JPH0993474A - Image pickup device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain the image pickup device not affected even by a prescribed atmosphere by arranging an enclosed package for a measurement case and picking up an image within the measurement case so as to pick up the image in close to the measurement object thereby attaining image pickup with high resolution. SOLUTION: An enclosed case 4 is arranged in a measurement case 3 of an image pickup device 1 and an image is picked up in the interior of the measurement case 3. The enclosed case 4 is not affected by a vacuum of the measurement case 3 or a prescribed atmosphere because of the enclosed environment and at least components of an optical system of the image pickup device are contained in the enclosed case 4. Since a display device and a recording circuit section are provided to the outside of the measurement case 3, the measurement object in the measurement case 3 is piked up in the measurement case 3 and observed by an external display device 16 or stored in a recording circuit section 15. Pipes 21, 22 connecting to the enclosed case 4 are provided between the enclosed case 4 and the outside of the measurement case 3, and the suction pipe 21 is provided with a valve 23 and the exhaust pipe 22 is provided with an exhaust valve.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention stores a measuring object inside a vacuum measuring container or a measuring container filled with an atmosphere different from the atmosphere, for example, vapor deposition, heat treatment, X-ray emission, electron beam. The present invention relates to an imaging device capable of taking an image of a measurement target portion in a measurement container when performing irradiation or the like and measuring the measurement target portion during the process or at the end thereof.

[0002]

2. Description of the Related Art Conventionally, when a certain object to be measured is subjected to vapor deposition, heat treatment, X-ray radiation, electron beam irradiation, etc., it is filled with an atmosphere different from a vacuum container or an atmosphere in order to avoid oxidation or obtain a necessary atmospheric pressure. It is known that the measurement target part is housed inside the container.

The measuring container is generally provided with a window for observing the inside, and when the vapor deposition, the heat treatment, the X-ray emission, the electron beam irradiation, etc. are carried out, the process or the end thereof is measured. The target part is observed through the window, and if necessary, a CCD (charge coupled de
Vice: Charge coupled device) A camera or the like is used to image a measurement target portion. The CCD camera is C
It is a camera that uses a CD in combination with a photodetector as a scanning solid-state imaging device.

[0004]

When the object to be measured in the measuring container is imaged by a CCD camera or the like, as described above, the image is taken from the window of the measuring container.
Even if the camera is brought close to the window part, there is a limit in photographing the inside. That is, not only when the lens of the CCD camera is brought into contact with the window to take an image, but also when a wide-angle lens is used, there is no change in that the image is taken from the outside of the container, and the wide-angle lens is used. In that case, the wide angle causes a mismatch with the regular image, and therefore, there is a disadvantage that post-processing such as correction is necessary for accuracy.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an image pickup apparatus capable of picking up an image of a measurement target portion in a measuring container when measuring the measurement target portion. To do.

[0006]

The invention described in the first claim of the present application provides a measuring container for vacuum measurement or a measuring container filled with an atmosphere different from the atmosphere, in which a measuring object portion is housed, and the measuring container. Imaging of a configuration having a closed container arranged in a container, and an image pickup mechanism provided with a display device or a recording circuit unit outside the measurement container while the closed container is provided with at least optical system components. It is a device.

As described above, the closed container is arranged in the measuring container and the image is taken inside the measuring container. Therefore, as compared with the conventional case, the image should be taken closer to the object to be measured. Therefore, high resolution imaging can be performed. That is, since the closed container is closed, it is not affected by the vacuum or the predetermined atmosphere in the measurement container, and the closed container is provided with at least the components of the optical system of the image pickup mechanism. Since it is equipped with a display device or recording device outside the measuring container,
The object to be measured in the measuring container can be imaged in the measuring container and can be viewed on an external display device or stored in the recording circuit unit.

The invention described in claim 2 of the present application is the image pickup device according to claim 1, wherein a pipe is provided for connecting the closed container and the outside of the measuring container.

According to this structure, when the inside of the measuring container is at a high temperature or a low temperature, a cooling or heating medium such as cooling or heating air or cooling or heating liquid is introduced into the closed container through the pipe. Therefore, it is possible to protect components having poor high temperature resistance or low temperature resistance, such as components of the optical system of the image pickup mechanism.

According to a third aspect of the present invention, in the image pickup device according to the first aspect, a thermometer or a temperature display tool for measuring the temperature in the closed container is provided in the closed container. Is.

With this configuration, when the temperature inside the measuring container is high or low, the temperature inside the closed container can be known by the thermometer or the temperature display tool, and when the temperature exceeds the heat resistant temperature. By taking measures such as stopping the measurement, it is possible to protect the components having poor high temperature resistance or low temperature resistance by the components of the optical system of the image pickup mechanism. In addition, for example, if a seal type one whose seal color changes with temperature is used as the temperature indicating tool,
When the closed container is taken out of the measurement container after the measurement is completed, the temperature of the closed container can be determined by the measurement. When a manufacturer of an airtight container equipped with an image pickup mechanism sets the guarantee temperature of the airtight container, whether or not the temperature is exceeded can be clearly seen by using the seal type temperature display tool.

According to a fourth aspect of the present invention, in the image pickup device according to the first aspect of the invention, the closed container is movably provided.

When the closed container is provided so as to be movable, the image pickup mechanism provided therein, in particular, the components of the optical system can be moved, whereby the object to be measured can be imaged from different positions and different angles. Furthermore, accurate and high-resolution imaging can be performed.

The fifth aspect of the present invention is the image pickup device according to the first aspect of the invention, wherein the components of the optical system provided in the closed container are movably provided.

When the components of the optical system of the image pickup mechanism are provided so as to be movable, even if the closed container is fixed, the object to be measured is placed at a different position as in the case of the fourth aspect. , Can be imaged from different angles.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below.

FIG. 1 is an image pickup apparatus showing a specific example of the present invention. The image pickup apparatus 1 of this example includes a measurement container 3 in which a measurement target portion 2 is housed, a closed container 4 arranged in the measurement container 3, and a component of at least an optical system in the closed container 4. And the measuring container 3
Mechanism 10 including a display device or a recording device outside the camera
And an imaging device having a configuration including:

The measuring container 3 is a container filled with a vacuum or an atmosphere different from the atmosphere, and a plurality of container components 3a and 3b are hermetically connected via an O-ring 3c.

Similarly, in the closed container 4 arranged in the measuring container 3, a plurality of container components 4a and 4b are O-rings 4.
It is hermetically connected via c.

Further, in this example, the closed container 4 is fixedly installed on the measuring container 3 by the supporting member 5.

In the case of this example, the image pickup mechanism 10 uses a CCD camera. That is, the components of the optical system, such as the lens 11, the optical filter and the deposition-preventive shutter (not shown), the image sensor 12 and the like, the drive circuit that gives the drive signal to the image sensor 12, and the image sensor 12 are sent out through the amplifier. It has a circuit section 13 having a signal processing circuit for receiving the output signal, a power supply circuit section 14, a recording circuit section 15 and a display device 16 having a monitor.

As described above, in this example, at least the lens 11 and the image sensor 12 are provided in the closed container 4.
In addition to the components of the optical system such as the above, the circuit section 13 is further installed in the closed circuit 4. In addition, the circuit unit 13
The lead wire from is led to the measuring container 3, and is connected to the power supply circuit unit 14, the recording circuit unit 15, and the display device 16 outside the container.

As described above, in the image pickup apparatus 1 of this embodiment, the closed container 4 is arranged in the measuring container 3 to take an image inside the measuring container 3. Therefore, compared with the conventional case. Since the measurement target portion 2 can be imaged in close proximity, high resolution imaging can be performed.
That is, since the closed container 4 is closed, it is not affected by the vacuum or the predetermined atmosphere in the measurement container 3, and the closed container 4 is provided with at least the components of the optical system of the imaging mechanism. Cage and measuring container 3
Since a display device and a recording circuit unit are provided outside the device, an object to be measured in the measuring container can be imaged in the measuring container, and this can be viewed on an external display device 16 and stored in the recording circuit unit 15. You can

Further, in FIG. 1, a pipe 2 reaching the sealed container 4 is provided between the sealed container 4 and the outside of the measuring container 3.
1 and 22 are provided. The intake pipe 21 is provided with a valve 23, and the exhaust pipe 22 is also provided with an exhaust valve (not shown).

According to this structure, when the inside of the measuring container 3 is at a high temperature or a low temperature, cooling or warming air or cooling or warming liquid, etc., through the pipes 21 and 22,
A cooling or heating medium can be sent into the closed container 4,
This makes it possible to protect components having poor high-temperature performance or low-temperature performance, such as components of the optical system of the image pickup mechanism.

Further, in this example, a thermometer 24 for measuring the temperature in the closed container 4 and a temperature display tool 26 are provided in the closed container 4. The thermometer 24 is electrically connected to the circuit unit 13 and the recording circuit unit 15 via the lead wire 25. Further, as the temperature display tool 26, for example, a seal type one whose seal color changes with temperature may be used.

When the thermometer 24 and the temperature indicator 26 are used in this way, the temperature in the closed container 4 is known by the thermometer 24 and the temperature indicator 26 when the temperature inside the measuring container 3 is high or low. And protect the components with poor high temperature resistance or low temperature resistance in the components of the optical system of the image pickup mechanism by taking measures such as stopping the measurement when the temperature exceeds the heat resistant temperature. You can Further, when the temperature indicator 26 of the seal type whose seal color changes depending on the temperature is used, when the closed container 4 is taken out from the measurement container 3 after the measurement, the inside of the closed container is determined by the measurement. It turns out that the temperature was about the same.
When a manufacturer of an airtight container equipped with an image pickup mechanism sets the guarantee temperature of the airtight container, whether or not the temperature is exceeded can be clearly seen by using the seal type temperature display tool.

In FIG. 1, the closed container 4 is described as an example in which the closed container 4 is fixedly installed on the measuring container 3 by the support member 5, but by using the movable member for the support member 5. The closed container 4 may be movably provided. That is, when the closed container 4 is provided so as to be movable, the imaging mechanism provided in the closed container 4, in particular, the components of the optical system can be moved, whereby the measurement target 2
Can be imaged from different positions and different angles, and further accurate and high-resolution imaging can be performed.

FIG. 2 shows an image pickup apparatus according to another example of the present invention. In the case of this example, the hermetically sealed container 4 is provided with the components of the optical system of the image pickup mechanism (here, the lens 11 and the image sensor 12). Is installed, and the container components 3b, 3 of the measuring container 3 are installed.
The support member 5 is provided on the b via the bellows 6. The support member 5 can grasp the base portion 5a of the support member 5 from the outside, and since the support member 5 is attached to the bellows 6, by moving the base portion 5a, the optical system such as the lens 11 of the closed container 4 and the imaging mechanism can be moved. The system components can be freely moved within the measuring container 3. The amplifier 17 is provided with a pipe 18 and is fixed so that the atmosphere can flow therethrough.

In the case of the example shown in FIG. 2, a display device and a recording circuit section are provided outside the measuring container 3 as in the previous example.
In this way, the measuring object 2 in the measuring container 3 can be imaged in the measuring container and can be viewed on the external display device 16 or stored in the recording circuit unit 15. Therefore, as compared with the conventional case, since it is possible to capture an image closer to the measurement target portion 2, it is possible to perform high-resolution imaging.

When the components of the optical system of the image pickup mechanism are movably provided, the object to be measured can be imaged from different positions and different angles even if the closed container is fixed. It is a thing.

Further, when the components of the optical system of the image pickup mechanism are movably provided as in the present example, a transport mechanism having an appropriate structure suitable for a vacuum or a predetermined atmosphere can be used.

Further, in each of the above-mentioned examples, the image pickup mechanism has a CC.
Although the description has been made using the D camera, the camera can be housed in an airtight container, so the present invention is not limited to this, and other TVs, video cameras, infrared cameras, and the like can be used as needed. Is.

[0034]

The invention described in the first claim of the present application has a measuring container having a measuring object inside, which is a vacuum measuring container or a measuring container filled with an atmosphere different from the atmosphere, and is arranged in the measuring container. And an image pickup mechanism that includes a display device or a recording circuit unit outside the measurement container while the closed container is provided with at least optical system components.

As described above, the closed container is arranged in the measuring container and an image is taken inside the measuring container. Therefore, as compared with the conventional case, an image should be taken closer to the object to be measured. Therefore, high resolution imaging can be performed. That is, since the closed container is closed, it is not affected by the vacuum or the predetermined atmosphere in the measurement container, and the closed container is provided with at least the components of the optical system of the imaging mechanism, and Since it is equipped with a display device or recording device outside the measuring container,
The object to be measured in the measuring container can be imaged in the measuring container and can be viewed on an external display device or stored in the recording circuit unit.

The invention described in the second aspect of the present invention is the image pickup device according to the invention of the first aspect, in which a pipe is provided for connecting the closed container and the outside of the measuring container.

According to this structure, when the inside of the measuring container is at a high temperature or a low temperature, a cooling or heating medium such as cooling or heating air or cooling or heating liquid is introduced into the closed container through the pipe. Therefore, it is possible to protect components having poor high temperature resistance or low temperature resistance, such as components of the optical system of the image pickup mechanism.

According to a third aspect of the present invention, in the image pickup device according to the first aspect, a thermometer or a temperature display tool for measuring the temperature in the closed container is provided in the closed container. Is.

With this configuration, when the temperature inside the measuring container is high or low, the temperature inside the closed container can be known by the thermometer or the temperature display tool, and when the temperature exceeds the heat resistant temperature. By taking measures such as stopping the measurement, it is possible to protect the components having poor high temperature resistance or low temperature resistance by the components of the optical system of the image pickup mechanism. In addition, for example, if a seal type one whose seal color changes with temperature is used as the temperature indicating tool,
When the closed container is taken out of the measurement container after the measurement is completed, the temperature of the closed container can be determined by the measurement. When a manufacturer of an airtight container equipped with an image pickup mechanism sets the guarantee temperature of the airtight container, whether or not the temperature is exceeded can be clearly seen by using the seal type temperature display tool.

According to a fourth aspect of the present invention, in the image pickup device according to the first aspect of the invention, the closed container is movably provided.

When the closed container is provided so as to be movable, the image pickup mechanism provided in the closed container, in particular, the components of the optical system can be moved so that the object to be measured can be imaged from different positions and different angles. Furthermore, accurate and high-resolution imaging can be performed.

The invention described in claim 5 of the present application is the image pickup device according to claim 1, wherein the components of the optical system provided in the closed container are movably provided.

When the components of the optical system of the image pickup mechanism are movably provided, even if the closed container is fixed, the measurement object is placed at a different position, as in the case of the fourth aspect. , Can be imaged from different angles.

As described above, according to the present invention, it is possible to obtain an image pickup apparatus capable of picking up an image of the measurement target portion in the measurement container when measuring the measurement target portion.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an image pickup apparatus according to the present invention.

FIG. 2 is a configuration diagram showing an image pickup apparatus according to another example of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Imaging device 2 Measurement object part 3 Measuring container 3a Container structure 3b Container structure 3c O-ring 4 Closed container 4a Container structure 4b Container structure 4c O-ring 5 Support member 5a Base 6 Bellows 10 Imaging mechanism 11 Lens 12 image Sensor 13 Circuit part 14 Power supply circuit part 15 Recording circuit part 16 Display device 17 Amplifier 18 Pipe 21 Intake pipe 22 Exhaust pipe 23 Valve 24 Thermometer 25 Lead wire 26 Temperature display tool

Claims (5)

[Claims] 1. A vacuum measurement container having a measurement target portion housed therein or a measurement container filled with an atmosphere different from the atmosphere, a closed container arranged in the measurement container, and at least the closed container. An image pickup apparatus comprising: an optical system component; and an image pickup mechanism including a display device or a recording circuit unit outside the measuring container. 2. The image pickup apparatus according to claim 1, further comprising a pipe that connects the closed container and the outside of the measurement container. 3. The image pickup apparatus according to claim 1, wherein a thermometer or a temperature display tool for measuring the temperature in the container is provided in the closed container. 4. The image pickup apparatus according to claim 1, wherein the closed container is movably provided. 5. The image pickup apparatus according to claim 1, wherein constituent parts of an optical system provided in the closed container are movably provided.