JPH0997716A - Inductor conductor - Google Patents

Abstract

(57) Abstract: To provide an inductor conductor which can surely adjust an inductor component and can be miniaturized. SOLUTION: On one side of the inductor conductor film 2, a plurality of horizontal fine line conductors 31a, 31b ... And a plurality of vertical cutting fine line conductors 32a, 32b .. The pattern 3 is formed. The thin wire conductors 32a, 32b for vertical cutting existing between the inductor conductor film 2 and the horizontal wire conductor 31a are cut, and the thin wire conductor for vertical cutting existing between the horizontal wire conductor 31a and the horizontal wire conductor 31b. Coarse adjustment and fine adjustment are performed by appropriately selecting cutting of 32a, 32b, ....

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inductor conductor film for deriving an inductor component in a distributed constant or a lumped constant such as a strip line, a microstrip line, a coil conductor used in a predetermined circuit.

[0002]

2. Description of the Related Art Conventionally, strip lines, microstrip lines and the like have been used in high frequency oscillation circuits to form a resonance circuit. In addition, such a line is generally referred to as an inductor conductor film hereinafter.

The resonance frequency (oscillation frequency) of such a resonance circuit is adjusted by adjusting the inductor component or capacitance component of the LC resonance in order to drive the frequency fluctuation generated in the manufacturing process to a predetermined resonance frequency according to the specifications. Is being done.

Here, regarding the object of adjustment, the capacitance value of the capacitance component is determined by the facing area of a pair of facing capacitance electrodes and the dielectric constant and thickness of the dielectric material interposed between them, and its structure is It has a substantially laminated structure. Therefore, when adjusting the capacitance component, the area of the capacitance electrode must be reduced, which is disadvantageous when the adjustment time is taken into consideration. On the other hand, since the inductor component is substantially determined by the conductor length of the inductor conductor film, the adjustment can be easily performed by cutting the inductor conductor film. In operation, the impedance component of the inductor conductor changes.

Such an inductor conductor is shown in FIG.
As shown in, the stub group 40 in which the plurality of short stub conductors 41 to 48 to be cut are connected in a ladder shape is arranged on one side of the inductor conductor film 2. The adjustment of the inductor component is performed by cutting a predetermined number of short stubs among the plurality of ladder-shaped short stub conductors 41 to 48. As the cutting method, laser irradiation is performed and scanning is performed in the direction of the arrow X. For example, while measuring the inductor value of the inductor conductor film and the resonance frequency of the resonance circuit, short stubs are sequentially arranged so that the inductor value and the resonance frequency become predetermined values. The conductor was cut.

In FIG. 5B, a plurality of short stub conductors 41 to 4 each having a relatively long conductor length are provided on one side of one end of the inductor conductor film 2 in order to perform highly accurate adjustment.
Ladder-like stub guide group 40 (rough adjustment stub) is formed of 8 and ladder-like stub guide group 50 including a plurality of short stub conductors 51 to 58 having a relatively short conductor length on the other side. (Fine adjustment stub) was placed.

Then, after cutting and adjusting the stub conductors 41 to 48 of the coarse adjustment stub 40 to an extent close to a predetermined inductor component or resonance frequency, the stub conductors 51 to 58 of the fine adjustment stub 50 are connected to the predetermined inductor. It was cut and adjusted so that the component and the resonance frequency were obtained.

[0008]

The inductor conductor film capable of performing the coarse adjustment and the fine adjustment of the inductor component shown in FIG. 5B includes the coarse adjustment stub 40 and the fine adjustment stub 50. Since they must be arranged side by side, the area occupied by the inductor conductor film on the insulating substrate increases.

Further, as shown in FIG. 5B, since the coarse adjustment stub 40 and the fine adjustment stub 50 which are cut by the laser trimming are separated from each other, the scanning distance of the laser trimming is increased, so that the control is performed. It will be very difficult.

The present invention has been devised in view of the above-mentioned problems, and an object thereof is to easily adjust the inductor component of the inductor conductor film by coarse adjustment and fine adjustment, and The inductor conductor can reduce the area occupied by the inductor conductor on the substrate.

[0011]

According to the present invention, there is formed an inductor conductor film having a predetermined conductor length on an insulating substrate, and a plurality of holes are vertically and horizontally arranged on one side of the inductor conductor film. Is an inductor conductor that is adhered and formed.

That is, the inductance adjusting pattern in which a large number of holes are arranged in a grid pattern in the vertical direction and the horizontal direction is formed by intersecting a plurality of horizontal fine line conductors and a plurality of vertical cutting fine line conductors, and has a mesh shape. It is a pattern.

[0013]

According to the present invention, the inductance adjusting pattern in which a large number of holes are arranged in a grid pattern is connected to one side of the inductor conductor film formed by superimposing the rough adjusting pattern and the fine adjusting pattern on each other.・ It is arranged. The adjustment with a large change rate of the inductor component (coarse adjustment) is performed by cutting the vertical cut thin wire conductor closest to the inductor conductor of the mesh pattern, and the adjustment with a small change rate of the inductor component (fine adjustment) is performed with the mesh pattern. This is accomplished by cutting a long vertical cutting wire conductor far from the inductor conductor. The cutting of the above-described coarsely-adjusted vertical-cutting fine-wire conductor means that the fine-adjusting vertical-cutting fine-wire conductor is cut at the same time.

That is, since the finely cut vertical fine line conductor is internally provided in the coarsely adjusted vertical fine line conductor,
Rough adjustment and fine adjustment can be performed with a mesh pattern.

Further, the area occupied by the inductor conductor film and the adjustment stub on the insulating substrate can be made smaller than that of the conventional one because it is not necessary to form the conventional fine adjustment stub group.

Therefore, the coarse adjustment and the fine adjustment of the inductor component can be performed with one pattern (mesh pattern), and the shape of the insulating substrate can be downsized.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION The inductor conductor of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a schematic view of an inductor substrate (substrate having an inductor conductor film formed thereon) according to the inductor conductor of the present invention.

In FIG. 1, 1 is alumina, BaTiO 3.
₃ , an insulating substrate made of a ceramic material containing TiO _2, etc., 2 an inductor conductor film, and 3 an inductance adjusting pattern (hereinafter referred to as a mesh pattern) in which a large number of holes are arranged in a grid pattern. . Here, the inductor conductor referred to in the present invention refers to one that derives a predetermined inductance component as a whole, including the inductor conductor film 2 and the mesh pattern 3.

The insulating substrate 1 is made of alumina, BaTiO ₃ ,
It is made of a ceramic material such as TiO ₂ .

The inductor conductor film 2 is in the form of a straight line having a predetermined length and a predetermined width, and both ends thereof are connected to, for example, predetermined wirings forming a resonance circuit.

The mesh pattern 3 is the inductor conductor film 2
Of the plurality of horizontal fine wire conductors 31a, 31 connected to one side of the inductor conductor film 2 in parallel with the inductor conductor film 2.
b, and a plurality of vertically cut fine wire conductors 32a, 32b, 32c, ... 32g arranged perpendicularly to the inductor conductor film 2. In the present invention, the first horizontal thin wire conductor is
It is the horizontal thin wire conductor 31a closest to the inductor conductive film 2, and the second horizontal thin wire conductor is a horizontal thin wire conductor arranged apart from the first horizontal thin wire conductor to the inductor conductive film 2. 31b.

The inductor conductor film 2 and the mesh pattern 3 are formed by screen-printing a conductive paste containing Ag or Cu as a main component in a predetermined shape and firing the paste in a predetermined atmosphere. When forming a ground potential conductor on the back surface of the insulating substrate 1 or another wiring pattern on the surface of the insulating substrate 1, the inductor conductor film 2 and the mesh pattern 3 can be formed in the same step.

In general, the inductor conductor film 2 and the mesh pattern 3 are formed by a thick film technique, so that some variation occurs depending on the conductor film thickness, pattern, etc., and it is practical to form the inductor value required. Difficult to
Subsequent adjustment work is required. Therefore, the inductor value due to the inductor conductor film 2 and the mesh pattern 3 in the initial state is set in advance so that the variation can be sufficiently absorbed and the inductor component is slightly lower than the desired inductor component.

The inductor substrate having such a structure is used, for example, in a resonance circuit section of a high frequency oscillation circuit. In FIG. 2, the voltage controlled oscillator (VCO) includes a resonant circuit section A including a microstrip line 2, a varicap diode, and a capacitor, a negative resistance circuit section B including an oscillating transistor, a resistor, a capacitor, and the like, and an amplifier. And an amplifier circuit section C composed of a transistor, a microstrip line, a resistor, a capacitor, and the like.

The inductor substrate is used as the microstrip line 2 of the resonator circuit section A described above.

Next, a method of adjusting the inductor component composed of the inductor conductor film 2 and the mesh pattern 3 formed on the insulating substrate 1 will be described. Specifically, the inductor component can be measured as a resonance frequency when used in the above circuit. That is, the characteristic impedance is changed by adjusting the inductor component of the inductor conductor, and as a result, the resonance frequency can be adjusted.

First, the initial state (before adjustment) of the resonance frequency of the resonance circuit using the inductor conductor film 2 and the mesh pattern 3 is measured. Here, since the inductor component of the inductor conductor film 2 and the mesh pattern 3 is slightly lower than the desired value, the initial resonance frequency is naturally high.

As a result, the difference between the desired resonance frequency and the initial resonance frequency is detected, and based on the result, the rough adjustment is performed to bring the resonance frequency closer to the desired resonance frequency.

Specifically, the vertical fine line conductors 32a, 32b, ... Between the horizontal fine line conductor 31a and the inductor conductive film 2 which form the mesh pattern 3 are cut.

Next, the roughly adjusted inductor conductor film 2 is used.
The resonator frequency in (mesh pattern 3) is measured, the difference between the desired resonance frequency and the coarse adjustment resonance frequency is detected, and based on this result, the resonance frequency becomes substantially the same as the desired resonance frequency. Make fine adjustments.

Specifically, the vertical fine line conductors 32a, 32b, ... Between the horizontal fine line conductors 31b and the horizontal fine line conductors 31a forming the mesh pattern 3 are cut.

As the above-mentioned cutting method, there are an optical method of cutting by irradiation of YAG laser and the like and scanning thereof, and a mechanical method of cutting while scanning with a drill, sandblast and the like.

Next, when the vertically cut thin wire conductors 32a, 32b, ... Between the inductor conductor film and the horizontal thin wire conductor 31a are cut by laser beam irradiation / scanning by an optical cutting method (arrow a). Of the resonator frequency and the change of the resonator frequency when the vertically cut thin wire conductors 32a, 32b, ... existing between the horizontal thin wire conductor 31a and the horizontal thin wire conductor 31b are cut by irradiation and scanning with laser light (arrow b). Will be described with reference to FIG.

In FIG. 3, with respect to the initial frequency X,
When the vertically cut thin wire conductors 32a, 32b, ... Shown by the arrow a are cut, the resonance frequency can be lowered with a large inclination (a large change rate). Further, when the vertically cut thin wire conductors 32a, 32b, ... Shown by the arrow b are cut, the resonance frequency can be lowered with a small inclination (the change rate is small).

As a practical example, the resonant circuit section (resonant frequency 80) of a voltage controlled oscillator circuit (VCO) for a cellular telephone is used.
(0 MHz), thin wire conductors 32a, 32b for vertical cutting ...
Has a total length of 0.8 mm, and an intersection with the horizontal thin wire conductor 31a is a half of 0.4 mm in the length direction.

At this time, each thin wire conductor 3 for vertical cutting is used.
When cutting 2a, the resonance frequency decreases by about 5 MHz at the arrow a portion, and the resonance frequency decreases by about 1.5 MHz at the arrow b portion.

Therefore, in actuality, when the initial frequency X is adjusted to the desired frequency Y as shown in FIG. 4, first, a predetermined number of, for example, four vertically cut fine wire conductors 32 are indicated by an arrow a.
Cut a to 32d to bring it close to the desired frequency Y, and
A predetermined number, for example, three (7 if the cut portion is already included) of the vertical cut thin wire conductors 32e to 32g are cut at the position of the arrow b to be substantially the same as the desired frequency Y.

That is, considering the effect of the cutting of the arrow a and the cutting of the arrow b from the side of the inductor conductor film 2 with respect to the two thin wire conductors 32a and 32b for vertical cutting, in the state where no cutting is performed at all. Thus, the inductor conductor film 2 is connected to two loop circuits which are superposed on each other. That is, the inductor conductor 2-fine wire conductor 32 for vertical cutting line
a-horizontal thin wire conductor 31a-longitudinal cutting wire thin wire conductor 32b-inductor conductor 2-intersection between the inductor conductor 2-longitudinal cutting wire thin wire conductor 32a-horizontal thin wire conductor 31a-longitudinal cutting line Thin wire conductor 32a-horizontal thin wire conductor 32a
-Vertical cutting line thin wire conductor 32b-Intersection point with horizontal thin wire conductor 31a-Vertical cutting line thin wire conductor 32b-Second loop circuit of inductor conductor film 2.

By cutting with the arrow a as described above, the first loop circuit and the second loop circuit are also cut from the inductor conductor film 2, so that the inductor component ( Actually, the change of the characteristic impedance becomes large.

By cutting at the arrow b, the second loop circuit portion does not operate, and only the first loop circuit is connected to the inductor conductor film 2. The change in the inductor component (actually, characteristic impedance) of the film 2 is small.

In practice, although the rate of change is large or small in these adjustments, since it is adjusted in a stepwise manner, the initial resonance frequency X is made to completely match the desired resonator frequency Y. It is difficult to adjust.

In the above-described embodiment, the scanning for the rough adjustment (arrow a) and the scanning for the fine adjustment (arrow b) are performed from the same direction. For example, a fine line for vertical cutting cut by the rough adjustment. Although the conductor is also cut by fine adjustment, for example, the resonance frequency is monitored, and when the coarse adjustment is completed as indicated by arrow a, the laser irradiation is shifted to the arrow b side, and then the arrow continues. Fine adjustment in b may be performed. For example, in the fine wire conductors 32a to 32d for vertical cutting, the fine wire conductors 32e to 32e are cut at positions close to the inductor conductor film 2 (between the inductor conductive film 2 and the horizontal fine wire conductor 31a).
In 32g, the thin wire conductors 32a to 32g for vertical cutting are cut at a position apart from the inductor conductor film 2 (between the horizontal thin wire conductor 31a and the horizontal thin wire conductor 32a).
Is only cut once.

As described above, in the present invention, the horizontal thin wire conductor film 31 is used.
a, 31b and vertical cut fine wire conductors 32a, 32b, 32c.
The mesh pattern 3 consisting of ... Is formed in advance, and a predetermined number of vertically cut fine wire conductors 32a, 32b, 32c are indicated by arrows a.
... is cut to perform rough adjustment of the inductor component of the inductor conductor film 2, and subsequently, vertical cut fine wire conductors 32a, 32b, 32c that are not cut by the previous rough adjustment.
.. is cut and fine adjustment is performed, so that the inductor conductor film 2 is surely adjusted.

The first loop circuit is included in the second loop circuit having a large change rate for rough adjustment. This means that the pattern for fine adjustment is formed in the pattern for coarse adjustment, and thus it is not necessary to form a dedicated pattern for fine adjustment (for example, a stub group). The area required to form the pattern of changes in the inductor component can be reduced, and the inductor substrate can be downsized.

Further, in the mesh pattern 3 in which the pattern for fine adjustment is formed in the pattern for coarse adjustment, the scanning distance for changing from coarse adjustment to fine adjustment is reduced, for example, by laser irradiation. Quick adjustment is possible.

In the above-mentioned embodiment, the horizontal thin wire conductor is 31a,
Although the description has been made in the example in which the two 31b are formed, the first horizontal thin line conductor and the second horizontal thin line conductor of the present invention are used to show a relative relationship of being close to or far from the inductor conductor. Actually, if the mesh pattern 3 made up of three, four, ... Horizontal fine line conductors is formed, fine adjustments such as coarse adjustment, middle adjustment, and fine adjustment can be performed.

Further, the inductor conductor film 2 is expressed as a lumped constant, and may be actually a coil or a distributed constant microstrip line or strip line. .

[0049]

As described above, a plurality of horizontal thin line conductors for adjusting the inductor component and a plurality of vertical cutting fine line conductors intersect with each other in the inductor conductor, and a large number of holes are arranged in a grid pattern. A mesh pattern was formed.

Then, the inductor component is roughly adjusted and finely adjusted by appropriately selecting the case of cutting with the fine wire conductor for vertical cutting in the portion close to the inductor conductor film and the case of cutting with the fine wire conductor for vertical cutting in the distant portion. Is possible, and the adjustment of the inductor component is surely achieved.

Further, since the cutting fine line for coarse adjustment and the fine cutting line for fine adjustment are used in the mesh pattern, it is not necessary to form a dedicated pattern for fine adjustment, and therefore the inductor conductor is not necessary. Also, the area occupied by the adjustment pattern is reduced, and the insulating substrate can be downsized.

[Brief description of drawings]

FIG. 1 is a schematic view of an inductor substrate according to the present invention.

FIG. 2 is a circuit diagram showing an example of a high-frequency oscillator circuit using the inductor substrate according to the present invention.

FIG. 3 is a characteristic diagram showing a change in resonance frequency at a cutting position of a fine wire conductor for vertical cutting.

FIG. 4 is a characteristic diagram showing a change state of a resonance frequency due to an actual cutting scan.

5A and 5B are schematic views of an inductor conductor corresponding to a conventional adjusting method.

[Explanation of supplements]

 DESCRIPTION OF SYMBOLS 1 ... Insulator substrate 2 ... Inductor conductor film 3 ... Mesh pattern 31a, 31b ... Horizontal thin line conductor 32a, 32b ... Vertical cutting fine line conductor

Claims (1)

[Claims] 1. An inductor conductor film having a predetermined conductor length is formed on an insulating substrate, and one side of the inductor conductor film is connected to an inductance adjusting pattern in which a large number of holes are arranged vertically and horizontally. Inductor conductor to.