JPH1016242A5 - - Google Patents
Info
- Publication number
- JPH1016242A5 JPH1016242A5 JP1996169073A JP16907396A JPH1016242A5 JP H1016242 A5 JPH1016242 A5 JP H1016242A5 JP 1996169073 A JP1996169073 A JP 1996169073A JP 16907396 A JP16907396 A JP 16907396A JP H1016242 A5 JPH1016242 A5 JP H1016242A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- ink
- recording device
- manufacturing
- resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Description
【発明の名称】インクジェット記録装置およびその製造方法[Title of Invention] Inkjet recording device and its manufacturing method
【０００１】
【発明の属する技術分野】
本発明は、熱エネルギを利用してインク液滴を記録媒体に向けて飛翔させる形式のインクジェット記録装置およびその製造方法に関するものである。[0001]
[Technical Field to which the Invention Belongs]
The present invention relates to an inkjet recording apparatus that uses thermal energy to propel ink droplets toward a recording medium , and a method for manufacturing the same .
【００１１】
【発明が解決するための手段】
上記課題は、インク吐出口近傍に設けられた薄膜抵抗体と金属薄膜導体からなる発熱抵抗体にパルス通電することによってインク液路中のインクの一部を急速に気化させ、この気泡の膨張力によって前記吐出口から液滴状インクを吐出させて記録するインクジェット記録装置の製造方法において、
前記発熱抵抗体を熱酸化処理する前に前記金属薄膜導体と外部回路との接続用金属薄膜電極のうち、少なくとも接続用金属薄膜電極の表面を金めっき処理しておくことによって達成される。
また、上記課題は、インク吐出口近傍に設けられた薄膜抵抗体と金属薄膜導体からなる発熱抵抗体にパルス通電することによってインク液路中のインクの一部を急速に気化させ、この気泡の膨張力によって前記吐出口から液滴状インクを吐出させて記録するインクジェット記録装置であって、
前記発熱抵抗体を熱酸化処理する前に前記金属薄膜導体と外部回路との接続用金属薄膜電極のうち、少なくとも接続用金属薄膜電極の表面を金めっき処理したことによって達成される。
ここで、前記金めっき処理は、置換めっき処理を行った後に無電解めっき処理を行うのが好ましい。
また、前記金めっきの厚さは、１０００Å以上であるのが好ましい。また、前記金めっきの厚さは、１５００Å以上であるのが好ましい。
また、前記合金薄膜抵抗体がＴａ−Ｓｉ−Ｏ三元合金から成り、前記金属薄膜導体及び前記外部回路との接続用金属薄膜電極がＮｉから成るのが好ましい。 [0011]
[Means for solving the problem]
The above problem is solved by a method for manufacturing an inkjet recording device in which a part of the ink in the ink liquid path is rapidly vaporized by applying a pulse current to a heating resistor made of a thin film resistor and a metal thin film conductor provided in the vicinity of the ink discharge port, and the expansion force of the resulting bubbles causes ink droplets to be discharged from the discharge port, thereby recording,
This can be achieved by gold plating the surface of at least the thin metal film electrodes for connection between the thin metal film conductor and an external circuit before subjecting the heating resistor to thermal oxidation.
The above problem is also solved by an ink jet recording device that rapidly vaporizes part of the ink in the ink path by applying pulse current to a heating resistor made of a thin film resistor and a metal thin film conductor provided near the ink ejection port, and ejects ink droplets from the ejection port using the expansion force of the resulting bubbles,
This is achieved by gold plating the surface of at least the thin metal film electrodes for connection between the thin metal film conductor and an external circuit before thermal oxidation of the heating resistor.
Here, the gold plating is preferably performed by performing displacement plating followed by electroless plating.
The thickness of the gold plating is preferably 1000 Å or more, and more preferably 1500 Å or more.
It is also preferable that the alloy thin film resistor is made of a Ta-Si-O ternary alloy, and the metal thin film conductor and the metal thin film electrode for connection to the external circuit are made of Ni.
Claims (6)
前記発熱抵抗体を熱酸化処理する前に前記金属薄膜導体と外部回路との接続用金属薄膜電極のうち、少なくとも接続用金属薄膜電極の表面を金めっき処理しておくことを特徴とするインクジェット記録装置の製造方法。A method for manufacturing an ink jet recording device in which a pulse current is applied to a heating resistor made of a thin film resistor and a metal thin film conductor provided near an ink discharge port to rapidly vaporize a portion of the ink in the ink liquid path, and the expansion force of the resulting bubbles causes ink droplets to be discharged from the discharge port, thereby recording, comprising:
A method for manufacturing an ink jet recording device, characterized in that, before thermal oxidation of the heating resistor , at least the surfaces of the metal thin film electrodes for connection between the metal thin film conductor and an external circuit are gold plated.
前記発熱抵抗体を熱酸化処理する前に前記金属薄膜導体と外部回路との接続用金属薄膜電極のうち、少なくとも接続用金属薄膜電極の表面を金めっき処理したBefore the heat generating resistor is thermally oxidized, at least the surface of the thin metal film electrodes for connection between the thin metal film conductor and an external circuit is gold plated. ことを特徴とするインクジェット記録装置。An inkjet recording apparatus characterized by:
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16907396A JP3705652B2 (en) | 1996-06-28 | 1996-06-28 | Inkjet recording apparatus and manufacturing method thereof |
| US08/761,900 US5790154A (en) | 1995-12-08 | 1996-12-09 | Method of manufacturing an ink ejection recording head and a recording apparatus using the recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16907396A JP3705652B2 (en) | 1996-06-28 | 1996-06-28 | Inkjet recording apparatus and manufacturing method thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH1016242A JPH1016242A (en) | 1998-01-20 |
| JPH1016242A5 true JPH1016242A5 (en) | 2004-07-22 |
| JP3705652B2 JP3705652B2 (en) | 2005-10-12 |
Family
ID=15879832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16907396A Expired - Lifetime JP3705652B2 (en) | 1995-12-08 | 1996-06-28 | Inkjet recording apparatus and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3705652B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6578950B2 (en) | 2000-08-28 | 2003-06-17 | Fuji Photo Film Co., Ltd. | Line head and image recording method |
| US6595622B2 (en) | 2001-03-29 | 2003-07-22 | Fuji Photo Film Co., Ltd. | Ink jet printhead with thick substrate providing reduced warpage |
| JP2004195688A (en) | 2002-12-16 | 2004-07-15 | Fuji Xerox Co Ltd | Recording head for ink jetting, and its manufacturing method |
| JP5008448B2 (en) * | 2007-04-20 | 2012-08-22 | キヤノン株式会社 | Method for manufacturing substrate for ink jet recording head |
-
1996
- 1996-06-28 JP JP16907396A patent/JP3705652B2/en not_active Expired - Lifetime
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9744763B2 (en) | Method for jetting droplets of an electrically conductive fluid | |
| JP3320825B2 (en) | Recording device | |
| JPH0729431B2 (en) | How to make a liquid jet recording head | |
| JP3194465B2 (en) | Inkjet recording head | |
| JPH1058687A5 (en) | ||
| JP2907338B2 (en) | Liquid jet recording method | |
| JP3705652B2 (en) | Inkjet recording apparatus and manufacturing method thereof | |
| JPS5931945B2 (en) | liquid jet recording head | |
| KR980000924A (en) | Inkjet printer jetting device and jetting method | |
| JPH0379190B2 (en) | ||
| JPH08207281A (en) | Inkjet recording head | |
| JP3734584B2 (en) | Ink jet recording head and apparatus therefor | |
| JPH068436A (en) | Multi-layer electrothermal conversion type ink jet printer head | |
| JPS5842466A (en) | Liquid jet recording method | |
| JPH02151446A (en) | inkjet recording device | |
| JPH10230605A5 (en) | ||
| JPH0237302B2 (en) | EKITAIFUNSHAKIROKUHO | |
| JPH03203656A (en) | inkjet printer head nozzle | |
| JP3436623B2 (en) | Ink jet recording apparatus and ink jet recording method | |
| JPH0760963A (en) | Inkjet head | |
| JPH10258508A (en) | Inkjet head | |
| JPH11309865A (en) | Liquid jet recording device | |
| JPH0255142A (en) | inkjet recording device | |
| JPS5934506B2 (en) | liquid jet recording head | |
| CN120940899A (en) | A device, method and application of pulse current-assisted high-speed impact connection |