magnetoresistive effect type magnetic head according to a third embodiment of the present invention, and FIG.
It is C 'line sectional drawing. The structure of the magnetoresistive effect magnetic head of this embodiment is almost the same as that of the above-described first embodiment, but a semiconductor such as Si is used as the substrate 1, and the resistance between the electrodes 9 is changed as shown in FIG. Instead of, the diode 17 formed on the semiconductor is connected so as to form an electric circuit in parallel with the magnetoresistive effect element section 6. This diode is manufactured by forming an N + P + region on a Si substrate by ion implantation and thermal diffusion, forming an insulating film of a thermal oxide film, and wiring.
【0025】本実施例の磁気抵抗効果型磁気ヘッド14
の動作原理も実施例1の磁気抵抗効果型磁気ヘッド14
と同様である。本実施例では電極9間にダイオード17
を設けているので直流のセンス電流に対しては全く影響
はない。しかし、電極9間に瞬間的に静電気が掛かった
場合には、静電気の電圧がダイオード17のスレッシュ
電圧以上になるとダイオード17間が短絡されるので、
磁気抵抗効果素子部6にはダイオード17のスレッシュ
電圧以上の静電気は流れない。これによって磁気抵抗効
果素子部6は瞬間的に掛かる静電気による破壊を免れる
ことになる。従って、このダイオード17のスレッシュ
電圧は磁気抵抗効果素子部6を破壊する恐れのある0.
5V以上とすればよい。The magnetoresistive effect magnetic head 14 of this embodiment.
The operating principle of the magnetoresistive head 14 is also the same as that of the first embodiment.
Is the same as In this embodiment, the diode 17 is provided between the electrodes 9.
Since this is provided, it has no effect on the DC sense current. However, when static electricity is instantaneously applied between the electrodes 9, the diodes 17 are short-circuited when the static electricity voltage exceeds the threshold voltage of the diodes 17,
Static electricity above the threshold voltage of the diode 17 does not flow through the magnetoresistive effect element portion 6. As a result, the magnetoresistive effect element portion 6 is protected from being destroyed by static electricity applied instantaneously. Therefore, the threshold voltage of the diode 17 may destroy the magnetoresistive effect element portion 6.
It may be 5 V or more.
【0026】このように本実施例による磁気抵抗効果型
磁気ヘッド14の効果も、実施例1の磁気抵抗効果型磁
気ヘッド14とほとんど同様であり、磁気抵抗効果型磁
気ヘッドの信頼性を大幅に改善でき、歩留を向上でき
る。と同時に、この効果は当該磁気抵抗効果型ヘッドを
磁気ディスク装置に組み込んだ場合にも期待できる。As described above, the effect of the magnetoresistive effect magnetic head 14 according to the present embodiment is almost the same as that of the magnetoresistive effect magnetic head 14 according to the first embodiment, and the reliability of the magnetoresistive effect magnetic head is greatly improved. The yield can be improved. At the same time, this effect can be expected when the magnetoresistive head is incorporated in a magnetic disk device.
【0027】〈実施例4〉図7は本発明の第4の実施例
の磁気抵抗効果型磁気ヘッドの斜視図である。この磁気
抵抗効果型磁気ヘッドの構成は次ぎの通りである。アル
ミナ−チタンカーバイト等の絶縁体からなる基板1上
に、平坦化用の厚付けされたアルミナ等からなる下地絶
縁層2を介して、一対の磁気シールド層3、10(1〜
4μm厚)と、ギャップ長を形成するアルミナ、シリカ
等からなる絶縁層4、5(0.05〜0.2μm厚)
と、媒体対抗面側に所定の形状の横バイアス磁界印加用
の軟磁性バイアス膜、非磁性の高抵抗導伝体膜及び磁気
抵抗効果膜等からなる磁気抵抗効果素子部6と、Ta/
Au/Ta等の導体層からなる電極9、9’が形成され
ている。この電極8、9は媒体対抗面と反対の場所で積
層され、この電極間には誘電体15’が入っており、電
極間の距離と面積によりコンデンサを形成している。本
実施例の場合は、その容量は50pFとした。<Fourth Embodiment> FIG. 7 is a perspective view of a magnetoresistive effect magnetic head according to a fourth embodiment of the present invention. The structure of this magnetoresistive effect magnetic head is as follows. A pair of magnetic shield layers 3, 10 (1 to 1) are provided on a substrate 1 made of an insulator such as alumina-titanium carbide, with a base insulating layer 2 made of alumina or the like thickened for flattening being interposed.
4 μm thick) and insulating layers 4, 5 (0.05 to 0.2 μm thick) made of alumina, silica, etc. that form the gap length.
And a magnetoresistive effect element portion 6 composed of a soft magnetic bias film for applying a lateral bias magnetic field of a predetermined shape, a non-magnetic high resistance conductor film, a magnetoresistive effect film, etc. on the medium facing surface side, and Ta /
Electrodes 9 and 9'made of a conductor layer of Au / Ta or the like are formed. The electrodes 8 and 9 are laminated at a position opposite to the medium facing surface, and a dielectric material 15 'is inserted between the electrodes to form a capacitor by the distance and the area between the electrodes. In the case of this example, the capacitance was 50 pF.
【0028】このコンデンサは磁気抵抗効果素子部6と
並列の電気回路を構成するようになる。よって、電極
9、9’間に瞬間的に静電気が掛かると、コンデンサに
一時的に静電荷が蓄積され、磁気抵抗効果素子部6を瞬
間的に流れる静電気量は大幅に低減される。本実施例の
ように、電極を素子積層方向にその一部を重ねることに
より、コンデンサの容量を大きくすることができる。This capacitor constitutes an electric circuit in parallel with the magnetoresistive effect element section 6. Therefore, when static electricity is momentarily applied between the electrodes 9 and 9 ', electrostatic charges are temporarily accumulated in the capacitor, and the amount of static electricity momentarily flowing through the magnetoresistive effect element portion 6 is greatly reduced. By overlapping a part of the electrodes in the element stacking direction as in this embodiment, the capacitance of the capacitor can be increased.
【0029】このように本実施例による磁気抵抗効果型
磁気ヘッドの効果も、実施例1の磁気抵抗効果型磁気ヘ
ッドとほとんど同様であり、磁気抵抗効果型磁気ヘッド
の信頼性を大幅に改善でき、歩留を向上できる。と同時
に、この効果は当該磁気抵抗効果型ヘッドを磁気ディス
ク装置に組み込んだ場合にも期待できる。As described above, the effect of the magnetoresistive effect magnetic head according to the present embodiment is almost the same as that of the magnetoresistive effect type magnetic head according to the first embodiment, and the reliability of the magnetoresistive effect type magnetic head can be greatly improved. The yield can be improved. At the same time, this effect can be expected when the magnetoresistive head is incorporated in a magnetic disk device.
【0030】〈実施例5〉図8は本発明の他の実施例に
よる磁気抵抗効果型磁気ヘッドの斜視図である。この磁
気抵抗効果型磁気ヘッドの構造は、上述した実施例4の
構造とほとんど同様であるが、図8に示したように積層
された電極9、9’間に高抵抗材を挿入して抵抗13’
を形成し、この抵抗が磁気抵抗効果素子部6と並列の電
気回路を構成するようにしたものである。<Embodiment 5> FIG. 8 is a perspective view of a magnetoresistive head according to another embodiment of the present invention. The structure of this magnetoresistive effect magnetic head is almost the same as that of the above-described fourth embodiment, but a high resistance material is inserted between the stacked electrodes 9 and 9 ′ as shown in FIG. 13 '
And the resistance constitutes an electric circuit in parallel with the magnetoresistive effect element section 6.
【0031】この磁気抵抗効果型磁気ヘッドは、磁気記
録媒体に書かれた信号を再生する場合には、電極9、
9’から磁気抵抗効果素子部7にセンス電流を流し、信
号磁束による磁気抵抗効果素子部7の抵抗の変化を電圧
変化としてこの電極9、9’から検出する。従ってこの
電圧変化、すなわち出力は、磁気抵抗効果素子部7に流
れるセンス電流に応じて増減するが、センス電流は電極
8、9間に設けられた抵抗部13’にも分流する。但
し、抵抗部13’と磁気抵抗効果素子部6とは並列に構
成されていて、抵抗部13’の抵抗値を磁気抵抗効果素
子部6の抵抗値の5倍に設定したので、分流によるセン
ス電流の損失はほとんど無視できる。This magnetoresistive effect magnetic head uses electrodes 9 when reproducing a signal written on a magnetic recording medium.
A sense current is caused to flow from 9 ′ to the magnetoresistive effect element section 7, and a change in resistance of the magnetoresistive effect element section 7 due to a signal magnetic flux is detected as a voltage change from the electrodes 9 and 9 ′. Therefore, this voltage change, that is, the output increases or decreases according to the sense current flowing through the magnetoresistive effect element section 7, but the sense current is also shunted to the resistance section 13 ′ provided between the electrodes 8 and 9. However, since the resistance portion 13 ′ and the magnetoresistive effect element portion 6 are configured in parallel and the resistance value of the resistance portion 13 ′ is set to 5 times the resistance value of the magnetoresistive effect element portion 6, sensing by shunting is performed. The current loss is almost negligible.
【0032】一方、この磁気抵抗効果型磁気ヘッドの電
極9、9’間に突発的に静電気による電位差が生じた場
合には、静電気は抵抗部13’がないと当然磁気抵抗効
果素子部6を流れることになる。その際に流れる電流値
の大きさによっては当該磁気抵抗効果素子部6はジュー
ル熱のため溶断するか、エレクトロマイグレーションに
より断線する恐れがある。しかし、本実施例のように電
極9、9’間が抵抗部13’によって短絡されていれ
ば、静電気は抵抗部13’に分流されることになり、瞬
間的に磁気抵抗効果素子部6を流れる静電気量は大幅に
低減され、磁気抵抗効果素子部6は破壊を免れる結果に
なる。On the other hand, when a potential difference due to static electricity suddenly occurs between the electrodes 9 and 9'of this magnetoresistive effect type magnetic head, static electricity naturally causes the magnetoresistive effect element portion 6 to exist without the resistance portion 13 '. It will flow. Depending on the magnitude of the current value flowing at that time, the magnetoresistive effect element portion 6 may be melted due to Joule heat or may be broken due to electromigration. However, if the electrodes 9 and 9 ′ are short-circuited by the resistance portion 13 ′ as in the present embodiment, the static electricity is shunted to the resistance portion 13 ′, and the magnetoresistive effect element portion 6 is instantaneously switched. The amount of static electricity flowing is greatly reduced, and the magnetoresistive effect element portion 6 is escaped from destruction.
【0033】このように本実施例による磁気抵抗効果型
磁気ヘッドの効果も、実施例1の磁気抵抗効果型磁気ヘ
ッドとほとんど同様であり、磁気抵抗効果型磁気ヘッド
の信頼性を大幅に改善でき、歩留を向上できる。と同時
に、この効果は当該磁気抵抗効果型ヘッドを磁気ディス
ク装置に組み込んだ場合にも期待できる。As described above, the effect of the magnetoresistive effect magnetic head according to the present embodiment is almost the same as that of the magnetoresistive effect magnetic head according to the first embodiment, and the reliability of the magnetoresistive effect magnetic head can be greatly improved. The yield can be improved. At the same time, this effect can be expected when the magnetoresistive head is incorporated in a magnetic disk device.
【0034】〈実施例6〉図9は本発明の第6の実施例
による磁気抵抗効果型磁気ヘッドの斜視図である。実施
例4の場合、電極9、9’間でコンデンサを形成してい
たのに対し、本実施例は磁気シールド層3と電極9’及
び磁気シールド層10と電極9間に誘電体15’を設け
てコンデンサを形成している。本実施例では、コンデン
サの容量はいずれも50pFとした。本実施例の方が実
施例4よりも構造上の段差が小さい分、狭ギャップ化に
適している。また、電極間そのものにコンデンサが形成
されないため、磁気シールド層3、10の形状等により
容量設定の柔軟性が高く、磁気シールド層3と電極9’
の静電容量と磁気シールド層10と電極9の静電容量と
を異なった値に設定することもできる。動作の原理は実
施例4と同様である。<Embodiment 6> FIG. 9 is a perspective view of a magnetoresistive head according to a sixth embodiment of the present invention. In the case of the fourth embodiment, the capacitor is formed between the electrodes 9 and 9 ′, but in the present embodiment, the dielectric 15 ′ is provided between the magnetic shield layer 3 and the electrode 9 ′ and between the magnetic shield layer 10 and the electrode 9. It is provided to form a capacitor. In this example, the capacitance of each capacitor was 50 pF. The present embodiment is suitable for narrowing the gap because the structural step is smaller than that of the fourth embodiment. Further, since no capacitor is formed between the electrodes themselves, flexibility of capacitance setting is high due to the shapes of the magnetic shield layers 3 and 10, and the magnetic shield layer 3 and the electrodes 9 '
It is also possible to set the electrostatic capacitance of 1 and the electrostatic capacitance of the magnetic shield layer 10 and the electrode 9 to different values. The principle of operation is the same as in the fourth embodiment.
【0035】〈実施例7〉図10は本発明の第7の実施
例の磁気抵抗効果型磁気ヘッドの斜視図である。実施例
1、5が電極9、9’間で抵抗を形成していたのに対
し、本実施例はシールド3と電極9’及びシールド10
と電極9間に、磁気抵抗効果素子部6の抵抗値の10倍
の抵抗値の抵抗を設けている。本実施例の方が実施例5
よりも構造上の段差が小さい分、狭ギャップ化に適して
いる。また、電極間そのものに抵抗が形成されないた
め、シールド3、4の形状等により抵抗値設定の柔軟性
が高く、シールド3と電極9’の抵抗値とシールド10
と電極9の抵抗値とを異なった値に設定することもでき
る。動作の原理は実施例5と同様である。<Embodiment 7> FIG. 10 is a perspective view of a magnetoresistive head according to a seventh embodiment of the present invention. While the resistances are formed between the electrodes 9 and 9 ′ in the first and fifth embodiments, the shield 3 and the electrodes 9 ′ and the shield 10 are used in the present embodiment.
A resistor having a resistance value 10 times the resistance value of the magnetoresistive effect element portion 6 is provided between the electrode 9 and the electrode 9. This embodiment is the fifth embodiment
Since the structural step is smaller than that, it is suitable for narrowing the gap. Further, since no resistance is formed between the electrodes themselves, the flexibility of setting the resistance value is high due to the shapes of the shields 3 and 4, and the resistance values of the shield 3 and the electrode 9'and the shield 10 are high.
The resistance value of the electrodes 9 and 9 can be set to different values. The operation principle is the same as that of the fifth embodiment.
【0036】なお、以上の各実施例では、電極間にコン
デンサ、抵抗又は双方向ダイオードの1種類を設ける
か、或は電極と磁気シールド層の間にコンデンサ又は抵
抗を設けていたが、1つの磁気抵抗効果型磁気ヘッドに
これらの複数種類を設けても差し支えない。In each of the above embodiments, one type of capacitor, resistor or bidirectional diode is provided between the electrodes, or a capacitor or resistor is provided between the electrode and the magnetic shield layer. A plurality of types of magnetoresistive effect magnetic heads may be provided.
【0037】〈実施例8〉図11は、本発明の磁気ディ
スク装置の一実施例の模式図である。ヘッド・ディスク
・アッセンブリ33中に、複数枚の磁気ディスク31が
スピンドル軸に取り付けられており、媒体駆動系(モー
タ)34により高速回転される。この磁気ディスク31
の磁気記録面に対して上記いずれかの実施例で製造した
磁気抵抗効果型磁気ヘッド14が配置されており、その
1個は、サーボヘッドとして作用する。磁気抵抗効果型
磁気ヘッド14は、ヘッド駆動系35によりアクチュエ
ータ32を介して磁気ディスクの略半径方向に移動され
る。さらに、本装置には、磁気抵抗効果型磁気ヘッド1
4を用いて、データの記録再生を行う記録再生系36、
その信号を処理する信号処理系37、これら及び上記各
駆動系を制御するための制御系38、上位装置とのデー
タのやり取りを行う装置I/F部39等が設けられてい
る。<Embodiment 8> FIG. 11 is a schematic view of an embodiment of the magnetic disk device of the present invention. A plurality of magnetic disks 31 are attached to a spindle shaft in a head disk assembly 33, and are rotated at high speed by a medium drive system (motor) 34. This magnetic disk 31
The magnetoresistive effect magnetic head 14 manufactured in any of the above examples is arranged on the magnetic recording surface of No. 1 and one of them functions as a servo head. The magnetoresistive head 14 is moved in a substantially radial direction of the magnetic disk by a head drive system 35 via an actuator 32. Further, the present apparatus includes a magnetoresistive effect magnetic head 1.
4, a recording and reproducing system 36 for recording and reproducing data,
A signal processing system 37 for processing the signal, a control system 38 for controlling these and the above drive systems, a device I / F section 39 for exchanging data with a host device, and the like are provided.
【0038】図13は上記磁気抵抗効果型磁気ヘッドの
磁気ディスク装置での実装図である。磁気抵抗効果型磁
気ヘッドは書き込みを行うインダクティブヘッドと複合
化されスライダー22に搭載されている。スライダー2
2は支持体23に支えられ、磁気ディスク21の上に保
持される。支持体23にはスライダー22からの電気信
号を伝達する伝送線路25が形成されている。伝送線路
25の一端はスライダー22の電極端子であり、もう一
方はインダクティブヘッドへ書き込み信号を送ったり、
磁気抵抗効果型磁気ヘッドからの再生信号を受け取るリ
ードライトIC26である。3.5インチディスクでは
この伝送線路15の長さは42mm以下であり、2.5
インチ以下の装置では30mm以下となっている。ま
た、本実施例のリードライトIC26の入力容量は20
pF以下であり、10MB/s以上の高速転送を実現す
ることができる。FIG. 13 is a mounting diagram of the magnetoresistive magnetic head in a magnetic disk device. The magnetoresistive magnetic head is combined with an inductive head for writing and is mounted on the slider 22. Slider 2
2 is supported by a support 23 and held on the magnetic disk 21. A transmission line 25 that transmits an electric signal from the slider 22 is formed on the support body 23. One end of the transmission line 25 is an electrode terminal of the slider 22, and the other end sends a write signal to the inductive head,
The read / write IC 26 receives a reproduction signal from the magnetoresistive magnetic head. In the case of a 3.5-inch disk, the length of this transmission line 15 is 42 mm or less.
It is 30 mm or less for devices of inches or less. The input capacity of the read / write IC 26 of this embodiment is 20.
It is pF or less, and high-speed transfer of 10 MB / s or more can be realized.
【0039】[0039]
【発明の効果】本発明によれば、磁気抵抗効果型磁気ヘ
ッドの両端の電極間に突発的に静電気が印加された場合
でも、磁気抵抗効果素子部を流れる電流は瞬間的に大幅
に低下するので、磁気抵抗効果素子部は静電気による破
壊を免れる。従って、磁気抵抗効果型磁気ヘッドの信頼
性を大幅に改善でき、その製造の歩留まりの向上が可能
である。さらにまた、上記作用は当該磁気抵抗効果型ヘ
ッドを磁気ディスク装置に組み混んだ場合にも期待で
き、同様の効果がある。According to the present invention, even when static electricity is suddenly applied between the electrodes on both ends of the magnetoresistive effect type magnetic head, the current flowing through the magnetoresistive effect element portion is greatly reduced instantaneously. Therefore, the magnetoresistive effect element section is protected from being destroyed by static electricity. Therefore, the reliability of the magnetoresistive effect magnetic head can be significantly improved, and the manufacturing yield thereof can be improved. Furthermore, the above effect can be expected even when the magnetoresistive head is incorporated in a magnetic disk device, and has the same effect.
【図1】本発明の第1の実施例の磁気抵抗効果型磁気ヘ
ッドの平面図。FIG. 1 is a plan view of a magnetoresistive effect magnetic head according to a first embodiment of the present invention.
【図2】図1に示した磁気抵抗効果型磁気ヘッドのA−
A’線断面図。FIG. 2 is an A- of the magnetoresistive effect magnetic head shown in FIG.
A'line sectional drawing.
【図3】本発明の第2の実施例の磁気抵抗効果型磁気ヘ
ッドの平面図。FIG. 3 is a plan view of a magnetoresistive effect type magnetic head according to a second embodiment of the present invention.
【図4】図3に示した磁気抵抗効果型磁気ヘッドのB−
B’線断面図。FIG. 4 is a B- of the magnetoresistive effect magnetic head shown in FIG.
B'line sectional drawing.
【図5】本発明の第3の実施例の磁気抵抗効果型磁気ヘ
ッドの平面図。FIG. 5 is a plan view of a magnetoresistive effect magnetic head according to a third embodiment of the invention.
【図6】図5に示した磁気抵抗効果型磁気ヘッドのC−
C’線断面図。FIG. 6 is a C- of the magnetoresistive effect magnetic head shown in FIG.
C'line sectional drawing.
【図7】本発明の第4の実施例の磁気抵抗効果型磁気ヘ
ッドの斜視図。FIG. 7 is a perspective view of a magnetoresistive effect magnetic head according to a fourth embodiment of the present invention.
【図8】本発明の第5の実施例の磁気抵抗効果型磁気ヘ
ッドの斜視図。FIG. 8 is a perspective view of a magnetoresistive effect type magnetic head according to a fifth embodiment of the present invention.
【図9】本発明の第6の実施例の磁気抵抗効果型磁気ヘ
ッドの斜視図。FIG. 9 is a perspective view of a magnetoresistive effect magnetic head according to a sixth embodiment of the present invention.
【図10】本発明の第7の実施例の磁気抵抗効果型磁気
ヘッドの斜視図。FIG. 10 is a perspective view of a magnetoresistive effect magnetic head according to a seventh embodiment of the present invention.
【図11】本発明の磁気ディスク装置の一実施例の模式
図。FIG. 11 is a schematic diagram of an embodiment of a magnetic disk device of the present invention.
【図12】本発明を説明するための共振周波数とヘッ
ド、ICの容量の和の関係図。FIG. 12 is a relationship diagram of a resonance frequency and a sum of capacities of a head and an IC for explaining the present invention.
【図13】本発明の磁気抵抗効果型磁気ヘッドの磁気デ
ィスク装置での実装図。FIG. 13 is a mounting view of the magnetoresistive head of the present invention in a magnetic disk device.
1…基板 2…下地絶縁層 3、10…磁気シールド層 4、5、11…絶縁層 6…磁気抵抗効果素子部 7…磁区制御用バイアス膜 9、9’…電極 12…電極端子パッド 13、13’…抵抗部 14…磁気抵抗効果型磁気ヘッド 15…コンデンサ部 15’…誘電体 16…絶縁層 17…ダイオード 21、31…磁気ディスク 22…スライダー 23…支持体 25…伝送線路 26…リードライトIC 32…アクチュエータ 33…ヘッド・ディスク・アッセンブリ 34…媒体駆動系 35…ヘッド駆動系 36…記録再生系 37…信号処理系 38…制御系 39…装置I/F部 DESCRIPTION OF SYMBOLS 1 ... Substrate 2 ... Base insulating layer 3, 10 ... Magnetic shield layer 4, 5, 11 ... Insulating layer 6 ... Magnetoresistive effect element part 7 ... Bias film for domain control 9, 9 '... Electrode 12 ... Electrode terminal pad 13, 13 '... Resistance part 14 ... Magnetoresistive magnetic head 15 ... Capacitor part 15' ... Dielectric 16 ... Insulating layer 17 ... Diode 21, 31 ... Magnetic disk 22 ... Slider 23 ... Support 25 ... Transmission line 26 ... Read / write IC 32 ... Actuator 33 ... Head / disk assembly 34 ... Medium drive system 35 ... Head drive system 36 ... Recording / reproduction system 37 ... Signal processing system 38 ... Control system 39 ... Device I / F section
───────────────────────────────────────────────────── フロントページの続き (72)発明者 大津 孝佳 神奈川県小田原市国府津2880番地 株式会 社日立製作所ストレージシステム事業部内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takaka Otsu 2880 Kokufu, Odawara-shi, Kanagawa Stock company Hitachi Storage Systems Division
Claims (1)
層と、磁気抵抗効果素子部と、該磁気抵抗効果素子部に
センス電流を流し、信号による電圧変化を検出するため
の一対の電極とを有する磁気抵抗効果型磁気ヘッドにお
いて、上記一対の電極の一方と上記一対の磁気シールド
層の一方の間に、磁気抵抗効果素子部に流れる電流より
も大きな電流が電極に流れたときに、シールドに電流を
流す電子素子を設けたことを特徴とする磁気抵抗効果型
磁気ヘッド。1. A pair of upper and lower magnetic shield layers, a magnetoresistive effect element portion, and a pair of electrodes for detecting a voltage change due to a signal by flowing a sense current through the magnetoresistive effect element portion on a substrate. In a magnetoresistive effect magnetic head having a, between one of the pair of electrodes and one of the pair of magnetic shield layers, when a current larger than the current flowing in the magnetoresistive effect element portion flows to the electrodes, A magnetoresistive effect magnetic head characterized in that an electronic element for flowing a current is provided on the shield.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7197208A JPH0944820A (en) | 1995-08-02 | 1995-08-02 | Magnetoresistive magnetic head |
| KR1019960032150A KR970012322A (en) | 1995-08-02 | 1996-08-01 | Magnetoresistive type magnetic head |
| CN96109280A CN1147668A (en) | 1995-08-02 | 1996-08-01 | Magnetoresistive magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7197208A JPH0944820A (en) | 1995-08-02 | 1995-08-02 | Magnetoresistive magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0944820A true JPH0944820A (en) | 1997-02-14 |
Family
ID=16370628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7197208A Pending JPH0944820A (en) | 1995-08-02 | 1995-08-02 | Magnetoresistive magnetic head |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPH0944820A (en) |
| KR (1) | KR970012322A (en) |
| CN (1) | CN1147668A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10247307A (en) * | 1997-03-04 | 1998-09-14 | Fujitsu Ltd | Magnetic head and magnetic storage device |
| JPH1196521A (en) * | 1997-09-18 | 1999-04-09 | Fujitsu Ltd | Magnetoresistive head and magnetic recording / reproducing device |
| JPH11296817A (en) * | 1998-04-08 | 1999-10-29 | Sony Corp | Magnetoresistive magnetic head |
| JP2002056513A (en) * | 2000-08-07 | 2002-02-22 | Alps Electric Co Ltd | Method for magnetoresistive head device |
| WO2004097808A1 (en) * | 2003-04-28 | 2004-11-11 | Hitachi, Ltd. | Magnetic head wafer and composite magnetic head manufacturing method |
| US7716811B2 (en) | 2005-10-28 | 2010-05-18 | Hitachi Global Storage Technologies Netherlands B.V. | Method for manufacturing a thin film magnetic head |
| JP2011100534A (en) * | 2009-11-09 | 2011-05-19 | Hitachi Global Storage Technologies Netherlands Bv | Head carrier |
| JP2019161160A (en) * | 2018-03-16 | 2019-09-19 | Tdk株式会社 | Magnetoresistive element, manufacturing method of the same, and position detection apparatus |
| KR20200060017A (en) * | 2018-11-22 | 2020-05-29 | 주식회사 네오엔비즈 | Energy saving aqua tank for biofloc |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104769691A (en) * | 2012-11-02 | 2015-07-08 | 罗姆股份有限公司 | Chip capacitors, circuit components, and electronic equipment |
-
1995
- 1995-08-02 JP JP7197208A patent/JPH0944820A/en active Pending
-
1996
- 1996-08-01 CN CN96109280A patent/CN1147668A/en active Pending
- 1996-08-01 KR KR1019960032150A patent/KR970012322A/en not_active Ceased
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10247307A (en) * | 1997-03-04 | 1998-09-14 | Fujitsu Ltd | Magnetic head and magnetic storage device |
| JPH1196521A (en) * | 1997-09-18 | 1999-04-09 | Fujitsu Ltd | Magnetoresistive head and magnetic recording / reproducing device |
| US6046890A (en) * | 1997-09-18 | 2000-04-04 | Fujitsu Limited | Method for protecting a magnetoresistive head from damage due to electrostatic discharge |
| JPH11296817A (en) * | 1998-04-08 | 1999-10-29 | Sony Corp | Magnetoresistive magnetic head |
| JP2002056513A (en) * | 2000-08-07 | 2002-02-22 | Alps Electric Co Ltd | Method for magnetoresistive head device |
| WO2004097808A1 (en) * | 2003-04-28 | 2004-11-11 | Hitachi, Ltd. | Magnetic head wafer and composite magnetic head manufacturing method |
| US7716811B2 (en) | 2005-10-28 | 2010-05-18 | Hitachi Global Storage Technologies Netherlands B.V. | Method for manufacturing a thin film magnetic head |
| JP2011100534A (en) * | 2009-11-09 | 2011-05-19 | Hitachi Global Storage Technologies Netherlands Bv | Head carrier |
| JP2019161160A (en) * | 2018-03-16 | 2019-09-19 | Tdk株式会社 | Magnetoresistive element, manufacturing method of the same, and position detection apparatus |
| US10895473B2 (en) | 2018-03-16 | 2021-01-19 | Tdk Corporation | Magnetoresistive effect element, manufacturing method thereof, and position detection apparatus |
| KR20200060017A (en) * | 2018-11-22 | 2020-05-29 | 주식회사 네오엔비즈 | Energy saving aqua tank for biofloc |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1147668A (en) | 1997-04-16 |
| KR970012322A (en) | 1997-03-29 |
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