JPH0967089A - Lifting device in cassette moving truck - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lifting device in a cassette moving truck, by which a cassette in which a glass base plate is housed can be safely moved, raised and lowered, and the cost can be reduced. SOLUTION: A movable part 3 on which a cassette C is to be placed is arranged on a fixed part 1 of a moving truck D so as to be raised and lowered. A first pulley 21a and a second pulley 21b are rotatably supported in a driving box 19 to be arranged on the upper part of the fixed part 1, and a first wire 18a and a second wire 18b are wound on the first pulley 21a and the second pulley 21b. One end of the first wire 18a is fixed to the pulley 21b, the other end is fixed to a weight table 13, one end of the second wire 18b is fixed to the pulley 12b, and the other end is fixed to the movable part 3. weights 14 proportional to the weights of the movable part 3 and the cassette C are placed on the weight table 13. A lock pin is attached to a bracket attached to the movable part 3 so as to be inserted into a lock pin hole formed on the projecting part 1b of the fixed part 1, so as to lock the movable part 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving carriage that mounts and moves a cassette in which a thin substrate such as a glass substrate is placed, and further relates to improvement of a lifting device for the cassette moving carriage.

[0002]

2. Description of the Related Art Usually, a plurality of glass substrates are collectively stored in a cassette and are transported for centering the glass substrates, and when the centering is completed, they are transported to the next step. A cassette containing a plurality of glass substrates is placed on an automatic transport vehicle or a manual moving carriage and transported to the next process. However, especially when an automatic carrier cannot be used, a manual moving carriage is used for carrying. In this case, the glass substrate should not drop or be significantly displaced during the transportation as well as during the raising and lowering of the cassette.

In the conventional moving carriage, the cassette mounting surface is formed so that the cassette can be positioned so that the glass substrates housed in the cassette do not drop during transportation and are not significantly displaced, and It was configured to move in any direction. Further, the cassette mounting surface is mounted on a movable part which is movable in the vertical direction, and a hydraulic cylinder such as an air cylinder or a hydraulic cylinder is connected to the movable part so as to move up and down by hydraulic pressure.

[0004]

However, when moving a glass substrate to be operated in a clean room, the conventional lifting and lowering movement using a hydraulic cylinder cannot provide a large lifting stroke because a space for installing the cylinder is required. In addition, if there is a possibility that air or oil will adhere to the glass substrate due to leakage, it may not be usable as a product, and the cost of the moving dolly is high. Of course, it is difficult to move the cassette safely with a commonly used hand lift, so it is not applied.

The present invention is to solve the above-mentioned problems and to safely move a cassette containing a glass substrate,
An object of the present invention is to provide an elevating device for a cassette carriage which can be produced at a low cost by elevating and lowering the elevating stroke and reducing the number of parts.

[0006]

SUMMARY OF THE INVENTION In an elevator apparatus for a cassette moving carriage according to the present invention, a fixed portion that is erected and a cassette that accommodates a thin substrate is placed and movable vertically with respect to the fixed portion. And a lifting device for manually moving the movable part up and down in a cassette moving carriage, wherein the lifting device has a balancer part corresponding to the weight of the cassette. .

Further, the lifting device includes a first pulley and a second pulley which are rotatably supported by the fixed portion, and a first wire wound around the first pulley is hooked on the balancer. The second wire wound around the second pulley may be hooked on the movable portion.

Further, it is more preferable that the balancer portion has one or a plurality of weights.

Further, it is more preferable that the elevating device includes a lock device for keeping the movable part stopped moving up and down.

Further, the drive unit of the elevating device may have a reduction mechanism and a handle connected to the reduction mechanism.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings.

A mobile carriage D according to this embodiment is shown in FIGS.
As shown in FIG. 1, a fixed portion 1 that is erected upright, a foot portion 2 that is horizontally extended and fixed to the lower portion of the fixed portion 1 and fixed to the fixed portion 1, and can be moved up and down with respect to the fixed portion 1. Movable part 3,
And an elevating device 4 for driving the movable part 3 so as to be able to elevate.

The fixed part 1 is formed in a box shape, and an opening 1a for storing the rear part of the movable part 3 is formed on the movable part 3 side of the fixed part 1. Further, a ball screw 6 is erected vertically on the fixed portion 1, and is supported by pyrographs 5 and 5 mounted above and below the ball screw 6, respectively. Further, a clamp lever 9 is attached to the upper end of the ball screw 6, so that the rotation of the ball screw 6 can be stopped and maintained. Then, a ball screw receiver 7 screwed onto the ball screw 6 is attached to the rear surface 3 a of the movable portion 3, and the movable portion 3 is supported by the fixed portion 1 so as to be able to move up and down. The ball screw 6 helps prevent the movable portion 3 from falling when the cassette C is placed on the movable portion 3.

Further, linear guides 8, 8 are vertically mounted on both sides of the rear surface of the movable part 3, and guide rails 8a, 8a of the linear guides 8, 8 are formed on both sides of the fixed part 1, respectively. Moving part 3 attached to 1b
Guide the up and down movement of.

A mounting plate for mounting the cassette C on the upper surface of the movable portion 3 is movably mounted in the front-rear direction along the guide rails so that the cassette C can be moved back and forth.

The lifting device 4 is fixed to the movable part 3 and the drive part 20 arranged in the drive box 19 arranged above the fixed part 1, the balancer part 11 arranged below the fixed part 1. The lock device 30 is provided.

The drive unit 20, as shown in FIGS.
The drive box 19 is provided with connecting parts of the movable part 3 and the balancer part 11, which are connected to the drive box 19 and the drive box. A first pulley 21 is provided in the drive box 19.
a and the second pulley 21b are rotatably supported via a shaft 22 and a bearing. Further, a large gear 23 is axially supported behind the first pulley 21b, and a small gear 24 is fixed to a shaft 25 arranged in parallel with the shaft 22 so as to mesh with the large gear 23. The shaft 25 is rotatably supported by the drive box 19 via bearings, and has an intermediate gear 26 on the side facing the small gear 24.
Is stuck. Further, the drive shaft 27 is provided in parallel with the shaft 25.
Is rotatably supported by the drive box 19, and the intermediate gear 2
The gear 28 that meshes with the gear 6 is fixed. A handle 29 is attached to the rear end of the drive shaft 27. By manually operating the handle 29, the first pulley 21a and the second pulley 21a
The pulley 21b can be rotated.

Further, the first pulley 21a and the second pulley 21
The first wire 18a and the second wire 18b are wound around b, respectively. The first wire 18a has a first pulley 21 at one end.
After being fixed to a and wound in a clockwise direction, the other end is hooked on the balancer portion 11. One end of the second wire 18b is fixed to the second pulley 21b, the second wire 18b is wound several times in the counterclockwise direction, and the other end is hooked on the wire receiver 17 attached to the movable portion 3.

The balancer portion 11 includes two guide rods 12 and 12 arranged between the lower portion of the fixed portion 1 and the drive box 19.
The weight of the cassette C and the movable base 3, the weight 13 is divided into a plurality of weights.
By operating 9, the frustum 13 moves up and down along the guide rod 13. A linear guide may be used instead of the guide rod 12.

A square hole 15 is formed on the rear surface of the fixed portion 1 at a position corresponding to the weight 14, and a door 16 is attached to the rear of the fixed portion 1 so as to be opened and closed. Then, the door 16 can be opened to insert the weight 14 into the frustum 13.

A lock device 30 for stopping and maintaining the vertical movement of the movable portion 3 is attached to the rear surface 3a of the movable portion 3 as shown in FIG. A rectangular bracket 31 is attached above the ball screw receiver 7 on the rear surface 3a of the movable portion, and the ball screw 7 penetrates through the center thereof. A side bracket 31a is provided on the rear end surface of the bracket 31 so as to project leftward in FIG. The lock pin 32 is attached to the side bracket 31a.
It is attached with a spring that urges 2 toward the front.

A protruding portion 1b formed on the left side surface of the fixed portion 1
In addition, a plurality of lock pin holes 33 are formed in the vertical direction so that the tip ends of the lock pins 32 are inserted. By inserting the lock pins 32 into the lock pin holes 33, the movable portion 3 is moved up and down. Stop and keep stopped. Further, by pulling the head portion 32a of the lock pin 32 rearward, the insertion can be released from the lock pin hole 33 against the biasing force of the spring.

On the rear surface of the box-shaped fixing portion 1, an opening 10 is formed in the longitudinal direction corresponding to the lock pin hole 33 formed in the protruding portion 1b of the fixing portion 1, and the head 32 of the lock pin 32 is formed.
It is configured that a is attached so as to project outward from the fixed portion 1.

As shown in FIG. 8, the foot portion 2 is provided with two foot plates 2a, 2a facing forward, and the foot plates 2a, 2
A positioning block 34 is attached between a and a.
The positioning block 34 is formed in a U shape, and the tapered portions 34a are formed so that the inner surfaces on both sides spread outward toward the front.
34a is formed. Then, the moving carriage D is a cassette C
The other device is guided by the taper portions 34a, 34a when mounting or lowering. In addition, casters are attached to the lower surface of the foot portion 4 at four places to facilitate smooth movement.

The operation of the elevating device for the movable carriage thus constructed will be described below.

A weight 14 originally adapted to the weight of the movable portion is mounted on the weight 13 of the lifting device 4, and the weight of the movable portion 13 is balanced by the weight. Therefore, the movable portion 13 maintains the stopped state.

Next, when carrying the cassette C, first, the lock pin 32 is removed from the lock pin hole 33, and the handle 2
9 is operated to raise or lower the movable portion 3 to a position where the cassette C is easily placed. When the handle 29 is turned clockwise, the movable portion 3 is stably raised by the linear guide, and the frustum 13 is stably lowered by the guide rod 12. On the contrary, when the handle 29 is turned counterclockwise, the movable part 3 descends and the frustum 13 rises. This operation is performed by the drive unit 20.
Composes a deceleration mechanism, and the movable part 3 and the weight 14
It is well balanced and can be done lightly.

At this position, the lock pin 32
Is inserted into the lock pin hole 33. The movable portion 3 is locked in the up-down direction and maintains a stopped state.

When the cassette C is placed on the placing plate of the movable part 3, the door 16 attached to the rear surface of the fixed part 1 is opened, and the weight 14 of the weight of the cassette C is added to the frustum 13. To do. Since various weights are prepared for the weight 14, the necessary weight 13 can be selected and used. Additional weight 1
When 4 is placed on the frustum 13, the lock pin 32 is removed from the lock pin hole 33, the handle 29 is rotated counterclockwise to lower the cassette C as much as possible, and the lock pin 32 is locked again. Insert into 33.

In this state, the sheet is conveyed to the place for the next process. Then, the lock pin 32 is removed from the lock pin hole 33, the handle 29 is rotated clockwise to raise the cassette C to a predetermined height, and the cassette C is lowered from the moving carriage D.

In any case, the weight of the movable portion 3 and the cassette C is hung downward, but the weight of the movable portion 3 and the cassette C, which is almost the same weight, is hung upward, so that the weight is balanced. Therefore, the handle can be smoothly operated.

Further, the lifting stroke is conventionally 150 to 20.
What was 0 mm was 620 m according to the present embodiment.
It is possible to make it as large as m.

[0033]

As described above, according to the present invention, the lifting device for the cassette moving carriage is provided with the movable portion and the weight corresponding to the weight of the cassette without using the air cylinder or the hydraulic cylinder. The balance can be adjusted manually so that it can be done smoothly. Therefore, the cassette can be safely moved and moved up and down, and there is no fear of air leakage or oil leakage. Furthermore, a long lifting stroke can be secured. Further, the number of parts is reduced, so that the cost can be reduced.

Further, since the elevating device is provided with the lock device, the movable part can be fixed to the fixed part during the cassette transfer, and the cassette can be transferred safely.

[Brief description of drawings]

FIG. 1 is a perspective view of an elevating device for a cassette carriage according to one embodiment of the present invention.

FIG. 2 is a front view of the moving carriage as seen from the rear side.

FIG. 3 is a side sectional view of a mobile trolley.

FIG. 4 is a front view of the drive unit of the lifting device seen from the rear.

FIG. 5 is a plan cross-sectional view showing a drive unit of the lifting device.

FIG. 6 is a side sectional view showing a drive unit of the lifting device.

FIG. 7 is a plan sectional view showing a locking device.

8 is a sectional view taken along line AA in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Fixed part 3 ... Movable part 4 ... Elevating device 11 ... Balancer part 14 ... Weight 18a ... 1st wire 18b ... 2nd wire 20 ... Drive part 21a ... 1st pulley 21b ... 2nd pulley 29 ... Handle 30 ... Lock device C ... Cassette D ... Mobile cart

Claims (5)

[Claims] 1. A vertically arranged fixed part, a movable part on which a cassette for accommodating a thin substrate is placed and which can be moved up and down with respect to the fixed part, and a lifting device for manually moving the movable part up and down. An elevating device in a cassette moving trolley, comprising: the elevating device having a balancer portion corresponding to the weight of the cassette. 2. The lifting device includes a first pulley and a second pulley that are rotatably supported by the fixed portion, and a first wire wound around the first pulley is hooked on the balancer. The lifting device for a cassette carriage according to claim 1, wherein a second wire wound around the second pulley is hooked on the movable portion. 3. The lifting device according to claim 1, wherein the balancer portion includes one or a plurality of weights. 4. The elevating device in a cassette moving carriage according to claim 1, wherein the elevating device includes a lock device that keeps the movable part stopped moving up and down. 5. The drive unit of the lifting device includes a speed reduction mechanism,
The lifting device for a cassette moving carriage according to claim 1, further comprising a handle connected to the reduction mechanism.