JPH10132706A - Liquid crystal display panel inspection equipment - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To reduce the fatigue of an operator and increase the work efficiency. An inspection apparatus includes: a probe unit disposed at an inspection position for inspecting a liquid crystal display panel; a table for receiving and supporting the liquid crystal display panel in an inclined state;
An inspection stage for receiving and supporting a table, wherein the inspection stage adjusts the position of the liquid crystal display panel with respect to the probe unit; And a transfer means for delivering. By moving the table to the inspection position and the delivery position on the opposite side with the probe unit in between the inspection stage and the transport means, the liquid crystal display panel is attached to and detached from the table at the inspection position, and the liquid crystal display panel is turned on. And a test.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for visually inspecting the quality of a liquid crystal display panel.

[0002]

2. Description of the Related Art In a visual inspection apparatus for a liquid crystal display panel, generally, the state of a liquid crystal display panel disposed at an inspection station for performing a lighting test, particularly the lighting state, is opposite to that of the liquid crystal display panel with respect to a probe unit for inspection. Therefore, it is necessary to check the quality of the liquid crystal display panel by visually observing the liquid crystal display panel from the side, which prevents the probe unit from directly attaching and detaching the liquid crystal display panel to and from the inspection station.

In view of the above, a delivery station for delivering a liquid crystal display panel to an inspection device and an inspection station for performing a lighting test of the liquid crystal display panel are provided in the housing, and the liquid crystal display panel is provided between the delivery station and the inspection station. (See Japanese Patent Application Laid-Open No. HEI 9-260572). In the inspection apparatus, the liquid crystal display panel is transferred and coarsely aligned with the inspection apparatus at the transfer station, and the precision alignment and lighting test of the liquid crystal display panel with the probe unit are performed at the transfer station. 2-263451, JP-A-5-134227).

However, since the distance between the delivery station and the inspection station is generally proportional to the size of the probe unit and its accessories, the conventional inspection apparatus inspects a 15-inch liquid crystal display panel, for example. Even in the apparatus, the distance between the delivery station and the inspection station is several tens of cm. For this reason, in the conventional inspection device, the worker must frequently move to the delivery station and the inspection station,
Inspection work including delivery work becomes a standing work, which increases worker fatigue and reduces work efficiency. Furthermore, in the conventional inspection device, the delivery station and the inspection station are spaced apart from each other in the horizontal direction. Is big.

[0005]

SUMMARY OF THE INVENTION An object of the present invention is to reduce the fatigue of an operator and to increase the work efficiency.

[0006]

An inspection apparatus according to the present invention comprises a probe unit disposed at an inspection position for inspecting a liquid crystal display panel, a table for receiving and supporting the liquid crystal display panel in an inclined state, and a table for receiving the table. An inspection stage for adjusting the position of the liquid crystal display panel with respect to the probe unit, and a table for the inspection stage at a delivery position in front of the inspection position and obliquely downward or obliquely upward. The inspection stage and the transportation unit move the table to the inspection position and the delivery position on opposite sides of the probe unit.

When the liquid crystal display panel is attached to and detached from the table, the table is received by the transport means, and is moved by the transport means to a side opposite to the inspection stage with respect to the probe unit. Maintained in the inspection position.

When the operator places the liquid crystal display panel on the table maintained at the inspection position, the table is:
While the liquid crystal display panel is supported, the liquid crystal display panel is first conveyed from the inspection position to the transfer position by the transfer means, then transferred from the transfer means to the inspection stage at the transfer position, and then moved from the transfer position to the inspection position by the inspection stage. Thereafter, the liquid crystal display panel is inspected while being supported by the table at the inspection position.

When the inspection is completed, the table is first moved from the inspection position to the delivery position by the inspection stage while supporting the liquid crystal display panel, and then transferred from the inspection stage to the transfer means at the delivery position, and then by the transport means. It is transported from the delivery position to the inspection position. Thereafter, the liquid crystal display panel is removed from the table by the operator at the inspection position.

The transport path of the table between the inspection position by the transport means and the inspection stage and the delivery position is opposite to each other with the probe unit in between. The liquid crystal display panel is moved to an inspection position and a delivery position together with the table in an oblique state. The attachment and detachment of the liquid crystal display panel to and from the table and the visual inspection are performed by an operator at the inspection position.

According to the present invention, the table is moved between the inspection position and the delivery position by the transport means and the inspection stage in a state where the table supports the liquid crystal display panel, and the table is moved at the delivery position. Since the transfer is performed between the transporting means and the inspection stage, the operator can perform attachment / detachment of the liquid crystal display panel to the table and visual inspection at the inspection position, and as a result, fatigue of the operator is reduced. , Work efficiency is increased.

The inspection position and the delivery position are separated from each other in the forward-downward direction, and the liquid crystal display panel is arranged on the table so as to be inclined forward-downward. In this state, the table can be moved and delivered. As a result, the occupied area is reduced by the distance that the delivery position is separated from the inspection position obliquely forward and downward or obliquely rearward and upward, as compared with the conventional inspection apparatus in which the delivery position and the inspection position are horizontally separated.

[0013] The transport means may include grip means for releasably gripping the table, and drive means for moving the grip means to an inspection position and a delivery position, and the grip means may be moved by the drive means. And a moving mechanism for displacing the gripper to hold and release the table, the gripper being displaceably supported by the transport frame to releasably grip the table.

The illuminating means for illuminating the liquid crystal front panel arranged at the inspection position from behind can be arranged on a table or an inspection stage.

In a preferred embodiment, the inspection stage comprises: a θ stage for adjusting the angular position of the liquid crystal display panel around a θ axis extending in a direction intersecting the liquid crystal display panel disposed at the inspection position; A Z stage that adjusts the position of the liquid crystal display panel in the direction; and an X stage and a Y stage that adjusts the position of the liquid crystal display panel in the direction of the X axis and the Y axis that intersect with the θ axis and intersect each other.

In a preferred embodiment, the apparatus further includes a base for supporting the inspection stage and a base plate for supporting the probe unit, wherein the base plate has an opening for receiving at least a part of the probe unit at the inspection position, and has an inspection position. An opening for transferring the table between the stage and the transfer means can be provided at the transfer position.

In a preferred embodiment, the apparatus further includes a housing accommodating the probe unit, the table, the inspection stage, and the transporting means, and the housing has an opening for viewing the liquid crystal display panel disposed on the inspection stage. be able to.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 1 to 4, an inspection apparatus 10 is used for lighting inspection of a square liquid crystal display, that is, a liquid crystal display panel 12. FIG. The liquid crystal display panel 12
It is a panel having a plurality of electrodes at each edge corresponding to a plurality of adjacent sides of a rectangle.

Hereinafter, in both the inspection apparatus 10 and the liquid crystal display panel 12, the direction of the short edge (left-right direction) of the liquid crystal display panel 12 is referred to as X direction, and the direction of the long edge of the liquid crystal display panel 12 is referred to as Y direction. The direction perpendicular to the display surface of the liquid crystal display panel 12 is called the Z direction. Also, the axes extending in the X direction and the Y direction are respectively the X axis and the Y axis.
An axis extending in the Z direction is referred to as a Z axis or a θ axis.

The inspection apparatus 10 includes a frame, that is, a housing 1.
4, a probe unit 16 arranged in the housing, a table 18 for supporting the liquid crystal display panel 12, an inspection stage 20 for adjusting the position of the liquid crystal display panel 12 with respect to the probe unit 16, and an inspection while moving the table 18 It includes a transfer means for transferring the table 18 to and from the stage 20, that is, a transfer mechanism 22.

The housing 14 is formed in a box shape by a plurality of steel materials such as an angle material and a plurality of plate materials attached to the steel material by a plurality of screw members. An upper portion of the front surface of the housing 14 is formed as an inclined portion 24 by an inclined flat plate. The inclined portion 24 has a rectangular opening 26 used for attaching and detaching the liquid crystal display panel 12 and visually inspecting the liquid crystal display panel 12.
At the center.

A portion of the housing 14 facing the opening 26 functions as an inspection position 28 of the liquid crystal display panel 12. On the other hand, a portion separated from the inspection position 28 obliquely forward and downward acts as a transfer position 30 for transferring the table 18 between the inspection stage 20 and the transport mechanism 22. However, the delivery position 30 may be a part that is separated from the inspection position 28 obliquely rearward and upward.

The probe unit 16 includes a probe base 32 in the shape of a rectangular plate, a plurality of L-shaped probe blocks 34 attached to the probe base 32 by one or more screw members, and a pair such as a television camera. And an alignment camera 36.

The probe base 32 has a rectangular opening 38 similar to the liquid crystal display panel 12 to be inspected at the center, and is detachably attached to the upward front or front upper surface of the rectangular base plate 40. The base plate 40 is assembled to the housing 14 in a state where the front side is inclined downward so that the front side is downward. For this reason, the probe base 32 is also inclined forward and downward.

One end of each probe block 34 is connected to the probe base 32 through an opening 38 of the probe base 32.
Is mounted on the front side of the probe base 32 so as to reach the back side of the probe base 32. Each probe block 34 has a plurality of probes at one end. Each probe is connected to an appropriate electric circuit by a cable (not shown).

Each alignment camera 36 has a table 1
When the inspection stage 8 is moved to the inspection position 28 by the inspection stage 20, the alignment mark of the liquid crystal display panel 12 arranged at the inspection position 28 is mounted on the probe base 32 so as to be photographed through the opening 38 of the probe base 32. I have. The output signal of the alignment camera 36 is used for precise alignment of the liquid crystal display panel 12 with respect to the probe unit 16.

The base plate 40 has two rectangular openings 42 and 44 spaced apart in the longitudinal direction. One opening 42 is the inspection position 28 and the other opening 44 is the transfer position 30. Thus, it is assembled to the housing 14. The probe unit 16 is attached to the front upper surface of the base plate 40 such that the opening 38 of the probe base 32 faces the opening 42 and one end of the probe block 34 projects into the opening 42 of the base plate 40.

The table 18 is in the form of a box having a rectangular parallelepiped opening on the side of the inclined portion 24 so as to receive and support the liquid crystal display panel 12 in a downwardly inclined state. At four end edges, suction grooves 46 (see FIG. 3) are provided. Each suction groove 46 is connected to a vacuum source (not shown) such as a vacuum pump so that the table 18 functions as a vacuum chuck for vacuum-sucking the back surface of the corresponding edge of the liquid crystal display panel 12.

The table 18 is provided with a pair of elongated plate-like stoppers 48 for coarsely positioning the liquid crystal display panel 12. The stopper 48 is attached to the outer side surfaces of two adjacent edges on which the suction grooves 46 are formed, with a plurality of screw members partially protruding toward the inclined portion 24.

The stopper 48 is used for rough alignment of the liquid crystal display panel 12 with respect to the table 18 and thus the probe unit 16. In the illustrated example, the stopper 48 is provided on the outer surface of the front lower edge of the table 18 and one lateral edge so as to prevent the liquid crystal display panel 12 from sliding down on the table 18. And the outer surface of the

The inspection stage 20 rotates the table 18 angularly about a Z-axis perpendicular to the liquid crystal display panel 12, and also rotates the table 18 in two directions (Y and Y) perpendicular to the plane of the liquid crystal display panel 12. (X direction) and four stages 50, 52, 54 and 56 forming a table moving mechanism, ie, an alignment stage.

The stages 50, 52, 54 and 56
A θ stage that rotates angularly around the Z axis (θ axis), a Z stage that moves the table 18 in the direction of the Z axis, a Y stage that moves the table 18 in the direction of the Y axis, and a table 18, respectively. Is an X stage for moving in the direction of the X axis. The table 18, the θ stage 50, the Z stage 52, and the Y stage 54 are supported by stages 50, 52, 54, and 56, respectively.

The inspection stage 20 is mounted on one surface of a rectangular plate-like base 58 at an X stage 56. The base 58 is attached to the housing 14 in a state of being inclined forward and downward so that the inside of the housing 14 extends in the X direction and the table 18 is on the side of the inclined portion 24. X
The stage 56 includes the table 18 and the stages 50 and 5.
2 and 54 extend in the X direction so as to move to the inspection position 28 and the delivery position 30. However, the table 18 and the inspection stage 20 may be moved to the inspection position 28 and the delivery position 30 by another mechanism such as a screw jack, an air cylinder mechanism, or a hydraulic cylinder mechanism.

The θ stage 50 has, as shown in FIG. 3, a suction groove 60 for releasably sucking the table 18,
Guide holes (not shown) formed in the bottom surface of table 18
And a pair of guide pins 62 fitted on the front upper surface. The suction groove 60 is connected to a vacuum source (not shown) such as a vacuum pump so that the θ stage 50 also functions as a vacuum chuck for vacuum-sucking the bottom surface of the table 18. The guide pins 62 are formed at positions facing each other via the suction grooves 60.

The transport mechanism 22 includes a pair of rails 64 mounted on the upper surface of the base plate 40 so as to extend in parallel in the X direction, a transport frame 66 movably received in the X direction, and a transport frame 66 in the Y direction. A pair of gripping members 68 movably supported by the transport frame 66, a first drive mechanism 70 for moving the frame 66 to the inspection position 28 and the delivery position 30, and a movement in which the gripping members 68 are shifted toward and away from each other. And a pair of second drive mechanisms 72 to be driven.

The frame 66 has an elongated rectangular shape extending in the Y direction, and is moved in the Y direction by a first drive mechanism 70 at a position on the front side above the position of the probe unit 16 in the Z direction. Frame 66 is Y
It has an elongated rectangular opening 74 extending in the direction. Opening 7
In FIG. 4, a pair of long supporting members 76 are arranged near the end of the opening 74.

The support member 76 is attached to the frame 66 so as to extend in the X direction in parallel. Each gripping member 6
8 is movably supported by a pair of guide shafts 78 projecting from the support member 76 toward the center of the frame. The guide shaft 78 extends through the holding member 68.

Each gripping member 68 has a guide pin 80. The guide pin 80 is received in the guide hole of the table 18 when the gripping member grips the table 18, and positions the table 18 with respect to the transport mechanism 22.

The first driving mechanism 70 is constituted by an appropriate mechanism such as a timing belt and its driving device.
Further, it is connected to the frame 66 by a loading holder 82. Each second drive mechanism 72 is formed of an air cylinder mechanism, and is supported by a support member 76. However, other mechanisms such as a cylinder mechanism, a screw jack, a linear motor, a mechanism using a rotation source, a pinion, and a rack may be used as the first and second driving mechanisms 70 and 72.

As shown in FIG. 3, the backlight 84 as an illuminating means is adapted to illuminate the liquid crystal display panel 12 supported by the table 18 from the back thereof.
Housed within. Thus, the table 18 functions as a work table.

When the liquid crystal display panel 12 is attached to and detached from the table 18, the table 18
Transport mechanism 2 so as to receive
The probe unit 16 is gripped by the two pair of gripping members 68 and is maintained on the side of the frame 66 (that is, on the front upper side) from the position of the probe unit 16 in the Z direction. Further, the frame 66 has been moved to the inspection position 28. For this reason,
The table 18 is moved to the front upper side of the probe unit 16 and the base plate 40 at the inspection position 28 and stands by at that position.

On the other hand, the inspection stage 20 has already been moved to the delivery position 30 at the time of the previous delivery, and stands by at the delivery position 30 with the θ stage 50 slightly retracted by the Z stage 52. For this reason, the θ stage 50 is received in the opening 44 of the base plate 40.

While the table 18, the frame 66 and the inspection stage 20 are maintained at the above positions, the operator places the liquid crystal display panel 12 to be inspected on the table 18. The state is shown in FIG. 3 and FIG. When the liquid crystal display panel 12 is arranged on the table 18, the liquid crystal display panel 12 is arranged so that two adjacent edges thereof abut on the stopper 48.
2 is positioned with respect to the table 18 and coarse alignment of the liquid crystal display panel 12 is performed.

In the state shown in FIGS. 3 and 5, when an operator operates an unillustrated inspection start switch,
First, the table 18 sucks the liquid crystal display panel 12, and then the frame 66 is moved to the inspection position 2 by the first driving mechanism 70.
8 to the delivery position 30. As a result, the table 18 supporting the liquid crystal display panel 12 is moved to the transfer position 30 along the frame 66 along the front upper side of the probe unit 16 and the base plate 40. FIG. 6 shows a state in which the table 18 has been moved to the front upper side of the opening 44 of the base plate 40.

Next, the Z stage 52 of the inspection stage 20 that has been moved to the delivery position 30 is operated, and the θ stage 50 is moved to the frame 66 side. Thereby, the pins 62 of the θ stage 50 are fitted into the guide holes formed on the bottom surface of the table 18. Thus, the table 18 is positioned with respect to the inspection stage 20. θ
FIG. 7 shows a state in which the stage 50 is in contact with the bottom surface of the table 18.

Next, the gripping member 68 is moved to the second driving mechanism 7.
2, the table 18 is attracted to the θ stage 50, and the θ stage 50 is
The stage 52 retreats to the rear lower side. This allows
The table 18 is released from the holding member 68, and the delivery of the table 18 from the transport mechanism 22 to the inspection stage 20 is completed.

In the state where the transfer of the table 18 from the transport mechanism 22 to the inspection stage 20 is completed, the liquid crystal display panel 12 and the table 18 are positioned closer to the base 58 (that is, the lower rear side) than the position of the base plate 40 in the Z direction. ) Has been moved to. In this state, the liquid crystal display panel 12 and the table 18 move as shown in FIG.
It is retracted to the rear lower side from the base plate 40.

Next, the stages 50, 52, 54 are moved from the delivery position 30 to the inspection position 28 by the X stage 56. As a result, the liquid crystal display panel 12 and the table 18 move the lower rear side of the base plate 40 to the inspection position 2.
8 and is maintained below the probe unit 16 at the inspection position 28.

Next, precise alignment of the liquid crystal display panel 12 with respect to the probe unit 16 is performed at the inspection position 28 by the camera 36 and the inspection stage 20. The precision alignment is performed so that the alignment marks formed on the liquid crystal display panel 12 match the predetermined positions of the image captured by the camera 36.
This is performed by moving the table 18 at 4,56.

Next, the θ stage 50 becomes the Z stage 52
And the terminals of the liquid crystal display panel 12, ie, the electrodes, are pressed by the probes of the probe unit 16.
FIG. 9 shows this state.

Thereafter, the liquid crystal display panel 12 is subjected to a lighting test while being supported by the table 18 at the inspection position 28. The lighting test is performed by a so-called visual inspection in which a predetermined area of the liquid crystal display panel 12 is lit in a predetermined state, and an operator visually checks the area to determine whether or not the liquid crystal display panel is good. At the time of the visual inspection, the liquid crystal display panel 12 is supported at the inspection position 28 so as to be inclined forward and downward, so that the operator can easily visually observe the lighting state of the liquid crystal display panel 12.

When the inspection is completed, at the time of the previous delivery, the transport frame 66 has been moved to the delivery position 30 and is waiting at that position, and the gripping members 68 are largely separated from each other.

When the inspection is completed, the inspection stage 20 and the transport mechanism 22 operate in the opposite manner to move the liquid crystal display panel 12 and the table 18 in the opposite direction. Thereby, the liquid crystal display panel 12 and the table 18
Finally, the liquid crystal display panel 12 is moved to the upper front side of the probe unit 16 at the inspection position 28, and then the liquid crystal display panel 12 is moved to the inspection position 2.
At 8 the operator removes it from the table 18.

The operation of the inspection apparatus 10 after the lighting test has been completed will be described in detail below.

First, the θ stage 50 is retracted by the Z stage 52 until the liquid crystal display panel 12 and the table 18 reach a position below and below the probe unit 16.
The stages 50, 52, 54 are moved from the inspection position 28 to the delivery position 30 by the X stage 56. As a result, the liquid crystal display panel 12 and the table 18 are moved to the delivery position 30 on the lower rear side of the probe unit 16 and the base plate 30.

Next, the θ stage 50 becomes the Z stage 52
Is advanced by Thereby, the table 18 is moved between the grip members 68.

Next, the gripping member 68 is moved to the second driving mechanism 7.
2 and the θ stage 50 is moved backward by the Z stage 52. Thereby, the table 1
8 is held by the holding member 68, and the engagement between the table 18 and the θ stage 50 by the guide pin 62 is released. As a result, the delivery of the table 18 from the inspection stage 20 to the transport mechanism 22 is completed.

Next, the transport frame 66 is moved from the delivery position 30 to the inspection position 28 by the first drive mechanism 70. Thereby, the table 18 is moved to the front upper side of the probe unit 16.

Next, when the inspection end switch is operated by the operator, the liquid crystal display panel 12 is released from the suction by the table 18. Thus, the operator can remove the inspected liquid crystal display panel 12 from the table 18 and arrange a new liquid crystal display panel 12 on the table 18.

The transport path of the table 18 by the inspection stage 20 and the transport mechanism 22 is opposite to each other with respect to the probe unit 16. Probe unit 1
The positions of the liquid crystal display panel 12 and the table 18 with respect to 6 are opposite between when the liquid crystal display panel 12 is attached to and detached from the table 18 and when a lighting test of the liquid crystal display panel 12 is performed. For this reason, the probe unit 16 does not hinder attachment / detachment of the liquid crystal display panel 12 to / from the inspection stage 20.

The inspection stage 20 and the transport mechanism 22
The table 18 is maintained so that the table 18 always keeps the liquid crystal display panel 12 inclined forward and downward. Therefore, the liquid crystal display panel 12 is also maintained in the inclined state forward and downward even at the inspection position 28. You. Thereby, the visual inspection of the liquid crystal display panel 12 and the table 18 are performed.
The work of attaching and detaching the liquid crystal display panel 12 to and from the camera is easy.

According to the inspection apparatus 10, the work of attaching and detaching the liquid crystal display panel 12 to and from the table 18,
The visual inspection for the lighting test can be performed at the same position, so that the fatigue of the worker is reduced and the working efficiency is increased. In addition, as compared with the conventional inspection device in which the delivery position and the inspection position are horizontally separated from each other, the occupied area of the device 10 is reduced by the distance that the delivery position 30 is separated from the inspection position 28 obliquely forward and downward or obliquely backward and upward. Become smaller.

In the above embodiment, the backlight 84 as the illuminating means is arranged in the table 18.
11, the backlight 92 may be detachably attached to the front upper surface of the θ stage 50.

The backlight 92 used in the inspection device 90
Has table receivers 94 at both ends in the Y direction, and has a suction groove 96 for sucking a table 98 in each table receiver 94. The suction groove 96 is connected to a vacuum source such as a vacuum pump. Positioning of the table 98 and the backlight 92 is performed by fitting a guide pin 100 provided on each table receiver 94 into a guide hole 102 formed on the bottom surface of the table 98.

The table 98 used in the inspection device 90 is a frame-shaped casing, and has a plate-shaped wing 10 at each end in the Y direction.
4 Each wing 104 has a guide hole 102 for receiving a guide pin 100. The diffusion plate 106 for diffusing the light of the backlight 92 is attached to the opening of the frame of the table 98, and the suction groove 46 for sucking the liquid crystal display panel 12 is formed at each outer peripheral edge of the table 18. On each side surface of the housing of the table 98 in the Y direction,
It has a guide hole (not shown) for receiving a guide pin 80 provided on the gripping member 68.

In each of the above embodiments, the delivery position 30 is separated from the inspection position 28 forward and diagonally downward, but the delivery position 30 is separated from the inspection position 28 rearward and diagonally upward. Or may be separated in any of the left and right directions. Further, instead of inclining the liquid crystal display panel 12 in a state of falling forward, the liquid crystal display panel 12 may be horizontally received and supported, and transported in that state. In this case, the delivery position 30 may be separated from the inspection position 28 in any of the front, rear, left, and right directions.

The present invention is not limited to the above embodiment. For example, the present invention can be applied to an inspection device for a liquid crystal display panel in which a rectangular corner is cut out in an arc or a straight line, and is not limited to a square liquid crystal display panel, but may be a hexagon, an octagon, or the like. The present invention can be applied to an inspection device for other polygonal liquid crystal display panels.

[Brief description of the drawings]

FIG. 1 is a schematic longitudinal sectional view showing an embodiment of an inspection apparatus of the present invention, showing a state in which a liquid crystal display panel can be inspected, and a longitudinal section taken along line 1-1 in FIG. FIG.

FIG. 2 is a view taken along line 2-2 in FIG.

FIG. 3 is a view similar to FIG. 2, showing a state in which a transport frame is moved to a position where a liquid crystal display panel is attached to and detached from a table.

FIG. 4 is a view similar to FIG. 2, showing a state in which a table is transferred between an inspection stage and a transport mechanism.

FIG. 5 is a cross-sectional view taken along line 5-5 in FIG. 3, showing a state where the liquid crystal display panel is arranged on a table.

6 is a cross-sectional view showing a state where the liquid crystal display panel and the table have been moved to a delivery position by a transport mechanism, and FIG.
It is sectional drawing similar to.

FIG. 7 is a cross-sectional view showing a state where the liquid crystal display panel and the table are moved from the transport mechanism to the inspection stage, and is a cross-sectional view similar to FIG.

8 is a cross-sectional view showing a state where the liquid crystal display panel and the table have been moved from the transport mechanism to the inspection stage, and is a cross-sectional view similar to FIG.

9 is a cross-sectional view showing a state where the liquid crystal display panel is pressed against the probe unit, and is a cross-sectional view similar to FIG.

10 is a longitudinal sectional view showing another embodiment of the inspection apparatus of the present invention, and is a sectional view similar to FIG.

FIG. 11 is a view taken along the line 11-11 in FIG. 10;

[Explanation of symbols]

 10, 90 Inspection device 12 Liquid crystal display panel 14 Inspection device housing 16 Probe unit 18, 98 Table 20 Inspection stage 22 Transport mechanism 28 Inspection position 30 Delivery position 40 Base plate 42, 44 Base plate opening 46 Table suction groove 48 Stopper 50 , 52, 54, 56 θ, Z, Y, X stage 60 θ stage suction groove 62 θ stage guide pin 64 rail 66 transfer frame 68 gripping member 70, 72 first and second moving mechanism

Claims (6)

[Claims] 1. A probe unit disposed at an inspection position for inspecting a liquid crystal display panel, a table for receiving and supporting the liquid crystal display panel, and an inspection stage for receiving and supporting the table, wherein the probe unit is provided for the probe unit. An inspection stage for adjusting the position of the liquid crystal display panel, and a transport unit for delivering the table to the inspection stage at a delivery position remote from the inspection position, wherein the inspection stage and the transport unit are
An inspection device for a liquid crystal display panel, wherein the table is moved to the inspection position and the delivery position on opposite sides of the probe unit. 2. The delivery position and the inspection position are separated from each other in a forward-downward direction, and the table receives the liquid crystal display panel in a forward-downward inclined state, and is moved and delivered in that state. The inspection apparatus according to claim 1, wherein the inspection is performed. 3. The transporting device according to claim 1, wherein the transporting unit includes a gripping unit that releasably grips the table, and a driving unit that moves the gripping unit to the inspection position and the delivery position. Inspection equipment. 4. The gripping means includes: a transport frame moved by the drive means; a gripper displaceably supported by the transport frame so as to releasably grip the table; 4. A moving mechanism for displacing the gripping body for releasing.
The inspection device according to item 1. 5. The inspection apparatus according to claim 1, further comprising illumination means for illuminating the liquid crystal front panel arranged at the inspection position from behind. 6. The inspection apparatus according to claim 5, wherein the illumination unit is arranged on the table or the inspection stage.