JPH10140331A - Vapor-deposited film - Google Patents
Vapor-deposited filmInfo
- Publication number
- JPH10140331A JPH10140331A JP31694696A JP31694696A JPH10140331A JP H10140331 A JPH10140331 A JP H10140331A JP 31694696 A JP31694696 A JP 31694696A JP 31694696 A JP31694696 A JP 31694696A JP H10140331 A JPH10140331 A JP H10140331A
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- layer
- vapor depositing
- oxygen
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 28
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 17
- 239000001301 oxygen Substances 0.000 claims abstract description 17
- -1 polyethylene terephthalate Polymers 0.000 claims abstract description 14
- 239000004952 Polyamide Substances 0.000 claims abstract description 7
- 229920002647 polyamide Polymers 0.000 claims abstract description 7
- 229920000728 polyester Polymers 0.000 claims abstract description 6
- 229920000098 polyolefin Polymers 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims abstract description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 28
- 238000000151 deposition Methods 0.000 abstract description 14
- 229910052751 metal Inorganic materials 0.000 abstract description 8
- 239000002184 metal Substances 0.000 abstract description 8
- 229920000139 polyethylene terephthalate Polymers 0.000 abstract description 4
- 239000005020 polyethylene terephthalate Substances 0.000 abstract description 4
- 150000004767 nitrides Chemical class 0.000 abstract description 3
- 230000001105 regulatory effect Effects 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 35
- 238000007740 vapor deposition Methods 0.000 description 21
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 229910001882 dioxygen Inorganic materials 0.000 description 6
- 239000002932 luster Substances 0.000 description 6
- 239000005022 packaging material Substances 0.000 description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 5
- 239000004677 Nylon Substances 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 229920001778 nylon Polymers 0.000 description 4
- 238000001579 optical reflectometry Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical class [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001420 photoelectron spectroscopy Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000003678 scratch resistant effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、装飾性に優れたア
ルミニウム光沢を有し、高いガス遮断性と表面電気抵抗
値が3.0Ω/□以上の値を有した、包材などに用いら
れるアルミニウム蒸着層を有する蒸着フイルムに関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for a packaging material having an aluminum luster excellent in decorativeness, a high gas barrier property and a surface electric resistance of not less than 3.0 Ω / □. The present invention relates to a deposition film having an aluminum deposition layer.
【0002】[0002]
【従来の技術】金属蒸着フイルムは、優れた光線反射
性、装飾性、ガス遮断性、等を有していることから、包
装用包材として多用されている。その中でも、経済性、
安全性等からアルミニウム蒸着フイルムが多用されてい
る。これらの金属蒸着フイルム、中でもアルミニウム蒸
着フイルムにおいて、食品用の包材として使用された
時、該アルミニウム蒸着フイルムの有する電気的性質か
ら金属検知機で検知されたり、電子レンジでの使用でス
パークの発生がある等の問題を有している。一方、透明
性のガス遮断性フイルムとして開発された、金属酸化物
(酸化アルミニウム、酸化ケイ素等)を基材フイルム上
に蒸着したフイルムは、透明性に優れ、ガス遮断性にも
優れたものであり、前記したようなアルミニウム蒸着フ
イルムの問題点である、電子レンジでの加熱処理も可能
であるものが多いことは広く知られている、がこれらの
金属酸化物蒸着フイルムは高価であり、装飾性に欠け、
光線反射性にも劣るものである。2. Description of the Related Art Metal-deposited films are widely used as packaging materials because of their excellent light-reflecting properties, decorative properties, gas-blocking properties, and the like. Among them, economics,
Aluminum deposited films are frequently used for safety and the like. When these metal-deposited films, especially aluminum-deposited films, are used as packaging materials for food, they are detected by a metal detector from the electrical properties of the aluminum-deposited films, or sparks occur when used in a microwave oven. There is a problem that there is. On the other hand, a film in which a metal oxide (aluminum oxide, silicon oxide, etc.) is deposited on a base film, which has been developed as a transparent gas barrier film, has excellent transparency and excellent gas barrier properties. It is widely known that there are many problems that can be caused by heat treatment in a microwave oven, which is a problem of the above-described aluminum vapor-deposited films, but these metal oxide vapor-deposited films are expensive and decorative. Lack of sex,
It is also poor in light reflectivity.
【0003】[0003]
【発明が解決しようとする課題】本発明は、金属アルミ
ニウム蒸着フイルムの、優れた光線反射性、装飾性、ガ
ス遮断性等を保有し、且つ表面電気抵抗が特定のもので
あるアルミニウム蒸着フイルムを得んとするものであ
る。SUMMARY OF THE INVENTION The present invention relates to a metal-aluminum-deposited film having excellent light reflectivity, decorativeness, gas-blocking properties, etc., and a specific surface electric resistance. It is to gain.
【0004】[0004]
【課題を解決するための手段】本発明は、基材フイルム
の少なくとも片面に、アルミニウムと酸素とを主成分と
する蒸着層(VAO)を有する蒸着フイルムであって、
該蒸着層の厚みが300〜3000Åであり、該蒸着層
側の表面電気抵抗が3.0Ω/□以上であり、波長40
0m μの光線反射率が80%以上であることを特徴とす
る蒸着フイルムであり、基材フイルムがポリエチレンテ
レフタレート単位を85重量%以上有するポリエステ
ル、ポリオレフィン、ポリアミドの一種以上からなる前
記の蒸着フイルムである。The present invention is directed to a vapor-deposited film having a vapor-deposited layer (VAO) containing aluminum and oxygen as main components on at least one surface of a base film,
The thickness of the vapor-deposited layer is 300 to 3000 °, the surface electric resistance on the vapor-deposited layer side is 3.0 Ω / □ or more, and a wavelength of 40
A vapor-deposited film having a light reflectivity of 0 μm of 80% or more, wherein the base film is made of at least one of polyester, polyolefin, and polyamide having 85% by weight or more of polyethylene terephthalate units. is there.
【0005】[0005]
【発明の実施形態】本発明における基材フイルムとは、
ポリエチレンテレフタレートやポリブチレンテレフタレ
ートやポリエチレンナフタレートやこれらの単位を主成
分とする共重合体ポリエステル等のポリエステル、6−
ナイロンや6,6−ナイロンやこれらの単位を主成分と
する共重合ポリアミドなどのポリアミド、ポリエチレン
やポリプロピレンやこれらの単位を主成分とする共重合
ポリオレフィン等のポリオレフィン、芳香族ポリアミ
ド、ポリイミド、ポリビニールアルコール系ポリマー、
などからのフイルムがある、これらの中でも、ポリエチ
レンテレフタレート、ポリエチレンテレフタレート単位
を85重量%以上有するポリエステル、ポリエチレンや
ポリプロピレンやこれらの単位を主成分とする共重合ポ
リオレフィン、6−ナイロンや6,6−ナイロンやこれ
らの単位を主成分とする共重合ポリアミドなどのポリア
ミドからのフイルムがその物理的特性や経済性などから
より好ましいものである。これらのフイルムは、それら
の原料ポリマーである前記のポリマーを、溶融押出した
無延伸のもの、一軸延伸のもの、二軸延伸のものであっ
てもよく、溶融押出の前後に該ポリマーに、紫外線吸収
剤、顔料等の着色剤、熱酸化防止剤、酸化ケイ素などの
微粒子無機充填剤等を添加およびまたは塗布して得られ
たものであってもよい。DESCRIPTION OF THE PREFERRED EMBODIMENTS The substrate film in the present invention is:
Polyesters such as polyethylene terephthalate, polybutylene terephthalate, polyethylene naphthalate, and copolymer polyesters containing these units as main components;
Polyamides such as nylon, 6,6-nylon and copolymerized polyamides containing these units as main components, polyolefins such as polyethylene and polypropylene and copolymerized polyolefins containing these units as main components, aromatic polyamides, polyimides and polyvinyls Alcohol-based polymer,
Among these, polyethylene terephthalate, polyesters having 85% by weight or more of polyethylene terephthalate units, polyethylene and polypropylene, copolymerized polyolefins containing these units as main components, 6-nylon and 6,6-nylon And films made of polyamides such as copolymerized polyamides containing these units as main components are more preferable in view of their physical properties and economics. These films may be non-stretched, uniaxially stretched or biaxially stretched by melt-extruding the above-mentioned polymer as a raw material polymer. It may be one obtained by adding and / or coating a colorant such as an absorbent, a pigment, a thermal antioxidant, or a fine particle inorganic filler such as silicon oxide.
【0006】本発明の基材フイルムの厚さは特に限定さ
れるものではないが、1〜300μm の範囲が好まし
く、6〜150μm の範囲が機械的性質や取り扱い等の
点からより好ましい。また、これらの基材フイルムは、
蒸着層(VAO)の設けられる側の反対側に滑剤層、着
色層などの公知の処理をもうけたものでも良い。本発明
においては蒸着層(VAO)の上に例えば耐擦過性層等
の保護層、着色層、の一種以上を配してもよい。[0006] The thickness of the substrate film of the present invention is not particularly limited, but is preferably in the range of 1 to 300 µm, and more preferably in the range of 6 to 150 µm from the viewpoint of mechanical properties and handling. Also, these base films are
A known treatment such as a lubricant layer and a colored layer may be provided on the side opposite to the side on which the vapor deposition layer (VAO) is provided. In the present invention, for example, one or more of a protective layer such as a scratch-resistant layer and a colored layer may be disposed on the vapor deposited layer (VAO).
【0007】本発明の基材フイルムの少なくとも片面に
設けられる、アルミニウムと酸素とを主成分とする蒸着
層(VAO)は、その厚みが300〜3000Åであ
り、表面電気抵抗が3.0Ω/□以上で該蒸着層の設け
られた蒸着フイルムの蒸着層側の波長400m μの光線
反射率が80%以上である蒸着層である。アルミニウム
と酸素とを主成分とする蒸着層(VAO)は、アルミニ
ウムと酸素との総和が該蒸着層の85重量%以上である
ものを示し、他の成分が本発明の目的を損なわない量で
含まれてもよいものである。このアルミニウムと酸素と
の総和が該蒸着層に占める割合は好ましくは90重量%
以上であり、さらに好ましいのは95重量%以上であ
る。本発明においては、アルミニウムとアルミニウム酸
化物とが二層に配されたものではなく両者が本発明の効
能を発揮するように適正に混在し一体化して一層として
配されているものである。これらの混在し一体化して一
層と成って蒸着層を形成しているアルミニウムと酸素と
を主成分とする層は、例えばESCA分析により該層の
最表面層、層内層、基材フイルムとの界面層で、Alと
Alx+(Xは1〜3の数)とが両方検出されることで確
認される。The vapor deposited layer (VAO) mainly composed of aluminum and oxygen provided on at least one side of the base film of the present invention has a thickness of 300 to 3000 ° and a surface electric resistance of 3.0Ω / □. As described above, the vapor deposition layer provided with the vapor deposition layer has a light reflectance of 80% or more at a wavelength of 400 μm on the vapor deposition layer side of the vapor deposition layer. A vapor deposition layer (VAO) containing aluminum and oxygen as main components indicates that the total of aluminum and oxygen is 85% by weight or more of the vapor deposition layer, and other components are contained in an amount that does not impair the object of the present invention. It may be included. The ratio of the total of aluminum and oxygen to the deposited layer is preferably 90% by weight.
More preferably, it is 95% by weight or more. In the present invention, aluminum and aluminum oxide are not arranged in two layers, but are properly mixed and integrated so as to exert the effects of the present invention, and are arranged as a single layer. The layer containing aluminum and oxygen as main components, which are mixed and integrated into one layer to form a vapor deposition layer, is formed by, for example, an ESCA analysis on the outermost layer of the layer, the inner layer, and the interface with the base film. This is confirmed by the detection of both Al and Al x + (X is a number from 1 to 3) in the layer.
【0008】該蒸着層(VAO)は、アルミニウムと種
々のアルミニウム酸化物との両者を主成分とするもので
あり、前記範囲内で他の成分、例えばアルミニウムの窒
化物ケイ素の酸化物、ケイ素の窒化物等を含んでいても
よい。該蒸着層(VAO)の厚みは300〜3000Å
であり、好ましくは350〜1500Åであり、特に好
ましいのは400〜1200Åである。300Åに満た
ないものでは、波長400m μの光線反射率が80%以
上であることが達成困難となりバリヤー性に劣る等の点
で好ましくない。一方3000Åを越える場合には、密
着性の低下や取り扱い上でのクラックが発生し易く、ま
たカ〜ルの発生などの問題が生じる。The vapor deposition layer (VAO) contains both aluminum and various aluminum oxides as main components, and within the above range, other components such as aluminum nitride silicon oxide and silicon nitride. It may contain a nitride or the like. The thickness of the vapor deposition layer (VAO) is 300-3000Å.
, Preferably 350 to 1500 °, and particularly preferably 400 to 1200 °. If the angle is less than 300 °, it is difficult to achieve a light reflectance of 400% or more at a wavelength of 400 μm of 80% or more, resulting in poor barrier properties. On the other hand, if it exceeds 3,000 °, problems such as a decrease in adhesion and cracks during handling are liable to occur, and the occurrence of curl occurs.
【0009】本発明の蒸着フイルムの特性である表面電
気抵抗が、3.0Ω/□以上であることは前記した金属
検知機で検知されないため等に必須であり、この範囲か
ら逸脱すれば、例えば転写材として用い、包材に転写さ
れた時に金属検知機を通過する際に検知されて思わぬト
ラブルを発生する等の欠点を有するものとなる。該表面
電気抵抗は好ましくは4Ω/□以上である。この表面電
気抵抗の値は、上限としてとくに限定されるものではな
いが、酸化アルミニウムの当該値にまでにおよぶもので
はない。本発明の蒸着フイルムのもう一つの特性であ
る、波長400m μの光線反射率が80%以上であるこ
とは、包材、転写材等に使用される時の、金属光沢によ
る装飾性等や望ましくない光線透過率等の点で必須要件
である。該光線反射率は好ましくは82%以上、さらに
好ましくは85%以上である。これら光線反射率の特性
は、裏返せば該光線の透過率が20%以下、好ましくは
18%以下、さらに好ましくは15%以下であることを
も示すものである。It is indispensable that the surface electric resistance, which is a characteristic of the vapor deposition film of the present invention, is 3.0 Ω / □ or more, because it is not detected by the above-mentioned metal detector. It is used as a transfer material, and has a drawback such that an unexpected trouble occurs when it passes through a metal detector when transferred to a packaging material. The surface electric resistance is preferably 4Ω / □ or more. The value of the surface electric resistance is not particularly limited as an upper limit, but does not reach the value of aluminum oxide. Another characteristic of the vapor-deposited film of the present invention, that the light reflectance at a wavelength of 400 μm is 80% or more, is that the film is preferably used for a packaging material, a transfer material, etc., because of its decorativeness due to metallic luster and the like. This is an essential requirement in terms of light transmittance and the like. The light reflectance is preferably at least 82%, more preferably at least 85%. These characteristics of light reflectivity also indicate that, when turned over, the light transmittance is 20% or less, preferably 18% or less, and more preferably 15% or less.
【0010】該蒸着層(VAO)の作製は、例えば特開
昭49−122498号公報に記載のアルミニウム金属
と酸素ガスとによる反応蒸着法、金属アルミニウムとア
ルミニウム酸化物との混在ターゲットを用いてのスパッ
タリング法、金属アルミニウムとアルミニウム酸化物と
の混合蒸発源を用いてのイオンプレーチング法等が使用
できるがこれらに限定されるものではない。前記した作
製方法の中でも、アルミニウム金属と酸素ガスとによる
反応蒸着法が好ましく、例えば特開昭62−10142
8号公報に記載の装置のような蒸気化したアルミニウム
が基材フイルムに蒸着する直前の位置で酸素ガスを連続
的に供給し反応させて蒸着せしめてもよく、蒸着が終了
した直後で酸素を供給し蒸着したアルミニウムと反応さ
せて酸化させてもよく、またアルミニウム蒸着の直前に
酸素プラズマ処理や酸素イオンボンバード処理などを施
してもよく、これらの方法を適宜組み合わせて用いても
よいものである。The vapor deposition layer (VAO) is produced by, for example, a reactive vapor deposition method using aluminum metal and oxygen gas described in JP-A-49-122498, or using a mixed target of metallic aluminum and aluminum oxide. A sputtering method, an ion plating method using a mixed evaporation source of metallic aluminum and aluminum oxide, and the like can be used, but are not limited thereto. Among the above-mentioned production methods, a reactive vapor deposition method using aluminum metal and oxygen gas is preferable.
No. 8, a vaporized aluminum may be continuously supplied and reacted at a position immediately before vaporized aluminum is vapor-deposited on a substrate film, and oxygen may be vaporized immediately after vapor deposition is completed. It may be oxidized by reacting with the supplied and vapor-deposited aluminum, or may be subjected to oxygen plasma treatment or oxygen ion bombardment treatment immediately before aluminum vapor deposition, or a combination of these methods may be used as appropriate. .
【0011】[0011]
【実施例】特開昭49−122498号公報に記載の装
置に同様の半連続式蒸着機を用いて、12μm 厚さ幅6
50mmのポリエチレンテレフタレートフイルムを基材フ
イルムとして用い、蒸着機の(隔壁より上の)上室で酸
素ガスでのアルミニウム電極を用いたイオンボンバード
処理を施しながら、かつ蒸着機の(隔壁より下の)下室
に酸素ガスを微量供給しながら、下室での酸素ガス供給
量とアルミニウム蒸着量を変化させて、各種のアルミニ
ウムと酸素とからなる蒸着層を形成せしめた蒸着フイル
ムを得た。各種NO.の条件変化による蒸着フイルムの
特性は下記するものであった。 NO. 蒸着層厚 表面電気抵抗(Ω/ □) 400mμ波長光線反射率(%) 1 700 4.2 87 2 680 5.0 86 3 600 4.5 89 4 600 5.5 85 5 600 3.2 91 6 500 4.0 88EXAMPLE The same semi-continuous evaporator as used in the apparatus described in JP-A-49-122498 was used to obtain a film having a thickness of 12 μm and a width of 6 μm.
Using a 50 mm polyethylene terephthalate film as the base film, while performing ion bombardment treatment using an aluminum electrode with oxygen gas in the upper chamber (above the partition) of the evaporator, and using the evaporator (below the partition). While a small amount of oxygen gas was supplied to the lower chamber, the supply amount of oxygen gas in the lower chamber and the amount of aluminum vapor deposition were changed to obtain a vapor deposition film on which various vapor deposition layers of aluminum and oxygen were formed. Various NO. The characteristics of the vapor-deposited film due to the change in the conditions were as follows. NO. Deposition layer thickness Surface electric resistance (Ω / □) 400 mμ wavelength light reflectance (%) 1 700 4.2 87 2 680 5.0 86 3 600 4.5 89 4 600 5.5 85 5 600 3.2 91 6 500 4.0 88
【0012】[0012]
【比較例】実施例に同じ装置を用い、実施例に同様の方
法でアルミニウム蒸着量と上室と下室の酸素ガス量を変
化させて、各種のアルミニウムと酸素とからなる蒸着層
を形成せしめた蒸着フイルムを得た。実施例と同様に特
性を評価した結果を下記する。 NO. 蒸着層厚 表面電気抵抗(Ω/ □) 400mμ波長光線反射率(%) 7 600 1.6 94 8 600 2.0 92 9 600 1012 7 ESCA(島津製作所製850光電子分光装置)分析に
より各種実施例、比較例の蒸着フイルムの組成分析をし
た。各種蒸着フイルムの蒸着層(VAO)は、Al、A
l3+、Al2+等のアルミニウムと酸素との混在層であっ
た。実施例の各蒸着フイルムは全て、金属光沢の充分な
すなわち特定波長光線反射率が80%以上のものであ
り、かつ表面電気抵抗が3Ω/ □以上であり金属検知機
での検知されないものであった。それに対して、比較例
のNO. 7,8は金属光沢においては充分なものであった
が金属検知機で検知されるものであったし、NO. 9は金
属検知機では検知されなかったが、金属光沢の殆どない
白濁したほぼ透明なものであった。COMPARATIVE EXAMPLE Using the same apparatus as in the example, the amount of aluminum deposited and the amount of oxygen gas in the upper and lower chambers were changed in the same manner as in the example to form a vapor-deposited layer composed of various aluminum and oxygen. A vapor-deposited film was obtained. The results of evaluating the characteristics in the same manner as in the examples are described below. NO. Deposition layer thickness Surface electric resistance (Ω / □) 400 mμ wavelength light reflectance (%) 7 600 1.6 94 8 600 2.0 92 9 600 10 12 7 By ESCA (Shimadzu 850 photoelectron spectroscopy) analysis The composition of the vapor deposition films of various examples and comparative examples was analyzed. The deposition layers (VAO) of various deposition films are Al, A
It was a mixed layer of aluminum and oxygen such as l 3+ and Al 2+ . Each of the vapor-deposited films of the examples had sufficient metallic luster, that is, a specific wavelength light reflectance of 80% or more, and a surface electric resistance of 3Ω / □ or more, which was not detected by a metal detector. Was. On the other hand, Comparative Examples Nos. 7 and 8 were sufficient in terms of metallic luster but were detected by the metal detector, while No. 9 was not detected by the metal detector. It was cloudy and almost transparent with almost no metallic luster.
【0013】[0013]
【発明の効果】本発明によれば包材、転写材、金銀糸用
などの用途に用いられる、ある種の金属検知機に検知さ
れずに、かつ装飾性に優れた金属光沢をも有するアルミ
ニウム蒸着フイルムが得られる。According to the present invention, aluminum which is not detected by a certain metal detector and has a metallic luster excellent in decorativeness, which is used for packaging materials, transfer materials, gold and silver yarns, and the like. A vapor deposition film is obtained.
Claims (2)
ミニウムと酸素とを主成分とする蒸着層(VAO)を有
する蒸着フイルムであって、該蒸着層の厚みが300〜
3000Åであり、該蒸着層側の表面電気抵抗が3.0
Ω/□以上であり、波長400m μの光線反射率が80
%以上であることを特徴とする蒸着フイルム。1. A vapor-deposited film having a vapor-deposited layer (VAO) containing aluminum and oxygen as main components on at least one side of a substrate film, wherein the vapor-deposited layer has a thickness of 300 to
3000 °, and the surface electric resistance of the deposited layer side is 3.0
Ω / □ or more, and the light reflectance at a wavelength of 400 μm is 80
% Or more.
ト単位を85重量%以上有するポリエステル、ポリオレ
フィン、ポリアミドの一種以上からなる請求項1記載の
蒸着フイルム。2. The vapor-deposited film according to claim 1, wherein the base film is made of at least one of polyester, polyolefin and polyamide having 85% by weight or more of polyethylene terephthalate units.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31694696A JPH10140331A (en) | 1996-11-12 | 1996-11-12 | Vapor-deposited film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31694696A JPH10140331A (en) | 1996-11-12 | 1996-11-12 | Vapor-deposited film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10140331A true JPH10140331A (en) | 1998-05-26 |
Family
ID=18082706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31694696A Pending JPH10140331A (en) | 1996-11-12 | 1996-11-12 | Vapor-deposited film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10140331A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009006508A (en) * | 2007-06-26 | 2009-01-15 | Sumitomo Seika Chem Co Ltd | Laminated film |
| JP2009197340A (en) * | 2008-02-19 | 2009-09-03 | Toray Ind Inc | Metal vapor-deposited polyester film for tinsel, and tinsel |
| US11179912B2 (en) | 2017-06-27 | 2021-11-23 | Lg Chem, Ltd. | Decorative member and method for preparing same |
-
1996
- 1996-11-12 JP JP31694696A patent/JPH10140331A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009006508A (en) * | 2007-06-26 | 2009-01-15 | Sumitomo Seika Chem Co Ltd | Laminated film |
| JP2009197340A (en) * | 2008-02-19 | 2009-09-03 | Toray Ind Inc | Metal vapor-deposited polyester film for tinsel, and tinsel |
| US11179912B2 (en) | 2017-06-27 | 2021-11-23 | Lg Chem, Ltd. | Decorative member and method for preparing same |
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