JPH10183346A - Continuous vacuum deposition equipment - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To efficiently collect ineffective deposits. SOLUTION: A strip-shaped substrate running continuously, a crucible containing a dissolved evaporation material, an evaporation material supply device for supplying the evaporation material to the crucible, and the substrate and the crucible are built in and evacuated to a vacuum. A continuous vacuum vapor deposition apparatus comprising a vacuum chamber, wherein the vaporized material in the crucible is heated and vaporized and the vaporized vaporized material is vapor-deposited on the surface of the substrate, wherein the vaporized material supply device has the vaporized material formed in a sheet shape. The sheet is suspended from the side of the substrate toward the side of the crucible, and is fed from the lower end into the crucible, and the ineffective deposition material dissipated to the side of the substrate is attached to the sheet. To recover.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a continuous vacuum vapor deposition apparatus, and more particularly to a vapor-deposited material evaporated from a crucible on a surface of a strip-shaped substrate such as a continuously running steel plate to form a film. The present invention relates to a continuous vacuum evaporation apparatus.

[0002]

2. Description of the Related Art Vacuum deposition is a film forming process in which a vaporized material is heated and evaporated in a vacuum, and the vaporized material is deposited on the surface of a substrate to form a film. In this film forming process, there is a continuous vacuum vapor deposition apparatus that vaporizes the vaporized material on the surface of a continuous belt-shaped substrate using an electron beam or electric resistance heating to heat the vaporized material. In addition, as an evaporating material used in this continuous vacuum evaporation apparatus, usually, it is supplied into a vacuum chamber in the form of an elongated wire.

As a continuous vacuum evaporation apparatus using such an electron beam, for example, there is one disclosed in Japanese Patent Application Laid-Open No. Hei 6-73543. As shown in FIG. 4, an electron gun c for emitting an electron beam d, A crucible b containing the dissolved film deposition material g; and a vacuum chamber h evacuated by an exhaust device (not shown), emits an electron beam d by an electron gun c, and emits an electron beam by a magnetic field generated by a deflection electromagnet (not shown). The vapor deposition material g of the crucible b in which the direction of d is bent is heated to evaporate, and the vaporization material g is vapor deposited on the surface of the strip-shaped substrate a running continuously in the direction perpendicular to the plane of the drawing to form a film. It has become.

[0004] A shielding plate e is provided around the crucible b as an ineffective deposit preventing device so as to surround the crucible b so that the ineffective deposit i is prevented from diffusing out of the range of the substrate a. f denotes a heater such as an electric resistance heater disposed on the outer surface of the shielding plate e. The ineffective deposition material k is melted because the shielding plate e is at a high temperature, flows down along the surface, and returns to the crucible b. As the evaporation material g, for example, zinc (Zn) or tin (Sn) is used.

Another example of a device for preventing the deposition of an ineffective deposit is a device in which a film is wound around the inner surface of the wall of a vacuum chamber to prevent the deposition of the ineffective deposit on the wall of the vacuum chamber. is there.

[0006]

However, according to the continuous vacuum vapor deposition apparatus described above, the shielding plate is provided around the crucible. However, when the evaporation material is a low melting point material such as zinc or tin, there is a problem. However, in the case of a material having a high melting point such as nickel, titanium or copper, the material adheres to the shielding plate without being melted and dropped, and this proceeds, and the shielding plate becomes heavy and poses a problem in the strength of the support structure. Further, there is a problem that the mass of the adhered material is peeled off and falls into a crucible. In addition, when a panel provided with a heater is used, electric power of the heater for re-dissolving the ineffective deposit is required, which causes an increase in cost. In addition, when the ineffective deposited material is not melted on the shielding plate e, there is a problem that it takes time to collect the ineffective deposited material and the collection efficiency is poor. When a film is wound on the inner surface of the wall of the vacuum chamber, it is effective in preventing contamination in the vacuum chamber, but there is a problem that the cost of the evaporating material is increased because the ineffective deposited material cannot be collected.

The present invention has been made to solve the above problems. That is, according to the present invention, the evaporative material is formed into a sheet, and the ineffective evaporant discharged to the side of the substrate is collected by attaching to the inner surface of the evaporative material sheet fed to the crucible, and is integrated with the ineffective evaporant It is an object of the present invention to provide a continuous vacuum vapor deposition apparatus that can reduce the cost of collecting ineffective vapors by returning the evaporated material to the crucible, thereby improving the productivity.

[0008]

According to the present invention, there is provided a belt-shaped substrate which runs continuously.
A crucible that contains the dissolved evaporation material, an evaporation material supply device that supplies the evaporation material to the crucible, and a vacuum chamber that contains the substrate and the crucible and is evacuated to a vacuum, and heats and evaporates the evaporation material in the crucible. In a continuous vacuum evaporation apparatus for evaporating and evaporating the evaporated material on the surface of the substrate, the evaporative material supply device is configured such that the evaporated material is formed in a sheet shape, and the sheet is placed on the side of the crucible from the side of the substrate. It is configured so that it is suspended and fed from the lower end into the crucible,
A continuous vacuum vapor deposition apparatus is provided, wherein the ineffective vapor deposited on the side of the substrate is attached to the sheet and collected.

According to a preferred embodiment of the present invention, the crucible is heated by an electron beam, and has an evaporating material sheet suspended in three directions except for the path of the electron beam.

[0010] According to another preferred embodiment of the present invention, the crucible is heated by electric resistance, and the evaporation material sheet is suspended around the crucible in four directions.

According to the configuration of the present invention, the evaporating material is formed into a sheet, and the evaporating material sheet is suspended from the side of the substrate toward the side of the crucible and fed into the crucible from the lower end. In this way, the ineffective deposits radiated to the side of the substrate are attached to the evaporative material sheet and collected, so that the evaporative material can be used as an ineffective deposit preventing plate, and other than the substrate. It is possible to prevent the evaporation material from adhering. In addition, the collection of the ineffective deposit can be performed simultaneously and continuously with the supply of the evaporation material to the crucible.

[0012]

Preferred embodiments of the present invention will be described below with reference to the drawings. 1 and 2 show an embodiment of the present invention. FIG. 1 is a front sectional view of a continuous vacuum evaporation apparatus according to the present invention, and FIG. 2 is a side sectional view.

In FIG. 1 and FIG. 2, reference numeral 1 denotes a strip-shaped substrate that runs continuously, and reference numeral 2 denotes a crucible that contains dissolved evaporated material. An electron gun 3 emits an electron beam 4. Reference numeral 5 denotes an evaporating material which is supplied into the crucible 2 by the evaporating material supply device 9 and is heated by the irradiation of the electron beam 3 to evaporate. As the evaporation material 5, for example, aluminum (Al) or aluminum manganese is used. Reference numeral 6 denotes a vacuum chamber which houses the substrate 1 and the crucible 2 and is evacuated to 10 ^-3 to 10 ^-5 Torr by an exhaust device (not shown). Reference numeral 7 denotes a sheet-shaped evaporating material, which is wound up to form a roll 7a before melting, and is rotatably supported by a roll support member 11. The evaporating material sheet 7 is pulled out from the roll 7a by the evaporating material supply device 9 and suspended toward the side of the crucible 2 via an intermediate roller 8a provided on the side of the substrate 1, and the lower end thereof is crucible 2 And is configured to be fed into the crucible 2 from the lower end. Evaporation material supply device 9
Is composed of two rollers 8, 9a and a roller rotation driving device (not shown). The evaporating material sheet 7 is nipped by these two rollers 8, 9a,
a is driven to rotate and the evaporation material sheet 7 is pulled out. Numeral 10 denotes an ineffective deposit adhering to the inner surface of the evaporation material 7. Reference numeral 12 denotes a roller protection plate provided so as to cover the roller 8. 7A is an evaporative material sheet suspended on the right side of the crucible 2 shown in FIG. 1, 7B is an evaporative material sheet suspended on the left side of the crucible 2 shown in FIG. 1, 7C is a right side of the crucible 2 shown in FIG. The evaporating material sheet is suspended on the front side (in the forward direction), and the evaporating material sheets 7A, 7B, and 7C surround three sides except the side where the electron beam 3 is provided. Reference numeral 13 denotes a support for the crucible 2.

Next, the operation of the present embodiment will be described.
The evaporating material sheet 7 is moved to the crucible 2 by the evaporating material supply device 9.
And the evaporating material 5 is heated and evaporated by the radiation of the electron beam 3, and the strip-shaped substrate 1 is continuously driven to evaporate the material 5.
To form a film by vapor deposition on the surface of The invalid vapor deposition material 10 generated during the continuous vacuum vapor deposition operation is attached to the evaporation material sheet 7 disposed so as to surround the crucible 2 from three directions except for the path of the electron beam 3, and the crucible 2. It is collected by being fed integrally with the evaporating material sheet 7 to the container. When the evaporation material sheet 7 to which the ineffective deposits 10 are attached is fed to the crucible 2, the crucible 2 is surrounded by the newly drawn evaporation material sheet 7. In this way, a continuous vacuum deposition operation is performed while continuously or intermittently feeding the evaporation material sheet 7 to which the ineffective deposition material 10 has adhered to the crucible 2. As described above, since the ineffective deposited material 10 is attached to the evaporation material sheet 7 and is fed to the crucible 2 integrated with the evaporating material sheet 7, the ineffective deposited material 10 can be efficiently collected, and Cost can be reduced. In addition, contamination by the ineffective deposit 10 in the vacuum chamber 6 can be minimized, and maintenance cost can be reduced.

The present invention is not limited to the above embodiment. For example, the evaporation material supply device may be provided outside the vacuum chamber without being provided in the vacuum chamber. Further, when heating the crucible by electric resistance, it is not necessary to keep a beam path open, so that the evaporation material sheet may be suspended so as to surround the crucible from four directions. Thus, various changes can be made without departing from the spirit of the present invention.

[0016]

As described above, according to the present invention, the evaporating material is formed into a sheet, and the evaporating material sheet is suspended from the side of the substrate toward the side of the crucible to be ineffective for the evaporating material sheet. Since the evaporation material is attached and the evaporation material sheet integrated with the ineffective evaporation material is fed into the crucible from the lower end, the ineffective evaporation material can be efficiently collected, and the cost of the evaporation material can be reduced. . Further, it is possible to minimize the contamination due to the ineffective deposits in the vacuum chamber, to reduce the maintenance cost, and to achieve excellent effects such as improvement in productivity.

[Brief description of the drawings]

FIG. 1 is a front sectional view showing one embodiment of a continuous vacuum evaporation apparatus of the present invention.

FIG. 2 is a side sectional view of FIG.

FIG. 3 is an overall configuration diagram showing a conventional continuous vacuum evaporation apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate 2 Crucible 3 Electron gun 4 Electron beam 5 Evaporation material 6 Vacuum chamber 7 Evaporation material sheet 7a Roll 8, 8a, 9a Roller 9 Evaporation material supply device 10 Invalid evaporation material 11 Evaporation material support member 12 Roller protection member 13 Crucible support stand a Substrate b Crucible c Electron gun d Electron beam e Shielding plate f Heater g Evaporation material h Vacuum chamber i Diffusion range of invalid vapor deposition k Invalid vapor deposition

Claims (3)

[Claims] 1. A strip-shaped substrate that runs continuously, a crucible that contains a dissolved evaporation material, an evaporation material supply device that supplies the evaporation material to the crucible, and a built-in substrate and crucible that is evacuated and evacuated. A continuous vacuum vapor deposition apparatus that heats and vaporizes the vaporized material in the crucible and deposits the vaporized vaporized material on the surface of the substrate, wherein the vaporized material supply device is formed in a sheet shape. The sheet is suspended from the side of the substrate toward the side of the crucible, and is fed into the crucible from the lower end, and the ineffective deposition material diffused to the side of the substrate is attached to the sheet. A continuous vacuum evaporation apparatus characterized in that it is collected by being collected. 2. The continuous vacuum evaporation apparatus according to claim 1, wherein the crucible is heated by an electron beam, and the evaporation material sheet is suspended in three directions except for a path of the electron beam. 3. The continuous vacuum vapor deposition apparatus according to claim 1, wherein the crucible is heated by electric resistance, and the evaporating material sheet is suspended around the crucible in four directions.