JPH1010431A5

JPH1010431A5 -

Info

Publication number: JPH1010431A5
Application number: JP1996180013A
Authority: JP
Filing date: 1996-06-20
Publication date: 2004-11-04

Claims

a first imaging optical system S1 for forming an intermediate image of an object surface based on light from the object surface; a second imaging optical system S2 for forming a reduced image of the object surface based on light from the intermediate image; and a first optical path deflection member M1 that is disposed near a position where the intermediate image is formed and deflects light that has passed through the first imaging optical system S1 toward the second imaging optical system S2,
the first imaging optical system S1 has a concave reflecting mirror CM, and light from the object surface is reflected by the concave reflecting mirror CM and then forms the intermediate image in an optical path of the first imaging optical system S1;
the first optical path deflection member M1 has a plane reflecting mirror arranged in the optical path of the first imaging optical system S1,
When the imaging magnification of the first imaging optical system S1 is β1, the axial distance between the object surface and the intersection of the optical axis of the first imaging optical system S1 and the optical axis of the second imaging optical system S2 is L1, and the axial distance between the object surface and the concave reflecting mirror CM is LM,
0.75<|β1|<0.95
0.13<L1/LM<0.35
A catadioptric optical system characterized by satisfying the following condition.

The first imaging optical system S1 has, in order from the object side, a first lens group G1, a second lens group G2, and the concave reflecting mirror CM,
2. The catadioptric optical system according to claim 1, wherein light from the object surface is reflected by the concave reflecting mirror CM via the first lens group G1 and the second lens group G2, and then forms the intermediate image in the optical path between the first lens group G1 and the second lens group G2.

3. The catadioptric optical system according to claim 2, wherein the second lens group G2 has at least two refractive elements having mutually different negative refractive powers and at least two refractive elements having mutually different positive refractive powers.

4. The catadioptric optical system according to claim 2, wherein the first lens group G1 has at least three refractive elements having different refractive powers.

The second imaging optical system S2 has, in order from the object side, a third lens group G3 having a positive refractive power as a whole, a second optical path deflection member M2 for deflecting light that has passed through the third lens group G3, and a fourth lens group G4 having a positive refractive power as a whole,
5. The catadioptric optical system according to claim 2, wherein light from the intermediate image passes through the third lens group G3, the second optical path deflection member M2, and the fourth lens group G4 to form a reduced image of the object plane.

6. The catadioptric system according to claim 1, wherein the refractive elements constituting the catadioptric system are made of at least one optical material selected from the group consisting of quartz and fluorite.

the second lens group G2 has at least one positive lens made of fluorite,
When the sum of the refractive powers of the positive lenses made of fluorite in the second lens group G2 is φc and the refractive power of the concave reflecting mirror CM is φm,
0.5<|φc/φm|<1.6
7. The catadioptric optical system according to claim 2, wherein the following condition is satisfied:

1. A projection exposure apparatus for projecting a pattern on a first object disposed on a first surface onto a second object disposed on a second surface,
8. A projection exposure apparatus comprising a catadioptric system according to claim 1, for projecting an image of the pattern on the first object onto the second object.

1. A projection exposure method for projecting a pattern on a first object arranged on a first surface onto a second object arranged on a second surface, comprising:
8. A projection exposure method, comprising: projecting an image of the pattern on the first object onto the second object using a catadioptric optical system according to claim 1.