JPH0949713A - Plane shape meter - Google Patents

Abstract

(57) Abstract: The present invention makes it possible to make the scanning cycle of edge measurement of an object to be inspected constant without depending on the temperature of the object to be inspected,
Another object of the present invention is to provide a planar shape meter capable of keeping the moving distance resolution of the inspection object constant without depending on the temperature of the inspection object. SOLUTION: The laser beam emitted from the width direction laser 1 is scanned in the width direction on the surface of the inspection object 9 by the width direction polygon mirror 3. Next, the CCD camera for width direction 5a,
The light emitted from the surface of the inspection object 9 and the reflected light of the laser light reflected by the inspection object 9 are received by 5b, scanned in the width direction and converted into a video signal, and the gain of this video signal is increased. The direction gain adjusting unit 11 makes adjustments. The shape calculation unit 15 obtains the edge position in the width direction of the inspection object 9 from the video signal whose gain has been adjusted by the width direction gain adjustment unit 11, and determines the shape of the inspection object 9 from the movement distance from the movement distance calculation unit 13. It is calculated and the shape data of the inspection object 9 is output.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a planar profilometer for measuring the shape of an object to be inspected.

[0002]

2. Description of the Related Art As a conventional flat shape meter, one shown in FIG. 9 is known. This is installed in the width direction of the inspection object 105, and two CCD cameras 101a and 101b for width direction which detect the light emitted from the inspection object 105.
(Here, an example in which two units are installed so as to be able to perform the uplift correction is shown) is input to the shape calculation unit 109. Further, the video signal output from the flow direction CCD camera 103 that can be installed in the flow direction of the inspection object 105 and detects the light emitted from the inspection object 105 is input to the movement distance calculation unit 107. In the moving distance calculation unit 107, the edge distance L, which is the moving distance for one scan, is calculated from the video signals of the nth scan and the (n + 1) th scan from the CCD camera 103 for the flow direction, and outputs it to the shape calculation unit 109. .

The shape calculation unit 109 obtains the edge position of the object 105 to be inspected from the video signals output from the width direction CCD cameras 101a and 101b, while the edge distance L output from the moving distance calculation unit 107 The shape of the inspection object 105 is calculated.

[0004]

In the case of the conventional flat shape meter, the light emitted from the object 105 to be inspected greatly changes depending on the temperature of the object 105 to be inspected, and the gain adjusting circuit for the video signal cannot deal with it. Width direction CCD cameras 101a and 101b, flow direction CCD camera 10
The scanning cycle of No. 3 was changed to be high. However, in this case, depending on the temperature of the inspection object 105, the width direction CCD cameras 101a and 101b change the edge measurement cycle, while the flow direction CCD camera 103 changes the moving distance resolution. There is a problem that it will end up.

[0005] The present invention has been made in view of the above,
The purpose is to make the scanning cycle of edge measurement of the inspection object constant without depending on the temperature of the inspection object, and to make the moving distance resolution of the inspection object independent of the temperature of the inspection object. An object is to provide a planar shape meter that can be made constant without the need.

[0006]

According to the first aspect of the present invention,
In order to solve the above-mentioned problems, in a flat shape meter for calculating the shape of the inspection object based on a width interval corresponding to the width direction of the inspection object and a moving distance corresponding to the flow direction of the inspection object, A width direction scanning means for emitting and scanning a light spot in the width direction with respect to the surface of the inspection object, a width direction imaging means for imaging the surface of the inspection object in the width direction, and an output from the width direction imaging means. A width direction gain adjusting means for adjusting the gain of the video signal, and calculating the width interval of the inspection object based on the video signal output from the width direction gain adjusting means. . According to the first aspect of the present invention, the light spot is emitted in the width direction with respect to the surface of the inspection object to scan, and the surface of the inspection object is imaged in the width direction.
Next, by adjusting the gain of the captured video signal in the width direction, there is an effect of calculating the width interval of the inspection object based on the adjusted video signal.

In order to solve the above problems, the invention according to claim 2 is based on a width interval corresponding to the width direction of the inspection object and a moving distance corresponding to the flow direction of the inspection object. In a planar profilometer for calculating the shape, a flow direction scanning means for emitting and scanning a light spot in the flow direction with respect to the surface of the inspection object, and a flow direction imaging for imaging the surface of the inspection object in the flow direction. Means and a flow direction gain adjusting means for adjusting the gain of the video signal output from the flow direction imaging means, and the object to be inspected based on the video signal output from the flow direction gain adjusting means. The point is to calculate the travel distance. According to the second aspect of the present invention, the light spot is emitted in the flow direction with respect to the surface of the object to be inspected and scanned to image the surface of the object to be inspected in the flow direction. Next, by adjusting the gain of the imaged video signal in the flow direction, the moving distance of the object to be inspected is calculated based on the adjusted video signal.

In order to solve the above problems, the invention according to claim 3 is based on a width interval corresponding to the width direction of the inspection object and a moving distance corresponding to the flow direction of the inspection object. In a planar profilometer for calculating a shape, width direction scanning means for emitting and scanning a light spot in the width direction with respect to the surface of the object to be inspected, and width direction imaging for imaging the surface of the object to be inspected in the width direction. Means, and width-direction gain adjusting means for adjusting the gain of the video signal output from the width-direction imaging means,
A flow direction scanning means for emitting and scanning a light spot in the flow direction with respect to the surface of the inspection object, a flow direction imaging means for imaging the surface of the inspection object in the flow direction, and a flow direction imaging means. Flow direction gain adjusting means for adjusting the gain of the output video signal, and calculating the width interval of the inspection object based on the video signal output from the width direction gain adjusting means, The gist is to calculate the moving distance of the inspection object based on the video signal output from the flow direction gain adjusting means, and to calculate the shape of the inspection object based on the width interval and the moving distance.

According to the third aspect of the present invention, the light spot is emitted in the width direction with respect to the surface of the inspection object to scan, and the surface of the inspection object is imaged in the width direction. Next, the gain of the captured video signal in the width direction is adjusted. On the other hand, a light spot is emitted in the flow direction with respect to the surface of the object to be inspected and scanned to image the surface of the object to be inspected in the direction of the flow. Next, by adjusting the gain of the video signal in the captured flow direction, the width interval of the inspection object is calculated based on the adjusted video signal in the width direction, while the video signal in the adjusted flow direction is calculated. It has an effect of calculating the moving distance of the object to be inspected based on the distance and the shape of the object to be inspected based on the width interval and the moving distance.

According to a fourth aspect of the present invention, in order to solve the above-mentioned problems, at least one of the width direction scanning means and the flow direction scanning means has a wavelength different from the wavelength of light emitted from the inspection object. An optical band that cuts light emitted from the inspection object between at least one of the width direction imaging means and the flow direction imaging means and the inspection object while emitting and scanning a light spot having The point is to place a filter. According to the invention of claim 4, while a light spot having a wavelength different from the wavelength of the light emitted from the inspection object is emitted and scanned, at least one of the width direction imaging means and the flow direction imaging means. An optical bandpass filter that cuts the light emitted from the inspection object is arranged between the inspection object and the inspection object, thereby having the effect of cutting the light emitted from the inspection object.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a planar shape meter according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing a configuration of a planar shape meter according to a first embodiment of the present invention. As shown in FIG. 1, the planer includes a width direction laser 1 that emits a laser beam toward the width direction polygon mirror 3 and a laser beam emitted from the width direction laser 1 of an object 9 to be inspected. The width direction polygon mirror 3 that scans the surface in the width direction with a scanning cycle of 10 KHZ, and the light emitted from the surface of the inspection object 9 and the reflected light of the laser light reflected by the inspection object 9 are received. CCD cameras 5a, 5a for width direction which scan in the width direction at a scanning cycle of 1 KHZ and convert into video signals
b, a CCD for flow direction that receives light emitted from the surface of the inspection object 9 and scans in the flow direction to convert it into a video signal.
Based on the video signal output from the camera 7, the width direction gain adjusting unit 11 that adjusts the gain of the video signals output from the width direction CCD cameras 5a and 5b, and the inspection object 9 based on the video signal output from the flow direction CCD camera 7. The moving distance calculating unit 13 for calculating the moving distance and the width direction edge position of the inspection object 9 are calculated from the video signal gain-adjusted by the width direction gain adjusting unit 11, and the moving distance from the moving distance calculating unit 13 is calculated. The shape calculation unit 15 calculates the shape of the inspection object 9 and outputs the shape data.

Next, the operation of the moving distance calculator 13 will be described with reference to FIG. In FIG. 2, it is assumed that the inspection object 9 is conveyed and flows from the left side to the right side of the drawing.
Since the CCD camera 7 for flow direction scans the object to be inspected 9 in the flow direction and sequentially converts the received light into a video signal, n + 1 scans are made one scanning time after the video signal of the nth scan is output. Output the video signal of the eye. Next, by inputting the video signal of the inspection object 9 having the rising edge and the falling edge in the flow direction to the movement distance calculation unit 13, the movement distance L for one scan in the flow direction can be obtained. It should be noted that the moving distance L for one scan obtained in this way is the nth scan and the n + 1th scan when the edge position in the width direction is plotted for each scan, as shown in FIG. 3C. It goes without saying that the edge interval L is a positional interval between the two.

In the moving distance calculation unit 13, the inspection object 9 having a rising edge and a falling edge in the flow direction is provided.
When a video signal of is input, for example, the input video signal and a predetermined reference value are compared by a comparator, a signal having a clear edge position is obtained as a comparison result, and then the rising edge position of the n-th scan is compared. It is only necessary to determine how much the rising edge position of the (n + 1) th scan has moved. In this case, for example, signal data is sequentially stored for each scanning line in a 1-bit image memory and the rising edge position of the nth scan is stored. The moving distance L for one scan in the flow direction can be obtained by taking the difference between the address and the address at the rising edge position of the (n + 1) th scan. Further, for example, by calculating the difference between the address of the rising edge position of the nth scanning and the address of the rising edge position of the (n + m) th scanning, the moving distance Lm for the m scanning in the flow direction can be obtained.

Next, the operation of the shape calculator 15 will be described with reference to FIG. In FIG. 3A, the inspection object 9 is assumed to be conveyed and flow from the lower part of the paper surface toward the upper part. Since the width direction CCD cameras 5a and 5b scan the object 9 to be inspected in the width direction and sequentially convert the received light into video signals, as shown in FIG. The video signal of the (n + 1) th scan is output 1 scan time after the output of the signal. Next, as shown in FIG. 3C, the video signal of the inspection object 9 having the rising edge and the falling edge in the width direction is input to the shape calculation unit 15 to obtain the edge position in the width direction. You can Further, when the edge position in the width direction is plotted for each scan as shown in FIG. 3C, the position interval between the nth scan and the n + 1th scan is the edge interval L.

Further, the acquisition time is added to the edge position in the width direction calculated by the shape calculation unit 15 and the moving distance calculated by the moving distance calculation unit 13 and the result is output. Place a computer, and store the edge position and movement distance in the width direction in the memory of the personal computer at each acquisition time, and at the same time,
By plotting the edge position and the moving distance in the width direction stored in the memory of the personal computer on the monitor, the shape measurement result as shown in FIG. 3C can be output. Further, instead of plotting the edge position and the moving distance in the width direction on the monitor, it is possible to print on the plotter and output the shape measurement result.

When the video signal of the inspection object 9 having the rising edge and the falling edge in the width direction is input to the shape calculation section 15, for example, the input video signal and a predetermined reference value are compared by a comparator. Then, the edge position in the width direction may be obtained as the comparison result. Further, instead of the comparison by the comparator, the edge position in the width direction may be obtained by A / D converting the video signal and then comparing it with predetermined reference value data. Furthermore, after the video signal is A / D converted, the difference value between the front and rear data is sequentially calculated, and when the difference value exceeds the reference value, it may be detected that there is a rising edge or a falling edge. .

Next, the operation of the widthwise gain adjusting section 11 will be described with reference to FIGS. 4 and 5. In FIG. 4, when the light amount of the width direction laser 1 is set to be the same as the emitted light amount of the inspection object 9 at the maximum temperature, that is, the maximum emitted light amount of the inspection object 9, the inspection object 9 emits light. When there is no light quantity, as shown in FIG.
The gain of the D cameras 5a and 5b is 1V (a). On the other hand, when the amount of light emitted from the inspection object 9 is the maximum,
The gains of the width direction CCD cameras 5a and 5b are shown in FIG.
As shown in (b), the gain of 1 V (b) due to the laser beam and the amount of light (c) emitted from the inspection object 9 are added to 2
V. 1V from CCD cameras 5a and 5b for width direction
It is assumed that a video signal of 2V is output.

In the width direction gain adjusting section 11 shown in FIG.
First, the reference video signal of 1VP-P is input from the A terminal to the operational amplifier 51 and the capacitor 53, and the capacitor 5
3 integrates the reference video signal and outputs the reference integrated signal. On the other hand, the video signals picked up by the width direction CCD cameras 5a and 5b are input from the B terminal to the operational amplifier 57 and the capacitor 59, the capacitor 59 integrates the video signal, and the integrated video signal is output. Here, the reference integrated signal output from the operational amplifier 51 is input to the + terminal of the differential amplifier 63, while the video integrated signal output from the operational amplifier 57 is input to the-terminal of the differential amplifier 63.
The differential amplifier 63 forms a division circuit and outputs the gain control signal (E) to the output amplifier 71. The output amplifier 71 amplifies the video signal input from the B terminal with an amplification factor in response to the gain control signal (E), and outputs the video signal from the F terminal.

For example, as shown in FIG. 4, the gain ratio is doubled when there is no light quantity emitted from the inspection object 9 and when the light quantity emitted from the inspection object 9 is maximum. However, since it is within the range in which the width direction gain adjusting unit 11 can sufficiently adjust the gain, the width direction CCD camera 5
It is not necessary to prevent the saturation of the video signal by changing the scanning cycle of a and 5b to be short, and the edge measurement cycle can be made constant without depending on the temperature of the inspection object 9. Note that the CLR signal is turned on during the blank period of the video signal for each scanning.
By switching the switch to N, the switches 55 and 61 are closed to prevent the capacitors 53 and 59 from being overcharged.

Next, the operation of the flat shape meter according to the first embodiment of the present invention will be described. First, a laser beam is emitted from the width direction laser 1 toward the width direction polygon mirror 3, and the emitted laser beam is scanned by the width direction polygon mirror 3 on the surface of the inspection object 9 in the width direction. Next, the width direction CCD cameras 5a and 5b receive the emitted light from the surface of the inspection object 9 and the reflected light of the laser light reflected by the inspection object 9, scan the width direction, and scan the video signal. And the gain of the video signals output from the width direction CCD cameras 5a and 5b is adjusted by the width direction gain adjusting unit 11. On the other hand, the flow direction CCD camera 7 receives the light emitted from the surface of the object 9 to be inspected, scans it in the flow direction, converts it into a video signal, and converts it into a video signal output from the flow direction CCD camera 7. Based on this, the movement distance of the inspection object 9 is calculated by the movement distance calculation unit 13. Here, in the shape calculation unit 15, the edge position in the width direction of the inspection object 9 is obtained from the video signal gain-adjusted by the width direction gain adjustment unit 11, and the inspection object 9 is calculated from the movement distance from the movement distance calculation unit 13. Is configured to output the shape data of the object to be inspected 9, so that the shape data of the object 9 to be inspected is output without depending on the change in the radiated light emitted from the object to be inspected 9 due to the temperature change of the object to be inspected 9, That is, even if there is no light emitted from the object to be inspected 9, the widthwise edge of the object to be inspected 9 can be detected only by the light amount of the light spot of the laser beam to be scanned, and the light is emitted from the object to be inspected 9. Since the gain can be adjusted by the width-direction gain adjusting circuit even when the light changes, the scanning cycle for edge measurement can be made constant without depending on the temperature of the inspection object.

Next, FIG. 6 is a diagram showing the configuration of a planar shape meter according to a second embodiment of the present invention. As shown in FIG. 6, the CCD cameras 5a and 5b for width direction, which receive the light emitted from the surface of the inspection object 9 and scan in the width direction to convert it into video signals, and the polygon mirror 19 for flow direction. The laser 17 for the flow direction that emits a laser beam toward the laser beam and the laser beam emitted from the laser 17 for the flow direction are inspected 9
And a flow direction polygon mirror 19 for scanning in the flow direction, and light emitted from the surface of the inspection object 9 and reflected light of the laser light reflected by the inspection object 9 to scan in the flow direction. Flow direction CCD camera 7 for converting into a video signal and a flow direction gain adjusting unit 21 for adjusting the gain of the video signal output from the flow direction CCD camera 7.
From the moving distance calculation unit 13 for calculating the moving distance of the inspection object 9 based on the video signal output from the flow direction gain adjusting unit 13, and the video signal gain-adjusted by the width direction CCD cameras 5a and 5b. The edge position of the inspection object 9 in the width direction is obtained, the shape of the inspection object 9 is calculated from the movement distance from the movement distance calculation unit 13, and the shape calculation unit 15 outputs the shape data.

In the width direction, a light source longer than the width of the inspection object 9 is installed below the inspection object 9, and the inspection object 9 is irradiated with light from the light source, and the width direction CCD camera 5a,
This light may be received by 5b. In addition, the flow direction gain adjusting unit 21 adopts the circuit configuration of the width direction gain adjusting unit 11 shown in FIG.

Next, the operation of the flat shape meter according to the second embodiment of the present invention will be described. First, the width direction CCD cameras 5a and 5b receive light emitted from the surface of the inspection object 9 and scan it in the width direction to convert it into a video signal. on the other hand,
Laser light is emitted from the laser 17 for flow direction toward the polygon mirror 19 for flow direction, and the emitted laser light is scanned by the polygon mirror 19 for flow direction on the surface of the inspection object 9 in the flow direction. Next, the CCD camera 7 for flow direction
Is the light emitted from the surface of the inspection object 9 and the inspection object 9
The reflected light of the laser light reflected by is received, scanned in the flow direction and converted into a video signal, and the flow direction CCD camera 7
The flow direction gain adjusting unit 21 adjusts the gain of the video signal output from the. Next, the flow direction gain adjusting unit 21
The moving distance calculation unit 13 calculates the moving distance of the inspection object 9 based on the video signal output from the device. Here, in the shape calculation unit 15, the edge position in the width direction of the inspection object 9 is obtained from the video signals output from the width direction CCD cameras 5a and 5b, and the inspection object is calculated from the movement distance from the movement distance calculation unit 13. By calculating the shape of the object 9 and outputting the shape data of the object 9 to be inspected, the shape data of the object 9 can be output without depending on the change of the radiated light emitted from the object 9 due to the temperature change of the object 9. That is, the edge in the width direction of the object to be inspected 9 can be detected even if there is no light emitted from the object to be inspected 9, and even if the light emitted from the object to be inspected 9 changes, the flow direction gain adjusting unit Since the gain can be adjusted with, the moving distance resolution can be made constant without depending on the temperature of the inspection object 9, and the scanning cycle of edge measurement can be made constant without depending on the temperature of the inspection object. .

FIG. 7 is a diagram showing the configuration of a planar profilometer according to the third embodiment of the present invention. As shown in FIG.
The flat shape meter scans the width direction laser 1 that emits a laser beam toward the width direction polygon mirror 3 and the laser beam emitted from the width direction laser 1 on the surface of the inspection object 9 in the width direction. Width direction polygon mirror 3 and inspection object 9
CCD cameras 5a and 5b for widthwise direction, which receive the light emitted from the surface of the substrate and the reflected light of the laser light reflected by the object to be inspected 9, scan in the widthwise direction and convert it into video signals, and the CCD for widthwise direction From the width direction gain adjusting unit 11 that adjusts the gain of the video signals output from the cameras 5a and 5b, the flow direction laser 17 that emits laser light toward the flow direction polygon mirror 19, and the flow direction laser 17 The flow direction polygon mirror 19 that scans the emitted laser light on the surface of the inspection object 9 in the flow direction, and the emitted light from the surface of the inspection object 9 and the laser light reflected by the inspection object 9 CCD camera 7 for the flow direction, which receives the reflected light, scans in the flow direction and converts it into a video signal, and CC for the flow direction
Flow direction gain adjusting unit 21 for adjusting the gain of the video signal output from the D camera 7, and moving distance calculation for calculating the moving distance of the inspection object 9 based on the video signal output from the flow direction gain adjusting unit 13. The edge position in the width direction of the inspection object 9 is obtained from the section 13 and the video signal whose gain has been adjusted by the width direction gain adjusting section 11, and the moving distance calculating section 13 is obtained.
The shape calculation unit 15 calculates the shape of the object 9 to be inspected based on the moving distance from and outputs the shape data.

Next, the operation of the flat shape meter according to the third embodiment of the present invention will be described. First, a laser beam is emitted from the width direction laser 1 toward the width direction polygon mirror 3, and the emitted laser beam is scanned by the width direction polygon mirror 3 on the surface of the inspection object 9 in the width direction. Next, the width direction CCD cameras 5a and 5b receive the emitted light from the surface of the inspection object 9 and the reflected light of the laser light reflected by the inspection object 9, scan the width direction, and scan the video signal. And the gain of the video signals output from the width direction CCD cameras 5a and 5b is adjusted by the width direction gain adjusting unit 11. On the other hand, laser light is emitted from the laser 17 for flow direction toward the polygon mirror 19 for flow direction, and the emitted laser light is scanned on the surface of the inspection object 9 in the flow direction by the polygon mirror 19 for flow direction. Next, the flow direction CCD camera 7 receives the emitted light from the surface of the inspection object 9 and the reflected light of the laser light reflected by the inspection object 9, scans in the flow direction, and converts it into a video signal. Then, the gain of the video signal output from the flow direction CCD camera 7 is adjusted by the flow direction gain adjusting unit 21. Next, the movement distance calculation unit 13 calculates the movement distance of the inspection object 9 based on the video signal output from the flow direction gain adjustment unit 21. Here, in the shape calculation unit 15, the edge position in the width direction of the inspection object 9 is obtained from the video signal output from the width direction gain adjustment unit 11, and the shape of the inspection object 9 is calculated from the movement distance from the movement distance calculation unit 13. By calculating the shape and outputting the shape data of the object to be inspected 9, the shape of the object to be inspected 9 is not dependent on the change of the radiated light emitted from the object to be inspected 9 due to the temperature change of the object to be inspected, that is, , The edge in the width direction of the inspection object 9 can be detected even if there is no light emitted from the inspection object 9, and even if the light emitted from the inspection object 9 changes, the gain in the flow direction gain adjusting unit is increased. Since it can be adjusted, the moving distance resolution can be made constant without depending on the temperature of the inspection object 9 and the scanning cycle of edge measurement can be made constant regardless of the temperature of the inspection object.

FIG. 8 is a diagram showing the configuration of a planar shape meter according to the fourth embodiment of the present invention. As shown in FIG.
The feature is that, in addition to the configuration of the flat shape meter shown in FIG. 7, the width direction optical bandpass filters 27a and 27b for cutting the light emitted from the inspection object 9 and the light emitted from the inspection object 9 are provided. And an optical bandpass filter 29 for the flow direction to be cut.

Next, the operation of the flat shape meter according to the fourth embodiment of the present invention will be described. First, a laser beam is emitted from the width direction laser 1 toward the width direction polygon mirror 3, and the emitted laser beam is scanned by the width direction polygon mirror 3 on the surface of the inspection object 9 in the width direction. Next, of the emitted light from the surface of the inspection object 9 and the reflected light of the laser light reflected by the inspection object 9, the light emitted from the inspection object 9 is passed through the width-direction optical bandpass filters 27a and 27b. The width-direction CCD cameras 5a and 5b receive the laser light transmitted through the width-direction optical bandpass filters 27a and 27b, scan it in the width direction, and convert it into a video signal.
The width direction gain adjusting unit 11 adjusts the gain of the video signals output from the CD cameras 5a and 5b.

On the other hand, laser light is emitted from the laser 17 for flow direction toward the polygon mirror 19 for flow direction, and the emitted laser light is directed by the polygon mirror 19 for flow direction onto the surface of the object 9 to be inspected. To scan. Next, of the emitted light from the surface of the inspection object 9 and the reflected light of the laser light reflected by the inspection object 9, the light emitted from the inspection object 9 is cut by the optical bandpass filter 29 for flow direction. , The CCD camera 7 for the flow direction is an optical bandpass filter 29 for the flow direction.
The laser beam that has passed through is received and scanned in the flow direction to be converted into a video signal, and the gain of the video signal output from the flow direction CCD camera 7 is adjusted by the flow direction gain adjusting unit 21. Next, the movement distance calculation unit 13 calculates the movement distance of the inspection object 9 based on the video signal output from the flow direction gain adjustment unit 21. Here, in the shape calculation unit 15, the edge position in the width direction of the inspection object 9 is obtained from the video signal output from the width direction gain adjustment unit 11, and the shape of the inspection object 9 is calculated from the movement distance from the movement distance calculation unit 13. By calculating the shape and outputting the shape data of the object to be inspected 9, the shape of the object to be inspected 9 is not dependent on the change of the radiated light emitted from the object to be inspected 9 due to the temperature change of the object to be inspected, that is, , The edge in the width direction of the inspection object 9 can be detected even if there is no light emitted from the inspection object 9, and even if the light emitted from the inspection object 9 changes, the gain in the flow direction gain adjusting unit is increased. Since it can be adjusted, the moving distance resolution can be made constant without depending on the temperature of the inspection object 9 and the scanning cycle of edge measurement can be made constant regardless of the temperature of the inspection object.

Further, only the light emitted from the width direction laser 1 and the flow direction laser 17 can always be received, and there is no influence of the change in the emitted light amount due to the temperature change of the inspection object 9 at all. The scanning cycle of edge measurement can be made constant without depending on the temperature of the inspection object, and the moving distance resolution can be made constant without depending on the temperature of the inspection object 9.

[0030]

As described above, according to the present invention as set forth in claim 1, the light spot is emitted in the width direction with respect to the surface of the object to be inspected and scanned to scan the surface of the object to be inspected. Image in the direction. Next, by adjusting the gain of the captured video signal in the width direction, the width interval of the inspection object is calculated based on the adjusted video signal. The cycle can be made constant without depending on the temperature of the inspection object.

According to the second aspect of the present invention, a light spot is emitted in the flow direction with respect to the surface of the object to be inspected and scanned to image the surface of the object to be inspected in the flow direction. Next, by adjusting the gain of the captured video signal in the flow direction, the moving distance of the inspection object is calculated based on the adjusted video signal. It can be kept constant without depending on the temperature of the inspection object.

Further, according to the invention of claim 3,
A light spot is emitted in the width direction with respect to the surface of the object to be inspected and scanned to image the surface of the object to be inspected in the width direction. Next, the gain of the captured video signal in the width direction is adjusted. On the other hand, a light spot is emitted in the flow direction with respect to the surface of the object to be inspected and scanned to image the surface of the object to be inspected in the direction of the flow. Next, by adjusting the gain of the video signal in the captured flow direction, the width interval of the inspection object is calculated based on the adjusted video signal in the width direction, while the video signal in the adjusted flow direction is calculated. Since the moving distance of the object to be inspected is calculated based on the width interval and the moving distance, the shape of the object to be inspected is calculated. It is possible to make it constant without depending on it, and it is possible to make the moving distance resolution of the inspection object constant without depending on the temperature of the inspection object.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a planar shape meter according to a first embodiment of the present invention.

FIG. 2 is a diagram for explaining an operation of a moving distance calculation unit 13 according to the first embodiment.

FIG. 3 is a diagram for explaining the operation of the shape calculation unit 15 according to the first embodiment.

FIG. 4 is a diagram for explaining the operation of the widthwise gain adjusting unit 11 according to the first embodiment.

FIG. 5 is a diagram showing a configuration of a widthwise gain adjusting unit 11 according to the first embodiment.

FIG. 6 is a diagram showing a configuration of a planar shape meter according to a second embodiment of the present invention.

FIG. 7 is a diagram showing a configuration of a planar shape meter according to a third embodiment of the present invention.

FIG. 8 is a diagram showing a configuration of a planar shape meter according to a fourth embodiment of the present invention.

FIG. 9 is a diagram showing a configuration of a conventional embodiment.

[Explanation of symbols]

 1 laser for width direction 3 polygon mirror for width direction 9 object to be inspected 5a, 5b CCD camera for width direction 7 CCD camera for flow direction 11 width direction gain adjustment unit 13 moving distance calculation unit 15, 25 shape calculation unit 21 flow direction gain Adjustment unit 27a, 27b Optical bandpass filter for width direction 29 Optical bandpass filter for flow direction

Claims (4)

[Claims] 1. A planar profilometer that calculates the shape of an object to be inspected based on a width interval corresponding to the width direction of the object to be inspected and a moving distance corresponding to the flow direction of the object to be inspected. Width direction scanning means for emitting and scanning light spots in the width direction with respect to the surface of the object, width direction imaging means for imaging the surface of the inspection object in the width direction, and video output from the width direction imaging means. A width direction gain adjusting means for adjusting the gain of the signal, and a plane shape characterized in that the width interval of the object to be inspected is calculated based on a video signal output from the width direction gain adjusting means. Total. 2. A flat surface shape meter for calculating the shape of the inspection object based on a width interval corresponding to the width direction of the inspection object and a moving distance corresponding to the flow direction of the inspection object, Flow direction scanning means for emitting and scanning a light spot in the flow direction with respect to the surface of the object, flow direction imaging means for imaging the surface of the inspection object in the flow direction, and video output from the flow direction imaging means. And a flow direction gain adjusting means for adjusting the gain of the signal, wherein the moving distance of the inspection object is calculated based on the video signal output from the flow direction gain adjusting means. . 3. A flat shape meter for calculating the shape of the inspection object based on a width interval corresponding to the width direction of the inspection object and a moving distance corresponding to the flow direction of the inspection object, Width direction scanning means for emitting and scanning light spots in the width direction with respect to the surface of the object, width direction imaging means for imaging the surface of the inspection object in the width direction, and video output from the width direction imaging means. A width direction gain adjusting means for adjusting a gain of a signal, a flow direction scanning means for emitting and scanning a light spot in the flow direction with respect to the surface of the inspection object, and an image of the surface of the inspection object in the flow direction Flow direction image pickup means, and flow direction gain adjustment means for adjusting the gain of the video signal output from the flow direction image pickup means, and based on the video signal output from the width direction gain adjustment means, The item to be inspected While calculating the interval, the moving distance of the inspection object is calculated based on the video signal output from the flow direction gain adjusting means, and the shape of the inspection object is calculated based on the width interval and the moving distance. A flat shape meter characterized by: 4. At least one of the width direction scanning means and the flow direction scanning means emits and scans a light spot having a wavelength different from the wavelength of light emitted from the inspection object, An optical bandpass filter for cutting light emitted from the inspection object is arranged between at least one of the width direction imaging means and the flow direction imaging means and the inspection object. 3. The planar shape meter according to any one of 3 above.