JPH10163099A5 - - Google Patents

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Publication number
JPH10163099A5
JPH10163099A5 JP1996332846A JP33284696A JPH10163099A5 JP H10163099 A5 JPH10163099 A5 JP H10163099A5 JP 1996332846 A JP1996332846 A JP 1996332846A JP 33284696 A JP33284696 A JP 33284696A JP H10163099 A5 JPH10163099 A5 JP H10163099A5
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JP
Japan
Prior art keywords
substrate
stage
sensitive
holding member
alignment
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP1996332846A
Other languages
English (en)
Japanese (ja)
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JPH10163099A (ja
JP4029182B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP33284696A external-priority patent/JP4029182B2/ja
Priority to JP33284696A priority Critical patent/JP4029182B2/ja
Priority to DE69738910T priority patent/DE69738910D1/de
Priority to AU50678/98A priority patent/AU5067898A/en
Priority to SG200103141A priority patent/SG88823A1/en
Priority to CNB011176660A priority patent/CN1244019C/zh
Priority to SG200005339A priority patent/SG93267A1/en
Priority to SG200103143A priority patent/SG102627A1/en
Priority to PCT/JP1997/004350 priority patent/WO1998024115A1/ja
Priority to CNB011176652A priority patent/CN1244018C/zh
Priority to EP97913467A priority patent/EP0951054B1/en
Priority to CNB971811172A priority patent/CN1144263C/zh
Priority to EP08005700A priority patent/EP1944654A3/en
Priority to HK00103393.7A priority patent/HK1024104B/xx
Priority to AT97913467T priority patent/ATE404906T1/de
Priority to SG200103142A priority patent/SG88824A1/en
Priority to IL13013797A priority patent/IL130137A/xx
Priority to KR1020017006773A priority patent/KR20030096435A/ko
Priority to CNB011216433A priority patent/CN1244021C/zh
Priority to CNB011216425A priority patent/CN1244020C/zh
Publication of JPH10163099A publication Critical patent/JPH10163099A/ja
Priority to KR1019997004747A priority patent/KR100315249B1/ko
Priority to KR1019997004939A priority patent/KR100314557B1/ko
Priority to US09/666,407 priority patent/US6400441B1/en
Priority to US09/714,620 priority patent/US6549269B1/en
Priority to US09/714,943 priority patent/US6341007B1/en
Priority to US09/716,405 priority patent/US6590634B1/en
Priority to KR1020017006772A priority patent/KR100315251B1/ko
Priority to KR1020017006771A priority patent/KR100315250B1/ko
Priority to US10/024,147 priority patent/US6798491B2/en
Priority to KR1020020072335A priority patent/KR20060086496A/ko
Priority to KR1020020072333A priority patent/KR20060086495A/ko
Priority to US10/879,144 priority patent/US7177008B2/en
Publication of JPH10163099A5 publication Critical patent/JPH10163099A5/ja
Priority to US11/647,492 priority patent/US7256869B2/en
Publication of JP4029182B2 publication Critical patent/JP4029182B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP33284696A 1996-11-28 1996-11-28 露光方法 Expired - Lifetime JP4029182B2 (ja)

Priority Applications (32)

Application Number Priority Date Filing Date Title
JP33284696A JP4029182B2 (ja) 1996-11-28 1996-11-28 露光方法
CNB011216425A CN1244020C (zh) 1996-11-28 1997-11-28 曝光装置
SG200103143A SG102627A1 (en) 1996-11-28 1997-11-28 Lithographic device
SG200103141A SG88823A1 (en) 1996-11-28 1997-11-28 Projection exposure apparatus
CNB011176660A CN1244019C (zh) 1996-11-28 1997-11-28 曝光装置以及曝光方法
SG200005339A SG93267A1 (en) 1996-11-28 1997-11-28 An exposure apparatus and an exposure method
SG200103142A SG88824A1 (en) 1996-11-28 1997-11-28 Projection exposure method
PCT/JP1997/004350 WO1998024115A1 (en) 1996-11-28 1997-11-28 Aligner and method for exposure
CNB011176652A CN1244018C (zh) 1996-11-28 1997-11-28 曝光方法和曝光装置
EP97913467A EP0951054B1 (en) 1996-11-28 1997-11-28 Aligner and method for exposure
CNB971811172A CN1144263C (zh) 1996-11-28 1997-11-28 曝光装置以及曝光方法
EP08005700A EP1944654A3 (en) 1996-11-28 1997-11-28 An exposure apparatus and an exposure method
HK00103393.7A HK1024104B (en) 1996-11-28 1997-11-28 Aligner and method for exposure
AT97913467T ATE404906T1 (de) 1996-11-28 1997-11-28 Ausrichtvorrichtung und belichtungsverfahren
AU50678/98A AU5067898A (en) 1996-11-28 1997-11-28 Aligner and method for exposure
IL13013797A IL130137A (en) 1996-11-28 1997-11-28 Exposure apparatus and an exposure method
KR1020017006773A KR20030096435A (ko) 1996-11-28 1997-11-28 노광장치 및 노광방법
CNB011216433A CN1244021C (zh) 1996-11-28 1997-11-28 光刻装置和曝光方法
DE69738910T DE69738910D1 (de) 1996-11-28 1997-11-28 Ausrichtvorrichtung und belichtungsverfahren
KR1019997004747A KR100315249B1 (ko) 1996-11-28 1999-05-28 노광장치 및 노광방법
KR1019997004939A KR100314557B1 (ko) 1996-11-28 1999-06-03 노광장치 및 노광방법
US09/666,407 US6400441B1 (en) 1996-11-28 2000-09-20 Projection exposure apparatus and method
US09/714,620 US6549269B1 (en) 1996-11-28 2000-11-17 Exposure apparatus and an exposure method
US09/714,943 US6341007B1 (en) 1996-11-28 2000-11-20 Exposure apparatus and method
US09/716,405 US6590634B1 (en) 1996-11-28 2000-11-21 Exposure apparatus and method
KR1020017006772A KR100315251B1 (ko) 1996-11-28 2001-05-30 노광장치 및 노광방법
KR1020017006771A KR100315250B1 (ko) 1996-11-28 2001-05-30 노광장치 및 노광방법
US10/024,147 US6798491B2 (en) 1996-11-28 2001-12-21 Exposure apparatus and an exposure method
KR1020020072335A KR20060086496A (ko) 1996-11-28 2002-11-20 노광장치 및 노광방법
KR1020020072333A KR20060086495A (ko) 1996-11-28 2002-11-20 노광장치 및 노광방법
US10/879,144 US7177008B2 (en) 1996-11-28 2004-06-30 Exposure apparatus and method
US11/647,492 US7256869B2 (en) 1996-11-28 2006-12-29 Exposure apparatus and an exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33284696A JP4029182B2 (ja) 1996-11-28 1996-11-28 露光方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007112572A Division JP4196411B2 (ja) 2007-04-23 2007-04-23 露光装置及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JPH10163099A JPH10163099A (ja) 1998-06-19
JPH10163099A5 true JPH10163099A5 (cs) 2005-08-11
JP4029182B2 JP4029182B2 (ja) 2008-01-09

Family

ID=18259456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33284696A Expired - Lifetime JP4029182B2 (ja) 1996-11-28 1996-11-28 露光方法

Country Status (1)

Country Link
JP (1) JP4029182B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8902401B2 (en) 2006-05-09 2014-12-02 Carl Zeiss Smt Gmbh Optical imaging device with thermal attenuation

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