JPH10106963A - Coupling device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a joining device for joining an apparatus and another apparatus to be joined in a given positioning relation, along with good efficiency and safety in work, and small burden of workers. SOLUTION: A joining device 1 includes a clamp part 2 for holding a joining holding part of an apparatus to be joined, and a holding part 3, in which a joining end 53 of a joining-side apparatus 52 can be inserted. A joining device 1 is fixed to an apparatus to be joined using a clamp part 2. When the joining end 53 of the joining-side apparatus 52 is inserted in the hold part 3 of the joining device 1, the joining-side apparatus 52 and the apparatus to be joined can be simply joined to each other in a given positioning relation.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a connecting device capable of positioning a connected device and a connecting device in a predetermined relationship.

[0002]

2. Description of the Related Art For example, in assembling a semiconductor manufacturing apparatus having a vertical furnace, when a quartz tube, which is a component of the vertical furnace, is transported to a vicinity of the semiconductor manufacturing apparatus by a transport apparatus, usually, a plurality of transport apparatuses are provided. Since it is a general-purpose transport device that transports various components to the semiconductor manufacturing device, a strict positional relationship is not established with each semiconductor manufacturing device. In particular, since each semiconductor manufacturing apparatus has unevenness or a slope on the floor surface, there is a delicate difference in installation conditions with respect to the floor surface. The relationship also has a problem that the positional relationship is not established with other semiconductor manufacturing apparatuses.

Therefore, it is conventionally difficult to assemble the components conveyed by the transfer device from the transfer device into the semiconductor manufacturing apparatus as it is by the assembling device provided in the transfer device. Was.

[0004]

Conventionally, components of a semiconductor manufacturing apparatus transported by a transport device are once removed from the transport device and manually assembled to perform assembly work. The quartz tube and the like that constitute it are large and heavy, and the work is carried out in an unreasonable posture.

In view of such circumstances, the present invention connects a device to be connected and a device to be connected, for example, a semiconductor manufacturing device and a transfer device so as to have a predetermined positional relationship, and uses a semiconductor device from the transfer device to an assembly device. An object of the present invention is to make it possible to directly assemble in a manufacturing apparatus, to improve workability, to reduce a burden on an operator, and to further enhance work safety.

[0006]

SUMMARY OF THE INVENTION The present invention relates to a connecting device having a clamp portion for holding a connecting holding portion of a device to be connected and a holding portion into which a connecting end of the connecting device can be inserted.
An adjusting arm having the clamp portion extending in a horizontal direction, a gripping plate through which the adjusting arm penetrates, a pressing seat provided to face the gripping plate, and moving the pressing seat toward and away from the gripping plate. The present invention relates to a coupling device having a lock bolt, wherein the holding portion has right and left vertically movable alignment metal fittings on right and left sides, and the alignment metal fitting is provided with a side roller rotatably abutting on the width end face of the connection end. The connection-side device and the connection-side device are positioned in a predetermined relationship via the connection device, and the connection device can be easily attached to and detached from the connection-side device by a clamp portion, and The connection end of the connection-side device can be inserted and removed, and the connection device is fixed to the connection-side device by a clamp portion, and the connection end of the connection-side device is easily inserted into the holding portion to easily connect to the connection-side device. When the connecting device is connected, The positional relationship is positioned in a predetermined state. Furthermore, since the portion of the holding part that grips the connection end can be displaced in the vertical direction, the unevenness and inclination of the floor surface can be absorbed, and the insertion of the connection end can be easily performed.

[0007]

Embodiments of the present invention will be described below with reference to the drawings.

In FIG. 1, reference numeral 1 denotes a connecting device according to the present embodiment. The connecting device 1 has a clamp portion 2 at the front and a hold portion 3 at the rear. First, clamp part 2
Will be described.

The side plate 5 has a crank shape, and the side plate 6 is substantially L-shaped.
The side plate 5 and the side plate 6 are arranged in parallel, the lower middle portion is connected by a connecting plate 7, and the front end portion is connected by a clamp arm 8.

The clamp arm 8 includes the side plates 5 and 6
It has horizontal bifurcated adjusting arms 9, 9 extending further forward, and has a vertical side portion 10 hanging downward from the rear end side. A plurality of adjusting grooves are provided on the upper surface of the adjusting arms 9, 9. 11 is engraved.

A gripping plate 12 is suspended from the adjusting arms 9 and 9. The grip plate 12 is provided with a hook portion 13 which can be engaged with the adjustment groove 11 near the upper end over the entire length in the width direction.
On the lower side, horizontal slit holes 14, 14 through which the adjusting arms 9, 9 can pass are formed, and a rib 15 projecting forward along the lower edge of the horizontal slit holes 14, 14 is provided with the entire width of the gripping plate 12. To be provided. A friction member 16 having a required width is attached to a lower portion of the rear surface of the gripping plate 12 along a lower edge. For the friction member 16, a rubber material having high hardness, for example, urethane rubber is used.

A short tube nut 21 is fixed to two portions of the vertical side 10 corresponding to both ends of the gripping plate 12 perpendicularly to the vertical side 10.
A pressure seat 23 is rotatably attached to the tip of the lock bolt 22, and a rubber plate 24 having a high hardness and a high frictional force is fixed to the pressure surface of the pressure seat 23.

Next, the hold section 3 will be described. A slide guide 25 is provided on the inner side surface of the side plate 6 in a vertical direction, a slider 26 is slidably provided on the slide guide 25, and an alignment fitting 2 having an L-shaped cross section is provided on the slider 26.
7 and the eave portion 28 is horizontally fixed to the upper edge of the alignment fitting 27. A shaft 30 is horizontally protruded at a position on the side opposite to the clamp arm 8 (rear side) inside the vertical portion of the alignment fitting 27, and an upper guide roller 31 is rotatably provided on the shaft 30. A horizontal shaft 32 is provided in front of the horizontal portion of the alignment fitting 27.
And a lower guide roller 33 is rotatably provided on the shaft 32. A lower end surface of the upper guide roller 31 and an upper end surface of the lower guide roller 33 are vertically connected to a connecting end 5 described later.
3 is apart by the plate thickness. Shafts 35, 35 are erected on the horizontal portion of the alignment metal fitting 27 in front and back.
The side roller 36 is rotatably provided for each of the.

A nut block 37 is fixed to the upper end of the side plate 6 at a position facing the eaves 28, and a wing bolt 38 is threaded through the nut block 37. Wing nut 39
And the lower end of the wing bolt 38 is rotatably connected to the eave portion 28.

A slide guide 40 is provided on the inner surface of the side plate 5.
Are provided in the vertical direction, and the slider 4 is
1 is slidably provided, and an alignment fitting 42 having an L-shaped cross section is fixed to the slider 41. Shafts 43, 43 are erected before and after a horizontal portion of the alignment fitting 42, and a side is provided on each of the shafts 43. A roller 44 is rotatably provided. The alignment fitting 42 is provided with a hook-shaped stopper 45 that can be engaged with the upper end of the slide guide 40, and a projection 46 that can be engaged with the slider 41 is formed at the upper rear end of the side plate 5. ,
The stopper 45 regulates the lower limit of the slider 41,
The protrusion 46 regulates the upper limit of the slider 41.

The operation will be described below with reference to FIG.

In FIG. 2, reference numeral 50 denotes a device to be connected, and the clamp portion 2 is clamped by a connecting grip portion 51 of the device 50 to be connected. In FIG. 2, reference numeral 52 denotes a connection-side device,
The connection end 53 of the connection side device 52 is gripped by the hold unit 3.

This will be described more specifically.

First, the position of the holding plate 12 is determined according to the width of the connecting holding portion 51. The adjusting arms 9, 9 are inserted through the horizontal slit holes 14, 14, and the hook 13
Into the adjustment groove 11. When the hook 13 is fitted into the adjustment groove 11, the hook 13 comes into contact with the upper surface of the adjusting arm 9, the rib 15 comes into contact with the lower surface of the adjusting arm 9, and the clamp arm 8 is moved in the horizontal direction. The movement is restricted and the clockwise rotation of the clamp arm 8 is restricted. Further, the movement of the clamp arm 8 in the horizontal direction, that is, in the direction perpendicular to the plane of FIG. 2, is restricted by the adjustment arm 9 being fitted into the horizontal slit hole 14.

Next, the lock bolt 22 is tightened, and the pressure seat 23 is advanced with respect to the connection grip 51. The lock bolt 22 is tightened so that the friction member 16 and the rubber plate 24 are compressed and a sufficient amount of deformation is applied to the friction member 16 and the rubber plate 24. The connection holding portion 51 is held between the holding plate 12 and the pressure seat 23. When the friction member 16 and the rubber plate 24 are compressed and come into close contact with the connection holding portion 51, a large frictional force is generated between the connection holding portion 51, the holding plate 12 and the pressure seat 23, and the connection holding portion 51 is formed.
Is firmly gripped by the clamp portion 2. Thus, the side plates 5 and 6 are positioned with respect to the connected side device 50.

Turn the wing bolt 38 to rotate the alignment fitting 2
7 is adjusted in the vertical direction, and the alignment metal fitting 27 is
4 and lock the wing bolt 38 with the wing nut 39. Since the alignment fitting 42 is slidable in the vertical direction, the alignment fitting 42 is closely attached to the floor surface 54 and positioned when the connecting device 1 is fixed to the connected device 50.

The connecting device 52 is advanced toward the connected device 50, and the connecting end 53 is inserted into the holding unit 3.

The connecting end 53 is guided on both sides by the side rollers 36, 36 and the side rollers 44, 44. The upper and lower surfaces of the connecting end 53 are guided by the upper guide roller 31 and the lower guide roller 33. In the end, the connecting end 53 is restrained in the vertical direction and the horizontal direction (perpendicular to the plane of FIG. 2) by the holding unit 3 and can move freely only in the approaching / separating direction with respect to the connected apparatus 50. It is gripped like this. Thus, for the connected device 50,
In the state where the positioning in the left-right direction is performed,
2 are connected. Although not shown, if the connecting device 1 is provided with a stopper with which the tip of the connecting end 53 abuts and is inserted until the connecting end 53 comes into contact with the stopper, the connecting device 1 approaches or separates from the connected device 50. Directional positioning is also provided.

The floor surface 54 has slight irregularities and inclinations.
Although it is not a perfect horizontal surface, as described above, the alignment fitting 27 and the alignment fitting 42 can be grounded to the floor surface 54, so that the upper guide roller 31, the lower guide roller 33, the side rollers 36, 36, Side rollers 44, 4
4 can be reliably set to a specified value from the floor surface 54, the insertion of the connection end 53 into the hold portion 3 can be reliably and easily performed, and the connection side with respect to the connection device 1 The connection of the device 52 can be performed simply and reliably. Therefore, the connection side device 5 with respect to the connection side device 50
2 can be easily and reliably connected via the connecting device 1, and the positioning between the connected device 50 and the connecting device 52 can also be performed.

When the connecting device 52 is a transport device, and when the components to be incorporated in the connected device 50 are transported, the positioning of the two devices is performed. It is possible to mechanize the transfer to the device 50, and if the connecting device 52 is provided with an assembling device, the transported components can be automatically assembled to the connected device 50.

In the above embodiment, the adjusting arm 9 is
The crotch shape is used, but it may be one. Further, the hook 13 of the gripping plate 12 may be omitted, the upper frame edge of the horizontal slit hole may be set as a knife edge, and the upper frame edge may be fitted into the adjustment groove 11, and the rib 15 may be omitted. Is also good.

[0027]

As described above, according to the present invention, the connecting device can be easily attached to and detached from the connected device by the clamp portion, and the connecting device can be fixed to the connected device by the clamp portion. By simply inserting the connecting end of the holding portion into the holding portion, the connected device and the connecting side device are easily connected, the positional relationship between the two devices is positioned in a predetermined state, and the portion for gripping the connecting end of the holding portion is further provided. Can be displaced in the vertical direction, the unevenness and inclination of the floor surface are absorbed, the insertion of the connection end is easily performed, and the connection between the connected device and the connection side device can be performed regardless of the state of the floor surface. Demonstrates excellent effects.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention.

FIG. 2 is a view as viewed in the direction of arrows AA in FIG. 1;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Connecting device 2 Clamp part 3 Hold part 10 Vertical side part 11 Adjustment groove 12 Holding plate 13 Hook part 22 Lock bolt 23 Pressure seat 25 Slide guide 27 Alignment fitting 31 Upper guide roller 33 Lower guide roller 36 Side roller 38 Butterfly bolt 40 Slide Guide 42 Alignment bracket 44 Side roller

Claims (3)

[Claims] 1. A coupling device comprising: a clamp portion for gripping a coupling grip portion of a device to be coupled; and a holding portion into which a coupling end of the coupling device can be inserted. 2. An adjusting arm in which the clamp portion extends in a horizontal direction, a gripping plate through which the adjusting arm penetrates, a pressure seat provided opposite to the gripping plate, and the pressing seat with respect to the gripping plate. The connecting device according to claim 1, further comprising a lock bolt that moves close to and away from the connecting bolt. 3. The connecting device according to claim 1, wherein said holding portion has left and right aligning fittings on the left and right sides, and said aligning fittings are provided with side rollers which rollably abut on a width end face of said connecting end.