JPH10176902A5 - - Google Patents

Info

Publication number
JPH10176902A5
JPH10176902A5 JP1996336986A JP33698696A JPH10176902A5 JP H10176902 A5 JPH10176902 A5 JP H10176902A5 JP 1996336986 A JP1996336986 A JP 1996336986A JP 33698696 A JP33698696 A JP 33698696A JP H10176902 A5 JPH10176902 A5 JP H10176902A5
Authority
JP
Japan
Prior art keywords
styluses
vibration
attached
detection elements
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996336986A
Other languages
Japanese (ja)
Other versions
JP3650496B2 (en
JPH10176902A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP33698696A priority Critical patent/JP3650496B2/en
Priority claimed from JP33698696A external-priority patent/JP3650496B2/en
Publication of JPH10176902A publication Critical patent/JPH10176902A/en
Publication of JPH10176902A5 publication Critical patent/JPH10176902A5/ja
Application granted granted Critical
Publication of JP3650496B2 publication Critical patent/JP3650496B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【0034】
次に、本発明の第5実施形態を図7から図9に基づいて説明する。
第5実施形態は第実施形態に比べて圧電素子の構造が相違するもので、他の構造は第実施形態と同じである。
図7には本発明の第5実施形態にかかるタッチ信号プローブの全体構成が示されている。
図7において、第5実施形態のタッチ信号プローブは、前記支持ピン1と、この支持ピン1の先端部に取り付けられた取付体32と、この取付体32に取り付けられた前記第1及び第2のスタイラス3,4と、これらのスタイラス3,4の近傍において取付体32に取り付けられた圧電素子34とを備えた構成である。
[0034]
Next, a fifth embodiment of the present invention will be described with reference to FIGS.
The fifth embodiment differs from the second embodiment in the structure of the piezoelectric element, but the other structures are the same as those of the second embodiment.
FIG. 7 shows the overall configuration of a touch signal probe according to a fifth embodiment of the present invention.
In Figure 7, the touch signal probe of the fifth embodiment is configured to include the support pin 1, an attachment body 32 attached to the tip of the support pin 1, the first and second styluses 3 and 4 attached to the attachment body 32, and a piezoelectric element 34 attached to the attachment body 32 in the vicinity of these styluses 3 and 4.

【0039】
この構成の第5実施形態では、第1実施形態の(1)(2)(4)と同様の作用効果を奏する他に、第1の加振・検出素子34E,34Fと、第2の加振・検出素子34G,34Hとを同一圧電素子の表面電極を少なくとも4分割して構成し、かつ、取付体32のZ軸と直交する外面32Cに配置したから、スタイラス3,4が取り付けられる取付体32の外面32A,32Bに加振・検出素子を取付ける必要がないので、スタイラス3,4の太さが制限されないだけでなく、加振・検出素子を構成する圧電素子34の加工が容易となる。
[0039]
In the fifth embodiment having this configuration, in addition to achieving the same effects as those of (1), (2), and (4) of the first embodiment, the first vibration/detection elements 34E, 34F and the second vibration/detection elements 34G, 34H are formed by dividing the surface electrode of the same piezoelectric element into at least four parts, and are arranged on the outer surface 32C of the mounting body 32 that is perpendicular to the Z axis. Therefore, there is no need to attach the vibration/detection elements to the outer surfaces 32A, 32B of the mounting body 32 to which the styluses 3, 4 are attached. This not only means that there are no restrictions on the thickness of the styluses 3, 4, but also makes it easier to process the piezoelectric elements 34 that make up the vibration/detection elements.

JP33698696A 1996-12-17 1996-12-17 Touch signal probe Expired - Fee Related JP3650496B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33698696A JP3650496B2 (en) 1996-12-17 1996-12-17 Touch signal probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33698696A JP3650496B2 (en) 1996-12-17 1996-12-17 Touch signal probe

Publications (3)

Publication Number Publication Date
JPH10176902A JPH10176902A (en) 1998-06-30
JPH10176902A5 true JPH10176902A5 (en) 2004-12-02
JP3650496B2 JP3650496B2 (en) 2005-05-18

Family

ID=18304430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33698696A Expired - Fee Related JP3650496B2 (en) 1996-12-17 1996-12-17 Touch signal probe

Country Status (1)

Country Link
JP (1) JP3650496B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3197860B2 (en) 1997-12-24 2001-08-13 株式会社ミツトヨ Touch signal probe
GB2336433B (en) 1998-04-14 2002-02-06 Mitutoyo Corp Touch signal probe
US6832877B2 (en) * 2000-05-29 2004-12-21 Kabushiki Kaisya Advance Dental measuring and machining system
KR102880023B1 (en) * 2025-03-18 2025-11-10 김윤오 Gauge for measuring machining dimensions of a workpiece

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