JPH0980748A - Aqueous photoresist composition for printed circuit board and production of printed circuit board using the same - Google Patents
Aqueous photoresist composition for printed circuit board and production of printed circuit board using the sameInfo
- Publication number
- JPH0980748A JPH0980748A JP23504095A JP23504095A JPH0980748A JP H0980748 A JPH0980748 A JP H0980748A JP 23504095 A JP23504095 A JP 23504095A JP 23504095 A JP23504095 A JP 23504095A JP H0980748 A JPH0980748 A JP H0980748A
- Authority
- JP
- Japan
- Prior art keywords
- parts
- group
- printed wiring
- photoresist composition
- emulsion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 37
- 239000000203 mixture Substances 0.000 title claims description 51
- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 239000000839 emulsion Substances 0.000 claims abstract description 49
- 239000002253 acid Substances 0.000 claims abstract description 34
- 239000003999 initiator Substances 0.000 claims abstract description 12
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 claims abstract description 6
- 125000003368 amide group Chemical group 0.000 claims abstract 2
- 239000011248 coating agent Substances 0.000 claims description 27
- 238000000576 coating method Methods 0.000 claims description 27
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 25
- 238000005530 etching Methods 0.000 claims description 19
- 150000001875 compounds Chemical class 0.000 claims description 12
- 239000003505 polymerization initiator Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims 1
- 239000004020 conductor Substances 0.000 abstract description 2
- 239000002904 solvent Substances 0.000 abstract description 2
- 239000000178 monomer Substances 0.000 description 30
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 21
- 239000000243 solution Substances 0.000 description 17
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 15
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 15
- 239000007864 aqueous solution Substances 0.000 description 15
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 14
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 14
- 125000003700 epoxy group Chemical group 0.000 description 14
- 239000007787 solid Substances 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 13
- 239000004593 Epoxy Substances 0.000 description 13
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 10
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 10
- 239000002245 particle Substances 0.000 description 10
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 9
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 8
- -1 alkyl allyl ethers Chemical class 0.000 description 8
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 8
- 239000003960 organic solvent Substances 0.000 description 8
- 229920000193 polymethacrylate Polymers 0.000 description 8
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 7
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 7
- 238000007720 emulsion polymerization reaction Methods 0.000 description 7
- 239000011259 mixed solution Substances 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 7
- 229910000029 sodium carbonate Inorganic materials 0.000 description 7
- 235000011121 sodium hydroxide Nutrition 0.000 description 7
- 150000005846 sugar alcohols Polymers 0.000 description 7
- GJZFGDYLJLCGHT-UHFFFAOYSA-N 1,2-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=C(CC)C(CC)=CC=C3SC2=C1 GJZFGDYLJLCGHT-UHFFFAOYSA-N 0.000 description 6
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 6
- WNAHIZMDSQCWRP-UHFFFAOYSA-N dodecane-1-thiol Chemical compound CCCCCCCCCCCCS WNAHIZMDSQCWRP-UHFFFAOYSA-N 0.000 description 6
- GVGUFUZHNYFZLC-UHFFFAOYSA-N dodecyl benzenesulfonate;sodium Chemical compound [Na].CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 GVGUFUZHNYFZLC-UHFFFAOYSA-N 0.000 description 6
- 150000002148 esters Chemical class 0.000 description 6
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 6
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 6
- 229910052753 mercury Inorganic materials 0.000 description 6
- 125000002816 methylsulfanyl group Chemical group [H]C([H])([H])S[*] 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 6
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 5
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 5
- 150000001408 amides Chemical class 0.000 description 5
- 239000006260 foam Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 5
- 238000005507 spraying Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- SDNVJMZXSOXXQN-UHFFFAOYSA-N 3,4-ditert-butyl-2-methylphenol Chemical compound CC1=C(O)C=CC(C(C)(C)C)=C1C(C)(C)C SDNVJMZXSOXXQN-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- OKIZCWYLBDKLSU-UHFFFAOYSA-M N,N,N-Trimethylmethanaminium chloride Chemical compound [Cl-].C[N+](C)(C)C OKIZCWYLBDKLSU-UHFFFAOYSA-M 0.000 description 4
- 239000002202 Polyethylene glycol Substances 0.000 description 4
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000000084 colloidal system Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 125000004386 diacrylate group Chemical group 0.000 description 4
- 229920001223 polyethylene glycol Polymers 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 239000004952 Polyamide Substances 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 150000001993 dienes Chemical class 0.000 description 3
- 229920002647 polyamide Polymers 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- RBGUKBSLNOTVCD-UHFFFAOYSA-N 1-methylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2C RBGUKBSLNOTVCD-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- GUUVPOWQJOLRAS-UHFFFAOYSA-N Diphenyl disulfide Chemical compound C=1C=CC=CC=1SSC1=CC=CC=C1 GUUVPOWQJOLRAS-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- VQTUBCCKSQIDNK-UHFFFAOYSA-N Isobutene Chemical compound CC(C)=C VQTUBCCKSQIDNK-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- 239000012190 activator Substances 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 125000002723 alicyclic group Chemical group 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- 239000012799 electrically-conductive coating Substances 0.000 description 2
- 239000003995 emulsifying agent Substances 0.000 description 2
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 2
- 239000001530 fumaric acid Substances 0.000 description 2
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000012966 redox initiator Substances 0.000 description 2
- 238000007142 ring opening reaction Methods 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- QNODIIQQMGDSEF-UHFFFAOYSA-N (1-hydroxycyclohexyl)-phenylmethanone Chemical compound C=1C=CC=CC=1C(=O)C1(O)CCCCC1 QNODIIQQMGDSEF-UHFFFAOYSA-N 0.000 description 1
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 1
- PVPBBTJXIKFICP-UHFFFAOYSA-N (7-aminophenothiazin-3-ylidene)azanium;chloride Chemical compound [Cl-].C1=CC(=[NH2+])C=C2SC3=CC(N)=CC=C3N=C21 PVPBBTJXIKFICP-UHFFFAOYSA-N 0.000 description 1
- NQQRXZOPZBKCNF-NSCUHMNNSA-N (e)-but-2-enamide Chemical compound C\C=C\C(N)=O NQQRXZOPZBKCNF-NSCUHMNNSA-N 0.000 description 1
- BSSNZUFKXJJCBG-OWOJBTEDSA-N (e)-but-2-enediamide Chemical compound NC(=O)\C=C\C(N)=O BSSNZUFKXJJCBG-OWOJBTEDSA-N 0.000 description 1
- BSSNZUFKXJJCBG-UPHRSURJSA-N (z)-but-2-enediamide Chemical compound NC(=O)\C=C/C(N)=O BSSNZUFKXJJCBG-UPHRSURJSA-N 0.000 description 1
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 1
- RSWGJHLUYNHPMX-UHFFFAOYSA-N 1,4a-dimethyl-7-propan-2-yl-2,3,4,4b,5,6,10,10a-octahydrophenanthrene-1-carboxylic acid Chemical compound C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
- BOCJQSFSGAZAPQ-UHFFFAOYSA-N 1-chloroanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2Cl BOCJQSFSGAZAPQ-UHFFFAOYSA-N 0.000 description 1
- OZFIGURLAJSLIR-UHFFFAOYSA-N 1-ethenyl-2h-pyridine Chemical compound C=CN1CC=CC=C1 OZFIGURLAJSLIR-UHFFFAOYSA-N 0.000 description 1
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 1
- STMDPCBYJCIZOD-UHFFFAOYSA-N 2-(2,4-dinitroanilino)-4-methylpentanoic acid Chemical compound CC(C)CC(C(O)=O)NC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O STMDPCBYJCIZOD-UHFFFAOYSA-N 0.000 description 1
- HQCSZRIVJVOYSU-UHFFFAOYSA-N 2-(ethoxymethyl)oxirane Chemical compound CCOCC1CO1 HQCSZRIVJVOYSU-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- PQAMFDRRWURCFQ-UHFFFAOYSA-N 2-ethyl-1h-imidazole Chemical compound CCC1=NC=CN1 PQAMFDRRWURCFQ-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- JGBOVFKUKBGAJQ-UHFFFAOYSA-N 2-methylidenebutanediamide Chemical compound NC(=O)CC(=C)C(N)=O JGBOVFKUKBGAJQ-UHFFFAOYSA-N 0.000 description 1
- BSKHPKMHTQYZBB-UHFFFAOYSA-N 2-methylpyridine Chemical compound CC1=CC=CC=N1 BSKHPKMHTQYZBB-UHFFFAOYSA-N 0.000 description 1
- FRIBMENBGGCKPD-UHFFFAOYSA-N 3-(2,3-dimethoxyphenyl)prop-2-enal Chemical compound COC1=CC=CC(C=CC=O)=C1OC FRIBMENBGGCKPD-UHFFFAOYSA-N 0.000 description 1
- BUZICZZQJDLXJN-UHFFFAOYSA-N 3-azaniumyl-4-hydroxybutanoate Chemical compound OCC(N)CC(O)=O BUZICZZQJDLXJN-UHFFFAOYSA-N 0.000 description 1
- QZPSOSOOLFHYRR-UHFFFAOYSA-N 3-hydroxypropyl prop-2-enoate Chemical compound OCCCOC(=O)C=C QZPSOSOOLFHYRR-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- GAWIXWVDTYZWAW-UHFFFAOYSA-N C[CH]O Chemical group C[CH]O GAWIXWVDTYZWAW-UHFFFAOYSA-N 0.000 description 1
- QSJXEFYPDANLFS-UHFFFAOYSA-N Diacetyl Chemical group CC(=O)C(C)=O QSJXEFYPDANLFS-UHFFFAOYSA-N 0.000 description 1
- VTLYFUHAOXGGBS-UHFFFAOYSA-N Fe3+ Chemical compound [Fe+3] VTLYFUHAOXGGBS-UHFFFAOYSA-N 0.000 description 1
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 1
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 229920002845 Poly(methacrylic acid) Polymers 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- FYYIUODUDSPAJQ-XVBQNVSMSA-N [(1S,6R)-7-oxabicyclo[4.1.0]heptan-3-yl]methyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1CC[C@H]2O[C@H]2C1 FYYIUODUDSPAJQ-XVBQNVSMSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 238000007259 addition reaction Methods 0.000 description 1
- 125000005907 alkyl ester group Chemical group 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- 229940045714 alkyl sulfonate alkylating agent Drugs 0.000 description 1
- 150000008052 alkyl sulfonates Chemical class 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005660 chlorination reaction Methods 0.000 description 1
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 description 1
- 229940018557 citraconic acid Drugs 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 229960003280 cupric chloride Drugs 0.000 description 1
- IFDVQVHZEKPUSC-UHFFFAOYSA-N cyclohex-3-ene-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCC=CC1C(O)=O IFDVQVHZEKPUSC-UHFFFAOYSA-N 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010556 emulsion polymerization method Methods 0.000 description 1
- YQGOJNYOYNNSMM-UHFFFAOYSA-N eosin Chemical compound [Na+].OC(=O)C1=CC=CC=C1C1=C2C=C(Br)C(=O)C(Br)=C2OC2=C(Br)C(O)=C(Br)C=C21 YQGOJNYOYNNSMM-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- YLHXLHGIAMFFBU-UHFFFAOYSA-N methyl phenylglyoxalate Chemical compound COC(=O)C(=O)C1=CC=CC=C1 YLHXLHGIAMFFBU-UHFFFAOYSA-N 0.000 description 1
- OMNKZBIFPJNNIO-UHFFFAOYSA-N n-(2-methyl-4-oxopentan-2-yl)prop-2-enamide Chemical compound CC(=O)CC(C)(C)NC(=O)C=C OMNKZBIFPJNNIO-UHFFFAOYSA-N 0.000 description 1
- KKFHAJHLJHVUDM-UHFFFAOYSA-N n-vinylcarbazole Chemical compound C1=CC=C2N(C=C)C3=CC=CC=C3C2=C1 KKFHAJHLJHVUDM-UHFFFAOYSA-N 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920001515 polyalkylene glycol Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001228 polyisocyanate Polymers 0.000 description 1
- 239000005056 polyisocyanate Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 150000007519 polyprotic acids Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 235000011118 potassium hydroxide Nutrition 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 150000003440 styrenes Chemical class 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium group Chemical group [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- HWCKGOZZJDHMNC-UHFFFAOYSA-M tetraethylammonium bromide Chemical compound [Br-].CC[N+](CC)(CC)CC HWCKGOZZJDHMNC-UHFFFAOYSA-M 0.000 description 1
- UFDHBDMSHIXOKF-UHFFFAOYSA-N tetrahydrophthalic acid Natural products OC(=O)C1=C(C(O)=O)CCCC1 UFDHBDMSHIXOKF-UHFFFAOYSA-N 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000004711 α-olefin Substances 0.000 description 1
Landscapes
- Paints Or Removers (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明はプリント配線板用水性フ
ォトレジスト組成物およびそれを用いたプリント配線板
の製造方法に関し、詳細には、電導性被膜を有する基板
または金属の表面に塗装して乾燥することにより平滑な
塗膜を形成し、次いで、該平滑な塗膜をパターンマスク
を介して活性光線で硬化し、更に、アルカリ性現像液で
該硬化塗膜の未露光部を除去してパターンを形成するこ
とが可能なプリント配線板用水性フォトレジスト組成物
およびそれを用いたプリント配線板の製造方法に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a water-based photoresist composition for printed wiring boards and a method for producing printed wiring boards using the same. More specifically, it is applied to the surface of a substrate having an electrically conductive coating or a metal. A smooth coating film is formed by drying, then the smooth coating film is cured with an actinic ray through a pattern mask, and the unexposed portion of the cured coating film is removed with an alkaline developer to form a pattern. The present invention relates to a water-based photoresist composition for printed wiring boards, which is capable of forming a film, and a method for producing a printed wiring board using the same.
【0002】[0002]
【従来の技術とその課題】従来、プリント配線板用フォ
トレジスト組成物として有機溶剤希釈型のものが知られ
ている。有機溶剤希釈型フォトレジスト組成物を用いて
レジスト膜を形成する場合、臭気、引火の危険性、ある
いは乾燥時に排気される有機溶剤による公害等の問題点
がある。2. Description of the Related Art Conventionally, organic solvent-diluted type photoresist compositions have been known as printed wiring board photoresist compositions. When a resist film is formed using an organic solvent-diluted photoresist composition, there are problems such as odor, danger of ignition, and pollution by an organic solvent discharged during drying.
【0003】一方、水性フォトレジスト組成物として、
酸基および重合性不飽和基を有する樹脂溶液を三級アミ
ン等で中和し、その後、水溶性または水分散性とした組
成物が提案されているが、このものは光硬化膜の耐水性
が不十分であり、現像後に微細なパターンを得ることが
出来ないという問題点がある。また、酸基を有する水性
エマルションに重合性不飽和化合物を混合あるいは分散
した水性フォトレジスト組成物も提案されているが、こ
のものはレジストの感度が劣るという問題点がある。On the other hand, as an aqueous photoresist composition,
A composition has been proposed in which a resin solution having an acid group and a polymerizable unsaturated group is neutralized with a tertiary amine or the like and then made water-soluble or water-dispersible. However, there is a problem that a fine pattern cannot be obtained after development. Further, an aqueous photoresist composition in which a polymerizable unsaturated compound is mixed or dispersed in an aqueous emulsion having an acid group has been proposed, but this has a problem that the sensitivity of the resist is poor.
【0004】[0004]
【課題を解決するための手段】本発明者等は、前記の問
題点を解決するための技術手段を見いだすべく鋭意研究
を重ねた結果、特定の重合性不飽和基含有水性エマルシ
ョンと光重合開始剤とを含む新規な水性フォトレジスト
組成物が前記した問題点を一挙に解決することができ、
また、この組成物を使用して信頼性の高いパターンを形
成することができることを見いだし、本発明を完成する
に至った。Means for Solving the Problems The inventors of the present invention have conducted extensive studies to find a technical means for solving the above-mentioned problems, and as a result, a specific polymerizable unsaturated group-containing aqueous emulsion and photopolymerization initiation. A novel aqueous photoresist composition containing an agent can solve the above-mentioned problems all at once.
Further, they have found that a highly reliable pattern can be formed using this composition, and completed the present invention.
【0005】かくして、本発明に従えば、酸基を有する
水性エマルションに、1分子中に重合性不飽和基及びグ
リシジル基を有する化合物を付加させてなるアルカリ現
像可能な重合性不飽和基含有水性エマルションと光重合
開始剤とを含むことを特徴とするプリント配線板用水性
フォトレジスト組成物、並びに (a)電導性被膜を有する基板または金属の表面に、請
求項1又は2記載の水性フォトレジスト組成物を塗装し
て乾燥することにより平滑な塗膜を形成する工程; (b)該平滑な塗膜をパターンマスクを介して活性光線
で硬化する工程; (c)アルカリ性現像液で該硬化塗膜の未露光部を除去
してパターンを形成する工程; (d)露出した電導性被膜または金属をエッチングによ
り除去する工程;及び (e)パターン上の塗膜を除去する工程 からなることを特徴とするプリント配線板の製造方法が
提供される。Thus, according to the present invention, an alkali-developable polymerizable unsaturated group-containing aqueous solution obtained by adding a compound having a polymerizable unsaturated group and a glycidyl group in one molecule to an aqueous emulsion having an acid group. An aqueous photoresist composition for printed wiring boards, which comprises an emulsion and a photopolymerization initiator, and (a) the aqueous photoresist according to claim 1 or 2 on the surface of a substrate or a metal having a conductive coating. A step of forming a smooth coating film by coating the composition and drying; (b) a step of curing the smooth coating film with an actinic ray through a pattern mask; (c) the curing coating with an alkaline developer. A step of forming a pattern by removing an unexposed portion of the film; (d) a step of removing the exposed conductive film or metal by etching; and (e) a film on the pattern. Method for manufacturing a printed wiring board characterized by comprising the step of removed by is provided.
【0006】本発明に用いる酸基を有する水性エマルシ
ョンは、例えば、不飽和酸モノマーと該モノマーと共重
合可能なビニルモノマーを種々の公知の乳化重合法によ
って調製される。この酸基を有する水性エマルション
に、更に1分子中に重合性不飽和基及びグリシジル基を
有する化合物を付加反応させることによって本発明のア
ルカリ現像可能な重合性不飽和基含有水性エマルション
が得られる。乳化重合は水を媒体として、これにモノマ
ーを乳化剤を用いて分散乳化させ、水溶性の重合開始剤
を加えて50〜90℃で加熱することによって行なわれ
る。レドックス開始剤を用いると室温で行なうことも可
能である。乳化剤としては高級アルコールの硫酸塩、ア
ルキルスルホン酸塩などのアニオン活性剤や、ポリオキ
シエチレンの各種アルキルエーテル、アルキルエステ
ル、アルキルアリルエーテルなどの非イオン活性剤が使
用される。また、エマルションの安定剤(保護コロイ
ド)としてポリビニルアルコールが併用されることもあ
る。重合開始剤としては過酸化水素、過硫酸アンモニウ
ム、クメンヒドロペルオキシド、あるいは水溶性レドッ
クス開始剤などが用いられる。The aqueous emulsion having an acid group used in the present invention is prepared, for example, by various known emulsion polymerization methods of an unsaturated acid monomer and a vinyl monomer copolymerizable with the monomer. The alkali-developable polymerizable unsaturated group-containing aqueous emulsion of the present invention can be obtained by further subjecting this aqueous emulsion having an acid group to a reaction of a compound having a polymerizable unsaturated group and a glycidyl group in one molecule. The emulsion polymerization is carried out by using water as a medium to disperse and emulsify the monomer with an emulsifier, adding a water-soluble polymerization initiator and heating at 50 to 90 ° C. It is also possible to work at room temperature with a redox initiator. As the emulsifier, anion activators such as sulfates of higher alcohols and alkyl sulfonates, and nonionic activators such as various alkyl ethers, alkyl esters and alkyl allyl ethers of polyoxyethylene are used. In addition, polyvinyl alcohol may be used in combination as a stabilizer (protective colloid) for the emulsion. As the polymerization initiator, hydrogen peroxide, ammonium persulfate, cumene hydroperoxide, water-soluble redox initiator or the like is used.
【0007】本発明で用いる不飽和酸モノマーとして
は、アクリル酸、メタクリル酸、クロトン酸などの一塩
基酸モノマー;フマル酸、シトラコン酸、イタコン酸な
どの二塩基酸モノマーおよびそのハーフエステル化物;
(メタ)アクリル酸ヒドロキシエチル、(メタ)アクリ
ル酸ヒドロキシプロピルなどの水酸基含有(メタ)アク
リル酸エステルとコハク酸、フタル酸、テトラヒドロフ
タル酸、ヘキサヒドロ無水フタル酸などの二塩基酸との
ハーフエステル化物などが挙げられる。不飽和酸モノマ
ーの使用量は、量が少ないとアルカリ水可溶性がなくな
り、多すぎると耐水性が悪くなる。それ故、樹脂酸価に
して20〜780、好ましくは80〜150が好まし
い。The unsaturated acid monomers used in the present invention include monobasic acid monomers such as acrylic acid, methacrylic acid and crotonic acid; dibasic acid monomers such as fumaric acid, citraconic acid and itaconic acid and their half-esterified products;
Half-esterified products of hydroxyl-containing (meth) acrylic acid esters such as hydroxyethyl (meth) acrylate and hydroxypropyl (meth) acrylate with dibasic acids such as succinic acid, phthalic acid, tetrahydrophthalic acid, and hexahydrophthalic anhydride And so on. If the amount of the unsaturated acid monomer used is small, the solubility in alkaline water will be lost, and if it is too large, the water resistance will be poor. Therefore, the resin acid value is preferably 20 to 780, and more preferably 80 to 150.
【0008】上記不飽和酸モノマーと共重合可能なモノ
マーとしては高分子エマルションが所望の物理的および
化学的性質(例えば、弾性、剛性、耐薬品性など)を保
持するように考慮して選択すればよく、例えば、アクリ
ルアミド、メタクリルアミド、ジアセトンアクリルアミ
ド、マレイン酸ジアミド、クロトン酸アミド、イタコン
酸ジアミド、フマル酸ジアミド等の不飽和アミドモノマ
ー;スチレン類、(メタ)アクリロニトリル、酢酸ビニ
ル、塩化ビニル;イソブテン等のα−オレフィン類;ブ
タジエン等のジエン類;エチルビニルエーテル等のビニ
ルエーテル類;ブチルアクリレート、ヒドロキシプロピ
ルアクリレート等のアクリル酸エステル類;メチルメタ
クリレート、β−ヒドロキシエチルメタクリレート等の
メタクリル酸エステル類;N−ビニルピリジン、N−ビ
ニルカルバゾール、N−ビニルピロリドンなどの含窒素
モノマー類などが挙げられる。これらは1種または2種
以上併用することができる。The monomer copolymerizable with the unsaturated acid monomer should be selected so that the polymer emulsion has desired physical and chemical properties (for example, elasticity, rigidity, chemical resistance, etc.). For example, unsaturated amide monomers such as acrylamide, methacrylamide, diacetone acrylamide, maleic acid diamide, crotonic acid amide, itaconic acid diamide, fumaric acid diamide; styrenes, (meth) acrylonitrile, vinyl acetate, vinyl chloride; Α-Olefins such as isobutene; Dienes such as butadiene; Vinyl ethers such as ethyl vinyl ether; Acrylic esters such as butyl acrylate and hydroxypropyl acrylate; Methacrylic acid ester such as methyl methacrylate and β-hydroxyethyl methacrylate Examples thereof include nitrogen-containing monomers such as N-vinylpyridine, N-vinylcarbazole and N-vinylpyrrolidone. These may be used alone or in combination of two or more.
【0009】上記不飽和酸モノマーと共重合可能なモノ
マーのうち、不飽和アミドモノマーの使用は、該不飽和
アミドモノマーが水に非常によく溶解し、また、その重
合体も水に溶解することにより、エマルション粒子表面
への分布が極めて高く、いわゆるエマルション粒子の増
粘剤もしくは保護コロイドとしての役割を果たし、しか
も従来の保護コロイドと異なり、疎水性モノマーと共重
合して粒子内部にしっかりと固定されるため、特に好ま
しい。従って、不飽和アミドモノマーを共重合したエマ
ルション粒子は極めて安定で、特に第三成分の添加の際
の化学的、機械的操作に対する抵抗力が非常に大きい。
該不飽和アミドモノマーの使用量は、量が多くなると水
溶性重合体部分が多くなり、粘度が著しく高くなって高
濃度の高分子エマルションが得難くなる。一方、量が少
なすぎると上述の特徴を有する高分子エマルションが得
られなくなる。従って、通常、モノマー成分中0〜50
重量%、好ましくは2〜40重量%の範囲内で使用され
る。Among the monomers copolymerizable with the above unsaturated acid monomer, the use of an unsaturated amide monomer means that the unsaturated amide monomer is very well soluble in water, and the polymer is also soluble in water. Due to its extremely high distribution on the surface of emulsion particles, it plays a role as a so-called thickener or protective colloid for emulsion particles, and unlike conventional protective colloids, it is copolymerized with hydrophobic monomers and firmly fixed inside the particles. Therefore, it is particularly preferable. Therefore, the emulsion particles obtained by copolymerizing the unsaturated amide monomer are extremely stable, and in particular, have very high resistance to chemical and mechanical operations when the third component is added.
When the amount of the unsaturated amide monomer used is large, the amount of the water-soluble polymer portion is large, the viscosity is remarkably high, and it becomes difficult to obtain a high-concentration polymer emulsion. On the other hand, if the amount is too small, the polymer emulsion having the above characteristics cannot be obtained. Therefore, it is usually 0 to 50 in the monomer component.
It is used in the range of% by weight, preferably 2 to 40% by weight.
【0010】次に、酸基を有する水性エマルションに、
更に1分子中に重合性不飽和基及びグリシジル基を有す
る化合物(以下、この化合物を「不飽和エポキシモノマ
ー」と言う。)が付加反応されるが、この反応はハイド
ロキノン、ハイドロキノンモノメチルエーテル、ベンゾ
キノン等の通常の重合禁止剤の存在下、50〜90℃で
1〜10時間加熱することによって行なわれる。尚、エ
ポキシ開環触媒を用いると反応を円滑に行なうことがで
きる。該エポキシ開環触媒としては、例えば、2−エチ
ルイミダゾール、ピリジン、ピコリンなどの環状窒素化
合物、4級アンモニウム塩、第3級スルホニウム塩、第
3級アミン類、アミン塩酸塩などが挙げられ、使用量は
エポキシ基に対して0.01〜25モル%添加すること
が好ましい。Next, an aqueous emulsion having an acid group is added,
Further, a compound having a polymerizable unsaturated group and a glycidyl group in one molecule (hereinafter, this compound is referred to as an "unsaturated epoxy monomer") is subjected to an addition reaction, and this reaction includes hydroquinone, hydroquinone monomethyl ether, benzoquinone, etc. In the presence of the usual polymerization inhibitor of 50 to 90 ° C. for 1 to 10 hours. The reaction can be smoothly carried out by using an epoxy ring-opening catalyst. Examples of the epoxy ring-opening catalyst include cyclic nitrogen compounds such as 2-ethylimidazole, pyridine and picoline, quaternary ammonium salts, tertiary sulfonium salts, tertiary amines, amine hydrochlorides, and the like. The amount is preferably 0.01 to 25 mol% based on the epoxy group.
【0011】酸基を有する水性エマルションに付加され
る不飽和エポキシモノマーとしては、グリシジルメタク
リレート、グリシジルアクリレート、アリルグリシジル
エーテル、α−エチルグリシジルエーテル、クロトニル
グリシジルエーテル、グリシジルクロトネート、イタコ
ン酸モノアルキルエステルモノグリシジルエステル、フ
マル酸モノアルキルエステルモノグリシジルエステル、
マレイン酸モノアルキルエステルモノグリシジルエステ
ル、サイクロマーM100(ダイセル化学(株)社
製)、サイクロマーA200(ダイセル化学(株)社
製)などが挙げられる。これらは1種または2種以上併
用して反応に供される。The unsaturated epoxy monomer added to the aqueous emulsion having an acid group includes glycidyl methacrylate, glycidyl acrylate, allyl glycidyl ether, α-ethyl glycidyl ether, crotonyl glycidyl ether, glycidyl crotonate, and itaconic acid monoalkyl ester. Monoglycidyl ester, fumaric acid monoalkyl ester monoglycidyl ester,
Maleic acid monoalkyl ester monoglycidyl ester, Cyclomer M100 (manufactured by Daicel Chemical Industries, Ltd.), Cyclomer A200 (manufactured by Daicel Chemical Industries, Ltd.) and the like can be mentioned. These are used in the reaction either alone or in combination of two or more.
【0012】不飽和エポキシモノマーの添加量は、酸基
に対して0.1〜2.0当量が好ましい。不飽和エポキ
シモノマーの添加量が0.1当量以下ではエマルション
の硬化性が極度に低下する。一方、2.0当量以上添加
しても何ら利点がない上に貯蔵安定性等に問題が生じて
くる。The unsaturated epoxy monomer is preferably added in an amount of 0.1 to 2.0 equivalents based on the acid groups. When the amount of the unsaturated epoxy monomer added is 0.1 equivalent or less, the curability of the emulsion is extremely lowered. On the other hand, addition of 2.0 equivalents or more has no advantage and causes a problem in storage stability and the like.
【0013】本発明のアルカリ現像可能な重合性不飽和
基含有水性エマルションには、更に、架橋密度を上げた
り物性を改良したりするため、重合性不飽和基含有化合
物を分散あるいは溶解させることができる。本発明のア
ルカリ現像可能な重合性不飽和基含有水性エマルション
は安定性が非常に高いため、該重合性不飽和基含有化合
物を分散あるいは溶解させる際には、界面活性剤や水溶
性樹脂などの保護コロイドを必ずしも添加する必要がな
い。In the alkali-developable polymerizable unsaturated group-containing aqueous emulsion of the present invention, a polymerizable unsaturated group-containing compound may be dispersed or dissolved in order to increase the crosslink density and improve the physical properties. it can. Since the alkali-developable polymerizable unsaturated group-containing aqueous emulsion of the present invention has a very high stability, when dispersing or dissolving the polymerizable unsaturated group-containing compound, a surfactant or a water-soluble resin is used. It is not always necessary to add a protective colloid.
【0014】該重合性不飽和基含有化合物としては下記
のものが挙げられる。Examples of the polymerizable unsaturated group-containing compound include the following.
【0015】脂肪族、脂環族、芳香脂肪族1〜6価のア
ルコール及びポリアルキレングリコールのモノ及びポリ
(メタ)アクリレート;脂肪族、脂環族、芳香脂肪族2
〜6価の多価アルコールにアルキレンオキサイドを付加
させた形の多価アルコールのモノ及びポリ(メタ)アク
リレート;ポリエステルポリ(メタ)アクリレート;ポ
リエステルポリ(メタ)アクリレートは通常(メタ)ア
クリル酸と多価アルコールと多価カルボン酸とをエステ
ル化することによって合成される。Aliphatic, alicyclic and araliphatic mono- and poly (meth) acrylates of alcohols and polyalkylene glycols having 1 to 6 valences; aliphatic, alicyclic and araliphatic 2
To mono- and poly (meth) acrylates of polyhydric alcohols obtained by adding alkylene oxides to hexavalent polyhydric alcohols; polyester poly (meth) acrylates; polyester poly (meth) acrylates are usually poly (meth) acrylic acid and poly (meth) acrylate. It is synthesized by esterifying a polyhydric alcohol and a polycarboxylic acid.
【0016】エポキシポリ(メタ)アクリレート;分子
中に2個以上のエポキシ基を有するエポキシ樹脂に、エ
ポキシ基とほぼ当量の(メタ)アクリル酸、カルボキシ
ル基を有する(メタ)アクリレート、もしくは(メタ)
アクリル酸またはカルボキシル基をもつ(メタ)アクリ
レートと多塩基酸との混合物を反応させることによって
合成される。あるいはエポキシ基含有(メタ)アクリレ
ートに多価カルボン酸を反応させるなどの方法もある。Epoxy poly (meth) acrylate; (epoxy resin having two or more epoxy groups in the molecule), (meth) acrylic acid in an amount approximately equivalent to the epoxy groups, (meth) acrylate having a carboxyl group, or (meth)
It is synthesized by reacting a mixture of acrylic acid or a (meth) acrylate having a carboxyl group with a polybasic acid. Alternatively, there is a method of reacting an epoxy group-containing (meth) acrylate with a polycarboxylic acid.
【0017】ポリウレタンポリ(メタ)アクリレート;
主鎖にポリウレタン結合単位を有する多価アルコールの
(メタ)アクリレートの構造を有し、通常、ヒドロキシ
ル基含有(メタ)アクリレートと、ポリイソシアネート
及び必要により多価アルコールとを反応させるなどの方
法で合成される。Polyurethane poly (meth) acrylate;
It has a (meth) acrylate structure of a polyhydric alcohol having a polyurethane bond unit in the main chain, and is usually synthesized by a method of reacting a hydroxyl group-containing (meth) acrylate with a polyisocyanate and optionally a polyhydric alcohol. To be done.
【0018】ポリアミドポリ(メタ)アクリレート;主
鎖にポリアミド結合単位を有する多価アルコールの(メ
タ)アクリレートの構造を有し、通常、ポリアミド型多
価カルボン酸にヒドロキシ基含有(メタ)アクリレート
又はエポキシ基含有(メタ)アクリレートを反応させる
か、ポリアミド型多価アルコールに(メタ)アクリル酸
を反応させるなどの方法で合成される。Polyamide poly (meth) acrylate; having a (meth) acrylate structure of a polyhydric alcohol having a polyamide bond unit in the main chain, and usually a polyamide-type polyvalent carboxylic acid containing a hydroxy group-containing (meth) acrylate or epoxy. It is synthesized by a method such as reacting a group-containing (meth) acrylate or reacting a polyamide type polyhydric alcohol with (meth) acrylic acid.
【0019】側鎖及び/又は末端に(メタ)アクリロイ
ルオキシ基を有するビニル系またはジエン系低重合体;
ビニル系またはジエン系低重合体の側鎖または末端に、
エステル結合、ウレタン結合、アミド結合、エーテル結
合などを介して(メタ)アクリロイルオキシ基が結合さ
れている構造を有する。通常、側鎖または末端にヒドロ
キシル基、カルボキシル基、エポキシ基等を有する低重
合体に、これらの基と反応性の(メタ)アクリル酸、カ
ルボキシル基含有(メタ)アクリレート、ヒドロキシル
基含有(メタ)アクリレート、エポキシ基含有(メタ)
アクリレート、イソシアネート基含有(メタ)アクリレ
ート、アミノ基含有(メタ)アクリレートなどを反応さ
せることによって合成される。A vinyl or diene low polymer having a (meth) acryloyloxy group on the side chain and / or the terminal;
On the side chain or terminal of vinyl-based or diene-based low polymer,
It has a structure in which a (meth) acryloyloxy group is bonded via an ester bond, a urethane bond, an amide bond, an ether bond, or the like. Usually, a low polymer having a hydroxyl group, a carboxyl group, an epoxy group or the like in a side chain or a terminal, is reacted with these groups (meth) acrylic acid, a carboxyl group-containing (meth) acrylate, a hydroxyl group-containing (meth) Acrylate, containing epoxy group (meth)
It is synthesized by reacting an acrylate, an isocyanate group-containing (meth) acrylate, an amino group-containing (meth) acrylate and the like.
【0020】本発明に用いる光重合開始剤としては、例
えば、ベンゾイン、ベンゾインメチルエーテル、ベンゾ
インエチルエーテル、ベンジル、ジフェニルジスルフィ
ド、テトラメチルチウラムモノサルファイド、エオシ
ン、チオニン、ジアセチル、ミヒラーケトン、アントラ
キノン、クロルアントラキノン、メチルアントラキノ
ン、α−ヒドロキシイソブチルフェノン、p−イソプロ
ピル−α−ヒドロキシイソブチルフェノン、α,α´−
ジクロル−4−フェノキシアセトフェノン、1−ヒドロ
キシ−1−シクロヘキシルフェニルケトン、2,2−ジ
メトキシ−1,2−ジフェニルエタン1−オン、メチル
ベンゾイルフォルメイト、2−メチル−1−[4−(メ
チルチオ)フェニル]−2−モルホリノ−プロパノン−
1、チオキサントン、ジエチルチオキサントン、ベンゾ
フェノン、2−ベンジル−2−ジメチルアミノ−1−
(4−モルホリノフェニル)−ブタノン1、2,4,6
−トリメチルフォスフィルオキサイドなどを用いること
ができる。Examples of the photopolymerization initiator used in the present invention include benzoin, benzoin methyl ether, benzoin ethyl ether, benzyl, diphenyl disulfide, tetramethyl thiuram monosulfide, eosin, thionine, diacetyl, Michler's ketone, anthraquinone, chloranthraquinone, Methyl anthraquinone, α-hydroxyisobutylphenone, p-isopropyl-α-hydroxyisobutylphenone, α, α'-
Dichloro-4-phenoxyacetophenone, 1-hydroxy-1-cyclohexyl phenyl ketone, 2,2-dimethoxy-1,2-diphenylethan-1-one, methylbenzoyl formate, 2-methyl-1- [4- (methylthio) Phenyl] -2-morpholino-propanone-
1, thioxanthone, diethylthioxanthone, benzophenone, 2-benzyl-2-dimethylamino-1-
(4-morpholinophenyl) -butanone 1,2,4,6
-Trimethylphosphyl oxide or the like can be used.
【0021】これらの光重合開始剤の使用量は、一般
に、樹脂(固形分)100重量部に対して0.1〜10
重量部の範囲内がよい。その使用量が0.1重量部より
少ないと硬化性が低下しやすく、反対に10重量部より
多くなると硬化被膜の機械的強度が低下しやすい。The amount of these photopolymerization initiators used is generally 0.1 to 10 relative to 100 parts by weight of the resin (solid content).
Within the range of parts by weight is preferable. If the amount used is less than 0.1 parts by weight, the curability tends to decrease, and if it is more than 10 parts by weight, the mechanical strength of the cured coating tends to decrease.
【0022】本発明のプリント配線板用水性フォトレジ
スト組成物には、必要に応じて塗料や顔料を添加するこ
ともできる。A paint or a pigment may be added to the aqueous photoresist composition for a printed wiring board of the present invention, if necessary.
【0023】本発明の組成物を用いるプリント配線板の
製造は例えば次のようにして行なうことができる。Production of a printed wiring board using the composition of the present invention can be carried out, for example, as follows.
【0024】前述したプリント配線板用水性フォトレジ
スト組成物を、銅張り積層板などの電導性被膜を有する
基板または金属の表面にロール塗装、スプレイ塗装、カ
ーテンフロー塗装、ディップ塗装などにより塗布する。
この際の膜厚は乾燥膜厚で1〜100μm、好ましくは
5〜20μmの範囲内が望ましい。次に塗膜を熱風など
で乾燥し、水分を除去する。ついで、基板上に形成され
た未硬化の光硬化性塗膜上にパターンマスクを適用し、
活性光で露光し、導体回路とすべき部分以外の未露光部
を現像処理によって除去する。The above-mentioned aqueous photoresist composition for printed wiring boards is applied to the surface of a substrate having an electrically conductive coating such as a copper clad laminate or a metal surface by roll coating, spray coating, curtain flow coating, dip coating or the like.
The film thickness at this time is preferably 1 to 100 μm, and more preferably 5 to 20 μm in terms of dry film thickness. Next, the coating film is dried with hot air or the like to remove water. Then, apply a pattern mask on the uncured photocurable coating film formed on the substrate,
Exposing with active light, an unexposed portion other than a portion to be a conductor circuit is removed by a developing process.
【0025】本発明において露光に使用する活性光線
は、用いる光重合開始剤の種類によって異なるが、一般
には、3000〜4500オングストロームの波長を有
する光線がよい。これらの光線を発する光源としては、
例えば、太陽光、水銀灯、キセノンランプ、アーク灯な
どが挙げられる。活性光線の照射による塗膜の硬化は、
数分以内、通常1秒〜20分の範囲内で完了する。The actinic ray used for exposure in the present invention varies depending on the kind of the photopolymerization initiator used, but is generally a ray having a wavelength of 3000 to 4500 angstroms. As a light source that emits these rays,
For example, sunlight, a mercury lamp, a xenon lamp, an arc lamp, etc. are mentioned. Curing of the coating film by irradiation of actinic rays,
It is completed within a few minutes, usually within 1 second to 20 minutes.
【0026】また、現像処理は、塗膜上に弱アルカリ水
を吹き付けることによって、塗膜の未硬化部分を洗い流
すことによって行なうことができる。弱アルカリ水は通
常カセイソーダ、炭酸ソーダ、カセイカリ、アンモニア
水など塗膜中に有する遊離のカルボン酸と中和して塗膜
に水溶性を与えることのできるものが使用可能である。The development treatment can be carried out by spraying weak alkaline water on the coating film to wash away the uncured portion of the coating film. As the weak alkaline water, water such as caustic soda, sodium carbonate, caustic potash, and ammonia water which can neutralize the free carboxylic acid contained in the coating film to make the coating film water-soluble can be used.
【0027】次いで、現像処理によって基板上に露出し
た銅箔部分(非回路部分)を、塩化第二鉄、塩化第二銅
等を用いた通常のエッチング処理によって除去する。し
かる後、回路パターン上の光硬化塗膜をカセイソーダ等
の強アルカリによって溶解除去することにより、基板上
にプリント回路が形成される。Then, the copper foil portion (non-circuit portion) exposed on the substrate by the developing treatment is removed by a usual etching treatment using ferric chloride, cupric chloride or the like. Thereafter, the photo-cured coating film on the circuit pattern is dissolved and removed by a strong alkali such as caustic soda to form a printed circuit on the substrate.
【0028】[0028]
【実施例】以下に本発明のプリント配線板用水性フォト
レジスト組成物の製造例、並びにそれを用いたプリント
配線板の製造方法の具体例を示して本発明を説明する
が、本発明はこれらの実施例に限定されるものではな
い。尚、以下に使用する「部」及び「%」はすべて重量
基準である。EXAMPLES The present invention will be described below with reference to production examples of the aqueous photoresist composition for a printed wiring board of the present invention and specific examples of a method for producing a printed wiring board using the same. However, the present invention is not limited to this example. In addition, all "parts" and "%" used below are based on weight.
【0029】実施例1 (1)重合性不飽和基含有水性エマルションの製造 2L4つ口フラスコ中で、水600部にドデシルベンゼ
ンスルホン酸ソーダ1部を溶解し、よく撹拌して泡立
て、その中に、スチレン75部、ブチルアクリレート3
00部、メチルメタクリレート75部、アクリル酸50
部およびドデシルメルカプタン1部のモノマー混合溶液
を加えて乳化し、エマルションとした。このエマルショ
ンを70℃に加熱し、窒素気流下で滴下ロートから過硫
酸アンモニウム3%水溶液100部を2時間かけて滴下
し、乳化重合を行なった。その後、残存する重合開始剤
を潰すため温度を90℃にして4時間保持した。その
後、ジ−t−ブチルメチルフェノール0.1部を溶解し
たグリシジルメタクリレート50部及びテトラメチルア
ンモニウムクロライド5部を加えて同温度で約3時間保
持したところ、エポキシ基は完全に消滅した。最終的な
酸価は46mg−KOH/gであり、エポキシ基の約7
0%が反応していた。このものの固形分濃度は44%で
あり、粒子径は約0.2μmであった。 Example 1 (1) Preparation of Polymerizable Unsaturated Group-Containing Aqueous Emulsion In a 2 L four-necked flask, 600 parts of water was dissolved in 1 part of sodium dodecylbenzenesulfonate, and the mixture was stirred well to form a foam. , Styrene 75 parts, butyl acrylate 3
00 parts, methyl methacrylate 75 parts, acrylic acid 50
Part and a monomer mixed solution of 1 part of dodecyl mercaptan were added and emulsified to obtain an emulsion. This emulsion was heated to 70 ° C., and 100 parts of a 3% ammonium persulfate aqueous solution was added dropwise from a dropping funnel under a nitrogen stream over 2 hours to carry out emulsion polymerization. Then, the temperature was raised to 90 ° C. and held for 4 hours in order to crush the remaining polymerization initiator. Then, when 50 parts of glycidyl methacrylate and 5 parts of tetramethylammonium chloride in which 0.1 part of di-t-butylmethylphenol was dissolved were added and held at the same temperature for about 3 hours, the epoxy groups disappeared completely. The final acid value is 46 mg-KOH / g, which is about 7 of the epoxy group.
0% was reacting. The solid content concentration of this product was 44%, and the particle diameter was about 0.2 μm.
【0030】(2)プリント配線板用水性フォトレジス
ト組成物の製造 (1)で得られた重合性不飽和基含有水性エマルション
250部(固形分110部)をディスパーで撹拌しなが
ら光重合開始剤である2−メチル−1−[4−(メチル
チオ)フェニル]−2−モルホリノ−プロパノン−1
(チバガイギー社製、商品名イルガキュアー907)5
部及びジエチルチオキサントン2部をプロピレングリコ
ールモノメチルエーテル10部に溶解した溶液を添加し
てプリント配線板用水性フォトレジスト組成物を製造し
た。このものの有機溶剤含有量は3.7%であった。(2) Production of Water-based Photoresist Composition for Printed Wiring Boards 250 parts (solid content 110 parts) of the polymerizable unsaturated group-containing water-based emulsion obtained in (1) is stirred with a disper to photopolymerization initiator. 2-methyl-1- [4- (methylthio) phenyl] -2-morpholino-propanone-1 which is
(Ciba Geigy Co., product name Irgacure 907) 5
Part and 2 parts of diethyl thioxanthone dissolved in 10 parts of propylene glycol monomethyl ether were added to produce an aqueous photoresist composition for printed wiring boards. The organic solvent content of this product was 3.7%.
【0031】(3)プリント配線板の製造 ガラスエポキシ製銅張り積層板にロールコーターを用い
て、乾燥膜厚が10μmになるように、上記で得たプリ
ント配線板用水性フォトレジスト組成物を塗布した。(3) Production of Printed Wiring Board A glass epoxy copper clad laminate was coated with the aqueous photoresist composition for a printed wiring board obtained above using a roll coater so that the dry film thickness was 10 μm. did.
【0032】塗布層を80℃で20分乾燥した後、プリ
ント基板用ネガフィルムを真空装置でこの塗板と密着さ
せ、3KWの超高圧水銀灯を用いて100mJ/cm2
の紫外線を照射した。After the coated layer was dried at 80 ° C. for 20 minutes, a negative film for a printed circuit board was brought into close contact with this coated plate with a vacuum device and 100 mJ / cm 2 using a 3 KW ultra-high pressure mercury lamp.
Of the ultraviolet rays.
【0033】次に、未露光部を30℃で1%の炭酸ナト
リウム水溶液で30秒間洗い出して現像を行ない、エッ
チングレジストパターンを得た。このパターンを用い
て、塩化第二鉄/塩酸エッチング液でエッチングを行な
い、その後1%水酸化ナトリウム水溶液でレジストを剥
離し、シャープなパターンのプリント配線板を得た。Next, the unexposed area was washed out with a 1% sodium carbonate aqueous solution at 30 ° C. for 30 seconds and developed to obtain an etching resist pattern. Using this pattern, etching was performed with a ferric chloride / hydrochloric acid etching solution, and then the resist was peeled off with a 1% sodium hydroxide aqueous solution to obtain a printed wiring board having a sharp pattern.
【0034】実施例2 (1)重合性不飽和基含有水性エマルションの製造 2L4つ口フラスコ中で、水600部にドデシルベンゼ
ンスルホン酸ソーダ1部を溶解し、よく撹拌して泡立
て、その中に、スチレン75部、ブチルアクリレート3
00部、メチルメタクリレート25部、アクリル酸10
0部およびドデシルメルカプタン1部のモノマー混合溶
液を加えて乳化し、エマルションとした。このエマルシ
ョンを70℃に加熱し、窒素気流下で滴下ロートから過
硫酸アンモニウム3%水溶液100部を2時間かけて滴
下し、乳化重合を行なった。その後、残存する重合開始
剤を潰すため温度を90℃にして4時間保持した。その
後、ジ−t−ブチルメチルフェノール0.1部を溶解し
たグリシジルメタクリレート150部及びテトラメチル
アンモニウムクロライド5部を加えて同温度で約3時間
保持したところ、エポキシ基は完全に消滅した。最終的
な酸価は56mg−KOH/gであり、エポキシ基の約
70%が反応していた。このものの固形分濃度は48%
であり、粒子径は約0.2μmであった。 Example 2 (1) Preparation of Polymerizable Unsaturated Group-Containing Aqueous Emulsion In a 2 L four-necked flask, 600 parts of water was dissolved in 1 part of sodium dodecylbenzenesulfonate, and the mixture was thoroughly stirred to form a foam. , Styrene 75 parts, butyl acrylate 3
00 parts, methyl methacrylate 25 parts, acrylic acid 10
A monomer mixed solution of 0 part and 1 part of dodecyl mercaptan was added and emulsified to obtain an emulsion. This emulsion was heated to 70 ° C., and 100 parts of a 3% ammonium persulfate aqueous solution was added dropwise from a dropping funnel under a nitrogen stream over 2 hours to carry out emulsion polymerization. Then, the temperature was raised to 90 ° C. and held for 4 hours in order to crush the remaining polymerization initiator. After that, 150 parts of glycidyl methacrylate in which 0.1 part of di-t-butylmethylphenol was dissolved and 5 parts of tetramethylammonium chloride were added, and the mixture was kept at the same temperature for about 3 hours, and the epoxy group disappeared completely. The final acid value was 56 mg-KOH / g, and about 70% of the epoxy groups had reacted. The solid content of this product is 48%
And the particle size was about 0.2 μm.
【0035】(2)プリント配線板用水性フォトレジス
ト組成物の製造 (1)で得られた重合性不飽和基含有水性エマルション
270部(固形分120部)をディスパーで撹拌しなが
らポリエチレングリコール(数平均分子量200)ジア
クリレート20部を添加し、続いて光重合開始剤である
2−メチル−1−[4−(メチルチオ)フェニル]−2
−モルホリノ−プロパノン−1(チバガイギー社製、商
品名イルガキュアー907)5部及びジエチルチオキサ
ントン2部をプロピレングリコールモノメチルエーテル
10部に溶解した溶液を添加してプリント配線板用水性
フォトレジスト組成物を製造した。このものの有機溶剤
含有量は3.3%であった。(2) Production of aqueous photoresist composition for printed wiring board 270 parts (solid content 120 parts) of the polymerizable unsaturated group-containing aqueous emulsion obtained in (1) was stirred with a disper and polyethylene glycol 20 parts of an average molecular weight of 200) diacrylate was added, followed by photopolymerization initiator 2-methyl-1- [4- (methylthio) phenyl] -2.
-Morpholino-propanone-1 (manufactured by Ciba-Geigy, trade name Irgacure 907) and a solution of 2 parts of diethylthioxanthone dissolved in 10 parts of propylene glycol monomethyl ether were added to produce an aqueous photoresist composition for printed wiring boards. did. The organic solvent content of this product was 3.3%.
【0036】(3)プリント配線板の製造 ガラスエポキシ製銅張り積層板にカーテンコーターを用
いて、乾燥膜厚が10μmになるように、上記で得たプ
リント配線板用水性フォトレジスト組成物を塗布した。(3) Production of Printed Wiring Board A glass epoxy copper-clad laminate was coated with the aqueous photoresist composition for printed wiring board obtained above using a curtain coater so that the dry film thickness was 10 μm. did.
【0037】塗布層を80℃で20分乾燥した後、プリ
ント基板用ネガフィルムを真空装置でこの塗板と密着さ
せ、3KWの超高圧水銀灯を用いて50mJ/cm2の
紫外線を照射した。After the coated layer was dried at 80 ° C. for 20 minutes, a negative film for a printed circuit board was brought into close contact with this coated plate with a vacuum device and irradiated with ultraviolet rays of 50 mJ / cm 2 using a 3 KW ultra-high pressure mercury lamp.
【0038】次に、未露光部を30℃で1%の炭酸ナト
リウム水溶液で30秒間洗い出して現像を行ない、エッ
チングレジストパターンを得た。このパターンを用い
て、塩化第二鉄/塩酸エッチング液でエッチングを行な
い、その後1%水酸化ナトリウム水溶液でレジストを剥
離し、シャープなパターンのプリント配線板を得た。Next, the unexposed area was washed out with a 1% sodium carbonate aqueous solution at 30 ° C. for 30 seconds and developed to obtain an etching resist pattern. Using this pattern, etching was performed with a ferric chloride / hydrochloric acid etching solution, and then the resist was peeled off with a 1% sodium hydroxide aqueous solution to obtain a printed wiring board having a sharp pattern.
【0039】実施例3 (1)重合性不飽和基含有水性エマルションの製造 2L4つ口フラスコ中で、水600部にドデシルベンゼ
ンスルホン酸ソーダ1部を溶解し、よく撹拌して泡立
て、その中に、スチレン75部、ブチルアクリレート3
00部、メチルメタクリレート25部、アクリル酸50
部およびドデシルメルカプタン1部のモノマー混合溶液
を加えて乳化し、エマルションとした。このエマルショ
ンを70℃に加熱し、窒素気流下で滴下ロートから過硫
酸アンモニウム3%水溶液100部を2時間かけて滴下
し、乳化重合を行なった。その後、残存する重合開始剤
を潰すため温度を90℃にして4時間保持した。その
後、ジ−t−ブチルメチルフェノール0.1部を溶解し
たグリシジルメタクリレート150部及びテトラメチル
アンモニウムクロライド5部を加えて同温度で約3時間
保持したところ、エポキシ基は完全に消滅した。最終的
な酸価は46mg−KOH/gであり、エポキシ基の約
70%が反応していた。このものの固形分濃度は44%
であり、粒子径は約0.2μmであった。 Example 3 (1) Preparation of Polymerizable Unsaturated Group-Containing Aqueous Emulsion In a 2 L four-necked flask, 600 parts of water was dissolved in 1 part of sodium dodecylbenzenesulfonate, and the mixture was well stirred to foam. , Styrene 75 parts, butyl acrylate 3
00 parts, methyl methacrylate 25 parts, acrylic acid 50
Part and a monomer mixed solution of 1 part of dodecyl mercaptan were added and emulsified to obtain an emulsion. This emulsion was heated to 70 ° C., and 100 parts of a 3% ammonium persulfate aqueous solution was added dropwise from a dropping funnel under a nitrogen stream over 2 hours to carry out emulsion polymerization. Then, the temperature was raised to 90 ° C. and held for 4 hours in order to crush the remaining polymerization initiator. After that, 150 parts of glycidyl methacrylate in which 0.1 part of di-t-butylmethylphenol was dissolved and 5 parts of tetramethylammonium chloride were added, and the mixture was kept at the same temperature for about 3 hours, and the epoxy group disappeared completely. The final acid value was 46 mg-KOH / g, and about 70% of the epoxy groups had reacted. The solid content of this product is 44%
And the particle size was about 0.2 μm.
【0040】(2)プリント配線板用水性フォトレジス
ト組成物の製造 (1)で得られた重合性不飽和基含有水性エマルション
250部(固形分110部)をディスパーで撹拌しなが
らポリエチレングリコール(数平均分子量200)ジア
クリレート20部を添加し、続いて光重合開始剤である
2−メチル−1−[4−(メチルチオ)フェニル]−2
−モルホリノ−プロパノン−1(チバガイギー社製、商
品名イルガキュアー907)5部及びジエチルチオキサ
ントン2部をプロピレングリコールモノメチルエーテル
10部に溶解した溶液を添加してプリント配線板用水性
フォトレジスト組成物を製造した。このものの有機溶剤
含有量は3.5%であった。(2) Production of aqueous photoresist composition for printed wiring board 250 parts (solid content 110 parts) of the polymerizable unsaturated group-containing aqueous emulsion obtained in (1) was stirred with a disper and polyethylene glycol 20 parts of an average molecular weight of 200) diacrylate was added, followed by photopolymerization initiator 2-methyl-1- [4- (methylthio) phenyl] -2.
-Morpholino-propanone-1 (manufactured by Ciba-Geigy, trade name Irgacure 907) and a solution of 2 parts of diethylthioxanthone dissolved in 10 parts of propylene glycol monomethyl ether were added to produce an aqueous photoresist composition for printed wiring boards. did. The organic solvent content of this product was 3.5%.
【0041】(3)プリント配線板の製造 ガラスエポキシ製銅張り積層板にスプレーコーターを用
いて、乾燥膜厚が10μmになるように、上記で得たプ
リント配線板用水性フォトレジスト組成物を塗布した。(3) Production of Printed Wiring Board A glass epoxy copper-clad laminate was coated with the aqueous photoresist composition for printed wiring board obtained above using a spray coater so that the dry film thickness was 10 μm. did.
【0042】塗布層を80℃で20分乾燥した後、プリ
ント基板用ネガフィルムを真空装置でこの塗板と密着さ
せ、3KWの超高圧水銀灯を用いて70mJ/cm2の
紫外線を照射した。After the coated layer was dried at 80 ° C. for 20 minutes, a negative film for a printed circuit board was brought into close contact with this coated plate with a vacuum device and irradiated with 70 mJ / cm 2 of ultraviolet rays using a 3 KW ultra-high pressure mercury lamp.
【0043】次に、未露光部を30℃で1%の炭酸ナト
リウム水溶液で30秒間洗い出して現像を行ない、エッ
チングレジストパターンを得た。このパターンを用い
て、塩化第二鉄/塩酸エッチング液でエッチングを行な
い、その後1%水酸化ナトリウム水溶液でレジストを剥
離し、シャープなパターンのプリント配線板を得た。Next, the unexposed area was washed with a 1% sodium carbonate aqueous solution at 30 ° C. for 30 seconds and developed to obtain an etching resist pattern. Using this pattern, etching was performed with a ferric chloride / hydrochloric acid etching solution, and then the resist was peeled off with a 1% sodium hydroxide aqueous solution to obtain a printed wiring board having a sharp pattern.
【0044】比較例1 (1)光硬化性樹脂の製造 メチルメタクリレート40部、ブチルアクリレート40
部、アクリル酸20部およびアゾビスイソブチロニトリ
ル2部からなる混合液を窒素ガス雰囲気下において11
0℃に保持したプロピレングリコールモノメチルエーテ
ル(親水性溶剤)90部中に3時間を要して滴下した。
滴下後、1時間熟成させ、アゾビスジメチルバレロニト
リル1部およびプロピレングリコールモノメチルエーテ
ル10部からなる混合液を1時間要して滴下し、さらに
5時間熟成させて高酸価アクリル樹脂(酸価155)溶
液を得た。次に、この溶液にグリシジルメタクリレート
24部、ハイドロキノン0.12部およびテトラエチル
アンモニウムブロマイド0.6部を加えて空気を吹き込
みながら110℃で5時間反応させて光硬化性樹脂(酸
価約50、不飽和度1.35モル/kg、Tg点20
℃、数平均分子量約20,000)溶液を得た。 Comparative Example 1 (1) Production of photocurable resin 40 parts of methyl methacrylate, 40 parts of butyl acrylate
Part, 20 parts of acrylic acid and 2 parts of azobisisobutyronitrile were mixed in a nitrogen gas atmosphere at a temperature of 11 parts.
It was added dropwise to 90 parts of propylene glycol monomethyl ether (hydrophilic solvent) kept at 0 ° C. over 3 hours.
After the dropping, the mixture was aged for 1 hour, a mixed solution containing 1 part of azobisdimethylvaleronitrile and 10 parts of propylene glycol monomethyl ether was added dropwise over 1 hour, and the mixture was aged for 5 hours to obtain a high acid value acrylic resin (acid value 155 ) A solution was obtained. Next, 24 parts of glycidyl methacrylate, 0.12 part of hydroquinone and 0.6 part of tetraethylammonium bromide were added to this solution, and the mixture was reacted at 110 ° C. for 5 hours while blowing air to obtain a photocurable resin (acid value: about 50, Saturation 1.35 mol / kg, Tg point 20
A solution having a number average molecular weight of about 20,000) was obtained.
【0045】(2)プリント配線板用水性フォトレジス
ト組成物の製造 (1)の光硬化性樹脂溶液227部にトリエチルアミン
6.7部を加えて十分に中和した後、光重合開始剤であ
るα−ヒドロキシイソブチルフェノン6部を添加し、固
形分含有率が20%になるように脱イオン水を加えてプ
リント配線板用水性フォトレジスト組成物を得た。この
ものの有機溶剤含有量は16.1%であった。(2) Manufacture of aqueous photoresist composition for printed wiring board: After 6.7 parts of triethylamine was added to 227 parts of the photocurable resin solution of (1) to sufficiently neutralize, it was a photopolymerization initiator. 6 parts of α-hydroxyisobutylphenone was added, and deionized water was added so that the solid content was 20% to obtain an aqueous photoresist composition for printed wiring boards. The organic solvent content of this product was 16.1%.
【0046】(3)プリント配線板の製造 ガラスエポキシ製銅張り積層板にスプレーコーターを用
いて、乾燥膜厚が10μmになるように、上記で得たプ
リント配線板用水性フォトレジスト組成物を塗布した。(3) Production of Printed Wiring Board A glass epoxy copper-clad laminate was coated with the aqueous photoresist composition for a printed wiring board obtained above using a spray coater so that the dry film thickness was 10 μm. did.
【0047】塗布層を80℃で20分乾燥した後、プリ
ント基板用ネガフィルムを真空装置でこの塗板と密着さ
せ、3KWの超高圧水銀灯を用いて1000mJ/cm
2の紫外線を照射した。After the coated layer was dried at 80 ° C. for 20 minutes, a negative film for a printed circuit board was brought into close contact with this coated plate with a vacuum device and 1000 mJ / cm using a 3 KW ultra-high pressure mercury lamp.
Irradiated with 2 ultraviolet rays.
【0048】次に、未露光部を30℃で1%の炭酸ナト
リウム水溶液で30秒間洗い出して現像を行なったが、
露光部の耐水性が悪く、エッチングレジストパターンを
得ることができなかった。Next, the unexposed area was washed with a 1% sodium carbonate aqueous solution at 30 ° C. for 30 seconds and developed.
The water resistance of the exposed area was poor, and an etching resist pattern could not be obtained.
【0049】比較例2 (1)高酸価水性エマルションの製造 2L4つ口フラスコ中で、水600部にドデシルベンゼ
ンスルホン酸ソーダ1部を溶解し、よく撹拌して泡立
て、その中に、スチレン75部、ブチルアクリレート3
00部、メチルメタクリレート75部、アクリル酸50
部およびドデシルメルカプタン1部のモノマー混合溶液
を加えて乳化し、エマルションとした。このエマルショ
ンを70℃に加熱し、窒素気流下で滴下ロートから過硫
酸アンモニウム3%水溶液100部を2時間かけて滴下
し、乳化重合を行なった。その後、残存する重合開始剤
を潰すため温度を90℃にして4時間保持した。このも
のの酸価は46mg−KOH/gであり、固形分濃度は
42%であり、粒子径は約0.2μmであった。 Comparative Example 2 (1) Production of High Acid Value Aqueous Emulsion In a 2 L four-necked flask, 1 part of sodium dodecylbenzene sulfonate was dissolved in 600 parts of water, and the mixture was well stirred to foam styrene 75 therein. Part, butyl acrylate 3
00 parts, methyl methacrylate 75 parts, acrylic acid 50
Part and a monomer mixed solution of 1 part of dodecyl mercaptan were added and emulsified to obtain an emulsion. This emulsion was heated to 70 ° C., and 100 parts of a 3% ammonium persulfate aqueous solution was added dropwise from a dropping funnel under a nitrogen stream over 2 hours to carry out emulsion polymerization. Then, the temperature was raised to 90 ° C. and held for 4 hours in order to crush the remaining polymerization initiator. The acid value of this product was 46 mg-KOH / g, the solid content concentration was 42%, and the particle diameter was about 0.2 μm.
【0050】(2)プリント配線板用水性フォトレジス
ト組成物の製造 (1)で得られた高酸価水性エマルション240部(固
形分100部)をディスパーで撹拌しながらポリエチレ
ングリコール(数平均分子量200)ジアクリレート4
0部を添加し、続いて光重合開始剤である2−メチル−
1−[4−(メチルチオ)フェニル]−2−モルホリノ
−プロパノン−1(チバガイギー社製、商品名イルガキ
ュアー907)5部及びジエチルチオキサントン2部を
プロピレングリコールモノメチルエーテル10部に溶解
した溶液を添加してプリント配線板用水性フォトレジス
ト組成物を製造した。このものの有機溶剤含有量は3.
4%であった。(2) Production of aqueous photoresist composition for printed wiring board 240 parts of high acid value aqueous emulsion obtained in (1) (100 parts of solid content) was stirred with a disper and polyethylene glycol (number average molecular weight of 200) was used. ) Diacrylate 4
0 part was added, followed by photopolymerization initiator 2-methyl-
A solution prepared by dissolving 5 parts of 1- [4- (methylthio) phenyl] -2-morpholino-propanone-1 (manufactured by Ciba-Geigy, trade name Irgacure 907) and 2 parts of diethylthioxanthone in 10 parts of propylene glycol monomethyl ether was added. To produce an aqueous photoresist composition for a printed wiring board. The organic solvent content of this product is 3.
4%.
【0051】(3)プリント配線板の製造 ガラスエポキシ製銅張り積層板にスプレーコーターを用
いて、乾燥膜厚が10μmになるように、上記で得たプ
リント配線板用水性フォトレジスト組成物を塗布した。(3) Production of Printed Wiring Board A glass epoxy copper-clad laminate was coated with the aqueous photoresist composition for a printed wiring board obtained above using a spray coater so that the dry film thickness was 10 μm. did.
【0052】塗布層を80℃で20分乾燥した後、プリ
ント基板用ネガフィルムを真空装置でこの塗板と密着さ
せ、3KWの超高圧水銀灯を用いて400mJ/cm2
の紫外線を照射した。After the coated layer was dried at 80 ° C. for 20 minutes, a negative film for a printed circuit board was brought into close contact with this coated plate with a vacuum device and 400 mJ / cm 2 using a 3 KW ultra-high pressure mercury lamp.
Of the ultraviolet rays.
【0053】次に、未露光部を30℃で1%の炭酸ナト
リウム水溶液で30秒間洗い出して現像を行ない、エッ
チングレジストパターンを得た。このパターンを用い
て、塩化第二鉄/塩酸エッチング液でエッチングを行な
い、その後1%水酸化ナトリウム水溶液でレジストを剥
離し、シャープなパターンのプリント配線板を得た。Next, the unexposed area was washed out with a 1% aqueous sodium carbonate solution at 30 ° C. for 30 seconds and developed to obtain an etching resist pattern. Using this pattern, etching was performed with a ferric chloride / hydrochloric acid etching solution, and then the resist was peeled off with a 1% sodium hydroxide aqueous solution to obtain a printed wiring board having a sharp pattern.
【0054】実施例1〜3及び比較例1〜2の有機溶剤
含有量、ネガフィルム密着露光後のネガフィルムの剥が
し具合、露光量、未露光部の弱アルカリでの洗い出し現
像、水洗後塩化第二鉄での銅箔のエッチング処理除去、
露光後の硬化塗膜の剥離について調べた。その結果を表
1に示す。表1において、 露光量:ライン/スペース=20/20μmの画線が、
現像後しっかりした硬化膜になる最低露光量。Organic solvent content of Examples 1 to 3 and Comparative Examples 1 and 2, peeling degree of negative film after exposure to negative film, exposure amount, wash-out development of unexposed area with weak alkali, chlorination after water washing Etching removal of copper foil with ferric iron,
The peeling of the cured coating film after exposure was examined. Table 1 shows the results. In Table 1, the exposure amount: line / space = 20/20 μm
The minimum exposure that gives a solid cured film after development.
【0055】現像:30℃で1%炭酸ソーダ溶液を2分
間スプレー後の未露光部の洗い出し後の状態。Development: A state after washing out an unexposed area after spraying a 1% sodium carbonate solution at 30 ° C. for 2 minutes.
【0056】エッチング処理:露光、現像、水洗後、5
0℃塩化第二鉄/塩酸エッチング液を3分間スプレー後
のライン/スペース=50/50μmの画線の状態。Etching treatment: After exposure, development and washing with water, 5
Line / space = 50/50 μm image line after spraying ferric chloride / hydrochloric acid etching solution at 0 ° C. for 3 minutes.
【0057】硬化膜の剥離:50℃、1%NaOH溶液
を3分間スプレー後の硬化膜の剥離状態。Peeling of the cured film: The peeled state of the cured film after spraying 1% NaOH solution at 50 ° C. for 3 minutes.
【0058】[0058]
【表1】 [Table 1]
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成7年11月28日[Submission date] November 28, 1995
【手続補正1】[Procedure amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】0035[Correction target item name] 0035
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【0035】(2)プリント配線板用水性フォトレジス
ト組成物の製造 (1)で得られた重合性不飽和基含有水性エマルション
270部(固形分130部)をディスパーで撹拌しなが
らポリエチレングリコール(数平均分子量200)ジア
クリレート20部を添加し、続いて光重合開始剤である
2−メチル−1−[4−(メチルチオ)フェニル]−2
−モルホリノ−プロパノン−1(チバガイギー社製、商
品名イルガキュアー907)5部及びジエチルチオキサ
ントン2部をプロピレングリコールモノメチルエーテル
10部に溶解した溶液を添加してプリント配線板用水性
フォトレジスト組成物を製造した。このものの有機溶剤
含有量は3.3%であった。(2) Production of aqueous photoresist composition for printed wiring board 270 parts (solid content 130 parts) of the polymerizable unsaturated group-containing aqueous emulsion obtained in (1) was stirred with a disper and polyethylene glycol 20 parts of an average molecular weight of 200) diacrylate was added, followed by photopolymerization initiator 2-methyl-1- [4- (methylthio) phenyl] -2.
-Morpholino-propanone-1 (manufactured by Ciba-Geigy, trade name Irgacure 907) and a solution of 2 parts of diethylthioxanthone dissolved in 10 parts of propylene glycol monomethyl ether were added to produce an aqueous photoresist composition for printed wiring boards. did. The organic solvent content of this product was 3.3%.
【手続補正2】[Procedure amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】0039[Correction target item name] 0039
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【0039】実施例3 (1)重合性不飽和基含有水性エマルションの製造 2L4つ口フラスコ中で、水600部にドデシルベンゼ
ンスルホン酸ソーダ1部を溶解し、次にアクリルアミド
50部を加えてよく撹拌して泡立て、その中に、スチレ
ン75部、ブチルアクリレート300部、メチルメタク
リレート25部、アクリル酸50部およびドデシルメル
カプタン1部のモノマー混合溶液を加えて乳化し、エマ
ルションとした。このエマルションを70℃に加熱し、
窒素気流下で滴下ロートから過硫酸アンモニウム3%水
溶液100部を2時間かけて滴下し、乳化重合を行なっ
た。その後、残存する重合開始剤を潰すため温度を90
℃にして4時間保持した。その後、ジ−t−ブチルメチ
ルフェノール0.1部を溶解したグリシジルメタクリレ
ート50部及びテトラメチルアンモニウムクロライド5
部を加えて同温度で約3時間保持したところ、エポキシ
基は完全に消滅した。最終的な酸価は46mg−KOH
/gであり、エポキシ基の約70%が反応していた。こ
のものの固形分濃度は44%であり、粒子径は約0.2
μmであった。 Example 3 (1) Preparation of Polymerizable Unsaturated Group-Containing Aqueous Emulsion In a 2 L four-necked flask, 600 parts of water was dissolved in 1 part of sodium dodecylbenzenesulfonate, and then 50 parts of acrylamide may be added. The mixture was stirred and foamed, and a monomer mixed solution of 75 parts of styrene, 300 parts of butyl acrylate, 25 parts of methyl methacrylate, 50 parts of acrylic acid and 1 part of dodecyl mercaptan was added and emulsified to obtain an emulsion. Heat this emulsion to 70 ° C,
Under nitrogen stream, 100 parts of 3% ammonium persulfate aqueous solution was added dropwise from a dropping funnel over 2 hours to carry out emulsion polymerization. Then, the temperature is adjusted to 90 to crush the remaining polymerization initiator.
It was kept at 4 ° C for 4 hours. Then, 50 parts of glycidyl methacrylate and 0.1 parts of tetramethylammonium chloride in which 0.1 part of di-t-butylmethylphenol was dissolved.
When parts were added and the mixture was kept at the same temperature for about 3 hours, the epoxy groups disappeared completely. Final acid value is 46 mg-KOH
/ G, and about 70% of the epoxy groups had reacted. The solid content concentration of this product was 44%, and the particle size was about 0.2.
μm.
【手続補正3】[Procedure 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】0049[Correction target item name] 0049
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【0049】比較例2 (1)高酸価水性エマルションの製造 2L4つ口フラスコ中で、水600部にドデシルベンゼ
ンスルホン酸ソーダ1部を溶解し、よく撹拌して泡立
て、その中に、スチレン75部、ブチルアクリレート3
00部、メチルメタクリレート75部、アクリル酸50
部およびドデシルメルカプタン1部のモノマー混合溶液
を加えて乳化し、エマルションとした。このエマルショ
ンを70℃に加熱し、窒素気流下で滴下ロートから過硫
酸アンモニウム3%水溶液100部を2時間かけて滴下
し、乳化重合を行なった。その後、残存する重合開始剤
を潰すため温度を90℃にして4時間保持した。このも
のの酸価は78mg−KOH/gであり、固形分濃度は
42%であり、粒子径は約0.2μmであった。 Comparative Example 2 (1) Production of High Acid Value Aqueous Emulsion In a 2 L four-necked flask, 1 part of sodium dodecylbenzene sulfonate was dissolved in 600 parts of water, and the mixture was well stirred to foam styrene 75 therein. Part, butyl acrylate 3
00 parts, methyl methacrylate 75 parts, acrylic acid 50
Part and a monomer mixed solution of 1 part of dodecyl mercaptan were added and emulsified to obtain an emulsion. This emulsion was heated to 70 ° C., and 100 parts of a 3% ammonium persulfate aqueous solution was added dropwise from a dropping funnel under a nitrogen stream over 2 hours to carry out emulsion polymerization. Then, the temperature was raised to 90 ° C. and held for 4 hours in order to crush the remaining polymerization initiator. The acid value of this product was 78 mg-KOH / g, the solid content concentration was 42%, and the particle diameter was about 0.2 μm.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 吉川 裕 神奈川県平塚市東八幡4丁目17番1号 関 西ペイント株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroshi Yoshikawa 4-17-1, Higashi-Hachiman, Hiratsuka-shi, Kanagawa Kansai Paint Co., Ltd.
Claims (4)
子中に重合性不飽和基及びグリシジル基を有する化合物
を付加させてなるアルカリ現像可能な重合性不飽和基含
有水性エマルションと光重合開始剤とを含むことを特徴
とするプリント配線板用水性フォトレジスト組成物。1. An alkali-developable polymerizable unsaturated group-containing aqueous emulsion obtained by adding a compound having a polymerizable unsaturated group and a glycidyl group in one molecule to an aqueous emulsion having an acid group, and a photopolymerization initiator. An aqueous photoresist composition for a printed wiring board, comprising:
ョンに、1分子中に重合性不飽和基及びグリシジル基を
有する化合物を付加させてなるアルカリ現像可能な重合
性不飽和基含有水性エマルションと光重合開始剤とを含
むことを特徴とするプリント配線板用水性フォトレジス
ト組成物。2. An alkali-developable polymerizable unsaturated group-containing aqueous emulsion obtained by adding a compound having a polymerizable unsaturated group and a glycidyl group in one molecule to an aqueous emulsion having an acid group and an amide group, and an optical emulsion. A water-based photoresist composition for a printed wiring board, which comprises a polymerization initiator.
あるいは溶解してなることを特徴とする請求項1又は2
記載のプリント配線板用水性フォトレジスト組成物。3. A compound having a polymerizable unsaturated group-containing compound dispersed or dissolved therein.
The water-based photoresist composition for a printed wiring board as described above.
属の表面に、請求項1乃至3記載の水性フォトレジスト
組成物を塗装して乾燥することにより平滑な塗膜を形成
する工程; (b)該平滑な塗膜をパターンマスクを介して活性光線
で硬化する工程; (c)アルカリ性現像液で該硬化塗膜の未露光部を除去
してパターンを形成する工程; (d)露出した電導性被膜または金属をエッチングによ
り除去する工程;及び (e)パターン上の塗膜を除去する工程 からなることを特徴とするプリント配線板の製造方法。4. (a) A step of forming a smooth coating film by coating the aqueous photoresist composition according to any one of claims 1 to 3 on a surface of a substrate or a metal having a conductive coating film and drying the same. b) a step of curing the smooth coating film with an actinic ray through a pattern mask; (c) a step of removing an unexposed portion of the cured coating film with an alkaline developer to form a pattern; (d) exposing A method for producing a printed wiring board, comprising: a step of removing the conductive coating film or metal by etching; and (e) a step of removing the coating film on the pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23504095A JPH0980748A (en) | 1995-09-13 | 1995-09-13 | Aqueous photoresist composition for printed circuit board and production of printed circuit board using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23504095A JPH0980748A (en) | 1995-09-13 | 1995-09-13 | Aqueous photoresist composition for printed circuit board and production of printed circuit board using the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0980748A true JPH0980748A (en) | 1997-03-28 |
Family
ID=16980197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23504095A Pending JPH0980748A (en) | 1995-09-13 | 1995-09-13 | Aqueous photoresist composition for printed circuit board and production of printed circuit board using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0980748A (en) |
-
1995
- 1995-09-13 JP JP23504095A patent/JPH0980748A/en active Pending
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