JPH0944831A - Magnetic recording media - Google Patents
Magnetic recording mediaInfo
- Publication number
- JPH0944831A JPH0944831A JP19000995A JP19000995A JPH0944831A JP H0944831 A JPH0944831 A JP H0944831A JP 19000995 A JP19000995 A JP 19000995A JP 19000995 A JP19000995 A JP 19000995A JP H0944831 A JPH0944831 A JP H0944831A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic film
- metal magnetic
- recording medium
- amount
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
(57)【要約】 （修正有）
【課題】 保磁力が大きく、高密度記録に対応できる磁
気記録媒体を提供する。
【解決手段】 支持体上にＦｅ−Ｎ−Ｏ系金属磁性膜が
設けられてなる磁気記録媒体であって、前記金属磁性膜
は斜めコラム構造を有してなり、この磁気コラムの中心
部は主としてＦｅ−Ｎで構成されると共に、コラムの周
辺部にＦｅ−Ｎ−Ｏが構成。又は、前記金属磁性膜のオ
ージェ電子分光分析（スパッタ方向が金属磁性膜に対し
て斜め方向）において、縦軸にＦｅ量、Ｏ量を、横軸に
スパッタ時間をとると、Ｆｅ量、Ｏ量が各々波打ったパ
ターンを持つ磁気記録媒体。
(57) [Summary] (Correction) [Problem] To provide a magnetic recording medium having a large coercive force and capable of high-density recording. Kind Code: A1 A magnetic recording medium in which an Fe-N-O-based metal magnetic film is provided on a support, wherein the metal magnetic film has an oblique column structure, and the central portion of the magnetic column is Mainly composed of Fe-N, Fe-N-O is composed around the column. Alternatively, in Auger electron spectroscopic analysis of the metal magnetic film (the sputtering direction is an oblique direction with respect to the metal magnetic film), the Fe amount and the O amount are plotted on the vertical axis and the sputtering time is plotted on the horizontal axis. A magnetic recording medium with a wavy pattern.
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、Ｆｅ系金属磁性膜
を有する磁気記録媒体に関する。[0001] The present invention relates to a magnetic recording medium having an Fe-based metal magnetic film.
【０００２】[0002]
【発明が解決しようとする課題】磁性膜を蒸着やスパッ
タ等の乾式メッキ手段で構成した金属薄膜型の磁気記録
媒体が広く知られている。この磁性膜を構成する材料と
して種々のものが有る。このような磁性材料は、これま
で、主として、Ｃｏ−ＮｉやＣｏ−Ｃｒ系の磁性合金が
用いられている。A thin metal film type magnetic recording medium in which a magnetic film is formed by dry plating means such as evaporation or sputtering is widely known. There are various materials as a material constituting the magnetic film. As such magnetic materials, Co-Ni and Co-Cr based magnetic alloys have been mainly used so far.
【０００３】しかし、Ｃｏ，Ｎｉ，Ｃｒ等は価格が高
い。前記の問題点に鑑みて、Ｆｅが注目されている。こ
のＦｅは、価格が安く、かつ、公害問題を引き起こすこ
とも少ない。そして、Ｆｅ系金属磁性膜として、Ｆｅ−
Ｎ系金属磁性膜やＦｅ−Ｎ−Ｏ系金属磁性膜が提案され
ている。しかし、これまで提案されて来たＦｅ系金属磁
性膜は高密度記録に不可欠な保磁力が充分ではなかっ
た。However, Co, Ni, Cr and the like are expensive. In view of the above problems, attention is paid to Fe. This Fe is low in price and rarely causes pollution problems. Then, as the Fe-based metal magnetic film, Fe-
N-based metal magnetic films and Fe-NO-based metal magnetic films have been proposed. However, the Fe-based metal magnetic films proposed so far have not been sufficient in coercive force, which is essential for high-density recording.
【０００４】この点についての研究を鋭意押し進めて行
った結果、Ｆｅ−Ｎ−Ｏの構造によって保磁力の大幅な
向上を得ることが出来た。すなわち、従来のＦｅ−Ｎ−
Ｏ系金属磁性膜は、同一深さにあっては、Ｆｅ量、Ｎ
量、Ｏ量が位置によって均等なものになっていると考え
られる。すなわち、従来のＦｅ−Ｎ−Ｏ系金属磁性膜を
オージェ電子分光分析（スパッタ方向が金属磁性膜に対
して斜め方向）により調べ、縦軸にＦｅ，Ｎ，Ｏ量を、
横軸にスパッタ時間をとると、図５に示す如く、Ｆｅ，
Ｎ，Ｏ量は各々滑らかな単調増加パターンであったり、
単調減少パターンであったりする。尚、微細な波打ちは
認められるものの、ほぼ定常状態と見做すことが出来
る。As a result of earnestly conducting research on this point, it was possible to obtain a great improvement in coercive force due to the structure of Fe--N--O. That is, conventional Fe-N-
If the O-based metal magnetic film has the same depth, the amount of Fe, N
It is considered that the amount and the amount of O are uniform depending on the position. That is, a conventional Fe-N-O-based metal magnetic film is examined by Auger electron spectroscopy analysis (sputtering direction is an oblique direction with respect to the metal magnetic film), and Fe, N, and O contents are plotted on the vertical axis.
Taking the sputtering time on the horizontal axis, as shown in FIG.
The amount of N and O has a smooth monotonically increasing pattern,
It may be a monotonically decreasing pattern. It should be noted that, although fine waviness is recognized, it can be regarded as a substantially steady state.
【０００５】これに対して、図３に示す如く、Ｆｅ−Ｎ
−Ｏ系金属磁性膜をオージェ電子分光分析（スパッタ方
向が金属磁性膜に対して斜め方向）により調べ、縦軸に
Ｆｅ量、Ｎ量、Ｏ量を、横軸にスパッタ時間をとった場
合に、Ｆｅ量やＯ量が大きく波打ったパターンを持つ場
合には、このＦｅ−Ｎ−Ｏ系金属磁性膜の保磁力は大幅
に向上したものであった。On the other hand, as shown in FIG. 3, Fe--N
When the -O-based metal magnetic film is examined by Auger electron spectroscopy analysis (sputtering direction is oblique to the metal magnetic film), the Fe amount, N amount, and O amount are plotted on the vertical axis and the sputtering time is plotted on the horizontal axis. When the Fe amount and the O amount were large and wavy, the coercive force of the Fe—N—O based metal magnetic film was significantly improved.
【０００６】このような知見を基にして本発明が達成さ
れたものであり、保磁力が大きく、高密度記録に対応で
きる磁気記録媒体を提供することを目的とする。The present invention has been achieved based on such knowledge, and an object thereof is to provide a magnetic recording medium having a large coercive force and capable of coping with high density recording.
【０００７】[0007]
【課題を解決するための手段】この本発明の目的は、支
持体上にＦｅ−Ｎ−Ｏ系金属磁性膜が設けられてなる磁
気記録媒体であって、前記金属磁性膜は斜めコラム構造
を有してなり、この磁気コラムの中心部は主としてＦｅ
−Ｎで構成されると共に、コラムの周辺部にＦｅ−Ｎ−
Ｏが構成されてなることを特徴とする磁気記録媒体によ
って達成される。SUMMARY OF THE INVENTION An object of the present invention is a magnetic recording medium having a Fe--N--O system metal magnetic film provided on a support, wherein the metal magnetic film has an oblique column structure. The magnetic column mainly has Fe at the center.
-N- and Fe-N- around the column
This is achieved by a magnetic recording medium characterized by comprising O.
【０００８】又、支持体上にＦｅ−Ｎ−Ｏ系金属磁性膜
が設けられてなる磁気記録媒体であって、前記金属磁性
膜のオージェ電子分光分析（スパッタ方向が金属磁性膜
に対して斜め方向）において、縦軸にＦｅ量、Ｏ量を、
横軸にスパッタ時間をとると、Ｆｅ量、Ｏ量が各々波打
ったパターンを持つことを特徴とする磁気記録媒体によ
って達成される。Further, there is provided a magnetic recording medium comprising an Fe—N—O type metal magnetic film provided on a support, wherein the metal magnetic film is subjected to Auger electron spectroscopy analysis (sputtering direction is oblique to the metal magnetic film). Direction), the vertical axis represents the Fe content and the O content,
When the sputtering time is plotted on the abscissa, the amount of Fe and the amount of O are achieved by a magnetic recording medium characterized by having wavy patterns.
【０００９】特に、支持体上にＦｅ−Ｎ−Ｏ系金属磁性
膜が設けられてなる磁気記録媒体であって、前記金属磁
性膜は斜めコラム構造を有してなり、この磁気コラムの
中心部は主としてＦｅ−Ｎで構成されると共に、コラム
の周辺部にＦｅ−Ｎ−Ｏが構成されてなり、更に、前記
金属磁性膜のオージェ電子分光分析（スパッタ方向が金
属磁性膜に対して斜め方向）において、縦軸にＦｅ量、
Ｏ量を、横軸にスパッタ時間をとると、Ｆｅ量、Ｏ量が
各々波打ったパターンを持つことを特徴とする磁気記録
媒体によって達成される。In particular, in a magnetic recording medium in which a Fe--N--O type metal magnetic film is provided on a support, the metal magnetic film has an oblique column structure, and the central portion of the magnetic column is formed. Is mainly composed of Fe—N, and Fe—N—O is formed in the peripheral portion of the column. Further, Auger electron spectroscopic analysis of the metal magnetic film (the sputtering direction is oblique to the metal magnetic film) is performed. ), The vertical axis represents the amount of Fe,
When the amount of O is plotted along the abscissa as the sputtering time, the amount of Fe and the amount of O are achieved by a magnetic recording medium having a wavy pattern.
【００１０】[0010]
【発明の実施の形態】本発明は、支持体上にＦｅ−Ｎ−
Ｏ系金属磁性膜が設けられてなる磁気記録媒体であっ
て、前記金属磁性膜は斜めコラム構造を有してなり、こ
の磁気コラムの中心部は主としてＦｅ−Ｎで構成される
と共に、コラムの周辺部にＦｅ−Ｎ−Ｏが構成されたも
のである。BEST MODE FOR CARRYING OUT THE INVENTION The present invention relates to Fe-N- on a support.
A magnetic recording medium provided with an O-based metal magnetic film, wherein the metal magnetic film has an oblique column structure, and the central portion of the magnetic column is mainly composed of Fe-N and Fe-N-O is formed in the peripheral portion.
【００１１】又、支持体上にＦｅ−Ｎ−Ｏ系金属磁性膜
が設けられてなる磁気記録媒体であって、前記金属磁性
膜のオージェ電子分光分析（スパッタ方向が金属磁性膜
に対して斜め方向）において、縦軸にＦｅ量、Ｏ量を、
横軸にスパッタ時間をとると、Ｆｅ量、Ｏ量が各々波打
ったパターンを持つものである。特に、支持体上にＦｅ
−Ｎ−Ｏ系金属磁性膜が設けられてなる磁気記録媒体で
あって、前記金属磁性膜は斜めコラム構造を有してな
り、この磁気コラムの中心部は主としてＦｅ−Ｎで構成
されると共に、コラムの周辺部にＦｅ−Ｎ−Ｏが構成さ
れてなり、更に、前記金属磁性膜のオージェ電子分光分
析（スパッタ方向が金属磁性膜に対して斜め方向）にお
いて、縦軸にＦｅ量、Ｏ量を、横軸にスパッタ時間をと
ると、Ｆｅ量、Ｏ量が各々波打ったパターンを持つもの
である。A magnetic recording medium comprising an Fe—N—O-based metal magnetic film provided on a support, wherein the metal magnetic film is subjected to Auger electron spectroscopy analysis (sputtering direction is oblique to the metal magnetic film). Direction), the vertical axis represents the Fe content and the O content,
When the sputtering time is plotted on the abscissa, the Fe amount and the O amount each have a wavy pattern. In particular, Fe on the support
A magnetic recording medium provided with a -N-O based metal magnetic film, wherein the metal magnetic film has an oblique column structure, and the center of the magnetic column is mainly composed of Fe-N. Fe—N—O is formed in the peripheral portion of the column, and further, in Auger electron spectroscopic analysis of the metal magnetic film (the sputtering direction is an oblique direction with respect to the metal magnetic film), the vertical axis represents the Fe content, O When the sputtering amount is plotted on the horizontal axis, the amount of Fe and the amount of O each have a wavy pattern.
【００１２】尚、本発明に言う波打ったパターンとは、
初期ピークを除いて、その中心仮想線から約５％以上の
振幅変動が認められるものを言う。従って、２〜３％程
度の小さい振動の場合には、波打ったパターンとは見做
さない。このような磁気記録媒体は、蒸着やスパッタ等
のＰＶＤ（フィジカルベーパーデポジション）法を用い
ることで作製できる。例えば、成膜速度が大きな蒸着法
を例にとって説明すると次のようになる。斜め蒸着装置
内を所定の真空度に排気すると共に、電子銃あるいはそ
の他の手段によりＦｅ系金属材料を蒸発させ、走行する
支持体上にＦｅ系金属粒子を付着・堆積させる。この付
着・堆積に際しては、Ｆｅ系金属蒸発粒子あるいは堆積
面に向けて窒素ガス（又は窒素イオン）や酸素ガス（又
は酸素イオン）等を照射し、非磁性の支持体上に設ける
磁性膜をＦｅ−Ｎ−Ｏ系膜とする。尚、Ｆｅ−Ｎ−Ｏ系
金属磁性膜におけるＦｅ：Ｎ：Ｏは５０〜８０ａｔ％：
１０〜４０ａｔ％：１０〜４０ａｔ％が好ましい。より
好ましくは、Ｆｅ：Ｎ：Ｏが５５〜７０ａｔ％：１５〜
３０ａｔ％：１５〜３０ａｔ％である。この成膜に際
し、窒素ガス（又は窒素イオン）と酸素ガス（又は酸素
イオン）との関係を調整することは大事である。例え
ば、後述する比較例でも示すように、同じ手法が採用さ
れても、導入する窒素量を変化させると、本発明が提案
した金属磁性膜の構造（斜めコラム構造の磁気コラムの
中心部は主としてＦｅ−Ｎで構成されると共に、コラム
の周辺部にＦｅ−Ｎ−Ｏが構成、あるいは金属磁性膜の
オージェ電子分光分析（スパッタ方向が金属磁性膜に対
して斜め方向）において、縦軸にＦｅ量、Ｏ量を、横軸
にスパッタ時間をとると、Ｆｅ量、Ｏ量が各々波打った
パターンを持つこと）にはならず、低保磁力のものしか
得られない場合が有る。The wavy pattern referred to in the present invention is
Except for the initial peak, an amplitude variation of about 5% or more is observed from the center virtual line. Therefore, in the case of a small vibration of about 2 to 3%, it is not regarded as a wavy pattern. Such a magnetic recording medium can be manufactured by using a PVD (physical vapor deposition) method such as vapor deposition or sputtering. For example, a vapor deposition method with a high film formation rate will be described as follows. The inside of the oblique vapor deposition apparatus is evacuated to a predetermined vacuum degree, the Fe-based metal material is evaporated by an electron gun or other means, and the Fe-based metal particles are attached and deposited on the running support. At the time of this attachment / deposition, nitrogen gas (or nitrogen ions), oxygen gas (or oxygen ions) or the like is irradiated toward the Fe-based metal vaporized particles or the deposition surface, and the magnetic film provided on the non-magnetic support is Fe. -N-O based film. Fe: N: O in the Fe-N-O based metal magnetic film is 50 to 80 at%:
10-40 at%: 10-40 at% is preferable. More preferably, Fe: N: O is 55 to 70 at%: 15
30 at%: 15 to 30 at%. In forming this film, it is important to adjust the relationship between the nitrogen gas (or nitrogen ions) and the oxygen gas (or oxygen ions). For example, as shown in a comparative example described later, even if the same method is adopted, when the amount of introduced nitrogen is changed, the structure of the metal magnetic film proposed by the present invention (the central part of the magnetic column of the oblique column structure is mainly In addition to Fe-N, Fe-N-O is formed around the column, or in the Auger electron spectroscopic analysis of the metal magnetic film (sputtering direction is oblique to the metal magnetic film), the vertical axis represents Fe. If the amount of oxygen and the amount of O are plotted on the horizontal axis, the Fe amount and the O amount do not have wavy patterns), and only a low coercive force may be obtained.
【００１３】尚、蒸発源に置くＦｅ材料としては色々な
ものが使用できるが、本発明において効果的なものはＦ
ｅ以外の金属元素の含有量は約５ｗｔ％以下であるか
ら、これらの金属元素による変動は僅かであり、Ｆｅ，
Ｎ，Ｏのみで規定した。上記のようにして１０００〜１
００００Å厚さのＦｅ系金属磁性膜が設けられると、必
要に応じて、ダイヤモンドライクカーボン、炭化ホウ
素、窒化珪素などからなる５０〜２００Å程度の厚さの
保護膜がＦｅ系金属磁性膜上に設けられる。又、パーフ
ルオロポリエーテル等のフッ素系の潤滑剤が２０〜７０
Å程度の厚さ設けられる。Various materials can be used as the Fe material placed in the evaporation source, but the material effective in the present invention is F
Since the content of the metal elements other than e is about 5 wt% or less, the variation due to these metal elements is small.
It is specified only by N and O. 1000-1 as above
When the Fe-based metal magnetic film having a thickness of 0000Å is provided, a protective film made of diamond-like carbon, boron carbide, silicon nitride or the like and having a thickness of about 50 to 200Å is provided on the Fe-based metal magnetic film, if necessary. To be Further, a fluorine-based lubricant such as perfluoropolyether is 20 to 70
Å About the thickness is provided.
【００１４】そして、上記のように構成させた磁気記録
媒体は、高い保磁力、かつ、高い飽和磁束密度を有する
ものであり、高密度記録に対応できる。しかも、耐蝕性
にも優れている。かつ、磁性材料のＦｅは安価で、公害
問題を起こし難い。特に、高純度Ｆｅを用いなくても良
いから、コストがより低廉である。The magnetic recording medium configured as described above has a high coercive force and a high saturation magnetic flux density, and can be used for high density recording. Moreover, it has excellent corrosion resistance. Moreover, the magnetic material Fe is inexpensive and is unlikely to cause pollution problems. In particular, since it is not necessary to use high-purity Fe, the cost is lower.
【００１５】[0015]
【実施例１】図１は、本発明になる磁気記録媒体の製造
装置の概略図である。図１中、１は非磁性の支持体、例
えばＰＥＴフィルム、２ａはＰＥＴフィルム１の供給側
ロール、２ｂはＰＥＴフィルム１の巻取側ロール、３は
冷却キャンロール、４は遮蔽板、５はルツボ、６はＦｅ
系磁性金属、７は出力８ｋＷの電子銃、８は真空槽、９
は窒素ガス供給ノズル、１０は加速電圧６００Ｖ、出力
４００Ｗのカウフマン型のイオン銃である。これらの中
の殆どの構成は良く知られているから、詳細な説明は省
略する。Embodiment 1 FIG. 1 is a schematic diagram of a magnetic recording medium manufacturing apparatus according to the present invention. In FIG. 1, 1 is a non-magnetic support, such as a PET film, 2a is a PET film 1 supply side roll, 2b is a PET film 1 winding side roll, 3 is a cooling can roll, 4 is a shielding plate, and 5 is a shield plate. Crucible, 6 is Fe
System magnetic metal, 7 is an electron gun with an output of 8 kW, 8 is a vacuum chamber, 9
Is a nitrogen gas supply nozzle, and 10 is a Kauffman type ion gun with an acceleration voltage of 600 V and an output of 400 W. Since most of these configurations are well known, detailed description is omitted.
【００１６】本実施例の磁気記録媒体（磁気テープ）は
図１に示すような斜め蒸着装置を用いることによって得
られる。すなわち、６μｍ厚さのＰＥＴフィルム１を供
給側ロール２ａと巻取側ロール２ｂとの間に掛け渡し、
冷却キャンロール３に沿って０．５ｍ／分の速度で走行
させる。真空槽８内を１０-4〜１０-6Ｔｏｒｒ、例えば
８．８×１０-5Ｔｏｒｒ程度の真空度に排気した後、電
子銃７からの電子ビーム加熱によりルツボ５内の磁性金
属Ｆｅを溶融、蒸発させ、ＰＥＴフィルム１上に厚さが
１０００〜１００００Å、例えば２４００ÅのＦｅ系金
属磁性膜を設けた。The magnetic recording medium (magnetic tape) of this embodiment can be obtained by using an oblique vapor deposition apparatus as shown in FIG. That is, the PET film 1 having a thickness of 6 μm is passed between the supply side roll 2a and the winding side roll 2b,
The cooling can roll 3 is run at a speed of 0.5 m / min. After evacuating the vacuum chamber 8 to a vacuum degree of 10 −4 to 10 −6 Torr, for example, about 8.8 × 10 −5 Torr, the magnetic metal Fe in the crucible 5 is melted by electron beam heating from the electron gun 7. After evaporation, a Fe-based metal magnetic film having a thickness of 1000 to 10000Å, for example, 2400Å was provided on the PET film 1.
【００１７】Ｆｅ系金属磁性膜の成膜時に、窒素ガス供
給ノズル９から窒素ガスを１０ｓｃｃｍ供給すると共
に、イオン銃１０に窒素ガスと酸素ガスとの混合ガス
（Ｎ2 ：Ｏ2 ＝９０：１０）を２０ｓｃｃｍ供給し、Ｆ
ｅ系金属磁性膜に向けて窒素イオンと酸素イオンとを照
射した。このようにして得られたＦｅ−Ｎ−Ｏ系金属磁
性膜の断面ＴＥＭ像を図２に示す。又、オージェ電子分
光分析（スパッタ方向が金属磁性膜に対して斜め方向）
による結果を図３に示す。尚、測定は、電子銃条件；加
速電圧１０ｋＶ、エミッション電流１０ｎＡ、倍率２０
００倍、エッチング条件；エッチングガスＡｒ、加速電
圧３ｋＶ、Ｉｏｎ電流３００ｎＡであり、３０分間エッ
チングして行った。When the Fe-based metal magnetic film is formed, 10 sccm of nitrogen gas is supplied from the nitrogen gas supply nozzle 9 and a mixed gas of nitrogen gas and oxygen gas (N 2 : O 2 = 90: 10) is supplied to the ion gun 10. ) For 20 sccm, F
Nitrogen ions and oxygen ions were irradiated toward the e-based metal magnetic film. FIG. 2 shows a cross-sectional TEM image of the Fe—N—O-based metal magnetic film thus obtained. Also, Auger electron spectroscopy analysis (sputtering direction is diagonal to the metal magnetic film)
The results of the above are shown in FIG. The measurement was carried out under electron gun conditions; acceleration voltage 10 kV, emission current 10 nA, magnification 20.
00 times, etching conditions; etching gas Ar, accelerating voltage 3 kV, Ion current 300 nA, etching was performed for 30 minutes.
【００１８】これによれば、Ｆｅ−Ｎ−Ｏ系金属磁性膜
は、斜めコラム構造を有し、この磁気コラムの中心部は
主としてＦｅ−Ｎで構成されると共に、コラムの周辺部
にＦｅ−Ｎ−Ｏが構成されたものであることが判る。そ
して、このＦｅ−Ｎ−Ｏ系金属磁性膜について、その保
磁力Ｈｃを調べると１４５０Ｏｅであり、極めて高保磁
力なものである。又、飽和磁束密度Ｂｓは７１００Ｇ、
Ｂｒ／Ｂｓが０．８１であり、高密度記録に対応でき
る。According to this, the Fe-N-O-based metal magnetic film has an oblique column structure, the central portion of this magnetic column is mainly made of Fe-N, and Fe- is formed in the peripheral portion of the column. It can be seen that N-O is constructed. When the coercive force Hc of this Fe—N—O based metal magnetic film is examined, it is 1450 Oe, which is an extremely high coercive force. Also, the saturation magnetic flux density Bs is 7100G,
Br / Bs is 0.81 and can be applied to high density recording.
【００１９】[0019]
【比較例１】実施例１において、窒素ガス供給ノズル９
からの窒素供給量を２００ｓｃｃｍとし、かつ、カウフ
マン型のイオン銃における加速電圧を３００Ｖ、出力を
２００Ｗとした他は、実施例１に準じて行った。このよ
うにして得られたＦｅ−Ｎ−Ｏ系金属磁性膜の断面ＴＥ
Ｍ像を図４に示す。又、オージェ電子分光分析（スパッ
タ方向が金属磁性膜に対して斜め方向）による結果を図
５に示す。Comparative Example 1 In Example 1, the nitrogen gas supply nozzle 9 was used.
Example 2 was carried out in the same manner as in Example 1 except that the amount of nitrogen supplied from the apparatus was 200 sccm, the accelerating voltage in the Kauffman type ion gun was 300 V, and the output was 200 W. The cross-section TE of the Fe—N—O-based metal magnetic film thus obtained
The M image is shown in FIG. FIG. 5 shows the result of Auger electron spectroscopy analysis (sputtering direction is oblique to the metal magnetic film).
【００２０】これによれば、Ｆｅ−Ｎ−Ｏ系金属磁性膜
は、本願発明のタイプではないことが判る。そして、こ
のＦｅ−Ｎ−Ｏ系金属磁性膜について、その保磁力Ｈｃ
を調べると４６０Ｏｅであり、保磁力は小さい。又、飽
和磁束密度Ｂｓは５４００Ｇ、Ｂｒ／Ｂｓが０．３８で
あり、高密度記録には対応できないものである。According to this, it is understood that the Fe—N—O type metal magnetic film is not the type of the present invention. The coercive force Hc of the Fe-N-O based metal magnetic film
Is 460 Oe, and the coercive force is small. Further, the saturation magnetic flux density Bs is 5400 G and Br / Bs is 0.38, which cannot be applied to high density recording.
【００２１】[0021]
【効果】安価な材料を用いて高密度記録に適した磁気記
録媒体が得られる。[Effect] A magnetic recording medium suitable for high density recording can be obtained by using an inexpensive material.
【図１】本発明の磁気記録媒体の製造装置の概略図FIG. 1 is a schematic view of an apparatus for manufacturing a magnetic recording medium of the present invention.
【図２】本発明のＦｅ−Ｎ−Ｏ系金属磁性膜の断面ＴＥ
Ｍ像FIG. 2 is a cross section TE of the Fe—N—O-based metal magnetic film of the present invention.
M image
【図３】本発明のＦｅ−Ｎ−Ｏ系金属磁性膜の斜め方向
のオージェ電子分光分析のグラフFIG. 3 is a graph of Auger electron spectroscopic analysis in the oblique direction of the Fe—N—O-based metal magnetic film of the present invention.
【図４】本発明外のＦｅ−Ｎ−Ｏ系金属磁性膜の断面Ｔ
ＥＭ像FIG. 4 is a sectional view T of the Fe—N—O based metal magnetic film outside the present invention.
EM image
【図５】本発明外のＦｅ−Ｎ−Ｏ系金属磁性膜の斜め方
向のオージェ電子分光分析のグラフFIG. 5 is a graph of Auger electron spectroscopic analysis in the oblique direction of the Fe—N—O-based metal magnetic film of the present invention.
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成７年７月２６日[Submission date] July 26, 1995
【手続補正１】[Procedure amendment 1]
【補正対象書類名】図面[Document name to be amended] Drawing
【補正対象項目名】図２[Correction target item name] Figure 2
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【図２】 [Fig. 2]
【手続補正２】[Procedure amendment 2]
【補正対象書類名】図面[Document name to be amended] Drawing
【補正対象項目名】図４[Correction target item name] Fig. 4
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【図４】 FIG. 4
───────────────────────────────────────────────────── フロントページの続き (72)発明者 石川 准子 栃木県芳賀郡市貝町大字赤羽2606 花王株 式会社情報科学研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Junko Ishikawa 2606 Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Corporation Company Information Science Laboratory
Claims (3)
設けられてなる磁気記録媒体であって、 前記金属磁性膜は斜めコラム構造を有してなり、 この磁気コラムの中心部は主としてＦｅ−Ｎで構成され
ると共に、 コラムの周辺部にＦｅ−Ｎ−Ｏが構成されてなることを
特徴とする磁気記録媒体。1. A magnetic recording medium comprising an Fe—N—O-based metal magnetic film provided on a support, wherein the metal magnetic film has an oblique column structure. Is mainly Fe—N and Fe—N—O is formed in the peripheral portion of the column.
設けられてなる磁気記録媒体であって、 前記金属磁性膜のオージェ電子分光分析（スパッタ方向
が金属磁性膜に対して斜め方向）において、縦軸にＦｅ
量、Ｏ量を、横軸にスパッタ時間をとると、Ｆｅ量、Ｏ
量が各々波打ったパターンを持つことを特徴とする磁気
記録媒体。2. A magnetic recording medium comprising a Fe—N—O-based metal magnetic film provided on a support, the Auger electron spectroscopy analysis of the metal magnetic film (sputtering direction is oblique to the metal magnetic film). Direction), the vertical axis represents Fe
When the sputtering time is plotted on the horizontal axis, the amount of Fe and the amount of O
A magnetic recording medium characterized in that each quantity has a wavy pattern.
設けられてなる磁気記録媒体であって、 前記金属磁性膜は斜めコラム構造を有してなり、 この磁気コラムの中心部は主としてＦｅ−Ｎで構成され
ると共に、コラムの周辺部にＦｅ−Ｎ−Ｏが構成されて
なり、 更に、前記金属磁性膜のオージェ電子分光分析（スパッ
タ方向が金属磁性膜に対して斜め方向）において、縦軸
にＦｅ量、Ｏ量を、横軸にスパッタ時間をとると、Ｆｅ
量、Ｏ量が各々波打ったパターンを持つことを特徴とす
る磁気記録媒体。3. A magnetic recording medium comprising an Fe—N—O-based metal magnetic film provided on a support, wherein the metal magnetic film has an oblique column structure, and a central portion of the magnetic column. Is mainly composed of Fe-N, and Fe-N-O is formed in the peripheral portion of the column. Further, Auger electron spectroscopic analysis of the metal magnetic film (sputtering direction is oblique to the metal magnetic film). ), The vertical axis represents the amounts of Fe and O, and the horizontal axis represents the sputtering time.
A magnetic recording medium characterized by having a wavy pattern in each of the amount and the amount of O.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19000995A JPH0944831A (en) | 1995-07-26 | 1995-07-26 | Magnetic recording media |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19000995A JPH0944831A (en) | 1995-07-26 | 1995-07-26 | Magnetic recording media |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0944831A true JPH0944831A (en) | 1997-02-14 |
Family
ID=16250864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19000995A Pending JPH0944831A (en) | 1995-07-26 | 1995-07-26 | Magnetic recording media |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0944831A (en) |
-
1995
- 1995-07-26 JP JP19000995A patent/JPH0944831A/en active Pending
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