JPH0989656A - Condensed-beam power measuring device - Google Patents

Condensed-beam power measuring device

Info

Publication number
JPH0989656A
JPH0989656A JP24936195A JP24936195A JPH0989656A JP H0989656 A JPH0989656 A JP H0989656A JP 24936195 A JP24936195 A JP 24936195A JP 24936195 A JP24936195 A JP 24936195A JP H0989656 A JPH0989656 A JP H0989656A
Authority
JP
Japan
Prior art keywords
photosensor
focused beam
light
power
condensed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24936195A
Other languages
Japanese (ja)
Inventor
Yuji Chagi
勇自 茶木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP24936195A priority Critical patent/JPH0989656A/en
Publication of JPH0989656A publication Critical patent/JPH0989656A/en
Pending legal-status Critical Current

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  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Optical Head (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a power measuring device in which an individual difference by every measuring operation or by a measuring operator is eliminated, which is not influenced by a position of incidence and an angle of incidence on a photosensor at a photodetection part and by a disturbance cause such as external light or the like other than a condensed beam and by which head radiation power can be measured precisely and stably. SOLUTION: A condensed-beam power measuring device is constituted of a photodetection part 5 which is composed of a photosensor 3 used to receive a condensed beam 2 radiated from an objective lens 1 and of a photosensor- fixation member 4 formed of a light-shielding member used to shield external light to the photosensor 3 to be fixed in a desired position perpendicularly to the axis of the objective lens 1 and of a power computing part 6 which computes power on the basis of a detection signal (a) which is output by the photodetection part 5. In a measuring operation, the photodetection part 5 is attached to an actuator enclosure 7 by a screw 8, and the photosensor 3 receives only the condensed beam 2 in an always desired condensed-beam measuring part 9 in a state that the photosensor 3 is shielded from the external light.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、集光ビームパワー
測定器に関し、特に光ディスク原盤露光装置の光ヘッド
から出射される出射パワーを正確に測定するための集光
ビームパワー測定器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a focused beam power measuring device, and more particularly to a focused beam power measuring device for accurately measuring the outgoing power emitted from an optical head of an optical disk master exposure apparatus.

【0002】[0002]

【従来の技術】従来、この種の集光ビームパワー測定器
では、光ディスク原盤露光装置の光ヘッドから出射され
る集光ビームのパワーは、測定者が手で光センサー受光
部をヘッドの対物レンズ直下まで移動して受光させ、集
光ビームパワーの測定を行っていた。
2. Description of the Related Art Conventionally, in this type of focused beam power measuring device, the power of a focused beam emitted from an optical head of an optical disk master exposure apparatus is measured by a measurer by hand with an optical sensor light receiving portion of the head objective lens. The power of the focused beam was measured by moving to just below and receiving the light.

【0003】図2は、従来の集光ビームパワー測定器の
一例を示す構成図である。
FIG. 2 is a block diagram showing an example of a conventional focused beam power measuring device.

【0004】従来の集光ビームパワー測定器は、図2に
示すように、対物レンズ11で集光された集光ビーム1
2を受光する光センサー13と、この光センサー13か
ら出力する検出信号bを入力し集光ビームパワーを算出
するパワー算出部16とから構成される。そして、集光
ビームパワーを測定する際は、測定者が光センサー13
を対物レンズ11へできるだけ近づけて集光ビームパワ
ーの測定を行う。
As shown in FIG. 2, the conventional focused beam power measuring device has a focused beam 1 focused by an objective lens 11.
It is composed of an optical sensor 13 that receives 2 and a power calculation unit 16 that receives the detection signal b output from the optical sensor 13 and calculates the focused beam power. When measuring the focused beam power, the measurer uses the optical sensor 13
To the objective lens 11 as close as possible to measure the focused beam power.

【0005】[0005]

【発明が解決しようとする課題】この従来の集光ビーム
パワー測定器では、測定者が手で集光ビームパワー測定
器の光センサーの位置を調整するため、測定の都度また
は測定者の個人差によって光センサーへの集光ビームの
入射位置や入射角度が変化し、光センサーの受光感度に
“ばらつき”が生じたり、さらに、集光ビーム以外の外
光等の外乱要因によって、正確かつ安定して集光ビーム
パワーの測定ができないという欠点があった。
In this conventional focused beam power measuring instrument, the operator manually adjusts the position of the optical sensor of the focused beam power measuring instrument. The incident position and incident angle of the focused beam on the optical sensor may change, causing “variability” in the light receiving sensitivity of the optical sensor. Furthermore, it is accurate and stable due to disturbance factors such as external light other than the focused beam. However, there is a drawback that the focused beam power cannot be measured.

【0006】[0006]

【課題を解決するための手段】本発明は、被測定機器の
対物レンズから出射される集光ビームのパワーを測定す
る集光ビームパワー測定器であって、前記対物レンズか
ら出射される集光ビームを受光する光センサーと、この
光センサーへの外光を遮る遮光部材と、前記光センサー
を前記対物レンズの軸に垂直に所望の位置に固定する光
センサー固定部材とから成る光検出部と、この光検出部
を被測定機器に取り付ける取り付け取付け手段とを備え
ることを特徴とする。
The present invention is a focused beam power measuring device for measuring the power of a focused beam emitted from an objective lens of a device to be measured, wherein the focused beam emitted from the objective lens is focused. A light detection unit including a light sensor that receives a beam, a light blocking member that blocks outside light to the light sensor, and a light sensor fixing member that fixes the light sensor at a desired position perpendicular to the axis of the objective lens. A mounting means for mounting the photodetection unit on the device under test is provided.

【0007】[0007]

【発明の実施の形態】次に、本発明について図面を参照
して説明する。
Next, the present invention will be described with reference to the drawings.

【0008】図1は、本発明の集光ビームパワー測定器
の一実施の形態を示す断面図である。本発明の集光ビー
ムパワー測定器は、図1に示すように、光検出部5とパ
ワー算出部6とから成り、また光検出部5は、対物レン
ズ1から出射される集光ビーム2を受光する光センサー
3と、対物レンズ1の軸に垂直に所望の位置に固定する
光検光センサー3への外光を遮る遮光部材でできた光セ
ンサー固定部材4とから構成されている、そして、パワ
ー算出部6は、光検出部5の出力する検出信号aからパ
ワーを算出する。
FIG. 1 is a sectional view showing an embodiment of the focused beam power measuring device of the present invention. As shown in FIG. 1, the focused beam power measuring device of the present invention comprises a light detection unit 5 and a power calculation unit 6, and the light detection unit 5 detects the focused beam 2 emitted from the objective lens 1. It is composed of a light sensor 3 for receiving light, and a light sensor fixing member 4 made of a light shielding member for blocking outside light to the light detecting sensor 3 fixed at a desired position perpendicular to the axis of the objective lens 1, and The power calculator 6 calculates the power from the detection signal a output from the photodetector 5.

【0009】ここで、本発明の集光ビームパワー測定器
を用いて、集光ビームパワーを測定するには、光検出部
5が光ディスク原盤露光装置のアクチュエータ匡体7に
ねじ8で取り付けられる。そして、光センサー3は、外
光を遮光された状態で常に所望する集光ビーム測定ポイ
ント9で集光ビーム2のみを受光する。
Here, in order to measure the focused beam power using the focused beam power measuring device of the present invention, the photodetection section 5 is attached to the actuator casing 7 of the optical disk master exposure device with the screw 8. Then, the optical sensor 3 always receives only the focused beam 2 at the desired focused beam measurement point 9 while being shielded from the external light.

【0010】光検出部5は、光センサー3で受光した集
光ビーム2の検出信号aとして出力する。、パワー算出
部6は、入力した検出信号aを基に集光ビームパワーを
算出する。
The photodetector 5 outputs the detection signal a of the condensed beam 2 received by the photosensor 3. The power calculator 6 calculates the focused beam power based on the input detection signal a.

【0011】[0011]

【発明の効果】以上説明したように、本発明の集光ビー
ムパワー測定器は、外光を遮って常に所望の測定ポイン
トで集光ビームのみを光センサーで受光することによ
り、測定の都度または測定者の個人差による光センサー
への集光ビームの入射位置や入射角度の変化による受光
感度の“ばらつき”や光センサーへの外光による外乱要
因に影響されず、常に正確かつ安定して集光ビームパワ
ーが測定できるという効果がある。
As described above, the focused beam power measuring device of the present invention interrupts the external light and always receives only the focused beam at the desired measurement point by the optical sensor, so that Accurate and stable collection without being affected by “variation” in the light receiving sensitivity due to changes in the incident position and incident angle of the focused beam on the optical sensor due to individual differences of the measurer and the disturbance factors due to external light on the optical sensor. There is an effect that the light beam power can be measured.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の集光ビームパワー測定器の一実施例を
示す断面図である。
FIG. 1 is a sectional view showing an embodiment of a focused beam power measuring device of the present invention.

【図2】従来の集光ビームパワー測定器の一例を示す構
成図である。
FIG. 2 is a configuration diagram showing an example of a conventional focused beam power measuring device.

【符号の説明】[Explanation of symbols]

1,11 対物レンズ 2,12 集光ビーム 3,13 光センサー 4 光センサー固定部材 5 光検出部 6,16 パワー算出部 7 アクチュエータ匡体 8 ねじ 9 集光ビーム測定ポイント a,b 検出信号 1,11 Objective lens 2,12 Focused beam 3,13 Photosensor 4 Photosensor fixing member 5 Photodetector 6,16 Power calculator 7 Actuator housing 8 Screw 9 Focused beam measurement point a, b Detection signal

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 被測定機器の対物レンズから出射される
集光ビームのパワーを測定する集光ビームパワー測定器
であって、 前記対物レンズから出射される集光ビームを受光する光
センサーと、この光センサーへの外光を遮る遮光部材
と、前記光センサーを前記対物レンズの軸に垂直に所望
の位置に固定する光センサー固定部材とから成る光検出
部と、この光検出部を被測定機器に取り付ける取り付け
取付け手段とを備えることを特徴とする集光ビームパワ
ー測定器。
1. A focused beam power measuring device for measuring the power of a focused beam emitted from an objective lens of a device under test, the optical sensor receiving the focused beam emitted from the objective lens, A light detecting section comprising a light blocking member for blocking outside light to the light sensor and a light sensor fixing member for fixing the light sensor at a desired position perpendicular to the axis of the objective lens, and the light detecting section to be measured. A focused beam power measuring instrument, comprising: mounting means for mounting on a device.
JP24936195A 1995-09-27 1995-09-27 Condensed-beam power measuring device Pending JPH0989656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24936195A JPH0989656A (en) 1995-09-27 1995-09-27 Condensed-beam power measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24936195A JPH0989656A (en) 1995-09-27 1995-09-27 Condensed-beam power measuring device

Publications (1)

Publication Number Publication Date
JPH0989656A true JPH0989656A (en) 1997-04-04

Family

ID=17191887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24936195A Pending JPH0989656A (en) 1995-09-27 1995-09-27 Condensed-beam power measuring device

Country Status (1)

Country Link
JP (1) JPH0989656A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0442741U (en) * 1990-08-07 1992-04-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0442741U (en) * 1990-08-07 1992-04-10

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