JPH0979484A - Sliding member, bearing using the same, and rotating anode X-ray tube - Google Patents

Abstract

(57) [Abstract] [PROBLEMS] A sliding member that not only has a long service life, but can also greatly reduce fluctuations in the coefficient of friction, and uses this to maintain and exhibit a stable rotation function. Providing bearings and highly reliable rotating anode X-ray tubes. SOLUTION: A base body (main body of a rotating shaft of a bearing, etc.) 8 made of metal or ceramics, a metal layer 9 covering at least a sliding surface of the base body 8, and a vapor pressure at 400 ° C. covering the metal layer 9. Is less than 10 ⁻⁶ Pa and the solid lubricant layer 10 is included, and the enthalpy of formation of the alloy composed of the metal layer 9 and the solid lubricant layer 10 is 100.
A sliding member having a kJ / g-at or more.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sliding member suitable for use and practice in an environment where a liquid lubricant such as oil or grease cannot be used, for example, in a vacuum or in a special atmosphere, and this sliding member. And a rotating anode X-ray tube utilizing

[0002]

2. Description of the Related Art For example, in a vacuum such as a rotary anode X-ray tube,
Alternatively, in a bearing used in a special atmosphere such as a high temperature or a gear that meshes with each other, it is desired that the surface has slidability or lubricity while having required mechanical strength. As a sliding member for such an application, there is known a sliding member formed by depositing a solid lubricant film such as Ag on a sliding surface made of metal such as high speed tool steel.

However, in this case, the solid lubricant film (solid lubricant layer) is liable to peel or wear, and the lubrication of the sliding surface is impaired, so that there is a problem that the life of the sliding member is short. Even if the solid lubricant film remains,
Lubrication using a solid lubricant generally causes large fluctuations in frictional force (see FIG. 7), and is not suitable for use in which stable lubricating performance is required.

To further elaborate on this point, the rotary anode X-ray tube has a cathode 2 which emits electrons into a vacuum vessel and a rotor 4 which is provided on a rotary shaft 3, as shown in the schematic sectional view of FIG. The anode target 5 fixed integrally with
Are located. Here, the rotary shaft 3 is rotatably supported by the support shaft 7 by, for example, two ball bearings 6 and 6 ′, and the ball bearings 6 and 6 ′ are the inner rings 6a and 6 ′.
It is composed of a plurality of spheres 6c, 6c 'rotatably arranged between a'and outer rings 6b, 6b'. And
The anode target 5 is rotated by a rotating magnetic field generated by a magnetic field generator (not shown) arranged outside the vacuum container 1,
It rotates integrally with the rotating shaft 3.

On the other hand, in the rotating anode X-ray tube, when the electrons emitted from the cathode 3 collide with the anode target 5, X-rays are generated and the insides of the anode target 5 and the vacuum container 1 become hot. As the temperature inside the anode target 5 and the vacuum container 1 rises, there is a problem that the ball bearings 6 and 6 ′ also rise in temperature due to radiation and heat conduction from the rotary shaft 3, and seizure and wear easily occur. Therefore, while solid lubricants such as Pb and Ag exhibiting lubricity at high temperature and high vacuum are generally used, the anode target 5 is rotated to prevent local increase in temperature (melting). However, when the collision of electrons with the anode target 5 is increased to increase the output, the temperature of the anode target 5 is further increased, and as a result, the temperature of the ball bearings 6 and 6 ′ is promoted, and the solid lubricant is volatilized. And so on, not only the lubrication function is deteriorated, but also the required high vacuum state cannot be maintained.

To solve the above-mentioned problem of the life of the sliding member, a solid lubricant layer is peeled or worn by interposing a base layer made of, for example, Ni between the metal base and the solid lubricant layer (film). It has also been proposed to suppress this and improve the life (see Japanese Patent Laid-Open No. 55-57717).

[0007]

However, in the case of the sliding member whose life has been improved / improved, there are still the following problems in practical use. That is, even in the case of a structure in which Ni or the like having high solubility is interposed between the metal base and the solid lubricant layer as an intermediate layer with respect to the base metal layer and the solid lubricant layer, sliding (friction) There is a disadvantage that the fluctuation of the friction coefficient is high during operation, and a stable rotation function or the like cannot be obtained. That is, with the interposition of the intermediate layer, a mixed-solution type buffer layer is formed between the metal substrate and the solid lubricant layer, so that the solid lubricant layer is improved in peeling resistance and the like. As long as that, longevity can be achieved. However, for example, when the required sliding / friction operation is performed as a rolling bearing, the coefficient of friction fluctuates drastically during the sliding / friction operation, and a stable rotating function is not exhibited. The reality is that it is limited (see FIG. 9).

As a measure for improving the solid lubricity, for example, Cu is provided as a base layer on the sliding surface of the steel base,
Attempts have also been made to coat the surface of the underlayer with a Pb layer to provide lubricity. However, in the case of the two-layer structure of the sliding surface made of Pb / Cu, there is a problem in terms of durability (life) depending on the usage mode. In particular, in a vacuum atmosphere such as a rotary anode X-ray tube, or in a high temperature atmosphere, for example, when the sliding / friction operation required as a rolling bearing is performed,
There is a tendency for the lubricating action to decrease and deteriorate.

The present invention has been made in view of the above circumstances and provides a sliding member that not only prolongs the service life but also can greatly reduce the variation of the friction coefficient, and a sliding member using the sliding member. It is an object of the present invention to provide a bearing that maintains and exhibits a stable rotating function and a highly reliable rotating anode X-ray tube.

[0010]

A sliding member according to the present invention comprises a base body made of metal or ceramics, a metal layer covering at least a sliding surface of the base body, and 400 ° C. covering the metal layer. A solid lubricant layer having a vapor pressure of 10 ⁻⁶ Pa or less, and an enthalpy of formation of an alloy composed of the metal layer and the solid lubricant layer is 10
It is characterized by being 0 kJ / g-at or more.

The bearing according to the present invention has a bearing body made of metal or ceramics, a metal layer covering at least the sliding surface of the bearing body, and a vapor pressure of 10 at 400 ° C. covering the metal layer. ^A solid lubricant layer made of a solid lubricant of ^-6 Pa or less,
The enthalpy of formation of the alloy composed of the metal layer and the solid lubricating layer is 100 kJ / g-at or more.

Further, the rotating anode X-ray tube according to the present invention comprises a vacuum container, a cathode for emitting electrons into the vacuum container, and an anode target for generating X-rays by collision of electrons emitted from the cathode. A rotary anode X-ray tube comprising a rotor integrally fixed to the anode target and a bearing rotatably supporting the anode target, wherein the bearing provided at least on the anode target side is A bearing main body made of metal or ceramics, a metal layer covering at least the sliding surface of the bearing main body, and a solid lubricant layer covering the metal layer having a vapor pressure of 10 ^-6 Pa or less at 400 ° C. Is equipped with
The enthalpy of formation of the alloy composed of the metal layer and the solid lubricating layer is 100 kJ / g-at or more.

In the present invention, examples of the metal forming the base of the sliding member or the bearing main body constituting the bearing include high speed tool steel, stainless steel, general bearing steel, and the like, and ceramics include silicon nitride. , Silicon carbide, alumina, zirconia, etc., but in consideration of use / implementation in a vacuum atmosphere or a high temperature atmosphere, high speed tool steel or ceramics is preferable.

In the present invention, the combination of the metal layer that covers the sliding surface of the base body or the bearing body and the solid lubricant layer that covers this metal layer is Ag / Mo, A
Examples include g / W, Cu / W, or a combination of these as the main components (including a slight amount of additional components). And
The thickness of the solid lubricant layer, etc. varies depending on the structure and size of the sliding member, the load of sliding and frictional movement of the sliding member, etc.
m, and in the case of a general sliding surface, about 1 to 10 μm is preferable. Further, it is desirable that the thickness of the metal layer is set thinner than the thickness of the solid lubricant layer.

According to the sliding member having the above structure, the diffusion phenomenon between the metal layer and the solid lubricant layer due to frictional heat generation or the temperature of the atmosphere in use is suppressed, and the solid lubricant layer is modified, for example, hardened. Are easily avoided. Therefore, deterioration (deterioration) of the lubrication performance of the solid lubricant layer is prevented, and damage due to abrasion powder generated from the solid lubricant layer is also avoided. In other words, in a bearing and a rotating mechanism using such a sliding member, the coefficient of friction (friction force) is small.
With this, stable rotation can be obtained and excellent lubrication performance can be retained and exhibited for a long period of time. In addition, when applied to a rotating anode X-ray tube, even if the temperature of the rotating anode X-ray tube rises with the increase in output, a high vacuum state is sufficiently maintained and the lubricating performance excellent in the rotation of the anode target is long. It can be realized over a period of time.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to FIGS. First Embodiment FIG. 1 is a sectional view showing a structural example of a sliding member according to a first embodiment of the present invention, in which a rotating shaft main body (base) 8 made of metal or ceramics, for example, a high speed tool. A rotary shaft main body made of steel, 9 is a metal layer coated and arranged on at least the sliding surface of the rotary shaft main body 8, for example, a metal layer of Mo having a thickness of about 0.1 μm, and 10 is the Mo metal layer 9 Is a solid lubricant layer for coating, for example, an Ag layer having a thickness of about 1 μm. The enthalpy of formation of the alloy of Ag and Mo is 1
29 kJ / g-at (129 kJ / g at atmospheric pressure) (CALPHAD Vol.1, No.4, pp'.341-359. Pergamon Pres
s, 1977.Printed Great Britain). The melting point of Ag is about 2600 ° C, and the vapor pressure at 400 ° C is 1
0 is ^-9 Pa or less.

The sliding member having the above structure is manufactured as follows. That is, usually, a rotating body 8 made of high-speed tool steel, an ion plating device (not shown)
First prepare. Then, while the rotating shaft body 8 is mounted at a predetermined position of the ion plating device, a metal such as Mo metal is mounted on the plating metal source portion as a plating metal, and then the ion plating device is operated. For example, under the reduced pressure of about 10 ⁻³ Pa, the above M
o Metal is irradiated with an electron beam to be evaporated and ionized. On the other hand, so-called ion plating for applying a required acceleration voltage (for example, about 100 to 2000 V) is applied to the rotating shaft body 8 to deposit / form a Mo metal layer 9 having a thickness of about 0.1 μm. After the deposition / formation of the Mo metal layer 9 is completed, the driving of the ion plating apparatus is once stopped, and Ag metal is mounted instead of the Mo metal of the plating metal source portion. After that, the ion plating apparatus is operated again, and the Ag metal is ion-plated according to the ion plating operation for the Mo metal to form the Ag metal layer (solid lubricant layer) 10 having a thickness of about 1 μm. It can be easily manufactured by wearing and forming.

Regarding the manufacturing method, in addition to the above-mentioned ion plating method, for example, a plating method, a vacuum deposition method, a sputtering method, an ion beam mixing method and the like can be considered. In particular, the sputtering method and the ion plating method are used. Since it is easy to form a film with a uniform film thickness and a high degree of adhesion at the interface, it is preferable in terms of productivity and performance.

As a test / evaluation of the sliding member according to the present invention, a pin-on-disk type friction test was conducted. That is, under the conditions of the ion plating, a Mo metal layer 9 ′ having a thickness of 0.1 μm and an Ag metal layer 10 ′ having a thickness of 1 μm are sequentially deposited on one main surface of the high speed tool steel disk 8 ′.・
A disc test piece formed was prepared. And Table 1
Under the conditions shown in Fig. 2, as shown in a perspective view in Fig. 2 and a sectional view in Fig. 3, a pin test piece 11 having a constant load is pressed against the Ag metal layer 10 'of the disk test piece, and in that state, the disk test piece is pressed. Was rotated at a constant speed, and the frictional force acting on the sliding (friction) surface between the pin test piece 11 and the disk test piece was measured for a certain time.

Table 1 Degree of vacuum: 10 ⁻⁴ Pa unit load: 1N Sliding speed: 0.5 m / s Test time: 3 hours The result of the so-called pin-on-disk friction test is shown in FIG. It was confirmed that the friction coefficient during sliding was low and the fluctuation of the friction coefficient was small, and stable sliding and operation were performed.

COMPARATIVE EXAMPLE 1 For comparison, in the structure of the disk test piece, Mo was used.
Thickness 1 directly on one main surface of steel disk 8'without metal layer 9 '
As shown in FIG. 7, the results of a pin-on-disk friction test performed on a disk test piece formed by depositing and forming an Ag metal layer 10 ′ of μm by an ion plating method are shown in FIG. The coefficient of friction inside was generally high, and the variation in coefficient of friction was also large. In this comparative example, a similar result (trend) was also observed in the case of a disk test piece obtained by depositing and forming a Pb metal layer by the ion plating method instead of the Ag metal layer 10 '.

COMPARATIVE EXAMPLE 2 Furthermore, as another comparative example, in the structure of the disk test piece, a high-speed tool steel circular plate 8 ′ having a thickness of 0.1 μm instead of the Mo metal layer 9 ′ on one main surface thereof. Ni metal layer, thickness 1
As shown in FIG. 9, the results of a pin-on-disk friction test performed on a disk test piece formed by sequentially depositing and forming an Ag metal layer 10 ′ of μm by an ion plating method are shown in FIG. The coefficient of friction during operation was high, and the fluctuation of the coefficient of friction was extremely large.

From the above test and evaluation results,
In the case of the sliding member according to the present invention or the solid lubrication method, the friction coefficient during sliding (friction) is lower than in the case of the comparative example,
The reason why the friction coefficient varies little is considered to be as follows. That is, in the pin-on-disc friction test, the sliding (rubbed) surface of the disc test piece has a structure in which the Ag metal layer is adhered and formed by the ion plating method. As is clear from FIG. 4, FIG. 7, and FIG. 9, comparing the lower limit levels of the friction coefficient, the friction coefficient increases in the order of the first embodiment, the comparative example 1, and the comparative example 2. That is, the lower limit level of the friction coefficient is highest in the case where the Ni metal layer is used as the intermediate layer. By the way, the Ni
The enthalpy of formation of Ag alloy that forms a solid metal agent with
It is a low value of 2 kJ / g-at (CALPHAD Vol.1, N
o.4, pp'.341-359.Pergamon Press, 1977.Printed Great
Britain)), so it is easy to cause diffusion phenomenon with low heat.
Therefore, an alloy layer is formed at this interface, which contributes to the improvement of the interface strength and the adhesion strength of the solid lubricant layer. However, the formation of the alloy layer results in modification (alteration) of the solid lubricant, which leads to deterioration of the lubricating performance, so that it can be said that the lower limit level of the friction coefficient becomes high.

On the other hand, in the case of this embodiment, since the enthalpy of formation of the alloy of Mo forming the intermediate layer and Ag forming the solid lubricant is as high as 129 kJ / g-at, the diffusion phenomenon occurs. Hateful. Therefore, since it is difficult to form an alloy layer on the interface, the original lubrication performance of Ag metal is maintained and a low friction coefficient is exhibited. Further, it is considered that the alloy layer at the interface also influences the fluctuation of the friction coefficient (friction force). In other words, the solid lubricant on the sliding (friction) surface is complicated, such as being worn, the abrasion powder being transferred to the mating surface, or being discharged after being caught in the sliding (wear) surface. Behave. Therefore, as in the case of Comparative Example 2, when a part of the solid lubricant is denatured and hardened, the hardened part and hard wear powder are taken in the sliding (wearing) surface or discharged. As a result, the frictional force changes greatly.

On the other hand, in the case of the first embodiment, as described above, since the enthalpy of formation of the alloy of Mo and Ag solid lubricant in the intermediate metal layer is high, the Ag solid lubricant does not denature and the original In order to maintain the lubrication performance of 1, the stable lubrication function with a small fluctuation of the friction coefficient can be obtained.

As a result of the experiment, the enthalpy of formation of the alloy of the metal forming the intermediate layer and the solid lubricant is 100 kJ / g-a.
If it is t or more, a desired lubricating function can be obtained. Second Embodiment This embodiment is a case where the sliding member according to the first embodiment described above is applied to a ball bearing in a rolling bearing. FIG. 5 is a cross-sectional view showing the main part of the configuration example.
Is a rotating shaft, 13 is an inner ring 13a and an outer ring 13 of high speed tool steel.
This is a ball bearing composed of b and a plurality of balls 13c rotatably arranged and mounted between them. The inner ring 13a is fixed to the rotary shaft 12 side while the rotary shaft 12 is inserted therethrough, and the outer ring 13b is fixed to the housing 14 side. A plurality of balls 13c rotatably arranged and mounted between the inner ring 13a and the outer ring 13b.
On the outer peripheral surface (inner transfer surface) side of the inner ring 13a and the outer ring 1
By rotating while contacting the inner peripheral surface (outer transfer surface) side of 3b, the smooth rotation of the rotating shaft 12 is supported. Here, the ball 13 included in the ball bearing 13
c is a sphere body 13c ₁ made of high-speed tool steel, the sphere body 1
3c ₁ surface is coated by an ion plating method with a thickness of 0.05 μm Mo metal layer 13c ₂ and the surface of the Mo metal layer 13c ₂ is coated with an ion plating method with a 0.5 μm Ag metal layer 13c ₃ Has been done.

With respect to the rolling bearing having the above structure, the rotating shaft 12 mounted in a vacuum is operated at 3000 rpm at 100 rpm.
When lubrication or sliding (friction resistance) was evaluated by continuously rotating and driving for 0 hours, it showed excellent performance in terms of life and stability.

In the above, for the ball bearing 13, the ball body 1
Mo metal layer 13c ₂ and Ag metal layer 13 on the surface of 3c ₁
Although an example of the configuration using the sphere 13c _{1 in} which c ₃ is sequentially deposited and formed is shown, the above is applied to the outer peripheral surface (inner transfer surface) side of the inner ring 13a and the inner peripheral surface (outer transfer surface) of the outer ring 13b. Similarly, Mo metal layer 13c ₂ and Ag metal layer 13c ₃
Similar results were observed when the structure was formed by sequentially depositing and forming, or when the structure was formed by sequentially depositing and forming the Mo metal layer 13c ₂ and the Ag metal layer 13c ₃ for both.

By the way, the rolling bearing adopts a state where the rolling elements (balls) and the races (inner / outer rings) are in point contact or line contact. Therefore, since the load supported by the bearing is concentrated on a minute contact surface, it is generated by sliding (friction) compared to other sliding (friction) surfaces that make surface contact, such as the contact surface of a sliding bearing. The heat generated is concentrated in a minute area, and the temperature rise tends to increase. When the temperature rises, mutual diffusion between the materials easily occurs, so that there is a problem that the solid lubricant is modified and the friction coefficient rises and fluctuates. On the other hand, in the case of the present embodiment, as described in the case of the above-described first embodiment, since the diffusion phenomenon does not easily occur at the interface, the solid lubricant layer does not impair the original lubrication performance and slides ( It can be said that even more effect can be obtained in the rolling bearing in which the load is concentrated on the (friction) surface.

Further, such actions and effects are effective in a rolling bearing used in a high temperature atmosphere or a solid lubrication method. Third Embodiment This embodiment is an application example in which the ball bearing illustrated in the second embodiment described above is applied to a rotary anode X-ray tube. FIG. 6 is a cross-sectional view showing a schematic configuration of the rotating anode X-ray tube according to the present embodiment. The cathode 16 that emits electrons into the vacuum container 15, the rotating shaft 17, and the rotor 18 are integrated with each other. The anode target 19 fixed to the inner surface is arranged and arranged so as to face it. Here, the rotary shaft 17 is, for example, 2
It is rotatably supported on the support shaft 20 by individual ball bearings 13 and 13 '. Further, the ball bearings 13 and 13 '
Is rotatably arranged between the inner ring 13a and the outer ring 13b.
The plurality of mounted balls 13c rotate while being in contact with the outer peripheral surface (inner transfer surface) side of the inner ring 13a and the inner peripheral surface (outer transfer surface) side of the outer ring 13b, whereby the rotating shaft 12 is smoothly moved. Rotation is supported. Then, the balls 13 mounted on the ball bearings 13 and 13 ', respectively.
c is a sphere body 13c ₁ made of high-speed tool steel, the sphere body 1
3c ₁ surface is deposited by an ion plating method with a Mo metal layer 13c ₂ having a thickness of 0.05 μm, and the Mo metal layer 13c ₂ surface is covered with an ion plating method with a 0.5 μm Ag metal layer 13c ₃ . It is configured. In the rotating anode X-ray tube having the above structure, the anode target 19 rotates integrally with the rotating shaft 17 by the rotating magnetic field generated by the magnetic field generator (not shown) installed outside the vacuum container 15. On the other hand, when the electrons emitted from the cathode 16 collide with the anode target 19, X-rays are generated, and the insides of the anode target 19 and the vacuum container 15 are heated to a high temperature. The heat conduction of the ball bearings 13 and 13 'also causes the temperature to rise. However, in the configuration of the rotating anode X-ray tube, the ball bearings 13 and 13 ′ forming the rotation are solid-lubricated due to abrasion powder as described in detail in the first and second embodiments. It is possible to easily and surely avoid or prevent layer wear or destruction (breakage) in a high vacuum state due to volatilization. In other words, it has been confirmed that the required lubricity and high vacuum state can be maintained for a long period of time, so that it always functions as a highly reliable rotating anode X-ray tube.

In this embodiment, the outer race (inner transfer surface) side of the inner race 13a of both ball bearings 13 and 13 'and the outer race 13b.
Sphere 1 that rotates while contacting the inner peripheral surface (outer transfer surface) of
3c includes a Mo metal layer 13c ₂ and an Ag metal layer 1
3c ₃ was used, but the sphere 13c
To the outer peripheral surface (inner transfer surface) side of the inner ring 13a and the inner peripheral surface (outer transfer surface) side of the outer ring 13b that rotate while contacting each other.
The Mo metal layer 13c ₂ and the Ag metal layer 13c ₃ may be coated, or both may be configured similarly. Further, in the above structure, the balls 13c of the ball bearings 13 and 13 'and the outer peripheral surface (inner transfer surface) side of the inner ring 13a that rotates while the balls 13c contact each other,
The Mo metal layer 13 is formed on the inner peripheral surface (outer transfer surface) of the outer ring 13b.
It is also possible to have a structure in which c ₂ and the Ag metal layer 13c ₃ are laminated and covered. If these means are applied to the ball bearing 13 'on the side of the anode target 19 where the temperature is likely to rise, the initial purpose, action and effect can be obtained.

In the above embodiment, an example in which a high speed tool steel is used as a base is shown. However, for example, stainless steel,
It is also possible to use silicon nitride or silicon carbide.
Further, the combination of the intermediate metal and the solid lubricant, which are sequentially deposited on the surface of the base, also exhibits long-life lubrication characteristics even with Ag / W or Cu / W. The formation of these two-layer films is not limited to the ion plating method, but may be a plating method, a vacuum vapor deposition method, or a combination thereof. At least the solid lubricant is preferably formed by the ion plating method.

[0033]

As described above, according to the sliding portion of the present invention, sliding rotation or lubrication with a low and stable friction coefficient (friction force) is possible, and at the same time, it is excellent. Lubrication characteristics are maintained and exhibited over a long period of time. In particular, when the fluctuation of the friction coefficient is hardly recognized, the level of the friction coefficient is low, the life is long, and when the material is used in a vacuum or in a high temperature atmosphere, specifically, according to the present invention, It can be said to bring important significance in bearings, rotating anode X-ray tubes, and the like.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a configuration example of a slidable member according to the present invention.

FIG. 2 is a perspective view schematically showing a main part of an embodiment of a pin-on-disk friction test of a sliding member according to the present invention.

FIG. 3 is a sectional view schematically showing a main part of an embodiment of a pin-on-disk type friction test of a sliding member according to the present invention.

FIG. 4 shows a pin on the sliding member according to the present invention.
The curve figure which shows the disk type friction test result.

FIG. 5 is a cross-sectional view showing another configuration example of the rolling bearing according to the present invention.

FIG. 6 is a sectional view showing a schematic configuration example of a rotary anode X-ray tube according to the present invention.

FIG. 7 is a curve diagram showing the results of a pin-on-disc type friction test on a conventional sliding member.

FIG. 8 is a sectional view showing a schematic configuration example of a conventional rotary anode X-ray tube.

FIG. 9 is a curve diagram showing the results of a pin-on-disk type friction test on another conventional sliding member.

[Explanation of symbols]

1, 15 ... Vacuum container 2, 16 ... Cathode 3, 12, 17 ... Rotating shaft 4, 18 ... Rotor 5, 19 ... Anode target 6, 6 ', 13, 13' ... Ball bearing 6a, 6a ', 13a ... Inner ring of ball bearing 6b, 6b ', 13b ... Outer ring of ball bearing 6c, 6c', 13c ... Ball of ball bearing 7, 20 ... Support shaft 8 ... Rotating shaft body 8 '... Disc 9, 9' ... Metal layer 10 , 10 '... solid lubricant layer 11 ... pin specimen 13c ₁ ... sphere body 13c ₂ ... metal layer (Mo metal layer) 13c ₃ ... solid lubricant layer (Ag metal layer) 14 ... housing

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kazuhide Matsumoto 1st Toshiba Town, Fuchu City, Tokyo Toshiba Corporation Fuchu Factory

Claims (6)

[Claims] 1. A base made of metal or ceramics, a metal layer covering at least the sliding surface of the base, and a vapor pressure of 1 at 400 ° C. covering the metal layer.
0 ^-6 become by and a solid lubricant layer is Pa or less, a sliding member, wherein the enthalpy of the alloy of the solid lubricant layer and the metal layer is 100 kJ / g-at least. 2. The sliding member according to claim 1, wherein the base body is made of high speed tool steel, the metal layer is made of Mo, and the solid lubricating layer is made of Ag. 3. A bearing main body made of metal or ceramics, a metal layer covering at least the sliding surface of the bearing main body, and a solid having a vapor pressure of 10 ⁻⁶ Pa or less at 400 ° C. covering the metal layer. A bearing comprising a lubricant layer, wherein an enthalpy of formation of an alloy composed of the metal layer and the solid lubricant layer is 100 kJ / g-at or more. 4. The bearing body is made of high speed tool steel,
The bearing, wherein the metal layer is made of Mo and the solid lubricating layer is made of Ag. 5. A vacuum container, a cathode that emits electrons into the vacuum container, an anode target that generates X-rays by collision of electrons emitted from the cathode, and an anode target integrally fixed to the anode target. Rotating anode X comprising a rotor and a bearing that rotatably supports the anode target.
In the wire tube, at least the bearing provided on the anode target side includes a bearing main body made of metal or ceramics, and a metal layer covering at least a sliding surface of the bearing main body.
The vapor pressure at 400 ° C. covering this metal layer is 10 ^−6.
A rotating anode X-ray tube comprising a solid lubricant layer of Pa or less, wherein an enthalpy of formation of an alloy composed of the metal layer and the solid lubricant layer is 100 kJ / g-at or more. 6. The bearing body is made of high speed tool steel,
The rotating anode X-ray tube, wherein the metal layer is made of Mo and the solid lubricating layer is made of Ag.