JPH10176902A - Touch signal probe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a touch signal probe for measuring a stylus in a cross shape accurately. SOLUTION: Vibration/detection elements 5 and 6 for detecting the change in a vibration state on contacting an object to be measured by vibrating styluses 3 and 4 with a frequency that nearly matches that of a natural frequency are arranged at the styluses 3 and 4 and a mounting body 2 where outer surfaces 2A, 2B, and 2C are is nearly prism shape in parallel with X and Y axes is provided. With the styluses 3 and 4, the directions of axial lines match X and Y axes and first and second styluses 3 and 4 that are fixed symmetrically for a zero point O of the mounting body 2 are provided. The vibration/detection elements 5 and 6 are mounted to the outer surface 2A that is in parallel with the X axis of the mounting body 2, vibrate the first stylus 3, and have the first vibration/detection element 5 for detecting the vibration state and the second vibration/detection element 6 for detecting a vibration state by vibrating the second stylus 2 while being mounted to the outer surface 2B in parallel with the Y axis of the mounting body 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a touch signal probe used for measuring the shape and the like of an object to be measured by a three-dimensional measuring machine or the like, and more particularly, to a vibration sensor having a low measuring force and high sensitivity. The present invention relates to a touch signal probe.

[0002]

BACKGROUND ART A height gauge (one-dimensional measuring machine), a three-dimensional measuring machine, a contour measuring machine, and the like are known as measuring machines for measuring the shape and dimensions of an object to be measured. Coordinate detection and position in such a case are known. In order to perform the detection, a touch signal probe that detects contact with an object to be measured is used in the measuring device. The structure of a conventional vibration type touch signal probe is disclosed in Japanese Patent Laid-Open No. 6-221806. In this touch signal probe, a stylus is attached to a stylus having a contact portion at the tip and a substantially central portion in the axial direction is supported by a stylus holder, and the stylus is vibrated. This is a structure in which a piezoelectric element as a vibration / detection element for detecting a change in a vibration state due to contact is attached to a stylus.

In order to easily measure an object to be measured having various shapes such as having a horizontal hole, a T-shaped stylus structure shown in FIG. 1 is considered. That is, in FIG. 1, the touch signal probe has a substantially box-shaped piezoelectric element mounting body 82 attached to the tip of a cylindrical stylus supporting section 81, and contact portions 83 are provided at both ends of the piezoelectric element mounting body 82. The stylus 84 is mounted at right angles to the axis of the stylus support portion 81, and the piezoelectric elements 85 are mounted on both sides of the piezoelectric element mounting body 82.

A cross-shaped stylus structure shown in FIG. 2 is considered as one utilizing the touch signal probe having this structure. That is, in FIG. 2, the touch signal probe has a first piezoelectric element mounting body 82 attached to the tip of a stylus support section 81, and contact sections 83 provided at both ends of the first piezoelectric element mounting body 82. A first stylus 84 is attached, a second piezoelectric element attachment 86 is attached to the first piezoelectric element attachment 82, and a second piezoelectric element attachment 86 is provided with contact portions 83 at both ends. The stylus 87 is attached to each of them, and the piezoelectric elements 85 are attached to both side surfaces of the piezoelectric element attachments 82 and 86, respectively, so that the angle between the first stylus 84 and the second stylus 87 is made right.

[0005]

In the touch signal probe shown in FIG. 2, the first and second piezoelectric element mounting members 8 are provided.
2 and 86 are arranged side by side on the axis of the stylus support portion 81, and the first stylus 84 and the second stylus 87 attached to both ends of the attachments 82 and 86 are on the same plane. Not located. Therefore, since the coordinates of the first stylus 84 and the second stylus 87 in the axial direction of the stylus support portion 81 are different from each other, there arises a problem that an object to be measured having a complicated shape cannot be accurately measured.

An object of the present invention is to provide a touch signal probe capable of performing high-accuracy measurement when a stylus is formed in a cross shape.

[0007]

SUMMARY OF THE INVENTION Accordingly, the present invention is directed to a first and a second styluses extending in the X-axis and the Y-axis, respectively, which are fixed to the outer surface of a substantially prismatic mounting body made of a cube or a rectangular parallelepiped. The object is achieved by attaching a vibration / detection element to an outer surface parallel to the X-axis and the Y-axis of the body. Specifically, the touch signal probe according to the present invention has a vibration near the node of the axial natural vibration of a substantially columnar stylus having a contact portion at its tip which comes into contact with the object to be measured. In a touch signal probe in which a vibrating / detecting element for oscillating the stylus with a number and detecting a change in a vibration state due to contact when the contact portion comes into contact with an object to be measured is arranged such that the center is the X axis,
The stylus has a substantially prism-shaped mounting body that is at the origin of the Y-axis and the Z-axis and whose outer surface is parallel to the X-axis and the Y-axis, respectively. A first stylus symmetrically fixed with respect to the origin, and a second stylus whose axis direction coincides with the Y axis and symmetrically fixed with respect to the origin of the mounting body; The vibration / detection element is X
A first vibrating / detecting element mounted on an outer surface parallel to an axis and for vibrating the first stylus and detecting a vibration state thereof, and mounted on an outer surface parallel to a Y axis of the mounting body; And a second vibrating / detecting element for vibrating the second stylus and detecting a vibration state thereof.

[0008] The touch signal probe of the present invention is moved for measurement. When the contact portion of the stylus vibrated by the vibration / detection element contacts the object to be measured, the vibration of the stylus is restrained, and a change in the vibration state is detected by the vibration / detection element. In the present invention, even if the measured object has a complicated shape,
Since the stylus is formed in a cross shape by combining the first and second styluses, the position of the stylus can be reliably read by bringing the predetermined stylus into contact with the object to be measured.

That is, these styluses are formed to extend from the origin of the mounting body to the X axis and the Y axis, respectively.
Since all the contact portions are located on substantially the same plane, the measurement can be performed with high accuracy. Furthermore, because the stylus is attached to the outer surface of the attachment,
The structure of the touch signal probe can be simplified.

Here, in the present invention, the mounting body may be formed in a substantially rectangular parallelepiped shape. With this structure, a space for mounting the vibration / detection element can be secured, and the force for vibrating the stylus can be increased. Also, in the present invention, the first
The natural frequency of the stylus may be different from the natural frequency of the second stylus. Here, that the natural frequencies are different means that the first stylus and the second stylus do not resonate. With this structure, the problem of circuit interference in the detection circuit connected to the detection element can be avoided.

Further, according to the present invention, the first vibrating / detecting element is disposed to face each other with the second stylus interposed therebetween, and the second vibrating / detecting element is provided with the first stylus. A structure in which they are arranged to be opposed to each other may be used. In this structure, the excitation force applied to the first or second stylus is made uniform across the second or first stylus, so that highly accurate measurement can be performed.

In the present invention, the first vibrating / detecting element and the second vibrating / detecting element are configured by dividing a surface electrode of the same piezoelectric element into at least four parts. The structure may be arranged on the outer surface orthogonal to the Z axis of the mounting body. With this structure, there is no need to attach a vibration / detection element to the outer surface of the mounting body on which the stylus is mounted.
Not only is the stylus mounting area relative to the outer surface area of the mounting body, in other words, the thickness of the stylus not limited,
Processing of the excitation / detection element is facilitated.

[0013]

Embodiments of the present invention will be described below in detail with reference to the drawings. Here, in each embodiment, the same components are denoted by the same reference numerals, and description thereof is omitted. FIG. 3 shows the entire configuration of the touch signal probe according to the first embodiment of the present invention.

In FIG. 3, a touch signal probe includes a substantially cylindrical support pin 1 attached to a moving shaft of a three-dimensional measuring machine (not shown), and a substantially cubic attachment attached to the tip of the support pin 1. Body 2, first and second styluses 3 and 4 attached two each with the attachment body 2 interposed therebetween, and first and second styluses attached to the attachment body 2 near these styluses 3 and 4. And two piezoelectric elements 5 and 6, which are vibration / detection elements.
The mounting body 2 has a substantially prismatic shape whose center is located at the origin O of the X axis, Y axis and Z axis, and whose outer surfaces 2A, 2B and 2C are parallel to planes orthogonal to the X axis, Y axis and Z axis, respectively. The support pin 1 is disposed on one of the outer surfaces 2C facing each other, extending in the Z-axis.

The first stylus 3 is arranged so that its axis extends in the X-axis, and one end thereof (near the node of the natural frequency in the axial direction) is fixed to the outer surface 2A of the mounting body 2 in a substantially cylindrical shape. And a substantially spherical contact portion 3B fixed to the other end of the main body 3A and in contact with an object to be measured (not shown). The second stylus 4 is arranged such that its axis extends in the Y-axis, and one end thereof (near a node of the natural frequency in the axial direction) is fixed to the outer surface 2B of the mounting body 2 in a substantially cylindrical body 4A. And a substantially spherical contact portion 4B fixed to the other end of the main body 4A and in contact with an object to be measured (not shown).

Each of the first stylus 3 and the second stylus 4 has a symmetric structure with respect to the origin O. Further, the first stylus 3 and the second stylus 4 have slightly different natural frequencies due to different length dimensions or different materials so that they do not resonate with each other.

The first piezoelectric element 5 has a flat rectangular shape whose longitudinal direction is parallel to the X-axis, and is fixed on the outer surface 2B of the mounting body 2 by two pieces, for example, four pieces in total. The first piezoelectric element 5 includes a vibrating electrode 5A that vibrates the first stylus 3 at a frequency substantially equal to the natural frequency of the first stylus 3, and a contact portion 3B that contacts the DUT. And a detection electrode 5B for detecting a change in the vibration state due to the contact at the time of contact, and are arranged to face each other with the second stylus 4 on the outer surface 2B interposed therebetween.

The second piezoelectric elements 6 have a flat rectangular shape whose longitudinal direction is parallel to the Y axis, and are fixed on the outer surface 2A of the mounting body 2 by bonding two by two, for example. The second piezoelectric element 6 includes a vibrating electrode 6A that vibrates the second stylus 4 at a frequency substantially equal to the natural frequency of the second stylus 4, and a contact portion 4B that comes into contact with the DUT. And a detection electrode 6B for detecting a change in the vibration state due to the contact when the first stylus 3 is provided on the outer surface 2A.

The electrodes 5A, 5B, 6A and 6B are connected to a drive circuit and a detection circuit disclosed in Japanese Patent Application Laid-Open No. 6-221806, and a signal processing circuit is connected to the detection circuit. In the first embodiment, one piezoelectric element 5, 6
Is not divided into the vibrating electrodes 5A, 6A and the detecting electrodes 5B, 6B, but one of the piezoelectric elements 5, 6 opposed to each other with the stylus 3, 4 interposed therebetween is dedicated to vibrating, and the other A structure in which the elements 5 and 6 are dedicated to detection may be used.

In the first embodiment having this configuration, the measurement is performed by moving the touch signal probe. For this purpose, the first and second piezoelectric elements 5 and 6 are energized and the excitation electrodes 5A and 6A are applied.
Vibrates the first and second styli 3, 4. When the contact portions 3B and 4B of the styluses 3 and 4 vibrated by the vibrating electrodes 5A and 6A come into contact with an object to be measured, the vibrations of the styluses 3 and 4 are restrained, and a change in the vibration state is a detection element. It is detected by the detection electrodes 5B and 6B.

Therefore, in the first embodiment, the styluses 3 and 4 are applied to the substantially columnar styluses 3 and 4 having the contact portions 3B and 4B at the tip thereof at a frequency substantially equal to the frequency of these natural vibrations. In addition, in a touch signal probe in which vibrating / detecting elements 5 and 6 for detecting a change in a vibration state caused by the contact when the contact portions 3B and 4B come into contact with an object to be measured, the center is the X-axis, the Y-axis and The outer surfaces 2A, 2B, and 2C are provided with a substantially prism-shaped mounting body 2 which is located at the origin O of the Z axis and is parallel to the X axis and the Y axis, respectively.
It has a first stylus 3 and a second stylus 4 whose axis directions respectively match the X axis and the Y axis and are symmetrically fixed with respect to the origin O of the mounting body 2. , 6 are attached to an outer surface 2 </ b> A parallel to the X-axis of the attachment 2, and vibrate the first stylus 3 to detect a vibration state of the first stylus 3; 2
And a second vibrating / detecting element 6 that vibrates the second stylus 4 and detects its vibration state. The second styluses 3 and 4 extend from the origin O of the mounting body 2 in the X axis and the Y axis, respectively, and are formed in a cross shape, so that all the contact portions 3B and 4B are located in substantially the same plane. Therefore, even if the object to be measured has a complicated shape, the position of the object can be reliably read by bringing the predetermined stylus 3 or 4 into contact with the object to be measured. Further, since the styluses 3 and 4 are attached to the outer surfaces 2A and 2B of the attachment 2, the structure of the touch signal probe can be simplified.

In the first embodiment, the first and second vibrating / detecting elements 5 and 6 are arranged near the nodes of the natural vibrations of the styluses 3 and 4 in the axial direction. The resonance characteristics and the detection sensitivity of are improved, and measurement with a low measuring force becomes possible. Further, in the first embodiment, the first
Since the natural frequency of the stylus 3 and the natural frequency of the second stylus 4 are slightly different from each other, it is possible to avoid the problem of circuit interference in the detection circuits connected to the detection electrodes 5B and 6B. That is, the first and second styluses 3 and 4 are respectively attached to the outer surfaces 2
A, 2B, strictly speaking, in one direction (for example, X
Since the extension in the axial direction is accompanied by the contraction in the other direction (for example, the Y-axis direction), the first and second styluses 3 and 4 may interfere with each other. However, in the first embodiment, the natural frequencies of the styluses 3 and 4 are different, so that accurate measurement can be performed without interference on the circuit.

Further, two first vibration / detection elements 5
Are arranged to face each other with the second stylus 4 interposed therebetween,
The two second vibration / detection elements 6 include the first stylus 3
, The vibrating force generated in the first or second stylus 3, 4 is equalized across the second or first stylus 4, 3. The measurement can be performed with high accuracy.

Next, a second embodiment of the present invention will be described with reference to FIG. The second embodiment is different from the first embodiment in the mounting positions of the piezoelectric elements 5 and 6, and the other structure is the same as the first embodiment. FIG. 4 shows the entire configuration of a touch signal probe according to the second embodiment of the present invention. In FIG. 4, the touch signal probe according to the second embodiment includes the support pin 1, the attachment 2, the first and second styluses 3, 4, and the first and second piezoelectric elements 5, 6. Unlike the first embodiment, these first and second piezoelectric elements 5 and 6 are mounted on the outer surface 2C of the mounting body.

That is, two first piezoelectric elements 5 are arranged at the edges of the outer surfaces 2C of the mounting body 2 facing each other such that the longitudinal direction thereof coincides with the X-axis direction. The elements 6 are arranged two by two on the edge of the outer surface 2C so that the longitudinal direction thereof coincides with the Y-axis direction. The outer surface 2
Piezoelectric elements 5 and 6 are arranged so as to surround the support pin 1 on the outer surface 2C of the C where the support pin 1 is attached. In the second embodiment having this configuration, the components of the first embodiment will be described.
In addition to having the same function and effect as described above, the first and second piezoelectric elements 5 and 6 are mounted on the outer surface 2C other than the outer surfaces 2A and 2B of the mounting body 2 on which the styluses 3 and 4 are mounted. The mounting area of the styluses 3, 4 with respect to the area of the outer surfaces 2A, 2B of the mounting body 2, in other words, the thickness of the stylus is not limited.

Next, a third embodiment of the present invention will be described with reference to FIG. The third embodiment is different from the first embodiment in the shape of the mounting body, and the other structure is the same as the first embodiment. FIG. 5 shows an overall configuration of a touch signal probe according to a third embodiment of the present invention. In FIG. 5, the touch signal probe according to the third embodiment includes the support pin 1, a substantially rectangular parallelepiped attachment body 12 attached to a tip end of the support pin 1, and the second attachment body 12 attached to the attachment body 12. The configuration includes a first and a second stylus 3, 4 and the first and the second piezoelectric elements 5, 6 attached to the attachment body 12 in the vicinity of the stylus 3, 4.

The mounting body 12 has its center at the origin O of the X, Y, and Z axes, and its outer surfaces 12A, 12B, 2C
The support pin 1 extends in the Z-axis on one of the square outer surfaces 2C opposed to each other, and is substantially parallel to a plane orthogonal to the axis, the Y-axis, and the Z-axis. It is arranged. Also, the outer surfaces 1 adjacent to each other
The planes of 2A and 12B are rectangles whose dimension in the Z-axis direction is longer than the X-axis direction or the Y-axis direction.

The first stylus 3 has one end (near the node of the natural frequency in the axial direction) fixed to the outer surface 12A of the mounting body 12, and the second stylus 4 has one end (the axial specific frequency). The vicinity of the node of the frequency) is fixed to the outer surface 12 </ b> B of the mounting body 12. The first piezoelectric elements 5 are fixed on the outer surface 12B of the attachment body 12 by bonding or the like, two by two with the second stylus 4 interposed therebetween (only two are shown in the figure). The second piezoelectric elements 6 are fixed on the outer surface 12A of the attachment body 12 by bonding or the like, two by two with the first stylus 3 interposed therebetween (only two are shown in the figure).

In the third embodiment having this configuration, in addition to having the same operation and effect as those of the first embodiment, the mounting member 12
Is formed in a substantially rectangular parallelepiped shape, so that a space for mounting the piezoelectric elements 5 and 6 serving as the vibrating / detecting elements can be secured and the force for vibrating the styluses 3 and 4 can be increased. Therefore, the measurement accuracy can be improved by vibrating the stylus with a large force and reliably detecting the vibration. In the third embodiment, a structure may be used in which the X-axis dimension and the Y-axis dimension of the outer surfaces 12A and 12B adjacent to each other of the attachment body 12 are different. In this structure, the natural frequencies of the first stylus 3 and the second stylus 4 attached to these outer surfaces 12A and 12B can be changed.

Next, a fourth embodiment of the present invention will be described with reference to FIG. The fourth embodiment is different from the first embodiment in the shape of the mounting body, and the other structure is the same as the first embodiment. FIG. 6 shows an overall configuration of a touch signal probe according to a fourth embodiment of the present invention. In FIG. 6, the touch signal probe according to the fourth embodiment includes the support pin 1, a substantially cubic attachment 22 attached to a tip end of the support pin 1, and the second attachment 22 attached to the attachment 22. The configuration includes first and second styluses 3 and 4 and the first and second piezoelectric elements 5 and 6 attached to the attachment body 22 near these styluses 3 and 4.

The mounting body 22 has a substantially prismatic shape whose center is located at the origin O of the X axis, Y axis and Z axis and whose outer surfaces 22A, 22B and 22C are parallel to planes orthogonal to the X axis, Y axis and Z axis, respectively. And the outer surfaces 22 facing each other.
A hole 22D for attaching the support pin 1 is formed on one outer surface 22C of C. First stylus 3
Has one end (near the node of the axial natural frequency) fixed to the outer surface 22A of the mounting body 22, and the second stylus 4 has one end (near the node of the axial natural frequency) attached thereto. It is fixed to the outer surface 22B of the body 22. A notch 22E is formed between the outer surface 22A and the outer surface 22C adjacent to each other with the first stylus 3 interposed therebetween, and the notch 22E is formed between the outer surface 22B and the outer surface 22C adjacent to each other with the second stylus 4 interposed therebetween. A notch 22E is formed.

The first piezoelectric element 5 has two ends (one in the figure) on the outer surface 22B of the mounting body 22 in total, one at each end (1 in the figure).
(Only one is shown) is fixed by bonding or the like, and a space is formed between the center rear surface and the cut 22E. These first piezoelectric elements 5 are opposed to each other with the origin O as a center. The second piezoelectric element 6 has two ends fixed to each other on the outer surface 22A of the mounting body 22 by bonding or the like, and a space is formed between the center rear surface and the cutout 22E. ing. In the fourth embodiment,
The number of the piezoelectric elements 5 and 6 attached to the attachment 22 is determined as appropriate. For example, as in the first to third embodiments,
The total number may be eight.

In the fourth embodiment having the above-described structure, the same effects as those of the first embodiment can be obtained.
Since the notch 22E is formed in the mounting member 22, a space is formed between the bottom surfaces of the central portions of the piezoelectric elements 5 and 6 and the mounting body 22.
The efficiency of converting the electric energy of the piezoelectric elements 5 and 6 into mechanical energy can be improved.

Next, a fifth embodiment of the present invention will be described with reference to FIGS. The fifth embodiment is different from the first embodiment in the structure of the piezoelectric element, and the other structures are the same as the first embodiment. FIG. 7 shows an overall configuration of a touch signal probe according to a fifth embodiment of the present invention. In FIG. 7, the touch signal probe according to the fifth embodiment includes the support pin 1, an attachment 32 attached to the tip of the support pin 1, and the first and second attachments attached to the attachment 32. And the piezoelectric elements 34 attached to the attachment body 32 in the vicinity of the styluses 3 and 4.

The mounting body 32 has a substantially rectangular parallelepiped shape in which the dimension in the Z-axis direction is shorter than the dimension in the XY-axis direction, and the dimension in the X-axis direction is equal to the dimension in the Y-axis direction.
The support pin 1 is attached to one outer surface 32C of the 2C. The first stylus 3 has one end (near the node of the natural frequency in the axial direction) fixed to the outer surface 32A of the mounting body 32, and the second stylus 4 has one end (in the vicinity of the natural frequency in the axial direction). (Near the node) is fixed to the outer surface 32 </ b> B of the mounting body 32. The piezoelectric element 34 is fixed to the outer surface 32C to which the support pin 1 is attached by adhesive or the like, and is formed in a substantially flat plate shape having a hole 34A at the center thereof for avoiding interference with the support pin 1. .

The front surface electrode of the piezoelectric element 34 is divided into at least four parts, and the back surface is a common electrode. The manner in which the piezoelectric element 34 is divided is shown in FIGS. In FIG. 8, a piezoelectric element 34 is configured such that a vibration electrode and a detection electrode are divided into a positive direction and a negative direction of each axis, and the vibration electrode and the detection electrode are arranged along the X axis. The first stylus 3 is vibrated by the detection electrode 34A and the detection electrode 34B, and a first vibration / detection element for detecting the vibration state is configured, and the vibration electrode 34C arranged along the Y axis is formed. And the detection electrode 34D, the second stylus 4
And a second vibrating / detecting element for detecting the vibration state.

In FIG. 9, a vibrating electrode and a detecting electrode are formed in the positive and negative directions of each axis, respectively.
Among them, two vibration electrodes 3 arranged along the X axis
4E and two detection electrodes 34F, the first stylus 3
And a first vibrating / detecting element for detecting the vibration state is configured, and the two vibrating electrodes 34G and the two detecting electrodes 34H arranged along the Y axis constitute the first vibrating / detecting element. Second
And a second vibrating / detecting element configured to vibrate the stylus 4 and detect its vibration state. The excitation electrodes 34E and 34G are radially arranged with the origin O interposed therebetween, and the detection electrodes 34F and 34H are
E and 34G are located on the origin O side. The excitation electrodes 34F and 34H or the detection electrodes 34F and 34H
In the case where the lead wires are provided at different positions, the lead wires may be connected in parallel in each axial direction.

In the fifth embodiment, the piezoelectric elements 34 may be attached to both of the outer surfaces 32C of the attachment 32 facing each other. In this case, the shapes of the piezoelectric elements 34 may be the same or may be different. However, it is preferable that the shape of the piezoelectric element 34 be the same, since the number of parts is reduced.

In the fifth embodiment having this configuration, in addition to having the same functions and effects as those of the first embodiment, the first excitation / detection elements 34E and 34F and the second excitation / detection element 3
4G and 34H are formed by dividing the surface electrode of the same piezoelectric element into at least four parts and are arranged on the outer surface 32C orthogonal to the Z axis of the mounting body 32, so that the outer surface of the mounting body 32 to which the styluses 3 and 4 are mounted. Since there is no need to attach vibration / detection elements to 32A and 32B, not only are the thicknesses of the styluses 3 and 4 not limited, but also the processing of the piezoelectric element 34 constituting the vibration / detection elements is facilitated.

The present invention is not limited to the above embodiments, but includes the following modifications as long as the objects of the present invention can be achieved. For example, in each of the above embodiments, the piezoelectric element 5,
Although 6, 34 are used, the present invention is not limited to this, and other actuators may be used.

Further, the ultrasonic resonance type touch sensor disclosed in Japanese Patent Application Laid-Open No. 6-221806 is applied, but the present invention is not limited to this. For example, a piezoelectric sensor disclosed in Japanese Patent Application Laid-Open No. 64-69910 is applied. May be used, or Japanese Unexamined Patent Publication No.
The present invention may be applied to a sensor described in No. 34311 (a sensor that detects contact from the capacitance between an object to be measured and a measuring ball). Further, the natural frequency of the first stylus 3 and the natural frequency of the second stylus 4 may be the same.

[0042]

As described above, according to the present invention, the stylus is vibrated to a substantially columnar stylus having a contact portion at the tip thereof at a frequency substantially equal to the frequency of these natural vibrations, and the contact portion is formed. A vibrating / detecting element that detects a change in the vibration state due to the contact with the object under test is placed. The center is at the origin of the X, Y, and Z axes, and the outer surface is at the X and Y axes. Each of the styluses includes a parallel, substantially prism-shaped mounting body, and the stylus has a first stylus and a second stylus whose axial directions coincide with the X axis and the Y axis, respectively, and which are symmetrically fixed to the origin of the mounting body. A stylus, wherein the vibrating / detecting element is mounted on an outer surface parallel to the X-axis of the mounting body, and vibrates the first stylus to detect a vibration state.・ Install the detector element on the outer surface parallel to the Y axis of the And a second vibrating / detecting element that vibrates the second stylus and detects its vibration state, so that the first and second styluses are moved from the origin of the mounting body. It extends in the X-axis and the Y-axis, respectively, is formed in a cross shape, and all the contact portions are located in substantially the same plane. Even if the object to be measured has a complicated shape, the predetermined stylus can be measured. By contacting the object, the position can be reliably read.

[Brief description of the drawings]

FIG. 1 is a perspective view of a touch signal probe on which the present invention is proposed.

FIG. 2 is a perspective view of a touch signal probe different from FIG. 1 on which the present invention is proposed.

FIG. 3 is a perspective view of the touch signal probe according to the first embodiment of the present invention.

FIG. 4 is a perspective view of a touch signal probe according to a second embodiment of the present invention.

FIG. 5 is a perspective view of a touch signal probe according to a third embodiment of the present invention.

FIG. 6 is a perspective view of a touch signal probe according to a fourth embodiment of the present invention.

FIG. 7 is a perspective view of a touch signal probe according to a fifth embodiment of the present invention.

FIG. 8 is a plan view showing a vibration / detection element used in a touch signal probe according to a fifth embodiment.

FIG. 9 shows a vibration / detection element used in the touch signal probe of the fifth embodiment, which has a structure different from that of FIG.
FIG. 3 is a plan view showing a detection element.

[Explanation of symbols]

 2, 12, 22, 42 Mounting body 3 First stylus 4 Second stylus 3B, 4B Contact portion 5, 34A, 34B, 34E, 34F First vibration / detection element 6, 34C, 34D, 34G, 34H Second vibration / detection element

Claims (5)

[Claims] 1. A vibrating stylus having a vibration frequency substantially equal to the amplitude of the natural vibration, near a node of the natural vibration in the axial direction of a substantially columnar stylus having a contact portion at its tip for contacting an object to be measured. A touch signal probe in which a vibrating / detecting element for detecting a change in a vibration state due to the contact when the contact portion comes into contact with the object to be measured is located at the center of the X-axis,
The stylus has a substantially prism-shaped mounting body that is at the origin of the Y-axis and the Z-axis and whose outer surface is parallel to the X-axis and the Y-axis, respectively. A first stylus symmetrically fixed with respect to the origin, and a second stylus whose axis direction coincides with the Y axis and symmetrically fixed with respect to the origin of the mounting body; The vibration / detection element is X
A first vibrating / detecting element mounted on an outer surface parallel to an axis and for vibrating the first stylus and detecting a vibration state thereof, and mounted on an outer surface parallel to a Y axis of the mounting body; And a second vibrating / detecting element for vibrating the second stylus and detecting a vibration state of the second stylus. 2. The touch signal probe according to claim 1, wherein the mounting body is substantially rectangular parallelepiped. 3. The touch signal probe according to claim 1, wherein a natural frequency of the first stylus is different from a natural frequency of the second stylus. . 4. The touch signal probe according to claim 1, wherein the first vibration / detection element comprises:
A touch signal probe, wherein the touch signal probe is disposed so as to face the second stylus, and the second vibrating / detecting element is faced to face the first stylus. 5. The touch signal probe according to claim 1, wherein said first excitation / detection element comprises:
The second excitation / detection element is configured by dividing a surface electrode of the same piezoelectric element into at least four parts, and is disposed on an outer surface orthogonal to the Z axis of the mounting body. probe.