JPH1012702A5 - - Google Patents

Description

[0006]
[Means for Solving the Problems] In order to solve the above problems, the present invention constantly monitors the processing status of substrates in a device manufacturing line, and when a transfer error occurs, determines the source storage unit corresponding to each substrate for all substrates present in the device manufacturing line based on the monitored processing status. After all substrates have been transported to the identified source storage unit, processing of substrates returned to the source storage unit is resumed. Among the substrates returned to the source storage unit, processed substrates are then transported to the destination storage unit.
Furthermore, the present invention includes a step of automatically recovering all substrates present in the device manufacturing line to the source storage unit from which each substrate was removed when a transport error occurs, and further includes a step of determining whether or not any substrates that cannot be automatically recovered exist in the device manufacturing line. Here, the feasibility of automatic recovery may be displayed on a display means. Furthermore, if the method includes a step of continuously monitoring positional information of substrates in the device manufacturing line, when a substrate that cannot be automatically recovered is manually recovered, the positional information of the substrate in the device manufacturing line is corrected.

[0007]
[Operation and Effect] In the present invention as described above, the processing status of substrates in a device manufacturing line is monitored, so the lot to which a substrate belongs, i.e., the corresponding source storage unit, can be easily and accurately identified. Furthermore, because all substrates in the device manufacturing line are temporarily returned to their respective first storage units based on the monitored processing status, the return processing of substrates can be standardized and made easier. Furthermore, by transporting processed substrates from the source storage unit to the destination storage unit, it is possible to avoid double processing, such as reprocessing substrates that have already been processed.
Furthermore, when a transport error occurs and each substrate is automatically returned to the source storage section, it is possible to determine whether or not there are any substrates in the device manufacturing line that cannot be automatically returned, and therefore, for example, whether or not automatic return is possible can be displayed on a display means. Furthermore, when positional information of substrates in the device manufacturing line is monitored sequentially, if a substrate that cannot be automatically returned is returned manually, it is possible to correct the positional information of the substrate in the device manufacturing line, and therefore, it is possible to always keep the positional information of the substrate appropriate.

Claims (5)

A method for recovering a plurality of substrates when a transport error occurs in a process of continuously processing a plurality of substrates unloaded from an origin storage unit in a device manufacturing line configured by connecting a plurality of device manufacturing apparatuses, comprising:
a first step of constantly monitoring the processing status of the substrate in the device manufacturing line;
a second step of determining, when the transport error occurs, the source storage unit from which each substrate was transported for all substrates present in the device manufacturing line based on the monitored processing status;
a third step of transporting all of the substrates to the identified source storage unit;
a fourth step of resuming processing of the substrate transported to the source storage section after the third step; 2. The substrate transport error recovery processing method according to claim 1, characterized in that, before performing the fourth step, processed substrates among the substrates returned to the source storage section in the third step are transported to a destination storage section for receiving processed substrates. A method for recovering a substrate when a transport error occurs in a process of continuously processing a plurality of substrates unloaded from an origin storage unit in a device manufacturing line configured by connecting a plurality of device manufacturing apparatuses, the method comprising:
When the transport error occurs, automatically recovering all of the substrates present in the device manufacturing line to the source storage unit from which each substrate was unloaded;
A substrate transport error recovery processing method, comprising the step of determining whether or not the substrate that cannot be automatically collected is present in the device manufacturing line. The method of claim 3,
a step of displaying on a display means whether or not each substrate can be automatically collected according to the result of the determination. A substrate transport error recovery processing method comprising: In the method of claim 3 or 4,
a step of sequentially monitoring position information of the substrate in the device manufacturing line,
A substrate transport error recovery processing method, comprising the step of correcting position information of the substrate when the substrate that cannot be automatically recovered is recovered manually.