JPH10116779A5 - - Google Patents
Info
- Publication number
- JPH10116779A5 JPH10116779A5 JP1996289109A JP28910996A JPH10116779A5 JP H10116779 A5 JPH10116779 A5 JP H10116779A5 JP 1996289109 A JP1996289109 A JP 1996289109A JP 28910996 A JP28910996 A JP 28910996A JP H10116779 A5 JPH10116779 A5 JP H10116779A5
- Authority
- JP
- Japan
- Prior art keywords
- stage
- driving
- measuring
- driving means
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28910996A JPH10116779A (ja) | 1996-10-11 | 1996-10-11 | ステージ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28910996A JPH10116779A (ja) | 1996-10-11 | 1996-10-11 | ステージ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10116779A JPH10116779A (ja) | 1998-05-06 |
| JPH10116779A5 true JPH10116779A5 (2) | 2004-10-14 |
Family
ID=17738913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28910996A Pending JPH10116779A (ja) | 1996-10-11 | 1996-10-11 | ステージ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10116779A (2) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100521704B1 (ko) | 1997-09-19 | 2005-10-14 | 가부시키가이샤 니콘 | 스테이지장치, 주사형 노광장치 및 방법, 그리고 이것으로제조된 디바이스 |
| EP2157480B1 (en) | 2003-04-09 | 2015-05-27 | Nikon Corporation | Exposure method and apparatus, and device manufacturing method |
| JP4394500B2 (ja) | 2003-04-09 | 2010-01-06 | エーエスエムエル ネザーランズ ビー．ブイ． | リソグラフィ装置、デバイス製造方法、及びコンピュータ・プログラム |
| TWI360158B (en) | 2003-10-28 | 2012-03-11 | Nikon Corp | Projection exposure device,exposure method and dev |
| TWI385414B (zh) | 2003-11-20 | 2013-02-11 | 尼康股份有限公司 | 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法 |
| JP2005164878A (ja) * | 2003-12-02 | 2005-06-23 | Tadahiro Omi | 露光装置 |
| TWI609410B (zh) | 2004-02-06 | 2017-12-21 | 尼康股份有限公司 | 光學照明裝置、曝光裝置、曝光方法以及元件製造方法 |
| KR20140140648A (ko) | 2005-05-12 | 2014-12-09 | 가부시키가이샤 니콘 | 투영 광학계, 노광 장치 및 노광 방법 |
| JP5267029B2 (ja) | 2007-10-12 | 2013-08-21 | 株式会社ニコン | 照明光学装置、露光装置及びデバイスの製造方法 |
| US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9116346B2 (en) | 2007-11-06 | 2015-08-25 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
| US10192773B2 (en) * | 2016-06-20 | 2019-01-29 | Nexperia B.V. | Semiconductor device positioning system and method for semiconductor device positioning |
-
1996
- 1996-10-11 JP JP28910996A patent/JPH10116779A/ja active Pending
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