JPH1012986A - Thick film printed circuit board - Google Patents
Thick film printed circuit boardInfo
- Publication number
- JPH1012986A JPH1012986A JP16160696A JP16160696A JPH1012986A JP H1012986 A JPH1012986 A JP H1012986A JP 16160696 A JP16160696 A JP 16160696A JP 16160696 A JP16160696 A JP 16160696A JP H1012986 A JPH1012986 A JP H1012986A
- Authority
- JP
- Japan
- Prior art keywords
- thick
- main surface
- film
- thick film
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4053—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
- H05K3/4061—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques for via connections in inorganic insulating substrates
Landscapes
- Parts Printed On Printed Circuit Boards (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
(57)【要約】
【課題】 半導体モジュール構造の選択枝を広げる一
方、半導体モジュールの小形化や高信頼性化を可能とす
る厚膜印刷基板の提供。
【解決手段】 少なくとも一主面が電子部品実装面を成
し、他主面側がキャリアプレートもしくはマザー基板10
面に半田付けされる厚膜印刷基板8であって、前記厚膜
印刷基板8の一主面側の厚膜配線8aがAg−Pt系で形成さ
れ、かつ他主面側の厚膜配線8bがAg−Pd系で形成されて
いることを特徴とする厚膜印刷基板である。すなわち、
本発明は、機能,目的に対応させ、厚膜配線8a,8bを形
成する導電性ペーストを適切に使い分け、良好なボンデ
ィビリテイを要する一主面側の厚膜配線8aをAg−Pt系
で、また、耐半田性を要求される他主面側の厚膜配線8b
をAg−Pd系でそれぞれ形成したことを骨子とするもので
ある。
Abstract: PROBLEM TO BE SOLVED: To provide a thick-film printed circuit board capable of reducing the size and increasing the reliability of a semiconductor module while expanding the options of a semiconductor module structure. SOLUTION: At least one main surface forms an electronic component mounting surface, and the other main surface side has a carrier plate or a mother substrate 10.
A thick-film printed board 8 to be soldered to a surface, wherein the thick-film wiring 8a on one main surface of the thick-film printed substrate 8 is formed of an Ag-Pt system, and the thick-film wiring 8b on the other main surface is Is a thick film printed board characterized by being formed of an Ag-Pd system. That is,
According to the present invention, the conductive paste for forming the thick-film wirings 8a and 8b is appropriately used in accordance with the function and purpose, and the thick-film wiring 8a on one main surface requiring good bondability is formed of an Ag-Pt system. In addition, thick film wiring 8b on the other main surface side where solder resistance is required
The main point is that each was formed in the Ag-Pd system.
Description
【0001】[0001]
【発明の属する技術分野】本発明は厚膜印刷基板に係
り、さらに詳しくは、より信頼性の高い半導体モジュー
ルの構成に適する厚膜印刷基板に関する。The present invention relates to a thick-film printed board, and more particularly, to a thick-film printed board suitable for a more reliable semiconductor module.
【0002】[0002]
【従来の技術】半導体モジュールは、電子回路(もしく
は電気回路)のコンパクト化や高容量化など図ることが
できるため、各種の電子機器類に広く使用されている。
そして、この種の半導体モジュールは、図3に要部を断
面的に示すような構成を採っている。たとえば、半導体
素子1aやコンデンサ1bなど、搭載する電子部品1の被接
続部となる導体パッド(たとえばワイヤボンディング用
パッド)を含む厚膜配線(印刷配線パターン)2aを一主
面に、また、他主面側をキャリアプレート3もしくはマ
ザー基板に半田付け4などする構成の厚膜印刷基板2が
使用されている。また、この種の厚膜印刷基板2とし
て、多層配線板型や他主面側に電子部品1の被接続部と
なる導体パッドを含む厚膜配線(印刷配線パターン)2b
が形成される場合もあり、このような構成では、たとえ
ばスルホール2cを介して両主面の厚膜配線2a,2b間を電
気的および機械的に接続した構成も知られている。2. Description of the Related Art Semiconductor modules are widely used in various electronic devices because they can reduce the size and capacity of electronic circuits (or electric circuits).
A semiconductor module of this type has a configuration in which main parts are shown in cross section in FIG. For example, a thick film wiring (printed wiring pattern) 2a including a conductive pad (for example, a wire bonding pad) serving as a connection portion of the electronic component 1 to be mounted, such as a semiconductor element 1a and a capacitor 1b, is provided on one main surface. A thick-film printed board 2 having a configuration in which the main surface is soldered 4 to a carrier plate 3 or a mother board is used. A thick-film printed board 2 of this type includes a multilayer wiring board type or a thick-film wiring (printed wiring pattern) 2b including a conductor pad to be connected to the electronic component 1 on the other main surface side.
In such a configuration, for example, a configuration in which the thick film wirings 2a and 2b on both main surfaces are electrically and mechanically connected via a through hole 2c is also known.
【0003】なお、図3において、5は厚膜印刷基板2
の一主面に搭載・配置された電子部品1を厚膜印刷基板
2面に固定する接着剤層、6は電子部品1と厚膜印刷基
板2面の被接続部を成す導体パッドとの間を電気的に接
続するボンディングワイヤ、7はキャリアプレート3の
端縁部に開口端部を接合して厚膜印刷基板2などを封止
する封止キャップである。[0005] In FIG. 3, reference numeral 5 denotes a thick film printed circuit board 2.
An adhesive layer for fixing the electronic component 1 mounted and arranged on one main surface of the thick-film printed board 2 to the surface of the thick-film printed board 2; Is a sealing cap for joining the open end to the edge of the carrier plate 3 to seal the thick print substrate 2 and the like.
【0004】ところで、上記厚膜印刷基板は、通常、次
のようにして製造されている。たとえばセラミックス系
絶縁基体の一主面に、Ag−Pt系,Ag−Pd系もしくはCuを
導電体とした導電性ペーストをスクリーン印刷し、その
後、 600〜 900℃程度の温度で焼成して導体パッドを含
む厚膜配線2aを形成する。次いで、前記セラミックス系
絶縁基体の他主面に、Ag−Pt系,Ag−Pd系もしくはCuを
導電体とした導電性ペーストをスクリーン印刷し、その
後、 600〜 900℃程度の温度で焼成して導体パッドを含
む厚膜配線2bを形成して、両面型の厚膜印刷基板を得て
いる。Incidentally, the above-mentioned thick-film printed board is usually manufactured as follows. For example, a conductive paste made of Ag-Pt, Ag-Pd or Cu as a conductor is screen-printed on one main surface of a ceramic insulating substrate, and then fired at a temperature of about 600 to 900 ° C to form a conductive pad. Is formed. Next, on the other main surface of the ceramic-based insulating substrate, a conductive paste using Ag-Pt-based, Ag-Pd-based or Cu as a conductor is screen-printed, and then fired at a temperature of about 600 to 900 ° C. The thick film wiring 2b including the conductor pad is formed to obtain a double-sided thick film printed board.
【0005】なお、スルホール2cを介して両厚膜配線2
a,2bを接続する場合は、いずれか一方の面で、両厚膜
配線2a,2bの一部を重ね合わせて行っている。また、ス
ルホール2c接続部を含めて、両厚膜配線2a,2bは、一般
的に、Ag−Pt系,Ag−Pd系もしくはCuのいずれか1種の
同一材料で形成されている。Note that both thick film wirings 2 are formed through the through holes 2c.
When connecting a and 2b, a part of both thick film wirings 2a and 2b is overlapped on one of the surfaces. The thick film wirings 2a and 2b including the through hole 2c connection part are generally formed of one and the same material of Ag-Pt system, Ag-Pd system or Cu.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、上記厚
膜印刷基板の構成においては、厚膜配線2a,2bを形成す
る材質面から、半田によるパターン喰れやワイヤボンデ
ィングの困難さなど、構成する半導体モジュールの小形
化,信頼性などの点で問題が提起されている。すなわ
ち、 (1)厚膜配線2a,2bをAg−Pt系で形成した場合は、キャ
リアプレートもしくはマザー基板に半田付けしたとき、
その半田中にAg−Pt系の一部が溶解し、電気的なオープ
ンを起こすことがあり、機能的な信頼性が損なわれる恐
れがある。However, in the structure of the above-mentioned thick film printed circuit board, the semiconductor material constituting the thick film wirings 2a and 2b has a problem such as pattern erosion due to solder and difficulty in wire bonding. Problems have been raised in terms of module miniaturization and reliability. That is, (1) When the thick film wirings 2a and 2b are formed of an Ag-Pt system, when soldered to a carrier plate or a mother board,
A part of the Ag-Pt system may be melted in the solder, which may cause an electrical open, which may impair the functional reliability.
【0007】(2)厚膜配線2a,2bをAg−Pd系で形成した
場合は、Ag−Pd系のボンダビリテイが劣るため、ワイヤ
ボンディングが困難で、搭載した半導体素子1aと厚膜印
刷基板2主面の被接続部との電気的な接続の信頼性が損
なわれ易い傾向がある。特に、Ag−Pd系は、ワイヤボン
ディングに多く使用されるAu線に対してボンダビリテイ
が劣っており、このワイヤボンディングの困難性は、半
導体モジュールの構成において由々しい問題といえる。(2) When the thick film wirings 2a and 2b are formed of an Ag-Pd system, the bondability of the Ag-Pd system is inferior, so that wire bonding is difficult, and the mounted semiconductor element 1a and the thick film printed board 2 There is a tendency that the reliability of electrical connection between the main surface and the connected portion is easily impaired. In particular, the Ag-Pd system is inferior in bondability to the Au wire often used for wire bonding, and the difficulty of the wire bonding is a serious problem in the configuration of the semiconductor module.
【0008】(3)厚膜配線2a,2bをCuで形成した場合
も、前記Ag−Pd系で形成した場合と同様に、ワイヤボン
ディングが困難で、信頼性の高い電気的な接続を形成し
難いという問題がある。また、Cu系導電性ペーストの場
合は、Cuの酸化防止を要することから、焼成条件の選
択,設定も煩雑化し、コストアップを招来するというデ
メリットもある。(3) Even when the thick film wirings 2a and 2b are formed of Cu, similar to the case of forming the Ag-Pd system, wire bonding is difficult and a highly reliable electrical connection is formed. There is a problem that it is difficult. Further, in the case of a Cu-based conductive paste, since it is necessary to prevent oxidation of Cu, selection and setting of the firing conditions are complicated, and there is a demerit that the cost is increased.
【0009】本発明は上記事情に対処してなされたもの
で、半導体モジュール構造の選択枝を広げる一方、半導
体モジュールの小形化や高信頼性化を可能とする厚膜印
刷基板の提供を目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has as its object to provide a thick-film printed circuit board capable of reducing the size and increasing the reliability of a semiconductor module while expanding the options of a semiconductor module structure. I do.
【0010】[0010]
【課題を解決するための手段】請求項1の発明は、少な
くとも一主面が電子部品実装面を成し、他主面側がキャ
リアプレートもしくはマザー基板面に半田付けされる厚
膜印刷基板であって、厚膜印刷基板の一主面側の厚膜配
線がAg−Pt系で形成され、かつ他主面側の厚膜配線がAg
−Pd系で形成されていることを特徴とする厚膜印刷基板
である。According to a first aspect of the present invention, there is provided a thick-film printed board in which at least one main surface forms an electronic component mounting surface and the other main surface is soldered to a carrier plate or a mother substrate surface. The thick-film wiring on one main surface of the thick-film printed board is formed of an Ag-Pt system, and the thick-film wiring on the other main surface is Ag.
-A thick-film printed board formed of a Pd-based material.
【0011】請求項2の発明は、少なくとも一主面が電
子部品実装面を成し、他主面側がキャリアプレートもし
くはマザー基板面に半田付けされる厚膜印刷基板であっ
て、厚膜印刷基板の一主面側の厚膜配線がAg−Pt系で形
成され、かつスルホール接続する他主面側の厚膜配線が
Ag−Pd系で形成されていることを特徴とする厚膜印刷基
板である。According to a second aspect of the present invention, there is provided a thick film printed circuit board having at least one principal surface forming an electronic component mounting surface and the other principal surface being soldered to a carrier plate or a mother substrate surface. The thick film wiring on one main surface is formed of an Ag-Pt system, and the thick film wiring on the other
It is a thick-film printed board formed of an Ag-Pd system.
【0012】請求項3の発明は、請求項1もしくは請求
項2記載の厚膜印刷基板において、一主面側のAg−Pt系
厚膜配線および他主面側のAg−Pd系厚膜配線が重層的に
接続するとき、Ag−Pt系厚膜配線を下層としたことを特
徴とする。According to a third aspect of the present invention, there is provided the thick film printed circuit board according to the first or second aspect, wherein the Ag-Pt thick film wiring on one principal surface side and the Ag-Pd thick film wiring on the other principal surface side. Is characterized by using an Ag-Pt-based thick film wiring as a lower layer when connecting in a multilayer manner.
【0013】すなわち、本発明は、機能,目的に対応さ
せ、厚膜配線を形成する導電性ペーストを適切に使い分
け、良好なボンディビリテイを要する一主面側の厚膜配
線をAg−Pt系で、また、耐半田性を要求される他主面側
の厚膜配線をAg−Pd系でそれぞれ形成したことを骨子と
するものである。That is, according to the present invention, the conductive paste for forming the thick film wiring is appropriately used in accordance with the function and purpose, and the thick film wiring on one main surface requiring good bondability is made of an Ag-Pt type. The main feature is that the thick-film wiring on the other main surface side, which is required to have solder resistance, is formed of an Ag-Pd system.
【0014】本発明において、厚膜印刷基板は、少なく
とも一主面に電子部品の実装面を成す厚膜配線を有し、
他主面側にも要すれば電子部品の実装を可能とする厚膜
配線を有し、かつマザー基板面などに半田付け可能に構
成された両面型もしくは多層型の厚膜印刷基板である。
そして、この厚膜印刷基板は、一般的に、たとえばアル
ミナ,窒化アルミなどを絶縁体としたセラミック系であ
り、前記したように、一主面に設けた厚膜配線がAg−Pt
系で、かつ他主面側に設けた厚膜配線がAg−Pd系で構成
されていることを要するけれど、多層型の内層厚膜配線
の素材は、前記Ag−Pt系,Ag−Pd系もしくは他の導電体
系でもよく、特に限定されない。なお、前記Ag−Pt系ペ
ーストの成分は、一般にAg96〜99重量%程度,Pt 1〜 4
重量%程度であり,同じくAg−Pd系ペーストの成分は、
Ag85〜90重量%程度,Pd15〜10重量%程度にそれぞれ選
択すことが好ましい。In the present invention, the thick-film printed board has a thick-film wiring on at least one principal surface thereof, which forms a mounting surface for electronic components,
If necessary, a double-sided or multilayer thick-film printed circuit board having a thick-film wiring for mounting electronic components on the other main surface side and configured to be solderable to a mother board surface or the like.
The thick-film printed board is generally of a ceramic type using, for example, alumina, aluminum nitride, or the like as an insulator. As described above, the thick-film wiring provided on one main surface is formed of Ag-Pt.
Although it is necessary that the thick film wiring provided on the other main surface side be composed of an Ag-Pd system, the material of the multi-layer type inner layer thick film wiring is the Ag-Pt system, the Ag-Pd system. Alternatively, another conductive system may be used, and there is no particular limitation. The components of the Ag-Pt paste are generally about 96 to 99% by weight of Ag, and Pt 1 to 4%.
% By weight, and the components of the Ag-Pd paste are
It is preferable to select about 85 to 90% by weight of Ag and about 15 to 10% by weight of Pd.
【0015】また、本発明に係る厚膜印刷基板は、前記
厚膜配線を形成する素材(導電性ペースト)の選択,使
い分けを除けば、常套的な厚膜印刷基板の製造方法によ
って製造することができる。たとえば、セラミック系絶
縁板の所定位置に、スルホール接続用の孔を穿設した
後、平均粒径が10〜15μm 程度のAg−Ptの混合粉体を導
電体として含有するペーストを一主面にスクリーン印刷
し、 600〜 900℃程度の温度で焼成して電子部品の被接
続部を含む厚膜配線を形成する。次いで、平均粒径が10
〜15μm 程度のAg−Pdの混合粉体を導電体として含有す
るペーストを他主面側および穿設孔内にスクリーン印刷
し、 600〜 900℃程度の温度で焼成してスルホール接続
を含む厚膜配線を形成することによって、両面型の厚膜
印刷基板が得られる。The thick film printed circuit board according to the present invention is manufactured by a conventional method for manufacturing a thick film printed circuit board except for selection and proper use of a material (conductive paste) for forming the thick film wiring. Can be. For example, after a hole for through-hole connection is formed at a predetermined position of a ceramic insulating plate, a paste containing a mixed powder of Ag-Pt having an average particle diameter of about 10 to 15 μm as a conductor is applied to one main surface. Screen printing and baking at a temperature of about 600 to 900 ° C. are performed to form thick-film wiring including connected parts of electronic components. Then, the average particle size is 10
A paste containing a mixed powder of Ag-Pd of about 15 μm as a conductor is screen-printed on the other main surface side and in the drilled holes, and fired at a temperature of about 600 to 900 ° C. to form a thick film including through-hole connection. By forming the wiring, a double-sided thick-film printed board is obtained.
【0016】なお、厚膜配線層間の接続は、電子部品の
被接続部を含む厚膜配線を形成するときに、穿設孔内に
もスクリーン印刷して行ってもよい。また、一般的に
は、スルホール穿設で行うが、絶縁性基板の側端面に沿
わせ溝を設け、この溝面を導電体層化して両面間を接続
する構成などを採ってもよい。さらに、前記厚膜印刷基
板の製造は、いわゆるグリーンシート法によって行うこ
ともできる。The connection between the thick-film wiring layers may be screen-printed in the perforated holes when forming the thick-film wiring including the connected parts of the electronic component. In general, through holes are formed, but a configuration may be adopted in which a groove is provided along the side end surface of the insulating substrate, and the groove surface is formed into a conductor layer to connect the two surfaces. Further, the production of the thick film printed board can be performed by a so-called green sheet method.
【0017】請求項1および請求項2の発明では、電子
部品実装面の厚膜配線がAg−Pt系で、かつ半田付けされ
る他主面の厚膜配線がAg−Pd系でそれぞれ形成されてい
る。つまり、実装される電子部品と厚膜配線とをワイヤ
ボンディングするとき、被接続部となるパッドがボンデ
ィングビリテイの良好なAg−Pt系で形成されているた
め、ワイヤボンディングを容易に行うことができる。ま
た、他主面に形成された厚膜配線は半田に難溶解性のAg
−Pd系であるため、半田喰れなどによるオープン発生の
恐れも解消されるので、結果的に、小形化を図りながら
信頼性の高い半導体モジュールを提供することができ
る。According to the first and second aspects of the present invention, the thick film wiring on the electronic component mounting surface is formed of an Ag-Pt system, and the thick film wiring of the other main surface to be soldered is formed of an Ag-Pd system. ing. In other words, when the electronic component to be mounted and the thick film wiring are wire-bonded, the pads to be connected are formed of an Ag-Pt system having good bonding ability, so that wire bonding can be easily performed. it can. In addition, thick film wiring formed on the other main surface is made of Ag, which is hardly soluble in solder.
Since it is a Pd-based material, the risk of occurrence of open due to solder erosion or the like is eliminated, and as a result, a highly reliable semiconductor module can be provided while reducing the size.
【0018】請求項3の発明では、Ag−Pt系厚膜配線お
よびAg−Pd系厚膜配線が重層的に接続する接続構成を採
った場合、Ag−Pd系厚膜配線をAg−Pt系厚膜配線端部に
重ね,被覆する構成としたことによって、半田中に溶解
し易いAg−Pt系の厚膜配線端部が保護された形となるた
め、半田による悪影響のさらなる回避,低減が図られ
る。According to the third aspect of the present invention, in the case where a connection structure in which the Ag-Pt thick film wiring and the Ag-Pd thick film wiring are connected in a multilayer manner is adopted, the Ag-Pd thick film wiring is connected to the Ag-Pt thick film wiring. By adopting a configuration that overlaps and covers the end of the thick-film wiring, the end of the Ag-Pt-based thick-film wiring that is easily dissolved in the solder is protected, thus further avoiding and reducing the adverse effects of solder. It is planned.
【0019】[0019]
【発明の実施の形態】以下図1および図2を参照して本
発明を説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to FIGS.
【0020】図1は、第1実施例の要部構造を断面的に
示したもので、8は一主面が電子部品9の実装面を成
し、他主面がキャリアプレート10面に半田付けされる厚
膜印刷基板である。ここで、厚膜印刷基板8は、たとえ
ば、厚さが 0.5mm程度,辺が 8× 8mm程度の絶縁性のア
ルミナ系セラミック板8′を絶縁体とし、一主面側にAg
−Pt系の被接続部(たとえばボンディングパッド)を含
む厚膜配線8aが形成されおり、また、他主面側にAg−Pd
系の厚膜配線8bが形成されている。さらに、これら量厚
膜配線8a,8bは、アルミナ系セラミック板8′の所要位
置に穿設したスルホール8c内壁面に延設的に形成された
Ag−Pt系の導体層8dによって、電気的に接続されてい
る。FIG. 1 is a cross-sectional view showing the structure of a main part of the first embodiment. Reference numeral 8 denotes a surface on which one main surface forms a mounting surface of an electronic component 9 and the other main surface forms a surface for soldering on a carrier plate 10. It is a thick film printed board to be attached. Here, the thick film printed board 8 is made of, for example, an insulating alumina-based ceramic plate 8 ′ having a thickness of about 0.5 mm and sides of about 8 × 8 mm as an insulator, and a Ag surface on one main surface side.
A thick film wiring 8a including a -Pt-based connected portion (for example, a bonding pad) is formed, and Ag-Pd is formed on the other main surface side.
A system thick film wiring 8b is formed. Further, these thick film wirings 8a and 8b are formed so as to extend on the inner wall surface of the through hole 8c formed at a required position of the alumina ceramic plate 8 '.
They are electrically connected by an Ag-Pt-based conductor layer 8d.
【0021】次に、上記厚膜印刷基板8の製造方法例に
ついて説明する。Next, an example of a method of manufacturing the thick film printed board 8 will be described.
【0022】先ず、所要寸法もしくは規格の絶縁性アル
ミナ系セラミック板8′を用意し、所定位置にスルホー
ル8cを穿設する。一方、平均粒径10〜15μm 程度のAg−
Pt混合粉末(重量比Ag:Pt=99: 1)を導電体としたAg
−Pt系導電性ペースト、平均粒径10〜15μm 程度のAg−
Pd混合粉末(重量比Ag:Pd=85:15)を導電体としたAg
−Pd系導電性ペーストをそれぞれ用意する。First, an insulating alumina-based ceramic plate 8 'having a required size or standard is prepared, and a through hole 8c is formed at a predetermined position. On the other hand, Ag- with an average particle size of about 10 to 15 μm
Ag using Pt mixed powder (weight ratio Ag: Pt = 99: 1) as conductor
-Pt-based conductive paste, Ag with an average particle size of about 10 to 15 μm-
Ag with Pd mixed powder (weight ratio Ag: Pd = 85: 15) as conductor
-Prepare a Pd-based conductive paste.
【0023】次に、前記絶縁性アルミナ系セラミック板
8′の一主面に、Ag−Pt系導電性ペーストをスクリーン
印刷法によって、搭載する電子部品9の電極端子とワイ
ヤボンディングするパッドを含む配線パターンおよびス
ルホール8c内壁面などを印刷する。その後、この印刷済
み絶縁性アルミナ系セラミック板8′を電気炉に収容
し、空気雰囲気中, 600〜 900℃の温度で焼成処理を行
って、Ag−Pt系の厚膜配線8aおよびスルホール導体層8d
を形成する。Next, on one main surface of the insulating alumina-based ceramic plate 8 ', a wiring including a pad for wire-bonding to an electrode terminal of an electronic component 9 to be mounted by screen printing of an Ag-Pt-based conductive paste. Print the pattern and the inner wall surface of the through hole 8c. Thereafter, the printed insulating alumina-based ceramic plate 8 'is housed in an electric furnace, and baked in an air atmosphere at a temperature of 600 to 900 [deg.] C. to form an Ag-Pt thick film wiring 8a and a through-hole conductor layer. 8d
To form
【0024】次いで、前記絶縁性アルミナ系セラミック
板8′の他主面に、Ag−Pd系導電性ペーストをスクリー
ン印刷し、前記スルホール導体層8dの端縁部に一部が重
層する形の配線パターンを設ける。この後、印刷済み絶
縁性アルミナ系セラミック板8′を電気炉に収容し、空
気雰囲気中, 600〜 900℃の温度で、前記印刷形成した
配線パターンの焼成処理を行って、Ag−Pd系の厚膜配線
8bを形成することにより、図1に図示したような要部構
成の膜厚印刷基板が歩留まりよく得られる。Next, an Ag-Pd-based conductive paste is screen-printed on the other main surface of the insulating alumina-based ceramic plate 8 'to form a wiring partially overlapping the edge of the through-hole conductor layer 8d. Provide a pattern. Thereafter, the printed insulating alumina-based ceramic plate 8 'is housed in an electric furnace, and the printed wiring pattern is baked at a temperature of 600 to 900 ° C. in an air atmosphere to obtain an Ag-Pd-based wiring pattern. Thick film wiring
By forming 8b, a film-thickness printed board having a main part configuration as shown in FIG. 1 can be obtained with a high yield.
【0025】図2は、第2実施例の要部構造を断面的に
示したもので、8は一主面が電子部品9の実装面を成
し、他主面がキャリアプレート10面に半田付けされる厚
膜印刷基板である。ここで、厚膜印刷基板8は、たとえ
ば、厚さが 0.5mm程度,辺が 8× 8mm程度の絶縁性のア
ルミナ系セラミック板8′を絶縁体とし、一主面側にAg
−Pt系の被接続部(たとえばボンディングパッド)を含
む厚膜配線8aが形成されおり、また、他主面側にAg−Pd
系の厚膜配線8bが形成されている。さらに、これら量厚
膜配線8a,8bは、アルミナ系セラミック板8′の所要位
置に穿設したスルホール8c内壁面に延設的に形成された
Ag−Pd系の導体層8d′によって、電気的に接続されてい
る。FIG. 2 is a cross-sectional view showing the structure of a main part of the second embodiment. Reference numeral 8 denotes a main surface forming an electronic component 9 mounting surface, and another main surface soldering to a carrier plate 10 surface. It is a thick film printed board to be attached. Here, the thick film printed board 8 is made of, for example, an insulating alumina-based ceramic plate 8 ′ having a thickness of about 0.5 mm and sides of about 8 × 8 mm as an insulator, and a Ag surface on one main surface side.
A thick film wiring 8a including a -Pt-based connected portion (for example, a bonding pad) is formed, and Ag-Pd is formed on the other main surface side.
A system thick film wiring 8b is formed. Further, these thick film wirings 8a and 8b are formed so as to extend on the inner wall surface of the through hole 8c formed at a required position of the alumina ceramic plate 8 '.
They are electrically connected by an Ag-Pd-based conductor layer 8d '.
【0026】次に、上記厚膜印刷基板8の製造方法例に
ついて説明する。Next, an example of a method of manufacturing the thick film printed board 8 will be described.
【0027】先ず、所要寸法もしくは規格の絶縁性アル
ミナ系セラミック板8′を用意し、所定位置にスルホー
ル8cを穿設する。一方、平均粒径10〜15μm 程度のAg−
Pt混合粉末(重量比Ag:Pt=99: 1)を導電体としたAg
−Pt系導電性ペースト、平均粒径10〜15μm 程度のAg−
Pd混合粉末(重量比Ag:Pd=85:15)を導電体としたAg
−Pd系導電性ペーストをそれぞれ用意する。First, an insulating alumina-based ceramic plate 8 'having a required size or standard is prepared, and a through hole 8c is formed at a predetermined position. On the other hand, Ag- with an average particle size of about 10 to 15 μm
Ag using Pt mixed powder (weight ratio Ag: Pt = 99: 1) as conductor
-Pt-based conductive paste, Ag with an average particle size of about 10 to 15 μm-
Ag with Pd mixed powder (weight ratio Ag: Pd = 85: 15) as conductor
-Prepare a Pd-based conductive paste.
【0028】次に、前記絶縁性アルミナ系セラミック板
8′の一主面に、Ag−Pt系導電性ペーストをスクリーン
印刷法によって、搭載する電子部品9の電極端子とワイ
ヤボンディングするパッドを含む配線パターンを印刷す
る。その後、この印刷済み絶縁性アルミナ系セラミック
板8′を電気炉に収容し、空気雰囲気中, 600〜 900℃
の温度で焼成処理を行って、Ag−Pt系の厚膜配線8aを形
成する。Next, on one main surface of the insulating alumina-based ceramic plate 8 ', a wiring including a pad for wire-bonding with an electrode terminal of an electronic component 9 to be mounted is screen-printed with an Ag-Pt-based conductive paste. Print the pattern. Thereafter, the printed insulating alumina-based ceramic plate 8 'is placed in an electric furnace, and is placed in an air atmosphere at 600 to 900 ° C.
The baking process is performed at a temperature of 5 mm to form an Ag-Pt thick film wiring 8a.
【0029】次いで、前記絶縁性アルミナ系セラミック
板8′の他主面に、Ag−Pd系導電性ペーストをスルホー
ル8c内壁面など含めてスクリーン印刷し、前記Ag−Pt系
の厚膜配線8aの端縁部に一部が重層する形のスルホール
導体を含む配線パターンを設ける。この後、印刷済み絶
縁性アルミナ系セラミック板8′を電気炉に収容し、空
気雰囲気中, 600〜 900℃の温度で、前記印刷形成した
配線パターンの焼成処理を行って、Ag−Pd系のスルホー
ル導体層8d′を含む厚膜配線8bを形成することにより、
図2に図示したような要部構成の膜厚印刷基板が歩留ま
りよく得られる。 上記構成の厚膜印刷基板を半導体モ
ジュール用とし、ワイヤボンディング方式を採った常套
的な実装手段で半導体モジュールを形成したところ、ワ
イヤボンディングが容易かつ良好に行われ、歩留まりよ
く信頼性の高い電気的な接続が形成された。また、上記
形成した半導体モジュールの他主面を、キャリアプレー
トもしくはマザー基板面に常套的な半田付け手段で組み
込んだ後、電気的な特性評価を行ったところ、半田付け
による厚膜配線パターンの喰れ,溶解などの発生、電気
的なオープンの発生など認められず、信頼性の高い回路
構成を保持していた。 なお、本発明は、上記実施例に
限定されるものでなく、発明の趣旨を逸脱しない範囲で
いろいろの変形を採ることができる。たとえば厚膜印刷
基板は、両面型以外の多層型でもよいし、絶縁体も窒化
アルミなど、アルミナ以外のセラミック系でもよい。ま
た、構成のコンパクト化もしくは配線密度の向上などを
考慮した場合、配線パターン層間の電気的な接続はスル
ホール接続やビア接続などが好ましいけれど、これらに
限定されない。Next, an Ag-Pd-based conductive paste is screen-printed on the other main surface of the insulating alumina-based ceramic plate 8 'including the inner wall surfaces of the through holes 8c to form the Ag-Pt-based thick film wiring 8a. A wiring pattern including a through-hole conductor partially overlapping is provided at the edge. Thereafter, the printed insulating alumina-based ceramic plate 8 'is housed in an electric furnace, and the printed wiring pattern is baked at a temperature of 600 to 900 ° C. in an air atmosphere to obtain an Ag-Pd-based wiring pattern. By forming the thick film wiring 8b including the through-hole conductor layer 8d ',
As shown in FIG. 2, a printed circuit board having a main part configuration as shown in FIG. The thick film printed circuit board having the above-described structure is used for a semiconductor module, and the semiconductor module is formed by a conventional mounting means employing a wire bonding method. Connection was formed. After the other main surface of the semiconductor module formed above was incorporated into a carrier plate or a mother substrate surface by conventional soldering means, and electrical characteristics were evaluated. There was no occurrence of dissolution, occurrence of electrical opening, etc., and a highly reliable circuit configuration was maintained. It should be noted that the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the invention. For example, the thick-film printed board may be a multilayer type other than the double-sided type, and the insulator may be a ceramic type other than alumina, such as aluminum nitride. Further, in consideration of downsizing of the configuration or improvement of the wiring density, the electrical connection between the wiring pattern layers is preferably through hole connection or via connection, but is not limited thereto.
【0030】[0030]
【発明の効果】上記本発明によれば、電子部品がワイヤ
ボンディングされるパッドを含む厚膜配線がボンディン
グビリテイの良好なAg−Pt系で形成されているため、信
頼性の高いワイヤボンディングを容易に達成できる。一
方、他主面の厚膜配線が半田に難溶解性のAg−Pd系で形
成されているため、半田喰れなどによるオープン発生の
恐れも解消される。このように、ワイヤボンディングを
容易にできることは、半導体素子をモールドパッケージ
として搭載・実装する必要のないことを意味し、半導体
ミジュールのコンパクト化が図られることになる。ま
た、耐半田性を考慮し、Ag−Pd系膜の難溶解性を巧みに
利用したことに伴って、半田付けに起因するトラブルな
ども回避されので、結果的に、小形化を図りながら信頼
性の高い半導体モジュールを提供することができる。According to the present invention, since a thick film wiring including a pad to which an electronic component is wire-bonded is formed of an Ag-Pt system having good bonding ability, a highly reliable wire bonding can be performed. Easy to achieve. On the other hand, since the thick-film wiring on the other main surface is formed of an Ag-Pd system that is hardly soluble in solder, the possibility of occurrence of open due to solder erosion or the like is eliminated. As described above, the fact that wire bonding can be easily performed means that it is not necessary to mount and mount the semiconductor element as a mold package, and the semiconductor module can be made compact. Also, taking into account solder resistance, the skillful use of the insolubility of the Ag-Pd-based film prevents problems due to soldering, etc. A highly reliable semiconductor module can be provided.
【図1】第1の実施例に係る厚膜印刷基板の要部構成を
示す断面図。FIG. 1 is a cross-sectional view illustrating a configuration of a main part of a thick-film printed board according to a first embodiment.
【図2】第2の実施例に係る厚膜印刷基板の要部構成を
示す断面図。FIG. 2 is a cross-sectional view illustrating a configuration of a main part of a thick-film printed board according to a second embodiment.
【図3】従来の半導体モジュールの要部構成を示す断面
図。FIG. 3 is a cross-sectional view showing a main part configuration of a conventional semiconductor module.
1,9……電子部品 1a……半導体素子 1b……コンデンサ 2,8……厚膜印刷基板 2a,8a……一主面側の厚膜配線 2b,8b……他主面側の厚膜配線 2c,8c……スルホール 3,10……キャリアプレート 4……半田層 5……接着剤層 6……ボンディングワイヤ 7……封止キャップ 8d,8d′……スルホール導体層 1, 9: electronic components 1a: semiconductor element 1b: capacitor 2, 8: thick film printed circuit board 2a, 8a: thick wiring on one main surface 2b, 8b: thick film on the other main surface Wiring 2c, 8c Through hole 3, 10 Carrier plate 4 Solder layer 5 Adhesive layer 6 Bonding wire 7 Sealing cap 8d, 8d 'Through hole conductor layer
Claims (3)
し、他主面側がキャリアプレートもしくはマザー基板面
に半田付けされる厚膜印刷基板であって、 厚膜印刷基板の一主面側の厚膜配線がAg−Pt系で形成さ
れ、かつ他主面側の厚膜配線がAg−Pd系で形成されてい
ることを特徴とする厚膜印刷基板。At least one principal surface forms an electronic component mounting surface, and the other principal surface side is a thick film printed board which is soldered to a carrier plate or a mother substrate surface, wherein the one principal surface side of the thick film printed substrate is Wherein the thick film wiring is formed of an Ag-Pt system and the thick film wiring of the other main surface is formed of an Ag-Pd system.
し、他主面側がキャリアプレートもしくはマザー基板面
に半田付けされる厚膜印刷基板であって、 厚膜印刷基板の一主面側の厚膜配線がAg−Pt系で形成さ
れ、かつスルホール接続する他主面側の厚膜配線がAg−
Pd系で形成されていることを特徴とする厚膜印刷基板。2. A thick-film printed board having at least one main surface forming an electronic component mounting surface and the other main surface being soldered to a carrier plate or a mother board surface, wherein the one main surface side of the thick-film printed substrate Is formed of an Ag-Pt system, and the thick-film wiring on the other main surface to be through-hole connected is Ag-Pt.
A thick-film printed board formed of a Pd-based material.
面側のAg−Pd系厚膜配線が重層的に接続するとき、Ag−
Pt系厚膜配線が下層とされていることを特徴とする請求
項1もしくは請求項2記載の厚膜印刷基板。3. When the Ag-Pt thick film wiring on one main surface side and the Ag-Pd thick film wiring on the other main surface side are connected in a multilayer manner,
3. The thick-film printed circuit board according to claim 1, wherein the Pt-based thick-film wiring is a lower layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16160696A JPH1012986A (en) | 1996-06-21 | 1996-06-21 | Thick film printed circuit board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16160696A JPH1012986A (en) | 1996-06-21 | 1996-06-21 | Thick film printed circuit board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1012986A true JPH1012986A (en) | 1998-01-16 |
Family
ID=15738362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16160696A Abandoned JPH1012986A (en) | 1996-06-21 | 1996-06-21 | Thick film printed circuit board |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1012986A (en) |
-
1996
- 1996-06-21 JP JP16160696A patent/JPH1012986A/en not_active Abandoned
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