JPH0997718A - Thin film transformer and its manufacturing method - Google Patents
Thin film transformer and its manufacturing methodInfo
- Publication number
- JPH0997718A JPH0997718A JP7252599A JP25259995A JPH0997718A JP H0997718 A JPH0997718 A JP H0997718A JP 7252599 A JP7252599 A JP 7252599A JP 25259995 A JP25259995 A JP 25259995A JP H0997718 A JPH0997718 A JP H0997718A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- coil
- substrate
- primary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 89
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims abstract description 75
- 229910000859 α-Fe Inorganic materials 0.000 claims abstract description 15
- 239000010408 film Substances 0.000 claims abstract description 9
- 239000000853 adhesive Substances 0.000 claims description 13
- 230000001070 adhesive effect Effects 0.000 claims description 13
- 229910045601 alloy Inorganic materials 0.000 claims description 11
- 239000000956 alloy Substances 0.000 claims description 11
- 230000001681 protective effect Effects 0.000 claims description 11
- 229910005435 FeTaN Inorganic materials 0.000 claims description 9
- 239000006247 magnetic powder Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000007767 bonding agent Substances 0.000 abstract 1
- 239000006249 magnetic particle Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 12
- 230000004907 flux Effects 0.000 description 6
- 238000010297 mechanical methods and process Methods 0.000 description 3
- 230000005226 mechanical processes and functions Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910018605 Ni—Zn Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 229920001709 polysilazane Polymers 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Landscapes
- Soft Magnetic Materials (AREA)
- Thin Magnetic Films (AREA)
- Coils Or Transformers For Communication (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば、携帯用無線機
等に利用されるＤＣ−ＤＣコンバータに用いられる薄膜
トランスに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film transformer used in a DC-DC converter used in, for example, a portable radio device.
【０００２】[0002]
【従来の技術】近年、高度情報化社会の進展及び、マル
マルチメディア時代の到来に伴い、パーソナル用途のポ
ータブル電子機器の普及が進展してきている。このよう
なポータブル電子機器は一般に電力源として電池を内蔵
してる。その電池電圧はそのままデバイスに供給される
こともあるが、デバイスが必要とする電源電圧と異なる
場合にはＤＣ−ＤＣコンバータ等によって適切な電圧に
変換されそれぞれのデバイスに供給される。ＤＣ−ＤＣ
コンバータは、入力直流電圧を半導体スイッチによって
断続的に制御し安定した所望の出力電圧を得ることを目
的とするもので、その主要部品としてトランスが重要な
役割を果たしおり、スイッチング周波数を高くすればす
るほどその小型化が図れる。このような電源として要求
される特性は、小型、軽量、等であるためこれらの要求
に合致するトランスとして薄膜のトランスが採用されつ
つある。薄膜のトランスは図５に示すように基板上に薄
膜コイル１１や薄膜磁性体コア１２を形成するもので、
上記要求を満たすものである。2. Description of the Related Art In recent years, along with the progress of an advanced information society and the advent of the era of multi-media, the spread of portable electronic devices for personal use has been advanced. Such portable electronic devices generally include a battery as a power source. The battery voltage may be supplied to the device as it is, but if it is different from the power supply voltage required by the device, it is converted to an appropriate voltage by a DC-DC converter or the like and supplied to each device. DC-DC
The purpose of the converter is to intermittently control the input DC voltage with a semiconductor switch to obtain a stable and desired output voltage, and the transformer plays an important role as its main component. The smaller it is, the more compact it can be. Since the characteristics required for such a power source are small size, light weight, etc., a thin film transformer is being adopted as a transformer that meets these requirements. The thin film transformer is one in which a thin film coil 11 and a thin film magnetic core 12 are formed on a substrate as shown in FIG.
It satisfies the above requirements.
【０００３】[0003]
【発明が解決しようとする課題】しかし、従来の薄膜ト
ランスであっても今日では、さらなる小型化が要求され
るようになり従来の薄膜トランスでは十分な特性を得ら
れなくなってきた。即ち、磁芯が全てパーマロイ等の磁
性薄膜で形成されるため十分な量の電流即ち、磁束をそ
こに通すことが出来ず磁芯が飽和してしまうと言う問題
があった。また、全ての磁芯を磁性薄膜で形成しようと
すると複雑なウエハプロセスを採用しなければならない
ため工程が複雑化しコストアップを招くと言う問題があ
った。However, even with the conventional thin film transformer, further miniaturization is required today, and the conventional thin film transformer cannot obtain sufficient characteristics. That is, since the magnetic core is entirely formed of a magnetic thin film such as permalloy, there is a problem that a sufficient amount of current, that is, magnetic flux cannot be passed therethrough and the magnetic core is saturated. Further, if all the magnetic cores are to be formed of magnetic thin films, a complicated wafer process must be adopted, which complicates the process and raises the cost.
【０００４】上記課題を解決すべく本発明では、磁性基
板の表面に形成された一次コイル用の磁芯と二次コイル
用の磁芯と、これら、一次コイル用および二次コイル用
磁芯にスパイラル状に形成される一次用及び二次用の薄
膜コイルと、上記、一次用及び二次コイル用磁芯上に被
着して配される上側磁性基板と、からなる薄膜トラン
ス。前記磁性基板が磁性フェライト基板である上記の薄
膜トランス。前記上側磁性基板が磁性フェライト基板で
ある上記の薄膜トランス。前記磁性基板が非磁性基板上
に形成されたＦｅＴａＮ合金膜で形成されたことを特徴
とする上記の薄膜トランス。前記上側磁性基板が非磁性
基板上に形成されたＦｅＴａＮ合金膜で形成されたこと
を特徴とする上記の薄膜トランス。前記磁性基板上に形
成される一次用または／及び二次コイル用磁芯がＦｅＴ
ａＮ合金膜で形成されたことを特徴とする上記の薄膜ト
ランス前記一次用及び二次コイル用磁芯上に形成される
上側磁性基板がポリシラザンによって被着されたことを
特徴とする上記の薄膜トランス。磁性基板の表面に磁性
薄膜からなる一次コイル用及び二次コイル用磁芯を形成
する工程と、これら一次コイル用及び二次コイル用磁芯
のそれぞれにスパイラル状に薄膜コイルを形成する工程
と、上記一次用および二次用磁芯の上に上側磁性基板を
接着剤で貼り付ける工程と、からなる薄膜トランスの製
造方法。磁性基板の表面にスパイラル状に一次用及び二
次用の薄膜コイルを形成する工程と、上記一次用および
二次用の薄膜コイルが形成された磁性基板上に磁性粉末
を含む接着剤を塗布する工程と、これら一次用及び二次
コイル用の上に上側磁性基板を配する工程と、この上側
磁性基板が配されたものを加熱し前記接着剤を固化し前
記一次用及び二次用のスパイラル状コイルの中心部の前
記接着剤により磁芯を形成する工程と、からなる薄膜ト
ランスの製造方法。を提供する。さらに、チップ状保護
ケースを具備する薄膜トランスであって、この薄膜トラ
ンスは、磁性基板の表面に形成された一次コイル用磁芯
と二次コイル用磁芯と、これらの一次コイル用および二
次コイル用磁芯にスパイラル状に形成される一次用及び
二次用の薄膜コイルと、この薄膜コイルの端部に設けら
れるバンプ状電極である端子部と、上記、一次用及び二
次コイル用磁芯上に被着して配される上側磁性基板とか
らなり、前記バンプ状電極が前記チップ状保護ケースの
外部接続電極に直接的に接続されている薄膜トランス。
前記チップ状保護ケースは外部接続電極を有するケース
底板部と、薄膜トランスが形成された面を前記ケース底
板部に向けて電機的に接続され張り合わされた前記磁性
基板であるケース上板部と、からなることを特徴とする
請求項１０記載の薄膜トランス。前記ケース底板部がセ
ラミクス基板からなることを特徴とする請求項１１記載
の薄膜トランス。チップ状保護ケースを具備する薄膜ト
ランスの製造方法であって、磁性基板の表面に一次コイ
ル用磁芯と二次コイル用磁芯とを形成する工程と、これ
らの一次コイル用および二次コイル用磁芯にスパイラル
状に一次用及び二次用の薄膜コイルと、この薄膜コイル
の端部に設けられるバンプ状電極である端子部とを形成
しする工程と、上記、一次用及び二次コイル用磁芯上に
上側磁性基板を形成する工程と、前記バンプ状電極を前
記チップ状保護ケースの外部接続電極に直接的に加熱圧
着により接続する工程と、からなる薄膜トランスの製造
方法。をも提供する。In order to solve the above problems, the present invention provides a magnetic core for a primary coil and a magnetic core for a secondary coil, which are formed on the surface of a magnetic substrate, and magnetic cores for the primary coil and the secondary coil. A thin film transformer comprising a primary and secondary thin film coil formed in a spiral shape, and an upper magnetic substrate disposed on the magnetic cores for primary and secondary coils. The thin film transformer as described above, wherein the magnetic substrate is a magnetic ferrite substrate. The thin film transformer as described above, wherein the upper magnetic substrate is a magnetic ferrite substrate. The thin film transformer described above, wherein the magnetic substrate is formed of a FeTaN alloy film formed on a non-magnetic substrate. The thin film transformer as described above, wherein the upper magnetic substrate is formed of a FeTaN alloy film formed on a non-magnetic substrate. The magnetic core for primary and / or secondary coil formed on the magnetic substrate is FeT
The thin film transformer, which is formed of an aN alloy film, wherein the upper magnetic substrate formed on the magnetic cores for the primary coil and the secondary coil is coated with polysilazane. . A step of forming a magnetic core for a primary coil and a secondary coil made of a magnetic thin film on the surface of the magnetic substrate, and a step of forming a thin film coil in a spiral shape on each of the magnetic cores for the primary coil and the secondary coil, A method of manufacturing a thin film transformer, which comprises a step of attaching an upper magnetic substrate onto the primary and secondary magnetic cores with an adhesive. Spirally forming primary and secondary thin film coils on the surface of the magnetic substrate, and applying an adhesive containing magnetic powder on the magnetic substrate on which the primary and secondary thin film coils are formed A step of arranging an upper magnetic substrate on the primary and secondary coils, and heating the one on which the upper magnetic substrate is placed to solidify the adhesive and the primary and secondary spirals Forming a magnetic core with the adhesive at the central portion of the coil. I will provide a. Further, a thin film transformer having a chip-shaped protective case, wherein the thin film transformer includes a magnetic core for a primary coil and a magnetic core for a secondary coil formed on the surface of a magnetic substrate, and a magnetic core for the primary coil and a secondary coil for the secondary coil. The primary and secondary thin film coils spirally formed on the coil magnetic core, the terminal portion that is a bump-like electrode provided at the end of the thin film coil, and the above primary and secondary coil magnets. A thin film transformer comprising: an upper magnetic substrate deposited on a core and arranged, wherein the bump-shaped electrode is directly connected to an external connection electrode of the chip-shaped protective case.
The chip-shaped protective case has a case bottom plate portion having an external connection electrode, and a case top plate portion which is the magnetic substrate electrically connected to the case bottom plate portion with the surface on which the thin film transformer is formed facing the case bottom plate portion, and 11. The thin film transformer according to claim 10, wherein the thin film transformer comprises: The thin film transformer according to claim 11, wherein the case bottom plate portion is made of a ceramic substrate. A method for manufacturing a thin film transformer having a chip-shaped protective case, the method comprising: forming a magnetic core for a primary coil and a magnetic core for a secondary coil on a surface of a magnetic substrate; and for the primary coil and the secondary coil. Forming a spiral-shaped primary and secondary thin-film coil on a magnetic core and a terminal portion which is a bump-shaped electrode provided at an end of the thin-film coil, and the above-mentioned primary and secondary coils A method of manufacturing a thin film transformer, comprising: a step of forming an upper magnetic substrate on a magnetic core; and a step of directly connecting the bump-shaped electrode to an external connection electrode of the chip-shaped protective case by thermocompression bonding. Will also be provided.
【０００５】[0005]
【発明の実施の形態】本願発明の薄膜トランスを図１を
用いて説明する。薄膜トランスは、磁性フェライト例え
ばＮｉ−Ｚｎフェライト等の磁性基板３上に薄膜工程と
機械工程とによって形成される。薄膜工程で形成される
部分としては、まず磁性フェライト基板等の磁性基板３
上に磁芯２，１５となる磁性薄膜を形成する。この磁芯
２，１５は一次用トランスのものと二次用トランスのも
のがそれぞれ所定の位置に形成される。この磁芯２，１
５は飽和磁束密度の高いものを採用する必要がありＦｅ
ＴａＮ合金のものを用いるのが良い。そして、このそれ
ぞれの磁芯２，１５ごとにスパイラル状に薄膜コイル
１，６やコイル電極１６を薄膜工程を用いて形成する。
薄膜工程で製造されるコイルは極めてその製造精度を高
くすることが出来るのでコイルの実装密度を向上するの
に適している。そして、機械工程として上側磁性基板４
としてのフェライト等の基板をこの上に貼り付ける。こ
のようにフェライト基板を採用するのは磁気飽和の問題
を解決するためでフェライト等の磁性基板ではその断面
積を十分大きく取れるのでこの部分を磁性薄膜で形成す
るより十分大きな磁束を流すことが出来る。さらに、こ
の部分を磁性フェライトすることによるメリットとして
この部分の製造を機械工程で出来るため作業が簡単で従
来薄膜で製造していたものに比較して歩留りが向上して
製品の信頼性が向上すると言うメリットもある。DESCRIPTION OF THE PREFERRED EMBODIMENTS The thin film transformer of the present invention will be described with reference to FIG. The thin film transformer is formed by a thin film process and a mechanical process on a magnetic substrate 3 such as a magnetic ferrite such as Ni-Zn ferrite. As a portion formed in the thin film process, first, a magnetic substrate 3 such as a magnetic ferrite substrate
A magnetic thin film to be the magnetic cores 2 and 15 is formed thereon. The magnetic cores 2 and 15 of the primary transformer and the secondary transformer are respectively formed at predetermined positions. This magnetic core 2, 1
It is necessary to adopt 5 having a high saturation magnetic flux density as Fe.
It is preferable to use a TaN alloy. Then, the thin film coils 1 and 6 and the coil electrode 16 are spirally formed for each of the magnetic cores 2 and 15 by using a thin film process.
The coil manufactured in the thin film process can be highly accurate in manufacturing, and is suitable for improving the mounting density of the coil. Then, as a mechanical process, the upper magnetic substrate 4
A substrate of ferrite or the like is attached onto this. In this way, the ferrite substrate is used to solve the problem of magnetic saturation, and a magnetic substrate such as ferrite can have a sufficiently large cross-sectional area so that a magnetic flux that is sufficiently larger than that formed with a magnetic thin film can flow. . Furthermore, as a merit of making this part magnetic ferrite, since this part can be manufactured by a mechanical process, the work is simple and the yield is improved compared to what was conventionally manufactured with a thin film, and the reliability of the product is improved. There is also a merit to say.
【０００６】本願の他の発明では磁芯部分をも薄膜で形
成することはせず上側基板を貼り付ける際に用いていた
接着剤５に磁性粉を混入してこれを固化し磁芯として機
能させるのでさらに工程が簡略化して製品の信頼性向上
する。混入する磁性粉としては軟磁性のものでかつ飽和
磁束密度の大きいものが好ましい。In another invention of the present application, the magnetic core portion is not formed of a thin film either, and magnetic powder is mixed into the adhesive 5 used when the upper substrate is attached and solidified to function as a magnetic core. This further simplifies the process and improves the reliability of the product. The magnetic powder to be mixed is preferably soft magnetic and has a high saturation magnetic flux density.
【０００７】本願のさらに他の発明は磁性基板や上側の
磁性基板として非磁性基板上に形成されたＦｅＴａＮ合
金を用いるので工程を簡略化すると同時に、飽和磁束密
度をさらに向上して薄膜トランスの効率を上げることが
出来る。Still another invention of the present application uses a FeTaN alloy formed on a non-magnetic substrate as a magnetic substrate or an upper magnetic substrate, so that the process is simplified and the saturation magnetic flux density is further improved to improve the efficiency of the thin film transformer. Can be raised.
【０００８】本願の発明に用いられるフェライト基板は
その厚さが高々１ｍｍ以下なので十分に小型化が可能で
あるし，また、その特性は全てを薄膜で形成していた従
来のものより優れ且つ安価に作成することが出来る。ま
たコイルは必ずしも単層のものに限定されず二層以上の
ものであっても良い。さらに、磁性基板や上側磁性基板
は磁性フェライト上にＦｅＴａＮ合金を形成したものを
用いてもよい。さらに、上側基板を磁性基板上に貼り付
ける接着剤としてペルヒドロポリシラザンを用いた場合
には従来用いられてきた有機系接着剤と異なり高温度で
も変質しないので磁性材料の特性を向上するために上側
磁性基板を形成した後で高温度でアニールすることが出
来る。上側磁性基板として例えば、ＦｅＴａＮ合金膜
や、センダストのような材料を用いる場合にはアニール
が必須の条件となり特にこの発明は大きな効果を有す
る。また、本発明は、図４に示すように薄膜トランスを
ケースに入れて保護する形態としたので薄膜トランスの
対環境性が向上すると共に電極をバンプ電極９としてケ
ース底板８に設けられた外部電極１０に直接的に接続す
るようにしたので従来のようにケーシングの際にワイヤ
ボンディングする必要がなく製造が極めて容易になると
共に製品としての信頼性が向上する。また、ケース底板
部８としてセラミクス基板を用いるので機械的強度に優
れ対衝撃性が極めて良好になる。さらに、機械的強度に
優れるため薄膜トランスを電子部品としてプリント基板
等に挿入する際にいわゆる自動機による機械的なチップ
挿入が可能となり工数のさらなる削減が可能となる。Since the ferrite substrate used in the invention of the present application has a thickness of 1 mm or less at most, the ferrite substrate can be sufficiently miniaturized, and its characteristics are superior and cheaper than those of the conventional ones which are all formed of a thin film. Can be created in Further, the coil is not necessarily limited to a single layer, and may have two or more layers. Further, the magnetic substrate or the upper magnetic substrate may be formed by forming FeTaN alloy on magnetic ferrite. Furthermore, when perhydropolysilazane is used as the adhesive for sticking the upper substrate onto the magnetic substrate, it does not deteriorate even at high temperatures unlike the organic adhesives that have been conventionally used. After forming the magnetic substrate, it can be annealed at a high temperature. When a material such as FeTaN alloy film or Sendust is used as the upper magnetic substrate, annealing is an essential condition, and the present invention has a great effect. Further, according to the present invention, as shown in FIG. 4, the thin film transformer is put in a case for protection, so that the environment resistance of the thin film transformer is improved and the external electrodes provided on the case bottom plate 8 as the bump electrodes 9 are provided. Since it is directly connected to 10, there is no need for wire bonding in the case of the casing as in the conventional case, the manufacturing is extremely easy and the reliability as a product is improved. Further, since a ceramic substrate is used as the case bottom plate portion 8, mechanical strength is excellent and impact resistance is extremely good. Furthermore, because of its excellent mechanical strength, a mechanical chip can be inserted by a so-called automatic machine when the thin film transformer is inserted as an electronic component into a printed circuit board or the like, and the number of steps can be further reduced.
【０００９】[0009]
【発明の効果】以上のようにこの発明の薄膜トランス
は、従来のものに比較して飽和磁束密度を高く出来るの
で高効率のコンバータを実現でき、また、従来のものに
比較して一部に機械的製造工程を採用したので製造が容
易となり製造歩留りが向上して、信頼性の大きなコンバ
ータを実現できる。また、磁芯を接着剤を固化すること
によって形成することにしたのでわざわざ磁芯を薄膜工
程を用いて製造する必要がなくさらに製造の容易化が図
られる。また、ケースに挿入して保護するので対環境性
や対衝撃性に優れチップ部品として取り扱えると言うメ
リットがある。以上のようであるのでこの発明のコンバ
ータは益々小型化、軽量化、高効率化が要求される薄膜
トランスとして最適な薄膜トランスを実現できる。As described above, the thin film transformer of the present invention can realize a highly efficient converter because the saturation magnetic flux density can be made higher than that of the conventional one, and it can be realized in a part as compared with the conventional one. Since the mechanical manufacturing process is adopted, the manufacturing is facilitated, the manufacturing yield is improved, and the converter with high reliability can be realized. Further, since the magnetic core is formed by solidifying the adhesive, it is not necessary to purposely manufacture the magnetic core by using the thin film process, and the manufacturing can be further facilitated. Further, since it is inserted into the case to protect it, it has an advantage that it is excellent in environmental resistance and impact resistance and can be handled as a chip component. As described above, the converter of the present invention can realize a thin film transformer which is optimal as a thin film transformer which is required to be further reduced in size, weight and efficiency.
【図１】 本発明の薄膜トランスを示す断面図FIG. 1 is a sectional view showing a thin film transformer of the present invention.
【図２】 本発明の他の薄膜トランスを示す断面図FIG. 2 is a sectional view showing another thin film transformer of the present invention.
【図３】 本発明の薄膜トランスの製造方法を示す概念
図FIG. 3 is a conceptual diagram showing a method for manufacturing a thin film transformer of the present invention.
【図４】 本発明のケース挿入された薄膜トランスを示
す図（コイル等は省略）FIG. 4 is a diagram showing a case-inserted thin film transformer of the present invention (coils and the like are omitted).
【図５】 従来の薄膜トランスを示す断面図FIG. 5 is a sectional view showing a conventional thin film transformer.
１ 一次コイル用 ２ 一次コイル用磁芯 ３ 磁性基板 ４ 上側磁性基板 ５ 接着剤 ６ 二次コイル用 ７ ＦｅＴａＮ合金膜 ８ ケース底板部 ９ バンプ電極 １０ 外部電極 １４ チップ状保護ケース １５ 二次コイル用磁芯 1 for primary coil 2 magnetic core for primary coil 3 magnetic substrate 4 upper magnetic substrate 5 adhesive 6 for secondary coil 7 FeTaN alloy film 8 case bottom plate 9 bump electrode 10 external electrode 14 chip-shaped protective case 15 secondary coil magnetic core
Claims (13)
磁芯と二次コイル用磁芯と、 これら、一次コイル用および二次コイル用磁芯にスパイ
ラル状に形成される一次用及び二次用の薄膜コイルと、 上記、一次用及び二次コイル用の磁芯上に被着して配さ
れる上側磁性基板と、からなる薄膜トランス。1. A magnetic core for a primary coil and a magnetic core for a secondary coil formed on a surface of a magnetic substrate, and a primary coil and a secondary coil formed in a spiral shape on the magnetic cores for the primary coil and the secondary coil. A thin film transformer comprising: a secondary thin film coil; and an upper magnetic substrate disposed on the magnetic cores for the primary and secondary coils.
請求項１記載の薄膜トランス。2. The thin film transformer according to claim 1, wherein the magnetic substrate is a magnetic ferrite substrate.
ある請求項１記載の薄膜トランス。3. The thin film transformer according to claim 1, wherein the upper magnetic substrate is a magnetic ferrite substrate.
ＦｅＴａＮ合金膜で形成されたことを特徴とする請求項
１記載の薄膜トランス。4. The thin film transformer according to claim 1, wherein the magnetic substrate is formed of a FeTaN alloy film formed on a non-magnetic substrate.
れたＦｅＴａＮ合金膜で形成されたことを特徴とする請
求項１記載の薄膜トランス。5. The thin film transformer according to claim 1, wherein the upper magnetic substrate is formed of a FeTaN alloy film formed on a non-magnetic substrate.
／及び二次コイル用磁芯がＦｅＴａＮ合金膜で形成され
たことを特徴とする請求項１記載の薄膜トランス。6. The thin film transformer according to claim 1, wherein the magnetic core for primary and / or secondary coil formed on the magnetic substrate is formed of a FeTaN alloy film.
される上側磁性基板がペルヒドロポリシラザンによって
被着されたことを特徴とする請求項１記載の薄膜トラン
ス。7. The thin film transformer according to claim 1, wherein the upper magnetic substrate formed on the magnetic cores for the primary coil and the secondary coil is coated with perhydropolysilazane.
イル用及び二次コイル用磁芯を形成する工程と、これら
一次コイル用及び二次コイル用磁芯のそれぞれにスパイ
ラル状に薄膜コイルを形成する工程と、上記一次用およ
び二次用磁芯の上に上側磁性基板を接着剤で貼り付ける
工程と、からなる薄膜トランスの製造方法。8. A step of forming primary coil and secondary coil magnetic cores made of a magnetic thin film on the surface of a magnetic substrate, and spirally forming thin film coils on each of the primary coil and secondary coil magnetic cores. A method of manufacturing a thin film transformer, comprising: a forming step; and a step of attaching an upper magnetic substrate onto the primary and secondary magnetic cores with an adhesive.
び二次用の薄膜コイルを形成する工程と、上記一次用お
よび二次用の薄膜コイルが形成された磁性基板上に磁性
粉末を含む接着剤を塗布する工程と、これら一次用及び
二次コイル用の上に上側磁性基板を配する工程と、この
上側磁性基板が配されたものを加熱し前記接着剤を固化
し前記一次用及び二次用のスパイラル状コイルの中心部
の前記接着剤により磁芯を形成する工程と、からなる薄
膜トランスの製造方法。9. A step of spirally forming primary and secondary thin film coils on the surface of a magnetic substrate, and magnetic powder is contained on the magnetic substrate on which the primary and secondary thin film coils are formed. A step of applying an adhesive, a step of disposing an upper magnetic substrate on the primary and secondary coils, and a step of heating the one on which the upper magnetic substrate is disposed to solidify the adhesive and A method of manufacturing a thin film transformer, comprising the step of forming a magnetic core with the adhesive at the center of a secondary spiral coil.
ンスであって、この薄膜トランスは、磁性基板の表面に
形成された一次コイル用の磁芯と二次コイル用磁芯と、
これらの一次コイル用および二次コイル用磁芯にスパイ
ラル状に形成される一次用及び二次用の薄膜コイルと、
この薄膜コイルの端部に設けられるバンプ状電極である
端子部と、上記、一次用及び二次コイル用の磁芯上に被
着して配される上側磁性基板とからなり、前記バンプ状
電極が前記チップ状保護ケースの外部接続電極に直接的
に接続されている薄膜トランス。10. A thin film transformer having a chip-shaped protective case, the thin film transformer comprising a magnetic core for a primary coil and a magnetic core for a secondary coil formed on a surface of a magnetic substrate.
Primary and secondary thin-film coils spirally formed on the magnetic cores for the primary coil and the secondary coil,
The bump-shaped electrode includes a terminal portion that is a bump-shaped electrode provided at an end portion of the thin-film coil, and an upper magnetic substrate that is disposed on the magnetic cores for the primary coil and the secondary coil. Is a thin film transformer in which is directly connected to the external connection electrode of the chip-shaped protective case.
を有するケース底板部と、薄膜トランスが形成された面
を前記ケース底板部に向けて電気的に接続され張り合わ
された前記磁性基板であるケース上板部と、からなるこ
とを特徴とする請求項１０記載の薄膜トランス。11. The chip-like protective case is a case bottom plate part having an external connection electrode, and the magnetic substrate electrically connected to the case bottom plate part with the surface on which the thin film transformer is formed facing toward the case bottom plate part. 11. The thin film transformer according to claim 10, comprising an upper plate portion.
なることを特徴とする請求項１１記載の薄膜トランス。12. The thin film transformer according to claim 11, wherein the case bottom plate is made of a ceramic substrate.
ンスの製造方法であって、磁性基板の表面に一次コイル
用磁芯と二次コイル用磁芯とを形成する工程と、これら
の一次コイル用および二次コイル用磁芯にスパイラル状
に一次用及び二次用の薄膜コイルと、この薄膜コイルの
端部に設けられるバンプ状電極である端子部とを形成す
る工程と、上記、一次用及び二次コイル用磁芯上に上側
磁性基板を形成する工程と、前記バンプ状電極を前記チ
ップ状保護ケースの外部接続電極に直接的に加熱圧着に
より接続する工程と、からなる薄膜トランスの製造方
法。13. A method of manufacturing a thin film transformer having a chip-shaped protective case, comprising the steps of forming a magnetic core for a primary coil and a magnetic core for a secondary coil on the surface of a magnetic substrate, and for these primary coils. And a step of spirally forming a primary and secondary thin-film coil on the magnetic core for the secondary coil, and a step of forming a terminal portion that is a bump-shaped electrode provided at an end of the thin-film coil; A method of manufacturing a thin film transformer comprising: a step of forming an upper magnetic substrate on a magnetic core for a secondary coil; and a step of directly connecting the bump-shaped electrode to an external connection electrode of the chip-shaped protective case by thermocompression bonding. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7252599A JP2991091B2 (en) | 1995-09-29 | 1995-09-29 | Thin film transformer and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7252599A JP2991091B2 (en) | 1995-09-29 | 1995-09-29 | Thin film transformer and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0997718A true JPH0997718A (en) | 1997-04-08 |
| JP2991091B2 JP2991091B2 (en) | 1999-12-20 |
Family
ID=17239615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7252599A Expired - Lifetime JP2991091B2 (en) | 1995-09-29 | 1995-09-29 | Thin film transformer and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2991091B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004047849A (en) * | 2002-07-15 | 2004-02-12 | Jfe Steel Kk | Planar magnetic element |
| US6835576B2 (en) | 2000-05-02 | 2004-12-28 | Fuji Electric Co., Ltd. | Magnetic thin film, a magnetic component that uses this magnetic thin film, manufacturing methods for the same, and a power conversion device |
| JP2006128335A (en) * | 2004-10-28 | 2006-05-18 | Jfe Mineral Co Ltd | Planar magnetic element |
| JP2015018862A (en) * | 2013-07-09 | 2015-01-29 | 富士通株式会社 | Double helical structure electronic component, method for manufacturing double helical structure electronic component, and multifunction sheet |
-
1995
- 1995-09-29 JP JP7252599A patent/JP2991091B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6835576B2 (en) | 2000-05-02 | 2004-12-28 | Fuji Electric Co., Ltd. | Magnetic thin film, a magnetic component that uses this magnetic thin film, manufacturing methods for the same, and a power conversion device |
| JP2004047849A (en) * | 2002-07-15 | 2004-02-12 | Jfe Steel Kk | Planar magnetic element |
| JP2006128335A (en) * | 2004-10-28 | 2006-05-18 | Jfe Mineral Co Ltd | Planar magnetic element |
| JP2015018862A (en) * | 2013-07-09 | 2015-01-29 | 富士通株式会社 | Double helical structure electronic component, method for manufacturing double helical structure electronic component, and multifunction sheet |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2991091B2 (en) | 1999-12-20 |
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