JPH10135117A5 - - Google Patents

Info

Publication number
JPH10135117A5
JPH10135117A5 JP1996301114A JP30111496A JPH10135117A5 JP H10135117 A5 JPH10135117 A5 JP H10135117A5 JP 1996301114 A JP1996301114 A JP 1996301114A JP 30111496 A JP30111496 A JP 30111496A JP H10135117 A5 JPH10135117 A5 JP H10135117A5
Authority
JP
Japan
Prior art keywords
enclosing
photosensitive substrate
temperature
exposure apparatus
enclosing means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996301114A
Other languages
English (en)
Japanese (ja)
Other versions
JP3812015B2 (ja
JPH10135117A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP30111496A priority Critical patent/JP3812015B2/ja
Priority claimed from JP30111496A external-priority patent/JP3812015B2/ja
Publication of JPH10135117A publication Critical patent/JPH10135117A/ja
Publication of JPH10135117A5 publication Critical patent/JPH10135117A5/ja
Application granted granted Critical
Publication of JP3812015B2 publication Critical patent/JP3812015B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP30111496A 1996-10-25 1996-10-25 露光装置、位置検出装置 Expired - Fee Related JP3812015B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30111496A JP3812015B2 (ja) 1996-10-25 1996-10-25 露光装置、位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30111496A JP3812015B2 (ja) 1996-10-25 1996-10-25 露光装置、位置検出装置

Publications (3)

Publication Number Publication Date
JPH10135117A JPH10135117A (ja) 1998-05-22
JPH10135117A5 true JPH10135117A5 (2) 2004-10-21
JP3812015B2 JP3812015B2 (ja) 2006-08-23

Family

ID=17893014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30111496A Expired - Fee Related JP3812015B2 (ja) 1996-10-25 1996-10-25 露光装置、位置検出装置

Country Status (1)

Country Link
JP (1) JP3812015B2 (2)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008030664A1 (de) * 2008-07-01 2010-01-21 Carl Zeiss Smt Ag Optische Abbildungseinrichtung mit Bestimmung von Abbildungsfehlern
JP5346985B2 (ja) 2011-05-10 2013-11-20 キヤノン株式会社 計測装置、露光装置、デバイスの製造方法及び計測方法

Similar Documents

Publication Publication Date Title
JP2005109158A5 (2)
JPH06126383A (ja) 金型鋳造設備における金型温度の制御方法およびその装置
EP3870009A1 (en) Heating cooker including three dimensional measuring device
JP3240701B2 (ja) ガラス溶融炉内におけるガラス原料層のレベル検出方法
US20120141928A1 (en) Methos and device for keeping mask dimensions constant
US4198145A (en) Apparatus for developing photographic images on an emulsion coated film
JPH10135117A5 (2)
WO2020116814A1 (en) Heating cooker including three dimensional measuring device
JPH02201365A (ja) 画像形成装置
JP2009063345A (ja) 電磁界強度分布測定装置
JPH0343777A (ja) 画像形成装置
EP0349208A2 (en) Image forming apparatus
JPH0519943B2 (2)
TWI804913B (zh) 溫度量測裝置的溫度校正方法
JP2001102276A (ja) 基板加熱装置及び基板加熱方法
IT1248103B (it) Apparecchiatura per il mantenimento di pelllicole a sviluppo istantaneo a temperatura controllata dotata di cassetta termoisolata, di termoelettroventilatore e di circuito elettronico con sensori termici per il controllo del termoelettroventilatore.
JPH033316A (ja) 縮小投影型露光装置
JPH052835Y2 (2)
JPH0222563A (ja) 物体周囲の気流の流れ方向検出方法
JPS564138A (en) Camera
SU617764A1 (ru) Способ термического контактного закреплени изображени
JP2649543B2 (ja) 露光装置
JPH01212964A (ja) 露光装置
JP2502643B2 (ja) 露光装置
JPH03144553A (ja) 画像形成装置