JPH0959062A - Dielectric ceramic composition, method for producing the same, and laminated high-frequency device - Google Patents
Dielectric ceramic composition, method for producing the same, and laminated high-frequency deviceInfo
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- JPH0959062A JPH0959062A JP8150573A JP15057396A JPH0959062A JP H0959062 A JPH0959062 A JP H0959062A JP 8150573 A JP8150573 A JP 8150573A JP 15057396 A JP15057396 A JP 15057396A JP H0959062 A JPH0959062 A JP H0959062A
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Abstract
(57)【要約】
【課題】副成分に焼結を促進するガラス成分を含有する
ことにより、1000℃程度の低温で焼結でき、高い比誘電
率と高いQ値、かつ小さい共振振周波数の温度係数を同
時に満足させる。
【解決手段】酸化カルシウム、酸化マグネシウム、酸化
ニオブ及び酸化チタンよりなり、一般式Ca{(Mg1/3N
b2/3)1-xTix}O3(ただし、0<x≦0.50)で表される主成
分が40重量部以上98重量部以下の範囲、及びSiO2または
B2O3のうちの一種以上を含む副成分が2重量部以上60重
量部以下の範囲の割合からなる組成物に、MgO,NiO,CuO,
MnO2及びWO3 から選ばれる少なくとも一種の酸化物が0.
1重量部以上10重量部以下の範囲添加されていることに
より、焼結温度をより低くでき、かつ組成が安定で、よ
り高いQ値を有する誘電体磁器組成物を得ることができ
る。高周波領域で使用する誘電体磁器及び積層型高周波
デバイスに有用である。
(57) [Abstract] [Object] By containing a glass component that promotes sintering as an auxiliary component, sintering can be performed at a low temperature of about 1000 ° C., a high relative permittivity, a high Q value, and a small resonance vibration frequency. Satisfy the temperature coefficient at the same time. SOLUTION: This is composed of calcium oxide, magnesium oxide, niobium oxide and titanium oxide, and has the general formula Ca {(Mg 1/3 N
b 2/3 ) 1-x Ti x } O 3 (where 0 <x ≦ 0.50) is contained in the range of 40 parts by weight or more and 98 parts by weight or less, and SiO 2 or
A composition containing at least 2 parts by weight and not more than 60 parts by weight of subcomponents containing at least one of B 2 O 3 , MgO, NiO, CuO,
At least one oxide selected from MnO 2 and WO 3 is 0.
By adding 1 part by weight or more and 10 parts by weight or less, the sintering temperature can be further lowered, the composition is stable, and the dielectric ceramic composition having a higher Q value can be obtained. It is useful for dielectric ceramics and laminated high frequency devices used in the high frequency region.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、高周波を用いた各
種フィルタ素子や共振器等に使用される誘電体磁器及び
積層型高周波デバイスに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric ceramic and a laminated high frequency device used for various filter elements and resonators using high frequency.
【0002】[0002]
【従来の技術】近年、自動車電話や携帯電話、あるいは
衛星放送など、マイクロ波領域の電磁波を利用する通信
の進展にともない、端末機器の小型化への要求がますま
す強くなっている。端末機器を小型化するためには、機
器を構成する個々の部品を小型化する必要がある。誘電
体磁器はこれらの機器において、各種フィルタ素子や発
振器の周波数安定化素子等に組み込まれている。これら
の共振デバイスの大きさは同じ共振モードを利用する場
合、使用する誘電体材料の持つ比誘電率(εr )の平方
根に逆比例するため、小型の共振デバイスを作製するに
は、高い比誘電率を有する材料が必要である。また、誘
電体磁器に求められる他の特性は、マイクロ波領域で低
損失であること、すなわちQ値が高いこと、さらに共振
周波数の温度係数(τf )が小さいことである。比誘電
率の大きい材料として、(Pb,Ca)ZrO3 系が特
開平4−65021号公報に開示されている。この系は
100を越える高い比誘電率(εr )と、2〜4GHz
で800程度の高いQ値、及び小さい共振周波数の温度
係数を有している。2. Description of the Related Art In recent years, with the progress of communication using electromagnetic waves in the microwave range, such as car phones, mobile phones, and satellite broadcasting, there is an increasing demand for miniaturization of terminal equipment. In order to miniaturize the terminal equipment, it is necessary to miniaturize the individual parts constituting the equipment. In these devices, the dielectric porcelain is incorporated in various filter elements, frequency stabilizing elements of oscillators, and the like. When the same resonance mode is used, the size of these resonant devices is inversely proportional to the square root of the relative permittivity (ε r ) of the dielectric material used. Materials with a dielectric constant are needed. Further, other characteristics required for the dielectric ceramics are low loss in the microwave region, that is, a high Q value, and a small temperature coefficient (τ f ) of the resonance frequency. As a material having a large relative dielectric constant, a (Pb, Ca) ZrO 3 system is disclosed in Japanese Patent Application Laid-Open No. 4-65021. This system has a high relative permittivity (ε r ) of over 100 and 2 to 4 GHz.
Has a high Q value of about 800 and a small temperature coefficient of resonance frequency.
【0003】一方、導体と誘電体磁器を積層構造にし、
共振デバイスを小型、高機能化しようとする試みが行な
われている。導体は、マイクロ波のような高周波領域で
使用する場合、導電率が高い必要があるため、Cu、A
u、Agまたはそれらの合金を使用する必要がある。ま
た誘電体磁器は積層構造にする場合、導体の金属と同時
に焼成する必要があるため、導体金属が溶解せず、かつ
酸化しない焼成条件で緻密に焼結しなければならない。
すなわち、用いる導体金属の融点(Cuの場合1083
℃、Auの場合1063℃、Agの場合961℃)以下
の低温で、かつCuを電極に用いる場合は低い酸素分圧
での焼成が必要となる。低温で焼結できるマイクロ波誘
電体磁器として、Bi2O3−CaO−Nb2O5系が特開
平5−225826号公報に開示されている。On the other hand, a conductor and a dielectric porcelain have a laminated structure,
Attempts have been made to reduce the size and increase the functionality of resonant devices. When the conductor is used in a high frequency region such as a microwave, the conductor needs to have high conductivity.
It is necessary to use u, Ag or their alloys. Further, when the dielectric porcelain has a laminated structure, it is necessary to sinter at the same time as the metal of the conductor, and therefore, it is necessary to sinter densely under a calcination condition in which the conductor metal does not melt and does not oxidize.
That is, the melting point of the conductor metal used (1083 for Cu)
C., 1063.degree. C. for Au, 961.degree. C. for Ag) and lower oxygen partial pressure when Cu is used for the electrode. As a microwave dielectric ceramic that can be sintered at a low temperature, a Bi 2 O 3 —CaO—Nb 2 O 5 system is disclosed in JP-A-5-225826.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、Bi2
O3−CaO−Nb2O5系の磁器は1000℃程度の低
温で焼結できるが、主成分のBi2O3が焼成時に蒸発す
るため、焼成温度に対して誘電特性が不安定であるとい
う問題点があった。また、一般に共振デバイスをより小
型にした場合、Q値が低下してしまうため、高いQ値を
有する材料が求められていた。However, Bi 2
O 3 —CaO—Nb 2 O 5 based porcelain can be sintered at a low temperature of about 1000 ° C., but since Bi 2 O 3 as the main component evaporates during firing, the dielectric characteristics are unstable with respect to the firing temperature. There was a problem. Further, in general, when the resonant device is made smaller, the Q value is lowered, so that a material having a high Q value has been demanded.
【0005】本発明は、このような課題を解決するもの
で、焼結温度をより低くでき、かつ組成が安定で、より
高いQ値を有する誘電体磁器組成物とその製造方法及び
積層型高周波デバイスを提供することを目的とするもの
である。The present invention is intended to solve such problems, and it is possible to lower the sintering temperature, the composition is stable, and the dielectric porcelain composition having a higher Q value, a method for producing the same, and a laminated high frequency wave. It is intended to provide a device.
【0006】[0006]
【課題を解決するための手段】この目的を達成するため
に本発明の誘電体磁器組成物は、酸化カルシウム、酸化
マグネシウム、酸化ニオブおよび酸化チタンよりなり、
一般式Ca{(Mg1/ 3Nb2/3)1-xTix}O3 (ただ
し、0<x≦0.50)で表される主成分が40重量部
以上98重量部以下の範囲、及びSiO2 またはB2O3
のうちの一種以上を含む副成分が2重量部以上60重量
部以下の範囲の割合からなる組成物に、MgO、Ni
O、CuO、MnO2 及びWO3 から選ばれる少なくと
も一種の酸化物が0.1重量部以上10重量部以下の範
囲添加されているという構成を備えたものである。In order to achieve this object, the dielectric ceramic composition of the present invention comprises calcium oxide, magnesium oxide, niobium oxide and titanium oxide,
Formula Ca {(Mg 1/3 Nb 2/3) 1-x Ti x} O 3 ( however, 0 <x ≦ 0.50) Range Chemical is less than 98 parts by weight 40 parts by weight or more expressed by , And SiO 2 or B 2 O 3
A composition containing at least 2 parts by weight and not more than 60 parts by weight of subcomponents containing MgO, Ni
At least one oxide selected from O, CuO, MnO 2 and WO 3 is added in the range of 0.1 part by weight or more and 10 parts by weight or less.
【0007】また前記誘電体磁器組成物においては、比
誘電率(εr )が、10〜50の範囲であることが好ま
しい。また前記誘電体磁器組成物においては、Qf積
が、1000GHz以上30000GHz以下であるこ
とが好ましい。In the dielectric ceramic composition, the relative permittivity (ε r ) is preferably in the range of 10-50. In the dielectric ceramic composition, the Qf product is preferably 1000 GHz or more and 30,000 GHz or less.
【0008】また前記誘電体磁器組成物においては、共
振周波数の温度係数(τf )が、−50以上+50ppm/
℃以下の範囲であることが好ましい。次に本発明の誘電
体磁器の製造方法は、酸化カルシウム、酸化マグネシウ
ム、酸化ニオブおよび酸化チタンよりなり、一般式Ca
{(Mg1/3Nb2/3)1-xTix}O3 (ただし、0<x
≦0.50)で表される主成分が40重量部以上98重
量部以下の範囲、及びSiO2 またはB2O3のうちの一
種以上を含む副成分が2重量部以上60重量部以下の範
囲の割合からなる組成物に、MgO、NiO、CuO、
MnO2 及びWO3 から選ばれる少なくとも一種の酸化
物が0.1重量部以上10重量部以下の範囲添加されて
いる組成物を本焼結して誘電体磁器を製造する方法であ
って、本焼結前に、前記副成分と添加物を混合し、予備
加熱処理することを特徴とする。In the dielectric ceramic composition, the temperature coefficient (τ f ) of the resonance frequency is -50 or more and +50 ppm /
It is preferably in the range of ℃ or less. Next, the method for producing a dielectric ceramic of the present invention comprises calcium oxide, magnesium oxide, niobium oxide and titanium oxide, and has the general formula Ca
{(Mg 1/3 Nb 2/3 ) 1-x Ti x } O 3 (where 0 <x
≦ 0.50) in the range of 40 parts by weight or more and 98 parts by weight or less of the main component, and 2 parts by weight or more and 60 parts by weight or less of the accessory component containing one or more of SiO 2 and B 2 O 3 . The composition of the ratios in the range includes MgO, NiO, CuO,
A method for producing a dielectric ceramic by subjecting a composition to which at least one oxide selected from MnO 2 and WO 3 is added in a range of 0.1 part by weight or more and 10 parts by weight or less. Before sintering, the subcomponents and additives are mixed and preheated.
【0009】前記方法においては、予備加熱処理の温度
が、500〜900℃の範囲であることが好ましい。ま
た前記方法においては、予備加熱処理が、1000℃〜
1200℃の範囲の溶融温度であり、かつ溶融後に急冷
する処理であることが好ましい。In the above method, the temperature of the preheating treatment is preferably in the range of 500 to 900 ° C. Further, in the above method, the preheating treatment is performed at 1000 ° C.
It is preferable that the melting temperature is in the range of 1200 ° C. and the treatment is rapid cooling after melting.
【0010】また前記方法においては、本焼結温度が、
800℃〜1200℃の範囲であることが好ましい。ま
た前記方法においては、本焼結前に、予め主成分を10
00℃〜1300℃の範囲の温度で仮焼成し、粉砕する
ことが好ましい。In the above method, the main sintering temperature is
It is preferably in the range of 800 ° C to 1200 ° C. In addition, in the above-mentioned method, before the main sintering, 10
It is preferable to perform calcination and pulverize at a temperature in the range of 00 ° C to 1300 ° C.
【0011】また前記方法においては、予備加熱処理
が、予め副成分を1000℃〜1200℃の範囲の温度
で溶融し、急冷し、その後粉砕する処理であることが好
ましい。In the above method, it is preferable that the preheating treatment is a treatment in which the subcomponents are melted in advance at a temperature in the range of 1000 ° C. to 1200 ° C., quenched, and then pulverized.
【0012】次に、本発明の積層型高周波デバイスによ
れば、導体と誘電体からなり、導体の少なくとも一部
が、Cu、Cu合金、Au、Au合金、AgおよびAg
合金から選ばれる金属で構成され、誘電体層の少なくと
も一部が、酸化カルシウム、酸化マグネシウム、酸化ニ
オブおよび酸化チタンを必須の構成成分とする組成物で
あって、一般式Ca{(Mg1/3Nb2/3)1-xTix}O
3 (ただし、0<x≦0.50)で表される主成分が4
0重量部以上98重量部以下の範囲、及びSiO 2 また
はB2O3のうちの一種以上を含む副成分が2重量部以上
60重量部以下の範囲の割合からなる組成物に、Mg
O、NiO、CuO、MnO2 及びWO3 から選ばれる
少なくとも一種の酸化物が0.1重量部以上10重量部
以下の範囲添加されていることを特徴とする。Next, according to the laminated high frequency device of the present invention,
A conductor and a dielectric, and at least part of the conductor
Is Cu, Cu alloy, Au, Au alloy, Ag and Ag
Consists of a metal selected from alloys and at least a dielectric layer
Some of them are calcium oxide, magnesium oxide, nitric oxide
With a composition that contains titanium oxide and titanium oxide as essential components
Therefore, the general formula Ca {(Mg1/3Nb2/3)1-xTix} O
Three (However, the main component represented by 0 <x ≦ 0.50) is 4
0 to 98 parts by weight, and SiO 2 Also
Is B2OThree2 parts by weight or more of subcomponents containing one or more of
If the composition is composed of 60 parts by weight or less,
O, NiO, CuO, MnO2 And WOThree Chosen from
0.1 to 10 parts by weight of at least one oxide
It is characterized in that it is added in the following range.
【0013】前記積層型高周波デバイスにおいては、誘
電体磁器組成物の比誘電率(εr)が、10〜50の範
囲であることが好ましい。また前記積層型高周波デバイ
スにおいては、誘電体磁器組成物のQf積が、1000
GHz以上30000GHz以下であることが好まし
い。In the laminated high frequency device, the dielectric constant (ε r ) of the dielectric ceramic composition is preferably in the range of 10 to 50. In the laminated high frequency device, the dielectric ceramic composition has a Qf product of 1000
It is preferably in the range of GHz to 30,000 GHz.
【0014】また前記積層型高周波デバイスにおいて
は、誘電体磁器組成物の共振周波数の温度係数(τf )
が、−50以上+50ppm/℃以下の範囲であることが好
ましい。In the laminated high frequency device, the temperature coefficient (τ f ) of the resonance frequency of the dielectric ceramic composition.
Is preferably -50 or more and +50 ppm / ° C or less.
【0015】本発明の誘電体磁器組成物によれば、酸化
カルシウム、酸化マグネシウム、酸化ニオブおよび酸化
チタンよりなり、一般式Ca{(Mg1/3Nb2/3)1-x
Tix}O3 (ただし、0<x≦0.50)で表される
主成分が40重量部以上98重量部以下の範囲、及びS
iO2 またはB2O3のうちの一種以上を含む副成分が2
重量部以上60重量部以下の範囲の割合からなる組成物
に、MgO、NiO、CuO、MnO2 及びWO3 から
選ばれる少なくとも一種の酸化物が0.1重量部以上1
0重量部以下の範囲添加されていることにより、焼結温
度をより低くでき、かつ組成が安定で、より高いQ値を
有する誘電体磁器組成物を提供できる。すなわち、主成
分に比誘電率が高く、優れたマイクロ波誘電特性を持つ
Ca{(Mg1/3Nb2/3)1-xTix}O3を用い、副成
分に焼結を促進するガラス成分を含有しているため、1
000℃程度で焼結し、比誘電率が高く、高いQ値と小
さい共振周波数の温度係数を有する誘電体磁器を実現で
きる。また、主成分にBi2O3を含まないため、組成が
安定で焼成温度に対する誘電特性の安定性も優れてい
る。The dielectric ceramic composition of the present invention comprises calcium oxide, magnesium oxide, niobium oxide and titanium oxide, and has the general formula Ca {(Mg 1/3 Nb 2/3 ) 1-x.
Ti x } O 3 (where 0 <x ≦ 0.50), and the main component is in the range of 40 parts by weight or more and 98 parts by weight or less, and S
2 subcomponents containing at least one of iO 2 or B 2 O 3
At least one oxide selected from MgO, NiO, CuO, MnO 2 and WO 3 is added to the composition in the range of not less than 60 parts by weight and not more than 0.1 parts by weight.
By adding 0 part by weight or less, it is possible to provide a dielectric ceramic composition having a lower sintering temperature, a stable composition, and a higher Q value. That is, Ca {(Mg 1/3 Nb 2/3 ) 1-x Ti x } O 3 having a high relative dielectric constant and an excellent microwave dielectric property is used as a main component, and sintering is promoted as an auxiliary component. 1 because it contains glass components
It is possible to realize a dielectric ceramic having a high relative dielectric constant, a high Q value, and a small temperature coefficient of resonance frequency by sintering at about 000 ° C. In addition, since the main component does not contain Bi 2 O 3 , the composition is stable and the stability of the dielectric properties with respect to the firing temperature is excellent.
【0016】次に本発明の製造方法によれば、前記本発
明の誘電体磁器組成物を効率良く合理的に製造できる。
また、本発明の積層型高周波デバイスは上記磁器組成物
を誘電体層に用い、Cu、Au、Agまたはそれらの合
金を導体に用いることにより、小型でかつ高性能な高周
波デバイスを得ることができる。Next, according to the production method of the present invention, the dielectric ceramic composition of the present invention can be efficiently and rationally produced.
In the laminated high-frequency device of the present invention, a compact and high-performance high-frequency device can be obtained by using the above-mentioned porcelain composition for the dielectric layer and using Cu, Au, Ag or their alloys for the conductor. .
【0017】[0017]
【実施例】以下、実施例を用いて本発明をさらに具体的
に説明する。 (実施例1)実施例1は本発明の誘電体磁器組成物を説
明するものである。まず、主成分として用いる粉末の合
成について述べる。出発原料には化学的に高純度(純度
99%以上)であるCaCO3、MgO、Nb2O5、お
よびTiO2を用いた。原料の純度補正を行なったの
ち、組成をCa{(Mg1/3Nb2/3)1-xTix}O3と
表したときのxが所定の値になるように秤量した。これ
らの粉体を、ジルコニアの玉石および純水とともにボー
ルミルで17時間混合した。混合後、スラリーを乾燥
し、アルミナ製の坩堝にいれ、1000から1300℃
で2時間仮焼した。仮焼体を、解砕した後、前述したボ
ールミルで17時間粉砕し、乾燥させ、主成分の粉末と
した。EXAMPLES The present invention will be described in more detail below with reference to examples. (Example 1) Example 1 illustrates the dielectric ceramic composition of the present invention. First, the synthesis of the powder used as the main component will be described. CaCO 3 , MgO, Nb 2 O 5 , and TiO 2 which are chemically high purity (purity 99% or more) were used as starting materials. After correcting the purity of the raw materials, the composition was weighed so that x has a predetermined value when expressed as Ca {(Mg 1/3 Nb 2/3 ) 1-x Ti x } O 3 . These powders were mixed with a zirconia cobblestone and pure water in a ball mill for 17 hours. After mixing, dry the slurry, put in an alumina crucible, 1000 to 1300 ℃
It was calcined for 2 hours. After crushing the calcined body, it was crushed for 17 hours by the above-mentioned ball mill and dried to obtain powder of the main component.
【0018】次に、副成分として用いる粉末の合成につ
いて述べる。出発原料には化学的に高純度(純度99%
以上)であるSiO2、B2O3、Al2O3、ZrO2、B
aCO3、SrCO3、CaCO3、Li2O、ZnOおよ
びPbOを用いた。原料の純度補正を行なったのち、表
1に示した種々の組成となるように秤量した。これらの
粉体を、エタノールを溶媒に用いてボールミル混合を行
い、乾燥させた。混合粉体を坩堝にいれ、1000〜1
200℃で溶融させ、急冷した。解砕した後、混合と同
様の方法にて粉砕し、乾燥させ、副成分の粉末とした。
得られた粉末の体積平均粒子直径は50μm以下であっ
た。合成した副成分の組成を表1に示す。Next, the synthesis of powder used as an accessory component will be described. Highly chemically pure starting material (99% pure)
Above) SiO 2 , B 2 O 3 , Al 2 O 3 , ZrO 2 , B
aCO 3 , SrCO 3 , CaCO 3 , Li 2 O, ZnO and PbO were used. After correcting the purity of the raw materials, the raw materials were weighed so as to have various compositions shown in Table 1. These powders were ball-milled using ethanol as a solvent and dried. Put the mixed powder in the crucible, 1000-1
It was melted at 200 ° C. and quenched. After crushing, the mixture was crushed in the same manner as mixing and dried to obtain a powder of a subcomponent.
The volume average particle diameter of the obtained powder was 50 μm or less. Table 1 shows the composition of the synthesized subcomponents.
【0019】[0019]
【表1】 [Table 1]
【0020】添加物として化学的に高純度(純度99%
以上)であるMgO、NiO、CuO、MnO2、WO3
の粉末を表2、表3に示した組成となるように秤量し
て、主成分と副成分の粉末とともにボールミルにて湿式
混合し、乾燥させた。得られた粉体にバインダとしてポ
リビニルアルコールの5重量%水溶液を6重量%加えて
混合後、32メッシュのふるいを通して造粒し、100
MPaで直径13mm、厚み約5mmの円柱状にプレス
成形した。成形体を600℃で3時間加熱してバインダ
を焼却後、マグネシア製の磁器容器に入れ、蓋をし、8
00から1200℃の種々の温度で2時間保持して焼成
した。密度が最高となる温度で焼成した焼結体について
マイクロ波での誘電特性を測定した。Chemically high purity as an additive (purity 99%
Above) MgO, NiO, CuO, MnO 2 , WO 3
Were weighed so as to have the compositions shown in Tables 2 and 3, and were wet-mixed in a ball mill together with the powders of the main component and subcomponents and dried. 6% by weight of a 5% by weight aqueous solution of polyvinyl alcohol was added to the obtained powder as a binder, mixed, and then granulated through a 32 mesh sieve to obtain 100
It was press molded into a columnar shape having a diameter of 13 mm and a thickness of about 5 mm at MPa. The molded body is heated at 600 ° C for 3 hours to incinerate the binder, and then put in a magnesia porcelain container, which is then capped.
Baking was carried out by holding at various temperatures from 00 to 1200 ° C. for 2 hours. Microwave dielectric properties of the sintered body fired at the temperature at which the density was highest were measured.
【0021】比誘電率は、試料を平行導体板ではさみ、
TE011 モードの共振周波数と試料形状より算出した。
共振周波数とQ値は、キャビティ内の支持台上に試料を
置き、TE01δモードの誘電体共振器法により求めた。
共振周波数は4から8GHzであった。また、温度が−
25℃、20℃及び85℃における共振周波数を測定
し、最小二乗法により、その温度係数(τf )を算出し
た。結果を表2、表3に示す。The relative dielectric constant is determined by sandwiching the sample with parallel conductor plates.
It was calculated from the resonance frequency of the TE 011 mode and the sample shape.
The resonance frequency and the Q value were obtained by placing a sample on a support in the cavity and using the TE 01 δ mode dielectric resonator method.
The resonance frequency was 4 to 8 GHz. Also, if the temperature is −
The resonance frequencies at 25 ° C., 20 ° C. and 85 ° C. were measured, and the temperature coefficient (τ f ) was calculated by the least square method. The results are shown in Tables 2 and 3.
【0022】[0022]
【表2】 [Table 2]
【0023】[0023]
【表3】 [Table 3]
【0024】以下、主成分、副成分の組成を限定した理
由について述べる。Ca{(Mg1/ 3Nb2/3)1-xT
ix}O3におけるxが0.5を越えると、共振周波数の
温度係数が+50を越える大きい値となり実用上好まし
くない。副成分の量が2重量部より小さいと焼成温度が
1200℃以上と高くなり、本発明の目的にそぐわな
い。副成分の量が60重量部を越えると、Qf積が10
00GHz以下の小さい値となるので望ましくない。よ
って、請求項1のように主成分、副成分の組成を限定す
ることによって、1000℃程度の低温で焼結し、25
前後の高い比誘電率、1000GHz以上の高いQf
積、−50から+50ppm/℃の小さい共振周波数の温度
係数を得ることができた。The reasons for limiting the composition of the main component and the subcomponents will be described below. Ca {(Mg 1/3 Nb 2/3) 1-x T
If x in i x } O 3 exceeds 0.5, the temperature coefficient of the resonance frequency becomes a large value exceeding +50, which is not preferable in practice. If the amount of the subcomponents is less than 2 parts by weight, the firing temperature is as high as 1200 ° C or higher, which is not suitable for the purpose of the present invention. If the amount of subcomponents exceeds 60 parts by weight, the Qf product is 10
It is not desirable because it becomes a small value of 00 GHz or less. Therefore, by limiting the composition of the main component and the sub-component as in claim 1, sintering at a low temperature of about 1000 ° C.
High relative dielectric constant before and after, high Qf over 1000 GHz
It was possible to obtain a small temperature coefficient of resonance frequency of -50 to +50 ppm / ° C.
【0025】表2、表3から、MgO、NiO、Cu
O、MnO2、WO3のうちの一種以上を0.1〜10重
量部の割合で添加することにより、本発明の実施例の組
成の磁器は、焼成温度をより低下し、Q値をより向上さ
せていずれも良好な特性を示し、優れたマイクロ波誘電
特性が得られた。From Tables 2 and 3, MgO, NiO, Cu
By adding one or more of O, MnO 2 , and WO 3 in a proportion of 0.1 to 10 parts by weight, the porcelain having the composition of the example of the present invention has a lower firing temperature and a higher Q value. All of them were improved to show good characteristics, and excellent microwave dielectric characteristics were obtained.
【0026】しかし、試料番号12の例のように、添加
物としてCuOを10重量部を越えて添加したものにつ
いては、無添加と比べて、焼成温度は低下するもののQ
値も低下させてしまうので、本発明の請求の範囲外とし
た。However, as in the case of the sample No. 12, in the case where CuO was added in an amount of more than 10 parts by weight as an additive, the firing temperature was lower than that in the case where no addition was made.
Since the value is also lowered, it is outside the scope of the claims of the present invention.
【0027】(実施例2)主成分、副成分の製造方法、
および特性の評価については実施例1と同様の方法によ
り行った。(Example 2) A method for producing a main component and a subcomponent,
The evaluation of the characteristics was performed in the same manner as in Example 1.
【0028】添加物として化学的に高純度(純度99%
以上)であるMgO、NiO、CuO、MnO2、WO3
の粉末を表4、表5の組成となるよう秤量し、副成分の
粉末とともに500〜900℃の温度で2時間保持し熱
処理を行った。解砕後、ボールミルで17時間粉砕し、
乾燥させて、主成分の粉末と混合した。その結果を表
4、表5に示す。Chemically high purity as an additive (purity 99%
Above) MgO, NiO, CuO, MnO 2 , WO 3
Was weighed so as to have the compositions shown in Tables 4 and 5, and the powder was held at a temperature of 500 to 900 ° C. for 2 hours together with the powders of the subcomponents for heat treatment. After crushing, crush with a ball mill for 17 hours,
It was dried and mixed with the main component powder. The results are shown in Tables 4 and 5.
【0029】[0029]
【表4】 [Table 4]
【0030】[0030]
【表5】 [Table 5]
【0031】表4、表5より、添加物としてMgO、N
iO、CuO、MnO2、WO3のうちの一種以上を0.
1から10重量部の割合で副成分とともにあらかじめ5
00〜900℃で熱処理することにより、本実施例の誘
電体磁器は、焼成温度をより低下し、Q値をより向上さ
せ、いずれも良好な誘電特性を示し、優れたマイクロ波
特性が得られた。From Tables 4 and 5, MgO and N were added as additives.
One or more of iO, CuO, MnO 2 , and WO 3 is added to 0.
1 to 10 parts by weight in advance with subcomponents 5
By heat-treating at 00 to 900 ° C., the dielectric ceramics of this example have a lower firing temperature and a higher Q value, and all show good dielectric characteristics and excellent microwave characteristics. Was given.
【0032】なお、主成分、副成分の組成を限定したの
は、実施例1と同様の理由である。また、試料番号49
の例のように、添加物としてCuOを10重量部を越え
て添加したものについては、実施例1と同様に、焼成温
度は低下するもののQ値も低下させてしまうので、本発
明の請求の範囲外とした。The reasons for limiting the compositions of the main component and the sub-components are the same as in the first embodiment. Also, sample number 49
In the case of adding CuO as an additive in an amount of more than 10 parts by weight, as in Example 1, as in Example 1, the firing temperature is lowered but the Q value is also lowered. It was out of range.
【0033】(実施例3)主成分、副成分の製造方法、
および特性の評価については実施例1と同様の方法によ
り行った。ただし、添加物として、化学的に高純度(純
度99%以上)であるMgO、NiO、CuO、MnO
2、WO3の粉末を表6、表7の組成となるよう秤量し、
副成分とともに実施例1と同様の方法で1000から1
200℃で溶融、急冷し、その後粉砕、乾燥させ、主成
分の粉末とともに混合した。その結果を表6、表7に示
す。(Example 3) A method for producing a main component and a subcomponent,
The evaluation of the characteristics was performed in the same manner as in Example 1. However, as additives, chemically pure MgO, NiO, CuO, MnO (purity 99% or more) is used.
2 , the powder of WO 3 was weighed so as to have the composition shown in Table 6 and Table 7,
1000 to 1 in the same manner as in Example 1 with subcomponents
It was melted at 200 ° C., rapidly cooled, then pulverized, dried, and mixed with the powder of the main component. The results are shown in Tables 6 and 7.
【0034】[0034]
【表6】 [Table 6]
【0035】[0035]
【表7】 [Table 7]
【0036】表6、表7より、添加物としてMgO、N
iO、CuO、MnO2、WO3のうちの一種以上を0.
1から10重量部の割合で副成分とともにあらかじめ溶
融、急冷することにより、本実施例の誘電体磁器は、焼
成温度をより低下し、Q値をより向上させ、また、比誘
電率も向上し、いずれも良好な特性を示し、優れたマイ
クロ波特性が得られた。From Tables 6 and 7, MgO and N as additives were added.
One or more of iO, CuO, MnO 2 , and WO 3 is added to 0.
By pre-melting and quenching together with the sub-components in a proportion of 1 to 10 parts by weight, the dielectric ceramics of this example have a lower firing temperature, a higher Q value and a higher relative dielectric constant. , All showed good characteristics, and excellent microwave characteristics were obtained.
【0037】主成分、副成分の組成を限定したのは、実
施例1と同様の理由である。また、試料番号80の例の
ように、添加物としてCuOを10重量部を越えて添加
したものについては、実施例1と同様に、焼成温度は低
下するもののQ値も低下させてしまうので、本発明の請
求の範囲外とした。The reason why the compositions of the main component and the subcomponents are limited is the same as in the first embodiment. Further, as in the example of sample No. 80, in the case where CuO is added in an amount of more than 10 parts by weight as an additive, the firing value is lowered but the Q value is also lowered, as in Example 1. It is outside the scope of the claims of the present invention.
【0038】(実施例4)実施例4は本発明の高周波デ
バイスを説明するものである。積層型の高周波デバイス
として、ストリップライン導体を誘電体層で挟み、シー
ルド導体と結合用のキャパシタを内蔵した構造を持つ誘
電体共振器を作製した。その斜視図を図1に示す。図2
は図1のI−I線断面図、図3は図1のII−II線断面図、
図4Aは図2のIII−III線断面図、図4Bは図2のIV−
IV線断面図、図4Cは図2のV−V線断面図を示す。ここ
で、1は誘電体層、2、3、4は内部導体、5、6、7
は外部電極である。以下にその作製法について述べる。(Embodiment 4) Embodiment 4 explains a high frequency device of the present invention. As a laminated high frequency device, a dielectric resonator having a structure in which a stripline conductor is sandwiched between dielectric layers and a shield conductor and a coupling capacitor are built in was produced. The perspective view is shown in FIG. FIG.
1 is a sectional view taken along line I-I of FIG. 1, FIG. 3 is a sectional view taken along line II-II of FIG.
4A is a sectional view taken along line III-III in FIG. 2, and FIG.
The IV line sectional view and FIG. 4C show the VV line sectional view of FIG. Here, 1 is a dielectric layer, 2, 3 and 4 are internal conductors, 5, 6 and 7
Is an external electrode. The manufacturing method will be described below.
【0039】まず、表2の試料番号10の組成物に、有
機バインダ、溶剤及び可塑剤を加え、混合して得たスラ
リーをドクターブレード法によりシート化した。導体金
属として、表8に示した種々の金属を選び、ビヒクルと
混練しペースト化した。導体がCuOの場合はCuOペ
ーストを用いた。First, an organic binder, a solvent and a plasticizer were added to the composition of sample No. 10 in Table 2 and mixed to obtain a slurry, which was formed into a sheet by a doctor blade method. As the conductor metal, various metals shown in Table 8 were selected and kneaded with the vehicle to form a paste. When the conductor was CuO, CuO paste was used.
【0040】[0040]
【表8】 [Table 8]
【0041】また、表4の試料番号47の組成物、表6
の試料番号78の組成物も同様の方法でシート作製を行
った。それぞれ表9、表10に示す。The composition of sample No. 47 in Table 4 and Table 6
The sheet of the composition of Sample No. 78 was prepared in the same manner. They are shown in Table 9 and Table 10, respectively.
【0042】[0042]
【表9】 [Table 9]
【0043】[0043]
【表10】 [Table 10]
【0044】シートを複数枚積層した後、図4の導体パ
ターン2をスクリーン印刷し、その上にシートを複数枚
積層し、導体パターン3を印刷し、さらに、シートを複
数枚積層し、導体パターン4を印刷し、そしてシートを
複数枚積層した後、熱プレスで圧着した。個々の素子に
切断後、空気中で熱処理してバインダを飛散させた。C
uOペーストを用いた場合は、H2中で熱処理し導体を
Cuに還元した後、N2中で焼成した。その他の導体の
場合は空気中で焼成した。焼成温度は900℃とした。After laminating a plurality of sheets, the conductor pattern 2 of FIG. 4 is screen-printed, a plurality of sheets are laminated thereon, a conductor pattern 3 is printed, and a plurality of sheets are further laminated to form a conductor pattern. 4 was printed, and a plurality of sheets were laminated and then pressure-bonded with a hot press. After cutting into individual elements, the binder was scattered by heat treatment in air. C
When the uO paste was used, it was heat-treated in H 2 to reduce the conductor to Cu, and then fired in N 2 . Other conductors were fired in air. The firing temperature was 900 ° C.
【0045】そして外部電極5、6、7を塗布後、空気
中で、Cuの場合はN2中で焼き付けて、積層型誘電体
共振器を得た。焼成後の素子の寸法は縦8mm、横4.
5mm、高さ2.5mmであり、ストリップラインであ
る導体3は幅1mm、長さ7mmであった。After coating the external electrodes 5, 6 and 7, they were baked in air or in N 2 in the case of Cu to obtain a laminated dielectric resonator. The dimensions of the element after firing are vertical 8 mm and horizontal 4.
The conductor 3 as a strip line had a width of 1 mm and a length of 7 mm.
【0046】それぞれの導体に対し素子を10個作製
し、その平均値を特性とした。表8、表9、表10に得
られた共振器の共振周波数とQ値を示す。表8、表9、
表10に示したように、共振周波数はいずれも2.0G
Hz前後、Q値はCu、Au、Ag及びその合金を実施
したいずれの導体を用いても170以上と高く、優れた
ものであった。従来の低温焼成基板材料の比誘電率は8
程度であるため、本実施例の共振器と同一の構造で、共
振周波数を得るには約12mmのストリップライン長が
必要となる。しかし、本発明の誘電体の誘電率は21〜
24と高いため、ストリップラインの長さは7mmと短
く、非常に小型のものが得られた。Ten elements were prepared for each conductor, and the average value was used as the characteristic. Tables 8, 9 and 10 show the resonance frequency and Q value of the obtained resonator. Table 8, Table 9,
As shown in Table 10, the resonance frequency is 2.0G
The Q value around Hz was as high as 170 or more, which was excellent even when any of the conductors made of Cu, Au, Ag and alloys thereof was used. The relative dielectric constant of the conventional low temperature firing substrate material is 8
Therefore, a stripline length of about 12 mm is required to obtain the resonance frequency with the same structure as the resonator of this embodiment. However, the dielectric constant of the dielectric of the present invention is 21 to
Since it was as high as 24, the length of the strip line was as short as 7 mm, and a very small size was obtained.
【0047】なお、ストリップラインを曲線状や、積層
状にすることで、より小型の共振デバイスを得ることも
可能である。また、これを複数個とキャパシタ等を組み
合わせることにより、バンドパスフィルタ等を得ること
も可能である。It is also possible to obtain a smaller resonant device by forming the strip line into a curved shape or a laminated shape. It is also possible to obtain a bandpass filter or the like by combining a plurality of these with a capacitor or the like.
【0048】また、請求の範囲外の元素の含有も誘電特
性に悪い影響を与えない範囲であればかまわない。Also, the inclusion of elements outside the claimed range may be within the range that does not adversely affect the dielectric properties.
【0049】[0049]
【発明の効果】以上のように本発明の誘電体磁器組成物
によれば、酸化カルシウム、酸化マグネシウム、酸化ニ
オブおよび酸化チタンよりなり、一般式Ca{(Mg
1/3Nb2 /3)1-xTix}O3 (ただし、0<x≦0.5
0)で表される主成分が40重量部以上98重量部以下
の範囲、及びSiO2 またはB2O3のうちの一種以上を
含む副成分が2重量部以上60重量部以下の範囲の割合
からなる組成物に、MgO、NiO、CuO、MnO2
及びWO3 から選ばれる少なくとも一種の酸化物が0.
1重量部以上10重量部以下の範囲添加されていること
により、焼結温度をより低くでき、かつ組成が安定で、
より高いQ値を有する誘電体磁器組成物を提供できる。
すなわち、主成分に比誘電率が高く、優れたマイクロ波
誘電特性を持つCa{(Mg1/3Nb2/3)1-xTix}O
3を用い、副成分に焼結を促進するガラス成分を含有し
ているため、1000℃程度で焼結し、比誘電率が高
く、高いQ値と小さい共振周波数の温度係数を有する誘
電体磁器を実現できる。また、主成分にBi2O3を含ま
ないため、組成が安定で焼成温度に対する誘電特性の安
定性も優れている。これにより、フィルタや共用器など
の高周波デバイスの小型化と高機能化が可能となる。As described above, the dielectric ceramic composition of the present invention comprises calcium oxide, magnesium oxide, niobium oxide and titanium oxide, and has the general formula Ca {(Mg
1/3 Nb 2/3) 1- x Ti x} O 3 ( however, 0 <x ≦ 0.5
Ratio of the main component represented by 0) in the range of 40 parts by weight or more and 98 parts by weight or less, and the range of 2 parts by weight or more and 60 parts by weight or less of the accessory component containing one or more of SiO 2 or B 2 O 3. A composition consisting of MgO, NiO, CuO, MnO 2
And at least one oxide selected from WO 3 is 0.
By adding 1 part by weight or more and 10 parts by weight or less, the sintering temperature can be lowered, the composition is stable,
A dielectric ceramic composition having a higher Q value can be provided.
That is, Ca {(Mg 1/3 Nb 2/3 ) 1-x Ti x } O having a high relative dielectric constant as a main component and excellent microwave dielectric properties
3, and a glass component that promotes sintering is contained as an auxiliary component, so that the dielectric porcelain sintered at about 1000 ° C. has a high relative dielectric constant, a high Q value, and a temperature coefficient of a small resonance frequency. Can be realized. In addition, since the main component does not contain Bi 2 O 3 , the composition is stable and the stability of the dielectric properties with respect to the firing temperature is excellent. As a result, a high-frequency device such as a filter or a duplexer can be reduced in size and function.
【0050】次に本発明の製造方法によれば、前記本発
明の誘電体磁器組成物を効率良く合理的に製造できる。
また本発明は、焼成温度をより低下し、Q値を向上さ
せ、比誘電率が25前後と高く、共振周波数の温度係数
(τf )が小さい誘電体磁器組成物が得られるので、C
u、AuまたはAgなどを内部導体に用いた積層型の共
振デバイスを実現できる。Next, according to the production method of the present invention, the dielectric ceramic composition of the present invention can be efficiently and rationally produced.
Further, according to the present invention, since the firing temperature is further lowered, the Q value is improved, the relative dielectric constant is as high as about 25, and the temperature coefficient (τ f ) of the resonance frequency is small, the dielectric ceramic composition can be obtained.
It is possible to realize a laminated resonance device using u, Au, Ag, or the like as the internal conductor.
【0051】特に、小型、高機能の共振器を作製するこ
とができることにより、自動車電話や携帯電話などの高
周波機器の小型化、高機能化に寄与するところが大であ
る。さらに、本発明の誘電体磁器は、共振デバイスのみ
ならず、マイクロ波用の回路基板、磁器積層コンデンサ
などにも利用でき、工業的価値が大きいものである。In particular, the fact that a small-sized and highly functional resonator can be manufactured greatly contributes to downsizing and high performance of high-frequency devices such as car phones and mobile phones. Further, the dielectric porcelain of the present invention can be used not only for a resonance device but also for a microwave circuit board, a porcelain multilayer capacitor, and the like, and has great industrial value.
【図1】 本発明の実施例4の誘電体共振器の斜視図で
ある。FIG. 1 is a perspective view of a dielectric resonator according to a fourth embodiment of the present invention.
【図2】 同、図1のI−I線断面図である。FIG. 2 is a sectional view taken along line II of FIG.
【図3】 同、図1のII−II線断面図である。FIG. 3 is a sectional view taken along line II-II of FIG. 1.
【図4】 Aは図2のIII−III線断面図、Bは図2のIV
−IV線断面図、Cは図2のV−V線断面図である。4 is a sectional view taken along line III-III in FIG. 2, and B is IV in FIG.
-IV line sectional drawing, C is the VV sectional view taken on the line of FIG.
1 誘電体層 2,3,4 内部導体 5,6,7 外部電極 1 Dielectric layer 2, 3, 4 Inner conductor 5, 6, 7 External electrode
フロントページの続き (72)発明者 井上 竜也 大阪府門真市大字門真1006番地 松下電器 産業株式会社内Front page continuation (72) Inventor Tatsuya Inoue 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.
Claims (12)
化ニオブおよび酸化チタンを必須の構成成分とする組成
物であって、一般式Ca{(Mg1/3Nb2/3) 1-xT
ix}O3 (ただし、0<x≦0.50)で表される主
成分が40重量部以上98重量部以下の範囲、及びSi
O2 またはB2O3のうちの一種以上を含む副成分が2重
量部以上60重量部以下の範囲の割合からなる組成物
に、MgO、NiO、CuO、MnO2 及びWO3 から
選ばれる少なくとも一種の酸化物が0.1重量部以上1
0重量部以下の範囲添加されていることを特徴とする誘
電体磁器組成物。1. Calcium oxide, magnesium oxide, acid
Composition containing niobium oxide and titanium oxide as essential constituents
Of the general formula Ca {(Mg1/3Nb2/3) 1-xT
ix} OThree (However, 0 <x ≦ 0.50)
In the range of 40 to 98 parts by weight of the component, and Si
O2 Or B2OThreeThe secondary component containing one or more of the
Composition comprising a proportion in the range of not less than 60 parts by weight and not less than 60 parts by weight
In addition, MgO, NiO, CuO, MnO2 And WOThree From
0.1 parts by weight or more of at least one oxide selected 1
Induction characterized by being added in a range of 0 parts by weight or less
Electric porcelain composition.
である請求項1に記載の誘電体磁器組成物。2. The dielectric ceramic composition according to claim 1, which has a relative permittivity (ε r ) in the range of 10 to 50.
0GHz以下である請求項1に記載の誘電体磁器組成
物。3. The Qf product is 1000 GHz or more and 3000.
The dielectric ceramic composition according to claim 1, which has a frequency of 0 GHz or less.
化ニオブおよび酸化チタンよりなり、一般式Ca{(M
g1/3Nb2/3)1-xTix}O3 (ただし、0<x≦0.
50)で表される主成分が40重量部以上98重量部以
下の範囲、及びSiO2 またはB2O3のうちの一種以上
を含む副成分が2重量部以上60重量部以下の範囲の割
合からなる組成物に、MgO、NiO、CuO、MnO
2 及びWO3 から選ばれる少なくとも一種の酸化物が
0.1重量部以上10重量部以下の範囲添加されている
組成物を本焼結して誘電体磁器を製造する方法であっ
て、本焼結前に、前記副成分と添加物を混合し、予備加
熱処理することを特徴とする誘電体磁器の製造方法。4. Calcium oxide, magnesium oxide, niobium oxide and titanium oxide, which have the general formula Ca {(M
g 1/3 Nb 2/3) 1-x Ti x} O 3 ( however, 0 <x ≦ 0.
50) A proportion of the main component represented by 40) in the range of 40 parts by weight or more and 98 parts by weight or less, and the proportion of the accessory component containing one or more of SiO 2 or B 2 O 3 in the range of 2 parts by weight or more and 60 parts by weight or less. A composition consisting of MgO, NiO, CuO, MnO
A method for producing a dielectric ceramic by subjecting a composition to which at least one oxide selected from 2 and WO 3 is added in a range of 0.1 part by weight or more and 10 parts by weight or less. A method for manufacturing a dielectric porcelain, characterized in that the auxiliary component and the additive are mixed and preheated before binding.
℃の範囲である請求項4に記載の誘電体磁器の製造方
法。5. The temperature of the preheat treatment is 500 to 900.
The method for manufacturing a dielectric ceramic according to claim 4, wherein the temperature is in the range of ° C.
℃の範囲の溶融温度であり、かつ溶融後に急冷する処理
である請求項4に記載の誘電体磁器の製造方法。6. The preheating treatment is performed at 1000 ° C. to 1200 ° C.
The method for producing a dielectric ceramic according to claim 4, wherein the melting temperature is in the range of ° C, and the cooling is performed after the melting.
の範囲である請求項4に記載の誘電体磁器の製造方法。7. The main sintering temperature is 800 ° C. or higher and 1200 ° C.
The method for manufacturing a dielectric ceramic according to claim 4, wherein
1300℃の範囲の温度で仮焼成し、粉砕する請求項4
に記載の誘電体磁器の製造方法。8. Prior to the main sintering, the main component of 1000.degree.
The calcination is performed at a temperature in the range of 1300 ° C., and the pulverization is performed.
The method for manufacturing a dielectric ceramic according to item 1.
℃〜1200℃の範囲の温度で溶融し、急冷し、その後
粉砕する処理である請求項4に記載の誘電体磁器の製造
方法。9. The preheating treatment is carried out by adding 1000 parts of subcomponents in advance.
The method for producing a dielectric ceramic according to claim 4, which is a process of melting at a temperature in the range of ℃ to 1200 ° C, quenching, and then crushing.
とも一部が、Cu、Cu合金、Au、Au合金、Agお
よびAg合金から選ばれる金属で構成され、誘電体層の
少なくとも一部が、酸化カルシウム、酸化マグネシウ
ム、酸化ニオブおよび酸化チタンを必須の構成成分とす
る組成物であって、一般式Ca{(Mg1/ 3Nb2/3)
1-xTix}O3 (ただし、0<x≦0.50)で表され
る主成分が40重量部以上98重量部以下の範囲、及び
SiO2 またはB2O3のうちの一種以上を含む副成分が
2重量部以上60重量部以下の範囲の割合からなる組成
物に、MgO、NiO、CuO、MnO2 及びWO3 か
ら選ばれる少なくとも一種の酸化物が0.1重量部以上
10重量部以下の範囲添加されていることを特徴とする
積層型高周波デバイス。10. A conductor and a dielectric, at least a part of the conductor being composed of a metal selected from Cu, Cu alloy, Au, Au alloy, Ag and Ag alloy, and at least a part of the dielectric layer, calcium oxide, magnesium oxide, a composition as essential components niobium oxide and titanium oxide, the general formula Ca {(Mg 1/3 Nb 2/3)
1-x Ti x} O 3 ( however, 0 <x ≦ 0.50) in the range main component is less than 98 parts by weight 40 parts by weight or more expressed, and one or more of SiO 2 or B 2 O 3 In an amount of at least one oxide selected from MgO, NiO, CuO, MnO 2 and WO 3, 0.1 to 10 parts by weight is added to the composition having a proportion of the sub-component containing 2 to 60 parts by weight. A laminated high-frequency device characterized by being added in an amount of not more than a weight part.
が、10〜50の範囲である請求項10に記載の積層型
高周波デバイス。11. The relative permittivity (ε r ) of the dielectric ceramic composition
Is in the range of 10 to 50. The laminated high frequency device according to claim 10.
0GHz以上30000GHz以下である請求項10に
記載の積層型高周波デバイス。12. The Qf product of the dielectric ceramic composition is 100.
The laminated high-frequency device according to claim 10, which has a frequency of 0 GHz or more and 30000 GHz or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8150573A JPH0959062A (en) | 1995-06-15 | 1996-06-12 | Dielectric ceramic composition, method for producing the same, and laminated high-frequency device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7-148494 | 1995-06-15 | ||
| JP14849495 | 1995-06-15 | ||
| JP8150573A JPH0959062A (en) | 1995-06-15 | 1996-06-12 | Dielectric ceramic composition, method for producing the same, and laminated high-frequency device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0959062A true JPH0959062A (en) | 1997-03-04 |
Family
ID=26478675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8150573A Pending JPH0959062A (en) | 1995-06-15 | 1996-06-12 | Dielectric ceramic composition, method for producing the same, and laminated high-frequency device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0959062A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100302455B1 (en) * | 1998-07-28 | 2001-10-17 | 박호군 | Dielectric ceramic composition for high frequency |
| JP2007001824A (en) * | 2005-06-24 | 2007-01-11 | Tdk Corp | Sintering aid, method for production of dielectric ceramic composition, and method for production of electronic component |
-
1996
- 1996-06-12 JP JP8150573A patent/JPH0959062A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100302455B1 (en) * | 1998-07-28 | 2001-10-17 | 박호군 | Dielectric ceramic composition for high frequency |
| JP2007001824A (en) * | 2005-06-24 | 2007-01-11 | Tdk Corp | Sintering aid, method for production of dielectric ceramic composition, and method for production of electronic component |
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