JPH0944914A - Disk attachment / detachment device - Google Patents

Abstract

(57) An object of the present invention is to provide a disk attaching / detaching device, which can reduce the amount of the delamination from the surface of a mask material on the disk substrate when forming a thin film layer on the disk substrate. A disk attaching / detaching apparatus of the present invention is used for manufacturing a disk-shaped recording medium by mounting a disk substrate partially masked by a mask material on a pallet and forming a thin film layer on the disk substrate. Used for attaching the mask material and the disk substrate to the pallet, and for removing the mask material and the disk substrate from the pallet, and having a vacuum suction device for holding the mask material by vacuum suction. I am trying.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for mounting a mask material and a disk substrate on a pallet and for removing a mask material and a disk substrate from a pallet when manufacturing a disk-shaped recording medium such as a magneto-optical disk. Disk attachment / detachment device.

[0002]

2. Description of the Related Art A disc-shaped recording medium such as an optical disc, a magneto-optical disc or a magnetic disc is a disc-shaped recording medium capable of recording a large amount of information and is a recording layer or the like on a disc substrate. A thin film layer is formed.

In manufacturing such a disc-shaped recording medium, first, a plurality of disc substrates are attached to a pallet for supporting the disc substrates when forming a thin film layer.
At this time, as shown in FIG. 5, the pallet 100 prevents the disc substrate 101 from falling and the disc substrate 10
A mask material 102 is attached together with the disk substrate 101 for the purpose of preventing film formation on an unnecessary portion of No. 1. That is, the disk substrate 101 is attached to the pallet 100 with a part thereof masked by the mask material 102. Here, the mask material 102 includes the disk substrate 1
An outer mask 1 arranged to cover the outer peripheral portion of 01
02a and an inner mask 102b arranged so as to cover the inner peripheral portion of the disk substrate 101.

After that, the pallet 100 to which the disk substrate 101 partially masked by the mask material 102 is attached is placed in a film forming chamber to form a thin film layer on the disk substrate 101. Here, since the thin film layer is usually composed of a plurality of thin films, the pallet 100 to which the disk substrate 101 is attached goes through a plurality of film forming chambers.
At this time, naturally, a thin film layer is also formed on the surface of the mask material 102.

After the film formation of the thin film layer is completed, the pallet 100 to which the disk substrate 101 is attached is taken out from the film forming chamber, and the disk substrate 10 is removed from the pallet 100.
Remove 1. At this time, the mask material 102 is also removed from the pallet 100 together with the disk substrate 101.

Through the above steps, the film formation of the thin film layer on the disk substrate 101 is completed. Here, the mask material 102
Is removed from the disk substrate 101 on which the film has been formed and is used for forming a thin film layer on a new disk substrate.

By the way, as described above, when forming a thin film layer on a disk substrate, it is a major problem to remove dust such as dust. That is, if dust adheres to the disk substrate before the thin film layer is formed, the thin film layer is not formed in the portion shielded by the dust, and a pinhole is generated in this portion, resulting in an error. Alternatively, if dust adheres to the disk substrate after the thin film layer is formed, the dust causes an error during recording / reproduction.
Thus, when a thin film layer is formed on the disc substrate to produce a disc-shaped recording medium, dust is removed during the formation of the thin-film layer in order to reduce the error rate of the disc-shaped recording medium. Is important.

[0008] Therefore, conventionally, in order to prevent generation of dust during the film formation of the thin film layer, the disk substrate is handled during the film formation of the thin film layer in a dry clean room without human intervention. The device is used to automatically perform the process. That is, in the past, a disk loading / unloading device automatically receives a disk substrate before film formation and attaches the disk substrate together with the mask material to the pallet, and automatically removes the disk substrate after film deposition from the pallet together with the mask material. I have to. Here, usually, the attachment and detachment of the mask material by the disc attaching / detaching device is performed by an electromagnet provided in the disc attaching / detaching device.

As described above, by automatically handling the disk substrate during the film formation of the thin film layer in the dry clean room by using the disk attachment / detachment device, dust adheres to the disk substrate during the film formation of the thin film layer. Is significantly reduced, and it is possible to reduce errors caused by dust in the room or dust generated by workers.

[0010]

When forming a thin film layer on a disk substrate, a mask material is attached to the disk substrate, and the thin film layer is also formed on the surface of this mask material. Here, since the mask material is repeatedly used for forming a thin film layer on the disk substrate, the film thickness of the thin film layer formed on the surface of the mask material gradually increases.

When the film thickness of the thin film layer formed on the surface of the mask material becomes large, the film-deposited material is peeled off by the contact between the disk attaching / detaching device and the mask material when the mask material is attached or detached. It becomes easier to do. Then, the peeled matter peeled off from the surface of the mask material in this way becomes dust, and when such peeled matter adheres to the disk substrate,
As described above, it causes an error in the manufactured disc-shaped recording medium.

That is, when the conventional disk attaching / detaching device is used, as the mask material is repeatedly used, the film-forming material is easily separated from the surface of the mask material, and the dust formed of the separated material is deposited on the disk substrate. It had adhered.

Conventionally, when such a problem occurs, it is dealt with by replacing the mask material with a new one, and the mask material in which the film-forming material is accumulated is regenerated, that is, a film is formed on the surface of the mask material. The film is removed before being reused. However, in such a conventional method, since it is necessary to frequently perform the reclaiming process on the mask material, the running cost becomes enormous and the manufacturing cost of the disk-shaped recording medium is increased.

Therefore, the present invention has been proposed in view of such a conventional situation, and when a thin film layer is formed on a disk substrate, the delamination from the surface of the mask material adheres to the disk substrate. It is an object of the present invention to provide a disk attaching / detaching device that requires a small amount.

[0015]

A disk attaching / detaching apparatus according to the present invention completed in order to achieve the above-mentioned object is mounted on a pallet after a disk substrate partially masked by a mask material is mounted on a pallet. A disk attaching / detaching device used for attaching a mask material and a disk substrate to a pallet, and for removing a mask material and the disk substrate from a pallet when a disk-shaped recording medium is manufactured by forming a thin film layer. A vacuum suction device for holding the mask material by vacuum suction is provided. Here, it is preferable that the vacuum suction device introduces the atmosphere to release the vacuum suction mask material to perform vacuum suction breakdown.

In the disk desorbing device according to the present invention, the mask material is held by being vacuum-adsorbed by the vacuum adsorbing device. Therefore, it is possible to prevent the peeled material from the surface of the mask material from adhering to the disk substrate.

[0017]

Embodiments of the present invention will be described below in detail with reference to the drawings.

First, the overall structure of an example of a disk-shaped recording medium manufacturing system equipped with the disk mounting / demounting device according to the present embodiment will be described.

This disc-shaped recording medium manufacturing system is
1 is a system for manufacturing a magneto-optical disk in which a thin film layer is formed on a disk substrate, and as shown in FIG. 1, a heat treatment room 1 having a heating device and a dry clean room 3 having a disk attaching / detaching device 2 in the room. A degassing chamber 4 evacuated to a vacuum; a charging chamber 5 arranged between the dry cleaning room 3 and the degassing chamber 4; a sputtering chamber 6 for depositing a thin film layer on the disk substrate 10; A take-out chamber 7 is provided between the chamber 6 and the dry cleaning room 3.

When manufacturing a magneto-optical disk using this disk-shaped recording medium manufacturing system, first, the disk substrate 10 on which a thin film layer has not been formed is carried into the heat treatment chamber 1, and the disk substrate 10 is heat-treated. Heat treatment is applied in the chamber 1.

Next, the heat-treated disk substrate 10
Are carried into the dry cleaning room 3 from the heat treatment room 1, and the disk substrates 10 are sequentially attached to the pallet 11 by the disk attaching / detaching device 2 provided in the dry cleaning room 3. At this time, the pallet 11 has
A plurality of disk substrates 10 are attached in a state in which some of them are masked by a mask material. Here, the mask material is
There are an outer mask and an inner mask, the outer mask is arranged so as to cover the outer peripheral portion of the disk substrate 10, and the inner mask is arranged so as to cover the inner peripheral portion of the disk substrate 10.

Next, the pallet 11 to which the plurality of disk substrates 10 are attached is carried from the dry cleaning room 3 into the preparation room 5. Here, the charging chamber 5 is for preventing the degassing chamber 4 from being exposed to the atmosphere,
The interior of the charging chamber 5 is evacuated to a vacuum after the pallet 11 is loaded.

Next, the pallet 11 to which the plurality of disk substrates 10 are attached is carried in from the preparation chamber 5 to the degassing chamber 4 which is evacuated to vacuum. At this time, since the charging chamber 5 is evacuated to a reduced pressure or a vacuum, the degassing chamber 4 is not opened to the atmosphere.

Next, the pallet 11 to which a plurality of disk substrates 10 are attached is carried into the sputtering chamber 6 from the degassing chamber 4, and a thin film layer is formed on the disk substrate 10 in the sputtering chamber 6. Here, the sputtering chamber 6 includes a first dielectric film forming chamber 6a, a magnetic film forming chamber 6b, and a second dielectric film forming chamber 6b.
It is provided with four independent chambers of c and the reflection film forming chamber 6d.
That is, first, the first dielectric film is formed in the first dielectric film forming chamber 6a by sputtering, and then the magnetic film is formed in the magnetic film forming chamber 6b by sputtering. Then, the second dielectric film is formed by sputtering in the second dielectric film forming chamber 6c, and then the reflective film is formed by sputtering in the reflective film forming chamber 6d. A thin film layer is formed on top.

Next, the pallet 11 to which the plurality of disk substrates 10 on which the thin film layers have been formed is attached is carried from the sputtering chamber 6 into the take-out chamber 7. Here, the take-out chamber 7 is provided to prevent the sputter chamber 6 from being exposed to the atmosphere, and after introducing the pallet 11 into the take-out chamber 7, the atmosphere is introduced and the pallet is taken out of the take-out chamber 7 as described later. After carrying out 11, the material is evacuated again.

Next, the pallet 11 to which the plurality of disk substrates 10 on which the thin film layers have been formed is attached is carried into the dry cleaning room 3 from the take-out chamber 7. At this time, since the take-out chamber 7 is evacuated to a reduced pressure or a vacuum, the sputter chamber 6 is not exposed to the atmosphere.

Next, the disk substrate 10 on which the thin film layers have been formed is sequentially removed from the pallet 11 by the disk attaching / detaching device 2 provided in the dry cleaning room 3. At this time, the mask material attached to each disc substrate 10 is removed and used when attaching a new disc substrate 10 on which a thin film layer is not formed to the pallet 11.

Through the above steps, the magneto-optical disk 10a having the thin film layer formed on the disk substrate 10 is completed. Then, the completed magneto-optical disk 10 a is carried out from the dry cleaning room 3.

Next, the disc attaching / detaching device 2 arranged in the dry clean room 3 of the disc-shaped recording medium manufacturing system as described above will be described in detail.

As shown in FIG. 2, the disc attaching / detaching device 2 has a support base 20 for supporting the disc attaching / detaching device 2.
The disk substrate 10, the outer mask 12, and the inner mask 13 are attached and detached by a vacuum attachment and detachment mechanism 21, and a moving mechanism 22 that moves the detachment mechanism 21 back and forth.

The moving mechanism 22 is a first member mounted on the support 20 so as to be rotatable with respect to the support 20.
Arm 23 and a second arm 24 attached to the tip of the first arm 23 so as to be rotatable with respect to the first arm 23. It is attached to the tip of the second arm 24 so as to be rotatable with respect to the arm 24. The moving mechanism 22 includes the first arm 23 and the second arm 2
2 is rotated, the attachment / detachment mechanism 21 attached to the tip of the second arm 24 is moved in the front-back direction, that is, perpendicular to the disc substrate supporting surface 11a of the pallet 11. Move in the direction of.

On the other hand, the attaching / detaching mechanism 21 attached to the moving mechanism 22 includes an outer mask 12, an inner mask 13, and a disk substrate 10, as shown in FIG. Vacuum exhaust device 31 used for vacuum adsorption, and outer mask 12
Of the outer mask suction electromagnetic valve 32 used for controlling the vacuum suction of the inner mask 13, the inner mask suction electromagnetic valve 33 used for controlling the vacuum suction of the inner mask 13, and the vacuum suction of the disk substrate 10. A solenoid valve 34 for attracting a disc used for controlling, a vacuum portion 35 for attracting an outer mask that suctions the outer mask 12 in vacuum, a vacuum portion 36 for attracting an inner mask that suctions the inner mask 13 in vacuum, and a disc substrate 10. And a vacuum portion 37 for sucking a disk for vacuum suction.

The outer mask adsorbing vacuum portion 35 communicates with the vacuum exhaust device 31 via the outer mask adsorbing electromagnetic valve 32, and the inner mask adsorbing vacuum portion 36 passes through the inner mask adsorbing electromagnetic valve 33. To the vacuum evacuation device 31, and the disk suction vacuum part 37 communicates with the vacuum evacuation device 31 via the disk suction electromagnetic valve 34.

The outer mask suction vacuum portion 35, the inner mask suction vacuum portion 36, and the disk suction vacuum portion 37 are integrated, and the outer mask suction vacuum portion 35 corresponds to the position of the outer mask 12. The inner mask suction vacuum portion 36 is arranged so as to correspond to the position of the inner mask 13, and the disc suction vacuum portion 37 is arranged so as to correspond to the center position of the disc substrate 10. ing.

A vacuum pad 35a made of rubber is attached to the tip of the vacuum portion 35 for adsorbing the outer mask, that is, the portion in contact with the outer mask 12. Thereby, the impact on the outer mask 12 at the time of attaching and detaching the outer mask 12 is softened, and the generation of dust from the outer mask 12 at the time of attaching and detaching the outer mask 12 is suppressed. Similarly, a rubber vacuum pad 36a is also attached to a boundary portion between the inner mask suction vacuum portion 36 and the disk suction vacuum portion 37, that is, a portion in contact with the inner mask 13. Thereby, the impact on the inner mask 13 at the time of attaching and detaching the inner mask 13 is softened, and the generation of dust from the inner mask 13 at the time of attaching and detaching the inner mask 13 is suppressed.

The outer mask suction solenoid valve 32 arranged between the outer mask suction vacuum portion 35 and the vacuum exhaust device 31 controls the vacuum suction of the outer mask 12 by the outer mask suction vacuum portion 35. It is used to do. That is, when the outer mask 12 is held, the outer mask suction vacuum valve 35 is brought into a state of being communicated with the vacuum exhaust device 31 by the solenoid valve of the outer mask suction solenoid valve 32, and the outer mask 12 is sucked. It is vacuum-adsorbed by the vacuum unit 35. On the other hand, outer mask 1
When releasing 2, the outer mask suction solenoid valve 32
Vacuum part 3 for outer mask adsorption by the solenoid valve
The inside of 5 is opened to the atmosphere, and the outer mask 12 is released from the outer mask suction vacuum portion 35.

Here, when the outer mask 12 vacuum-adsorbed by the outer mask adsorbing vacuum portion 35 is released, compressed air is introduced into the outer mask adsorbing vacuum portion 35 as in a normal vacuum adsorbing device. The outer mask 12 may be separated by breaking the vacuum in the outer mask suction vacuum portion 35. However, when the vacuum break is performed using the compressed air in this way, the dust that has been sucked and accumulated in the outer mask suction vacuum portion 35 is ejected from the outer mask suction vacuum portion 35 together with the compressed air. Therefore, as described above, it is preferable that the outer mask suction vacuum portion 35 is opened to the atmosphere so that the outer mask suction vacuum portion 35 is ruptured in vacuum to separate the outer mask 12.

Further, the vacuum portion 3 for adsorbing the inner mask
The inner mask suction solenoid valve 33 disposed between the vacuum pump 6 and the vacuum exhaust device 31 is used to control the vacuum suction of the inner mask 13 by the inner mask suction vacuum portion 36. That is, when holding the inner mask 13, the inner mask suction vacuum valve 36 is brought into communication with the vacuum exhaust device 31 by the solenoid valve of the inner mask suction solenoid valve 33, and the inner mask 13 is held by the inner mask suction solenoid valve 33. It is vacuum-adsorbed by the vacuum unit 36. On the other hand, when the inner mask 13 is released, the inner mask suction vacuum portion 36 is opened to the atmosphere by the solenoid valve of the inner mask suction solenoid valve 33, and the inner mask suction vacuum portion 36 is opened. The inner mask 13 is released from.

Here, when the inner mask 13 vacuum-sucked by the inner mask suction vacuum portion 36 is released, compressed air is introduced into the inner mask suction vacuum portion 36 as in a normal vacuum suction device. The inner mask 13 may be separated by breaking the vacuum in the inner mask suction vacuum portion 36. However, when the vacuum break is performed using the compressed air in this way, the dust sucked and accumulated in the inner mask suction vacuum portion 36 is ejected from the inner mask suction vacuum portion 36 together with the compressed air. Therefore, as described above, it is preferable that the inner mask suction vacuum portion 36 is opened to the atmosphere so that the inner mask suction vacuum portion 36 is vacuum-disrupted to separate the inner mask 13.

Further, the solenoid valve 3 for disc adsorption arranged between the vacuum portion 37 for disc adsorption and the vacuum exhaust device 31.
Reference numeral 4 is used to control the vacuum suction of the disk substrate 10 by the disk suction vacuum unit 37. That is, when holding the disc substrate 10, the solenoid valve of the disc attracting solenoid valve 34 brings the disc attracting vacuum portion 37 into communication with the vacuum evacuation device 31, and the disc substrate 10 serves as the disc attracting vacuum portion. It is vacuum-adsorbed by 37. On the other hand, when the disk substrate 10 is released, the solenoid valve of the disk attracting solenoid valve 34 opens the inside of the disk attracting vacuum portion 37 to the atmosphere, and the disk attracting vacuum portion 37 releases the disk substrate. 10 is opened.

Here, the vacuum portion 37 for disc adsorption
When the disk substrate 10 that has been vacuum-adsorbed on the disk is released, compressed air is introduced into the disk-adsorption vacuum part 37 to break the vacuum in the disk-adsorption vacuum part 37 in the same manner as a normal vacuum-adsorption device. The substrate 10 may be separated. However, when the vacuum break is performed using the compressed air in this way, the dust sucked and accumulated in the disk suction vacuum section 37 is ejected from the disk suction vacuum section 37 together with the compressed air. Therefore, as described above, it is preferable to release the disk substrate 10 by opening the inside of the disk suction vacuum portion 37 to the atmosphere to break the vacuum inside the disk suction vacuum portion 37.

When the outer mask 12, the inner mask 13 and the disc substrate 10 are removed from the pallet 11 by using the disc attaching / detaching device 2 as described above, the outer mask is sucked by the vacuum evacuation device 31 via the outer mask adsorbing electromagnetic valve 32. Vacuum the inside of the suction vacuum portion 35 to vacuum-suck the outer mask 12 onto the outer mask suction vacuum portion 35, and similarly, use the vacuum exhaust device 31 via the inner mask suction solenoid valve 33 to suck the inner mask. The inside of the vacuum portion 36 is evacuated so that the inner mask 13 is vacuum-sucked by the inner mask suction vacuum portion 36.
Then, the inside of the vacuum portion 37 for attracting the disk is evacuated through the solenoid valve 34 for attracting the disk, and the vacuum substrate 37 for attracting the disk attracts the disk substrate 10 by vacuum.

Here, in the pallet 11, an outer mask attracting magnet 11a is embedded at a position corresponding to the outer mask 12 so that the outer mask 12, the inner mask 13 and the disk substrate 10 can be held, and the inner mask is also attached. An inner mask attracting magnet 11b is embedded at a position corresponding to the mask 13. Therefore, the outer mask suction vacuum unit 3
The vacuum suction of the outer mask 12 by 5, the vacuum suction of the inner mask 13 by the inner mask suction vacuum portion 36, and the vacuum suction of the disk substrate 10 by the disk suction vacuum portion 37 are performed by the outer mask suction magnet 11a and The attraction force is set so as to overcome the attraction by the inner mask attraction magnet 11b.

Then, in this way, the outer mask 12,
While the inner mask 13 and the disk substrate 10 are vacuum-sucked, the moving mechanism 22 moves the detaching mechanism 21 away from the pallet 11. Thereby, the outer mask 12, the inner mask 13, and the disc substrate 1
0 is removed from pallet 11.

When the outer mask 12, the inner mask 13 and the disc substrate 10 are attached to the pallet 11 by using the disc attaching / detaching device 2, the outer mask 12, the inner mask 13 and the disc substrate 10 are vacuum-adsorbed and the outer mask 12 is attached. The attachment / detachment mechanism 21 is moved toward the pallet 11 by the moving mechanism 22 so that the mask 12, the inner mask 13, and the disk substrate 10 are located at predetermined positions on the pallet 10.

Then, with the outer mask 12, the inner mask 13 and the disc substrate 10 in close contact with the pallet 11, the outer mask adsorbing electromagnetic valve 32 opens the inside of the outer mask adsorbing vacuum portion 35 to the atmosphere, and similarly. The inner mask adsorbing electromagnetic valve 33 opens the inside of the inner mask adsorbing vacuum portion 36 to the atmosphere, and similarly, the disc adsorbing electromagnetic valve 34 opens the inside of the disk attracting vacuum portion 37 to the atmosphere. As a result, the outer mask 12 is separated from the outer mask suction vacuum portion 35, the inner mask 13 is separated from the inner mask suction vacuum portion 36, and the disc substrate 10 is separated from the disc suction vacuum portion 37.

At this time, since the outer mask attracting magnet 11a and the inner mask attracting magnet 11b are embedded in the pallet 11, the outer mask 12 is attracted by the outer mask attracting magnet 11a, and the inner mask 13 is the inner mask. It is attracted by the attracting magnet 11b, whereby the outer mask 12, the inner mask 13, and the disk substrate 10 are held on the pallet 11.

In the disk attaching / detaching device 2 as described above, even if a film-formed product formed on the outer mask 12 or the inner mask 13 is peeled off to generate dust, such dust is generated by the outer mask suction vacuum portion. The dust is sucked into the vacuum suction portion 35 and the inner mask suction vacuum portion 36, so that the dust is prevented from adhering to the disk substrate 10.

Therefore, a magneto-optical disk is manufactured by the disk-shaped recording medium manufacturing system equipped with the disk attaching / detaching device 2 as described above, so that the film formed on the outer mask 12 or the inner mask 13 is peeled off. The errors caused by the dust caused by are greatly reduced.

FIG. 4 shows the results of actually manufacturing a magneto-optical disk by this disk-shaped recording medium manufacturing system and measuring the number of pinholes.

In FIG. 4, the vertical axis represents the number of pinholes, and the horizontal axis represents the number of lots at the time of manufacturing the magneto-optical disk. Here, in the magneto-optical disk, 20 disk substrates are arranged on one pallet to simultaneously form a thin film layer, and 48 pallets are one lot. In addition, FIG. 4 shows, for comparison, the result A when using the conventional disk attaching / detaching apparatus and the result when using the disk attaching / detaching apparatus to which the present invention is applied. As for the result when using the disk attaching / detaching device to which is applied, the result B when using the disk attaching / detaching device of the type in which the outer mask, the inner mask and the disk substrate are separated by performing vacuum break by introducing compressed air The result C when using a disk attaching / detaching device of a type in which the outer mask, the inner mask, and the disk substrate are separated by performing vacuum break by opening to the atmosphere C
Are shown. In FIG. 4, the mask replacement means that the outer mask and the inner mask were replaced with new ones because the number of pinholes increased.

As is clear from the results shown in FIG. 4, when the conventional disk attaching / detaching device is used, the number of pinholes increases remarkably, and the outer mask and the inner mask must be frequently replaced with new ones. There is.
On the other hand, when the disc attaching / detaching apparatus to which the present invention is applied is used, the increase in pinholes is small, and it is not necessary to frequently replace the outer mask and the inner mask with new ones. In particular, when a disc attaching / detaching device of a type in which the outer mask, the inner mask, and the disc substrate are separated by performing vacuum breaking by opening to the atmosphere, the increase in pinholes is very small, and the number of pinholes exceeds 120 lots. It turns out that it is not necessary to replace the outer mask and the inner mask with new ones.

In the present embodiment, the disk-shaped recording medium to be manufactured is a magneto-optical disk, but the disk-shaped recording medium to be manufactured is a disk substrate partially masked by a mask material. It may be a magneto-optical disk or a magnetic disk as long as it is manufactured by forming a thin film layer on a disk substrate after being attached to a pallet.

[0054]

As is apparent from the above description, in the disk desorption device according to the present invention, the delaminated material from the surface of the mask material is sucked by the vacuum suction device, so that the delaminated material from the surface of the mask material is disc-shaped. Adhesion on the substrate is prevented.

Therefore, by manufacturing a disk-shaped recording medium using the disk attaching / detaching apparatus according to the present invention,
Errors in the disc-shaped recording medium caused by the delaminated material from the surface of the mask material are reduced, and as a result, the yield of the disc-shaped recording medium is significantly improved.

Moreover, in the disc attaching / detaching apparatus according to the present invention, since the adhered matter from the surface of the mask material is prevented from adhering to the disc substrate, the mask material is removed while maintaining the yield of the disc-shaped recording medium. The replacement cycle can be significantly extended, and the running cost can be significantly reduced.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing an example of the overall configuration of a disc-shaped recording medium manufacturing system.

FIG. 2 is a side view showing a configuration example of a disc attaching / detaching device to which the present invention is applied.

FIG. 3 is a schematic view showing an example of the configuration of a disc loading / unloading device to which the present invention is applied.

FIG. 4 is a diagram showing the relationship between the number of pinholes and the number of lots.

FIG. 5 is a cross-sectional view of essential parts showing a state where a disc substrate and a mask material are attached to a pallet.

[Explanation of symbols]

 1 Heat Treatment Room 2 Disk Desorption Device 3 Dry Clean Room 4 Degassing Room 5 Loading Room 6 Sputtering Room 7 Extraction Room 10 Disk Substrate 11 Pallet 12 Outer Mask 13 Inner Mask 20 Support Stand 21 Desorption Mechanism 22 Moving Mechanism 23 First Arm 24th 2 arm 31 vacuum evacuation device 32 outer mask suction solenoid valve 33 inner mask suction solenoid valve 34 disc suction solenoid valve 35 outer mask suction vacuum section 36 inner mask suction vacuum section 37 disc suction vacuum section

Claims (2)

[Claims] 1. When manufacturing a disc-shaped recording medium by mounting a disc substrate partially masked by a mask material on a pallet and then forming a thin film layer on the disc substrate, the mask material and the disc substrate A disk attaching / detaching device used for mounting on a pallet and for removing a mask material and a disk substrate from a pallet, comprising a vacuum adsorption device for holding the mask material by vacuum adsorption. 2. The disk attaching / detaching apparatus according to claim 1, wherein the vacuum suction device introduces air to perform vacuum suction breakdown when releasing the mask material that has been vacuum suctioned.